CN117606459B - Single anchor point MEMS gyroscope - Google Patents
Single anchor point MEMS gyroscope Download PDFInfo
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- CN117606459B CN117606459B CN202410096296.5A CN202410096296A CN117606459B CN 117606459 B CN117606459 B CN 117606459B CN 202410096296 A CN202410096296 A CN 202410096296A CN 117606459 B CN117606459 B CN 117606459B
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- 238000001514 detection method Methods 0.000 claims abstract description 55
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 230000008878 coupling Effects 0.000 claims description 12
- 238000010168 coupling process Methods 0.000 claims description 12
- 238000005859 coupling reaction Methods 0.000 claims description 12
- 238000005538 encapsulation Methods 0.000 abstract description 4
- 230000009286 beneficial effect Effects 0.000 abstract description 3
- 230000001629 suppression Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 6
- 238000013016 damping Methods 0.000 description 4
- 230000005764 inhibitory process Effects 0.000 description 2
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
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- 230000035945 sensitivity Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5783—Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
Abstract
The invention relates to the technical field of gyroscopes, and discloses a single anchor point MEMS gyroscope, which comprises: a central anchor point; the central connecting assembly comprises a first central connecting frame and a second central connecting frame, the first central connecting frame is positioned at the outer side of the central anchor point and is connected with the first central connecting frame, and the second central connecting frame is positioned at the outer side of the first central connecting frame; the four mass blocks respectively form a second direction detection electrode with the substrate opposite to the two mass blocks along the first direction, and the two mass blocks respectively form a first direction detection electrode with the substrate opposite to the two mass blocks along the second direction; the third direction detection electrode is arranged on the mass block; the driving frame is elastically connected with the four mass blocks; the driving electrode and the driving detection electrode are both arranged on the driving frame. The single-anchor MEMS gyroscope disclosed by the invention adopts a single-anchor design, can reduce the asymmetry introduced by multi-anchor connection, is less influenced by encapsulation and temperature change, and is beneficial to the suppression of stress.
Description
Technical Field
The invention relates to the technical field of gyroscopes, in particular to a single anchor point MEMS gyroscope.
Background
The gyroscope is a sensor for measuring the rotary motion of a carrier relative to an inertial space, and is a core device for motion measurement, inertial navigation, guidance control and other applications. Unlike conventional gyroscopes, MEMS gyroscopes use vibration to induce and detect coriolis forces, e.g., the driving structure moves the plurality of masses in the X-axis direction, and when the gyroscope rotates in the Z-axis direction, the masses generate Y-axis coriolis forces, which can be used to calculate the rotational angular velocity by detecting the Y-axis coriolis forces.
However, most of the existing MEMS gyroscopes are supported and fixed by multiple anchor points, the gyroscopes of the structure are greatly influenced by packaging and temperature change, stress suppression is not facilitated, meanwhile, the thermoelastic damping of the multiple anchor points is large, the quality factor of the gyroscope is low, and the signal to noise ratio of the gyroscope is difficult to further improve.
Disclosure of Invention
Based on the above, the invention aims to provide a single-anchor MEMS gyroscope, which adopts a single-anchor design, can reduce the asymmetry introduced by multi-anchor connection, has small influence by encapsulation and temperature change, is favorable for suppressing stress, reduces the thermoelastic damping coefficient, improves the quality factor of the gyroscope and increases the signal to noise ratio of the gyroscope.
In order to achieve the above purpose, the invention adopts the following technical scheme:
a single anchor MEMS gyroscope, comprising:
a central anchor point;
the central connecting assembly comprises a first central connecting frame and a second central connecting frame which are connected, the first central connecting frame is positioned at the outer side of the central anchor point and is connected with the first central connecting frame, the second central connecting frame is positioned at the outer side of the first central connecting frame, and the second central connecting frame can rotate along a first direction, a second direction and a third direction;
the four mass blocks are distributed in an orthogonal symmetry mode along the first direction and the second direction, each mass block is connected with the second center connecting frame, the two mass blocks distributed along the first direction are respectively a first mass block and a second mass block, the first mass block and the second mass block respectively form a second direction detection electrode with a substrate opposite to the first mass block and the second mass block, the two mass blocks distributed along the second direction are respectively a third mass block and a fourth mass block, and the third mass block and the fourth mass block respectively form a first direction detection electrode with the substrate opposite to the first mass block and the fourth mass block;
a third direction detection electrode disposed on the mass block;
the driving frame is positioned at the outer sides of the four mass blocks and is elastically connected with the four mass blocks, and the driving frame can drive the mass blocks to rotate along the third direction;
the driving electrode and the driving detection electrode are both arranged on the driving frame, and the driving electrode can drive the driving frame to rotate along a third direction.
As a preferable scheme of the single anchor point MEMS gyroscope, a plurality of electrode convex blocks which are distributed at intervals are arranged on the driving frame, and the movable end of the driving electrode and the movable end of the driving detection electrode are arranged on the electrode convex blocks.
As a preferable scheme of the single anchor point MEMS gyroscope, an avoidance groove is formed in the electrode lug, and movable ends of the driving electrode or movable ends of the driving detection electrode are formed in the inner wall surface and the outer wall surface of the radial side wall of the avoidance groove.
As a preferable scheme of the single-anchor MEMS gyroscope, the single-anchor MEMS gyroscope comprises a first elastic beam and a second elastic beam, wherein the first elastic beam can deform along the first direction and the third direction, the second elastic beam can deform along the second direction and the third direction, the first mass block and the second mass block are connected with the driving frame through the first elastic beam, and the third mass block and the fourth mass block are connected with the driving frame through the second elastic beam.
As a preferable scheme of the single-anchor MEMS gyroscope, the first mass block and the second mass block are connected with the driving frame through at least two first elastic beams, and the third mass block and the fourth mass block are connected with the driving frame through at least two second elastic beams.
As a preferable scheme of the single anchor point MEMS gyroscope, the first elastic beam and the second elastic beam are fishhook beams.
As a preferable scheme of the single-anchor MEMS gyroscope, the central connecting assembly further comprises a first central straight beam and a second central straight beam, wherein the first central straight beam extends along the first direction, two ends of the first central straight beam are respectively connected with the central anchor point and the first central connecting frame, and the second central straight beam extends along the second direction, and two ends of the second central straight beam are respectively connected with the first central connecting frame and the second central connecting frame.
As a preferable scheme of single anchor point MEMS gyroscope, the center coupling assembling still includes four center elastic beams and four third center straight beams, the center elastic beam can be followed first direction or the second direction is flexible, four the center elastic beam respectively with four third center straight beams and four the mass piece one-to-one sets up, the one end of center elastic beam with the third center straight beam links to each other, the other end with the mass piece links to each other, four third center straight beams all with the second center connecting frame links to each other.
As a preferable scheme of the single-anchor MEMS gyroscope, each mass block is provided with a third-direction detection electrode, and the third-direction detection electrodes on the four mass blocks are symmetrically distributed along the first direction and the second direction.
As a preferable scheme of the single-anchor MEMS gyroscope, the single-anchor MEMS gyroscope further comprises a coupling connecting beam, and two adjacent mass blocks are connected through the coupling connecting beam.
The beneficial effects of the invention are as follows:
in the single-anchor MEMS gyroscope disclosed by the invention, under a driving state, the driving electrode can drive the driving frame to drive the mass block to rotate along a third direction; when the angular velocity in the first direction is detected, the third mass block and the fourth mass block are subjected to the Coriolis force in the third direction, and the first direction detection electrode detects the angular velocity through the change of capacitance; when the angular velocity in the second direction is detected, the first mass block and the second mass block are subjected to the Coriolis force in the third direction, and the second direction detection electrode detects the angular velocity through the change of capacitance; when the angular velocity in the third direction is detected, the four mass blocks simultaneously make simple harmonic vibration towards the direction close to or far away from the central anchor point, the angular velocity detection is realized by the third direction detection electrode through the change of capacitance, the asymmetry introduced by multi-anchor point connection can be reduced by the single anchor point design, the central connection assembly can absorb stress through deformation, the influence of encapsulation and temperature change is small, the stress inhibition is facilitated, the thermoelastic damping coefficient is reduced, the quality factor of the gyroscope is improved, the coupling coefficient of the gyroscope is reduced, and the signal to noise ratio of the gyroscope is increased.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following description will briefly explain the drawings needed in the description of the embodiments of the present invention, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to the contents of the embodiments of the present invention and these drawings without inventive effort for those skilled in the art.
FIG. 1 is a schematic diagram of a single anchor MEMS gyroscope provided in an embodiment of the present invention;
FIG. 2 is an enlarged view of a portion of FIG. 1 at circle A;
FIG. 3 is a schematic diagram of a center anchor and center connection assembly for a single anchor MEMS gyroscope provided in an embodiment of the present invention;
FIG. 4 is a schematic diagram of a single anchor MEMS gyroscope in a driven state provided by an embodiment of the present invention;
FIG. 5 is a schematic diagram of a single anchor MEMS gyroscope for detecting angular velocity in a first direction according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a single anchor MEMS gyroscope for detecting angular velocity in a second direction according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of a single anchor MEMS gyroscope for detecting angular velocity in a third direction, according to an embodiment of the present invention.
In the figure:
1. a central anchor point;
2. a central connection assembly; 21. a first center connection frame; 22. a second center connection frame; 23. a first central straight beam; 24. a second central straight beam; 25. a central elastic beam; 26. a third central straight beam;
31. a mass block; 3101. a first mass; 3102. a second mass; 3103. a third mass; 3104. a fourth mass;
4. a third direction detection electrode;
51. a drive frame; 511. electrode bumps; 5110. an avoidance groove; 52. a driving electrode; 53. driving the detection electrode;
61. a first elastic beam; 62. a second elastic beam; 63. and coupling the connecting beam.
Detailed Description
In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved more clear, the technical solutions of the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to fall within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first position" and "second position" are two different positions.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixed or removable, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
The present embodiment provides a single anchor point MEMS gyroscope, as shown in fig. 1 to 3, comprising a central anchor point 1, a central connecting assembly 2, four mass blocks 31, a third direction detecting electrode 4, a driving frame 51, a driving electrode 52 and a driving detecting electrode 53, wherein the central connecting assembly 2 comprises a first central connecting frame 21 and a second central connecting frame 22, the first central connecting frame 21 is located outside the central anchor point 1 and the first central connecting frame 21 is connected with the central anchor point 1, the second central connecting frame 22 is located outside the first central connecting frame 21 and the second central connecting frame 22 is connected with the first central connecting frame 21, the second central connecting frame 22 can rotate along a first direction, a second direction and the third direction, the four mass blocks 31 are distributed in an orthogonal symmetry along the first direction and the second direction, each mass block 31 is connected with the second central connecting frame 22, wherein, the two masses 31 distributed along the first direction are a first mass 3101 and a second mass 3102, respectively, the first mass 3101 and the second mass 3102 form second direction detection electrodes (not shown in the figure) with the substrates facing them, respectively, the two second direction detection electrodes form second direction difference electrodes, the two masses 31 distributed along the second direction are a third mass 3103 and a fourth mass 3104, respectively, the third mass 3103 and the fourth mass 3104 form first direction detection electrodes (not shown in the figure) with the substrates facing them, respectively, the two first direction detection electrodes form first direction difference electrodes, the third direction detection electrodes 4 are disposed on the masses 31, the driving frame 51 is located outside the four masses 31, the driving frame 51 is simultaneously connected with the four masses 31 elastically, the driving electrodes 52 and the driving detection electrodes 53 are disposed on the driving frame 51, the driving electrode 52 can drive the driving frame 51 to rotate along the third direction, and the driving frame 51 can drive the mass block 31 to rotate along the third direction.
Specifically, as shown in fig. 4, in this embodiment, the first direction is the X-axis direction, the second direction is the Y-axis direction, the third direction is the Z-axis direction, the first direction detecting electrode is capable of detecting the angular velocity in the X-axis direction, the second direction detecting electrode is capable of detecting the angular velocity in the Y-axis direction, the third direction detecting electrode 4 is capable of detecting the angular velocity in the Z-axis direction, the driving electrode 52 is capable of driving the driving frame 51 to drive the mass block 31 to rotate in the Z-axis direction, and the driving frame 51 is capable of driving the mass block 31 to rotate in the Z-axis direction. And each mass block 31 is provided with a third-direction detection electrode 4, and the third-direction detection electrodes 4 on the four mass blocks 31 are orthogonally and symmetrically distributed along the X-axis direction and the Y-axis direction.
In the single anchor point MEMS gyroscope provided in this embodiment, in a driving state, the driving electrode 52 can drive the driving frame 51 to drive the mass block 31 to rotate along the Z-axis direction; in the detection state, when the angular velocity in the X-axis direction is detected, the third mass 3103 and the fourth mass 3104 receive coriolis force in the Z-axis direction, and the movement directions of the third mass 3103 and the fourth mass 3104 are opposite, and the first direction detection electrode detects the angular velocity in the X-axis direction through the change of capacitance; when detecting the angular velocity in the Y-axis direction, the first mass 3101 and the second mass 3102 receive coriolis force in the Z-axis direction, and the movement directions of the two are opposite, and the second direction detection electrode realizes detection of the angular velocity in the Y-axis direction through the change of capacitance; when the angular velocity in the third direction is detected, the four mass blocks 31 simultaneously make simple harmonic vibration towards the direction close to or far from the central anchor point 1, the detection of the angular velocity in the Z-axis direction is realized by the third direction detection electrode 4 through the change of capacitance, the asymmetry introduced by the connection of multiple anchor points can be reduced by the single anchor point design, the influence of the encapsulation and the temperature change is small, the stress inhibition is facilitated, the thermoelastic damping coefficient is reduced, the quality factor of the gyroscope is improved, the coupling coefficient of the gyroscope is reduced, and the signal to noise ratio of the gyroscope is increased.
Note that the capacitance of the third-direction detection electrode 4 on each of the masses 31 does not change in the driving state, the third-direction detection electrode 4 on one of the first mass 3101 and the second mass 3102 distributed in the X-axis direction is the positive electrode of the third-direction detection electrode 4, the third-direction detection electrode 4 on the other is the negative electrode of the third-direction detection electrode 4, and both form a differential electrode; the third direction detection electrode 4 on one of the third mass block 3103 and the fourth mass block 3104 distributed along the Y-axis direction is a positive electrode of the third direction detection electrode 4, the third direction detection electrode 4 on the other is a negative electrode of the third direction detection electrode 4, the two form a differential electrode, and the capacitance of the third direction detection electrode 4 changes when the angular velocity in the Z-axis direction is detected, so that the detection of the angular velocity in the Z-axis direction is realized.
As shown in fig. 1 and 2, eight electrode bumps 511 are disposed on the driving frame 51 of the present embodiment, and the active ends of the driving electrodes 52 and the active ends of the driving detection electrodes 53 are disposed on the electrode bumps 511. Specifically, as shown in fig. 2, each electrode bump 511 is provided with an avoidance groove 5110, the inner wall surface and the outer wall surface of the radial side wall of the avoidance groove 5110 are both provided with a movable end of a driving electrode 52 or a movable end of a driving detection electrode 53, a fixed end of a part of the driving electrode 52 is arranged on a substrate in the avoidance groove 5110, a fixed end of a part of the driving detection electrode 53 is arranged on a substrate in the avoidance groove 5110, a fixed end of a part of the driving electrode 52 is arranged on a substrate outside the electrode bump 511, and a fixed end of a part of the driving detection electrode 53 is arranged on a substrate outside the electrode bump 511. The driving electrode 52 and the driving detection electrode 53 in this embodiment are comb-teeth electrodes, and the electrodes with this structure have the characteristics of large capacitance, high linearity, large sensitivity, and the like. In other embodiments of the present invention, the number of the electrode bumps 511 is not limited to eight in the present embodiment, but may be other numbers, and the present embodiment is not particularly limited and is specifically set according to actual needs.
Further, the radial side wall of the avoidance groove 5110 is a wall surface with an extending direction passing through the center of the central anchor point 1, and the structure of the electrode bump 511 is beneficial to the driving electrode 52 to drive the driving frame 51, so that not only the mutual interference of the fixed end and the movable end of the driving electrode 52 during the movement is avoided, but also the mutual interference of the fixed end and the movable end of the driving detection electrode 53 during the movement is avoided, so that the driving frame 51 smoothly rotates reciprocally along the Z-axis direction.
As shown in fig. 1 and 2, the single anchor MEMS gyroscope of the present embodiment includes a first elastic beam 61 and a second elastic beam 62, the first elastic beam 61 being deformable in the X-axis direction and the Z-axis direction, the second elastic beam 62 being deformable in the Y-axis direction and the Z-axis direction, the first mass 3101 and the second mass 3102 being connected to the drive frame 51 through the first elastic beam 61, and the third mass 3103 and the fourth mass 3104 being connected to the drive frame 51 through the second elastic beam 62. The first elastic beam 61 and the second elastic beam 62 are fishhook beams, and the fishhook beams are elastic connecting beams composed of U-shaped beams and connecting straight beams, wherein the U-shaped beams can deform in a telescopic manner along the X-axis direction or the Y-axis direction, and the connecting straight beams can deform along the Z-axis direction, so that the fishhook beams can deform along one direction of the X-axis direction and the Y-axis direction and can also deform along the Z-axis direction.
The first mass block 3101 and the second mass block 3102 of the present embodiment are connected to the driving frame 51 through two first elastic beams 61, and the two first elastic beams 61 corresponding to the first mass block 3101 or the second mass block 3102 are symmetrically distributed with respect to the X axis, which arrangement can ensure the smoothness of the movement of the first mass block 3101 and the second mass block 3102; the third mass 3103 and the fourth mass 3104 are both connected to the driving frame 51 through two second elastic beams 62, and the two second elastic beams 62 corresponding to the third mass 3103 or the fourth mass 3104 are symmetrically distributed with respect to the Y axis, which can ensure the smoothness of the movement of the third mass 3103 and the fourth mass 3104. In other embodiments of the present invention, the number of the first elastic beams 61 or the second elastic beams 62 corresponding to the mass blocks 31 is not limited to two in the present embodiment, but may be one, three, four or other numbers, and the present embodiment is not specifically limited and is specifically set according to actual needs.
Specifically, as shown in fig. 4, in the driving state, the driving electrode 52 drives the driving frame 51 to rotate along the Z-axis direction, and the first elastic beam 61 and the second elastic beam 62 can transmit the motion of the driving frame 51 to the mass block 31, so that the mass block 31 rotates along the Z-axis direction, and at this time, the driving detection electrode 53 can detect the motion condition of the mass block 31, thereby ensuring that the driving electrode 52 stably drives the driving frame 51 to reciprocally rotate along the Z-axis direction.
As shown in fig. 5, when the angular velocity in the X-axis direction is detected, the third mass 3103 and the fourth mass 3104 receive coriolis force in the Z-axis direction at the same time, and the movement directions of the two are opposite, and since the second elastic beam 62 connected to the third mass 3103 and the fourth mass 3104 is deformed in the Z-axis direction, the driving frame 51 does not move with the movement of the third mass 3103 and the fourth mass 3104 in the Z-axis direction.
As shown in fig. 6, when the angular velocity in the Y-axis direction is detected, the first mass 3101 and the second mass 3102 receive coriolis force in the Z-axis direction, and the movement directions of the two are opposite, and since the first elastic beam 61 connected to the first mass 3101 and the second mass 3102 is deformed in the Z-axis direction, the drive frame 51 does not move with the movement of the first mass 3101 and the second mass 3102 in the Z-axis direction.
As shown in fig. 7, when the angular velocity in the Z-axis direction is detected, the first mass 3101 and the second mass 3102 receive coriolis force in the X-axis direction, and the movement directions of the two are opposite, since the first elastic beam 61 connected to the first mass 3101 and the second mass 3102 expands and contracts in the X-axis direction, the driving frame 51 does not move with the movement of the first mass 3101 and the second mass 3102; at this time, the third mass 3103 and the fourth mass 3104 are subjected to the coriolis force in the Y-axis direction, and the movement directions of the two are opposite, and since the second elastic beams 62 connected to the third mass 3103 and the fourth mass 3104 are stretched in the Y-axis direction, the driving frame 51 does not move with the movement of the third mass 3103 and the fourth mass 3104, and at this time, the four masses 31 are simultaneously subjected to the simple harmonic vibration in the directions approaching and separating from the center anchor 1, and the driving frame 51 does not move with the movement of the masses 31.
As can be seen from the above driving and detecting, the motion of the driving frame 51 can be transmitted to the mass block 31 in the driving state, but the motion of the mass block 31 in the detecting state is not transmitted to the driving frame 51, so that unidirectional decoupling of the driving is detected, and the influence of the motion of the mass block 31 due to the coriolis force on the driving frame 51 in the detecting state is avoided.
As shown in fig. 1 and 2, the single anchor MEMS gyroscope of the present embodiment further includes a coupling connection beam 63, and the adjacent two masses 31 are connected by the coupling connection beam 63, and the coupling connection beam 63 is capable of deforming in the Z-axis direction and expanding and contracting in the circumferential direction of the driving frame 51. Specifically, when the angular velocity in the X-axis direction is detected, the third mass 3103 and the fourth mass 3104 are subjected to coriolis force in the Z-axis direction, and the movement directions of the two are opposite, at this time, the coupling beam 63 is deformed in the Z-axis direction, and neither the first mass 3101 nor the second mass 3102 is moved in the Z-axis direction; when the angular velocity in the Y-axis direction is detected, the first mass 3101 and the second mass 3102 are subjected to coriolis force in the Z-axis direction, and the movement directions of the first mass 3101 and the second mass 3102 are opposite, and at this time, the coupling beam 63 is deformed in the Z-axis direction, and neither the third mass 3103 nor the fourth mass 3104 moves in the Z-axis direction.
As shown in fig. 3, the center connection assembly 2 of the present embodiment further includes two first center straight beams 23 and two second center straight beams 24, the number of the first center straight beams 23 is two, each first center straight beam 23 extends along the X-axis direction and two ends thereof are respectively connected to the center anchor point 1 and the first center connection frame 21, and each second center straight beam 24 extends along the Y-axis direction and two ends thereof are respectively connected to the first center connection frame 21 and the second center connection frame 22. It should be noted that, in other embodiments of the present invention, two ends of each second central straight beam 24 extending along the Y axis direction may be respectively connected to the central anchor point 1 and the first central connection frame 21, and two ends of each first central straight beam 23 extending along the X axis direction may be respectively connected to the first central connection frame 21 and the second central connection frame 22, which is not specifically limited, and specifically set according to actual needs.
As shown in fig. 3, the center connection assembly 2 of the present embodiment further includes four center elastic beams 25 and four third center straight beams 26, each center elastic beam 25 is composed of two center elastic frames, the center elastic beams 25 are capable of expanding and contracting in the X-axis direction or the Y-axis direction, the four center elastic beams 25 are respectively provided in one-to-one correspondence with the four third center straight beams 26 and the four mass blocks 31, one end of the center elastic beam 25 is connected with the third center straight beam 26, the other end of the center elastic beam 25 is connected with the mass block 31, the four third center straight beams 26 are connected with the second center connection frame 22, wherein the center elastic beams 25 connected with the first mass block 3101 and the second mass block 3102 are capable of expanding and contracting in the X-axis direction, and the center elastic beams 25 connected with the third mass block 3103 and the fourth mass block 3104 are capable of expanding and contracting in the Y-axis direction. It should be noted that, in other embodiments of the present invention, the structure of the central elastic beam 25 is not limited to this limitation of the present embodiment, and may be a serpentine elastic beam or a structure composed of at least three central elastic frames, which is specifically selected according to practical needs.
Note that the above is only a preferred embodiment of the present invention and the technical principle applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, while the invention has been described in connection with the above embodiments, the invention is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the invention, which is set forth in the following claims.
Claims (10)
1. A single anchor MEMS gyroscope, comprising:
a central anchor point;
the central connecting assembly comprises a first central connecting frame and a second central connecting frame which are connected, the first central connecting frame is positioned at the outer side of the central anchor point and is connected with the first central connecting frame, the second central connecting frame is positioned at the outer side of the first central connecting frame, and the second central connecting frame can rotate along a first direction, a second direction and a third direction;
the four mass blocks are distributed in an orthogonal symmetry mode along the first direction and the second direction, each mass block is connected with the second center connecting frame, the two mass blocks distributed along the first direction are respectively a first mass block and a second mass block, the first mass block and the second mass block respectively form a second direction detection electrode with a substrate opposite to the first mass block and the second mass block, the two mass blocks distributed along the second direction are respectively a third mass block and a fourth mass block, and the third mass block and the fourth mass block respectively form a first direction detection electrode with the substrate opposite to the first mass block and the fourth mass block;
a third direction detection electrode disposed on the mass block;
the driving frame is positioned at the outer sides of the four mass blocks and is elastically connected with the four mass blocks, and the driving frame can drive the mass blocks to rotate along the third direction;
the driving electrode and the driving detection electrode are both arranged on the driving frame, and the driving electrode can drive the driving frame to rotate along a third direction.
2. The single anchor MEMS gyroscope of claim 1, wherein the drive frame is provided with a plurality of electrode bumps spaced apart, and the active ends of the drive electrodes and the active ends of the drive sense electrodes are disposed on the electrode bumps.
3. The single anchor MEMS gyroscope of claim 2, wherein the electrode bump is provided with an avoidance groove, and the inner wall surface and the outer wall surface of the radial side wall of the avoidance groove are both provided with a movable end of the driving electrode or a movable end of the driving detection electrode.
4. The single anchor MEMS gyroscope of claim 1, comprising a first spring beam and a second spring beam, the first spring beam being deformable in the first direction and the third direction, the second spring beam being deformable in the second direction and the third direction, the first mass and the second mass each being coupled to the drive frame by the first spring beam, and the third mass and the fourth mass each being coupled to the drive frame by the second spring beam.
5. The single anchor MEMS gyroscope of claim 4, wherein the first mass and the second mass are each connected to the drive frame by at least two of the first spring beams, and the third mass and the fourth mass are each connected to the drive frame by at least two of the second spring beams.
6. The single anchor MEMS gyroscope of claim 4, wherein the first spring beam and the second spring beam are fishhook beams.
7. The single anchor MEMS gyroscope of claim 1, wherein the central connection assembly further comprises a first central straight beam extending along the first direction and having two ends respectively connected to the central anchor point and the first central connection frame, and a second central straight beam extending along the second direction and having two ends respectively connected to the first central connection frame and the second central connection frame.
8. The single anchor MEMS gyroscope of claim 7, wherein the central connection assembly further comprises four central spring beams and four third central straight beams, the central spring beams being capable of telescoping along the first direction or the second direction, the four central spring beams being disposed in one-to-one correspondence with the four third central straight beams and the four masses, respectively, one end of the central spring beam being connected to the third central straight beams, the other end being connected to the masses, and the four third central straight beams being connected to the second central connection frame.
9. The single anchor MEMS gyroscope of claim 1, wherein third direction sensing electrodes are provided on each of the masses, the third direction sensing electrodes on four of the masses being symmetrically distributed along the first and second directions.
10. The single anchor MEMS gyroscope of claim 1, further comprising a coupling bridge through which adjacent two of the masses are connected.
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202793402U (en) * | 2012-07-19 | 2013-03-13 | 水木智芯科技（北京）有限公司 | Full-decoupling capacitive uniaxial micromechanical gyroscope with four mass blocks |
| CN103900546A (en) * | 2012-12-28 | 2014-07-02 | 微机电科技香港有限公司 | Micro-electromechanical six-axis inertial sensor |
| WO2016206152A1 (en) * | 2015-06-26 | 2016-12-29 | 清华大学 | Mems vibratory gyroscope having single anchor point and four mass block |
| CN107192384A (en) * | 2017-07-24 | 2017-09-22 | 深迪半导体(上海)有限公司 | A kind of MEMS three-axis gyroscopes |
| CN110940329A (en) * | 2019-12-16 | 2020-03-31 | 中北大学 | Triaxial microgyroscope device based on tunnel magnetic resistance detection |
| CN113203403A (en) * | 2021-05-24 | 2021-08-03 | 美新半导体(天津)有限公司 | Three-axis gyroscope |
| CN113203405A (en) * | 2021-05-24 | 2021-08-03 | 美新半导体(天津)有限公司 | Three-axis gyroscope |
| CN115876176A (en) * | 2022-10-28 | 2023-03-31 | 瑞声开泰科技(武汉)有限公司 | Multi-mass MEMS gyroscope in orthogonal arrangement |
| CN117330043A (en) * | 2023-11-13 | 2024-01-02 | 南京元感微电子有限公司 | Gyroscope with lever |
-
2024
- 2024-01-24 CN CN202410096296.5A patent/CN117606459B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202793402U (en) * | 2012-07-19 | 2013-03-13 | 水木智芯科技（北京）有限公司 | Full-decoupling capacitive uniaxial micromechanical gyroscope with four mass blocks |
| CN103900546A (en) * | 2012-12-28 | 2014-07-02 | 微机电科技香港有限公司 | Micro-electromechanical six-axis inertial sensor |
| WO2016206152A1 (en) * | 2015-06-26 | 2016-12-29 | 清华大学 | Mems vibratory gyroscope having single anchor point and four mass block |
| CN107192384A (en) * | 2017-07-24 | 2017-09-22 | 深迪半导体(上海)有限公司 | A kind of MEMS three-axis gyroscopes |
| CN110940329A (en) * | 2019-12-16 | 2020-03-31 | 中北大学 | Triaxial microgyroscope device based on tunnel magnetic resistance detection |
| CN113203403A (en) * | 2021-05-24 | 2021-08-03 | 美新半导体(天津)有限公司 | Three-axis gyroscope |
| CN113203405A (en) * | 2021-05-24 | 2021-08-03 | 美新半导体(天津)有限公司 | Three-axis gyroscope |
| CN115876176A (en) * | 2022-10-28 | 2023-03-31 | 瑞声开泰科技(武汉)有限公司 | Multi-mass MEMS gyroscope in orthogonal arrangement |
| CN117330043A (en) * | 2023-11-13 | 2024-01-02 | 南京元感微电子有限公司 | Gyroscope with lever |
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