CN117647662A - Acceleration sensor structure and acceleration sensor - Google Patents
Acceleration sensor structure and acceleration sensor Download PDFInfo
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- CN117647662A CN117647662A CN202410122000.2A CN202410122000A CN117647662A CN 117647662 A CN117647662 A CN 117647662A CN 202410122000 A CN202410122000 A CN 202410122000A CN 117647662 A CN117647662 A CN 117647662A
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- 238000005259 measurement Methods 0.000 abstract description 9
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Abstract
The invention discloses an acceleration sensor structure and an acceleration sensor, wherein the acceleration sensor structure comprises: the movable mass block is provided with a containing groove penetrating along the thickness direction of the movable mass block; an anchor point and two groups of inertial units are arranged in the accommodating groove; for an inertial unit, the inertial unit includes at least one pair of 180 ° rotationally symmetric inertial components; the inertial component comprises a sensing structure, an elastic beam and a coupling beam; the sensing structure is connected with the anchor point through an elastic beam, and one side of the sensing structure, which is relative to the sensing axis direction, is provided with a coupling beam with the elastic direction perpendicular to the sensing axis direction; the coupling beam is connected with the movable mass block and the sensing structure; the sensing structure includes at least one capacitance for responding to acceleration in a sensing axis direction; the sensing axes of the two groups of inertial units are mutually perpendicular. The invention avoids the influence of the interference mode in the non-sensing axis direction on the movable mass block to cause the movable mass block to twist in the plane, and improves the accuracy of the measurement result and the reliability of the product.
Description
Technical Field
The invention relates to the technical field of acceleration sensors, in particular to an acceleration sensor structure and an acceleration sensor.
Background
Microelectromechanical (Micro-Electro-Mechanical Systems, MEMS) acceleration sensors are a common sensor element in microelectromechanical systems, which have been developed and evolved for nearly half a century since being proposed. Along with the gradual expansion of the application range, the acceleration sensor is widely applied to the fields of consumer electronics, automobile electronics, aerospace and the like, and the MEMS technology has the advantages of small volume, low power consumption, mass production and the like, so that more people are focusing on the MEMS acceleration sensor.
In the prior art, a single-mass dual-axis MEMS acceleration sensor is provided with a plurality of sensing elements on a single movable mass for sensing acceleration in the same direction (x-axis or y-axis direction in a plane of the movable mass), so as to increase the magnitude of an output signal.
However, the single movable mass is affected by the disturbance mode in the non-sensing axis direction in the plane of the single movable mass to generate in-plane torsion, so that the output signal is deviated, and the accuracy of the measurement result is affected.
Disclosure of Invention
The embodiment of the invention provides an acceleration sensor structure and an acceleration sensor, which are used for avoiding the influence of an interference mode in a non-sensing axis direction on a sensing structure, so that an output signal is deviated, and the reliability of a product is reduced.
In order to solve the technical problems, the embodiment of the invention discloses the following technical scheme:
in one aspect, an acceleration sensor structure is provided, including:
a substrate;
a movable mass located on one side of the substrate; the movable mass block is provided with a containing groove penetrating along the thickness direction of the movable mass block;
at least one anchor point accommodated in the accommodation groove for supporting the movable mass block;
the two groups of inertial units are accommodated in the accommodating groove; for one of the inertial units, the inertial unit includes at least one pair of inertial components that are 180 ° rotationally symmetric; the inertial component comprises a sensing structure, an elastic beam and a coupling beam; the sensing structure is connected with the anchor point through an elastic beam, and one side of the sensing structure, which is relative to the sensing axis direction, is provided with a coupling beam, the elastic direction of which is perpendicular to the sensing axis direction; the coupling beam connects the movable mass and the sensing structure; the sensing structure includes at least one capacitance for responding to acceleration in the sense axis direction;
the sensing shaft directions of the two groups of inertial units are mutually perpendicular; the movable mass block generates rotation motion in a plane of the movable mass block, and the sum of capacitance values of a pair of capacitors which are rotationally symmetrical in the same inertial unit is unchanged.
In addition to or in lieu of one or more of the features disclosed above, the movable mass has first and second axes perpendicular to each other, an intersection of the first and second axes forming an origin, the origin being a centroid of the movable mass; in the same inertial unit, the at least one pair of inertial components are 180 ° rotationally symmetric about the origin;
the movable mass block is accommodated in a first plane where the first axial direction and the second axial direction are located;
the two groups of inertial units comprise a first inertial unit and a second inertial unit;
the first inertial unit includes a pair of first inertial assemblies including a first sensing structure, a first spring beam, and a first coupling beam; the sensing axis direction of the first inertial unit is the first axial direction;
the second inertial unit includes a pair of second inertial components including a second sensing structure, a second elastic beam, and a second coupling beam; the sensing axis direction of the second inertial unit is the second axis direction.
In addition to or in lieu of one or more of the features disclosed above, in the case where the acceleration sensor structure includes four of the anchor points, the four anchor points are symmetrically disposed about the first and second axes at the origin periphery;
The four anchor points are surrounded to form a rectangular first area, two second sensing structures of the pair of second inertia components are arranged in the first area, the second elastic beams are arranged on two sides of the second sensing structures relative to a first axial direction, and the second coupling beams are arranged on two sides of the first area relative to a second axial direction; in the event of movement of the movable mass along the second axis, one of the second spring beams is stretched and the other second spring beam is compressed;
the two first sensing structures of the pair of first inertial components are respectively arranged at two sides of the first axial direction, the first elastic beams are arranged at two sides of the first sensing structures about the second axial direction, and the first coupling beams are arranged at one side, away from the first area, of the first sensing structures corresponding to the first coupling beams;
in the case of movement of the movable mass in the first axial direction, one of the first elastic beams is stretched and the other first elastic beam is compressed.
In addition to or in lieu of one or more of the features disclosed above, the first coupling beam includes a pair of first coupling sub-beams that are symmetrical about the second axis;
The second coupling beam includes a pair of second coupling sub-beams that are symmetrical about the first axis.
In addition to or in lieu of one or more of the features disclosed above, the first coupling sub-beam has a first coupling sub-beam first end and a first coupling sub-beam second end that are opposite with respect to the second axis; the first end part of the first coupling sub-beam is connected with the movable mass block, and the second end part of the first coupling sub-beam is connected with the first sensing structure;
the first spring beam having a first spring beam first end and a first spring beam second end opposite with respect to the first axis; the first end part of the first elastic beam is connected with the anchor point, and the second end part of the first elastic beam is connected with the first sensing structure;
wherein the first coupling sub-beam second end is connected with the first elastic beam second end of the first elastic beam on the same side thereof.
In addition to or in lieu of one or more of the features disclosed above, the second coupling sub-beam has a second coupling sub-beam first end and a second coupling sub-beam second end that are opposite with respect to the first axis; the first end part of the second coupling sub-beam is connected with the movable mass block, and the second end part of the second coupling sub-beam is connected with the second sensing structure;
The second spring beam having a second spring beam first end and a second spring beam second end opposite with respect to the first axial direction; the first end part of the second elastic beam is connected with the anchor point, and the second end part of the second elastic beam is connected with the second sensing structure;
wherein the second coupling sub-beam first end is connected with a second elastic beam second end of the second elastic beam on the same side.
In addition to or in lieu of one or more of the features disclosed above, the first coupling sub-beam is a beam structure that extends in a serpentine shape along the second axis;
the second coupling sub-beam is a beam structure extending in a serpentine shape along the first axial direction.
In addition to or in lieu of one or more of the features disclosed above, the first resilient beam is a beam structure extending in a serpentine shape along the first axis;
the second elastic beam is a beam structure extending in a serpentine shape along the second axis.
In addition to or in lieu of one or more of the features disclosed above, the first sensing structure includes a plurality of first movable electrodes sequentially spaced apart along a first axis, the first movable electrodes being parallel to the second axis;
For one pair of adjacent first movable electrodes, a pair of parallel first fixed electrodes are arranged between the adjacent first movable electrodes, and the first fixed electrodes are parallel to the first movable electrodes; one of the first fixed electrodes and one of the first movable electrodes adjacent to the first fixed electrode are configured as a first sub-capacitor, and the other of the first fixed electrode and the other of the first movable electrodes are configured as a second sub-capacitor; the first sub-capacitor and the second sub-capacitor are configured as differential capacitors;
and under the condition that the movable mass block moves along the first axial direction, the absolute value of the change amount of the electrode spacing of the first sub-capacitor is kept consistent with the absolute value of the change amount of the electrode spacing of the second sub-capacitor, and the absolute value of the change amount of the first sub-capacitor is kept consistent with the absolute value of the change amount of the second sub-capacitor.
In addition to or in lieu of one or more of the features disclosed above, the second detection structure includes a plurality of second movable electrodes sequentially spaced apart along a second axis, the second movable electrodes being parallel to the first axis;
for one pair of adjacent first movable electrodes, a pair of parallel second fixed electrodes are arranged between the adjacent first movable electrodes, and the second fixed electrodes are parallel to the second movable electrodes; one of the second fixed electrode and one of the first movable electrodes adjacent to the second fixed electrode are configured as a third sub-capacitor, and the other of the second fixed electrode and the other of the second movable electrodes are configured as a fourth sub-capacitor; the third sub-capacitor and the fourth sub-capacitor are configured as differential capacitors;
And under the condition that the movable mass block moves along the second axial direction, the absolute value of the change amount of the electrode spacing of the third sub-capacitor is consistent with the absolute value of the change amount of the electrode spacing of the fourth sub-capacitor, and the absolute value of the change amount of the third sub-capacitor is consistent with the absolute value of the change amount of the fourth sub-capacitor.
In another aspect, an acceleration sensor is further disclosed, comprising, in addition to or instead of one or more of the features disclosed above, an acceleration sensor structure as set forth in any one of the preceding claims, the acceleration sensor further comprising a top cover body arranged on a side of the movable mass remote from the base.
One of the above technical solutions has the following advantages or beneficial effects: the sensing structure that is arranged in the inertial component to sense acceleration is connected with the movable mass block through the coupling beam in a coupling way, the elastic direction of the coupling beam is perpendicular to the sensing axis direction of the sensing acceleration, the movable mass block can not be transmitted to the sensing structure through the coupling beam in relation to the motion beyond the non-sensing axis direction, the phenomenon that the movable mass block is twisted in the plane due to the influence of the interference mode of the non-sensing axis direction is avoided, the accuracy of the measuring result of the sensing structure is improved, and the reliability of a product is improved.
According to the method and the device, the pair of 180-degree rotationally symmetrical inertial components can offset capacitance deviation generated in the two rotationally symmetrical sensing structures due to torsion, so that the influence of torsional modes on the measuring result of the sensing structure can be avoided, and the accuracy of the measuring result is further improved.
Drawings
The technical solution and other advantageous effects of the present invention will be made apparent by the following detailed description of the specific embodiments of the present invention with reference to the accompanying drawings.
Fig. 1 is a schematic structural view of an acceleration sensor structure according to an embodiment of the present invention;
FIG. 2 is an enlarged schematic view of the structure at B in FIG. 1;
FIG. 3 is an enlarged schematic view of the structure at C in FIG. 1;
in the figure: 100-moving mass; 101-a containing groove; 200-anchor points; 201-a stop structure;
30-a first inertial unit; 300-a first inertial component; 310-a first sensing structure; 311-a first movable electrode; 312-a first hollowed-out area; 313-a first inner wall; 314-a second inner wall; 320-a first spring beam; 321-a first resilient beam first end; 322-a first resilient beam second end; 330-a first coupling beam; 331-a first coupling sub-beam; 3311—first coupling sub-beam first end; 3312—a first coupling sub-beam second end; 340-a first detection subunit; 341-a first fixed electrode; 342-a second stationary electrode; 351—a first sub-capacitance; 352-second sub-capacitance;
40-a second inertial unit; 400-a second inertial component; 410-a second sensing structure; 411-a second movable electrode; 412-a second hollowed-out area; 413-a third inner wall; 414-fourth inner wall; 420-a second spring beam; 421-second spring beam first end; 422-a second resilient beam second end; 430-a second coupling beam; 431-second coupling sub-beams; 4311-a second coupling sub-beam first end; 4312-a second coupling sub-beam second end; 440-a second detection subunit; 441—a third fixed electrode; 442-a fourth stationary electrode; 451-a third sub-capacitance; 452-fourth sub-capacitance.
Detailed Description
In order to make the objects, technical solutions and advantageous effects of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and detailed description. It should be understood that the detailed description is intended to illustrate the invention, and not to limit the invention.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more of the described features. In the description of the present invention, the meaning of "plurality" means two or more, unless specifically defined otherwise.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; the connection may be mechanical connection, direct connection or indirect connection through an intermediate medium, and may be internal connection of two elements or interaction relationship of two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present invention, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is less level than the second feature.
Referring to fig. 1, fig. 1 shows a schematic structural diagram of an acceleration sensor structure according to an embodiment of the present invention, where the acceleration sensor structure provided in an embodiment of the present application includes: a substrate (not shown), a movable mass 100, at least one anchor 200, a first inertial unit 30 and a second inertial unit 40. The movable mass block 100 is disposed at one side of the substrate, and the movable mass block 100 is provided with a receiving groove 101 penetrating along the thickness direction thereof. The anchor point 200, the first inertial unit 30 and the second inertial unit 40 are all arranged in the accommodating groove 101, the anchor point 200 is fixedly connected with the substrate, the anchor point 200 is connected with the movable mass block 100 through the first inertial unit 30 and the second inertial unit 40, and the movable mass block 100 is supported by the anchor point 200.
The acceleration sensor of the present application has a first axial direction x and a second axial direction y perpendicular and intersecting, the planes in which the first axial direction x and the second axial direction y lie being first planes, which are parallel to the base and the movable mass 100. The intersection of the first axial direction x and the second axial direction y is the origin a, which is the centroid of the movable mass 100. The first inertial unit 30 is configured to sense acceleration in a first axial x direction, and the second inertial unit 40 is configured to sense acceleration in a second axial y direction.
In the present embodiment, the acceleration sensor structure comprises four anchor points 200, the four anchor points 200 being symmetrically arranged around the origin a with respect to the first axial direction x and the second axial direction y, such that the movable mass 100 is rotated around the origin a when a torsional movement of the movable mass 100 in the first plane occurs. Four anchor points 200 enclose a first region forming a rectangle. The first inertial unit 30 includes a pair of first inertial members 300, the pair of first inertial members 300 being disposed on both sides with respect to the first axial direction x, i.e., on both upper and lower sides of the first region in the drawing, respectively, and the pair of first inertial members 300 being rotationally symmetrical with respect to the origin a180 °. The first inertial assembly 300 includes a first sensing structure 310, a pair of first elastic beams 320 having an elastic direction extending in a first axial x direction, and a first coupling beam 330 having an elastic direction extending in a second axial y direction, the pair of first elastic beams 320 being disposed on both sides of the first sensing structure 310 with respect to the second axis y, the first elastic beams 320 connecting the anchor 200 and the first sensing structure 310, and the first coupling beam 330 being disposed on one side of the first sensing structure 310 with respect to the first axial x, the first coupling beam 330 connecting the movable mass 100 and the first sensing structure 310. Wherein, the first sensing structures 310 in the pair of first inertial components 300 are also rotationally symmetric about the origin a180 °. Because the elastic direction of the first coupling beam 330 extends in the second axial y-direction, in case of an acceleration input in the first axial x-direction, the movable mass 100 is displaced in the first axial x-direction and is transferred to the first sensing structure 310 through the first coupling beam 330 such that the first sensing structure 310 moves in the first axial x-direction in the first plane. The first sensing structure 310 moves in the first axial x-direction in the first plane while the first elastic beam 320 at one side of the first sensing structure 310 is elongated and the first elastic beam 320 at the other side is compressed.
Referring to fig. 2, a plurality of first movable electrodes 311 disposed in parallel are disposed on the first sensing structure 310, and a first hollow area 312 is defined by adjacent first movable electrodes 311. In this embodiment, eight first movable electrodes 311 sequentially arranged along the first axial direction x are disposed on the first sensing structure 310 to form seven first hollowed-out areas 312 sequentially arranged along the first axial direction x. The two first movable electrodes 311 surrounding and forming the same first hollow area 312 are respectively a first inner wall 313 and a second inner wall 314 which are opposite and parallel to each other with respect to the first axial direction x and are adjacent to the side wall of the first hollow area 312. Each first hollow area 312 is provided with a first detection subunit 340, and the first detection subunit 340 includes a first fixed electrode 341 opposite to and parallel to the first inner wall 313 and a second fixed electrode 342 opposite to and parallel to the second inner wall 314. The first fixed electrode 341 and the second fixed electrode 342 are fixedly connected with the substrate, and the positions of the first fixed electrode 341 and the second fixed electrode 342 are fixed under the condition that inertial acceleration is applied to the substrate. The first fixed electrode 341 and the first inner wall 313 are configured as a first sub-capacitance 351, and the second fixed electrode 342 and the second inner wall 314 are configured as a second sub-capacitance 352. The first sub-capacitor 351 and the second sub-capacitor 352 in the same first hollow area 312 are configured as differential capacitors.
In the case of no acceleration state in the first axial x direction, the distance between the first inner wall 313 and the first fixed electrode 341 and the distance between the second inner wall 314 and the second fixed electrode 342 are equal, and the capacitance values of the first sub-capacitor 351 and the second sub-capacitor 352 are equal. In the case of the acceleration input in the first axial x direction, the motion of the movable mass 100 in the first plane is transferred to the first sensing structure 310 through the first coupling beam 330, and the first sensing structure 310 also moves in the first plane, where the distance between the first inner wall 313 and the first fixed electrode 341 is equal to the distance between the second inner wall 314 and the second fixed electrode 342, the capacitance values of the first sub-capacitor 351 and the second sub-capacitor 352 are changed, and the difference between the capacitance values of the two changes is used to obtain the acceleration of the first axial x.
Illustratively, when an acceleration input in the first axial x direction is present, movement of the movable mass 100 in the first axial x direction is transferred through the first coupling beams 330 to move the first sensing structure 310 in the first axial x direction within the first plane. In the case where the acceleration direction is the first axial direction x positive direction, the distance between the first inner wall 313 and the first fixed electrode 341 decreases, the capacitance value of the first sub-capacitance 351 increases, the distance between the second inner wall 314 and the second fixed electrode 342 increases, and the capacitance value of the second sub-capacitance 352 decreases. In the case where the acceleration direction is the first axial direction x-direction, the distance between the first inner wall 313 and the first fixed electrode 341 increases, the capacitance value of the first sub-capacitance 351 decreases, the distance between the second inner wall 314 and the second fixed electrode 342 decreases, and the capacitance value of the second sub-capacitance 352 increases. The acceleration in the first axial x direction can be obtained by using the difference value of the capacitance value changes of the first sub-capacitor 351 and the second sub-capacitor 352.
The first coupling beam 330 includes a pair of first coupling sub-beams 331 symmetrical about the second axis y. The first coupling sub-beam 331 has a first coupling sub-beam first end 3311 and a first coupling sub-beam second end 3312 that are axially opposite, the first coupling sub-beam first end 3311 being connected to the movable mass 100. The first coupling sub-beam second end 3312 is connected to the first sensing structure 310. The first spring beam 320 has a first spring beam 320 end 321 and a first spring beam second end 322 opposite with respect to the first axial direction x, the first spring beam 320 end 321 being connected to the anchor point 200, the first spring beam second end 322 being connected to the first sensing structure 310. The first coupling sub-beam second end 3312 is connected to the first spring beam second end 322 of the first spring beam 320 on the same side thereof.
Further, the first coupling sub-beam 331 is a beam structure extending in a serpentine manner along the second axis y direction; while the elastic direction of the first coupling sub-beam 331 extends along the second axial y-direction, the rigidity of the first coupling sub-beam 331 against the acceleration in the first axial x-direction is improved, so that the movement of the movable mass 100 in the first axial x-direction due to the deformation of the first coupling sub-beam 331 is prevented from being transmitted to the first sensing structure 310. The first elastic beam 320 is a beam structure extending in a serpentine shape along the first axial x direction.
As shown in fig. 1 and 3, the second inertial unit 40 includes a pair of second inertial assemblies 400, where the pair of second inertial assemblies 400 are disposed in the first region, and are disposed on both sides of the second axis y in the first region, that is, on both left and right sides in the first region in the drawing, and the pair of second inertial assemblies 400 are rotationally symmetrical about the origin a by 180 °. The second inertial assembly 400 includes a second sensing structure 410, a pair of second elastic beams 420 having elastic directions extending in a second axial y-direction, and a second coupling beam 430 having elastic directions extending in a first axial x-direction, the pair of second elastic beams 420 being disposed on both sides of the second sensing structure 410 with respect to the second axial y, the second elastic beams 420 connecting the anchor 200 and the second sensing structure 410, and the second coupling beam 430 being disposed on one side of the second sensing structure 410 with respect to the second axial y, the second coupling beam 430 connecting the movable mass 100 and the second sensing structure 410. Because the elastic direction of the second coupling beam 430 extends in the first axial x-direction, in case of an acceleration input in the second axial y-direction, the movable mass 100 is displaced in the second axial y-direction and is driven to the second sensing structure 410 by the second coupling beam 430 such that the second sensing structure 410 moves in the first axial y-direction in the first plane. The second sensing structure 410 moves in the second axial y-direction in the first plane while the second elastic beam 420 at one side of the second sensing structure 410 is elongated and the second elastic beam 420 at the other side is compressed.
Specifically, the second sensing structure 410 is provided with a plurality of second movable electrodes 411 disposed in parallel, and the adjacent second movable electrodes 411 are enclosed to form a second hollow area 412. In the present embodiment, six second movable electrodes 411 sequentially arranged along the second axis y are disposed on the second sensing structure 410 to form five second hollow areas 412 sequentially arranged along the second axis y. The two first movable electrodes 411 surrounding and forming the same second hollow area 412 are respectively a third inner wall 413 and a fourth inner wall 414 which are opposite and parallel to each other about the second axis y and are adjacent to the side walls of the second hollow area 412. The second detecting subunit 440 is disposed in each of the second hollow areas 412, and the second detecting subunit 440 includes a third fixed electrode 441 opposite to and parallel to the third inner wall 413 and a fourth fixed electrode 442 opposite to and parallel to the fourth inner wall 414. The third and fourth fixed electrodes 441 and 442 are fixedly connected to the substrate, and the positions of the third and fourth fixed electrodes 441 and 442 are fixed in the case where inertial acceleration is applied thereto. The third fixed electrode 441 and the third inner wall 413 are configured as a third sub-capacitance 451, and the fourth fixed electrode 442 and the fourth inner wall 414 are configured as a fourth sub-capacitance 452. The third sub-capacitor 451 and the fourth sub-capacitor 452 in the same second hollow region 412 are configured as differential capacitors.
In the case where there is no acceleration in the second axial y direction, the distance between the third inner wall 413 and the third fixed electrode 441 is equal to the distance between the fourth inner wall 414 and the fourth fixed electrode 442, and the capacitance values of the fourth sub-capacitor 452 and the fourth sub-capacitor 452 are equal. In the case of the acceleration input in the second axial y direction, the motion of the movable mass 100 in the first plane is transferred to the second sensing structure 410 through the second coupling beam 430, and the second sensing structure 410 also moves in the first plane, so that the distance between the third inner wall 413 and the third fixed electrode 441 is equal to the distance between the fourth inner wall 414 and the fourth fixed electrode 442, the capacitance values of the third sub-capacitor 451 and the fourth sub-capacitor 452 are changed, and the acceleration in the second axial y can be obtained by using the difference value of the capacitance values of the two.
Illustratively, when there is an acceleration input in the second axial y-direction, movement of the movable mass 100 in the second axial y-direction is transferred through the second coupling beams 430 to move the second sensing structure 410 in the first plane in the second axial y-direction. When the acceleration direction is the second axial direction y positive direction, the distance between the third inner wall 413 and the third fixed electrode 441 decreases, the capacitance value of the third sub-capacitance 451 increases, the distance between the fourth inner wall 414 and the fourth fixed electrode 442 increases, and the capacitance value of the fourth sub-capacitance 452 decreases. When the acceleration direction is the second axial direction y-direction, the distance between the third inner wall 413 and the third fixed electrode 441 increases, the capacitance value of the third sub-capacitance 451 decreases, the distance between the fourth inner wall 414 and the fourth fixed electrode 442 decreases, and the capacitance value of the fourth sub-capacitance 452 increases. The acceleration in the second axial y direction can be obtained by using the difference between the capacitance changes of the third sub-capacitor 451 and the fourth sub-capacitor 452.
The second coupling beam 430 includes a pair of second coupling sub-beams 431 symmetrical about the first axial direction x. The second coupling sub-beam 431 has a second coupling sub-beam first end 4311 and a second coupling sub-beam second end 4312, which are axially opposite, the second coupling sub-beam first end 4311 being connected to the movable mass 100, the second coupling sub-beam second end 4312 being connected to the second sensing structure 410. The second spring beam 420 has a second spring beam first end 421 and a second spring beam second end 422 opposite about the second axis y, the second spring beam first end 421 being connected to the anchor point 200, the second spring beam second end 422 being connected to the second sensing structure 410. The second coupling sub-beam second end 4312 is connected to the second spring beam second end 422 of the second spring beam 420 on the same side thereof.
Further, the second coupling sub-beam 431 is a beam structure extending along the first axial direction x in a serpentine manner, so that the elastic direction of the second coupling sub-beam 431 extends along the first axial direction x, and the rigidity of the second coupling sub-beam 431 against the acceleration in the second axial direction y is improved, thereby avoiding the motion of the movable mass 100 in the second axial direction y due to the deformation of the second coupling sub-beam 431 from being transmitted to the second sensing structure 410. The second elastic beam 420 is a beam structure extending in a serpentine manner along the second axis y direction.
Specifically, in the case that the acceleration direction is the first axial x direction, the movable mass 100, the first sensing structure 310, the first elastic beam 320, the first coupling beam 330, and the second coupling beam 430 move along the first axial x direction to generate displacement, and the second sensing structure 410 and the second elastic beam 420 do not move along the first axial x direction and do not generate displacement; in the case that the acceleration direction is the second axial y direction, the movable mass 100, the second sensing structure 410, the second elastic beam 420, the first coupling beam 330, and the second coupling beam 430 move along the second axial y direction to generate displacement, and the first sensing structure 310 and the first elastic beam 320 do not move along the y direction and do not generate displacement.
In the case of an acceleration input of the movable mass 100 at a certain point in the first axial direction x or in the second axial direction y, torsion of the movable mass 100 in the first plane may occur due to uneven stress. In the prior art, a sensing element for sensing acceleration in the first axial direction x and the second axial direction y is generally rigidly connected to the movable mass 100, and in the case that the movable mass 100 is twisted in a first plane, the sensing element for sensing acceleration in the first axial direction x and the second axial direction y is twisted at the same time, and an output signal of the sensing structure includes signal interference caused by twisting of the mass, so that accuracy of measurement results of the present application is affected.
In this application, the first sensing element is connected to the movable mass 100 through the first coupling beam 330, and the elastic direction of the first coupling beam 330 extends along the second axial y direction, so that when the movable mass 100 is twisted around the origin a in the first plane due to uneven stress, the first coupling beam 330 can absorb the movement of the movable mass 100 in the second axial y direction transmitted to the first sensing structure 310 by the elastic deformation generated in the second axial y direction, so that the first sensing structure 310 is not affected by the acceleration in the second axial y direction. And the first coupling beam 330 in this embodiment includes a pair of first coupling sub-beams 331 symmetrical along the second axis y, where the first coupling sub-beams 331 are stretched on one side and compressed on the other side in the case that the movable mass 100 is twisted around the origin a in the first plane, the influence of the acceleration on the second axis y on the first sensing structure 310 is further avoided.
Meanwhile, the first coupling beam 330 has rigidity in the first axial direction x, and the motion state of the movable mass 100 in the first axial direction x is transmitted to the first sensing structure 310 and the first elastic beam 320 through the first coupling beam 330, so that the first sensing structure 310 and the first elastic beam 320 move along the first axial direction x. Since the first inertial unit 30 in the present application includes at least one pair of first sensing structures 310 rotationally symmetric about the origin a by 180 °, when the movable mass 100 is twisted about the origin a in the first plane, the motion amplitudes of the pair of first sensing structures 310 on both sides of the first region in the first axial direction x are the same, but the motion directions are opposite, so that capacitance deviations generated in the two first sensing structures 310 due to the twisting cancel each other, and an influence of acceleration of the torsional mode in the first axial direction x on a measurement result of the first sensing structure 310 is avoided.
Illustratively, in the event of a clockwise twisting of the movable mass 100 about the origin a in the first plane, the first sensing structure 310 in the first inertial assembly 300 disposed on the upper side moves in the forward direction of the first axial direction x, and the first sensing structure 310 in the first inertial assembly 300 disposed on the lower side moves in the opposite direction of the first axial direction x. The capacitance value of the first sub-capacitor 351 in the first inertial member 300 disposed on the upper side becomes larger, the capacitance value of the first sub-capacitor 351 in the first inertial member 300 disposed on the lower side becomes smaller, and the absolute values of the amounts of change in the first sub-capacitors 351 rotationally symmetrical with each other are the same. The capacitance value of the second sub-capacitor 352 in the upper first inertial member 300 becomes smaller, and the capacitance value of the second sub-capacitor 352 in the lower first inertial member 300 becomes larger, so that the absolute values of the amounts of change in the second sub-capacitors 352 rotationally symmetrical to each other are the same. Therefore, the total capacitance value of the pair of first inertial members 300 rotationally symmetric to each other by 180 ° is unchanged.
In case a counter-clockwise torsion of the movable mass 100 about the origin a occurs in the first plane, the first sensing structure 310 in the first inertial assembly 300 arranged on the upper side moves in the opposite direction of the first axial direction x, and the first sensing structure 310 in the first inertial assembly 300 arranged on the lower side moves in the positive direction of the second axial direction y. The capacitance value of the first sub-capacitor 351 in the first inertial member 300 disposed on the upper side becomes smaller, the capacitance value of the first sub-capacitor 351 in the first inertial member 300 disposed on the lower side becomes larger, and the absolute values of the amounts of change in the first sub-capacitors 351 rotationally symmetrical with each other are the same. The capacitance value of the second sub-capacitor 352 in the upper first inertial member 300 becomes larger, the capacitance value of the second sub-capacitor 352 in the lower first inertial member 300 becomes smaller, and the absolute values of the amounts of change in the second sub-capacitors 352 rotationally symmetrical to each other are the same. Therefore, the total capacitance value of the pair of first inertial members 300 rotationally symmetric to each other by 180 ° is unchanged.
Therefore, when the movable mass 100 twists in the first plane, the motion amplitudes of the first sensing structures 310 that are rotationally symmetrical by 180 ° are the same, and the motion directions are opposite, so that the capacitance deviations generated in the two first sensing structures 310 due to the twisting cancel each other out, thereby avoiding the influence of the acceleration of the torsional mode in the first axial direction x on the measurement result of the first sensing structures 310, and improving the accuracy of the measurement result.
Similarly, since the second sensing structure 410 of the second inertial assembly 400 for sensing the second axial y-acceleration is coupled to the movable mass 100 through the second coupling beam 430, the elastic direction of the second coupling beam 430 extends along the first axial direction x, and in the case that the movable mass 100 is twisted in the first plane, the motion of the movable mass 100 about the first axial direction x cannot be transferred to the second sensing structure 410 through the second coupling beam 430, and thus the second sensing structure 410 can be free from the influence of the acceleration in the first axial direction x. Since the second inertial unit 40 includes at least one pair of second sensing structures 410 rotationally symmetric about the origin a by 180 °, the motion amplitudes of the pair of second sensing structures 410 rotationally symmetric are the same, and the motion directions are opposite, and capacitance deviations generated in the two second sensing structures 410 due to torsion cancel each other out, so that the total capacitance values of the third sub-capacitance 451 and the fourth sub-capacitance 452 in the second inertial unit 400 on both sides are not changed, and the measurement of the acceleration of the second sensing structure 410 in the second axial y direction is not affected, so as to improve the accuracy of the measurement result.
In summary, the first coupling beam 330 and the second coupling beam 430 are provided, so that the influence of the interference mode on the measurement result when the first axial direction x and the second axial direction y are twisted can be avoided.
In the present embodiment, four anchor points 200 are disposed around the origin a in the accommodating groove 101, the second inertial unit 40 is disposed in a first area formed by surrounding the anchor points 200, and the first inertial units 30 are disposed on the upper and lower sides of the first area. Optionally, the center point of all the anchor points 200 coincides with the origin a, so as to ensure that the torsion of the movable mass 100 in the first plane moves around the origin a, and the number and positions of the anchor points 200 may be set according to the needs, which are not particularly limited herein. Accordingly, the number and positions of the first inertial units 30 and the second inertial units 40 may also be adjusted according to the positions of the anchor points 200, which is not particularly limited herein.
As shown in fig. 2, the side of the anchor 200 facing the movable mass 100 and the second inertial component 400 is provided with a protruding stop structure 201, and the stop structure 201 is used for avoiding the anchor 200 from sticking to the movable mass 100 or the second inertial component 400, which results in failure of the present application.
The application also provides an acceleration sensor, the acceleration sensor includes foretell acceleration sensor structure, acceleration sensor still includes the top cap body, the top cap body sets up movable mass 100 is kept away from the one side of basement.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples only represent a few embodiments of the present application, which are described in more detail and are not to be construed as limiting the scope of the claims. It should be noted that it would be apparent to those skilled in the art that various modifications and improvements could be made without departing from the spirit of the present application, which would be within the scope of the present application. Accordingly, the scope of protection of the present application is to be determined by the claims appended hereto.
Claims (11)
1. An acceleration sensor structure, characterized by comprising:
a substrate;
a movable mass located on one side of the substrate; the movable mass block is provided with a containing groove penetrating along the thickness direction of the movable mass block;
at least one anchor point accommodated in the accommodation groove for supporting the movable mass block;
the two groups of inertial units are accommodated in the accommodating groove; for one of the inertial units, the inertial unit includes at least one pair of inertial components that are 180 ° rotationally symmetric; the inertial component comprises a sensing structure, an elastic beam and a coupling beam; the sensing structure is connected with the anchor point through an elastic beam, and one side of the sensing structure, which is relative to the sensing axis direction, is provided with a coupling beam, the elastic direction of which is perpendicular to the sensing axis direction; the coupling beam connects the movable mass and the sensing structure; the sensing structure includes at least one capacitance for responding to acceleration in the sense axis direction;
The sensing shaft directions of the two groups of inertial units are mutually perpendicular; in the case of a torsional movement of the movable mass in the plane of the movable mass, the sum of the capacitance values of a pair of said capacitors, which are rotationally symmetrical in the same inertial unit, is unchanged.
2. The acceleration sensor structure of claim 1, characterized in, that the movable mass has a first and a second axial direction perpendicular to each other, the intersection of the first and the second axial direction constituting an origin, the origin being the centroid of the movable mass; in the same inertial unit, the at least one pair of inertial components are 180 ° rotationally symmetric about the origin;
the movable mass block is accommodated in a first plane where the first axial direction and the second axial direction are located;
the two groups of inertial units comprise a first inertial unit and a second inertial unit;
the first inertial unit includes a pair of first inertial assemblies including a first sensing structure, a first spring beam, and a first coupling beam; the sensing axis direction of the first inertial unit is the first axial direction;
the second inertial unit includes a pair of second inertial components including a second sensing structure, a second elastic beam, and a second coupling beam; the sensing axis direction of the second inertial unit is the second axis direction.
3. The acceleration sensor structure of claim 2, characterized in, that in the case where the acceleration sensor structure includes four of the anchor points, the four anchor points are symmetrically arranged around the origin with respect to the first axial direction and the second axial direction;
the four anchor points are surrounded to form a rectangular first area, two second sensing structures of the pair of second inertia components are arranged in the first area, the second elastic beams are arranged on two sides of the second sensing structures relative to a first axial direction, and the second coupling beams are arranged on two sides of the first area relative to a second axial direction; in the event of movement of the movable mass along the second axis, one of the second spring beams is stretched and the other second spring beam is compressed;
the two first sensing structures of the pair of first inertial components are respectively arranged at two sides of the first area relative to the first axial direction, the first elastic beams are arranged at two sides of the first sensing structures relative to the second axial direction, and the first coupling beams are arranged at one side, away from the first area, of the first sensing structures corresponding to the first coupling beams;
In the case of movement of the movable mass in the first axial direction, one of the first elastic beams is stretched and the other first elastic beam is compressed.
4. The acceleration sensor structure of claim 3, characterized in, that the first coupling beam comprises a pair of first coupling sub-beams symmetrical about the second axis;
the second coupling beam includes a pair of second coupling sub-beams that are symmetrical about the first axis.
5. The acceleration sensor structure of claim 4, characterized in, that the first coupling sub-beam has a first coupling sub-beam first end and a first coupling sub-beam second end opposite with respect to the second axis; the first end part of the first coupling sub-beam is connected with the movable mass block, and the second end part of the first coupling sub-beam is connected with the first sensing structure;
the first spring beam having a first spring beam first end and a first spring beam second end opposite with respect to the first axis; the first end part of the first elastic beam is connected with the anchor point, and the second end part of the first elastic beam is connected with the first sensing structure;
wherein the first coupling sub-beam second end is connected with the first elastic beam second end of the first elastic beam on the same side thereof.
6. The acceleration sensor structure of claim 4, characterized in, that the second coupling sub-beam has a second coupling sub-beam first end and a second coupling sub-beam second end opposite with respect to the first axis; the first end part of the second coupling sub-beam is connected with the movable mass block, and the second end part of the second coupling sub-beam is connected with the second sensing structure;
the second spring beam having a second spring beam first end and a second spring beam second end opposite with respect to the first axial direction; the first end part of the second elastic beam is connected with the anchor point, and the second end part of the second elastic beam is connected with the second sensing structure;
wherein the second coupling sub-beam first end is connected with a second elastic beam second end of the second elastic beam on the same side.
7. The acceleration sensor structure of claim 4, characterized in, that the first coupling sub-beam is a beam structure extending in serpentine manner along the second axial direction;
the second coupling sub-beam is a beam structure extending in a serpentine manner along the second axial direction.
8. An acceleration sensor structure as claimed in claim 3, characterized in, that the first elastic beam is a beam structure extending in a serpentine manner along the first axial direction;
The second elastic beam is a beam structure extending in a serpentine shape along the second axis.
9. The acceleration sensor structure of claim 2, characterized in, that the first sensing structure comprises a plurality of first movable electrodes arranged at intervals in sequence along a first axial direction, the first movable electrodes being parallel to the second axial direction;
for one pair of adjacent first movable electrodes, a pair of parallel first fixed electrodes are arranged between the adjacent first movable electrodes, and the first fixed electrodes are parallel to the first movable electrodes; one of the first fixed electrodes and one of the first movable electrodes adjacent to the first fixed electrode are configured as a first sub-capacitor, and the other of the first fixed electrode and the other of the first movable electrodes are configured as a second sub-capacitor; the first sub-capacitor and the second sub-capacitor are configured as differential capacitors;
and under the condition that the movable mass block moves along the first axial direction, the absolute value of the change amount of the electrode spacing of the first sub-capacitor is kept consistent with the absolute value of the change amount of the electrode spacing of the second sub-capacitor, and the absolute value of the change amount of the first sub-capacitor is kept consistent with the absolute value of the change amount of the second sub-capacitor.
10. The acceleration sensor structure of claim 2, characterized in, that the second sensing structure comprises a plurality of second movable electrodes arranged at intervals in sequence along a second axis, the second movable electrodes being parallel to the first axis;
for one pair of adjacent first movable electrodes, a pair of parallel second fixed electrodes are arranged between the adjacent first movable electrodes, and the second fixed electrodes are parallel to the second movable electrodes; one of the second fixed electrode and one of the first movable electrodes adjacent to the second fixed electrode are configured as a third sub-capacitor, and the other of the second fixed electrode and the other of the second movable electrodes are configured as a fourth sub-capacitor; the third sub-capacitor and the fourth sub-capacitor are configured as differential capacitors;
and under the condition that the movable mass block moves along the second axial direction, the absolute value of the change amount of the electrode spacing of the third sub-capacitor is consistent with the absolute value of the change amount of the electrode spacing of the fourth sub-capacitor.
11. An acceleration sensor comprising an acceleration sensor structure as claimed in any one of the claims 1-10, characterized in, that the acceleration sensor further comprises a top cover body arranged at the side of the movable mass remote from the base.
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