CN117228179A - Weight fixing device - Google Patents

Abstract

The present invention provides a heavy object fixing device that automatically performs an operation of fixing a heavy object in an upright state and prevents the heavy object from tipping. A fixing device (1) for fixing a weight (B) in an upright state includes a first automatic holding mechanism (2) that automatically holds the lower side of the weight (B), and an automatic holding device for holding the weight (B). The second automatic holding mechanism (3) on the upper side of (B) and the first automatic holding mechanism (2) are integrated with the load sensor (102) that measures the weight of the weight (B), and the weight (B) is ) is held in a fixed state relative to the load sensor (102), the second automatic holding mechanism (3) is integrated with the cabinet (100) that accommodates the weight (B) inside, and the weight (B) is The upper side of B) is kept free relative to the load sensor (102).

Description

Heavy object fixation device

Technical field

The present invention relates to a heavy object fixing device for fixing heavy objects such as gas bottles in an upright state.

Background technique

For example, gas cylinder cabinets are widely used as equipment for supplying various gases. For the gas bottle cabinet, open and close the door, and store a pair of gas storage bottles in the accommodation space inside the gas bottle cabinet in an upright state. In addition, for the gas cylinder cabinet, when gas is supplied from any gas cylinder, another gas cylinder can be replaced without interrupting the gas supply.

Patent Document 1: Japanese Patent Application Publication No. 2006-057747

Patent Document 2: Japanese Patent Application Publication No. 2012-229727

Contents of the invention

As for the above-mentioned gas cylinder cabinet, as a countermeasure against earthquakes, it is required to correctly fix the gas cylinders in the storage space in order to prevent the gas cylinders from falling when an earthquake occurs (for example, refer to the above-mentioned Patent Documents 1 and 2). . Therefore, the conventional method of fixing the gas storage bottle uses fixing tools such as chains and/or metal straps to manually fix the gas storage bottle.

On the other hand, in the operation of replacing the above-mentioned gas storage bottle, a gas bottle transfer trolley is used to transport the gas storage bottle, and the gas storage bottle is carried out and in between the gas bottle transfer trolley and the gas bottle cabinet. (replace).

However, such a gas storage bottle replacement operation requires the operator to hold a heavy object, that is, the gas storage bottle, which is very dangerous and involves heavy labor intensity. In addition, the above-mentioned fixing operation of the gas storage bottle must be performed manually and the operability is poor.

The present invention was proposed in view of such conventional problems, and an object thereof is to provide a heavy object fixing device that automatically performs an operation of fixing a heavy object in an upright state and prevents the heavy object from tipping.

In order to achieve the above object, the present invention provides the following solutions.

(1) A heavy object fixing device for fixing heavy objects in an upright state, characterized by having at least one automatic holding mechanism that automatically holds the heavy object.

(2) The heavy object fixing device according to the above (1), characterized by having a first automatic holding mechanism that automatically holds the lower side of the heavy object, and a third automatic holding mechanism that automatically holds the upper side of the heavy object. 2. Automatic holding mechanism.

(3) The heavy object fixing device according to the above (2), characterized in that the first automatic holding mechanism is provided integrally with a load sensor that measures the weight of the heavy object, and the heavy object is The lower side of the load sensor is maintained in a fixed state relative to the load sensor, and the second automatic holding mechanism is provided integrally with the cabinet that accommodates the heavy object inside, and maintains the upper side of the heavy object relative to the load sensor. Describe the free state of the load sensor.

(4) The heavy object fixing device according to the above (3), wherein the first automatic holding mechanism has a pair of arms that are automatically driven to open and close. The lower side of the heavy object is held in a tight state, and the second automatic holding mechanism has a baffle portion that is automatically driven to open and close. The upper side of the heavy object is connected to the moving in and out of the cabinet through the baffle portion. Hold the upper side of the weight with the mouth blocked.

(5) The heavy object fixing device according to the above (3), further comprising a sliding support mechanism that supports the heavy object so as to be slidable in the front-rear direction of the cabinet.

(6) The heavy object fixing device according to the above (5), wherein the sliding support mechanism has a plurality of rollers arranged on the load sensor in the front-rear direction of the cabinet. A plurality of rollers support the weight in an upright state in a freely sliding manner.

(7) The weight fixing device according to any one of the above (1) to (6), wherein the weight is a gas cylinder.

As described above, according to the present invention, it is possible to provide a heavy object fixing device that automatically performs an operation of fixing a heavy object in an upright state and prevents the heavy object from tipping.

Description of drawings

1 is a perspective front view showing a state before a gas cylinder is fixed in a gas cylinder cabinet equipped with a gas cylinder fixing device according to an embodiment of the present invention.

2 is a perspective top view showing a state before the gas cylinder is fixed in the gas cylinder cabinet.

3 is a perspective front view showing a state after the gas cylinder is fixed in the gas cylinder cabinet.

4 is a perspective top view showing a state after the gas cylinder is fixed in the gas cylinder cabinet.

Explanation of reference signs

1fixture

2 First automatic holding mechanism (arm mechanism)

3 Second automatic holding mechanism (baffle mechanism)

4 arms 5 stands

6 air cylinder 7 linkage mechanism

8 Stopper mechanism 9 Baffle part

10 air cylinder 11 linkage mechanism

12 Stoppers 100 Gas bottle cabinet

101a shell 101b door

102 Load sensor 103 Sliding support mechanism

SAccommodation space B Gas storage bottle (heavy objects)

Detailed ways

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

As an embodiment of the present invention, a gas cylinder cabinet 100 including a fixing device 1 for a gas cylinder B shown in FIGS. 1 to 4 will be described.

In addition, FIG. 1 is a perspective front view showing the state before the gas cylinder B is fixed in the gas cylinder cabinet 100 provided with the fixing device 1 of the gas cylinder B. In addition, FIG. FIG. 2 is a perspective top view showing a state before the gas cylinder B is fixed in the gas cylinder cabinet 100 . FIG. 3 is a perspective front view showing a state after the gas cylinder B is fixed in the gas cylinder cabinet 100 . FIG. 4 is a perspective top view showing a state in which the gas cylinder B is fixed in the gas cylinder cabinet 100 .

As shown in FIGS. 1 to 4 , the gas bottle cabinet 100 of this embodiment is a system for automatically transporting the gas cylinder B, which is a heavy object. In addition, a gas cylinder cabinet 100 is provided on the floor as a device for supplying the gas filled in the gas cylinder B to the semiconductor manufacturing apparatus.

The gas bottle cabinet 100 has a casing 101a having a substantially rectangular parallelepiped shape as a whole, and a carry-out port for the gas cylinder B located on the front side of the casing 101a is opened and closed by a pair of left and right doors 101b. In addition, the gas bottle cabinet 100 accommodates a pair of gas cylinders B in an upright state in an accommodation space S located inside the housing 101a.

The gas cylinder cabinet 100 accommodates a pair of gas cylinders B in the storage space S in a state in which they stand side by side in the width direction. In the gas supply facility, when gas is supplied from any one of the pair of gas bottles B, the other gas bottle B can be replaced without interrupting the supply of gas.

At the bottom of the accommodation space S, a load sensor 102 that measures the weight of the gas cylinder B and a sliding support mechanism 103 that supports the gas cylinder B in a freely sliding manner in the front-rear direction of the accommodation space S are provided.

The load sensor 102 is provided at the bottom of the accommodation space S corresponding to each gas cylinder B. In the gas supply equipment, the weight of the gas cylinder B is measured to determine the remaining amount of gas in the gas cylinder B, and the replacement timing of the gas cylinder B is predicted and managed.

The sliding support mechanism 103 is composed of free rollers, and has a plurality of rollers 103a arranged on the load sensor 102 in the front-rear direction of the accommodation space S corresponding to each load sensor 102, and a plurality of rollers 103a that freely rotates. A pair of frames 103b.

In the sliding support mechanism 103, the plurality of rollers 103a allow the gas bottle B placed on the plurality of rollers 103a to slide in the front-rear direction of the accommodation space S while being kept upright.

It should be noted that the sliding support mechanism 103 is not necessarily limited to the structure composed of the above-mentioned free rollers, and a conveyor belt, for example, may be used.

In addition, the gas cylinder cabinet 100 is provided with, for example, a pipe connected to the gas cylinder B, a control box accommodating equipment for opening and closing valves, monitoring pressure, monitoring gas leakage, etc., and a control box containing There are duct boxes (none of which are shown) for connecting to ducts of semiconductor manufacturing equipment and the like.

As a countermeasure against earthquakes, the gas cylinder cabinet 100 of this embodiment is provided with the fixing device 1 of this embodiment for fixing the gas cylinder B accommodated in the storage space S in an upright state, so as to prevent the gas cylinder B from being stored when an earthquake occurs. Cylinder B is dumped.

Specifically, in order to automatically hold the gas cylinder B, the fixing device 1 is provided with at least one (two in this embodiment) automatic holding mechanisms 2 and 3 . In this embodiment, two automatic holding mechanisms 2 and 3 are provided, that is, a first automatic holding mechanism 2 that automatically holds the lower side of the gas cylinder B and a second automatic holding mechanism that automatically holds the upper side of the gas cylinder B. 3.

The first automatic holding mechanism 2 adopts a mechanism that is provided integrally with the load sensor 102 and holds the lower side of the gas cylinder B in a fixed state with respect to the load sensor 102 . In this embodiment, as the first automatic holding mechanism 2, a driving source such as air drive, motor drive, electromagnetic drive, etc. is used (in this embodiment, air drive is used), and a pair of automatically driven openings and closings are used. The arm mechanism of the arm part 4 (hereinafter referred to as "arm mechanism 2").

Specifically, this arm mechanism 2 is mounted on the stand 5 integrated with the frame 103b (sliding support mechanism 103) of the load sensor 102. The pair of arm portions 4 have shapes that are mutually curved in a substantially arc shape, and their base end sides are rotatably supported by the hinge portion 4a.

In addition, the pair of arms 4 is connected to an air cylinder 6 serving as a driving source through a link mechanism 7 . The air cylinder 6 and the link mechanism 7 are located on the back side of the accommodation space S and are mounted on the upper part of the stand 5 .

In the arm mechanism 2, the vertical movement caused by the air cylinder 6 is converted into a movement of the pair of arm portions 4 in opposite directions through the link mechanism 7, thereby automatically driving the pair of arms. Part 4 opens and closes.

Therefore, in the arm mechanism 2, while operating the pair of arm portions 4 to rotate in opposite directions, the lower side of the gas bottle B is clamped between the pair of arm portions 4 from both sides, thereby making it possible to stably Hold (hold) the underside of the gas cylinder B in the upright state.

In addition, the arm mechanism 2 is provided with a stopper mechanism 8 that restricts the pair of arm portions 4 from rotating in the opening direction when the gas cylinder B is clamped.

The stopper mechanism 8 has a pin cylinder connected to the air cylinder 6 serving as a driving source, and by inserting a pin of the pin cylinder into a hole of one arm 4, the stopper mechanism 8 restricts the rotation of the pair of arms 4 in the opening direction.

It should be noted that the stopper mechanism 8 is not necessarily limited to such a mechanism and can be appropriately changed. In addition, in the arm mechanism 2, although the above-mentioned air drive is used, when using a motor drive or an electromagnetic drive, such a stopper mechanism 8 can be not provided to restrict the rotation of the pair of arm portions 4 in the opening direction.

In addition, in the arm mechanism 2, the size of the spacer 4b installed on the pair of arms 4 can be changed according to the size of the gas cylinder B, so as to accommodate gas cylinders B of different sizes.

It should be noted that the first automatic holding mechanism 2 is not necessarily limited to the above-mentioned arm mechanism. For example, a vacuum mechanism that holds the gas bottle B by adsorption may be used.

The second automatic holding mechanism 3 is provided integrally with the gas bottle cabinet 100 and holds the upper side of the gas bottle B in a free state with respect to the load sensor 102 . In this embodiment, as the second automatic holding mechanism 3, a driving source such as air drive, motor drive, and electromagnetic drive is used (in this embodiment, air drive is used), and a shutter portion that automatically drives opening and closing is used. 9 baffle mechanism (hereinafter referred to as "baffle mechanism 3").

Specifically, the baffle mechanism 3 is installed on the housing 101a of the gas bottle cabinet 100. The baffle portion 9 has a linearly extended shape, and its base end side is rotatably supported by the hinge portion 9a.

In addition, the baffle portion 9 is connected to the air cylinder 10 serving as a driving source through the link mechanism 11 . The air cylinder 10 and the link mechanism 11 are located on the lateral side of the accommodation space S and are mounted on the housing 101a.

The baffle portion 9 is disposed corresponding to each of the pair of gas bottles B juxtaposed in the width direction of the accommodation space S, and is installed symmetrically on both left and right sides of the housing 101a. On the other hand, a stopper 12 that comes into contact with the baffle portion 9 during blocking is provided in the central portion of the accommodation space S in the width direction.

In the damper mechanism 3, the movement in the up-and-down direction caused by the air cylinder 10 is converted into a movement that rotates the damper portion 9 between the vertical position and the horizontal position through the link mechanism 11, whereby the damper can be automatically driven. The plate part 9 opens and closes.

Therefore, in the baffle mechanism 3, the baffle portion 9 can be operated to rotate from the vertical position to the horizontal position, and at the same time, the baffle portion 9 with the front end side abutting the stopper 12 is connected to the gas on the upper side of the gas cylinder B. The upper side of the gas cylinder B is held in a state where the loading and unloading openings of the bottle cabinet 100 are blocked.

In the fixing device 1 of the present embodiment having the above structure, the lower side and the upper side of the gas bottle B are automatically held by the above-mentioned arm mechanism 2 and the baffle mechanism 3, so that the gas bottle B can be automatically moved B is fixedly operated in an upright state and can prevent the gas storage bottle B from tipping when an earthquake occurs.

In addition, in the fixing device 1 of this embodiment, the above-mentioned first automatic holding mechanism 2 is provided integrally with the load sensor 102 and holds the lower side of the gas cylinder B in a fixed state with respect to the load sensor 102 . As the second automatic holding mechanism 3 , the arm mechanism is provided integrally with the gas bottle cabinet 100 and uses a baffle mechanism that holds the upper side of the gas bottle B in a free state relative to the load sensor 102 .

That is, the fixing device 1 includes a first automatic holding mechanism (arm mechanism) 2 that automatically holds the lower side of the gas bottle B when in contact with the gas bottle B, and a first automatic holding mechanism (arm mechanism) 2 that automatically holds the lower side of the gas bottle B when it is not in contact with the gas bottle B. The second automatic holding mechanism (baffle mechanism) 3 on the upper side of the gas cylinder B is automatically held in the state.

In this case, when the lower side and the upper side of the gas cylinder B are held by the first automatic holding mechanism (arm mechanism) 2 and the second automatic holding mechanism (baffle mechanism) 3, the position of the load sensor 102 can be maintained without affecting the position of the load sensor 102. When measuring the load of gas cylinder B, prevent gas cylinder B from tipping.

On the other hand, when the upper side of the gas cylinder B is held by the second automatic holding mechanism 3 while being in contact with the gas cylinder B, a load on the casing 101a side of the gas cylinder cabinet 100 may be applied to the load sensor. 102. In this case, the load measurement of the gas cylinder B by the load sensor 102 is changed, and in the worst case, the supply of gas may be stopped.

It should be noted that the present invention is not necessarily limited to the above-described embodiments, and various changes can be made without departing from the gist of the present invention.

For example, although the fixing device 1 applying the present invention is suitable for the gas bottle cabinet 100 that accommodates the above-mentioned gas cylinder B in an upright state, it is not limited to such a fixation that secures the gas cylinder B in an upright state. The present invention can be widely applied to a heavy object fixing device that fixes a heavy object in an upright state in order to prevent the heavy object from tipping.

Claims (7)

1. A heavy object fixing device used to fix heavy objects in an upright state, characterized by: It has at least one automatic holding mechanism that automatically holds the weight. 2. The heavy object fixing device according to claim 1, characterized in that, It has a first automatic holding mechanism that automatically holds the lower side of the weight, and a second automatic holding mechanism that automatically holds the upper side of the weight. 3. The heavy object fixing device according to claim 2, characterized in that: The first automatic holding mechanism is provided integrally with a load sensor that measures the weight of the weight, and maintains the lower side of the weight in a fixed state relative to the load sensor, The second automatic holding mechanism is provided integrally with a cabinet that accommodates the weight inside, and holds the upper side of the weight in a free state with respect to the load sensor. 4. The heavy object fixing device according to claim 3, characterized in that: The first automatic holding mechanism has a pair of arms that are automatically driven to open and close, and the lower side of the weight is held in a clamped state by the pair of arms, The second automatic holding mechanism has a baffle portion that is automatically driven to open and close, and the baffle portion holds the object in a state of blocking the upper side of the weight from the unloading and unloading entrance of the cabinet. Describe the upper side of the weight. 5. The heavy object fixing device according to claim 3, characterized in that: A sliding support mechanism is provided to support the weight so as to slide freely in the front-rear direction of the cabinet. 6. The heavy object fixing device according to claim 5, characterized in that: The sliding support mechanism has a plurality of rollers arranged in the front-rear direction of the cabinet on the load sensor, and the plurality of rollers supports the heavy object in an upright state in a freely sliding manner. 7. The weight fixing device according to any one of claims 1 to 6, characterized in that, The heavy object is a gas storage bottle.