CN117340534B - Quartz boat high-precision assembling and welding device and process thereof - Google Patents
Quartz boat high-precision assembling and welding device and process thereof Download PDFInfo
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- CN117340534B CN117340534B CN202311588911.6A CN202311588911A CN117340534B CN 117340534 B CN117340534 B CN 117340534B CN 202311588911 A CN202311588911 A CN 202311588911A CN 117340534 B CN117340534 B CN 117340534B
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- placing
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 223
- 239000010453 quartz Substances 0.000 title claims abstract description 222
- 238000003466 welding Methods 0.000 title claims abstract description 104
- 238000000034 method Methods 0.000 title claims abstract description 53
- 230000008569 process Effects 0.000 title claims description 45
- 238000012545 processing Methods 0.000 claims abstract description 94
- 238000007664 blowing Methods 0.000 claims abstract description 23
- 238000013519 translation Methods 0.000 claims description 53
- 210000000078 claw Anatomy 0.000 claims description 24
- 238000001816 cooling Methods 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 5
- 238000003860 storage Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 2
- 230000000007 visual effect Effects 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 9
- 230000006698 induction Effects 0.000 description 9
- 238000013461 design Methods 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 230000009471 action Effects 0.000 description 6
- 238000005336 cracking Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000000306 component Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000003517 fume Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
- B23K37/047—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work moving work to adjust its position between soldering, welding or cutting steps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/003—Cooling means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
- B23K37/0426—Fixtures for other work
- B23K37/0435—Clamps
- B23K37/0443—Jigs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/901—Devices for picking-up and depositing articles or materials provided with drive systems with rectilinear movements only
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention relates to the technical field of welding, and discloses a high-precision assembly welding device for a quartz boat, which comprises a placing bracket, a moving bracket, a processing bracket and a positioning bracket, wherein the placing bracket is fixedly arranged on the side edge of the processing bracket; the two sides of the interior of the processing bracket are provided with air blowing pipelines, the positioning frame is assembled below the processing bracket, the middle part of the positioning frame is provided with a rectangular groove, one end of the groove is provided with a welding groove, the other end of the groove is provided with an air cylinder, and the positioning frame is respectively provided with a positioning rod and a motor shaft; thereby reached and all can avoid the quartz boat to receive excessive impact and vibrations at snatching, removal and the in-process of placing, prevented that it from breaking or damaging and can realize accurate location when welding the quartz boat, promoted the effect of welding precision.
Description
Technical Field
The invention relates to the technical field of welding, in particular to a high-precision assembly welding device and a high-precision assembly welding process for a quartz boat.
Background
With the continuous progress of semiconductor technology, the requirements on the precision and the welding technology of quartz boats are also continuously improved. The quartz boat is used as important semiconductor production equipment and is widely applied to diffusion, oxidation, etching and other processes in the semiconductor manufacturing process. The quartz boat is the first choice in the semiconductor manufacturing process because of the excellent thermal stability, corrosion resistance, low thermal expansion coefficient and other characteristics of the quartz material. With the rapid development of semiconductor technology, higher requirements are put on the precision of quartz boats and the welding technology. In order to meet these requirements, high-precision assembly welding devices for quartz boats and processes thereof have been developed and used gradually. The appearance of the high-precision assembly welding device improves the assembly precision and the welding quality of the quartz boat. The devices adopt advanced mechanical design, control system and welding technology, and ensure the assembly precision and welding strength of the quartz boat. With the continuous innovation of the welding process, high and new technologies such as laser welding, electron beam welding and the like are presented. The welding technology has the advantages of high energy density, high welding speed, good weld quality and the like, and the welding quality of the quartz boat is further improved. With the continuous development of technology, the assembly welding technology and the device of the quartz boat are continuously advanced, and more powerful support is provided for the development of the semiconductor manufacturing industry.
Quartz boats are mainly made of quartz glass, which has a high hardness but at the same time is relatively brittle. Meaning that it is susceptible to cracking or breaking when subjected to impact or pressure. During use of the quartz boat, special care is required to avoid excessive shock or vibration to prevent cracking or damage. Traditional quartz boat equipment welding set can cause the fracture or the damage of quartz boat at the in-process of snatching or placing because of snatching dynamics or the mismatching of angle at the in-process of snatching the quartz boat. Secondly, the design and fabrication of quartz boats requires very high precision and skill to ensure their stability and reliability during semiconductor fabrication. In the conventional welding process, a handle is generally welded at the end of the quartz boat, so that various operations of the quartz boat are convenient, and the handle is difficult to maintain horizontal with the quartz boat in the conventional welding process. This patent just is in the horizontality in order to guarantee that the quartz boat is when the welding handle, the state of placing of handle before the welding, after the welding is accomplished, guarantees that the end connection of handle and quartz boat is accurate and keep the level.
Disclosure of Invention
(one) solving the technical problems
Aiming at the defects of the prior art, the invention provides the high-precision assembling and welding device and the process thereof for the quartz boat, which can avoid the quartz boat from being excessively impacted and vibrated in the process of grabbing, moving and placing, prevent the quartz boat from being broken or damaged, realize accurate positioning when the handle of the quartz boat is welded, ensure horizontal welding and ensure high-precision welding, and solve the problems that the traditional high-precision assembling and welding device for the quartz boat can impact or vibrate the quartz boat in the use process, cause the breakage or damage of the quartz boat and can not realize more accurate positioning in the process of welding the quartz boat, so that the welding precision is low.
(II) technical scheme
In order to realize the aims that the quartz boat can be prevented from being excessively impacted and vibrated in the grabbing, moving and placing processes, the quartz boat is prevented from being broken or damaged, accurate positioning can be realized when the handle of the quartz boat is welded, horizontal welding is ensured, and high-precision welding is ensured, the invention provides the following technical scheme: the utility model provides a high-accuracy equipment welding set of quartz boat, includes placing the support, removing support, processing support and locating rack, place support fixed mounting in the side of processing support, remove the support and install in the top of placing support and processing support, remove the support including translation frame and lifting frame, lifting frame middle part fixed mounting has the rack, the rack wears to establish with translation frame middle part, install the translation motor that is connected with the rack cooperation on the translation frame, the inside both sides fixed mounting of processing support has a plurality of evenly distributed's pipeline of blowing, the locating rack assembly is in the below of processing support, the middle part processing of locating rack has a rectangle recess, and the welding recess is processed to the one end of recess, and the cylinder is installed to the other end.
Preferably, the surfaces of the placing support and the processing support are arc-shaped, and the bottom of the placing support and the processing support is a T-shaped support frame.
Preferably, the upper surfaces of the placing bracket and the processing bracket are processed with air outlet grooves.
Preferably, the number of the lifting frames is two, and the lifting frames are respectively and fixedly arranged on the outer side of the placing bracket and the outer side of the processing bracket.
Preferably, rotating motors are fixedly arranged at two ends of the translation frame, hook claws are assembled on the rotating motors, and lifting motors are fixedly arranged at the bottoms of the lifting frames.
Preferably, the inside processing of locating rack has the spout, fixed mounting has the locating plate on the cylinder, the locating plate passes through spout slidable mounting in the locating rack, processing has the locating hole on the locating rack, install the motor shaft in the locating hole.
Preferably, the visual sensor is fixedly arranged on one side, close to the placement support, of the movable support, the level gauge is fixedly arranged on the other side of the placement support, and the level gauge corresponds to the visual sensor one by one.
Preferably, the end part of the air blowing pipeline is fixedly provided with a ceramic pipe orifice.
Specifically, the welding of the quartz boat high-precision assembly welding device provides a welding process, which comprises the following steps:
s1, reversely buckling a quartz boat to be welded on a placing bracket, and leveling the quartz boat placed on the placing bracket through a level gauge to enable the quartz boat to be in a horizontal state;
s2, moving the translation bracket to the upper side of the quartz boat through the translation motor, opening the hooking claw to 180 degrees through the rotating motor, operating the lifting motor, enabling the hooking claw to descend to the lower portion of the quartz boat, reversing the rotating motor at the moment, enabling the hooking claw to rotate inwards, ensuring that the four hooking claws hook the quartz boat through sensing of the visual sensing pile, and then lifting the motor to start lifting the translation frame, so that the quartz boat is lifted;
s3, starting to operate a translation motor, enabling a translation frame hooked on the quartz boat to translate to the upper side of a processing bracket, operating a lifting motor after the quartz boat translates to the upper side of the processing bracket, enabling the quartz boat to descend, continuously blowing upwards through a blowing pipeline in the descending process of the quartz boat, forming a gas protection layer between the quartz boat and the processing bracket, protecting the quartz boat from being damaged, finally enabling the quartz boat to be reversely buckled on the processing bracket, continuously operating the lifting motor, enabling a hook claw to be separated from the quartz boat, enabling the hook claw to rotate 180 degrees by operating a rotating motor at the moment, then enabling the lifting motor to reversely rotate, lifting the translation frame, and operating the translation motor to enable the translation frame to be far away from the processing bracket;
s4, after the quartz boat is placed on the processing bracket, the positioning frame is lifted upwards under the operation of the positioning motor, when the quartz boat is contacted, the two side edges of the quartz boat are lifted to the same horizontal plane, namely, lifting is stopped, at the moment, the cylinder starts to operate, the positioning plate is pushed out forwards, and the positioning plate stops after the quartz boat placed on the processing bracket is pushed forwards to a set position, so that the quartz boat is completely positioned on the processing bracket;
s5, after the quartz boat is completely positioned, placing the parts to be welded in the welding grooves, and welding the parts;
s6, after welding, cooling the quartz boat through a blowing pipeline at the bottom, and after cooling, moving the welded quartz boat to the other place through a moving support for storage.
(III) beneficial effects
Compared with the prior art, the invention provides the high-precision assembly welding device and the process for the quartz boat, which have the following beneficial effects:
1. the quartz boat high-precision assembly welding device and the process thereof are used by mutually matching a placing bracket, a moving bracket and a processing bracket. When the quartz boat needs to be welded, the quartz boat to be welded is reversely buckled on the placing support, and the quartz boat placed on the placing support is leveled through the level meter, so that the quartz boat is approximately in a horizontal state; at the moment, the translation bracket is moved to the upper part of the quartz boat through the translation motor, the rotary motor opens the hook claw to 180 degrees, the lifting motor operates to enable the hook claw to descend to the lower part of the quartz boat, at the moment, the rotary motor reverses to enable the hook claw to rotate inwards, the four hook claws are ensured to hook the quartz boat through the induction of the visual induction pile, and then the lifting motor starts to lift the translation bracket to enable the quartz boat to be lifted; the translation motor starts to operate to enable the translation frame hooked on the quartz boat to translate to the upper portion of the processing support, after the quartz boat translates to the upper portion of the processing support, the lifting motor operates to enable the quartz boat to descend, the air blowing pipeline continuously blows upwards in the descending process of the quartz boat, a gas protection layer is formed between the quartz boat and the processing support, the quartz boat is protected from being damaged, and finally the quartz boat is enabled to be reversely buckled on the processing support. Therefore, the quartz boat can be prevented from being excessively impacted and vibrated in the grabbing, moving and placing processes, and cracking or damage of the quartz boat is prevented.
2. The quartz boat high-precision assembly welding device and the process thereof are matched with each other for use by processing the bracket and the locating frame. After the quartz boat is placed on the processing support, the locating rack is lifted upwards under the operation of the locating motor, and after the quartz boat is contacted, the two sides of the quartz boat are lifted to the same horizontal plane, namely, the lifting is stopped, so that the quartz boat is completely horizontal, and the welding precision is improved. At the moment, the cylinder starts to operate, the positioning plate is pushed out forwards, and the positioning plate stops after pushing forward the quartz boat placed on the processing bracket to a set position, so that the quartz boat is positioned on the processing bracket completely. After the quartz boat is completely positioned, the parts to be welded are placed in the welding grooves and then welded. Thereby realize can realize accurate location when welding quartz boat handle, guarantee horizontal welding, promote the effect of welding precision.
Drawings
FIG. 1 is a schematic diagram of a high-precision assembly welding device for a quartz boat and a process structure thereof;
FIG. 2 is a front view of the high-precision assembly welding device of the quartz boat and the process thereof;
FIG. 3 is a schematic view of a high-precision assembly welding device for a quartz boat and a process moving bracket thereof;
FIG. 4 is a schematic view of a high-precision assembly welding device for a quartz boat and a process placement bracket, a processing bracket and a positioning bracket thereof;
FIG. 5 is a front view of the high precision assembly welding device for quartz boat and its technological placement bracket, processing bracket and positioning bracket;
FIG. 6 is a schematic view of a high-precision assembly welding device for a quartz boat and a technical processing bracket and a positioning bracket thereof;
FIG. 7 is a schematic view of a high-precision assembly welding device for a quartz boat and a process positioning frame thereof;
fig. 8 is a schematic diagram of the high-precision assembly welding device for the quartz boat and the positioning completion structure of the quartz boat in the process.
In the figure: the device comprises a support 1, a movable support 2, a translation frame 21, a rotary motor 211, a translation motor 212, a hook jaw 213, a rack 214, a lifting frame 22, a lifting motor 221, a visual induction pile 23, a level meter 231, a quartz boat 3, a processing support 4, a gas outlet groove 41, a gas blowing pipeline 42, a ceramic pipe orifice 421, a positioning frame 5, a cylinder 51, a positioning plate 52, a welding groove 53, a positioning hole 54, a positioning motor 55, a motor shaft 551, a sliding groove 56 and a positioning rod 57.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-8, the high-precision quartz boat assembling and welding device comprises a placing bracket 1, a moving bracket 2, a processing bracket 4 and a positioning bracket 5, wherein the placing bracket 1 is fixedly arranged on the side edge of the processing bracket 4, and the moving bracket 2 is fixedly arranged above the processing bracket 4 of the placing bracket 1. The high-precision assembling and welding device for the quartz boat 3 is advanced and precise equipment and is specially designed for high-precision assembling and welding of the quartz boat 3. The main components of the device comprise a placing bracket 1, a moving bracket 2, a processing bracket 4 and a positioning bracket 5, which are precisely designed and manufactured to ensure the assembly and welding precision of the quartz boat 3. The placement bracket 1 is an important component of the device and is fixedly mounted on the side of the processing bracket 4. This design allows the quartz boat 3 to be stably placed on the support, providing stable support for subsequent processing operations. The placement bracket 1 is made of a high-strength material, ensuring its stability and durability. Above the placement frame 1, a moving frame 2 is fixedly mounted on a processing frame 4. The movable support 2 has accurate movement capability, and the position can be adjusted according to the requirement in the processing process. This design allows the operator to flexibly adjust the position of the quartz boat 3 to accommodate different processing requirements. The manufacturing accuracy and stability of the moving bracket 2 are strictly controlled to ensure that the machining accuracy of the quartz boat 3 is not affected during the moving process. The processing bracket 4 is a core part of the device, and carries a main body part of the welding device and is responsible for carrying out high-precision welding operation on the quartz boat 3. The design of the tooling support 4 takes into account various factors during the welding process, such as temperature, vibration, etc., to ensure the quality and accuracy of the weld. Finally, the positioning frame 5 is assembled below the processing bracket 4, and its main function is to accurately position the quartz boat 3. The positioning frame 5 has very high design precision, and can ensure the accurate position of the quartz boat 3 in the welding process. Meanwhile, the positioning frame 5 is also provided with a cylinder 51 and other parts for realizing automatic positioning and clamping of the quartz boat 3, so that the operation efficiency and accuracy are improved.
The movable support 2 comprises a translation frame 21 and a lifting frame 22, a rack 214 is fixedly arranged in the middle of the lifting frame, the rack 214 penetrates through the middle of the translation frame 21, a translation motor 212 which is connected with the rack 214 in a matched mode is arranged on the translation frame 21, a plurality of evenly distributed air blowing pipelines 42 are fixedly arranged on two sides of the inside of the processing support 4, a positioning frame 5 is assembled below the processing support 4, a rectangular groove is formed in the middle of the positioning frame 5, a welding groove 53 is formed in one end of the groove, and an air cylinder 51 is arranged at the other end of the groove. The movable bracket 2 is a key part of the high-precision assembly welding device of the quartz boat 3, and comprises a translation bracket 21 and a lifting bracket 22. The two architectures work cooperatively to enable precise movement and positioning of the quartz boat 3 during processing.
The lifting frame is located in the middle of the mobile carriage 2 and is fixedly mounted with a rack 214. This rack 214 is of elaborate design and is threaded in the middle of the translation frame 21. For driving the rack 214, the translation frame 21 is provided with a translation motor 212, and the motor is in fit connection with the rack 214, so that the quartz boat 3 can be precisely moved in the horizontal direction. By controlling the rotation of the translation motor 212, an operator can easily adjust the horizontal position of the quartz boat 3, and move the quartz boat 3 from the placing bracket 1 to the processing bracket 4 or from the processing bracket 4 to the placing bracket 1.
The processing bracket 4 is a core component in the device, and a plurality of evenly distributed air blowing pipelines 42 are fixedly arranged on two sides of the interior of the processing bracket. These blow pipes 42 play a key role in the welding process, and they can blow away fumes and foreign substances generated during welding, ensuring the cleanliness of the welding point, thereby improving the welding quality. And when the quartz boat 3 is placed on the processing support 4 from top to bottom, the air flow blown upwards from the air blowing pipeline 42 forms an air protection layer at the bottom of the quartz boat 3, and when the quartz boat 3 is placed on the processing support 4, the vibration of the quartz boat 3 can be relieved, and the damage and the breakage caused by the placement can be reduced. Finally, after the quartz boat 3 is welded, the air blowing pipeline 42 at the bottom can blow air to cool the quartz boat 3, so that the cooling speed is increased, and the working efficiency is improved.
Below the machining bracket 4, a positioning bracket 5 is fitted. The design of the positioning frame 5 is very unique, and a rectangular groove is formed in the middle of the positioning frame. One end of the groove is formed with a welding groove 53 in order to ensure an accurate position of the quartz boat 3 at the time of welding. And the other end of the groove is provided with a cylinder 51, and the cylinder 51 is used for pushing the quartz boat 3 to accurately enter a welding position.
In order to further enhance the positioning accuracy, after the quartz boat 3 is placed on the processing bracket 4, the positioning motor 55 starts to work to lift the positioning frame 5 to the bottom of the quartz boat 3, so that the two sides of the quartz boat 3 are kept on the same horizontal line under the lifting action of the positioning frame 5.
The number of the lifting frames 22 is two, and the lifting frames 22 are respectively fixedly arranged on the outer side of the placing bracket 1 and the outer side of the processing bracket 4. The two lifting frames 22 can play a good supporting role on the translation frame 21 on the lifting frames, and ensure the accuracy of the movement direction of the translation frame 21 in the translation process.
The two ends of the translation frame 21 are fixedly provided with a rotating motor 211, the rotating motor 211 is provided with a hook claw 213, and the bottom of the lifting frame 22 is fixedly provided with a lifting motor 221. The rotating motor 211 can control the opening and closing of the hooking claw 213, and the opening and closing of the hooking claw 213 is controlled to grasp the quartz boat 3 through the action of the rotating motor 211 in the process of grasping the quartz boat 3. The lifting motor 221 arranged at the bottom of the lifting frame 22 can control the lifting and lowering of the translation frame 21, and further control the lifting and placing of the quartz boat 3. The movement of the quartz boat 3 is realized through the hook claw 213, so that the clamping force of a general clamping device on the quartz boat 3 in the process of clamping the quartz boat 3 is eliminated, and the problem that the quartz boat 3 is damaged due to overlarge clamping force is solved.
The surfaces of the placing support 1 and the processing support 4 are arc-shaped, and the bottom is a T-shaped support frame. The upper surfaces of the placing support 1 and the processing support 4 are arc-shaped, the arc-shaped shape is changed to be fit with the inner surface of the quartz boat 3, when the quartz boat 3 is placed on the placing support 1 and the processing support 4, the inner surface of the quartz boat 3 is guaranteed to be fit with the upper surface of the support, the contact area with the quartz boat 3 is increased, the pressure is reduced, and the quartz boat 3 is prevented from being broken or damaged due to touch in the placing process.
The inside of the locating frame 5 is provided with a chute 56, the cylinder 51 is fixedly provided with a locating plate 52, and the locating plate 52 is slidably arranged in the locating frame 5 through the chute 56. When the quartz boat 3 is placed on the processing bracket 4, the quartz boat 3 is subjected to welding operation, and in order to ensure the welding accuracy, the quartz boat 3 needs to be accurately positioned. After the quartz boat 3 is placed on the processing bracket 4, the positioning frame 5 is lifted up to the bottom of the quartz boat 3, and the two sides of the bottom of the quartz boat 3 are kept horizontal under the action of the positioning frame 5, namely, the positioning in the horizontal direction is completed. At this time, the cylinder 51 moves to push the quartz boat 3 forward through the positioning plate 52, so that the welding position of the quartz boat 3 is ensured to be positioned to the welding groove 53, and the positioning in the front-rear direction is realized. At this time, the precise positioning of the quartz boat 3 is completed, and the welding operation can be performed after the parts to be welded are placed in the welding grooves 53. The positioning holes 54 processed on the positioning frame 5 are respectively positioned on four vertexes of the positioning frame 5. In which motor shafts 551 of the positioning motor 55 are installed in two positioning holes 54 located diagonally, and in which positioning rods 57 are installed in the other two positioning holes 54.
One side of the movable support 2, which is close to the placement support 1, is fixedly provided with a visual induction pile 23, and the other side of the placement support 1 is fixedly provided with a level meter 231, wherein the level meter 231 corresponds to the visual induction pile 23 one by one. The level meter 231 can detect whether the quartz boat 3 placed on the placement support 1 is kept level, and if the quartz boat 3 does not reach a level state, the quartz boat 3 needs to be adjusted, a certain level degree of the quartz boat is ensured, and the subsequent hooking can be smoothly performed. The visual induction pile 23 is installed on one side of the placing support 1, and when the quartz boat 3 placed on the placing support 1 is grabbed by the hook claw 213, the visual induction pile 23 can observe whether each hook claw 213 completely hooks the bottom side edge of the main quartz boat 3, so that the safety of the quartz boat 3 in the hooking process is ensured.
The upper surfaces of the placing bracket 1 and the processing bracket 4 are processed with air outlet grooves 41, and the air outlet grooves 41 are arranged symmetrically left and right in the respective brackets. The symmetrical air outlet grooves 41 can ensure that the air flow blown out by the air blowing pipeline 42 is uniformly distributed on two sides of the bottom of the quartz boat 3, ensure that the quartz boat 3 is uniformly stressed at the bottom in the placing process, and avoid inclination, so that the quartz boat cannot be broken or damaged due to nonuniform stress in the placing process.
The end of the air blowing pipe 42 is fixedly provided with a ceramic nozzle 421. Since the quartz boat 3 is required to be welded, and the welding temperature of the quartz boat 3 is high, the ceramic nozzle 421 is installed at the end of the air blowing pipe 42, so that the air blowing pipe 42 can be prevented from being damaged in a long-term high-temperature environment.
The working principle is that the quartz boats 3 are generally stored together in a large quantity, when the quartz boats 3 need to be clamped, the quartz boats 3 need to be separated one by one and placed at a proper position for clamping, so that the quartz boats 3 stored together need to be placed one by one on the placing support 1, and after the quartz boats 3 are placed on the placing support, the quartz boats are accurately displaced to the processing support 4 by using the displacement device. If the quartz boat 3 is directly placed on the processing support 4 in a manual mode, the manual carrying time is too long, the damage probability is increased, and in the process of placing the quartz boat 3 on the processing support 4, an accurate positioning function is required, and the manual placement is inaccurate.
In this patent, will prepare to carry out welded quartz boat 3 back-off on placing support 1, the in-process that places its bottom installation blow pipeline 42 can continuously eat the gas to the bottom of quartz boat 3, forms the gas protection layer, prevents that it from colliding with. The quartz boat 3 placed on the placing rack 1 is leveled by the level 231 so that the quartz boat 3 is approximately in a horizontal state. At this time, the translation bracket is moved to the upper side of the quartz boat 3 through the translation motor 212, the rotating motor 211 opens the hook claw 213 to 180 degrees, the lifting motor 221 operates, the hook claw 213 descends to the lower part of the quartz boat 3, at this time, the rotating motor 211 reverses, the hook claw 213 rotates inwards, the four hook claws 213 are ensured to hook the quartz boat 3 through the induction of the visual induction pile 23, and then the lifting motor 221 starts to lift the translation bracket 21, so that the quartz boat 3 is lifted. The translation motor 212 starts to operate, so that the translation frame 21 hooked on the quartz boat 3 translates to the upper side of the processing support 4, after the quartz boat 3 translates to the upper side of the processing support 4, the lifting motor 221 operates, so that the quartz boat 3 descends, the air blowing pipeline 42 continuously blows upwards in the descending process of the quartz boat 3, a gas protection layer is formed between the quartz boat 3 and the processing support 4, the quartz boat 3 is protected from being damaged, the quartz boat 3 is finally reversely buckled on the processing support 4, the lifting motor 221 continues to operate, the hook claw 213 is separated from the quartz boat 3, at the moment, the rotating motor 211 operates to enable the hook claw 213 to rotate 180 degrees, then the lifting motor 221 reversely rotates, the translation frame 21 is lifted, and then the translation motor 212 operates, so that the translation frame 21 is far away from the processing support 4. After the quartz boat 3 is placed on the processing bracket 4, the positioning frame 5 is lifted upwards under the operation of the positioning motor 55, when the quartz boat 3 is contacted, the two sides of the quartz boat 3 are lifted to the same horizontal plane, namely, the lifting is stopped, at the moment, the air cylinder 51 starts to operate, the positioning plate 52 is pushed forward, and the positioning plate 52 stops after the quartz boat 3 placed on the processing bracket 4 is pushed forward to a set position, so that the quartz boat 3 is completely positioned on the processing bracket 4. After the quartz boat 3 is completely positioned, the handle parts to be welded are placed in the welding grooves 53 and then welded. It places the handle parts in the machined welding grooves 53, not only ensures the fixing of the handle position, but also ensures the parallelism with the quartz boat 3. After the welding is finished, the quartz boat 3 is cooled through the blowing pipeline 42 at the bottom, and after the cooling is finished, the welded quartz boat 3 is moved to the other place through the movable support 2 for storage.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises an element.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (9)
1. The utility model provides a high-accuracy equipment welding set of quartz boat, is including placing support (1), movable support (2), processing support (4) and locating rack (5), place support (1) fixed mounting in the side of processing support (4), movable support (2) are installed in the top of placing support (1) and processing support (4), its characterized in that: the movable support (2) comprises a translation frame (21) and a lifting frame (22), a rack (214) is fixedly installed in the middle of the lifting frame (22), the rack (214) penetrates through the middle of the translation frame (21), a translation motor (212) matched and connected with the rack (214) is installed on the translation frame (21), a plurality of evenly distributed blowing pipelines (42) are fixedly installed on two sides of the inside of the processing support (4), the positioning frame (5) is assembled below the processing support (4), a rectangular groove is formed in the middle of the positioning frame (5), a welding groove (53) is formed in one end of the rectangular groove, and an air cylinder (51) is installed at the other end of the rectangular groove.
2. The quartz boat high-precision assembly welding device according to claim 1, wherein: the surfaces of the placing support (1) and the processing support (4) are arc-shaped, and the bottom of the placing support is a T-shaped support frame.
3. The quartz boat high-precision assembly welding device according to claim 1, wherein: and air outlet grooves (41) are formed in the upper surfaces of the placing support (1) and the processing support (4).
4. The quartz boat high-precision assembly welding device according to claim 1, wherein: the number of the lifting frames (22) is two, and the lifting frames (22) are respectively and fixedly arranged on the outer side of the placing support (1) and the outer side of the processing support (4).
5. The quartz boat high-precision assembly welding device according to claim 1, wherein: the two ends of the translation frame (21) are fixedly provided with rotating motors (211), the rotating motors (211) are provided with hook claws (213), and the bottoms of the lifting frames (22) are fixedly provided with lifting motors (221).
6. The quartz boat high-precision assembly welding device according to claim 1, wherein: the inside processing of locating rack (5) has spout (56), fixed mounting has locating plate (52) on cylinder (51), locating plate (52) are through spout (56) slidable mounting in locating rack (5), processing has locating hole (54) on locating rack (5), install motor shaft (551) in locating hole (54).
7. The quartz boat high-precision assembly welding device according to claim 1, wherein: one side of the movable support (2) close to the placement support (1) is fixedly provided with a vision sensor, the other side of the placement support (1) is fixedly provided with a level meter (231), and the level meter (231) corresponds to the vision sensor one by one.
8. The quartz boat high-precision assembly welding device according to claim 1, wherein: the end part of the air blowing pipeline (42) is fixedly provided with a ceramic pipe orifice (421).
9. A welding process of the quartz boat high-precision assembly welding device according to claim 5, wherein: the method comprises the following steps:
s1, reversely buckling a quartz boat (3) to be welded on a placing bracket (1) to enable the quartz boat (3) to be in a horizontal state;
s2, at the moment, the translation frame (21) is moved to the upper side of the quartz boat (3) through the translation motor (212) so that the quartz boat (3) is grabbed by the translation frame (21), and then the lifting motor (221) starts to lift the translation frame (21) so that the quartz boat (3) is lifted;
s3, translating a translation frame (21) for grasping the quartz boat (3) to the upper part of the processing support (4), placing the quartz boat (3) on the processing support (4) after the quartz boat (3) is translated to the upper part of the processing support (4), continuously blowing upwards by a blowing pipeline (42) in the downward placing process of the quartz boat (3), forming a gas protection layer between the quartz boat (3) and the processing support (4), protecting the quartz boat (3) from being damaged, finally enabling the quartz boat (3) to be reversely buckled on the processing support (4), and enabling the translation frame (21) to be far away from the processing support (4);
s4, after the quartz boat (3) is placed on the processing bracket (4), the positioning frame (5) is lifted upwards under the operation of the motor, and when the quartz boat (3) is contacted, the two side edges of the quartz boat (3) are lifted to the same horizontal plane, namely, lifting is stopped, and at the moment, the cylinder (51) starts to operate, so that the quartz boat (3) is completely positioned on the processing bracket (4);
s5, after the quartz boat (3) is completely positioned, placing the parts to be welded in the welding grooves (53), and welding the parts;
s6, after welding, cooling the quartz boat (3) through a blowing pipeline (42) at the bottom, and after cooling, moving the welded quartz boat (3) to the other place through a moving support (2) for storage.
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11284046A (en) * | 1998-03-31 | 1999-10-15 | Rohm Co Ltd | Wafer carrying device |
| CN101866990A (en) * | 2010-06-18 | 2010-10-20 | 无锡尚德太阳能电力有限公司 | Automatic wafer ascending and descending device of quartz boat |
| CN111470412A (en) * | 2020-04-28 | 2020-07-31 | 中建三局第二建设工程有限责任公司 | Clamp type carrying hanger |
| CN213497366U (en) * | 2020-05-20 | 2021-06-22 | 上海菲利华石创科技有限公司 | Accurate quick location of quartz boat is pretended and is connect welding process device |
| CN113764321A (en) * | 2021-08-10 | 2021-12-07 | 天津爱旭太阳能科技有限公司 | Quartz boat loading and unloading device, processing system and control method |
| CN215478170U (en) * | 2021-02-01 | 2022-01-11 | 罗博特科智能科技股份有限公司 | Double-grab boat moving mechanism |
| CN215856457U (en) * | 2021-06-09 | 2022-02-18 | 中威新能源(成都)有限公司 | Blowing device for automatic buffer memory of diffusion furnace |
| CN114309925A (en) * | 2021-12-31 | 2022-04-12 | 河南通用智能装备有限公司 | Wafer recessive cutting device |
| CN114628297A (en) * | 2022-05-16 | 2022-06-14 | 江苏泰明易自动化设备有限公司 | Quartz boat feeding and discharging device for processing solar silicon wafers |
-
2023
- 2023-11-27 CN CN202311588911.6A patent/CN117340534B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11284046A (en) * | 1998-03-31 | 1999-10-15 | Rohm Co Ltd | Wafer carrying device |
| CN101866990A (en) * | 2010-06-18 | 2010-10-20 | 无锡尚德太阳能电力有限公司 | Automatic wafer ascending and descending device of quartz boat |
| CN111470412A (en) * | 2020-04-28 | 2020-07-31 | 中建三局第二建设工程有限责任公司 | Clamp type carrying hanger |
| CN213497366U (en) * | 2020-05-20 | 2021-06-22 | 上海菲利华石创科技有限公司 | Accurate quick location of quartz boat is pretended and is connect welding process device |
| CN215478170U (en) * | 2021-02-01 | 2022-01-11 | 罗博特科智能科技股份有限公司 | Double-grab boat moving mechanism |
| CN215856457U (en) * | 2021-06-09 | 2022-02-18 | 中威新能源(成都)有限公司 | Blowing device for automatic buffer memory of diffusion furnace |
| CN113764321A (en) * | 2021-08-10 | 2021-12-07 | 天津爱旭太阳能科技有限公司 | Quartz boat loading and unloading device, processing system and control method |
| CN114309925A (en) * | 2021-12-31 | 2022-04-12 | 河南通用智能装备有限公司 | Wafer recessive cutting device |
| CN114628297A (en) * | 2022-05-16 | 2022-06-14 | 江苏泰明易自动化设备有限公司 | Quartz boat feeding and discharging device for processing solar silicon wafers |
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| CN117340534A (en) | 2024-01-05 |
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