CN215856457U

CN215856457U - Blowing device for automatic buffer memory of diffusion furnace

Info

Publication number: CN215856457U
Application number: CN202121292367.7U
Authority: CN
Inventors: 宁超; 范斌; 李雪锋
Original assignee: Zhongwei New Energy Chengdu Co ltd
Current assignee: Zhongwei New Energy Chengdu Co ltd
Priority date: 2021-06-09
Filing date: 2021-06-09
Publication date: 2022-02-18
Anticipated expiration: 2031-06-09

Abstract

The utility model discloses a blowing device for automatic buffer memory of a diffusion furnace, which relates to the technical field of silicon wafer production in the photovoltaic industry and comprises a base arranged on one side of a quartz boat in an automatic buffer memory area of the diffusion furnace, wherein an air knife bracket reciprocating along the length direction of the quartz boat is arranged above the base; the mobile surface blowing and slicing device is arranged, so that the diffused battery pieces can be effectively attached to each other in pairs, effective slicing is realized, and the fragment rate of the diffusion automation equipment when the sucking disc sucks the battery pieces is reduced.

Description

Blowing device for automatic buffer memory of diffusion furnace

Technical Field

The utility model relates to the technical field of silicon wafer production in the photovoltaic industry, in particular to the technical field of blowing devices for automatic caching of diffusion furnaces.

Background

In the production of the photovoltaic industry, diffusion equipment has a very important technological position, and in the production process of the solar cell in the conventional PERC process, a diffusion process is used for forming a PN junction of the cell and generating current. In the heterojunction process solar cell production process, a diffusion process is adopted to remove impurities from a raw material silicon wafer for producing the cell, so that the conversion efficiency of the cell is improved.

In the diffusion process, automatic diffusion wafer-reversing equipment is used, the battery wafers placed in 100 flower baskets are sucked by using suckers arranged on a six-axis robot and placed on a 1200 quartz boat, the battery wafers are placed on the quartz boat in a mode that every two of the battery wafers are attached to one clamping groove, then the 1200 quartz boat which is subjected to wafer loading is placed in a diffusion high-temperature furnace tube for diffusion process, the temperature in the process can reach 800 ℃, a phosphorus source used in the process promotes the removal of impurities in the battery wafers, meanwhile, the battery wafers placed on the quartz boat in a mode that every two of the battery wafers are attached to each other can be attached together due to reaction of the quartz process, the boat returns to the diffusion automation, when the suckers arranged on the six-axis robot are used for sucking wafers, the condition that the battery wafers cannot be successfully attached due to too tight attachment exists, the fragments of the battery wafers are broken, and the overall yield of the workshop production is influenced, increasing the uncontrollable cost of production.

Diffusion automation legacy equipment adopts the mode that the installation air knife was blown to the battery piece of two liang of laminatings, and the air knife comprises the rectangular shape trachea that the level has the aperture, when blowing to the battery piece of laminating on the quartz boat, because the battery piece of the alignment laminating that the gas pocket on the trachea can not be accurate, the trachea of rectangular shape can only realize "some sweeps" when blowing to the battery piece, can not realize sweeping of whole battery piece edge face, consequently sweep the time longer, not good to the battery piece burst effect of laminating.

SUMMERY OF THE UTILITY MODEL

The utility model aims to: the utility model provides a blowing device for automatic buffer storage of a diffusion furnace, and aims to solve the technical problem that battery plates attached to an existing diffusion quartz boat cannot be effectively separated.

The utility model specifically adopts the following technical scheme for realizing the purpose:

the utility model provides a gas blowing device for automatic buffer memory of diffusion furnace, is provided with along quartz boat length direction reciprocating motion's air knife support including setting up the base of quartz boat one side in the automatic buffer memory region of diffusion, the base top, be provided with the straight line actuating mechanism of drive air knife support along quartz boat length direction reciprocating motion on the base, the equipartition has a plurality of air knife subassemblies that blow up to the battery piece in the quartz boat on the air knife support, and every air knife subassembly all sets up the trachea of battery piece top in the quartz boat including the slope, is provided with the seam of blowing that the face sweeps is realized to the battery piece in the quartz boat on the trachea.

Further, the linear driving mechanism is a magnetic coupling type rodless cylinder or a screw nut assembly.

Further, the air knife bracket comprises an L-shaped folded plate and an inclined plate arranged at the top of the L-shaped folded plate, the air knife assemblies are arranged below the inclined plate at equal intervals, and the L-shaped folded plate is fixed on the linear driving mechanism.

Furthermore, the L-shaped folded plate comprises a horizontal plate fixed on the linear driving mechanism and a vertical plate arranged at the tail end of the horizontal plate, and auxiliary supporting mechanisms used for supporting the inclined plate are arranged on two sides of the vertical plate.

Further, the auxiliary supporting mechanism is a supporting rod which is obliquely arranged.

Furthermore, the air-out quantity adjusting device also comprises an adjusting valve used for adjusting the air-out quantity of the air knife assembly.

The utility model has the following beneficial effects:

increase the burst device that a movable face sweeps in diffusion furnace automatic buffer memory region, because be provided with the seam of blowing that the face sweeps is realized to the battery piece in the quartz boat on the air knife subassembly trachea in this scheme, can blow to the air knife that the battery piece of laminating carries out the face contact in the quartz boat, portable design makes the compressed air front contact that the battery piece side blown out with the air knife simultaneously, increase area of contact, can effectually separate the silicon chip, reduce the workshop piece, reduce the time of sweeping, thereby improve the productivity, reduce the piece rate.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic structural view of the air knife holder;

FIG. 3 is a schematic structural view of a linear drive mechanism;

FIG. 4 is a schematic view of a quartz boat;

FIG. 5 is a schematic mechanism of the air knife;

FIG. 6 is a side view of FIG. 1;

reference numerals: the device comprises a quartz boat 1, a battery plate 2, an air knife assembly 3, an air knife bracket 4, a folded plate 4-1-L, an inclined plate 4-2, an auxiliary supporting mechanism 4-3 and a linear driving mechanism 5.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. Furthermore, the terms "first," "second," and the like are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.

In the description of the embodiments of the present invention, it should be noted that the terms "inside", "outside", "upper", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or orientations or positional relationships conventionally arranged when the products of the present invention are used, and are only used for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the devices or elements indicated must have specific orientations, be constructed in specific orientations, and operated, and thus, should not be construed as limiting the present invention.

Example 1

As shown in fig. 1 to 6, the present embodiment provides an air blowing device for diffusion furnace automatic buffer storage, which includes a base disposed on one side of a quartz boat 1 in a diffusion automatic buffer storage region, an air knife support 4 disposed above the base and reciprocating along a length direction of the quartz boat 1, a linear driving mechanism 5 disposed on the base and driving the air knife support 4 to reciprocate along the length direction of the quartz boat 1, air knife assemblies 3 disposed on the air knife support 4 and blowing up battery pieces 2 in the quartz boat 1, each air knife assembly 3 including an air tube 3-2 disposed above the battery pieces in the quartz boat 1 in an inclined manner, and an air blowing slit 3-1 disposed on the air tube 3-2 and blowing up the battery pieces in the quartz boat 1.

The linear driving mechanism 5 is a magnetic couple type rodless cylinder or a screw nut assembly.

The air knife bracket 4 comprises an L-shaped folded plate 4-1 and an inclined plate 4-2 arranged at the top of the L-shaped folded plate 4-1, a plurality of air knife assemblies 3 are arranged below the inclined plate 4-2 at equal intervals, and the L-shaped folded plate 4-1 is fixed on a linear driving mechanism 5.

The L-shaped folded plate 4-1 comprises a horizontal plate fixed on the linear driving mechanism 5 and a vertical plate arranged at the tail end of the horizontal plate, and auxiliary supporting mechanisms 4-3 used for supporting the inclined plate 4-2 are arranged on two sides of the vertical plate.

The auxiliary supporting mechanism 4-3 is a supporting rod which is obliquely arranged.

Still including being used for adjusting the governing valve of air knife tackle spare 3 air output.

The utility model adopts a brand new design idea, and the movable surface sweeping and slicing device is arranged at the cache position of the diffusion furnace automation equipment, so that the battery pieces which are tightly attached in pairs after diffusion can be effectively sliced, the effective slicing is realized, and the fragment rate of the diffusion automation equipment when the sucking disc sucks the battery pieces is reduced.

Claims

1. The utility model provides a gas blowing device for automatic buffer memory of diffusion furnace, its characterized in that is provided with along quartz boat (1) length direction reciprocating motion's air knife support (4) including setting up the base in quartz boat (1) one side in the automatic buffer memory region of diffusion furnace above the base, be provided with drive air knife support (4) on the base along quartz boat (1) length direction reciprocating motion's sharp actuating mechanism (5), the equipartition has a plurality ofly to air knife subassembly (3) that the battery piece blown in quartz boat (1) on air knife support (4), and every air knife subassembly (3) all includes trachea (3-2) that the slope set up battery piece top in quartz boat (1), is provided with on trachea (3-2) to blowing gas seam (3-1) that the battery piece realizes the face and sweeps in quartz boat (1).

2. The blowing device for the automatic buffer of the diffusion furnace according to claim 1, wherein the linear driving mechanism (5) is a magnetic couple type rodless cylinder or a screw nut assembly.

3. The blowing device for the automatic buffer memory of the diffusion furnace is characterized in that the air knife bracket (4) comprises an L-shaped folded plate (4-1) and a tilted plate (4-2) arranged at the top of the L-shaped folded plate (4-1), a plurality of air knife assemblies (3) are arranged below the tilted plate (4-2) at equal intervals, and the L-shaped folded plate (4-1) is fixed on the linear driving mechanism (5).

4. The blowing device for the automatic buffer storage of the diffusion furnace is characterized in that the L-shaped folded plate (4-1) comprises a horizontal plate fixed on the linear driving mechanism (5) and a vertical plate arranged at the tail end of the horizontal plate, and auxiliary supporting mechanisms (4-3) for supporting the inclined plate (4-2) are arranged on two sides of the vertical plate.

5. Blowing device for diffusion furnace automated buffering according to claim 4, characterized in that the auxiliary support mechanism (4-3) is an obliquely arranged support bar.

6. The blowing device for the automatic buffer memory of the diffusion furnace is characterized by further comprising a regulating valve for regulating the air output of the air knife assembly (3).