CN117228179A - Weight fixing device - Google Patents
Weight fixing device Download PDFInfo
- Publication number
- CN117228179A CN117228179A CN202310674258.9A CN202310674258A CN117228179A CN 117228179 A CN117228179 A CN 117228179A CN 202310674258 A CN202310674258 A CN 202310674258A CN 117228179 A CN117228179 A CN 117228179A
- Authority
- CN
- China
- Prior art keywords
- weight
- gas cylinder
- cabinet
- state
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 claims abstract description 86
- 239000007789 gas Substances 0.000 description 115
- 230000004308 accommodation Effects 0.000 description 12
- 230000004888 barrier function Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Jigs For Machine Tools (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
The present invention provides a weight fixing device which automatically performs an operation of fixing a weight in an upright state and prevents the weight from falling down. A weight (B) fixing device (1) for fixing a weight (B) in an upright state is provided with a first automatic holding mechanism (2) for automatically holding the lower side of the weight (B), and a second automatic holding mechanism (3) for automatically holding the upper side of the weight (B), wherein the first automatic holding mechanism (2) is integrated with a load sensor (102) for measuring the weight of the weight (B), the lower side of the weight (B) is held in a state fixed relative to the load sensor (102), and the second automatic holding mechanism (3) is integrated with a cabinet (100) for accommodating the weight (B) on the inner side, and the upper side of the weight (B) is held in a state free relative to the load sensor (102).
Description
Technical Field
The present invention relates to a weight fixing device for fixing a weight such as a gas cylinder in an upright state.
Background
For example, as an apparatus for supplying various gases, a gas cylinder cabinet is widely used. In the case of a gas cylinder cabinet, a door is opened and closed, and a pair of gas cylinders are housed in a housing space inside the gas cylinder cabinet in an upright state. In addition, in the gas cylinder cabinet, when gas is supplied from any one of the gas cylinders, another gas cylinder can be replaced without interrupting the supply of gas.
Patent document 1: japanese patent laid-open No. 2006-057747
Patent document 2: japanese patent application laid-open No. 2012-229727
Disclosure of Invention
In contrast, in the gas cylinder cabinet described above, as a countermeasure against an earthquake, it is required to accurately fix the gas cylinder in the storage space so that the gas cylinder does not fall down when the earthquake occurs (for example, refer to patent documents 1 and 2). Therefore, the conventional method of fixing the gas cylinder manually fixes the gas cylinder using a fixing tool such as a chain and/or a metal strap.
On the other hand, in the operation of replacing the above-described gas cylinder, the gas cylinder is carried by using the gas cylinder carrying cart, and the gas cylinder is carried in and carried out (replaced) between the gas cylinder carrying cart and the gas cylinder cabinet.
However, such a cylinder replacement operation requires the operator to hold the heavy object, i.e. the cylinder, which is very dangerous and labor intensive. In addition, the above-mentioned fixing operation of the gas cylinder must also be performed manually and is inferior in operability.
The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a weight fixing device that automatically performs an operation of fixing a weight in an upright state and prevents the weight from falling down.
In order to achieve the above object, the present invention provides the following means.
(1) A weight fixing device for fixing a weight in an upright state is characterized by having at least one automatic holding mechanism for automatically holding the weight.
(2) The weight fixing device according to the above (1), characterized by comprising a first automatic holding mechanism for automatically holding the lower side of the weight and a second automatic holding mechanism for automatically holding the upper side of the weight.
(3) The weight fixing device according to the above (2), wherein the first automatic holding mechanism is provided integrally with a load sensor that measures the weight of the weight and holds the lower side of the weight in a fixed state with respect to the load sensor, and the second automatic holding mechanism is provided integrally with a cabinet that houses the weight inside and holds the upper side of the weight in a free state with respect to the load sensor.
(4) The weight fixing device according to the above (3), wherein the first automatic holding mechanism has a pair of arm portions which are automatically driven to open and close, and the lower side of the weight is held in a clamped state by the pair of arm portions, and the second automatic holding mechanism has a shutter portion which is automatically driven to open and close, and the upper side of the weight is held in a state where the shutter portion blocks between the upper side of the weight and the carry-out port of the cabinet.
(5) The weight fixing device according to the above (3), characterized by comprising a slide support mechanism for supporting the weight so as to slide freely in the front-rear direction of the cabinet.
(6) The weight fixing device according to the above (5), wherein the slide support mechanism has a plurality of rollers arranged in the front-rear direction of the cabinet on the load sensor, and the weight is supported in an upright state by the plurality of rollers in a freely sliding manner.
(7) The weight fixing device according to any one of the above (1) to (6), wherein the weight is a gas cylinder.
As described above, according to the present invention, it is possible to provide a weight fixing device that automatically performs an operation of fixing a weight in an upright state and prevents the weight from being toppled over.
Drawings
Fig. 1 is a perspective front view showing a state before a gas cylinder is fixed in a gas cylinder cabinet provided with a gas cylinder fixing device according to an embodiment of the present invention.
Fig. 2 is a perspective plan view showing a state before a gas cylinder is fixed in a gas cylinder cabinet.
Fig. 3 is a perspective front view showing a state after the gas cylinder is fixed in the gas cylinder cabinet.
Fig. 4 is a perspective plan view showing a state after the gas cylinder is fixed in the gas cylinder cabinet.
Description of the reference numerals
1 fixing device
2 first automatic holding mechanism (arm mechanism)
3 second automatic retaining mechanism (baffle mechanism)
4 arm 5 bench
6 air cylinder 7 link mechanism
8 stop mechanism 9 baffle plate part
10 air cylinder 11 link mechanism
12-stop 100 gas cylinder cabinet
101a housing 101b door
102 load sensor 103 sliding support mechanism
S containing space B gas storage bottle (heavy)
Detailed Description
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
As an embodiment of the present invention, a gas cylinder cabinet 100 provided with a fixing device 1 for a gas cylinder B shown in fig. 1 to 4, for example, will be described.
Fig. 1 is a perspective front view showing a state before fixing a gas cylinder B in a gas cylinder cabinet 100 provided with a fixing device 1 for the gas cylinder B. Fig. 2 is a perspective plan view showing a state before the gas cylinder B is fixed in the gas cylinder cabinet 100. Fig. 3 is a perspective front view showing a state after the gas cylinder B is fixed in the gas cylinder cabinet 100. Fig. 4 is a perspective plan view showing a state after the gas cylinder B is fixed in the gas cylinder cabinet 100.
As shown in fig. 1 to 4, the gas cylinder cabinet 100 of the present embodiment is a carrying-in/out place of the gas cylinder B as a system for automatically carrying the gas cylinder B which is a heavy object. Further, as a means for supplying the gas filled in the gas cylinder B to the semiconductor manufacturing apparatus, the gas cylinder cabinet 100 is provided on a bottom plate.
The gas cylinder cabinet 100 has a substantially rectangular parallelepiped housing 101a as a whole, and opens and closes a carry-in/out port of a gas cylinder B located on the front side of the housing 101a by a pair of left and right doors 101B. In addition, the gas cylinder cabinet 100 accommodates a pair of gas cylinders B in an upright state in an accommodation space S located inside the case 101a.
The gas cylinder cabinet 100 accommodates a pair of gas cylinders B in the accommodation space S in a state of being juxtaposed in the width direction. In the gas supply apparatus, when gas is supplied from any one of the pair of gas cylinders B, the other gas cylinder B can be replaced without interrupting the supply of gas.
At the bottom of the accommodation space S, a load sensor 102 for measuring the weight of the gas cylinder B and a slide support mechanism 103 for supporting the gas cylinder B so as to slide freely in the front-rear direction of the accommodation space S are provided.
The load sensor 102 is provided at the bottom of the accommodation space S in correspondence with each of the gas cylinders B. In the gas supply apparatus, the gas remaining in the gas cylinder B is obtained by measuring the weight of the gas cylinder B, and the replacement timing of the gas cylinder B is predicted and managed.
The slide support mechanism 103 is constituted by free rollers, and has a plurality of rollers 103a arranged on the load sensors 102 in the front-rear direction of the accommodation space S, and a pair of frames 103b rotatably supporting the plurality of rollers 103a, corresponding to each of the load sensors 102.
In the slide support mechanism 103, the plurality of rollers 103a can slide the gas cylinder B placed on the plurality of rollers 103a in the front-rear direction of the accommodation space S while being kept upright.
The slide supporting mechanism 103 is not necessarily limited to the structure composed of the free rollers described above, and, for example, a conveyor belt or the like may be used.
In addition to this, the gas cylinder cabinet 100 is provided with, for example, a pipe connected to the gas cylinder B, a control box accommodating a device for opening and closing a valve, monitoring pressure, monitoring leakage of gas, and the like, and a pipe box accommodating a pipe (not shown) for connection to a semiconductor manufacturing apparatus or the like.
In contrast, as a countermeasure against the earthquake, the gas cylinder cabinet 100 of the present embodiment is provided with the fixing device 1 of the present embodiment for fixing the gas cylinder B accommodated in the accommodation space S in an upright state so as not to topple over when the earthquake occurs.
Specifically, the fixing device 1 includes at least one (two in the present embodiment) automatic holding mechanisms 2, 3 for automatically holding the gas cylinder B. In the present embodiment, two automatic holding mechanisms 2, 3 are provided, namely, a first automatic holding mechanism 2 for automatically holding the lower side of the gas cylinder B and a second automatic holding mechanism 3 for automatically holding the upper side of the gas cylinder B.
The first automatic holding mechanism 2 employs a mechanism that is provided integrally with the load sensor 102 and holds the lower side of the gas cylinder B in a fixed state with respect to the load sensor 102. In the present embodiment, as the first automatic holding mechanism 2, for example, a driving source such as air driving, motor driving, electromagnetic driving, or the like (air driving is used in the present embodiment), and an arm mechanism (hereinafter referred to as "arm mechanism 2") having a pair of arm portions 4 that are automatically driven to open and close is employed.
Specifically, the arm mechanism 2 is mounted on the stand 5 integrally assembled with the frame 103b (slide supporting mechanism 103) on the load sensor 102. The pair of arm portions 4 have a shape curved to be substantially arc-shaped with each other, and the base end sides thereof are rotatably supported by the hinge portion 4 a.
The pair of arm portions 4 is connected to an air cylinder 6 serving as a driving source through a link mechanism 7. The air cylinder 6 and the link mechanism 7 are located on the back side of the accommodation space S and are mounted on the upper portion of the stage 5.
In the arm mechanism 2, the movement in the up-down direction by the air cylinder 6 is converted into the movement for rotating the pair of arm portions 4 in the opposite directions by the link mechanism 7, whereby the pair of arm portions 4 can be automatically driven to open and close.
Accordingly, in the arm mechanism 2, the lower side of the gas cylinder B can be held (gripped) in the standing state in a stable state by pinching the lower side of the gas cylinder B from both sides between the pair of arm portions 4 while rotating the pair of arm portions 4 in opposite directions.
The arm mechanism 2 is provided with a stopper mechanism 8, and the stopper mechanism 8 restricts the rotation of the pair of arm portions 4 in the opening direction in a state where the pair of arm portions 4 clamp the gas cylinder B.
The stopper mechanism 8 has a pin cylinder connected to the air cylinder 6 serving as a driving source, and restricts rotation of the pair of arm portions 4 in the opening direction by inserting a pin of the pin cylinder into a hole portion of one arm portion 4.
The stopper mechanism 8 is not necessarily limited to the one described above, and may be appropriately changed. In addition, although the air drive is used in the arm mechanism 2, in the case of using the motor drive or the electromagnetic drive, the pair of arm portions 4 can be restricted from rotating in the opening direction without providing such a stopper mechanism 8.
In addition, in the arm mechanism 2, the size of the spacer 4B attached to the pair of arm portions 4 can be changed in accordance with the size of the gas cylinder B, thereby accommodating gas cylinders B of different sizes.
The first automatic holding mechanism 2 is not necessarily limited to the arm mechanism described above, and a vacuum mechanism that holds the gas cylinder B by suction, for example, may be used.
The second automatic holding mechanism 3 is provided integrally with the gas cylinder cabinet 100, and holds the upper side of the gas cylinder B in a free state with respect to the load sensor 102. In the present embodiment, as the second automatic holding mechanism 3, a driving source such as air driving, motor driving, electromagnetic driving, or the like (air driving is used in the present embodiment), and a shutter mechanism (hereinafter referred to as "shutter mechanism 3") having a shutter portion 9 that automatically drives opening and closing is used.
Specifically, the shutter mechanism 3 is mounted to the housing 101a of the gas cylinder cabinet 100. The shutter portion 9 has a shape extending in a straight line, and a base end side thereof is rotatably supported by the hinge portion 9 a.
The shutter 9 is connected to an air cylinder 10 serving as a driving source through a link mechanism 11. The air cylinder 10 and the link mechanism 11 are located on the side surface side of the accommodation space S and are mounted to the housing 101a.
The baffle plate portion 9 is arranged so as to correspond to each of a pair of gas cylinders B juxtaposed in the width direction of the accommodation space S, and is symmetrically mounted on both left and right sides of the housing 101a. On the other hand, a stopper 12 that abuts against the shutter portion 9 at the time of blocking is provided at the widthwise center of the accommodation space S.
In the barrier mechanism 3, the movement in the up-down direction by the air cylinder 10 is converted into the movement for rotating the barrier portion 9 between the vertical position and the horizontal position by the link mechanism 11, whereby the barrier portion 9 can be automatically driven to be opened and closed.
Accordingly, in the shutter mechanism 3, the shutter 9 can be operated to rotate from the vertical position to the horizontal position, and the shutter 9 having the front end side abutted against the stopper 12 holds the upper side of the gas cylinder B in a state where the upper side of the gas cylinder B is blocked from the carry-out port of the gas cylinder 100.
In the fixing device 1 of the present embodiment having the above-described configuration, the lower side and the upper side of the gas cylinder B are automatically held by the arm mechanism 2 and the shutter mechanism 3 described above, whereby the operation of fixing the gas cylinder B in the upright state can be automatically performed, and the gas cylinder B can be prevented from toppling over when an earthquake occurs.
In the fixing device 1 of the present embodiment, as the first automatic holding mechanism 2, an arm mechanism that is provided integrally with the load sensor 102 and holds the lower side of the gas cylinder B in a fixed state with respect to the load sensor 102 is used, and as the second automatic holding mechanism 3, a shutter mechanism that is provided integrally with the gas cylinder cabinet 100 and holds the upper side of the gas cylinder B in a free state with respect to the load sensor 102 is used.
That is, the fixing device 1 includes a first automatic holding mechanism (arm mechanism) 2 for automatically holding the lower side of the gas cylinder B in a state of contact with the gas cylinder B, and a second automatic holding mechanism (shutter mechanism) 3 for automatically holding the upper side of the gas cylinder B in a state of non-contact with the gas cylinder B.
In this case, when the lower side and the upper side of the gas cylinder B are held by the first automatic holding mechanism (arm mechanism) 2 and the second automatic holding mechanism (shutter mechanism) 3, the gas cylinder B can be prevented from tilting without affecting the load measurement of the gas cylinder B by the load sensor 102.
On the other hand, in the case where the upper side of the gas cylinder B is held by the second automatic holding mechanism 3 in a state of being in contact with the gas cylinder B, a load on the case 101a side of the gas cylinder 100 may be applied to the load sensor 102. In this case, the load of the gas cylinder B measured by the load sensor 102 may change, and in the worst case, the supply of the gas may be stopped.
The present invention is not necessarily limited to the embodiments described above, and various modifications can be made without departing from the scope of the present invention.
For example, although the fixing device 1 to which the present invention is applied is applicable to the gas cylinder cabinet 100 in which the above-described gas cylinder B is housed in the upright state, the present invention is not limited to such a fixing device in which the gas cylinder B is fixed in the upright state, but can be widely applied to a weight fixing device in which a weight is fixed in the upright state in order to prevent the falling of the weight.
Claims (7)
1. A weight fixing device for fixing a weight in an upright state is characterized in that,
having at least one automatic holding mechanism for automatically holding the weight.
2. The weight holding device of claim 1, wherein the weight holding device comprises a weight holding device,
has a first automatic holding mechanism for automatically holding the lower side of the weight, and a second automatic holding mechanism for automatically holding the upper side of the weight.
3. A weight holding device according to claim 2, wherein,
the first automatic holding mechanism is provided integrally with a load sensor that measures the weight of the weight, and holds the underside of the weight in a fixed state relative to the load sensor,
the second automatic holding mechanism is provided integrally with a cabinet accommodating the weight inside, and holds the upper side of the weight in a free state with respect to the load sensor.
4. A weight holding device according to claim 3, wherein,
the first automatic holding mechanism has a pair of arm portions which are automatically driven to open and close, and holds the lower side of the weight in a clamped state by the pair of arm portions,
the second automatic holding mechanism has a shutter portion that is automatically driven to open and close, and holds the upper side of the weight by the shutter portion in a state where the shutter portion blocks between the upper side of the weight and the carry-out/carry-in port of the cabinet.
5. A weight holding device according to claim 3, wherein,
has a slide support mechanism for supporting the weight in a freely slidable manner in the front-rear direction of the cabinet.
6. The weight holding device of claim 5, wherein the weight holding device comprises a weight holding device,
the slide support mechanism has a plurality of rollers arranged in the front-rear direction of the cabinet on the load sensor, and supports the weight in an upright state by the plurality of rollers in a freely sliding manner.
7. The weight holding device according to any one of claims 1 to 6, wherein,
the weight is a gas storage bottle.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022095872A JP7157891B1 (en) | 2022-06-14 | 2022-06-14 | Fixing device for heavy objects |
| JP2022-095872 | 2022-06-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117228179A true CN117228179A (en) | 2023-12-15 |
Family
ID=83691011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310674258.9A Pending CN117228179A (en) | 2022-06-14 | 2023-06-08 | Weight fixing device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7157891B1 (en) |
| CN (1) | CN117228179A (en) |
| TW (1) | TW202403223A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7428846B1 (en) | 2023-06-29 | 2024-02-06 | 大陽日酸株式会社 | cylinder cabinet |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3155765A (en) | 1960-07-25 | 1964-11-03 | Anaconda Wire & Cable Co | Oil pressure controller for pipe-type electric cable |
| JP2648830B2 (en) * | 1992-12-10 | 1997-09-03 | 日本酸素株式会社 | Gas container fixing device |
| JP3825249B2 (en) | 2000-12-12 | 2006-09-27 | 株式会社クボタ | Fluid filling system |
| JP4009421B2 (en) | 2000-12-12 | 2007-11-14 | 大同テック株式会社 | Cylinder positioning device |
| JP3782933B2 (en) | 2000-12-12 | 2006-06-07 | 株式会社クボタ | Fluid filling system |
| JP6341599B2 (en) | 2014-03-18 | 2018-06-13 | 国立研究開発法人情報通信研究機構 | Encryption data update system and encryption data update method |
| JP6885752B2 (en) | 2017-03-07 | 2021-06-16 | トーヨーカネツ株式会社 | Lifting and lifting device with automatic attachment / detachment mechanism |
-
2022
- 2022-06-14 JP JP2022095872A patent/JP7157891B1/en active Active
-
2023
- 2023-05-24 TW TW112119397A patent/TW202403223A/en unknown
- 2023-06-08 CN CN202310674258.9A patent/CN117228179A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JP2023182334A (en) | 2023-12-26 |
| TW202403223A (en) | 2024-01-16 |
| JP7157891B1 (en) | 2022-10-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN117228179A (en) | Weight fixing device | |
| KR102132172B1 (en) | gasket input/output module and method for gas supply apparatus of gas cylinder | |
| US6099230A (en) | Automated labware storage system | |
| JP5020994B2 (en) | Loading and unloading stations for semiconductor processing equipment | |
| KR20070114348A (en) | Load port and load port control method | |
| KR102132170B1 (en) | pallet type jig, automatic driving system | |
| KR102053435B1 (en) | Printed Circuit Board Loading Device for Automatic Reversing | |
| KR20200091553A (en) | gas supply apparatus of gas cylinder | |
| KR101654819B1 (en) | A Moving Stage for X-ray Inspection and An Apparatus with the Same | |
| KR20200091552A (en) | turn table module for gas supply apparatus of gas cylinder | |
| JP2015523262A (en) | Shearographic imaging machine and method | |
| US20040099824A1 (en) | Wafer processing apparatus capable of mapping wafers | |
| WO2022193339A1 (en) | Opening and closing device for wafer carrier | |
| KR20100044782A (en) | Method and apparatus for providing flat panel display environmental isolation | |
| WO2013187104A1 (en) | Lid opening/closing device | |
| KR100950016B1 (en) | Unit for supporting a flat panel | |
| KR20070090564A (en) | Device for mapping of foup | |
| JPWO2020054033A1 (en) | Plate changer for autosampler | |
| CN113474267B (en) | Lid opening and closing device | |
| TWI226099B (en) | Wafer processing apparatus capable of mapping wafer | |
| JPH10185091A (en) | Liquefied gas automatic filler | |
| KR102132169B1 (en) | finger gripper of gasket input/output module for gas supply apparatus of gas cylinder | |
| KR102132171B1 (en) | gasket supply line of gasket input module for gas supply apparatus of gas cylinder | |
| CN113454007B (en) | Lid opening and closing device | |
| US20080019804A1 (en) | Container Opening-Closing Apparatus and Container-Placement-Position Adjustment Method for the Same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication |