CN117309320A - Quick-adjusting reflector testing device - Google Patents
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- CN117309320A CN117309320A CN202311227584.1A CN202311227584A CN117309320A CN 117309320 A CN117309320 A CN 117309320A CN 202311227584 A CN202311227584 A CN 202311227584A CN 117309320 A CN117309320 A CN 117309320A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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- G01M11/02—Testing optical properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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Abstract
The invention belongs to the field of optical testing and metering, and discloses a quick-adjusting reflector testing device which comprises a light source module, a lens, a reticle, an objective lens, a beam splitter prism, a photoelectric sensor module, a supporting structure, a leveling mechanism, a data acquisition and visualization signal processing module and the like. The device of the invention uses the optical auto-collimation principle for micro angle measurement, has the advantages of non-contact, measurement result independent of measurement distance, high measurement resolution and precision, simple structure, convenient use, high reliability and the like, can measure the control precision, repeated positioning precision, scanning linearity and the like of the fast-tuning reflector, and has wide application prospect.
Description
Technical Field
The invention belongs to the technical field of performance detection of photoelectric equipment, and relates to a testing device capable of measuring a micro angle, in particular to performance detection of a fast-tuning reflector.
Background
A fast-tuning mirror is a device that uses a mirror surface to control a light beam between a light source and a receiver. The device has the advantages of small volume, light weight, compact structure, high speed, high precision, high bandwidth and the like, and is widely applied to astronomical telescopes, laser communication, image stabilization optical systems, self-adaptive optical systems and tracking aiming optical systems. Fast-tuning mirrors were first applied in the field of adaptive optical compensation for compensating wavefront errors. Along with the development of informatization combat demands, the fast-tuning mirror is widely applied to the fields of light beam scanning, light beam positioning, target tracking and the like in a photoelectric imaging system. The performance of the fast-tuning reflector directly influences the stability and precision of the photoelectric system, the step staring function, the imaging definition of the system and the like.
In an onboard optoelectronic system with wide-area reconnaissance function, a fast-tuning mirror assembly is generally required to solve two problems: firstly, realizing high-precision image stabilization, a quick-tuning reflector and a large-stroke frame mechanism are required to form a secondary light beam stabilization system, and the quick-tuning reflector is required to have higher control precision and control bandwidth; secondly, realizing a step staring function, controlling the quick-adjusting reflecting mirror assembly to reversely step-scan in the whole scanning process of the platform, enabling the combining speed of the quick-adjusting reflecting mirror assembly and the platform to be zero, and simultaneously exposing the sensor, thereby obtaining a clear image. This requires that the fast-tuning mirror be moved linearly at all times during the sensor exposure time and maintain high scan speed accuracy and scan linearity. The performance of the fast-tuning reflector directly influences the stability and precision of the photoelectric system, the step staring function, the imaging definition of the system and the like. Therefore, the adoption of the high-performance quick reflection mirror has become the development direction of a high-precision photoelectric system, and the test technology of the quick reflection mirror has become the premise of long-distance detection and identification, and is one of the core basic technologies of the informatization weapon.
The test system of the fast-tuning reflector is introduced in the fast-tuning reflector test system research published in photoelectric technology application in King Kai, gao Xuepeng, 2017, and mainly comprises a laser beam emission unit, a high-precision disturbance fast-tuning reflector, a high-speed light spot acquisition unit, a data processing display device, a three-dimensional adjustable optical component and an optical platform. The laser emission unit emits laser, the laser beam is shot into the light spot acquisition unit through the disturbance reflector and the reflector to be detected, and the data processing equipment calculates and displays the light spot deviation. During static test, the disturbance reflector is kept motionless, and after the reflector to be tested is turned for a certain angle, data in the data processing equipment are read, so that a static precision error is obtained; during dynamic measurement, the disturbance reflector and the reflector to be measured are made to move in the same size and opposite directions, so that the deviation in the data processing equipment is read to obtain the dynamic error of the reflector to be measured. The test system has complex light path, difficult alignment before test, high-precision fast-tuning reflector introduced in dynamic test, high cost and increased error of the test system. In addition, the test system can only test the control precision of the fast-tuning reflector, and cannot realize the test of scanning characteristics.
Disclosure of Invention
Object of the invention
The purpose of the invention is that: the test device for the fast-adjusting reflector utilizes the optical auto-collimation principle, is used for micro-angle measurement, has the advantages of non-contact, measurement results are irrelevant to measurement distances, high measurement resolution and precision, convenience in use, high reliability and the like, and realizes measurement on control precision, repeated positioning precision, scanning linearity and the like of the fast-adjusting reflector.
(II) technical scheme
In order to solve the technical problems, the invention provides a quick-adjustment reflector testing device, which comprises a light source module 1, a lens 2, a reticle 3, an objective lens 4, a beam splitter prism 5, a photoelectric sensor module 6, a supporting structure 7, a leveling mechanism 8 and a data acquisition and visualization signal processing module 9; the light source module 1, the lens 2, the reticle 3 and the beam splitting prism 5 are sequentially arranged along the light path direction, the objective lens 4 and the photoelectric sensor module 6 are respectively arranged on two opposite sides of the beam splitting prism 5, the objective lens 4 is positioned on the light reflecting side of the beam splitting prism 5, the lens 2 and the objective lens 4 are placed in a confocal mode, the lens 2 compresses a laser beam to form a point light source at the focal position of the objective lens 4, the reticle 3 is placed at the beam waist position of the laser beam, and the reflecting mirror is arranged on the back face of the objective lens 4; the beam splitting prism 5 enables the objective lens 4 to have two conjugate focal planes, and the photoelectric sensor module 6 is positioned on the focal plane of the main optical axis where the objective lens 4 is positioned to form a laser auto-collimation system light path; the supporting structure 7 is arranged on the leveling mechanism 8, the laser auto-collimation system light path is arranged on the supporting structure 7, the data acquisition and visualization signal processing module 9 is connected with the photoelectric sensor module 6, receives the corresponding electric signals of the light spots obtained by the photoelectric sensor module 6, realizes quick measurement and processing, and displays the measurement result.
(III) beneficial effects
The test device of the fast-tuning reflector provided by the technical scheme has the following beneficial effects:
(1) The quick reflection mirror testing device has simple light path and structure, is convenient to align and easy to realize compared with the existing testing method, and has low cost.
(2) The quick reflection mirror testing device has complete functions, can visually display the position on the spot photoelectric sensor, can quickly and effectively measure the control precision and repeated positioning precision of the quick reflection mirror, particularly the scanning performance, and improves the working efficiency.
(3) The rapid reflector testing device of the invention realizes high-precision measurement of up to 1 mu rad by matching the laser with the position sensitive device and matching with a simple light path and a simple structural design.
Drawings
FIG. 1 is a schematic diagram showing the structural components of the fast-tuning mirror test device of the present invention.
Fig. 2 is a schematic diagram of a light source module.
Fig. 3 is a simplified model of a test apparatus in accordance with the present invention.
Fig. 4 is a schematic diagram of a signal processing circuit.
FIG. 5 is a layout view and an enlarged view of a leveling structure according to the present invention; a is a three-point support layout and b is an enlarged view of the structure at the support points.
FIG. 6 is a flowchart of the operation of the visualization package of the present invention.
Detailed Description
To make the objects, contents and advantages of the present invention more apparent, the following detailed description of the present invention will be given with reference to the accompanying drawings and examples.
As shown in fig. 1, the fast-tuning mirror testing device of the embodiment comprises a light source module 1, a lens 2, a reticle 3, an objective lens 4, a beam splitter prism 5, a photoelectric sensor module 6, a supporting structure 7, a leveling mechanism 8 and a data acquisition and visualization signal processing module 9; the light source module 1, the lens 2, the reticle 3 and the beam splitting prism 5 are sequentially arranged along the light path direction, the objective lens 4 and the photoelectric sensor module 6 are respectively arranged on two opposite sides of the beam splitting prism 5, the objective lens 4 is positioned on the light reflecting side of the beam splitting prism 5, the lens 2 and the objective lens 4 are placed in a confocal mode, the lens 2 compresses a laser beam to form a point light source at the focal position of the objective lens 4, the reticle 3 is placed at the beam waist position of the laser beam, and the reflecting mirror is arranged on the back face of the objective lens 4; the beam splitting prism 5 enables the objective lens 4 to have two conjugate focal planes, and the photoelectric sensor module 6 is positioned on the focal plane of the main optical axis where the objective lens 4 is positioned to form a laser auto-collimation system light path; the supporting structure 7 is arranged on the leveling mechanism 8, the laser auto-collimation system light path is arranged on the supporting structure 7, the data acquisition and visualization signal processing module 9 is connected with the photoelectric sensor module 6, receives the corresponding electric signals of the light spots obtained by the photoelectric sensor module 6, realizes quick measurement and processing, and displays the measurement result.
As shown in fig. 2, the light source module 1 includes a semiconductor laser 1-1, a coupling mirror 1-2, a single mode fiber 1-3, and a collimator objective lens 1-4, which are coaxially arranged in this order; the semiconductor laser 1-1 emits laser beams, the laser beams are coupled into the single mode optical fiber 1-3 through the coupling mirror 1-2 and transmitted, and the light beams at the emitting end of the optical fiber are collimated by the collimating objective lens 1-4 and then emitted into collimated light beams. The light source module 1 adopts a single mode fiber method to achieve the purpose of reducing the drift of laser beams.
The photosensor module 6 includes a photo-Position Sensitive Device (PSD) 6-1 and a signal processing circuit 6-2. The spectral distribution of the semiconductor laser 1-1 is matched to the wavelength response of the opto-electronic position-sensitive device 6-1, here a semiconductor laser having a wavelength of 975nm is selected. When the incident light spot falls on different positions of the photosensitive surface of the photoelectric position sensing device 6-1, different current signals are correspondingly output.
As shown in fig. 3, the relation between the motion displacement l of the light reflection image on the photoelectric position sensor 6-1 and the rotation angle θ of the mirror to be measured is:
f′tan2θ＝l
therefore, the movement angle of the fast-adjusting reflector to be measured can be obtained according to the movement displacement of the light spot on the photoelectric position sensing device 6-1. The determination of the focal length f 'of the laser auto-collimation system's optical path depends on the requirements of the auto-collimation measurement accuracy.
The signal processing circuit 6-2 is composed of an I-V conversion circuit, a pre-amplifying circuit, an adder, a subtracter, a divider and other operation circuits, and a circuit schematic diagram is shown in fig. 4, and the circuit processes and calculates a current signal output by the photoelectric position sensitive device 6-1 so as to output a voltage signal in a linear relation with the light spot position.
Wherein I is x1 、I x2 、I y1 、I y2 Four current signals respectively output by the sensitive device 6-1, V x 、V y Two output voltages of the signal processing circuit respectively.
The relation between the spot position (x, y) and the output voltage signal is:
x＝K x V x ，y＝K y V y
wherein K is x 、K y The scale factors in the x-direction and the y-direction, respectively.
The supporting structure 7 comprises an outer cylinder and an inner cylinder, the inner cylinder is a cylindrical cylinder formed by alloy casting, the outer cylinder is an irregular sleeve made of all-steel materials, the outer part of the outer cylinder is plated with chromium for brightening, and the inner cylinder is inserted into the outer cylinder for fixing. The laser auto-collimation system light path is arranged in the inner cylinder. The outer cylinder is fixed on the leveling mechanism 8.
The leveling mechanism 8 adopts a structure form of three tops and three pulls, and comprises a base and a working flat plate, wherein a three-point supporting leveling mechanism is formed between the base and the working flat plate through 9 screws as shown in fig. 5; the working flat plate and the base at each supporting point are fixed by three bolts which are arranged side by side, wherein the bolts at two sides are respectively connected with the base and the working flat plate, the middle bolt passes through the working flat plate to be contacted with the base, the effect produced by the bolts at two sides is that the bolts are pulled, the middle bolt plays a role in jacking, and the bolts are matched with each other in a jacking-pulling way, so that the bidirectional displacement adjustment of the supporting of each point is realized. Since three points determine a plane, the elevation and depression of any point will change the spatial position of the work plate, thereby enabling two-dimensional angular adjustment of pitch and azimuth.
The data acquisition and visualization signal processing module 9 comprises a data acquisition card 9-1 and a measurement module 9-2. The measurement module 9-2 is a measurement program written based on Labview software and installed in the computer 10, and the working flow chart is shown in FIG. 6 and comprises a parameter setting module, an acquisition module, a graphical display module, a data calculation module and a scanning linearity measurement module.
The parameter setting module has the function of displaying parameter setting columns and function buttons on a computer screen. The parameter setting column comprises a sampling channel, a sampling frequency and an actual sampling frequency, wherein the sampling channel is used for controlling the data acquisition card to acquire single-channel or double-channel test data; the sampling frequency is used for setting the data acquisition frequency of the data acquisition card; the actual sampling frequency is used for displaying the actual sampling frequency of the data acquisition card, and numerical values can be automatically displayed after the setting of the sampling frequency is completed. The function buttons include two buttons of "start measurement" and "stop measurement".
The acquisition module has the function of storing the measured data in real time. The function buttons comprise a data saving mode and a data stopping mode, when the data saving mode is pressed, a dialog box is automatically jumped out to select a file saving path, and after a proper saving position is selected, software collects data according to a set sampling frequency and saves the data in a txt format.
The graphical display module comprises a test curve display module and a light spot position display module. The test curve display module is used for displaying the real-time change curve of the single-channel or double-channel data acquired by the data acquisition card in real time, and the light spot position display module is used for displaying the relative position of the laser light spot on the photoelectric sensor in real time, so that the alignment and measurement of the test system are facilitated.
The data calculation module is used for calculating and displaying the amplitude, frequency, mean value and root mean square error of the test data in real time. The scanning linearity measuring module is used for calculating the scanning speed, the scanning linear section duration and the scanning linearity error in real time.
The scanning linearity test module mainly comprises three display columns of linearity error, scanning duration and scanning speed and a waveform display area. The three display columns of linearity error, scanning duration and scanning speed display the linearity error, the scanning duration and the scanning speed of the current quick reflector obtained by calculating the test data in real time, and the waveform display area displays the comparison of a scanning curve and a linear fitting curve.
The working process of the invention is as follows:
(1) Before starting measurement, the measured fast-tuning reflector is fixed in front of the measuring device, the fast-tuning reflector testing device is electrified, the light source is emitted in parallel after passing through a series of optical lenses, reflected light rays irradiate the photoelectric sensor after being reflected by the reflector, and the fast-tuning reflector is adjusted by observing the position of a light spot on a computer, so that the light spot is positioned near the zero position of the photoelectric sensor, and alignment is completed.
(2) And (3) starting measurement, accurately recording the position of the light reflection image by the photoelectric sensor along with the movement of the measured fast-tuning reflecting mirror, and uploading the position signal to a computer after data acquisition and processing, thereby realizing fast measurement and processing and displaying a measurement result.
The foregoing is merely a preferred embodiment of the present invention, and it should be noted that modifications and variations could be made by those skilled in the art without departing from the technical principles of the present invention, and such modifications and variations should also be regarded as being within the scope of the invention.
Claims (10)
1. The quick-adjusting reflector testing device is characterized by comprising a light source module (1), a lens (2), a reticle (3), an objective lens (4), a beam-splitting prism (5), a photoelectric sensor module (6), a supporting structure (7), a leveling mechanism (8) and a data acquisition and visualization signal processing module (9); the optical system comprises a light source module (1), a lens (2), a reticle (3) and a beam splitting prism (5), wherein the light source module, the lens (2), the reticle (3) and the beam splitting prism (5) are sequentially arranged along the direction of a light path, an objective lens (4) and a photoelectric sensor module (6) are respectively arranged on two opposite sides of the beam splitting prism (5), the objective lens (4) is positioned on the reflecting side of the beam splitting prism (5), the lens (2) and the objective lens (4) are confocal, the lens (2) compresses a laser beam to form a point light source at the focal position of the objective lens (4), the reticle (3) is positioned at the beam waist position of the laser beam, and a reflecting mirror is arranged on the back of the objective lens (4); the beam splitting prism (5) enables the objective lens (4) to have two conjugate focal planes, and the photoelectric sensor module (6) is positioned on the focal plane of the main optical axis where the objective lens (4) is positioned to form a laser auto-collimation system light path; the supporting structure (7) is arranged on the leveling mechanism (8), the laser auto-collimation system light path is arranged on the supporting structure (7), the data acquisition and visualization signal processing module (9) is connected with the photoelectric sensor module (6), receives the corresponding electric signals of the light spots obtained by the photoelectric sensor module (6), realizes quick measurement and processing, and displays the measurement result.
2. The quick-tuning mirror test device according to claim 1, wherein the light source module (1) comprises a semiconductor laser (1-1), a coupling mirror (1-2), a single-mode optical fiber (1-3) and a collimator objective (1-4) coaxially arranged in order; the semiconductor laser (1-1) emits laser beams, the laser beams are coupled into the single mode fiber (1-3) through the coupling mirror (1-2) and transmitted, and the light beams at the emitting end of the fiber are collimated by the collimating objective lens (1-4) and then emitted into collimated light beams.
3. A fast tuning mirror testing device according to claim 2, wherein the semiconductor laser (1-1) is a semiconductor laser of wavelength 975 nm.
4. A fast tuning mirror testing device according to claim 2, wherein the photo sensor module (6) comprises a photo position sensitive device (6-1) and a signal processing circuit (6-2); the spectral distribution of the semiconductor laser (1-1) is matched with the wavelength response of the photoelectric position sensitive device (6-1), and when an incident light spot falls on different positions of the photosensitive surface of the photoelectric position sensitive device (6-1), different current signals are correspondingly output; the signal processing circuit (6-2) processes and calculates the current signal output by the photoelectric position sensitive device (6-1) and outputs a voltage signal which is in linear relation with the light spot position.
5. The quick response mirror test device according to claim 4, wherein the relation between the movement displacement l of the light reflection image on the photo-position sensitive device (6-1) and the mirror rotation angle θ to be measured is:
f′tan2θ＝l
and the focal length f' of the laser auto-collimation system light path obtains the movement angle of the fast-tuning reflector to be measured according to the movement displacement of the light spot on the photoelectric position sensing device 6-1.
6. The fast tuning mirror test apparatus as claimed in claim 5, wherein the signal processing circuit (6-2) outputs a voltage signal having a linear relationship with the spot position as:
wherein I is x1 、I x2 、I y1 、I y2 Four current signals respectively output by the sensitive device (6-1), V x 、V y Two output voltages of the signal processing circuit respectively;
the relation between the spot position (x, y) and the output voltage signal is:
x＝K x V x ，y＝K y V y
wherein K is x 、K y The scale factors in the x-direction and the y-direction, respectively.
7. The quick-tuning reflector testing device according to claim 6, wherein the supporting structure (7) comprises an outer cylinder and an inner cylinder, the inner cylinder is a cylindrical cylinder formed by alloy casting, the outer cylinder is an irregular sleeve made of all-steel materials, the outer part of the outer cylinder is plated with chromium for brightening, and the inner cylinder is inserted into the outer cylinder for fixing; the laser auto-collimation system light path is arranged in the inner cylinder; the outer cylinder is fixed on the leveling mechanism (8).
8. The quick-tuning reflector testing device as claimed in claim 7, wherein the leveling mechanism (8) adopts a three-top three-pull structure, and comprises a base and a working flat plate, and a three-point supporting leveling mechanism is formed between the base and the working flat plate through 9 screws; the working flat plate and the base at each supporting point are fixed by three bolts which are arranged side by side, wherein the bolts at two sides are respectively connected with the base and the working flat plate, the middle bolt passes through the working flat plate to be contacted with the base, the effect produced by the bolts at two sides is that the bolts are pulled, the middle bolt plays a role in jacking, and the bolts are matched with each other in a jacking-pulling way, so that the bidirectional displacement adjustment of the supporting of each point is realized.
9. The quick-tuning mirror testing device according to claim 8, wherein the data acquisition and visualization signal processing module (9) comprises a data acquisition card (9-1) and a measurement module (9-2); the measuring module (9-2) comprises a parameter setting module, an acquisition module, a graphical display module, a data calculation module and a scanning linearity measuring module;
the parameter setting module has the function of displaying parameter setting columns and function buttons on a computer screen; the parameter setting column comprises a sampling channel, a sampling frequency and an actual sampling frequency, wherein the sampling channel is used for controlling the data acquisition card to acquire single-channel or double-channel test data; the sampling frequency is used for setting the data acquisition frequency of the data acquisition card; the actual sampling frequency is used for displaying the actual sampling frequency of the data acquisition card, and numerical values can be automatically displayed after the setting of the actual sampling frequency is completed; the function buttons comprise two buttons of 'start measurement' and 'stop measurement';
the acquisition module is used for storing the measurement data in real time; the function buttons comprise a data saving mode and a data stopping mode, when the data saving mode is pressed, a dialog box is automatically jumped out to select a file saving path, and after a proper saving position is selected, data are collected according to a set sampling frequency and saved in a txt format;
the graphical display module comprises a test curve display module and a light spot position display module; the test curve display module displays a real-time change curve of the single-channel or double-channel data acquired by the data acquisition card in real time, and the light spot position display module displays the relative position of a laser light spot on the photoelectric sensor in real time;
the data calculation module calculates and displays the amplitude, frequency, mean value and root mean square error of the test data in real time; the scanning linearity measuring module calculates the scanning speed, the scanning linear section duration and the scanning linearity error in real time;
the scanning linearity test module comprises three display columns of linearity error, scanning duration and scanning speed and a waveform display area; the three display columns of linearity error, scanning duration and scanning speed display the linearity error, the scanning duration and the scanning speed of the current quick reflector obtained by calculating the test data in real time, and the waveform display area displays the comparison of a scanning curve and a linear fitting curve.
10. Use of a fast-tuning mirror testing device according to any one of claims 1-9 in the technical field of performance detection of optoelectronic devices.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202311227584.1A CN117309320A (en) | 2023-09-22 | 2023-09-22 | Quick-adjusting reflector testing device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202311227584.1A CN117309320A (en) | 2023-09-22 | 2023-09-22 | Quick-adjusting reflector testing device |
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| CN117309320A true CN117309320A (en) | 2023-12-29 |
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| CN202311227584.1A Pending CN117309320A (en) | 2023-09-22 | 2023-09-22 | Quick-adjusting reflector testing device |
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