CN117600706A - Crucible rod assembling equipment for semiconductor preparation - Google Patents

Crucible rod assembling equipment for semiconductor preparation Download PDF

Info

Publication number
CN117600706A
CN117600706A CN202311355739.XA CN202311355739A CN117600706A CN 117600706 A CN117600706 A CN 117600706A CN 202311355739 A CN202311355739 A CN 202311355739A CN 117600706 A CN117600706 A CN 117600706A
Authority
CN
China
Prior art keywords
assembly
head
supporting
rod
crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202311355739.XA
Other languages
Chinese (zh)
Inventor
王亚飞
王鹏
刘小梅
杨峰
黄佳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Demak Zhejiang Seiko Technology Co ltd
Original Assignee
Demak Zhejiang Seiko Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Demak Zhejiang Seiko Technology Co ltd filed Critical Demak Zhejiang Seiko Technology Co ltd
Priority to CN202311355739.XA priority Critical patent/CN117600706A/en
Publication of CN117600706A publication Critical patent/CN117600706A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
    • B23K37/0426—Fixtures for other work
    • B23K37/0435—Clamps
    • B23K37/0443—Jigs
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Butt Welding And Welding Of Specific Article (AREA)

Abstract

The invention relates to crucible rod assembly equipment for semiconductor preparation, which comprises a conveying mechanism, a bearing mechanism, a discharging mechanism and a welding mechanism which are arranged on a rack, wherein the bearing mechanism comprises a first material carrying assembly, a second material carrying assembly, a first butt joint assembly, a second butt joint assembly, a positioning assembly, a clamping assembly and a rotating assembly which is arranged on the rack and is used for driving a support head to automatically rotate; the invention can automatically assemble and weld the support head and the support rod of the crucible rod, has higher butt joint precision, better positioning effect and simple operation, can assemble the crucible rod in batches, increases the production benefit of enterprises, and has better welding continuity, better weld scar forming effect, higher sealing performance and longer service life of the crucible rod, thereby solving the technical problems of complex welding work of the support head and the support rod of the crucible rod, lower butt joint precision, poorer weld scar sealing performance and influencing the use effect of the crucible rod.

Description

Crucible rod assembling equipment for semiconductor preparation
Technical Field
The invention relates to the technical field of crucible rods, in particular to crucible rod assembly equipment for semiconductor preparation.
Background
The single crystal furnace is a device for growing dislocation-free single crystals by using a Czochralski method in an inert gas environment by using a graphite heater to melt polycrystalline materials such as polysilicon. The polycrystalline material is filled in a crucible after being melted, and a crucible rod is arranged at the bottom of the crucible and used for rotating or driving the crucible to lift. Since the crucible rod is surrounded by a heating device for heating the crucible, the temperature of the crucible rod is very high when the single crystal furnace is in operation, and if the crucible rod is not cooled, the service life of the crucible rod is affected by the high temperature. For more firm bonding with the crucible, the top of the crucible rod is typically provided as a disk, the disk-shaped top being fully conformed to the crucible tray. A high temperature crucible can transfer a significant amount of heat to the crucible stem through the crucible tray and the disk-shaped top of the crucible stem.
Patent document CN2021218165199 discloses a crucible supporting rod, which comprises a supporting rod body, wherein a first channel is arranged in the supporting rod body; the air pipe connecting part is arranged on the support rod body and used for communicating the air inlet pipe with the first channel; and the tray is arranged at the top of the supporting rod body and is provided with a second channel communicated with the first channel, and the second channel is used for discharging the gas led in by the air inlet pipe.
However, in the actual use process, the inventor finds that the welding work of the supporting head and the supporting rod of the crucible rod is complex, the butt joint precision is low, the weld scar sealing performance is poor, and the use effect of the crucible rod is affected.
Disclosure of Invention
The invention aims at overcoming the defects of the prior art, the supporting head and the supporting rod of the welding crucible rod can be automatically assembled through the matching of the arranged bearing mechanism and the welding mechanism, the butt joint precision is higher, the positioning effect is better, the operation is simple, the crucible rods can be assembled in batches, the production benefit of enterprises is increased, the annular welding strip is sleeved in the butt joint welding seam of the supporting head and the supporting rod, the welding continuity is better, the welding scar forming effect is better, the sealing performance is higher, and the service life of the crucible rod is prolonged, so that the technical problems that the welding work of the supporting head and the supporting rod of the crucible rod is complex, the butt joint precision is lower, the welding scar sealing performance is worse, and the service effect of the crucible rod is influenced are solved.
Aiming at the technical problems, the technical scheme is as follows:
the crucible rod assembling equipment for preparing the semiconductor comprises a conveying mechanism arranged on a frame, a bearing mechanism arranged on the conveying mechanism, a blanking mechanism arranged on the frame and a welding mechanism arranged on the frame;
the bearing mechanism comprises a first material carrying assembly arranged on the conveying mechanism and used for carrying the supporting head, a second material carrying assembly arranged on the conveying mechanism and used for carrying the supporting rod, a first butt joint assembly arranged on the first material carrying assembly and used for driving the supporting head and the supporting rod to synchronously rotate after butt joint, a second butt joint assembly arranged on the second material carrying assembly and matched with the first butt joint assembly, a positioning assembly arranged on the first material carrying assembly and used for positioning the supporting head, a clamping assembly arranged on the first butt joint assembly and used for fixing the supporting head and a rotating assembly arranged on the frame and used for driving the supporting head to automatically rotate.
Preferably, the conveying mechanism comprises a first conveying belt and a second conveying belt which are synchronously and parallelly arranged on the frame, the first material carrying assembly is divided into a plurality of groups and arranged on the first conveying belt, and the second material carrying assembly is divided into a plurality of groups and arranged on the second conveying belt.
Preferably, the first loading assembly comprises a hollow loading seat arranged on the first conveying belt and a vertical plate arranged on the hollow loading seat and used for supporting the bottom of the bracket;
the second material carrying assembly comprises a base arranged on the second conveying belt and a bracket arranged on the base and used for supporting the supporting rods.
Preferably, the first docking assembly comprises an extension plate arranged on the side surface of the hollow carrying seat, a stand column arranged on the extension plate in a sliding manner through a sliding groove, a first elastic piece arranged between the end part of the sliding groove and the stand column, a side plate arranged on the upper end part of the stand column, a docking rod arranged on the side plate in a rotating manner, a docking head arranged on the end part of the docking rod, an L-shaped supporting rod arranged on the side wall of the hollow carrying seat in a sliding manner and used for supporting the docking rod to be stable, a first belt pulley arranged on the side plate and synchronously rotating with the docking rod, and a second belt pulley arranged on the side plate in a rotating manner and synchronously rotating with the first belt pulley through a belt, and the clamping assembly is coaxially arranged on the second belt pulley.
Preferably, the positioning assembly comprises a lifting plate arranged in the hollow carrying seat in a lifting manner through a sliding hole, a first L-shaped clamping plate arranged on the lifting plate and used for limiting one end part of the head, a second L-shaped clamping plate arranged on the lifting plate and used for limiting the other end part of the head, a positioning rod penetrating through and lifting the lifting plate and used for being inserted into a mounting hole of the head, a second elastic piece arranged between the lower end part of the positioning rod and the lifting plate, a rotating roller rotatably arranged on the second L-shaped clamping plate and used for correcting the self-rotation of the head, and a first stepping motor arranged on the second L-shaped clamping plate and used for driving the rotating roller.
Preferably, the clamping component comprises a first rotating shaft coaxially arranged on the second belt pulley, a disc arranged at the end part of the first rotating shaft, a first hydraulic part arranged at the middle part of the disc, a first propping head arranged at the output end of the first hydraulic part and used for propping against a conical groove of the supporting head, a plurality of groups of harrows respectively arranged on the disc in a sliding manner through limiting grooves, harrow teeth arranged on the harrow rod and used for being respectively inserted into other mounting holes of the supporting head, a third elastic part arranged between the end part of the limiting grooves and the harrow rod, a pulley arranged on the disc and a steel rope arranged at the back of the first propping head and connected with the harrow rod by bypassing the pulley at one end part of the first butting component, wherein the second butting component has the same structure as the first butting component, and a second rotating shaft is coaxially arranged on the second belt pulley of the second butting component, and the end part of the second rotating shaft is provided with a second propping head used for propping against a central hole of the supporting rod.
Preferably, two groups of first limit rails are symmetrically arranged on the rack, second limit rails are arranged on the first limit rails in a butt joint mode, the first limit rails are respectively driven by the upright posts to correspondingly insert into the conical grooves of the brackets and the central holes of the brackets, and the second limit rails are respectively driven by the upright posts to butt joint the brackets and the brackets;
the rotating component comprises a gear coaxially arranged on the first belt pulley and a rack which is arranged on the second limit track and used for driving the gear.
Preferably, the blanking mechanism comprises a first blanking component which is arranged on the frame and used for synchronously releasing the support head and the support rod, and a second blanking component which is arranged on the frame and used for releasing the annular welding strip;
the first blanking assembly comprises a first bracket arranged on the frame, two groups of first blanking cylinders arranged side by side on the first bracket and respectively internally provided with a supporting head and a supporting rod, a second hydraulic part arranged on the first bracket, two groups of retaining plates penetrating through and sliding on the side walls of the first blanking cylinders and used for supporting the supporting head and the supporting rod, and two groups of symmetrical hinged inclined guide rods arranged at the output ends of the second hydraulic part and respectively hinged with the retaining plates.
Preferably, the second blanking component is arranged on the frame through a second bracket and is internally provided with a second blanking cylinder of the annular welding strip and a clamping seat which is arranged on the frame through a support and is used for supporting the annular welding strip to keep upright.
Preferably, the welding mechanism comprises a hanging bracket arranged on the second bracket, a chain rotationally arranged on the hanging bracket and synchronously arranged with the conveying mechanism, a second stepping motor arranged on the hanging bracket and used for driving the chain, a hanging rod arranged on the chain, an arc-shaped plate arranged at the end part of the hanging rod, a welding gun arranged on the arc-shaped plate and a pressing wheel arranged on the arc-shaped plate and used for flattening the molten annular welding strip.
The invention has the beneficial effects that:
(1) According to the invention, the supporting mechanism and the welding mechanism are matched, so that on one hand, the supporting head and the supporting rod of the welding crucible rod can be automatically assembled, the butt joint precision is higher, the positioning effect is better, the supporting head and the supporting rod can synchronously and automatically rotate, the welding work is convenient, the operation is simple, the automation is higher, the crucible rod can be assembled in batches, and the production benefit of enterprises is increased; on the other hand, the annular welding strip can be sleeved at the butt joint of the support head and the support rod, compared with the traditional linear welding strip, the annular welding strip is sleeved in the butt joint welding seam of the support head and the support rod, the welding continuity is good, the welding efficiency of the crucible rod is improved, the annular welding strip melted in the welding seam can be quickly flattened, internal bubbles are extruded, the forming effect of a weld scar is good, the sealing performance is high, and the service life of the crucible rod is prolonged;
(2) According to the invention, the first butt joint assembly is matched with the rotating assembly, so that on one hand, the butt joint of the support head and the support rod can be driven, the position of the butt joint of the support head and the support rod is determined, and the second blanking assembly is convenient to release an annular welding strip to be sleeved at the butt joint of the support head and the support rod; on the other hand, the butt joint type welding device can drive the butt joint type supporting head and the supporting rod to synchronously and automatically rotate, ensures relative static state between the supporting head and the supporting rod, prevents dislocation of the butt joint position of the supporting head and the supporting rod, and is convenient for a welding mechanism to sequentially melt annular welding strips in butt joint welding seams of the supporting head and the supporting rod;
(3) According to the invention, through the positioning component and the clamping component, on one hand, the position of the support head on the hollow carrier seat can be automatically corrected, the mounting hole of the support head is rapidly positioned, the clamping component is convenient to clamp and fix the support head, the clamping component is prevented from shifting in the process of driving the support head to automatically rotate, the clamping firmness is good, and the welding precision of the crucible rod is improved; on the other hand, the locating component can be lifted to avoid, and the locating component is convenient for driving the support head to rotate automatically.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly described below, it being obvious that the drawings described below are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural view of a header.
Fig. 2 is a schematic diagram of the structure of the butt joint of the bracket head and the bracket rod.
Fig. 3 is a schematic structural view of a crucible rod assembly apparatus for semiconductor fabrication.
Fig. 4 is a top view of the structure of fig. 3.
Fig. 5 is a side view of the structure of fig. 3.
Fig. 6 is a schematic structural diagram of the first blanking assembly.
Fig. 7 is a schematic structural view of the bearing mechanism.
Fig. 8 is a schematic structural view of the first docking assembly.
Fig. 9 is a front view of the structure of fig. 7.
Fig. 10 is a schematic structural view of the detent assembly.
Fig. 11 is a schematic structural view of the positioning assembly.
Fig. 12 is a schematic structural view of a second loading assembly.
Fig. 13 is a schematic structural view of the second docking assembly.
Fig. 14 is a schematic structural view of a second blanking assembly.
Fig. 15 is a schematic structural view of the welding mechanism.
FIG. 16 is a schematic view of the structure of the puck.
Fig. 17 is a schematic structural diagram of a material receiving box in a second embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below with reference to the accompanying drawings.
Example 1
As shown in fig. 1 to 16, a crucible rod assembly device for semiconductor preparation comprises a conveying mechanism 2 arranged on a frame 1, a bearing mechanism 3 arranged on the conveying mechanism 2, a blanking mechanism 4 arranged on the frame 1 and a welding mechanism 5 arranged on the frame 1;
the bearing mechanism 3 comprises a first material carrying component 31 arranged on the conveying mechanism 2 and used for carrying the supporting head 6, a second material carrying component 32 arranged on the conveying mechanism 2 and used for carrying the supporting rod 7, a first abutting component 33 arranged on the first material carrying component 31 and used for driving the supporting head 6 and the supporting rod 7 to synchronously rotate after abutting joint, a second abutting component 34 arranged on the second material carrying component 32 and matched with the first abutting component 33, a positioning component 35 arranged on the first material carrying component 31 and used for positioning the supporting head, a clamping component 36 arranged on the first abutting component 33 and used for fixing the supporting head, and a rotating component 37 arranged on the frame 1 and used for driving the supporting head to automatically rotate.
In the embodiment, through the cooperation of the arranged bearing mechanism 3 and the welding mechanism 5, on one hand, the supporting head and the supporting rod of the welding crucible rod can be automatically assembled, the butt joint precision is higher, the positioning effect is better, the supporting head and the supporting rod can synchronously and automatically rotate, the welding work is convenient, the operation is simple, the automation is higher, the crucible rods can be assembled in batches, and the production benefit of enterprises is increased; on the other hand, can overlap an annular welding strip 8 in the butt joint department of support head and die-pin, compare traditional straight line and weld the strip that melts, annular welding strip 8 cover is in the butt joint welding seam of support head and die-pin, and welded continuity is better, improves the welding efficiency of crucible pole to can flatten by quick annular welding strip 8 that melts in the butt joint seam, extrude inside bubble, the weld scar shaping effect is better, and the leakproofness is higher, increases the life of crucible pole.
In detail, the conveying mechanism 2 moves synchronously to the position right below the first blanking component 41 and stops, the first blanking component 41 releases a supporting head and a supporting rod into the first blanking component 31 and the second blanking component 32 respectively, then the first L-shaped clamping plate 352 and the second L-shaped clamping plate 353 of the positioning component 35 cooperate with the spacing supporting head to prevent the horizontal movement of the supporting head, the roller 356 drives the supporting head to rotate automatically, so that the positioning rod 354 is inserted into one mounting hole 61 of the supporting head to position the rest of the mounting holes 61 of the supporting head, then the conveying mechanism 2 continues to move forward with the first blanking component 31 and the second blanking component 32, the rake teeth 366 on the rake 365 of the clamping component 36 are inserted into the rest of the mounting holes 61 of the supporting head, the first supporting head 364 is propped against the conical groove 62 of the supporting head, meanwhile, the second supporting head 369 of the second abutting component 34 is propped against the center hole of the supporting rod, then, the first docking assembly 33 and the second docking assembly 34 are driven by the second limiting rail 372 to move and dock together with the supporting head and the supporting rod, before the supporting head and the supporting rod are docked, the conveying mechanism 2 carries the first carrying assembly 31 and the second carrying assembly 32 to move to the position of the second blanking assembly 42, so that one annular welding rod 8 on the clamping seat 423 is sleeved at the butt joint position of the supporting head and the supporting rod, then, when the conveying mechanism 2 carries the first carrying assembly 31 and the second carrying assembly 32 to move to the position of the welding mechanism 5, the chain 52 drives the welding gun 55 and the supporting head to synchronously move forward, simultaneously, the gear 373 of the rotating assembly 37 is driven by the rack 374 to synchronously and automatically rotate the supporting head and the supporting rod, so that the welding gun 55 sequentially melts the annular welding rod 8 in the butt joint of the supporting head and the supporting rod, the pressing wheel 56 rapidly flattens the melted annular welding rod 8, and (5) completing the welding and assembling work of the crucible rod.
As shown in fig. 3 and 11-13, the conveying mechanism 2 comprises a first conveying belt 21 and a second conveying belt 22 which are synchronously and side by side arranged on the frame 1, the first carrying components 31 are arranged on the first conveying belt 21 in a plurality of groups, the second carrying components 32 are arranged on the second conveying belt 22 in a plurality of groups, and the positions of the first carrying components 31 and the second carrying components 32 correspond to each other;
the first loading assembly 31 comprises a hollow loading seat 311 arranged on the first conveyor belt 21, and a vertical plate 312 arranged on the hollow loading seat 311 and used for supporting the bottom of the bracket;
the second loading assembly 32 includes a base 321 disposed on the second conveyor belt 22, and a bracket disposed on the base 321 and used for supporting a supporting rod.
The pallet on the first loading assembly 31 and the pallet on the second loading assembly 32 are coaxial.
In this embodiment, through the cooperation of the conveying mechanism 2 and the first carrying component 31, the supporting head and the supporting rod which can carry the coaxial line can synchronously move forward, so that the welding assembly work is conveniently performed after the supporting head and the supporting rod are in butt joint.
In detail, the first conveyor belt 21 and the second conveyor belt 22 respectively carry the first carrier component 31 and the second carrier component 32, synchronously move to a position right below the first blanking component 41, and then stop running, and the first blanking component 41 releases a head and a supporting rod into the first carrier component 31 and the second carrier component 32 respectively.
As shown in fig. 3 to 13, the first docking assembly 33 includes an extension plate 331 disposed on a side surface of the hollow carrier 311, a vertical post 332 slidably disposed on the extension plate 331 through a sliding slot, a first elastic member 333 disposed between an end of the sliding slot and the vertical post 332, a side plate 334 disposed on an upper end portion of the vertical post 332, a docking rod 335 rotatably disposed on the side plate 334, a docking head 336 disposed on an end portion of the docking rod 335, an L-shaped strut 337 slidably disposed on a side wall of the hollow carrier 311 and for supporting the docking rod 335 to be stable, a first pulley disposed on the side plate 334 and designed to rotate synchronously with the docking rod 335, and a second pulley 338 rotatably disposed on the side plate 334 and designed to rotate synchronously with the first pulley through a belt, and the latching assembly 36 is coaxially disposed on the second pulley 338;
two groups of first limit rails 371 are symmetrically arranged on the frame 1, a second limit rail 372 is arranged on the first limit rails 371 in a butt joint mode, the first limit rails 371 respectively drive the first propping head 364 and the second propping head 369 to be correspondingly inserted into the conical groove 62 of the supporting head 6 and the central hole 71 of the supporting rod 7 through the upright post 332, and the second limit rails 372 respectively drive the supporting head and the supporting rod to be in butt joint through the upright post 332;
the rotating assembly 37 includes a gear 373 coaxially disposed on the first pulley and a rack 374 disposed on one of the second limit rails 372 for driving the gear 373.
In this embodiment, the first docking assembly 33 and the rotating assembly 37 are configured to cooperate, so that on one hand, the head and the supporting rod can be driven to precisely dock, and the position of the docking position of the head and the supporting rod is determined, so that the second blanking assembly 42 can conveniently release an annular welding strip to be sleeved at the docking position of the head and the supporting rod; on the other hand, the butt joint mechanism can drive the butt joint of the butt joint head and the supporting rod to synchronously and automatically rotate, ensures relative static between the butt joint head and the supporting rod, prevents dislocation of the butt joint part of the butt joint head and the supporting rod, and facilitates the welding mechanism 5 to sequentially melt the annular welding fusion strips in the butt joint welding seams of the butt joint head and the supporting rod.
In detail, when the conveying mechanism 2 carries the first loading component 31 and the second loading component 32 to sequentially move to the first limit track 371 and the second limit track 372, the first docking component 33 and the second loading component 32 are driven by the first limit track 371 and the second limit track 372 to dock the supporting head with the supporting rod, the conveying mechanism 2 carries the first loading component 31 and the second loading component 32 to move to the position of the rack 374, the gear 373 is driven by the rack 374 to rotate with the docking rod 335, the docking rod 335 drives the first pulleys of the first docking component 33 and the second docking component 34 to synchronously rotate through the docking head 336, the first pulleys drive the second pulleys 338 to synchronously rotate through the belt, and the second pulleys 338 of the first docking component 33 drive the supporting head to automatically rotate through the clamping component 36, and meanwhile, the second pulleys 338 of the second docking component 34 drive the supporting rod to automatically rotate synchronously through the second supporting head 369.
As shown in fig. 7 to 11, the positioning assembly 35 includes a lifting plate 351 disposed inside the hollow carrier 311 through a sliding hole, a first L-shaped clamping plate 352 disposed on the lifting plate 351 for limiting one end portion of the head, a second L-shaped clamping plate 353 disposed on the lifting plate 351 for limiting the other end portion of the head, a positioning rod 354 penetrating and lifting the lifting plate 351 and being used for inserting into one mounting hole 61 of the head 6, a second elastic member 355 disposed between the lower end portion of the positioning rod 354 and the lifting plate 351, a rotating roller 356 rotatably disposed on the second L-shaped clamping plate 353 and being used for correcting the self-rotation of the head, a first stepping motor 357 disposed on the second L-shaped clamping plate 353 and being used for driving the rotating roller 356, and a third hydraulic member 358 disposed on the end portion of the sliding hole and being used for driving the lifting plate 351;
it should be noted that, the top of the roller 356 and the receiving groove of the vertical plate 312 of the first loading assembly 31 are on the same horizontal plane, and the elastic force of the second elastic member 355 on the positioning rod 354 is far smaller than the gravity of the pallet, so as to ensure that the pallet can be horizontally placed on the first loading assembly 31.
The positioning component 36 comprises a first rotating shaft 361 coaxially arranged on the second pulley 338, a disc 362 arranged at the end part of the first rotating shaft 361, a first hydraulic part 363 arranged at the middle part of the disc 362, a first abutting head 364 arranged at the output end of the first hydraulic part 363 and used for abutting against the conical groove 62 of the supporting head 6, a plurality of groups of harrow bars 365 respectively arranged on the disc 362 in a sliding manner through limiting grooves, harrow teeth 366 arranged on the harrow bars 365 and used for being respectively inserted into the rest mounting holes of the supporting head, a third elastic piece arranged between the end part of the limiting grooves and the harrow bars 365, a pulley 367 arranged on the disc 362 and a steel rope 368 arranged at the back surface of the first abutting head 364 and connected with the harrow bars 365 by bypassing the pulley 367, the second abutting component 34 has the same structure as the first abutting component 33, and the second pulley 338 is coaxially provided with a second rotating shaft 369 used for abutting against the center hole of the supporting head.
In this embodiment, through the positioning assembly 35 and the clamping assembly 36, on one hand, the position of the supporting head on the hollow carrier 311 can be automatically corrected, the position of the mounting hole of the supporting head can be rapidly positioned, the clamping assembly 36 is convenient to clamp and fix the supporting head, the clamping assembly is prevented from shifting in the process of driving the supporting head to rotate automatically, the clamping firmness is better, and the welding precision of the crucible rod is improved; on the other hand, the positioning assembly 35 can be lifted to avoid, and the clamping assembly is convenient to drive the support head to automatically rotate.
In detail, after the carrier head falls down on the first material carrying component 31, the rotating roller 356 and the vertical plate 312 support the carrier head to keep a horizontal state, the first L-shaped clamping plate 352 and the second L-shaped clamping plate 353 cooperate with the spacing carrier head to prevent the carrier head from moving horizontally, then, the first stepping motor 357 drives the rotating roller 356 to rotate with the carrier head, so that the positioning rod 354 is inserted into one mounting hole 61 of the carrier head 6 under the driving of the second elastic piece 355, thereby positioning the rest mounting holes 61 of the carrier head 6, the conveying mechanism 2 continues to carry the first material carrying component 31 and the second material carrying component 32 in turn, after the vertical post 332 of the first docking component 33 is driven by the first spacing track 371, the rake teeth 366 on the rake rod 365 with the clamping component 36 are moved to the mounting holes 61 of the carrier head 6, then, the first hydraulic component 363 drives the conical groove 62 inner wall of the first abutment head 6, so that the first abutment head 364 drives the rake rod 365 to move inwards through the steel rope 368, so that the rake rod 354 is inserted into the rest mounting holes 61 of the carrier head 6 respectively, and the second clamping plate 33 is simultaneously separated from the first clamping plate 36 and the second clamping plate 36, thereby the carrier head 33 is driven by the lifting component 33 to separate from the first clamping plate 36, and the second clamping plate 36 is simultaneously lifted off from the mounting holes 35, thereby the carrier head 6 is lifted down by the first clamping plate 36.
As shown in fig. 6, the blanking mechanism 4 includes a first blanking component 41 disposed on the frame 1 and used for synchronously releasing the head and the supporting rod, and a second blanking component 42 disposed on the frame 1 and used for releasing the annular welding strip 8;
the first blanking assembly 41 comprises a first bracket 411 arranged on the frame 1, two groups of first blanking cylinders 412 arranged on the first bracket 411 side by side and respectively internally provided with a head and a supporting rod, a second hydraulic part 413 arranged on the first bracket 411, two groups of retaining plates 414 penetrating through and sliding on the side walls of the first blanking cylinders 412 and used for supporting the head and the supporting rod, and two groups of inclined guide rods 415 symmetrically hinged to the output end of the second hydraulic part 413 and hinged to the retaining plates 414.
It should be noted that, the distance from the lower end of the first blanking barrel 412 with the head to the first loading assembly 31 is equal to the diameter of the head, so that only one head can fall to the first loading assembly 31 at a time; similarly, the distance from the lower end of the first blanking cylinder 412 with the support rods to the second material loading assembly 32 is equal to the diameter of the support rods, so that only one support rod can fall to the second material loading assembly 32 at a time.
In this embodiment, by the first blanking component 41, a head and a supporting rod can be synchronously released to the first loading component 31 and the second loading component 32.
In detail, the conveying mechanism 2 carries the first loading component 31 and the second loading component 32 to move to the position of the first blanking component 41 and then stops running, the second hydraulic part 413 drives the inclined guide rods 415 to ascend, the inclined guide rods 415 drive the retaining plates 414 to synchronously separate from the side walls of the two first blanking cylinders 412, so that the two first blanking cylinders 412 release a supporting head and a supporting rod respectively to fall onto the first loading component 31 and the second loading component 32, and then the second hydraulic part 413 drives the inclined guide rods 415 to descend, so that the two retaining plates 414 are synchronously inserted into the two first blanking cylinders 412 to abut against the supporting head and the supporting rod at the inner lower ends of the two first blanking cylinders 412, and the first blanking cylinders 412 are prevented from blanking again.
As shown in fig. 5-6 and 14, the second blanking assembly 42 is disposed on the frame 1 through a second bracket 421 and is provided with a second blanking cylinder 422 with an annular welding strip 8 therein, and a holder 423 disposed on the frame 1 through a pillar and used for supporting the annular welding strip 8 to stand upright.
It should be noted that, the distance from the lower end of the second blanking barrel 422 to the holder 423 is equal to the diameter of the annular welding rod 8, so that only one annular welding rod 8 can fall to the holder 423 at a time.
It should be noted that the second limiting rail 372 includes a slope portion and a horizontal portion, the holder 423 is located at a junction of the slope portion and the horizontal portion, and before the butt joint of the bracket and the supporting rod is guaranteed, an annular welding strip 8 on the holder 423 can be sleeved at the butt joint of the bracket and the supporting rod.
In this embodiment, an annular welding strip 8 can be sleeved at the joint of the bracket head and the bracket rod through the second blanking component 42.
In detail, when the conveying mechanism 2 moves to the second limiting rail 372 with the first loading assembly 31 and the second loading assembly 32, the second limiting rail 372 drives the upright post 332 of the first docking assembly 33 and the second docking assembly 34 to dock with the supporting head and the supporting rod, and before docking with the supporting head and the supporting rod, the first loading assembly 31 moves to the position of the clamping seat 423, so that one annular welding strip 8 on the clamping seat 423 is sleeved at the docking position of the supporting head and the supporting rod.
As shown in fig. 3 and 15 to 16, the welding mechanism 5 includes a hanger 51 provided on the second bracket 421, a chain 52 rotatably provided on the hanger 51 and provided in synchronization with the conveying mechanism 2, a second stepping motor provided on the hanger 51 for driving the chain 52, a boom 53 provided on the chain 52, an arc plate 54 provided at an end of the boom 53, a welding gun 55 provided on the arc plate 54, and a pressing wheel 56 provided on the arc plate 54 for flattening the melted endless welding bar 8.
In this embodiment, through the welding mechanism 5 that sets up, can melt the annular welding strip 8 in the butt welding seam of support head and die-pin for support head and die-pin weld into the crucible pole, and flatten the annular welding strip 8 that melts in the welding seam, extrude inside bubble, guarantee the leakproofness of weld scar, improve the aesthetic property of weld scar.
In detail, when the conveying mechanism 2 moves to the welding mechanism 5 with the first carrying component 31 and the second carrying component 32, the rack 374 drives the support head and the support rod to rotate synchronously and automatically through the gear 373, and the second stepping motor drives the chain 52 to drive the welding gun 55 to move synchronously with the support head and the support rod, so that the welding gun 55 melts the annular welding strip 8 in the butt welding seam of the support head and the support rod, and the pressing wheel 56 flattens the melted annular welding strip 8.
Example two
As shown in fig. 1 to 17, wherein the same or corresponding parts as those in the first embodiment are denoted by the same reference numerals as those in the first embodiment, only the points of distinction from the first embodiment will be described below for the sake of brevity. The second embodiment is different from the first embodiment in that:
further, as shown in fig. 17, a material receiving box 9 is disposed on the frame 1, and the material receiving box 9 is located at an end of the conveying mechanism 2, so as to facilitate collection of the assembled crucible rod.
In detail, when the assembled crucible rod moves to the edge of the frame 1, the first loading component 31 and the second loading component 32 release the supporting head and the supporting rod, and after the conveying mechanism 2 moves to the lower part of the frame 1 with the first loading component 31 and the second loading component 32, the assembled crucible rod falls into the material receiving box 9.
The working process comprises the following steps:
firstly, the conveying mechanism 2 carries the first material carrying component 31 and the second material carrying component 32 to synchronously move to a position right below the first material carrying component 41, then the first material carrying component 41 releases a head and a supporting rod into the first material carrying component 31 and the second material carrying component 32 respectively, then the first L-shaped clamping plate 352 and the second L-shaped clamping plate 353 of the positioning component 35 cooperate with the spacing head to prevent the head from moving horizontally, the roller 356 drives the head to rotate automatically, so that the positioning rod 354 is inserted into one mounting hole 61 of the head to position the rest of the mounting holes 61 of the head, then the conveying mechanism 2 continues to move forwards carrying the first material carrying component 31 and the second material carrying component 32, the rake teeth 366 on the rake 365 of the clamping component 36 are inserted into the rest of the mounting holes 61 of the head, the first abutting head 364 abuts against the conical groove 62 of the head, meanwhile, the second abutting head 369 of the second abutting component 34 abuts against the central hole of the supporting rod, then, the first docking assembly 33 and the second docking assembly 34 are driven by the second limiting rail 372 to move and dock together with the supporting head and the supporting rod, before the supporting head and the supporting rod are docked, the conveying mechanism 2 carries the first carrying assembly 31 and the second carrying assembly 32 to move to the position of the second blanking assembly 42, so that one annular welding rod 8 on the clamping seat 423 is sleeved at the butt joint position of the supporting head and the supporting rod, then, when the conveying mechanism 2 carries the first carrying assembly 31 and the second carrying assembly 32 to move to the position of the welding mechanism 5, the chain 52 drives the welding gun 55 and the supporting head to synchronously move forward, simultaneously, the gear 373 of the rotating assembly 37 is driven by the rack 374 to synchronously and automatically rotate the supporting head and the supporting rod, so that the welding gun 55 sequentially melts the annular welding rod 8 in the butt joint of the supporting head and the supporting rod, the pressing wheel 56 rapidly flattens the melted annular welding rod 8, and (5) completing the welding and assembling work of the crucible rod.
In the description of the present invention, it should be understood that the directions or positional relationships indicated by the terms "front and rear", "left and right", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of description and simplification of the description, and do not indicate or imply that the apparatus or component in question must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the invention.
Of course, in this disclosure, those skilled in the art will understand that the term "a" or "an" is to be interpreted as "at least one" or "one or more," i.e., in one embodiment, the number of elements may be one, and in another embodiment, the number of elements may be multiple, and the term "a" is not to be construed as limiting the number.
The foregoing is merely a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions easily conceivable by those skilled in the art under the technical teaching of the present invention should be included in the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.

Claims (10)

1. The crucible rod assembly equipment for preparing the semiconductor is characterized by comprising a conveying mechanism arranged on a frame, a bearing mechanism arranged on the conveying mechanism, a blanking mechanism arranged on the frame and a welding mechanism arranged on the frame;
the bearing mechanism comprises a first material carrying assembly arranged on the conveying mechanism and used for carrying the supporting head, a second material carrying assembly arranged on the conveying mechanism and used for carrying the supporting rod, a first butt joint assembly arranged on the first material carrying assembly and used for driving the supporting head and the supporting rod to synchronously rotate after butt joint, a second butt joint assembly arranged on the second material carrying assembly and matched with the first butt joint assembly, a positioning assembly arranged on the first material carrying assembly and used for positioning the supporting head, a clamping assembly arranged on the first butt joint assembly and used for fixing the supporting head and a rotating assembly arranged on the frame and used for driving the supporting head to automatically rotate.
2. The crucible rod assembly apparatus for semiconductor manufacturing according to claim 1, wherein the conveying mechanism comprises a first conveyor belt and a second conveyor belt which are synchronously and side by side arranged on the frame, the first carrying components are arranged on the first conveyor belt in a plurality of groups, and the second carrying components are arranged on the second conveyor belt in a plurality of groups.
3. The crucible stem assembly apparatus for semiconductor manufacturing according to claim 2, wherein the first carrier assembly comprises a hollow carrier provided on the first conveyor belt and a riser provided on the hollow carrier for supporting a bottom of a susceptor;
the second material carrying assembly comprises a base arranged on the second conveying belt and a bracket arranged on the base and used for supporting the supporting rods.
4. The crucible rod assembly apparatus for semiconductor manufacturing according to claim 3, wherein the first docking assembly comprises an extension plate provided on a side surface of the hollow carrier, a column slidably provided on the extension plate through a chute, a first elastic member provided between an end portion of the chute and the column, a side plate provided on an upper end portion of the column, a docking rod rotatably provided on the side plate, a docking head provided on an end portion of the docking rod, an L-shaped strut slidably provided on a side wall of the hollow carrier and for supporting the docking rod to be stable, a first pulley provided on the side plate and designed to be rotated in synchronization with the docking rod, and a second pulley rotatably provided on the side plate and designed to be rotated in synchronization with the first pulley through a belt, the docking assembly being coaxially provided on the second pulley.
5. The crucible bar assembly apparatus for semiconductor manufacturing according to claim 4, wherein the positioning assembly comprises a lifting plate which is lifted and lowered by a slide hole and is arranged in the hollow carrier, a first L-shaped clamping plate which is arranged on the lifting plate and is used for limiting one end of the head, a second L-shaped clamping plate which is arranged on the lifting plate and is used for limiting the other end of the head, a positioning bar which penetrates through and is arranged on the lifting plate and is used for being inserted into a mounting hole of the head, a second elastic piece which is arranged between the lower end of the positioning bar and the lifting plate, a rotating roller which is rotatably arranged on the second L-shaped clamping plate and is used for correcting the self-rotation of the head, and a first stepping motor which is arranged on the second L-shaped clamping plate and is used for driving the rotating roller.
6. The crucible bar assembly apparatus of claim 5, wherein the clamping assembly comprises a first rotating shaft coaxially disposed on the second pulley, a disc disposed at an end of the first rotating shaft, a first hydraulic member disposed at a middle position of the disc, a first abutment disposed at an output end of the first hydraulic member and used for abutting against a tapered groove of the supporting head, a plurality of groups of rake bars slidably disposed on the disc through limiting grooves, rake teeth disposed on the rake bars and used for being respectively inserted into the rest of the mounting holes of the supporting head, a third elastic member disposed between an end of the limiting grooves and the rake bars, a pulley disposed on the disc, and a steel rope disposed at a back of the first abutment and having an end portion bypassing the pulley and being connected with the rake bars, the second abutting assembly is identical to the first abutting assembly in structure, and a second rotating shaft is coaxially disposed on the second pulley of the second abutting assembly, and the second rotating shaft end is provided with a second abutment for abutting against a center hole of the supporting bar.
7. The crucible bar assembly apparatus for semiconductor manufacturing according to claim 6, wherein two sets of first limit rails are symmetrically arranged on the frame, second limit rails are butt-jointed on the first limit rails, the first limit rails respectively drive the first butt and the second butt to be correspondingly inserted into the conical grooves of the brackets and the central holes of the brackets through the upright posts, and the second limit rails respectively drive the brackets and the brackets to be butt-jointed through the upright posts;
the rotating component comprises a gear coaxially arranged on the first belt pulley and a rack which is arranged on the second limit track and used for driving the gear.
8. The crucible bar assembly apparatus for semiconductor manufacturing according to claim 7, wherein the blanking mechanism comprises a first blanking assembly provided on the frame for synchronously releasing the head and the support bar, and a second blanking assembly provided on the frame for releasing the annular welding strip;
the first blanking assembly comprises a first bracket arranged on the frame, two groups of first blanking cylinders arranged side by side on the first bracket and respectively internally provided with a supporting head and a supporting rod, a second hydraulic part arranged on the first bracket, two groups of retaining plates penetrating through and sliding on the side walls of the first blanking cylinders and used for supporting the supporting head and the supporting rod, and two groups of symmetrical hinged inclined guide rods arranged at the output ends of the second hydraulic part and respectively hinged with the retaining plates.
9. The crucible bar assembly apparatus for semiconductor manufacturing according to claim 8, wherein the second blanking member is provided on the frame via a second bracket and is provided with a second blanking cylinder having an annular welding strip therein, and a holder provided on the frame via a stay for supporting the annular welding strip so as to be kept upright.
10. The crucible bar assembly apparatus for semiconductor manufacturing according to claim 9, wherein the welding mechanism comprises a hanger provided on the second support, a chain rotatably provided on the hanger and provided in synchronization with the conveying mechanism, a second stepping motor provided on the hanger and used for driving the chain, a boom provided on the chain, an arc provided at an end of the boom, a welding gun provided on the arc, and a pinch roller provided on the arc and used for flattening the melted annular welding strip.
CN202311355739.XA 2023-10-19 2023-10-19 Crucible rod assembling equipment for semiconductor preparation Pending CN117600706A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311355739.XA CN117600706A (en) 2023-10-19 2023-10-19 Crucible rod assembling equipment for semiconductor preparation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311355739.XA CN117600706A (en) 2023-10-19 2023-10-19 Crucible rod assembling equipment for semiconductor preparation

Publications (1)

Publication Number Publication Date
CN117600706A true CN117600706A (en) 2024-02-27

Family

ID=89948569

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202311355739.XA Pending CN117600706A (en) 2023-10-19 2023-10-19 Crucible rod assembling equipment for semiconductor preparation

Country Status (1)

Country Link
CN (1) CN117600706A (en)

Similar Documents

Publication Publication Date Title
CN107322229B (en) A kind of feeding device of Full-automatic welding machine
CN107378321B (en) A kind of Full-automatic welding machine
CN113399925A (en) Electric power tower tubular product butt-joint equipment
CN108705218A (en) A kind of sealing tack welding welding system
CN209078082U (en) A kind of square pile flange automatic soldering device
CN208895487U (en) Pipe fitting group is to equipment
CN116532855B (en) Steel construction prefab welding set
CN115780958B (en) Automatic welding continuous production line
CN117206714B (en) Laser cutting machine comprising two-clamping three-chuck of common rail
CN111922528B (en) Laser cutting equipment of glass material
CN107470799B (en) A kind of welding accessory feeding device of Full-automatic welding machine
CN117600706A (en) Crucible rod assembling equipment for semiconductor preparation
CN107511608B (en) A kind of welder of Full-automatic welding machine
CN109975302B (en) Automatic detection device of grillwork outward appearance of brazing
WO2021142691A1 (en) Charging column tinning and wire welding automatic machine
CN113636313A (en) Automatic-overturning motor stator transportation equipment and transportation method thereof
CN210306134U (en) Automatic tin soldering machine
CN115555771B (en) Manual auxiliary duckbill welding device
CN209971605U (en) Full-automatic guide pipe tip melting head system
CN115255702A (en) Automatic welding equipment and welding process thereof
CN112620874B (en) Steel structure welding process applied to low-temperature oxygen-deficient environment
JP2553001B2 (en) Bead removing device for synthetic resin pallet and bead cutter mechanism used in the device
CN112475545A (en) Method for improving TIG welding speed
CN114700622B (en) Laser welding equipment and welding method for drying rack
CN219026362U (en) Positioning tool for laser welding machine

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination