CN117225130A - Device for efficiently thermally decomposing harmful gas by venturi tube coupling plasma arc torch - Google Patents
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- CN117225130A CN117225130A CN202311252725.5A CN202311252725A CN117225130A CN 117225130 A CN117225130 A CN 117225130A CN 202311252725 A CN202311252725 A CN 202311252725A CN 117225130 A CN117225130 A CN 117225130A
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- arc torch
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- 230000008878 coupling Effects 0.000 title abstract description 6
- 238000010168 coupling process Methods 0.000 title abstract description 6
- 238000005859 coupling reaction Methods 0.000 title abstract description 6
- 239000007789 gas Substances 0.000 claims abstract description 118
- 238000006243 chemical reaction Methods 0.000 claims abstract description 47
- 239000000498 cooling water Substances 0.000 claims abstract description 43
- 238000005979 thermal decomposition reaction Methods 0.000 claims abstract description 41
- 238000009792 diffusion process Methods 0.000 claims abstract description 30
- 238000001816 cooling Methods 0.000 claims abstract description 18
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229910000077 silane Inorganic materials 0.000 claims abstract description 16
- 239000005922 Phosphane Substances 0.000 claims abstract description 10
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910000064 phosphane Inorganic materials 0.000 claims abstract description 10
- 230000001681 protective effect Effects 0.000 claims abstract description 7
- 238000000354 decomposition reaction Methods 0.000 claims abstract description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 12
- 229910052757 nitrogen Inorganic materials 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 238000005266 casting Methods 0.000 claims description 4
- 239000002131 composite material Substances 0.000 claims description 4
- 229910052593 corundum Inorganic materials 0.000 claims description 4
- 239000010431 corundum Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 3
- 239000002826 coolant Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 238000009776 industrial production Methods 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 4
- 230000001808 coupling effect Effects 0.000 description 4
- 238000006731 degradation reaction Methods 0.000 description 4
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 3
- 239000003546 flue gas Substances 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000007084 catalytic combustion reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
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- Plasma Technology (AREA)
Abstract
The invention discloses a device for efficiently thermally decomposing harmful gas by a venturi tube coupling plasma arc torch, and belongs to the technical field of harmful gas treatment in the electronic industry. The device comprises a tail gas inlet unit, a Venturi type reaction unit, a plasma arc torch generation unit and a thermal decomposition reaction unit; the venturi type reaction unit comprises a necking pipe, a throat pipe and a diffusion pipe; the plasma arc torch generating unit comprises an anode interface of a plasma generating power supply, a first cooling water inlet, a protective gas inlet, a cathode interface and a first cooling water outlet; the thermal decomposition reaction unit comprises a plasma arc torch, a reaction inner cavity and a cooling unit, and the cooling unit comprises a second cooling water outlet and a second cooling water inlet; compared with the prior art, the invention can realize the efficient decomposition and conversion of harmful gases such as silane, phosphane and the like in the tail gas, is suitable for the variable working conditions of different loads, and has better application and popularization prospects.
Description
Technical Field
The invention belongs to the technical field of environmental protection, and particularly relates to a device for efficiently thermally decomposing harmful gas by a venturi tube coupling plasma arc torch.
Background
In recent years, the emission amount of harmful gases such as silane, phosphane and the like discharged from tail gas of the electronic industry is continuously increased, and the environmental problems caused by the emission amount are also increasingly remarkable. At present, related treatment technologies in the aspect of emission control of harmful gases in the electronic industry mainly comprise a catalytic combustion technology, a thermal decomposition technology, a carbon adsorption technology and the like.
In the prior art, the harmful components in the tail gas of the electronic industry are usually trapped by adopting activated carbon adsorption, but the trapped harmful components also need to be recovered, so that secondary pollution is easy to cause. In addition, the escaping harmful components which are not adsorbed and trapped can be discharged into the atmosphere through the exhaust gas discharge port, so that the environment is polluted. For the electronic industry flue gas with low temperature, small flue gas amount and high harmful component content, the conventional trapping technology is not practical and is not suitable for use. There is therefore a need for new process technologies that address these specific flue gas harmful gas removal issues.
Disclosure of Invention
The invention aims to realize the efficient conversion and decomposition of high-concentration silane gas, phosphane and other harmful gases
And a device for efficiently thermally decomposing harmful gas by using a venturi tube coupled plasma arc torch is provided, so as to solve the bottleneck problem in the prior art.
The technical scheme of the invention is as follows:
a device for efficiently thermally decomposing harmful gas by a venturi tube coupling plasma arc torch comprises a main body device, a tail gas inlet unit, a venturi reaction unit, a plasma arc torch generation unit and a thermal decomposition reaction unit; the venturi type reaction unit comprises a necking pipe, a throat pipe and a diffusion pipe; the plasma arc torch generating unit comprises an anode interface of a plasma generating power supply, a first cooling water inlet, a protective gas inlet, a cathode interface and a first cooling water outlet; the thermal decomposition reaction unit comprises a plasma arc torch, a reaction inner cavity and a cooling unit, and the cooling unit comprises a second cooling water outlet and a second cooling water inlet;
(1) the silane gas and the phosphane harmful tail gas generated in the industrial production process are conveyed to a Venturi type reaction unit through a tail gas inlet unit, and a pressure step area is formed through the gas injection effect of the Venturi type reaction unit, so that the tail gas at an inlet is driven to enter a thermal decomposition reaction unit rapidly;
(2) the tail gas entering the thermal decomposition reaction unit is fully mixed with a high-temperature reaction zone generated by the plasma arc torch for contact and reaction, the flow speed of the tail gas at the outlet of a diffusion pipe of the Venturi reaction unit is reduced, a turbulent flow zone is formed at the inlet of the thermal decomposition reaction unit, the contact time of the gas and the plasma arc torch is prolonged, efficient thermal decomposition reaction is carried out, and the conversion and decomposition of harmful gas in the tail gas are further promoted;
(3) the plasma arc torch is generated by a direct current plasma arc torch generating unit, generates a plasma torch between a cathode interface and an anode interface, blows the plasma arc torch into a thermal decomposition reaction zone through a protective gas inlet, and provides thermal decomposition energy of harmful gas components for the thermal decomposition reaction zone.
The venturi reaction unit comprises a necking pipe, a throat pipe and a diffusion pipe which are integrally designed, wherein the diameter of the throat pipe is 30-40 mm, and the ratio of the length of the throat pipe to the diameter of the throat pipe is 1.2-2:1; the diffusion angle of the diffusion tube is 10-40 degrees, and the length of the diffusion tube is 3-5 times of the length of the throat tube.
The flow rate of gas in the venturi tube in the Venturi reaction unit is 40-70 m/s, and the flow rate of gas at the outlet of the diffusion tube is 10-15 m/s.
The plasma arc torch is generated by a plasma torch generating component in a non-transfer mode, a cathode wire at the center of a cathode interface is connected with a plasma generating power supply, an outer cylinder is connected with an anode interface, cooling water is protected at the inner layer of the outer cylinder, enters through a first cooling water inlet and flows out through a first cooling water outlet.
The cooling water quantity of the plasma arc torch generating unit is 1-5 m 3 /h。
The protective gas of the plasma arc torch generating unit is nitrogen, air and the like, the gas pressure is 3-8 bar, and the flow is 3-7 m 3 /h。
The output voltage of the generation power supply of the plasma arc torch generation unit is 200-400V, the current is 50-150A, and the operation power is 15-35 kW.
The reaction cavity of the thermal decomposition reaction unit is made of high-temperature resistant corundum composite casting material, and the main component of the corundum composite casting material is Al 2 O 3 。
The cooling unit is arranged on the shell of the reaction cavity, the cooling medium is process water, the process water enters the cooling unit from the second cooling water inlet, and flows out from the second cooling water outlet after heat exchange.
The cooling unit shell of the thermal decomposition reaction unit is grounded through a wire with good electric conductivity.
The harmful gas in the tail gas mainly refers to silane gas, phosphane, trimethylaluminum (TMA) and other harmful gases generated in the production process of the electronic industry, the gas concentration is 1-2%, and the flow of the treated tail gas is 30-200 m 3 /h。
Compared with the prior art, the invention has the following characteristics:
1) The invention realizes the efficient decomposition of harmful gas components such as silane gas, phosphane and the like in tail gas by utilizing the venturi reaction unit to couple the plasma arc torch;
2) The invention has better applicability to the process waste gas with low tail gas amount and high concentration of harmful gas;
3) The plasma arc torch is simple and compact in integral structure, economical and practical, efficient in coupling with the venturi tube, stable and reliable in operation and good in application prospect.
Drawings
FIG. 1 is a schematic diagram of a structure of the present invention;
the figure indicates: the plasma arc torch 1, the tail gas inlet unit 2, the anode interface 3, the first cooling water inlet 4, the shielding gas inlet 5, the cathode interface 6, the first cooling water outlet 7, the second cooling water outlet 8, the Venturi reaction unit 9, the connecting flange 10, the tail gas treatment outlet 11, the second cooling water inlet 12, the cooling unit 13, the plasma arc torch generating unit 14, the necking pipe 15, the throat pipe 16, the diffusion pipe 17, the reaction cavity 18 and the thermal decomposition reaction unit 19.
Detailed Description
The invention will now be described in detail with reference to the drawings and specific examples.
As shown in fig. 1, a venturi tube coupled plasma arc torch apparatus for efficiently thermally decomposing harmful gases, the main body apparatus comprises a tail gas inlet unit 2, a venturi reaction unit 9, a plasma arc torch generating unit 14 and a thermal decomposition reaction unit 19; wherein the venturi reaction unit 9 comprises a necking pipe 15, a throat pipe 16 and a diffusion pipe 17; the plasma arc torch generating unit 14 comprises an anode interface 3, a first cooling water inlet 4, a shielding gas inlet 5, a cathode interface 6 and a first cooling water outlet 7 of a plasma generating power supply; the thermal decomposition reaction unit 19 comprises the plasma arc torch 1, the reaction cavity 18, and the cooling unit 13, the cooling unit 13 comprising the second cooling water outlet 8 and the second cooling water inlet 12.
(1) The silane gas and phosphane harmful tail gas generated in the industrial production process is conveyed to the Venturi reaction unit 9 through the tail gas inlet unit 2, and a pressure step area is formed through the gas injection effect of the Venturi reaction unit 9, so that the tail gas at the inlet is driven to quickly enter the thermal decomposition reaction unit 19;
(2) the tail gas entering the thermal decomposition reaction unit 19 is fully mixed with a high-temperature reaction zone generated by the plasma arc torch 1 for contact and reaction, the flow speed of the tail gas at the outlet of the diffusion pipe 17 of the Venturi reaction unit 9 is reduced, a turbulent zone is formed at the inlet of the thermal decomposition reaction unit 19, the contact time of the gas and the plasma arc torch is prolonged, and efficient thermal decomposition reaction is carried out, so that the conversion and decomposition of harmful gas in the tail gas are further promoted;
(3) the plasma arc torch 1 is generated by a direct current plasma arc torch generating unit 14, generates plasma torches between the cathode interface 6 and the anode interface 3, and blows out of the plasma arc torch 1 through the protective gas inlet 5 into a thermal decomposition reaction zone to provide thermal decomposition energy of harmful gas components for the thermal decomposition reaction zone.
The venturi reaction unit 9 comprises a necking pipe 15, a throat pipe 16 and a diffusion pipe 17 which are integrally designed, wherein the diameter of the throat pipe is 30-40 mm, and the ratio of the length of the throat pipe to the diameter of the throat pipe is 1.2-2:1; the diffusion angle of the diffusion tube is 10-40 degrees, and the length of the diffusion tube is 3-5 times of the length of the throat tube.
The flow rate of the gas in the throat pipe 16 in the Venturi reaction unit 9 is 40-70 m/s, and the flow rate of the gas at the outlet of the diffusion pipe 17 is 10-15 m/s.
The plasma arc torch 1 is generated by a plasma torch generating component in a non-transfer mode, a cathode wire at the center of a cathode interface 6 is connected with a plasma generating power supply, an outer cylinder is connected with an anode interface 3, cooling water is protected by an inner layer of the outer cylinder, enters through a first cooling water inlet 4 and flows out through a first cooling water outlet 7.
The cooling water quantity of the plasma arc torch generating unit 14 is 1-5 m 3 /h。
The protective gas of the plasma arc torch generating unit 14 is nitrogen, air and the like, the gas pressure is 3-8 bar, and the flow is 3-7 m 3 /h。
The plasma arc torch generating unit 14 has a generating power supply output voltage of 200-400V, a current of 50-150A and an operating power of 15-35 kW.
The reaction cavity 18 of the thermal decomposition reaction unit 19 is made of high-temperature resistant corundum composite casting material, and the main component is Al 2 O 3 。
The cooling unit 13 is arranged on the cavity shell of the reaction cavity 18, the cooling medium is process water, the process water enters the cooling unit from the second cooling water inlet 12, and flows out from the second cooling water outlet 8 after heat exchange.
The cooling unit 13 housing of the thermal decomposition reaction unit 19 is grounded through a wire having good electrical conductivity.
The harmful gas in the tail gas mainly refers to silane gas, phosphane, trimethylaluminum (TMA) and other harmful gases generated in the production process of the electronic industry, the gas concentration is 1-2%, and the flow of the treated tail gas is 30-200 m 3 /h。
Example 1
1% silane gas (nitrogen as carrier gas) simulated tail gas was fed to the thermal decomposition reactor unit at a tail gas flow rate of 200 m 3 And/h. The diameter of the throat pipe is 30 mm, the length of the throat pipe is 50 mm, the diffusion angle of the diffusion pipe is 25 degrees, and the length is 200 mm; the output voltage of the plasma arc torch generating power supply is 200V, and the current is100A; cooling water flow rate of 2 m 3 /h; the shielding gas is nitrogen, the gas operating pressure is 4 bar, and the flow is 4 m 3 /h。
The silane gas degradation efficiency is more than 99.5% through the technical implementation process of the coupling effect of the venturi tube and the plasma arc torch.
Example 2
1% silane gas (nitrogen as carrier gas) simulated tail gas was fed to the thermal decomposition reactor unit at a tail gas flow rate of 200 m 3 And/h. The diameter of the throat pipe is 40 mm, the length of the throat pipe is 50 mm, the diffusion angle of the diffusion pipe is 30 degrees, and the length is 210 mm; the output voltage of the plasma arc torch generation power supply is 200V, and the current is 100A; cooling water flow rate of 2 m 3 /h; the shielding gas is nitrogen, the gas operating pressure is 4 bar, and the flow is 4 m 3 /h。
The silane gas degradation efficiency is more than 99.7% through the technical implementation process of the coupling effect of the venturi tube and the plasma arc torch.
Example 3
1% phosphane gas (nitrogen gas is used as carrier gas) simulated tail gas is delivered to a thermal decomposition reactor unit, and the flow rate of the tail gas is 100 m 3 And/h. The diameter of the throat pipe is 40 mm, the length of the throat pipe is 50 mm, the diffusion angle of the diffusion pipe is 30 degrees, and the length is 210 mm; the output voltage of the plasma arc torch generation power supply is 200V, and the current is 100A; cooling water flow rate of 2 m 3 /h; the shielding gas is nitrogen, the gas operating pressure is 4 bar, and the flow is 4 m 3 /h。
The silane gas degradation efficiency is more than 99.8% through the technical implementation process of the coupling effect of the venturi tube and the plasma arc torch.
Example 4
Delivering 1-2% of the actual tail gas containing silane gas to a thermal decomposition reactor unit, wherein the flow rate of the tail gas is 200 m 3 And/h. The diameter of the throat pipe is 40 mm, the length of the throat pipe is 50 mm, the diffusion angle of the diffusion pipe is 30 degrees, and the length is 210 mm; the output voltage of the plasma arc torch generation power supply is 200V, and the current is 100A; cooling water flow rate of 2 m 3 /h; the shielding gas is nitrogen, the gas operating pressure is 4 bar, and the flow is 4 m 3 /h。
The silane gas degradation efficiency is more than 99.6% through the technical implementation process of the coupling effect of the venturi tube and the plasma arc torch.
The previous description of the embodiments is provided to facilitate a person of ordinary skill in the art in order to make and use the present invention. It will be apparent to those skilled in the art that various modifications can be readily made to these embodiments and the generic principles described herein may be applied to other embodiments without the use of the inventive faculty. Therefore, the present invention is not limited to the above-described embodiments, and those skilled in the art, based on the present disclosure, should make improvements and modifications without departing from the scope of the present invention.
Claims (10)
1. The device for efficiently thermally decomposing harmful gas by using the venturi tube coupled plasma arc torch is characterized in that the main body device comprises a tail gas inlet unit (2), a venturi reaction unit (9), a plasma arc torch generation unit (14) and a thermal decomposition reaction unit (19); the venturi type reaction unit (9) comprises a necking pipe (15), a throat pipe (16) and a diffusion pipe (17); the plasma arc torch generating unit (14) comprises an anode interface (3) of a plasma generating power supply, a first cooling water inlet (4), a shielding gas inlet (5), a cathode interface (6) and a first cooling water outlet (7); the thermal decomposition reaction unit (19) comprises a plasma arc torch (1), a reaction cavity (18) and a cooling unit (13), and the cooling unit (13) comprises a second cooling water outlet (8) and a second cooling water inlet (12);
(1) the silane gas and the phosphane harmful tail gas generated in the industrial production process are conveyed to a Venturi reaction unit (9) through a tail gas inlet unit (2), and a pressure step area is formed through the gas injection effect of the Venturi reaction unit (9) to drive the tail gas at an inlet to rapidly enter a thermal decomposition reaction unit (19);
(2) the tail gas entering the thermal decomposition reaction unit (19) is fully mixed with a high-temperature reaction zone generated by the plasma arc torch (1) for contact and reaction, the flow rate of the tail gas at the outlet of a diffusion pipe (17) of the Venturi reaction unit (9) is reduced, a turbulence zone is formed at the inlet of the thermal decomposition reaction unit (19), the contact time of gas and the plasma arc torch is increased, efficient thermal decomposition reaction is carried out, and the conversion and decomposition of harmful gas in the tail gas are further promoted;
(3) the plasma arc torch (1) is generated by a direct current plasma arc torch generating unit (14), generates a plasma torch between the cathode interface (6) and the anode interface (3), and blows the plasma arc torch (1) into a thermal decomposition reaction zone through a protective gas inlet (5) to provide thermal decomposition energy of harmful gas components for the thermal decomposition reaction zone.
2. The device according to claim 1, wherein the venturi reaction unit (9) comprises a necking pipe (15), a throat pipe (16) and a diffusion pipe (17) which are integrally designed, the diameter of the throat pipe is 30-40 mm, and the ratio of the length of the throat pipe to the diameter of the throat pipe is 1.2-2:1; the diffusion angle of the diffusion tube is 10-40 degrees, and the length of the diffusion tube is 3-5 times of the length of the throat tube.
3. The device according to claim 1, characterized in that the gas flow rate in the throat (16) of the venturi reaction unit (9) is 40-70 m/s, and the gas flow rate at the outlet of the diffuser (17) is 10-15 m/s.
4. The device according to claim 1, wherein the plasma arc torch (1) is generated by a plasma torch generating component in a non-transfer way, a cathode wire at the center of the cathode interface (6) is connected with a plasma generating power supply, the outer cylinder is connected with the anode interface (3), the inner layer of the outer cylinder is protected by cooling water, the cooling water enters through the first cooling water inlet (4) and flows out through the first cooling water outlet (7).
5. The device according to claim 1, characterized in that the cooling water quantity of the plasma arc torch generating unit (14) is 1-5 m 3 /h。
6. The apparatus according to claim 1, characterized in that the shielding gas of the plasma arc torch generating unit (14)Is nitrogen, air, etc., the gas pressure is 3-8 bar, the flow is 3-7 m 3 /h。
7. The apparatus of claim 1 wherein the plasma arc torch generating unit (14) has a generating power output voltage of 200-400V, a current of 50-150A, and an operating power of 15-35 kW.
8. The device according to claim 1, wherein the reaction cavity (18) of the thermal decomposition reaction unit (19) is made of high-temperature resistant corundum composite casting material, and the main component is Al 2 O 3 。
9. The device according to claim 1, characterized in that the housing of the reaction chamber (18) is provided with a cooling unit (13), the cooling medium is process water, the process water enters the cooling unit from the second cooling water inlet (12), and after heat exchange, flows out from the second cooling water outlet (8).
10. The device according to claim 1, characterized in that the cooling unit (13) housing of the thermal decomposition reaction unit (19) is grounded by means of a conductive wire having good electrical conductivity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311252725.5A CN117225130A (en) | 2023-09-26 | 2023-09-26 | Device for efficiently thermally decomposing harmful gas by venturi tube coupling plasma arc torch |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311252725.5A CN117225130A (en) | 2023-09-26 | 2023-09-26 | Device for efficiently thermally decomposing harmful gas by venturi tube coupling plasma arc torch |
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| CN117225130A true CN117225130A (en) | 2023-12-15 |
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| CN202311252725.5A Pending CN117225130A (en) | 2023-09-26 | 2023-09-26 | Device for efficiently thermally decomposing harmful gas by venturi tube coupling plasma arc torch |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201195099Y (en) * | 2008-05-29 | 2009-02-18 | 东北电力大学 | Flue gas desulfurization column of circulating fluidized bed |
| CN209865713U (en) * | 2019-04-22 | 2019-12-31 | 湖南天洁同创环保科技有限公司 | Desulfurization absorption tower |
| CN210153828U (en) * | 2019-05-21 | 2020-03-17 | 成都高鑫焊割科技有限公司 | Harmful gas burning and cracking processor |
| CN110975538A (en) * | 2019-11-09 | 2020-04-10 | 上海硕余精密机械设备有限公司 | Plasma torch and tail gas treatment system |
-
2023
- 2023-09-26 CN CN202311252725.5A patent/CN117225130A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201195099Y (en) * | 2008-05-29 | 2009-02-18 | 东北电力大学 | Flue gas desulfurization column of circulating fluidized bed |
| CN209865713U (en) * | 2019-04-22 | 2019-12-31 | 湖南天洁同创环保科技有限公司 | Desulfurization absorption tower |
| CN210153828U (en) * | 2019-05-21 | 2020-03-17 | 成都高鑫焊割科技有限公司 | Harmful gas burning and cracking processor |
| CN110975538A (en) * | 2019-11-09 | 2020-04-10 | 上海硕余精密机械设备有限公司 | Plasma torch and tail gas treatment system |
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