CN117310925B - Cone pulley type objective lens switcher and cone pulley type objective lens - Google Patents
Cone pulley type objective lens switcher and cone pulley type objective lens Download PDFInfo
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- CN117310925B CN117310925B CN202311603121.0A CN202311603121A CN117310925B CN 117310925 B CN117310925 B CN 117310925B CN 202311603121 A CN202311603121 A CN 202311603121A CN 117310925 B CN117310925 B CN 117310925B
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- 230000006698 induction Effects 0.000 claims description 10
- 229910000831 Steel Inorganic materials 0.000 claims description 5
- 239000010959 steel Substances 0.000 claims description 5
- 230000009286 beneficial effect Effects 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 11
- 238000000034 method Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000001514 detection method Methods 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 210000001503 joint Anatomy 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000012942 design verification Methods 0.000 description 1
- 238000011990 functional testing Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/14—Mountings, adjusting means, or light-tight connections, for optical elements for lenses adapted to interchange lenses
- G02B7/16—Rotatable turrets
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The invention relates to a cone pulley type objective lens switcher and a cone pulley type objective lens, which comprise a cavity shell, a coarse positioning piece, a fine positioning piece and an adapter plate, wherein the cavity shell is provided with a first cavity shell and a second cavity shell; the coarse positioning piece comprises a coarse positioning fixing piece, the coarse positioning fixing piece is movably connected with a coarse positioning telescopic piece, and the coarse positioning telescopic piece is fixedly connected with a coarse positioning rotating piece; the fine positioning piece comprises a fine positioning fixing piece, the fine positioning fixing piece is connected with a cavity shell II, a fine positioning rotating piece is rotationally connected to the fine positioning fixing piece, a fixed point piece is arranged between the fine positioning fixing piece and the fine positioning rotating piece, and one end of the fine positioning rotating piece is connected with a coarse positioning rotating piece; one side of the adapter plate is connected with the coarse positioning fixing piece and the first cavity shell, and the other side of the adapter plate is connected with the fine positioning piece fixing piece. The invention has the beneficial effects that: the coarse positioning telescopic part and the coarse positioning rotating part on the coarse positioning fixing part drive the fine positioning rotating part and the fixed point part to be matched, so that the problem of shaking is solved, and meanwhile, the problem of interference easily occurring in the prior art is solved.
Description
Technical Field
The invention relates to the technical field of wafer detection, in particular to a cone pulley type objective lens switcher and a cone pulley type objective lens.
Background
The wafer is a silicon wafer used for manufacturing a silicon semiconductor circuit, and the raw material is silicon. The high-purity polycrystalline silicon is manufactured into a silicon crystal bar, and then the silicon crystal bar is ground and polished, and a silicon wafer, namely a wafer, is formed after slicing. The wafer is a critical component for fabricating integrated circuit chips. The detection of the integrated circuit chip can be divided into design verification, front-end detection, back-end detection and the like according to links of the process. The front-end detection is applied to the processing and manufacturing process of wafers, and is a physical and functional test. The method is used for detecting whether the parameters of the product after the completion of each step of process meet the design requirements or not, checking whether the surface of the wafer has defects affecting the yield or not, and ensuring that the yield of the processing production line is controlled above a specified level. While the front end Cheng Anchang inspection equipment for front end beam inspection is an important piece of equipment in wafer fabrication. In the wafer defect detection apparatus of the wafer high-precision nanometer scale, a plurality of high numerical aperture objective lenses are required to be used simultaneously for mutual switching. These high numerical aperture objectives are very short, and the prior art has the problem of interference of the optical path that occurs inevitably with the prior art nose-wheel switch configuration when the objective is used in conjunction with the nose-wheel switch. In the prior art, the objective lens is matched with the linear switcher, and the linear switcher adopts a linear motor, so that the linear motor can generate tiny shake when stopped, and the problem that a virtual image appears on the lens can be caused. That is, both the nose wheel type switch and the linear switch have the problem of interference.
Therefore, it is necessary to provide a cone pulley type objective lens switch and a cone pulley type objective lens for solving the above technical problems.
Disclosure of Invention
The embodiment of the invention provides a cone pulley type objective lens switcher and a cone pulley type objective lens, which can solve the problem that the interference of optical paths occurs inevitably in a nose pulley type switcher structure in the related art, and the interference of lens positions occurs due to shaking of a linear switcher.
In one aspect, embodiments of the present invention provide a cone pulley type objective lens switch,
the device comprises a cavity shell, a coarse positioning piece, a fine positioning piece and an adapter plate, wherein the cavity shell is provided with a first cavity shell and a second cavity shell; the coarse positioning part comprises a coarse positioning fixing part, the coarse positioning fixing part is movably connected with a coarse positioning telescopic part, and the coarse positioning telescopic part is fixedly connected with a coarse positioning rotating part; the fine positioning part comprises a fine positioning fixing part, the fine positioning fixing part is connected with a cavity shell II, a fine positioning rotating part is rotationally connected to the fine positioning fixing part, a fixed point part is arranged between the fine positioning fixing part and the fine positioning rotating part, and one end of the fine positioning rotating part is connected with the coarse positioning rotating part; one side of the adapter plate is connected with the coarse positioning fixing piece and the first cavity shell, and the other side of the adapter plate is connected with the fine positioning piece fixing piece.
Further, the coarse positioning fixing piece comprises an adapter plate, one side of the adapter plate is connected with the fine positioning fixing piece, and the other side of the adapter plate is fixedly connected with the cavity shell;
the coarse positioning fixing piece comprises a coarse positioning fixing plate, one side of the coarse positioning fixing plate is connected with the adapter plate, and two guide posts which are oppositely arranged are arranged on the other side of the coarse positioning fixing plate;
the coarse positioning telescopic piece comprises a coarse positioning moving plate, two guide column sleeves which are oppositely arranged are arranged on the coarse positioning moving plate, and the guide column sleeves are sleeved on the guide column and do reciprocating motion on the guide column.
Further, the coarse positioning moving plate is fixed with a telescopic driving piece which is arranged oppositely, and the driving end of the telescopic driving piece penetrates through the coarse positioning moving plate and is abutted to the coarse positioning fixing plate.
Further, the coarse positioning rotating piece is fixedly arranged in the middle of the coarse positioning moving plate.
Further, the fine positioning fixing piece comprises a fine positioning fixing plate and a fine positioning bearing, and the fine positioning fixing plate is connected with the fine positioning bearing through a spring group.
Further, the fine positioning rotating piece comprises a cone pulley fixing plate, the cone pulley fixing plate is in contact connection with the fine positioning fixing plate, a pull rod is fixed in the middle of the cone pulley fixing plate, the pull rod penetrates through the fine positioning fixing plate and then is in rotary connection with the fine positioning bearing, and one end of the pull rod is connected with the coarse positioning rotating piece.
Further, the fixed point piece comprises a fixed point marking groove and a limiting piece, wherein the fixed point marking groove is formed in the fine positioning fixing plate, the limiting piece is arranged on the cone pulley fixing plate, and at least one point in the running track of the limiting piece corresponds to the fixed point marking groove;
the fixed point marking groove is at least one of a V-shaped groove, a square groove and a semicircular groove, and the limiting piece is a corresponding one of a cone, a flat block and a steel ball;
the fixed point piece also comprises an initialization sensor and an induction block, wherein the initialization sensor is arranged on the fine positioning fixing plate, the induction block is arranged on the cone pulley fixing plate, and at least one point of the running track of the induction block coincides with the initialization sensor.
Further, an anti-falling female groove is arranged between the coarse positioning rotating piece and the fine positioning rotating piece.
Further, the first cavity shell and the second cavity shell of the cavity shell are respectively provided with a vacuum joint, and the interiors of the first cavity shell and the second cavity shell are vacuumized through the vacuum joints.
In one aspect, a cone pulley type objective lens of a cone pulley type objective lens switcher is provided, the cone pulley type objective lens switcher comprises any one of the cone pulley type objective lenses, the cone pulley type objective lens comprises a cone pulley, at least one objective lens is arranged on the cone pulley, a fine tuning piece is arranged at the joint of the objective lens and the cone pulley, and the fine tuning piece is used for adjusting the position of the objective lens;
the cone pulley type objective lens is connected to one end of the fine positioning rotating piece through the cone pulley.
The technical scheme provided by the invention has the beneficial effects that:
the coarse positioning telescoping member on the coarse positioning fixing member pushes the coarse positioning rotating member, the coarse positioning rotating member drives the fine positioning rotating member to rotate, the coarse positioning rotating member stops rotating after reaching a proper position, the coarse positioning telescoping member retracts, the final position is precisely fixed through the fixed point member, and shaking cannot occur, meanwhile, the cone pulley type objective lens is in a vertical switching mode, the problem that the interference of optical paths occurs to the nose pulley type switcher in the prior art, and the interference problem that virtual images occur to the objective lens after switching due to tiny shaking occurs to the structure of the linear switcher is overcome.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a cone pulley type objective lens switch according to the present invention;
FIG. 2 is a second schematic diagram of an objective lens switch according to the present invention;
FIG. 3 is a partially disassembled schematic illustration of a cone pulley type objective lens switch according to the present invention;
FIG. 4 is a schematic diagram showing the rough positioning member of the cone pulley type objective lens switch according to the present invention;
fig. 5 is a split view of a fine positioning element in a cone pulley type objective lens switch according to the present invention.
In the figure: 1. a cavity shell; 2. a rough positioning piece; 3. a fine positioning piece; 4. cone pulley type objective lens; 5. coarse positioning fixing pieces; 6. coarsely positioning the telescopic piece; 7. coarse positioning rotating piece; 8. fine positioning fixing pieces; 9. precisely positioning the rotating piece; 10. a pointing element; 11. a coarse positioning fixing plate; 12. an adapter plate; 13. a guide post; 14. coarse positioning moving plate; 15. a guide post sleeve; 16. a telescopic driving member; 17. fine positioning fixing plates; 18. a fine positioning bearing; 19. a spring set; 20. a cone pulley fixing plate; 21. a pull rod; 22. a fixed point marking groove; 23. a limiting piece; 24. initializing a sensor; 25. an induction block; 26. an anti-falling mother groove; 27. a cone pulley; 28. an objective lens; 29. a fine tuning member; 30. and (5) vacuum joint.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1 to 5, an embodiment of the present invention provides a cone pulley type objective lens switch,
the device comprises a cavity shell 1, a coarse positioning piece 2, a fine positioning piece 3 and an adapter plate 12, wherein the cavity shell 1 is provided with a first cavity shell and a second cavity shell; the coarse positioning piece 2 comprises a coarse positioning fixing piece 5, wherein the coarse positioning fixing piece 5 is movably connected with a coarse positioning telescopic piece 6, and the coarse positioning telescopic piece 6 is fixedly connected with a coarse positioning rotating piece 7; the fine positioning piece 3 comprises a fine positioning fixing piece 8, the fine positioning fixing piece 8 is connected with a cavity shell II, a fine positioning rotating piece 9 is rotatably connected to the fine positioning fixing piece 8, a fixed point piece 10 is arranged between the fine positioning fixing piece 8 and the fine positioning rotating piece 9, and one end of the fine positioning rotating piece 9 is connected with the coarse positioning rotating piece 7; one side of the adapter plate 12 is connected with the coarse positioning fixing piece 5 and the first cavity shell, and the other side of the adapter plate is connected with the fine positioning piece fixing piece 8.
Referring to fig. 4, in some embodiments, the coarse positioning fixture 5 includes an adapter plate 12, where one side of the adapter plate 12 is connected to the fine positioning fixture 8, and the other side is fixedly connected to the cavity shell 1;
the coarse positioning fixing piece 5 comprises a coarse positioning fixing plate 11, one side of the coarse positioning fixing plate 11 is connected with the adapter plate 12, and two guide posts 13 which are oppositely arranged are arranged on the other side of the coarse positioning fixing plate 11;
the coarse positioning telescopic piece 6 comprises a coarse positioning moving plate 14, two guide column sleeves 15 which are oppositely arranged are arranged on the coarse positioning moving plate 14, and the guide column sleeves 15 are sleeved on the guide column 13 and do reciprocating motion on the guide column 13.
In some embodiments, the coarse positioning moving plate 14 is fixed with a telescopic driving member 16 arranged oppositely, and the driving end of the telescopic driving member 16 is inserted through the coarse positioning moving plate 14 and abuts against the coarse positioning fixing plate 11.
In some embodiments, the coarse positioning rotator 7 is fixedly disposed in the middle of the coarse positioning moving plate 14.
Referring to fig. 5, in some embodiments, the fine positioning fixing member 8 includes a fine positioning fixing plate 17 and a fine positioning bearing 18, and the fine positioning fixing plate 17 is connected to the fine positioning bearing 18 through a spring set 19.
In this embodiment, the fine positioning fixing member 8 includes a fine positioning fixing plate 17 and a fine positioning bearing 18, the fine positioning fixing plate 17 is connected with the fine positioning bearing 18 through a spring set 19, the fine positioning bearing 18 and the fine positioning fixing plate 17 can move relatively, when the fine positioning rotating member 9 rotates, the fine positioning rotating member 9 and the fine positioning bearing 18 remain relatively stationary, and by connecting the fine positioning fixing plate 17 with the fine positioning bearing 18 through the spring set 19, it is ensured that the suspending mechanism formed by the fine positioning rotating member 9 and the fine positioning bearing 18 does not fall down.
Meanwhile, when the fine positioning rotating member 9 moves, after the fine positioning rotating member 9 needs to be reset, the restoring force of the spring set 19 can drive the fine positioning rotating member 9 to reset, so that the fixed point member 10 is positioned more accurately.
In some embodiments, the fine positioning rotating member 9 includes a cone pulley fixing plate 20, the cone pulley fixing plate 20 is in contact connection with the fine positioning fixing plate 17, a pull rod 21 is fixed in the middle of the cone pulley fixing plate 20, the pull rod 21 passes through the fine positioning fixing plate 17 and is in rotational connection with the fine positioning bearing 18, and one end of the pull rod 21 is connected with the coarse positioning rotating member 7.
In this embodiment, the pull rod 21 passes through the fine positioning fixing plate 17, the fine positioning bearing 18, the adapter plate 12, the coarse positioning fixing plate 11, and the coarse positioning moving plate 14, and is connected to the anti-slip nut 26, and the anti-slip nut 26 is fixed to the coarse positioning rotating member 7.
In some embodiments, the pointing device 10 includes a pointing mark slot 22 and a limiting member 23, where the pointing mark slot 22 is disposed on the fine positioning fixing plate 17, the limiting member 23 is disposed on the cone pulley fixing plate 20, and at least one point in a running track of the limiting member 23 corresponds to the pointing mark slot 22;
the fixed point marking groove 22 is at least one of a V-shaped groove, a square groove and a semicircular groove, and the limiting piece 23 is a corresponding one of a cone, a flat block and a steel ball;
in this embodiment, the fixed point member 10 includes a fixed point marking slot 22 and a limiting member 23, the fixed point marking slot 22 is disposed on the fine positioning fixing plate 17, the limiting member 23 is disposed on the cone pulley fixing plate 20, and at least one point in a running track of the limiting member 23 corresponds to the fixed point marking slot 22; the fixed point marking groove 22 is at least one of a V-shaped groove, a square groove and a semicircular groove, and the limiting piece 23 is a corresponding one of a cone, a flat block and a steel ball; when the fixed point marking groove 22 is a V-shaped groove and the limiting piece 23 is a cone, the final positions of the limiting piece 23 and the fixed point marking groove 22 are at the bottom of the V-shaped groove, so that the positioning is more accurate; when the fixed point marking groove 22 is a square groove, the limiting piece 23 is a flat block, and after the limiting piece 23 is in butt joint with the fixed point marking groove 22, the horizontal offset cannot occur; when the fixed point marking groove 22 is a steel ball, and the fixed point marking groove 22 is a semicircular groove, the limiting piece 23 and the fixed point marking groove 22 not only can realize accurate butt joint, but also can realize smoother butt joint process.
The pointing device 10 further includes an initialization sensor 24 and an induction block 25, the initialization sensor 24 is disposed on the fine positioning fixing plate 17, the induction block 25 is disposed on the cone pulley fixing plate 20, and at least one point of a running track of the induction block 25 coincides with the initialization sensor 24.
In some embodiments, an anti-falling female groove 26 is provided between the coarse positioning rotor 7 and the fine positioning rotor 9.
In this embodiment, the anti-disengaging female groove 26 is arranged between the coarse positioning rotating member 7 and the fine positioning rotating member 9, the anti-disengaging female groove 26 is matched with the pull rod 21, a raised anti-disengaging male groove is arranged on the pull rod 21, and the pull rod 21 is matched and connected with the anti-disengaging female groove 26 through the anti-disengaging male groove, so that the pull rod 21 is effectively prevented from being disengaged from the coarse positioning rotating member 7.
In some embodiments, the first and second chamber shells 1 and 1 are provided with vacuum connectors 30, and the vacuum connector 30 is used to vacuum the interior of the first and second chamber shells.
In this embodiment, the adapter plate 12 is matched with the first cavity shell, so that the coarse positioning fixing plate 11, the guide post 13, the coarse positioning moving plate 14, the guide post sleeve 15 and the telescopic driving piece 16 are installed and fixed; the fine positioning fixing plate 17 is matched with the second cavity shell, the cone pulley fixing plate 20, the pull rod 21, the fixed point marking groove 22, the limiting piece 23, the initializing sensor 24 and the sensing block 25 are fixedly installed, and meanwhile, the cone pulley fixing plate 20 is matched with the second cavity shell in a sealing mode; after the fine positioning fixing plate 17 is fixed to the adapter plate 12, the first and second inner parts of the cavity shell are in a completely sealed state, and the first and second inner parts of the cavity shell are vacuumized through the vacuum connector 30, so that the cleaning of the first and second inner parts of the cavity shell is effectively ensured.
Referring to fig. 2, in one aspect, a turret type objective lens of a turret type objective lens switcher is provided, including a turret type objective lens switcher as described in any one of the above, where the turret type objective lens 4 includes a turret 27, at least one objective lens 28 is disposed on the turret 27, and a fine tuning element 29 is disposed at a connection position between the objective lens 28 and the turret 27, and the fine tuning element 29 is used for adjusting a position of the objective lens 28;
the cone pulley type objective lens 4 is connected to one end of the fine positioning rotator 9 through the cone pulley 27.
In this embodiment, the cone pulley type objective lens 4 includes a cone pulley 27, at least one objective lens 28 is disposed on the cone pulley 27, and the objective lens 28 is vertically disposed on the cone pulley 27, so that interference of a dark field optical path is effectively avoided due to the vertical disposition of the objective lens 28.
In addition, a fine tuning piece 29 is arranged at the joint of the objective lens 28 and the cone pulley 27, and the fine tuning piece 29 is used for adjusting the position of the objective lens 28, when the objective imaging line of the objective lens 28 does not correspond to the measured object, the objective imaging line of the objective lens 28 and the measured object can be leveled by adjusting the fine tuning piece 29, so that the observation is clearer.
Meanwhile, a connecting piece is arranged on the cone pulley 27, a connecting position corresponding to the connecting piece is arranged on the cone pulley fixing plate 20 of the fine positioning rotating piece 9, and the cone pulley 27 is connected with the cone pulley fixing plate 20 through the connecting piece.
The invention has the beneficial effects that:
the coarse positioning telescoping member on the coarse positioning fixing member pushes the coarse positioning rotating member, the coarse positioning rotating member drives the fine positioning rotating member to rotate, the coarse positioning rotating member stops rotating after reaching a proper position, the coarse positioning telescoping member retracts, the final position is precisely fixed through the fixed point member, and shaking cannot occur, meanwhile, the cone pulley type objective lens is in a vertical switching mode, the problem that the interference of optical paths occurs to the nose pulley type switcher in the prior art, and the interference problem that virtual images occur to the objective lens after switching due to tiny shaking occurs to the structure of the linear switcher is overcome.
In the description of the present invention, it should be noted that the azimuth or positional relationship indicated by the terms "upper", "lower", etc. are based on the azimuth or positional relationship shown in the drawings, and are merely for convenience of describing the present invention and simplifying the description, and are not indicative or implying that the apparatus or element in question must have a specific azimuth, be constructed and operated in a specific azimuth, and thus should not be construed as limiting the present invention. Unless specifically stated or limited otherwise, the terms "disposed," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
It should be noted that in this application, relational terms such as "first" and "second" and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
The foregoing is only a specific embodiment of the invention to enable those skilled in the art to understand or practice the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (7)
1. A cone pulley type objective lens switcher, characterized by comprising:
the cavity shell (1) is provided with a first cavity shell and a second cavity shell;
the coarse positioning piece (2) comprises a coarse positioning fixing piece (5), the coarse positioning fixing piece (5) is movably connected with a coarse positioning telescopic piece (6), and the coarse positioning telescopic piece (6) is fixedly connected with a coarse positioning rotating piece (7);
the fine positioning piece (3) comprises a fine positioning fixing piece (8), the fine positioning fixing piece (8) is connected with a cavity shell II, a fine positioning rotating piece (9) is rotationally connected to the fine positioning fixing piece (8), a fixed point piece (10) is arranged between the fine positioning fixing piece (8) and the fine positioning rotating piece (9), and one end of the fine positioning rotating piece (9) is connected with the coarse positioning rotating piece (7);
one side of the adapter plate (12) is connected with the coarse positioning fixing piece (5) and the first cavity shell, and the other side of the adapter plate is connected with the fine positioning piece fixing piece (8);
the fine positioning fixing piece (8) comprises a fine positioning fixing plate (17) and a fine positioning bearing (18), and the fine positioning fixing plate (17) is connected with the fine positioning bearing (18) through a spring group (19);
the fine positioning rotating piece (9) comprises a cone pulley fixing plate (20), the cone pulley fixing plate (20) is in contact connection with the fine positioning fixing plate (17), a pull rod (21) is fixed in the middle of the cone pulley fixing plate (20), the pull rod (21) penetrates through the fine positioning fixing plate (17) and then is in rotary connection with the fine positioning bearing (18), and one end of the pull rod (21) is connected with the coarse positioning rotating piece (7);
the fixed point piece (10) comprises a fixed point marking groove (22) and a limiting piece (23), the fixed point marking groove (22) is arranged on the fine positioning fixing plate (17), the limiting piece (23) is arranged on the cone pulley fixing plate (20), and at least one point in the running track of the limiting piece (23) corresponds to the fixed point marking groove (22);
the fixed point marking groove (22) is at least one of a V-shaped groove, a square groove and a semicircular groove, and the limiting piece (23) is a corresponding one of a cone, a flat block and a steel ball;
the fixed point piece (10) further comprises an initialization sensor (24) and an induction block (25), wherein the initialization sensor (24) is arranged on the fine positioning fixing plate (17), the induction block (25) is arranged on the cone pulley fixing plate (20), and at least one point of the running track of the induction block (25) coincides with the initialization sensor (24).
2. A cone pulley type objective lens switcher as claimed in claim 1, wherein the coarse positioning fixing piece (5) comprises a coarse positioning fixing plate (11), one side of the coarse positioning fixing plate (11) is connected with the adapter plate (12), and two guide posts (13) which are oppositely arranged are arranged on the other side of the coarse positioning fixing plate (11);
the coarse positioning telescopic piece (6) comprises a coarse positioning moving plate (14), two guide column sleeves (15) which are oppositely arranged are arranged on the coarse positioning moving plate (14), and the guide column sleeves (15) are sleeved on the guide column (13) and do reciprocating motion on the guide column (13).
3. A cone pulley type objective lens switcher as claimed in claim 2, wherein the rough positioning moving plate (14) is fixed with a telescopic driving member (16) which is arranged oppositely, and the driving end of the telescopic driving member (16) is penetrated through the rough positioning moving plate (14) and is abutted with the rough positioning fixing plate (11).
4. A cone pulley type objective lens switch as claimed in claim 2, wherein the coarse positioning rotator (7) is fixedly arranged in the middle of the coarse positioning moving plate (14).
5. A cone pulley type objective lens switch as claimed in claim 1, characterized in that an anti-drop female slot (26) is provided between the coarse positioning rotating member (7) and the fine positioning rotating member (9).
6. The cone pulley type objective lens switcher as claimed in claim 1, wherein the first cavity shell and the second cavity shell of the cavity shell (1) are provided with vacuum connectors (30), and the interiors of the first cavity shell and the second cavity shell are vacuumized through the vacuum connectors (30).
7. A cone pulley type objective lens of a cone pulley type objective lens switcher, comprising the cone pulley type objective lens switcher according to any one of claims 1 to 6, and being characterized by comprising a cone pulley type objective lens (4), wherein the cone pulley type objective lens (4) comprises a cone pulley (27), at least one objective lens (28) is arranged on the cone pulley (27), a fine tuning piece (29) is arranged at the joint of the objective lens (28) and the cone pulley (27), and the fine tuning piece (29) is used for adjusting the position of the objective lens (28);
the cone pulley type objective lens (4) is connected to one end of the fine positioning rotating piece (9) through the cone pulley (27).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311603121.0A CN117310925B (en) | 2023-11-28 | 2023-11-28 | Cone pulley type objective lens switcher and cone pulley type objective lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311603121.0A CN117310925B (en) | 2023-11-28 | 2023-11-28 | Cone pulley type objective lens switcher and cone pulley type objective lens |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117310925A CN117310925A (en) | 2023-12-29 |
| CN117310925B true CN117310925B (en) | 2024-02-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311603121.0A Active CN117310925B (en) | 2023-11-28 | 2023-11-28 | Cone pulley type objective lens switcher and cone pulley type objective lens |
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| US4241251A (en) * | 1977-10-29 | 1980-12-23 | Olympus Optical Co., Ltd. | Photoelectric switching means for microscope illumination system |
| WO2000008509A1 (en) * | 1998-08-01 | 2000-02-17 | Carl Zeiss Jena Gmbh | Microscope assembly |
| JP2018014377A (en) * | 2016-07-20 | 2018-01-25 | 東レエンジニアリング株式会社 | Defect inspection device of wide gap semiconductor substrate |
| CN212807572U (en) * | 2020-09-23 | 2021-03-26 | 合肥鼎材科技有限公司 | Contrast meter for improving test cleanliness |
| CN115524344A (en) * | 2022-11-14 | 2022-12-27 | 苏州天准科技股份有限公司 | Fine-focus-adjusting high-precision imaging optical detection system |
| CN218824947U (en) * | 2022-12-06 | 2023-04-07 | 苏州爱默科技有限公司 | Objective lens adjusting device and microscope |
| CN218956441U (en) * | 2022-05-17 | 2023-05-02 | 深圳中科飞测科技股份有限公司 | Optical detection system |
| CN219871922U (en) * | 2023-05-19 | 2023-10-20 | 苏州华兴源创科技股份有限公司 | Objective lens switching device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6906858B2 (en) * | 2000-07-17 | 2005-06-14 | Olympus Optical Co., Ltd. | Microscope provided with an objective lens focusing apparatus and an objective lens switching apparatus |
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2023
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Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4241251A (en) * | 1977-10-29 | 1980-12-23 | Olympus Optical Co., Ltd. | Photoelectric switching means for microscope illumination system |
| WO2000008509A1 (en) * | 1998-08-01 | 2000-02-17 | Carl Zeiss Jena Gmbh | Microscope assembly |
| JP2018014377A (en) * | 2016-07-20 | 2018-01-25 | 東レエンジニアリング株式会社 | Defect inspection device of wide gap semiconductor substrate |
| CN212807572U (en) * | 2020-09-23 | 2021-03-26 | 合肥鼎材科技有限公司 | Contrast meter for improving test cleanliness |
| CN218956441U (en) * | 2022-05-17 | 2023-05-02 | 深圳中科飞测科技股份有限公司 | Optical detection system |
| CN115524344A (en) * | 2022-11-14 | 2022-12-27 | 苏州天准科技股份有限公司 | Fine-focus-adjusting high-precision imaging optical detection system |
| CN218824947U (en) * | 2022-12-06 | 2023-04-07 | 苏州爱默科技有限公司 | Objective lens adjusting device and microscope |
| CN219871922U (en) * | 2023-05-19 | 2023-10-20 | 苏州华兴源创科技股份有限公司 | Objective lens switching device |
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| CN117310925A (en) | 2023-12-29 |
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