CN117590182A - Test equipment for DFN semiconductor device - Google Patents

Test equipment for DFN semiconductor device Download PDF

Info

Publication number
CN117590182A
CN117590182A CN202211001591.5A CN202211001591A CN117590182A CN 117590182 A CN117590182 A CN 117590182A CN 202211001591 A CN202211001591 A CN 202211001591A CN 117590182 A CN117590182 A CN 117590182A
Authority
CN
China
Prior art keywords
piston
rod
shell
detection shell
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202211001591.5A
Other languages
Chinese (zh)
Inventor
马磊
狄锋斌
党鹏
杨光
彭小虎
王新刚
庞朋涛
任斌
王道赢
寇一博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xi'an Hangsi Semiconductor Co ltd
Original Assignee
Xi'an Hangsi Semiconductor Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xi'an Hangsi Semiconductor Co ltd filed Critical Xi'an Hangsi Semiconductor Co ltd
Priority to CN202211001591.5A priority Critical patent/CN117590182A/en
Publication of CN117590182A publication Critical patent/CN117590182A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

The invention discloses test equipment for a DFN semiconductor device, wherein two sides of a detection shell are respectively provided with a refrigerating sheet, a fan housing with a plurality of heating rods arranged on the circumferential inner wall is arranged on the rear end face of the detection shell, a connecting pipe is respectively arranged on two sides of the detection shell, two ends of the connecting pipe are respectively communicated with the detection shell and the fan housing, one end of a rotating shaft is fixedly connected with a gear rod positioned on the outer side of the fan housing, the connecting shell is positioned on one side of a supporting plate opposite to the detection shell, a first piston and a second piston are arranged in the connecting shell, the first piston and the second piston are distributed up and down and form an air cavity between the first piston and the second piston, a spring is arranged between the second piston and the inner wall at the bottom of the connecting shell, and the upper end of a second supporting rod is connected with the second piston, and the lower end of the second supporting rod with a probe is positioned in the detection shell. The invention not only improves the uniformity of the temperature of the internal environment of the detection shell, but also can realize the soft contact between the probe and the device, and reduces the probability of damage to the device caused by the probe.

Description

Test equipment for DFN semiconductor device
Technical Field
The invention relates to the technical field of semiconductor device testing, in particular to testing equipment for a DFN semiconductor device.
Background
The DFN/QFN package is a leadless package, is square or rectangular, has a large-area bare bonding pad at the center of the bottom of the package for conducting heat, and has conductive bonding pads for realizing electrical connection around the periphery of the package with the large bonding pad. Since the QFN package does not have gull-wing leads like conventional packages, the conductive path between the inner leads and the pads is short, the self inductance and wiring resistance in the package are low, so it can provide excellent electrical performance.
With the increasing living standard of people, the use scene of electronic products is more and more abundant, such as rainforest, desert, polar region and other places with severe environments, which puts higher demands on the electronic products and semiconductor chips therein, so that performance tests on the semiconductor chips are necessary.
However, the heat distribution in the environment simulated by the existing testing device is uneven, so that the testing result is inaccurate, and the testing reliability is seriously affected.
Disclosure of Invention
The invention aims to provide the test equipment for the DFN semiconductor device, which not only improves the uniformity of the internal environment temperature of the detection shell, ensures the accuracy of the test result, but also can realize the soft contact between the probe and the device, improves the position precision of the probe, reduces the misjudgment caused by the fact that the probe is not in contact with the device, and improves the working reliability of the equipment, thereby ensuring the test reliability.
In order to achieve the above purpose, the invention adopts the following technical scheme: a test apparatus for DFN semiconductor devices, comprising: base, still include: the device comprises a connecting shell, a detecting shell positioned at the top of a base and an air circulating device arranged at one side of the detecting shell, wherein a hydraulic rod is respectively arranged at two sides of the base, and a supporting plate positioned above the detecting shell is arranged at the top of the two hydraulic rods;
a substrate with a fixing groove at the center of the top is arranged in the detection shell, the fixing groove is used for placing a device to be detected, and two sides of the detection shell are respectively provided with a refrigerating sheet;
the air circulation device comprises a connecting pipe, a fan housing and a rotating shaft with fan blades, wherein the fan housing with a plurality of heating rods arranged on the circumferential inner wall is arranged on the rear end face of the detection housing, a connecting pipe is respectively arranged on two sides of the detection housing, two ends of the connecting pipe are respectively communicated with the detection housing and the fan housing, so that a reverse-shaped air flow channel is formed between the detection housing and the fan housing, the rotating shaft is positioned in the fan housing, one end of the rotating shaft is fixedly connected with a gear rod positioned on the outer side of the fan housing, a driving rod is arranged on the side wall of the supporting plate, and a tooth slot in meshed connection with the gear rod is arranged at the end part of the driving rod;
the connecting shell is positioned at one side of the supporting plate opposite to the detecting shell, a first piston and a second piston are arranged in the connecting shell, the first piston and the second piston are distributed up and down and form an air cavity between the first piston and the second piston, and a spring is arranged between the second piston and the inner wall of the bottom of the connecting shell;
the top plate is arranged above the connecting shell, a first supporting rod arranged at the bottom of the top plate can penetrate through the top wall of the connecting shell to be fixedly connected with the first piston, the upper end of a second supporting rod is connected with the second piston, and the lower end of the second supporting rod with the probe is positioned in the detecting shell;
the motor is arranged on one side of the fixing plate, a second connecting rod positioned below the first connecting rod is fixedly connected with an output shaft of the motor, a third connecting rod is respectively connected with the lower end of the first connecting rod and the upper end of the second connecting rod in a rotating mode, and when the motor is started, the second connecting rod which rotates can drive the first connecting rod to move along the through hole.
The further improved scheme in the technical scheme is as follows:
1. in the scheme, one side of the base is provided with a PLC controller.
2. In the above scheme, the PLC controller is electrically connected with the hydraulic rod, the probe, the refrigerating sheet, the heating rod and the motor.
3. In the above scheme, the opposite sides of the refrigerating sheets are provided with a plurality of radiating fins.
4. In the scheme, the radiating fins are arranged at equal intervals.
5. In the scheme, the heating rods are arranged on the circumferential inner wall of the fan housing at equal intervals.
6. In the scheme, the section of the driving rod is in an inverted L shape.
7. In the scheme, two sides of the base are respectively provided with a fixed block, and the bottom of the hydraulic rod is fixedly arranged on the top surface of the fixed block.
8. In the above scheme, the front end face of the detection shell is provided with a door plate.
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages:
1. the invention relates to a test device for a DFN semiconductor device, wherein two sides of a detection shell are respectively provided with a refrigerating sheet, a fan housing with a plurality of heating rods arranged on the circumferential inner wall is arranged on the rear end face of the detection shell, a connecting pipe is respectively arranged on two sides of the detection shell, two ends of the connecting pipe are respectively communicated with the detection shell and the fan housing, thus a 'back' air flow channel is formed between the detection shell and the fan housing, a rotating shaft is positioned in the fan housing, one end of the rotating shaft is fixedly connected with a gear rod positioned at the outer side of the fan housing, a driving rod is arranged on the side wall of a supporting plate, the end part of the driving rod is provided with a tooth socket which is meshed and connected with the gear rod, the temperature environment in the shell can be changed through the refrigerating sheet and the heating rod, the device is tested in a high-temperature and low-temperature environment, and the air is circularly flowed between the detection shell and the fan housing through the tooth socket of the driving rod and the gear rod, thereby the uniformity of the temperature in the detection shell is improved, the accuracy of the test result is ensured, and the damage condition of parts caused by local overheat is effectively avoided.
2. The invention relates to test equipment for a DFN semiconductor device, which is positioned in a first piston and a second piston in a connecting shell, wherein the first piston and the second piston are distributed up and down and form an air cavity between the first piston and the second piston, a spring is arranged between the second piston and the inner wall of the bottom of the connecting shell, a second supporting rod arranged at the bottom of a top plate can penetrate through the top wall of the connecting shell and is fixedly connected with the first piston, the upper end of the second supporting rod is connected with the second piston, the lower end of the second supporting rod is provided with a probe and is positioned in a detection shell, the soft contact between the probe and the device can be realized through the cooperation of the first piston and the second piston and the spring, the probability of damage of the probe to the device is reduced, the stable connection between the probe and the device can be maintained through the air cavity and the spring, the position precision of the probe is improved, the misjudgment condition caused by the fact that the probe and the device are not contacted is reduced, the working reliability of the equipment is improved, and the reliability for testing reliability is ensured; further, a through hole is respectively formed in two ends of the supporting plate, the top plate is provided with a first connecting rod which is used for being embedded into the through hole, the lower surface of the supporting plate is provided with a fixing plate, one side of the fixing plate is provided with a motor, a second connecting rod which is located under the first connecting rod is fixedly connected with an output shaft of the motor, a third connecting rod is respectively connected with the lower end of the first connecting rod and the upper end of the second connecting rod in a rotating mode, when the motor rotates, the second connecting rod can drive the first connecting rod to move along the through hole, the first connecting rod is driven to move along the through hole, the distance between the top plate and the connecting shell can be changed, the positions of the first piston, the air cavity and the second piston in the connecting shell are adjusted, the position of the probe is adjusted, accordingly devices with different thicknesses can be adapted, and the applicability of the device is improved.
Drawings
FIG. 1 is a schematic view of the overall structure of a first view angle of the test apparatus of the present invention;
FIG. 2 is a schematic diagram of the overall structure of the testing apparatus according to the present invention at a second view angle;
FIG. 3 is an enlarged view of the invention at A of FIG. 2;
fig. 4 is a partial structural perspective view of the test apparatus for DFN semiconductor devices according to the present invention;
FIG. 5 is a partial perspective view of a test apparatus for a DFN semiconductor device according to the present invention;
fig. 6 is a cross-sectional view of a test housing of the test apparatus for DFN semiconductor devices according to the present invention;
fig. 7 is a partial structural cross-sectional view of a test apparatus for DFN semiconductor devices according to the present invention;
fig. 8 is a schematic diagram of a partial electrical control of the test apparatus for DFN semiconductor devices according to the present invention.
In the above figures: 1. a base; 2. a detection housing; 201. a substrate; 3. a connection housing; 4. an air circulation device; 5. a hydraulic rod; 6. a support plate; 7. a fixing groove; 8. a cooling sheet; 9. a connecting pipe; 10. a fan housing; 11. a rotation shaft; 12. a fan blade; 13. a gear lever; 14. a heating rod; 15. a driving rod; 151. tooth slots; 161. a first piston; 162. a second piston; 17. an air cavity; 18. a spring; 19. a through hole; 20. a top plate; 21. a first connecting rod; 22. a second connecting rod; 23. a fixing plate; 24. a motor; 25. a second connecting rod; 26. a third connecting rod; 27. a first support bar; 28. a second support bar; 29. a probe; 30. a heat sink; 31. a fixed block; 32. a PLC controller; 33. and (5) a door plate.
Detailed Description
In the description of this patent, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are based on directions or positional relationships shown in the drawings, are merely for convenience of description and simplification of description, and do not indicate or imply that the apparatus or element in question must have a specific direction, be configured and operated in a specific direction, and thus should not be construed as limiting the invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; furthermore, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in this patent will be understood by those of ordinary skill in the art in a specific context.
Example 1: a test apparatus for DFN semiconductor devices, comprising: base 1 still includes: the device comprises a connecting shell 3, a detecting shell 2 positioned at the top of a base 1 and an air circulation device 4 arranged at one side of the detecting shell 2, wherein a hydraulic rod 5 is respectively arranged at two sides of the base 1, and a supporting plate 6 positioned above the detecting shell 2 is arranged at the top of the two hydraulic rods 5;
a substrate 201 with a fixing groove 7 at the center of the top is arranged in the detection shell 2, the fixing groove 7 is used for placing a device to be detected, and two sides of the detection shell 2 are respectively provided with a refrigerating sheet 8;
the air circulation device 4 comprises a connecting pipe 9, a fan cover 10 and a rotating shaft 11 with fan blades 12, wherein the fan cover 10 with a plurality of heating rods 14 arranged on the inner circumferential wall is arranged on the rear end face of the detection shell 2, the connecting pipe 9 is respectively arranged on two sides of the detection shell 2, and two ends of the connecting pipe 9 are respectively communicated with the detection shell 2 and the fan cover 10, so that a reverse-shaped air flow channel is formed between the detection shell 2 and the fan cover 10;
the rotating shaft 11 is positioned in the fan housing 10, one end of the rotating shaft 11 is fixedly connected with a gear rod 13 positioned outside the fan housing 10, a driving rod 15 is arranged on the side wall of the supporting plate 6, and a tooth slot 151 meshed with the gear rod 13 is arranged at the end part of the driving rod 15;
opening hydraulic stem 5 drives backup pad 6 decline, and actuating lever 15 passes through tooth's socket 151 and gear pole 13 meshing connection, and backup pad 6 drives actuating lever 15 at the downmovement in-process and moves down to drive gear pole 13 rotation, drive rotation axis 11 rotation, rotation axis 11 drive flabellum 12 at fan housing 10 inside rotation, the connecting pipe 9 through one side will detect the air introduction fan housing 10 in the casing 2, the connecting pipe 9 through the opposite side will detect the casing 2 with the interior air of fan housing 10, thereby form the circulation channel of air between fan housing 10 and detection casing 2, the homogeneity of detecting the interior temperature of casing 2 has been improved greatly.
The connecting shell 3 is positioned at one side of the supporting plate 6 opposite to the detecting shell 2, a first piston 161 and a second piston 162 are arranged in the connecting shell, the first piston 161 and the second piston 162 are distributed up and down and form an air cavity 17 between the first piston 161 and the second piston 162, and a spring 18 is arranged between the second piston 162 and the inner wall of the bottom of the connecting shell 3;
a top plate 20 is arranged above the connecting housing 3, a first supporting rod 27 installed at the bottom of the top plate 20 can penetrate through the top wall of the connecting housing 3 to be fixedly connected with a first piston 161, the upper end of a second supporting rod 28 is connected with a second piston 162, and the lower end with a probe 29 is positioned in the detecting housing 2;
the two ends of the supporting plate 3 are respectively provided with a through hole 19, the top plate 20 is provided with a first connecting rod 21 which is used for being embedded into the through holes 19, the lower surface of the supporting plate 6 is provided with a fixed plate 23, one side of the fixed plate 23 is provided with a motor 24, a second connecting rod 25 which is positioned below the first connecting rod 21 is fixedly connected with the output shaft of the motor 24, a third connecting rod 26 is respectively connected with the lower end of the first connecting rod 21 and the upper end of the second connecting rod 22 in a rotating way, and when the motor 21 is started, the rotating second connecting rod 25 can drive the first connecting rod 21 to move along the through holes 19.
When the thickness of the detection chip changes, the position of the probe 29 needs to be adjusted, the motor 24 can be started to drive the second connecting rod 25 to rotate, and the third connecting rod 26 is connected with the first connecting rod 21 and the second connecting rod 25 in a rotating way, so that the second connecting rod 25 can drive the first connecting rod 21 to descend along the through hole 19 in the rotating process, drive the first piston 161 below the top plate 20 to descend, squeeze air in the air cavity 17, push the second piston 162 to descend, drive the second supporting rod 28 to move downwards, and realize the downward movement of the probe 29 in the position in the detection shell 2;
a PLC controller 32 is provided on one side of the base 1; the PLC controller 32 is electrically connected to the hydraulic lever 5, the probe 29, the cooling plate 8, the heating lever 14, and the motor 24.
A plurality of cooling fins 30 are arranged on the opposite side of the cooling fin 12; the heat radiating fins 30 are arranged at equal intervals, so that the heat radiating efficiency of the refrigerating fin 12 is improved.
The heating rods 14 are equidistantly arranged on the circumferential inner wall of the fan housing 10, so that the uniformity of temperature is further improved.
The front end face of the detection housing 2 is provided with a door panel 33.
The detection shells 2 are equidistantly arranged at intervals.
Example 2: a test apparatus for DFN semiconductor devices, comprising: base 1 still includes: the device comprises a connecting shell 3, a detecting shell 2 positioned at the top of a base 1 and an air circulation device 4 arranged at one side of the detecting shell 2, wherein a hydraulic rod 5 is respectively arranged at two sides of the base 1, and a supporting plate 6 positioned above the detecting shell 2 is arranged at the top of the two hydraulic rods 5;
a substrate 201 with a fixing groove 7 at the center of the top is arranged in the detection shell 2, the fixing groove 7 is used for placing a device to be detected, and two sides of the detection shell 2 are respectively provided with a refrigerating sheet 8;
the air circulation device 4 comprises a connecting pipe 9, a fan cover 10 and a rotating shaft 11 with fan blades 12, wherein the fan cover 10 with a plurality of heating rods 14 arranged on the inner circumferential wall is arranged on the rear end face of the detection shell 2, the connecting pipe 9 is respectively arranged on two sides of the detection shell 2, and two ends of the connecting pipe 9 are respectively communicated with the detection shell 2 and the fan cover 10, so that a reverse-shaped air flow channel is formed between the detection shell 2 and the fan cover 10;
the temperature environment in the detection shell 2 can be changed through the refrigerating sheet 8 and the heating rod 14, the device is tested under the high-temperature and low-temperature environment, the detection shell 2 is communicated with the fan housing 10 through the connecting pipe 9, the rotary shaft 11 is driven to rotate under the cooperation of the tooth slot 151 of the driving rod 15 and the gear rod 13, so that air circularly flows between the detection shell 2 and the fan housing 10, the uniformity of the temperature of the environment in the detection shell is improved, the reliability of a test result is ensured, the damage condition of parts caused by local overheating is effectively avoided, and the reliability of the whole device is improved.
The rotating shaft 11 is positioned in the fan housing 10, one end of the rotating shaft 11 is fixedly connected with a gear rod 13 positioned outside the fan housing 10, a driving rod 15 is arranged on the side wall of the supporting plate 6, and a tooth slot 151 meshed with the gear rod 13 is arranged at the end part of the driving rod 15;
the connecting shell 3 is positioned at one side of the supporting plate 6 opposite to the detecting shell 2, a first piston 161 and a second piston 162 are arranged in the connecting shell, the first piston 161 and the second piston 162 are distributed up and down and form an air cavity 17 between the first piston 161 and the second piston 162, and a spring 18 is arranged between the second piston 162 and the inner wall of the bottom of the connecting shell 3;
a top plate 20 is arranged above the connecting housing 3, a first supporting rod 27 installed at the bottom of the top plate 20 can penetrate through the top wall of the connecting housing 3 to be fixedly connected with a first piston 161, the upper end of a second supporting rod 28 is connected with a second piston 162, and the lower end with a probe 29 is positioned in the detecting housing 2;
the first piston 161 and the second piston 162 are matched with the spring 18, so that soft contact between the probe 29 and the device can be realized, stable connection between the probe and the device can be maintained through the air cavity 17 and the spring 18, the position accuracy of the probe is improved, misjudgment caused by non-contact between the probe and the device is reduced, and the detection accuracy is improved;
the two ends of the supporting plate 3 are respectively provided with a through hole 19, the top plate 20 is provided with a first connecting rod 21 which is used for being embedded into the through holes 19, the lower surface of the supporting plate 6 is provided with a fixed plate 23, one side of the fixed plate 23 is provided with a motor 24, a second connecting rod 25 which is positioned below the first connecting rod 21 is fixedly connected with the output shaft of the motor 24, a third connecting rod 26 is respectively connected with the lower end of the first connecting rod 21 and the upper end of the second connecting rod 22 in a rotating way, and when the motor 21 is started, the rotating second connecting rod 25 can drive the first connecting rod 21 to move along the through holes 19.
The distance between the top plate 20 and the connecting shell 3 can be adjusted by driving the first connecting rod 21 to move along the through hole 19, so that the positions of the first piston 161, the air cavity 17 and the second piston 162 in the connecting shell 3 are adjusted, the position of the probe 29 is adjusted, devices with different thicknesses can be detected, and the applicability of the device is improved
A PLC controller 32 is disposed on one side of the base 1, and the PLC controller 32 is electrically connected to the hydraulic rod 5, the probe 29, the cooling plate 8, the heating rod 14, and the motor 24.
The heating rods 14 are disposed at equal intervals on the circumferential inner wall of the fan housing 10.
The driving rod 15 has an inverted "L" shape in cross section.
The two sides of the base 1 are respectively provided with a fixed block 31, and the bottom of the hydraulic rod 5 is fixedly arranged on the top surface of the fixed block 31.
The front end face of the detection housing 2 is provided with a door panel 33.
Working principle: firstly, fixing a DFN device body to be tested in a fixing groove 7 of a substrate 201, then selecting a low-temperature environment or a high-temperature environment through a PLC, reducing the internal environment temperature of a detection shell 2 through a refrigerating sheet 8, and increasing the internal environment temperature of a fan housing 10 through a heating rod 14;
then, the hydraulic rod 5 is started to drive the supporting plate 6 to descend, in the first stage of descending of the hydraulic rod 5, the probe 29 is not contacted with the DFN device, the driving rod 15 is meshed and connected with the gear rod 13 through the tooth slot 151, the supporting plate 6 drives the driving rod 15 to move downwards in the downward moving process, so that the gear rod 13 is driven to rotate, the rotating shaft 11 drives the fan blades 12 to rotate in the fan housing 10, air in the detection housing 2 is introduced into the fan housing 10 through the connecting pipe 9 on one side, and air in the fan housing 10 is discharged into the detection housing 2 through the connecting pipe 9 on the other side, so that an air circulation channel is formed between the fan housing 10 and the detection housing 2, the uniformity of air temperature distribution is greatly improved, and the reliability of a test is ensured;
the supporting plate 6 continues to move downwards to drive the second supporting rod 28 to move downwards until the probe 29 contacts with the DFN device, so that the probe 29 below the second supporting rod 28 contacts with the conductive pad on the DFN device body;
in the second stage of descent, after the probe 29 contacts with the DFN device, the hydraulic rod 5 continues to shrink, the support plate 6 continues to descend, under the blocking of the DFN device, the probe 29 cannot move downwards, so that the second support rod 28 and the support plate 6 relatively displace, the second piston 162 moves upwards to squeeze air in the air cavity 17, and under the cooperation of the second piston 162 and the spring 18, the spring 18 is in a tensile state, and the second piston 162 has a tensile force, so that the moving process of the second support rod 28 can be buffered, the upward moving resistance of the second support rod 28 is increased, and meanwhile, the tight contact between the probe 29 and the device can be maintained for screening products;
when the thickness of the detection chip changes, the position of the probe 29 needs to be adjusted, the motor 24 can be started to drive the second connecting rod 25 to rotate, and the third connecting rod 26 is connected with the first connecting rod 21 and the second connecting rod 25 in a rotating way, so that the second connecting rod 25 can drive the first connecting rod 21 to descend along the through hole 19 in the rotating process, drive the first piston 161 below the top plate 20 to descend, squeeze air in the air cavity 17, push the second piston 162 to descend, drive the second supporting rod 28 to move downwards, and realize the downward movement of the probe 29 in the position in the detection shell 2;
by controlling the extension of the hydraulic rod 5, the supporting plate 6 is driven to move upwards, so that the probe 29 is separated from the device.
When the test equipment for the DFN semiconductor device is adopted, the two sides of the detection shell are respectively provided with the refrigerating sheets, the fan housing with the plurality of heating rods arranged on the circumferential inner wall is arranged on the rear end face of the detection shell, the connecting pipes are respectively arranged on the two sides of the detection shell, and the two ends of each connecting pipe are respectively communicated with the detection shell and the fan housing, so that a 'back' air flow channel is formed between the detection shell and the fan housing, the rotating shaft is positioned in the fan housing, one end of the rotating shaft is fixedly connected with the gear rod positioned at the outer side of the fan housing, the side wall of the supporting plate is provided with the driving rod, the end part of the driving rod is provided with the tooth slot which is meshed with the gear rod, the temperature environment in the shell can be changed through the refrigerating sheets and the heating rods, the device is tested in high-temperature and low-temperature environments, and under the cooperation of the tooth slot and the gear rod of the driving rod, the rotating shaft is driven to circularly flow between the detection shell and the fan housing, thereby the uniformity of the internal environment temperature of the detection shell is improved, the accuracy of the test result is ensured, and the part damage caused by partial overheat is effectively avoided.
The first piston and the second piston are arranged in the connecting shell, an air cavity is formed between the first piston and the second piston, a spring is arranged between the second piston and the inner wall of the bottom of the connecting shell, a second supporting rod arranged at the bottom of the top plate can penetrate through the top wall of the connecting shell and is fixedly connected with the first piston, the upper end of the second supporting rod is connected with the second piston, the lower end of the second supporting rod is provided with a probe and is positioned in the detecting shell, the soft contact between the probe and a device can be realized through the cooperation of the first piston and the second piston and the spring, the damage probability of the probe to the device is reduced, the stable connection between the probe and the device can be maintained through the air cavity and the spring, the position precision of the probe is improved, the misjudgment caused by the fact that the probe is not contacted with the device is reduced, the working reliability of equipment is improved, and the reliability of the test is ensured;
further, a through hole is respectively formed in two ends of the supporting plate, the top plate is provided with a first connecting rod which is used for being embedded into the through hole, the lower surface of the supporting plate is provided with a fixing plate, one side of the fixing plate is provided with a motor, a second connecting rod which is located under the first connecting rod is fixedly connected with an output shaft of the motor, a third connecting rod is respectively connected with the lower end of the first connecting rod and the upper end of the second connecting rod in a rotating mode, when the motor rotates, the second connecting rod can drive the first connecting rod to move along the through hole, the first connecting rod is driven to move along the through hole, the distance between the top plate and the connecting shell can be changed, the positions of the first piston, the air cavity and the second piston in the connecting shell are adjusted, the position of the probe is adjusted, accordingly devices with different thicknesses can be adapted, and the applicability of the device is improved.
The above embodiments are provided to illustrate the technical concept and features of the present invention and are intended to enable those skilled in the art to understand the content of the present invention and implement the same, and are not intended to limit the scope of the present invention. All equivalent changes or modifications made in accordance with the spirit of the present invention should be construed to be included in the scope of the present invention.

Claims (9)

1. A test apparatus for DFN semiconductor devices, comprising: base (1), its characterized in that: further comprises: the device comprises a connecting shell (3), a detection shell (2) positioned at the top of a base (1) and an air circulation device (4) arranged at one side of the detection shell (2), wherein a hydraulic rod (5) is respectively arranged at two sides of the base (1), and a supporting plate (6) positioned above the detection shell (2) is arranged at the top of the two hydraulic rods (5);
a base plate (201) with a fixing groove (7) at the center of the top is arranged in the detection shell (2), the fixing groove (7) is used for placing a device to be detected, and two sides of the detection shell (2) are respectively provided with a refrigerating sheet (8); the air circulation device (4) comprises a connecting pipe (9), a fan cover (10) and a rotating shaft (11) with fan blades (12), wherein the fan cover (10) with a plurality of heating rods (14) arranged on the inner wall of the periphery is arranged on the rear end face of the detection shell (2), the connecting pipe (9) is respectively arranged on two sides of the detection shell (2), two ends of the connecting pipe (9) are respectively communicated with the detection shell (2) and the fan cover (10), a reverse air flow channel is formed between the detection shell (2) and the fan cover (10), the rotating shaft (11) is positioned in the fan cover (10), one end of the rotating shaft (11) is fixedly connected with a gear rod (13) positioned on the outer side of the fan cover (10), a driving rod (15) is arranged on the side wall of the supporting plate (6), and a tooth groove (151) meshed and connected with the gear rod (13) is formed at the end part of the driving rod (15).
The connecting shell (3) is positioned on one side of the supporting plate (6) opposite to the detecting shell (2), a first piston (161) and a second piston (162) are arranged in the connecting shell, the first piston (161) and the second piston (162) are distributed up and down, an air cavity (17) is formed between the first piston and the second piston, and a spring (18) is arranged between the second piston (162) and the inner wall of the bottom of the connecting shell (3); a top plate (20) is arranged above the connecting shell (3), a first supporting rod (27) arranged at the bottom of the top plate (20) can penetrate through the top wall of the connecting shell (3) to be fixedly connected with the first piston (161), the upper end of a second supporting rod (28) is connected with the second piston (162), and the lower end of the second supporting rod with a probe (29) is positioned in the detecting shell (2);
a through hole (19) has respectively been seted up at both ends of backup pad (3), roof (20) have a head rod (21) that are used for embedding through hole (19), are provided with a fixed plate (23) at backup pad (6) lower surface, and a motor (24) is installed to one side of this fixed plate (23), and second connecting rod (25) and motor (24) output shaft fixed connection that are located head rod (21) below, third connecting rod (26) are connected with the lower extreme of head rod (21) respectively, the upper end rotation of second connecting rod (22), and when motor (21) start-up, pivoted second connecting rod (25) can drive head rod (21) along through hole (19) removal.
2. The test apparatus for DFN semiconductor devices according to claim 1, wherein: one side of the base (1) is provided with a PLC controller (32).
3. The test apparatus for DFN semiconductor devices according to claim 2, wherein: the PLC controller (32) is electrically connected with the hydraulic rod (5), the probe (29), the refrigerating sheet (8), the heating rod (14) and the motor (24).
4. A testing apparatus for QFN devices according to claim 1 or 3, wherein: the opposite sides of the refrigerating sheets (12) are provided with a plurality of radiating fins (30).
5. The testing apparatus for QFN devices of claim 1, wherein: the radiating fins (30) are arranged at equal intervals.
6. The testing apparatus for QFN devices of claim 1, wherein: the heating rods (14) are equidistantly arranged on the circumferential inner wall of the fan housing (10).
7. The testing apparatus for QFN devices of claim 1, wherein: the section of the driving rod (15) is in an inverted L shape.
8. The test apparatus for DFN semiconductor devices according to claim 1, wherein: the two sides of the base (1) are respectively provided with a fixed block (31), and the bottom of the hydraulic rod (5) is fixedly arranged on the top surface of the fixed block (31).
9. The test apparatus for DFN semiconductor devices according to claim 1, wherein: the front end face of the detection shell (2) is provided with a door plate (33).
CN202211001591.5A 2022-08-19 2022-08-19 Test equipment for DFN semiconductor device Pending CN117590182A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202211001591.5A CN117590182A (en) 2022-08-19 2022-08-19 Test equipment for DFN semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202211001591.5A CN117590182A (en) 2022-08-19 2022-08-19 Test equipment for DFN semiconductor device

Publications (1)

Publication Number Publication Date
CN117590182A true CN117590182A (en) 2024-02-23

Family

ID=89908688

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202211001591.5A Pending CN117590182A (en) 2022-08-19 2022-08-19 Test equipment for DFN semiconductor device

Country Status (1)

Country Link
CN (1) CN117590182A (en)

Similar Documents

Publication Publication Date Title
CN210090620U (en) High-low temperature test equipment for semiconductor chip test
KR0175268B1 (en) Bare chip test device with horizontal top-down connection
CN111556692B (en) Server liquid cooling system utilizing thermoelectric power generation for heat dissipation and control method thereof
CN101520470A (en) Probe card, manufacturing method of probe card, semiconductor inspection apparatus and manufacturing method of semiconductor device
CN100550360C (en) Equipment and system and manufacture method thereof with bottom heat radiation
CN107517570B (en) Heat dissipation method of heat dissipation device for communication equipment
CN207281106U (en) Small lead pin pitch semiconductor devices bare chip aging test socket
CN210491228U (en) Heating device for detecting temperature suitable for heat conducting sheet
CN107873080A (en) Instrument, semiconductor device evaluating apparatus and semiconductor device evaluation method are used in semiconductor device evaluation
CN117590182A (en) Test equipment for DFN semiconductor device
CN213366767U (en) Phased array antenna test module
CN111426942B (en) Optimized chip temperature resistance testing device
CN212722972U (en) Test fixture for optical communication device
CN209964058U (en) High and low temperature tracking error testing device for optical device
CN212706302U (en) Multifunctional clamp for optical device
CN212432483U (en) Clamp for testing luminescent device
CN213408765U (en) Cold and hot impact test bench convenient to control
CN114113969B (en) Test system for laser chip
CN1257209A (en) Small interval contactor
CN210670716U (en) High heat dissipation type PCB mainboard
KR100541730B1 (en) Inspecting apparatus for semiconductor device
CN113030523A (en) Aging test socket for optical imaging micro-system module
JPH07321168A (en) Probe card
CN112782217A (en) Thermal resistance test fixture for flip chip
CN219165009U (en) Integrated circuit test carrier plate

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination