CN117583749A - High-precision special-shaped glass laser cutting system - Google Patents

High-precision special-shaped glass laser cutting system Download PDF

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Publication number
CN117583749A
CN117583749A CN202311775823.7A CN202311775823A CN117583749A CN 117583749 A CN117583749 A CN 117583749A CN 202311775823 A CN202311775823 A CN 202311775823A CN 117583749 A CN117583749 A CN 117583749A
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Prior art keywords
laser
glass
cutting
optical system
dimensional
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徐芳
徐如霞
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Jiangsu Honghu Laser Technology Co ltd
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Jiangsu Honghu Laser Technology Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/16Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/40Removing material taking account of the properties of the material involved
    • B23K26/402Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/54Glass

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention belongs to the technical field of glass laser cutting, in particular to a high-precision special-shaped glass laser cutting system which is characterized by comprising the following parts: the ultra-short pulse high-power femtosecond laser, the optical system, the control system, the cooling system and the protection system have the advantages that high-precision special-shaped cutting and drilling of glass with various types and thicknesses can be realized, rapid, accurate and flexible cutting and drilling of the glass can be realized, a cutter is not required to be replaced, subsequent processing is not required, and the speed and the precision of cutting and drilling can be adjusted according to the requirements of users; the quality and repeatability of cutting and drilling can be ensured, the cut is smooth, smooth and burr-free, and only a small heat affected zone is provided, so that the performance and appearance of the glass can not be affected.

Description

High-precision special-shaped glass laser cutting system
Technical Field
The invention relates to the technical field of glass laser cutting, in particular to a high-precision special-shaped glass laser cutting system.
Background
Glass is an important engineering material widely applied to the fields of construction, medical treatment, automobiles and the like, and has the characteristics of transparency, attractive appearance, durability and the like. With the development of glass technology, the shape and function of glass are more and more diversified, and precise, flexible and efficient cutting and processing of glass are required, and at present, the main methods for cutting glass include mechanical cutting, thermal cutting and laser cutting. Mechanical cutting is a method of scoring or grinding glass with a hard material such as a cutter or a grinding wheel, and then breaking the glass along the score by external force or internal stress. The thermal cutting is a method of heating glass by using a high temperature heat source such as flame, arc or plasma to generate thermal stress and thermal crack on the glass, and then breaking the glass by cooling or external force. Laser cutting is a method of irradiating glass with a laser beam to locally melt, vaporize or change a microstructure of the glass, and then breaking the glass by external force or internal stress.
In the related art, the existing laser cutting has good effect on thinner glass, but for thicker glass, the laser cutting speed is reduced, and larger heat affected zone and thermal deformation can be generated, the quality and precision of cutting are affected, the cost of equipment and maintenance of the laser cutting is higher, large investment and manpower are required, the service life of the laser is influenced by the use frequency and environmental factors, periodic replacement and calibration are required, harmful ultraviolet radiation can be generated in the laser cutting process, skin cancer and eye injury can be caused, and smoke generated by the laser cutting can be harmful to human health, and effective protection and exhaust measures are required.
The above information disclosed in this background section is only for the understanding of the background of the inventive concept and, therefore, it may contain information that does not form the prior art.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a high-precision special-shaped glass laser cutting system to solve the problems that the existing laser cutting in the background art has good effect on thinner glass, but the speed of laser cutting is reduced and larger heat affected zone and thermal deformation are possibly generated for thicker glass, the quality and precision of cutting are affected, the equipment and maintenance cost of laser cutting are high, large investment and manpower are required, the service life of a laser is influenced by the use frequency and environmental factors, harmful ultraviolet radiation is required to be generated in the process of laser cutting, skin cancer and eye injury are possibly caused, and smoke generated by laser cutting is possibly harmful to human health and effective protection and exhaust measures are required to be adopted.
The technical scheme adopted for solving the technical problems is as follows: a high-precision special-shaped glass laser cutting system comprises the following parts:
the ultra-short pulse high-power femtosecond laser is used for generating high-quality laser beams, and the wavelength, pulse width, repetition frequency and average power of the laser can be adjusted according to different glass materials and thicknesses;
the optical system is used for focusing, deflecting and scanning the laser beam and comprises a focusing lens with high numerical aperture, a two-dimensional vibrating mirror, a three-dimensional platform and an optical sensor, and the optical system is used for cutting and drilling the glass in two dimensions and three dimensions;
the control system is used for coordinating and controlling the laser and the optical system and comprises a laser controller, a galvanometer controller, a platform controller and a graphical user interface, and can generate control signals of the corresponding laser and the optical system according to parameters and patterns of cutting and drilling input by a user;
the cooling system is used for cooling the laser and the optical system and comprises a water cooler and a fan, and the cooling system can ensure the stable operation of the laser and the optical system;
the protection system is used for protecting and removing harmful radiation and smoke generated in the laser cutting process and comprises a laser protection cover, a smoke exhaust device and laser protection glasses, and the protection system can protect safety of operators and environment.
As an optimized technical scheme, the ultrashort pulse high-power femtosecond laser is an all-fiber laser system realized by utilizing fiber technology and chirped pulse amplification technology (CPA), and comprises the following parts:
a seed laser for generating an initial femtosecond laser pulse, typically a mode-locked fiber laser, capable of generating laser pulses having a wavelength of 800-1100nm, a pulse width of hundreds of femtoseconds, a repetition rate of tens of megahertz, and an average power of hundreds of milliwatts;
the stretcher is used for stretching the seed laser pulse in time to reduce the peak power of the seed laser pulse and prevent nonlinear effects in the subsequent amplifying process, and is a Chirped Fiber Bragg Grating (CFBG) which can stretch the pulse width from hundreds of femtoseconds to nanoseconds and keep the frequency spectrum width unchanged;
an amplifier for amplifying the power of the stretched laser pulse, which is an optical fiber amplifier (YDF) doped with yttrium ions, and can amplify the laser pulse in multiple stages by using a pumping light source while maintaining the linear polarization and high beam quality thereof;
the compressor is used for compressing the amplified laser pulse in time to restore the original femtosecond pulse width and improve the peak power, is a Chirped Fiber Bragg Grating (CFBG), can compress the pulse width from a few nanoseconds to hundreds of femtoseconds, even tens of femtoseconds, and can compensate the high-order dispersion and improve the compression efficiency.
As an optimized technical scheme, the optical system is an optical system for focusing, deflecting and scanning a laser beam, and comprises the following parts:
a high numerical aperture focusing lens for focusing the laser pulse transmitted from the laser to the surface or inside of the glass to form a high-density laser spot, wherein the larger the numerical aperture of the focusing lens is, the smaller the focused laser spot is, and the higher the cutting precision is;
the two-dimensional vibrating mirror is used for rapidly deflecting and scanning the focused laser spots to realize two-dimensional cutting of glass, and consists of two electric-driven rotating mirrors for respectively controlling the movement of the laser spots in the horizontal and vertical directions, and the scanning speed and the scanning range of the two-dimensional vibrating mirror can be adjusted according to the requirements of users;
the three-dimensional platform is used for accurately positioning and moving the glass and realizing three-dimensional cutting and drilling of the glass, the three-dimensional platform consists of three electrically driven sliding tables, the movement of the glass in the directions X, Y, Z is controlled respectively, and the moving speed and the moving range of the three-dimensional platform can be adjusted according to the requirements of users;
the optical sensor is used for detecting and feeding back the thickness and the shape of the glass in real time to realize self-adaptive cutting and drilling of the glass, and consists of a light source and a photoelectric detector.
As an optimized technical scheme, the control system is used for coordinating and controlling the laser and the optical system and comprises the following components:
the laser controller is used for setting and adjusting the wavelength, pulse width, repetition frequency and average power of the laser to adapt to different glass materials and thicknesses, and can communicate with the laser through an optical fiber transmission line to send and receive the working state and parameters of the laser;
the vibrating mirror controller is used for setting and adjusting the rotation angles of the two-dimensional vibrating mirror in the horizontal and vertical directions so as to realize rapid deflection and scanning of laser spots, and can communicate with the two-dimensional vibrating mirror through a cable to send and receive the working state and parameters of the vibrating mirror;
the platform controller is used for setting and adjusting the moving distance and the moving speed of the three-dimensional platform in the X, Y, Z directions so as to realize the accurate positioning and moving of the glass, and can communicate with the three-dimensional platform through a cable to send and receive the working state and the parameters of the platform;
and the graphic user interface is used for displaying and processing parameters and graphics of cutting and drilling input by a user to generate control signals of corresponding laser and optical systems, and can interact with the user through a computer or a touch screen to provide friendly operation interfaces and instructions.
As an optimized technical scheme, the cooling system comprises a water cooler and a fan, wherein the water cooler is used for cooling the laser, and the fan is used for cooling the optical system; the cooling system is connected with the system in a way that cooling water of the water cooler is conveyed to a water cooling interface of the laser through a water pipe and a cable, and the cable connects a power supply of the fan to a fan interface of the optical system; the cooling system takes away heat generated by the laser and the optical system by utilizing heat exchange of water and air, and keeps the temperature of the laser and the optical system in a proper range so as to prevent overheating or damage.
As an optimized technical scheme, the structure of the protection system comprises a laser protection cover, a smoke exhaust device and laser protection glasses, wherein the laser protection cover is a cover made of transparent laser protection materials, can shield harmful radiation generated in the laser cutting process, prevent laser beams or reflected light thereof from damaging operators or surrounding objects, the smoke exhaust device is a device for absorbing and exhausting smoke and dust generated in the laser cutting process, can keep the cutting area clean and ventilated, and prevent the smoke and dust from polluting the operators or the environment, and the laser protection glasses are glasses for protecting eyes of the operators, can filter light rays with specific wavelengths generated in the laser cutting process, and prevent the laser beams or the reflected light thereof from stabbing eyes of the operators.
As an optimized technical scheme, the working steps of the cutting system are as follows;
s1: the user inputs or selects the type, thickness, shape and pattern of glass to be cut or drilled and other relevant parameters such as laser power, scanning speed, repetition number, etc. through the graphical user interface;
s2: the control system generates corresponding control signals of the laser and the optical system according to the parameters and the graphs input by the user, and sends the control signals to the laser and the optical system;
s3: the laser generates high-quality laser beams according to the control signals and transmits the high-quality laser beams to the optical system through the optical fibers;
s4: the optical system focuses, deflects and scans the laser beam according to the control signal, so that the laser beam forms a high-density laser lattice on the surface or inside of the glass, thereby generating microscopic melting, vaporization or structure change areas in the glass, which are called laser induced change areas (LIMA);
s5: the laser-induced change areas are distributed along a pattern input by a user to form a cut or drilled outline, and then the glass is broken along the outline through external force or internal stress, so that the glass is cut or drilled;
s6: the protection system is used for protecting and removing harmful radiation and smoke generated in the laser cutting process, so that the safety of operators and the environment is protected;
s7: the cooling system cools the laser and the optical system, and ensures the stable operation of the laser and the optical system.
As an optimized technical scheme, the average power P of the laser in the system and the wavelength lambda, pulse width tau, repetition frequency f and peak power P of the laser pulse 0 The relation between the two is:
wherein E is the energy of the laser pulse, h is the Planck constant, and c is the speed of light;
the relationship between the diameter d of the laser spot and the numerical aperture NA of the focusing lens, the wavelength λ of the laser pulse and the focusing distance f is:
rotation angle theta of two-dimensional vibrating mirror x And theta y The relationship between the horizontal and vertical displacements x and y of the laser spot on the glass is:
x=f×tanθ x
y=f×tanθ y
wherein f is a focusing distance of the focusing lens;
the relationship between the moving distance and speed Sx, sy and Sz of the three-dimensional platform and the cutting depth and speed D and V of the laser spot on the glass is:
D=S z
the distance of movement of the three-dimensional platform in the Z direction determines the depth of cut of the laser spot on the glass, while the speed of movement of the three-dimensional platform in the X and Y directions determines the speed of cut of the laser spot on the glass.
The invention has the beneficial effects that:
the high-precision special-shaped cutting and drilling of glass with various types and thicknesses can be realized, and brittle materials such as tempered glass, non-tempered glass, soda lime glass and the like can be cut, and 2D and 3D curved glass can be cut; the rapid, accurate and flexible cutting and drilling of the glass can be realized, the cutter does not need to be replaced, the subsequent treatment is not needed, and the speed and the accuracy of the cutting and drilling can be adjusted according to the requirements of users; the quality and the repeatability of cutting and drilling can be ensured, the cut is flat, smooth and burr-free, only a small heat affected zone is provided, the performance and the appearance of the glass cannot be affected, and the repeatability of cutting and drilling can reach +/-0.05 mm; the loss of materials and the treatment of waste materials can be reduced, the width of a cut of laser cutting is small, the utilization rate of the materials can be improved, and smoke generated by laser cutting can be discharged through a protection system, so that environmental pollution is not caused; the production efficiency can be improved, the cost is reduced, the laser cutting speed is much faster than that of the traditional mechanical cutting and thermal cutting, and especially for complex cutting, the production efficiency can be greatly improved, and the cutter consumption and the energy consumption of the laser cutting are lower, so that the cost can be reduced.
Drawings
FIG. 1 is a system connection block diagram of a high-precision shaped glass laser cutting system provided by the invention;
fig. 2 is a working flow chart of the high-precision shaped glass laser cutting system provided by the invention.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and detailed description, wherein it is to be understood that, on the premise of no conflict, the following embodiments or technical features may be arbitrarily combined to form new embodiments.
It should be noted that, the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," and the like refer to an azimuth or a positional relationship based on that shown in the drawings, or that the inventive product is commonly put in place when used, merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific azimuth, be configured and operated in a specific azimuth, and thus should not be construed as limiting the present invention.
In the description of the present invention, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
Example 1:
the high-precision special-shaped glass laser cutting system in the embodiment comprises the following parts:
the ultra-short pulse high-power femtosecond laser is used for generating high-quality laser beams, and the wavelength, pulse width, repetition frequency and average power of the laser can be adjusted according to different glass materials and thicknesses;
the optical system is used for focusing, deflecting and scanning the laser beam and comprises a focusing lens with high numerical aperture, a two-dimensional vibrating mirror, a three-dimensional platform and an optical sensor, and the optical system is used for cutting and drilling the glass in two dimensions and three dimensions;
the control system is used for coordinating and controlling the laser and the optical system and comprises a laser controller, a galvanometer controller, a platform controller and a graphical user interface, and can generate control signals of the corresponding laser and the optical system according to parameters and patterns of cutting and drilling input by a user;
the cooling system is used for cooling the laser and the optical system and comprises a water cooler and a fan, and the cooling system can ensure the stable operation of the laser and the optical system;
the protection system is used for protecting and removing harmful radiation and smoke generated in the laser cutting process and comprises a laser protection cover, a smoke exhaust device and a laser protection glasses, and the protection system can protect safety of operators and environment.
As an optimized technical scheme, the ultra-short pulse high-power femtosecond laser is an all-fiber laser system realized by utilizing fiber technology and chirped pulse amplification technology (CPA), and comprises the following parts:
a seed laser for generating an initial femtosecond laser pulse, wherein the seed laser is a mode-locked fiber laser capable of generating a laser pulse with a wavelength of 800-1100nm, a pulse width of hundreds of femtoseconds, a repetition frequency of tens of megahertz and an average power of hundreds of milliwatts;
the stretcher is a Chirped Fiber Bragg Grating (CFBG) and can stretch pulse width from hundreds of femtoseconds to a few nanoseconds, and meanwhile, the spectral width of the stretcher is kept unchanged;
an amplifier for amplifying the power of the stretched laser pulse, the amplifier being an yttrium ion doped optical fiber amplifier (YDFA) capable of amplifying the laser pulse in multiple stages by using a pumping light source while maintaining linear polarization and high beam quality thereof;
the compressor is used for compressing the amplified laser pulse in time to restore the original femtosecond pulse width and improve the peak power, and is a Chirped Fiber Bragg Grating (CFBG) which can compress the pulse width from a few nanoseconds to hundreds of femtoseconds, even tens of femtoseconds, and compensate the high-order dispersion and improve the compression efficiency;
the working principle of the laser is that the full-fiber laser system is realized by utilizing the optical fiber technology and the chirped pulse amplification technology (CPA), the core idea is that the initial femtosecond laser pulse is stretched in time and then amplified and compressed, the peak power is reduced, then the amplification is carried out in the optical fiber amplifier, finally the amplified laser pulse is compressed in time and the femtosecond pulse width is restored in the compressor, thereby realizing the generation of the high-power high-peak-power femtosecond laser pulse.
As an optimized technical scheme, the optical system is an optical system for focusing, deflecting and scanning a laser beam, and comprises the following parts:
a high numerical aperture focusing lens for focusing the laser pulse transmitted from the laser to the surface or inside of the glass to form a high-density laser spot, the larger the numerical aperture of the focusing lens is, the smaller the focused laser spot is, and the higher the cutting precision is;
the two-dimensional vibrating mirror is used for rapidly deflecting and scanning the focused laser spots to realize two-dimensional cutting of glass, and consists of two electric-driven rotating mirrors for respectively controlling the movement of the laser spots in the horizontal and vertical directions, and the scanning speed and the scanning range of the two-dimensional vibrating mirror can be adjusted according to the requirements of users;
the three-dimensional platform is used for accurately positioning and moving the glass to realize three-dimensional cutting and drilling of the glass, and consists of three electrically driven sliding tables for respectively controlling the movement of the glass in the directions X, Y, Z, and the moving speed and the moving range of the three-dimensional platform can be adjusted according to the requirements of users;
the optical sensor is used for detecting and feeding back the thickness and the shape of the glass in real time to realize self-adaptive cutting and drilling of the glass, and consists of a light source and a photoelectric detector, the thickness and the curvature of the glass are calculated by measuring reflection and transmission signals of laser spots on the glass, and then the information is sent to the control system to adjust parameters of the laser and the optical system so as to ensure the quality and the precision of cutting and drilling;
the working principle of the optical system is that focusing, deflection and scanning of laser beams are utilized to realize two-dimensional and three-dimensional cutting and drilling of glass, the positions and movements of laser spots on the glass are controlled to form cutting and drilling outlines, then the glass is broken along the outlines through external force or internal stress, so that the glass is cut and drilled.
As an optimized technical scheme, the control system is used for coordinating and controlling the laser and the optical system and comprises the following components:
the laser controller is used for setting and adjusting the wavelength, pulse width, repetition frequency and average power of the laser to adapt to different glass materials and thicknesses, and can communicate with the laser through an optical fiber transmission line to send and receive the working state and parameters of the laser;
the vibrating mirror controller is used for setting and adjusting the rotation angles of the two-dimensional vibrating mirror in the horizontal and vertical directions so as to realize rapid deflection and scanning of laser spots, and can communicate with the two-dimensional vibrating mirror through a cable to send and receive the working state and parameters of the vibrating mirror;
the platform controller is used for setting and adjusting the moving distance and the moving speed of the three-dimensional platform in the X, Y, Z directions so as to realize accurate positioning and moving of the glass, and can communicate with the three-dimensional platform through a cable to send and receive the working state and parameters of the platform;
the graphic user interface is used for displaying and processing parameters and graphics of cutting and drilling input by a user so as to generate control signals of corresponding laser and optical systems, and the graphic user interface can interact with the user through a computer or a touch screen to provide friendly operation interfaces and instructions;
the working principle of the control system is that parameters and graphics of cutting and drilling input by a user are displayed and processed by using a graphic user interface, then control signals of corresponding laser and optical systems are generated according to the information and are respectively sent to a laser controller, a galvanometer controller and a platform controller through an optical fiber transmission line and a cable, so that the laser and the optical systems are coordinated and controlled, high-precision special-shaped cutting and drilling of glass is realized, the problems of errors, inefficiency, instability and the like encountered when the glass is cut in a traditional manual or semi-automatic control mode can be overcome, and meanwhile, the advantages of flexibility, usability, intelligence and the like of the graphic user interface can be utilized, so that the laser and the optical systems can be accurately and rapidly controlled.
In this embodiment, the cooling system is composed of a water cooler for cooling the laser and a fan for cooling the optical system; the connection mode between the cooling system and the system is that the cooling water of the water cooler is conveyed to the water cooling interface of the laser through a water pipe and a cable, and the cable connects the power supply of the fan to the fan interface of the optical system; the cooling system takes away heat generated by the laser and the optical system by utilizing heat exchange of water and air, and keeps the temperature of the laser and the optical system in a proper range so as to prevent overheating or damage;
the laser protection cover is a cover made of transparent laser protection materials, can shield harmful radiation generated in the laser cutting process, prevent laser beams or reflected light thereof from damaging operators or surrounding objects, the smoke exhaust device is a device for absorbing and exhausting smoke and dust generated in the laser cutting process, can keep a cutting area clean and ventilated, prevents the smoke and dust from polluting the operators or the environment, and the laser protection glasses are glasses for protecting eyes of the operators, can filter light rays with specific wavelengths generated in the laser cutting process, and prevent laser beams or reflected light thereof from stabbing eyes of the operators.
Example 2:
in this embodiment, the working steps of the cutting system are;
s1: the user inputs or selects the type, thickness, shape and pattern of glass to be cut or drilled and other relevant parameters such as laser power, scanning speed, repetition number, etc. through the graphical user interface;
s2: the control system generates corresponding control signals of the laser and the optical system according to the parameters and the graphs input by the user, and sends the control signals to the laser and the optical system;
s3: the laser generates high-quality laser beams according to the control signals and transmits the high-quality laser beams to the optical system through the optical fibers;
s4: the optical system focuses, deflects and scans the laser beam according to the control signal, so that the laser beam forms a high-density laser lattice on the surface or inside of the glass, thereby generating microscopic melting, vaporization or structure change areas in the glass, which are called laser induced change areas (LIMA);
s5: the laser-induced change areas are distributed along a pattern input by a user to form a cut or drilled outline, and then the glass is broken along the outline through external force or internal stress, so that the glass is cut or drilled;
s6: the protection system is used for protecting and removing harmful radiation and smoke generated in the laser cutting process, so that the safety of operators and the environment is protected;
s7: the cooling system cools the laser and the optical system, and ensures the stable operation of the laser and the optical system.
Specifically, the average power P of the laser in the system is equal to the wavelength lambda, pulse width tau, repetition frequency f and peak power P of the laser pulse 0 The relation between the two is:
where E is the energy of the laser pulse, h is the Planck constant, c is the speed of light, this expression states that the average power of the laser can be varied by adjusting the wavelength, pulse width, or repetition rate of the laser pulse, while the peak power is inversely proportional to the wavelength and pulse width, independent of the repetition rate;
the relationship between the diameter d of the laser spot and the numerical aperture NA of the focusing lens, the wavelength λ of the laser pulse and the focusing distance f is:
this expression shows that the diameter of the laser spot is inversely proportional to the numerical aperture of the focusing lens, and proportional to the wavelength and focusing distance of the laser pulse. Thus, to obtain smaller laser spots, a larger numerical aperture, shorter wavelength or closer focus distance may be selected;
rotation angle theta of two-dimensional vibrating mirror x And theta y The relationship between the horizontal and vertical displacements x and y of the laser spot on the glass is:
x=f×tanθ x
y=f×tanθ y
where f is the focal distance of the focusing lens, these expressions indicate that the rotation angle of the two-dimensional galvanometer is proportional to the displacement of the laser spot, and the larger the rotation angle, the larger the displacement, and therefore, in order to achieve rapid deflection and scanning of the laser spot, a larger rotation angle, or a smaller focal distance, can be selected;
the relationship between the moving distance and speed Sx, sy and Sz of the three-dimensional platform and the cutting depth and speed D and V of the laser spot on the glass is:
D=S z
the moving distance of the three-dimensional platform in the Z direction determines the cutting depth of the laser spot on the glass, and the moving speeds of the three-dimensional platform in the X and Y directions determine the cutting speed of the laser spot on the glass, so that in order to realize accurate positioning and moving of the glass, the moving distance and speed of the three-dimensional platform can be adjusted according to the cutting depth and speed input by a user;
assuming that a user wants to cut a piece of soda lime glass having a thickness of 5mm by using a laser cutting system, the cut pattern is a circular hole having a diameter of 10mm, the cut depth is 5mm, and the cutting speed is 10mm/s. The wavelength, pulse width, repetition frequency and average power of the laser are selected to be suitable according to the type and thickness of the glass, so that the glass can be effectively cut while avoiding overheating or damaging the glass. Assume that the laser is selected to have a wavelength of 1064nm, a pulse width of 500fs, a repetition rate of 100kHz, and an average power of 100W. Then the control system needs to send the following control signals to the laser controller:
wavelength: 1064nm
Pulse width: 500fs
Repetition frequency: 100kHz
Average power: 100W
According to the cut graph, the change rule of the rotation angle of the two-dimensional vibrating mirror in the horizontal direction and the vertical direction is calculated, so that the laser spots can be rapidly deflected and scanned, and the outline of the round hole is formed. Assuming that the focusing distance of the focusing lens is 100mm, the diameter of the laser spot can be found according to the previous mathematical expression as:
to ensure the quality and accuracy of the cut, the diameter of the laser spot should be less than 10% of the diameter of the circular hole, i.e. d <1mm, so this condition is fulfilled. Then, according to the diameter of the round hole, the maximum rotation angle of the two-dimensional vibrating mirror can be obtained as follows:
in order to ensure the uniformity and continuity of the cut, the moving distance of the laser spot should be less than 50% of the diameter of the laser spot, i.e. Δx <0.5d, so the variation of the rotation angle of the two-dimensional galvanometer should satisfy:
therefore, the control system needs to send the following control signals to the galvanometer controller to make the rotation angle of the two-dimensional galvanometer in the horizontal and vertical directions be-theta max And theta max And delta theta is used as a variation quantity, and the variation is carried out according to the rule of circular motion, so that the rapid deflection and scanning of the laser spots are realized, and the outline of the circular hole is formed:
rotation angle in horizontal direction:θ x =θ max cosωt;
Rotation angle in vertical direction: θ y =θ max sinωt;
Wherein ω is the angular velocity of the circular motion, which can be calculated from the cutting speed and the radius of the circular hole, namely:
according to the depth and the speed of cutting, the change rule of the moving distance and the speed of the three-dimensional platform in the X, Y, Z directions is calculated, so that the glass can be accurately positioned and moved, and the depth of a round hole is formed. Assuming that the initial position of the three-dimensional platform is (0, 0), the moving distance and speed of the three-dimensional platform can be obtained according to the previous mathematical expression as follows:
distance of movement in the X direction: s is S x =0
Speed of movement in X direction: s is S x =0
Distance of movement in the Y direction: s is S y =0
Speed of movement in Y direction: s is S y =0
Distance of movement in the Z direction: s is S z =-D=-5mm
Speed of movement in the Z direction: s is S z =-V=-10mm/s
Therefore, the control system needs to send the following control signals to the platform controller, so that the three directions of X, Y, Z of the three-dimensional platform move according to the moving distance and the moving speed, and the glass is accurately positioned and moved, and the depth of a round hole is formed:
distance of movement in the X direction: 0mm of
Speed of movement in X direction: 0mm/s
Distance of movement in the Y direction: 0mm of
Speed of movement in Y direction: 0mm/s
Distance of movement in the Z direction: -5mm
Speed of movement in the Z direction: -10mm/s.
The above embodiments are only preferred embodiments of the present invention, and should not be construed as limiting the scope of the present invention, and various combinations, modifications and equivalents may be made by those skilled in the art without departing from the spirit and scope of the invention, and the scope of the claims should be construed as including the appended claims.

Claims (8)

1. A high-precision special-shaped glass laser cutting system is characterized by comprising the following parts:
the ultra-short pulse high-power femtosecond laser is used for generating high-quality laser beams, and the wavelength, pulse width, repetition frequency and average power of the laser can be adjusted according to different glass materials and thicknesses;
the optical system is used for focusing, deflecting and scanning the laser beam and comprises a focusing lens with high numerical aperture, a two-dimensional vibrating mirror, a three-dimensional platform and an optical sensor, and the optical system is used for cutting and drilling the glass in two dimensions and three dimensions;
the control system is used for coordinating and controlling the laser and the optical system and comprises a laser controller, a galvanometer controller, a platform controller and a graphical user interface, and can generate control signals of the corresponding laser and the optical system according to parameters and patterns of cutting and drilling input by a user;
the cooling system is used for cooling the laser and the optical system and comprises a water cooler and a fan, and the cooling system can ensure the stable operation of the laser and the optical system;
the protection system is used for protecting and removing harmful radiation and smoke generated in the laser cutting process and comprises a laser protection cover, a smoke exhaust device and laser protection glasses, and the protection system can protect safety of operators and environment.
2. The high-precision shaped glass laser cutting system according to claim 1, wherein: the ultra-short pulse high-power femtosecond laser is an all-fiber laser system realized by utilizing an optical fiber technology and a chirped pulse amplification technology (CPA), and comprises the following parts:
a seed laser for generating an initial femtosecond laser pulse, said seed laser being a mode-locked fiber laser capable of generating laser pulses having a wavelength of 800-1100nm, a pulse width of several hundred femtoseconds, a repetition rate of several tens of megahertz, and an average power of several hundred milliwatts;
a stretcher for temporally stretching the seed laser pulse to reduce its peak power and prevent nonlinear effects during the subsequent amplification, the stretcher being a Chirped Fiber Bragg Grating (CFBG) capable of stretching the pulse width from several hundred femtoseconds to several nanoseconds while maintaining its spectral width unchanged;
an amplifier for amplifying the power of the stretched laser pulse, the amplifier being an yttrium ion doped fiber amplifier (YDFA) capable of amplifying the laser pulse in multiple stages using a pumping light source while maintaining linear polarization and high beam quality;
and the compressor is a Chirped Fiber Bragg Grating (CFBG), can compress the pulse width from a few nanoseconds to hundreds of femtoseconds, even tens of femtoseconds, and can compensate high-order dispersion and improve compression efficiency.
3. The high-precision shaped glass laser cutting system according to claim 1, wherein: the optical system is an optical system for focusing, deflecting and scanning a laser beam, and is composed of the following parts:
a high numerical aperture focusing lens for focusing the laser pulse transmitted from the laser to the surface or inside of the glass to form a high-density laser spot, wherein the larger the numerical aperture of the focusing lens is, the smaller the focused laser spot is, and the higher the cutting precision is;
the two-dimensional vibrating mirror is used for rapidly deflecting and scanning the focused laser spots to realize two-dimensional cutting of glass, and consists of two electric-driven rotating mirrors for respectively controlling the movement of the laser spots in the horizontal and vertical directions, and the scanning speed and the scanning range of the two-dimensional vibrating mirror can be adjusted according to the requirements of users;
the three-dimensional platform is used for accurately positioning and moving the glass and realizing three-dimensional cutting and drilling of the glass, the three-dimensional platform consists of three electrically driven sliding tables, the movement of the glass in the directions X, Y, Z is controlled respectively, and the moving speed and the moving range of the three-dimensional platform can be adjusted according to the requirements of users;
the optical sensor is used for detecting and feeding back the thickness and the shape of the glass in real time to realize self-adaptive cutting and drilling of the glass, and consists of a light source and a photoelectric detector.
4. The high-precision shaped glass laser cutting system according to claim 1, wherein: the control system is used for coordinating and controlling the laser and the optical system and comprises the following components:
the laser controller is used for setting and adjusting the wavelength, pulse width, repetition frequency and average power of the laser to adapt to different glass materials and thicknesses, and can communicate with the laser through an optical fiber transmission line to send and receive the working state and parameters of the laser;
the vibrating mirror controller is used for setting and adjusting the rotation angles of the two-dimensional vibrating mirror in the horizontal and vertical directions so as to realize rapid deflection and scanning of laser spots, and can communicate with the two-dimensional vibrating mirror through a cable to send and receive the working state and parameters of the vibrating mirror;
the platform controller is used for setting and adjusting the moving distance and the moving speed of the three-dimensional platform in the X, Y, Z directions so as to realize the accurate positioning and moving of the glass, and can communicate with the three-dimensional platform through a cable to send and receive the working state and the parameters of the platform;
and the graphic user interface is used for displaying and processing parameters and graphics of cutting and drilling input by a user to generate control signals of corresponding laser and optical systems, and can interact with the user through a computer or a touch screen to provide friendly operation interfaces and instructions.
5. The high-precision shaped glass laser cutting system according to claim 1, wherein:
the cooling system comprises a water cooler and a fan, wherein the water cooler is used for cooling the laser, and the fan is used for cooling the optical system; the cooling system is connected with the system in a way that cooling water of the water cooler is conveyed to a water cooling interface of the laser through a water pipe and a cable, and the cable connects a power supply of the fan to a fan interface of the optical system; the cooling system takes away heat generated by the laser and the optical system by utilizing heat exchange of water and air, and keeps the temperature of the laser and the optical system in a proper range so as to prevent overheating or damage.
6. The high-precision shaped glass laser cutting system according to claim 1, wherein:
the laser protection cover is a cover made of transparent laser protection materials, can shield harmful radiation generated in the laser cutting process, and prevent laser beams or reflected light thereof from injuring operators or surrounding objects, the smoke exhaust device is a device for absorbing and exhausting smoke and dust generated in the laser cutting process, can keep a cutting area clean and ventilated, and can prevent the smoke and dust from polluting the operators or the environment, and the laser protection glasses are glasses for protecting eyes of the operators, can filter light rays with specific wavelength generated in the laser cutting process, and can prevent the laser beams or the reflected light thereof from stabbing eyes of the operators.
7. The high-precision shaped glass laser cutting system according to claim 1, wherein: the working steps of the cutting system are as follows;
s1: the user inputs or selects the type, thickness, shape and pattern of glass to be cut or drilled and other relevant parameters such as laser power, scanning speed, repetition number, etc. through the graphical user interface;
s2: the control system generates corresponding control signals of the laser and the optical system according to the parameters and the graphs input by the user, and sends the control signals to the laser and the optical system;
s3: the laser generates high-quality laser beams according to the control signals and transmits the high-quality laser beams to the optical system through the optical fibers;
s4: the optical system focuses, deflects and scans the laser beam according to the control signal, so that the laser beam forms a high-density laser lattice on the surface or inside of the glass, thereby generating microscopic melting, vaporization or structure change areas in the glass, which are called laser induced change areas (LIMA);
s5: the laser-induced change areas are distributed along a pattern input by a user to form a cut or drilled outline, and then the glass is broken along the outline through external force or internal stress, so that the glass is cut or drilled;
s6: the protection system is used for protecting and removing harmful radiation and smoke generated in the laser cutting process, so that the safety of operators and the environment is protected;
s7: the cooling system cools the laser and the optical system, and ensures the stable operation of the laser and the optical system.
8. According to claim 1The high-precision special-shaped glass laser cutting system is characterized in that: the average power P of the laser in the system is equal to the wavelength lambda, pulse width tau, repetition frequency f and peak power P of the laser pulse 0 The relation between the two is:
wherein E is the energy of the laser pulse, h is the Planck constant, and c is the speed of light;
the relationship between the diameter d of the laser spot and the numerical aperture NA of the focusing lens, the wavelength λ of the laser pulse and the focusing distance f is:
rotation angle theta of two-dimensional vibrating mirror x And theta y The relationship between the horizontal and vertical displacements x and y of the laser spot on the glass is:
x=f×tanθ x
y=f×tanθ y
wherein f is a focusing distance of the focusing lens;
the relationship between the moving distance and speed Sx, sy and Sz of the three-dimensional platform and the cutting depth and speed D and V of the laser spot on the glass is:
D=S z
the distance of movement of the three-dimensional platform in the Z direction determines the depth of cut of the laser spot on the glass, while the speed of movement of the three-dimensional platform in the X and Y directions determines the speed of cut of the laser spot on the glass.
CN202311775823.7A 2023-12-22 2023-12-22 High-precision special-shaped glass laser cutting system Pending CN117583749A (en)

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Application Number Priority Date Filing Date Title
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117921213A (en) * 2024-03-24 2024-04-26 成都沃特塞恩电子技术有限公司 Laser cutting method and device for controlling kerf width and computer equipment
CN117921197A (en) * 2024-03-21 2024-04-26 上海强华实业股份有限公司 Method, system, equipment and medium for manufacturing special-shaped groove plate by laser precision cutting

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117921197A (en) * 2024-03-21 2024-04-26 上海强华实业股份有限公司 Method, system, equipment and medium for manufacturing special-shaped groove plate by laser precision cutting
CN117921197B (en) * 2024-03-21 2024-06-07 上海强华实业股份有限公司 Method, system, equipment and medium for manufacturing special-shaped groove plate by laser precision cutting
CN117921213A (en) * 2024-03-24 2024-04-26 成都沃特塞恩电子技术有限公司 Laser cutting method and device for controlling kerf width and computer equipment

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