CN110975538A - Plasma torch and tail gas treatment system - Google Patents

Plasma torch and tail gas treatment system Download PDF

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Publication number
CN110975538A
CN110975538A CN201911090924.4A CN201911090924A CN110975538A CN 110975538 A CN110975538 A CN 110975538A CN 201911090924 A CN201911090924 A CN 201911090924A CN 110975538 A CN110975538 A CN 110975538A
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China
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cathode
chamber
anode
plasma torch
cooling
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CN201911090924.4A
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CN110975538B (en
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黄培恩
刘金浩
苏深伟
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Anhui Shuojing Composite Materials Co.,Ltd.
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Shanghai Shuoyu Precision Machinery Equipment Co ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B01D53/18—Absorbing units; Liquid distributors therefor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)

Abstract

The invention discloses a plasma torch, comprising: the mounting seat is internally provided with a cooling cavity; the carrier gas inlet structure is arranged above the mounting seat and comprises a body, an air chamber arranged in the body and an arc root chamber arranged in the air chamber, the arc root chamber is communicated with the air chamber, and the body enters the cooling cavity through the lower end of the body; the cathode is arranged above the body and enters the arc root chamber through the lower end of the cathode; the anode is arranged below the mounting seat, enters the cooling chamber through the upper end of the anode and further enters the arc root chamber to be arranged opposite to the lower end of the cathode; the anode is provided with an arc column channel which is communicated from top to bottom, the arc column channel comprises a first flaring structure arranged at the upper end and a second flaring structure arranged at the lower end, and the second flaring structure is a multi-flaring structure which is stepped and extends and is exposed from the lower part of the mounting seat. The invention has the characteristics of compact structure, convenient installation and maintenance, high power, long service life, high temperature, high efficiency and stable operation.

Description

Plasma torch and tail gas treatment system
Technical Field
The invention relates to the technical field of industrial tail gas treatment, in particular to a plasma torch and a tail gas treatment system comprising the plasma torch.
Background
In modern manufacturing, especially in semiconductor integrated circuit manufacturing, large amounts of fluorine-containing compound off-gas are emitted, for example: CF (compact flash)4、C2F6、SF6、NF3、C3F8And the like. These gases are not only greenhouse gases, but also toxic, extremely harmful to the environment, and are harmful gases which are strictly limited by the state.
At present, for the treatment of tail gas containing fluorine compounds, methods such as high-temperature combustion cracking, water or alkaline water absorption, neutralization coagulation sedimentation, sediment filtration and the like are generally adopted. The method for treating the tail gas at high temperature comprises the following steps: electrical heating, natural gas combustion, direct current plasma heating, and the like. But the C-F bond can reach 515KJ/mol, the chemical bond is very stable, and the method of adopting electric heating and natural gas combustion makes the fluorine-containing gas remove with low efficiency and high energy consumption because of lower temperature and easy corrosion of equipment.
Inert gas plasma discharge is adopted for plasma torch heating, the central temperature can reach 10000K, the average gas temperature is higher than 3000K, and the removal efficiency of fluorine-containing chemicals in tail gas is higher than 98%.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide a plasma torch and a tail gas treatment system.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a plasma torch, comprising:
the mounting seat is internally provided with a cooling cavity;
the carrier gas inlet structure is arranged above the mounting seat and comprises a body, a gas chamber arranged in the body and an arc root chamber arranged in the gas chamber, the arc root chamber is communicated with the gas chamber, and the body enters the cooling chamber through the lower end of the body;
the cathode is arranged above the body and enters the arc root chamber through the lower end of the cathode;
the anode is arranged below the mounting seat, enters the cooling chamber through the upper end of the anode and further enters the arc root chamber to be arranged opposite to the lower end of the cathode; the anode is provided with an arc column channel in a vertically through mode, the arc column channel comprises a first flaring structure arranged at the upper end and a second flaring structure arranged at the lower end, the second flaring structure is a multiple flaring structure extending according to a step mode, and the second flaring structure is exposed below the mounting seat.
Furthermore, the upper end of the cathode is covered with a cathode cap, and a cathode radiating fin is arranged on the cathode cap; and an anode cooling fin is arranged on the outer side of the part of the anode entering the cooling cavity.
Furthermore, the upper end of the cathode is provided with an expanding part, the expanding part is accommodated in the cathode cap, a cathode adjusting screw is screwed into the cathode cap from the upper end of the cathode cap and contacts with the upper end of the expanding part, and an elastic structure is arranged in the cathode cap below the expanding part.
Further, an insulating sleeve is arranged between the cathode and the body.
Furthermore, a swirler is arranged in the air chamber and comprises a swirler main body, the swirler main body surrounds the cathode and the anode and seals the lower end of the cathode and the upper end of the anode, a closed space in the swirler main body forms the arc root chamber, a plurality of air holes are formed in the side wall of the swirler main body and communicate the arc root chamber with the air chamber.
Further, the air holes are uniformly distributed on the circumference of the side wall of the cyclone main body and are arranged tangentially in the radial direction of the circumference of the side wall.
Furthermore, the lower end of the second flaring structure protrudes out of the bottom surface of the mounting seat, the magnetic ring surrounds the anode and is arranged at the lower end of the second flaring structure, and the gland fixes the magnetic ring at the lower end of the anode.
Further, the upper part of the body is provided with a carrier gas inlet communicated with the gas chamber.
Furthermore, a cooling water inlet and a cooling water outlet which are communicated with the cooling cavity are formed in two sides of the upper portion of the mounting seat.
A tail gas treatment system is provided with the plasma torch, and comprises the plasma torch, a reaction cavity, a transition cavity, a water storage tank and a spray absorption tower which are sequentially connected; the reaction cavity is provided with a tail gas inlet and a compressed air inlet, the water storage tank is further connected with a pump, the pump is respectively connected with the transition cavity and the spray absorption tower through valves, and the spray absorption tower is provided with an exhaust port.
The plasma torch has the advantages that the plasma torch with compact structure, high power, long service life, high temperature, high efficiency and stable operation is provided by optimizing the special structures of the cathode and the anode of the plasma torch, and the plasma torch has the following characteristics:
(1) the plasma torch has a compact structure. The cathode and the anode are connected with electricity, and the interfaces of carrier gas and cooling water are convenient. The installation and maintenance are convenient.
(2) Because the heat radiation structure of the cathode optimization and the cathode can be conveniently adjusted finely, the cathode has long service life, and the success rate of the high-frequency automatic ignition is more than 99.5 percent.
(3) Due to the unique structural design of the anode, the service life of the anode is longer than 5000 h.
(4) Due to the design of the cyclone and the magnetic ring, the central temperature of the plasma arc is more than 10000K, the average temperature is more than 3000K, and the thermal efficiency is more than 90 percent.
(5) The plasma torch special for the tail gas treatment tower has an exquisite structure; the power is 10-40KW adjustable, the discharge current is 0-150A adjustable, and the service life of the cathode is more than 3600 h.
Drawings
FIG. 1 is a schematic diagram of a plasma torch configuration according to a preferred embodiment of the present invention.
Fig. 2 is a schematic cross-sectional view of a plasma torch according to a preferred embodiment of the present invention.
Fig. 3 is a schematic cross-sectional view of a plasma torch according to a preferred embodiment of the present invention.
Fig. 4 is a schematic view of a cyclone according to a preferred embodiment of the present invention.
Fig. 5 is a schematic diagram of an anode structure according to a preferred embodiment of the invention.
Fig. 6 is a schematic diagram of a cathode structure according to a preferred embodiment of the invention.
Fig. 7 is a schematic structural diagram of an exhaust gas treatment system according to a preferred embodiment of the invention.
In figure 1, a plasma torch; 2. a tail gas inlet; 3. an inert gas inlet; 4. a compressed air inlet; 5. a total exhaust port; 6. a plasma arc column; 7. a reaction chamber; 8. a transition chamber; 9. a pump; 10. a water storage tank; 11. spraying an absorption tower; 12. a cathode adjusting screw; 13. a cathode fin; 14. an anode connecting terminal; 15. a cooling water outlet; 16. a cathode connecting terminal; 17. a cooling water inlet; 18. a carrier gas inlet; 19. a mounting seat; 20. a spring; 21. an insulating sleeve; 22. an air chamber; 23. a cathode; 23.1, cathode cap; 23.2, cathode head; 24. a swirler; 24.1, a cyclone main body; 24.2 air holes; 25. an arc root chamber; 26. an anode; 26.1, anode cooling fins; 26.2, a flaring step; 27. a magnetic ring; 28. a gland; 29. the chamber is cooled.
Detailed Description
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings.
In the following detailed description of the embodiments of the present invention, in order to clearly illustrate the structure of the present invention and to facilitate explanation, the structure shown in the drawings is not drawn to a general scale and is partially enlarged, deformed and simplified, so that the present invention should not be construed as limited thereto.
In the following embodiments of the present invention, please refer to fig. 2 and 3, and fig. 2 and 3 are schematic cross-sectional views of a plasma torch according to a preferred embodiment of the present invention. As shown in fig. 2 and 3, a plasma torch of the present invention includes: the mounting base 19, the carrier gas inlet structure, the cathode 23 and the anode 26.
Please refer to fig. 2 and fig. 3. The mounting base 19 is of a hollow structure, and the hollow part inside the mounting base 19 forms a cooling chamber 29 of the plasma torch. The mounting 19 is intended to be fixed to the upper flange of the reaction chamber.
The carrier gas intake structure is mounted on the mount 19 from above. The carrier gas inlet structure is provided with a body, and a gas chamber 22 for carrier gas to enter is arranged in the body; an arc root chamber 25 is arranged in the air chamber 22, the arc root chamber 25 is communicated with the air chamber 22, and the carrier gas can enter the arc root chamber 25 through the air chamber 22. The lower end of the body passes through the wall of the upper end face of the mounting 19 into the cooling chamber 29 so that at least a portion of the body is within the cooling chamber 29.
The cathode 23 is rod-shaped and is mounted on the body from above; the lower end of the cathode 23 passes through the upper end face of the body into a shoe chamber 25 within the body.
Please refer to fig. 6, and refer to fig. 2 and fig. 3 in combination. The cathode 23 may be provided with a cathode height adjustment structure for adjusting a gap between a lower end of the cathode 23 (cathode head 23.2) and an upper end of the anode 26. The cathode height adjustment structure comprises a cathode cap 23.1 covering the upper end of the cathode 23; the cathode cap 23.1 is of hollow construction. The top of the cathode cap 23.1 may be provided with an opening along which a thread may be machined down on the inner wall of the cathode cap 23.1. A cathode adjustment screw 12 may be used to screw into the cathode cap 23.1 from the upper end of the cathode cap 23.1 and may contact the upper end of the cathode 23.
The upper end of the cathode 23 has an enlarged diameter portion (large head), so that the cathode 23 may have a T-shape as viewed from the side. The lower end of the cathode cap 23.1 is provided with a through hole, and the lower end of the cathode 23 passes through the through hole and extends into the body. The expanded diameter part of the cathode 23 is contained in the cathode cap 23.1; the cathode adjusting screw 12 may contact the upper end of the enlarged diameter portion. A gap is formed between the rod part of the cathode 23 below the diameter-expanding part and the inner wall of the cathode cap 23.1, and an elastic structure is arranged in the gap of the cathode cap 23.1; the elastic structure forms an elastic support between the enlarged diameter portion and the bottom of the cathode cap 23.1. The elastic structure may be, for example, a spring 20 fitted over the diameter of the cathode 23 below the enlarged diameter portion of the cathode 23.
Cathode cooling fins 13 may be provided on the sides of the cathode cap 23.1 to remove the effects of high temperature heat from the cathode 23. The cathode cooling fin 13 can be provided in several layers around the side of the cathode cap 23.1.
The cathode 23 may be made of tungsten or tungsten alloy material. The cathode cap 23.1 can be made of copper or copper alloy material.
Please refer to fig. 2 and fig. 3. The anode 26 is mounted on the mount 19 from below and is disposed opposite the cathode 23. The anode 26 enters the cooling chamber 29 of the mounting 19 through its upper end and further into the arc root chamber 25 of the body located opposite the lower end of the cathode 23.
Please refer to fig. 4, and refer to fig. 2 and fig. 3 in combination. A swirler 24 may be disposed within the plenum 22 in the carrier gas inlet structure body. The swirler 24 is provided with a swirler body 24.1; the cyclone body 24.1 is arranged around the cathode 23 and the anode 26, i.e. around the lower end of the cathode 23 and the upper end of the anode 26, and encloses the lower end of the cathode 23 and the upper end of the anode 26 in a closed space, i.e. forming the arc root chamber 25.
The cyclone body 24.1 is provided with a plurality of air holes 24.2 in the side wall thereof for communicating the arc root chamber 25 with the air chamber 22. The gas holes 24.2 may be evenly distributed over the circumference of the sidewall of the cyclone body 24.1 and arranged tangentially to the radial direction of the sidewall circumference. For example, 3-8 air holes 24.2 can be uniformly distributed on the circumference of the side wall of the cyclone main body 24.1, and the tangential processing of 15-20 degrees in the radial direction is adopted.
The plasma torch carrier gas enters the gas chamber 22, passes through the apertures 24.2 of the swirler 24, spirals into the arc root chamber 25 to generate a plasma, and then the discharge gas spirals through the arc column channel of the anode 26.
The cyclone 24 is provided with tangential air holes 24.2 at the periphery and is processed at an inclined angle along the radial direction and the axial direction. After the carrier gas passes through the air holes 24.2 around the swirler 24, high-speed spiral air inlet is formed in the anode 26 channel, so that a cold gas protective film is formed on the surface of the anode 26 channel, and the anode 26 is prevented from being ablated by a high-temperature arc column.
The gas entering the gas chamber 22 can also cool the cathode 23, i.e. the carrier gas inlet structure can also serve as a cathode cooling structure; the cathode cooling structure and the cathode cooling fin 13 structure arranged on the side surface of the cathode cap 23.1 cool the cathode 23 together, so that the cathode 23 can be prevented from being ultrahigh at high temperature, and the service life of the cathode 23 is greatly prolonged.
The cathode 23 may be isolated from the body by providing an insulating sleeve 21. The insulating sleeve 21 can also serve as a seal.
Please refer to fig. 5, and refer to fig. 2 and fig. 3 in combination. The anode 26 is provided with an arc column channel in a vertical through way; the arc column channel comprises a first flaring structure arranged at the upper end and a second flaring structure arranged at the lower end. Wherein the content of the first and second substances,
the first flaring structure is a bell mouth with a large upper part and a small lower part; the second flaring structure is a flaring opening with a small upper part and a large lower part, and adopts a multi-flaring structure which extends outwards according to a step type, namely, flaring steps 26.2 with gradually enlarged calibers are sequentially arranged in the multi-flaring structure. The lower end of the second flared structure emerges from beneath the mounting seat 19.
The cathode 23 can accurately adjust the gap between the cathode head 23.2 and the first flaring structure at the upper part of the anode 26 through the adjusting screw 12, the spring 20 and the insulating sleeve 21, thereby adjusting the length of the arc root and optimizing the ignition time.
An anode cooling fin 26.1 can also be provided on the outside of the anode 26; the anode heat sink 26.1 is mounted on the outside of the portion of the anode 26 located in the cooling chamber 29 and a plurality of layers of anode heat sinks 26.1 may be provided around the sides of the anode 26.
Anode 26 may be made of copper or copper alloy material.
When circulating water is introduced into the cooling chamber 29 of the mounting seat 19, the anode 26 can be protected by the cooling water, and high-temperature damage can be prevented. The anode 26 gas outlet channel (arc column channel) is made into a multiple flaring step structure, so that high-temperature gas at the outlet can be fully mixed with tail gas, the heating efficiency is improved, and the high-temperature ablation on the surface of the anode 26 channel can be avoided.
The lower end of the second flaring structure may protrude from the bottom surface of the mounting base 19. A magnetic ring 27 can be arranged on the side surface of the protruding lower end of the second flaring structure; a magnetic ring 27 is provided around the anode 26 at the lower end of the second flared structure and a gland 28 may be employed to secure the magnetic ring 27 to the lower end of the anode 26. The magnetic ring 27 restrains the plasma (anode arc column) to form a high-temperature central arc column, and can also prevent charged particles from diffusing and bombarding the surface of the anode 26, thereby prolonging the service life of the anode 26.
Sealing elements can be used to seal the cathode 23, the carrier gas inlet structure, and the anode 26.
Please refer to fig. 1, and refer to fig. 2 and fig. 3 in combination. A carrier gas inlet 18 may be provided in the upper portion of the body in communication with the inner plenum 22. The carrier gas may be an inert gas. Further, a cooling water inlet 17 and a cooling water outlet 15 communicating with the cooling chamber 29 may be provided on both sides of the upper portion of the mounting seat 19. The cooling water enters the cooling chamber 29 through the cooling water inlet 17, cools the anode 26, and is discharged through the cooling water outlet 15.
The anode connection terminal 14 can be arranged on the top side of the mounting base 19 and the cathode connection terminal 16 on a flange plate attached to the side of the cathode cap 23.1.
Referring to fig. 7, fig. 7 is a schematic structural diagram of an exhaust gas treatment system according to a preferred embodiment of the invention. As shown in fig. 7, an exhaust gas treatment system of the present invention is provided with the plasma torch described above.
The tail gas treatment system comprises a plasma torch 1, a reaction cavity 7, a transition cavity 8, a water storage tank 10 and a spray absorption tower 11 which are sequentially connected. The plasma torch 1 is arranged on the reaction cavity 7, the lower part of the reaction cavity 7 is communicated with the transition cavity 8, the transition cavity 8 is arranged on one side of the water storage tank 10, and the spraying absorption tower 11 is arranged on the opposite side of the water storage tank 10.
An inert gas inlet 3 is arranged on the plasma torch 1, a tail gas inlet 2 is arranged on the upper side of the reaction cavity 7, and a compressed air inlet 4 is arranged on the lower side of the reaction cavity 7. The water storage tank 10 is connected with a pump 9; the pump 9 is respectively connected with the transition cavity 8 and the spray absorption tower 11 through different valves. The top of the spray absorption tower 11 is provided with a main exhaust port 5.
When the tail gas treatment system works, inert gas (plasma torch carrier gas) enters the plasma torch 1 to generate a high-temperature plasma arc column 6. Tail gas enters the reaction cavity 7 through the pipeline 2; compressed air (CDA) enters the reaction chamber 7 through the pipe 4. Due to the action of the high temperature of the plasma arc, the compound gas in the tail gas is cracked and burnt at high temperature to generate substances which are easy to absorb.
Then, the high-temperature gas is cooled through the transition cavity 8 and enters the spray absorption tower 11 for purification treatment.
Finally, the purified gas is discharged through the main exhaust port 5. The liquid in the water storage tank 10 is pressurized by a pump 9, one part of the liquid enters the transition cavity 8, and the other part of the liquid enters the spray absorption tower 11.
The plasma torch has a compact structure, is convenient to install and maintain, and is applicable to other waste gas combustion treatment, solid waste treatment or other heating purposes.
The above description is only a preferred embodiment of the present invention, and the embodiments are not intended to limit the scope of the present invention, so that all equivalent structural changes made by using the contents of the specification and the drawings of the present invention should be included in the scope of the present invention.

Claims (10)

1. A plasma torch, comprising:
the mounting seat is internally provided with a cooling cavity;
the carrier gas inlet structure is arranged above the mounting seat and comprises a body, a gas chamber arranged in the body and an arc root chamber arranged in the gas chamber, the arc root chamber is communicated with the gas chamber, and the body enters the cooling chamber through the lower end of the body;
the cathode is arranged above the body and enters the arc root chamber through the lower end of the cathode;
the anode is arranged below the mounting seat, enters the cooling chamber through the upper end of the anode and further enters the arc root chamber to be arranged opposite to the lower end of the cathode; the anode is provided with an arc column channel in a vertically through mode, the arc column channel comprises a first flaring structure arranged at the upper end and a second flaring structure arranged at the lower end, the second flaring structure is a multiple flaring structure extending according to a step mode, and the second flaring structure is exposed below the mounting seat.
2. The plasma torch of claim 1 wherein the cathode upper end is capped with a cathode cap on which cathode fins are provided; and an anode cooling fin is arranged on the outer side of the part of the anode entering the cooling cavity.
3. The plasma torch of claim 2 wherein the cathode upper end has an enlarged diameter portion that is received within the cathode cap, a cathode adjustment screw is threaded into the cathode cap from the cathode cap upper end and contacts the enlarged diameter portion upper end, and a resilient structure is provided in the cathode cap below the enlarged diameter portion.
4. The plasma torch of claim 1, 2 or 3 wherein an insulating sleeve is provided between the cathode and the body.
5. The plasma torch of claim 1 wherein a swirler is disposed within the gas chamber, the swirler comprising a swirler body disposed around the cathode and the anode and enclosing a lower end of the cathode and an upper end of the anode, the enclosed space within the swirler body forming the arc root chamber, the swirler body having a plurality of gas holes disposed in a sidewall thereof communicating the arc root chamber with the gas chamber.
6. The plasma torch of claim 5 wherein the gas holes are evenly distributed over the circumference of the sidewall of the swirler body and are arranged tangentially to the circumference of the sidewall in a radial direction.
7. The plasma torch of claim 1 wherein the lower end of the second flared structure protrudes from the bottom surface of the mounting base, a magnetic ring is disposed around the anode at the lower end of the second flared structure, and a gland secures the magnetic ring to the lower end of the anode.
8. The plasma torch of claim 1 wherein the upper portion of the body is provided with a carrier gas inlet in communication with the gas chamber.
9. The plasma torch of claim 1 wherein the upper two sides of the mounting base are provided with a cooling water inlet and a cooling water outlet communicating with the cooling chamber.
10. A tail gas treatment system provided with the plasma torch as claimed in any one of claims 1 to 9, wherein the tail gas treatment system comprises the plasma torch, a reaction chamber, a transition chamber, a water storage tank and a spray absorption tower which are connected in sequence; the reaction cavity is provided with a tail gas inlet and a compressed air inlet, the water storage tank is further connected with a pump, the pump is respectively connected with the transition cavity and the spray absorption tower through valves, and the spray absorption tower is provided with an exhaust port.
CN201911090924.4A 2019-11-09 2019-11-09 Plasma torch and tail gas treatment system Active CN110975538B (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112664963A (en) * 2021-01-20 2021-04-16 杭州海莱德智能科技有限公司 Ultralong plasma flame emitter
CN115475499A (en) * 2022-06-16 2022-12-16 西安交通大学 Thermal plasma treatment method for sulfur hexafluoride degradation
CN117225130A (en) * 2023-09-26 2023-12-15 浙江沃乐科技有限公司 Device for efficiently thermally decomposing harmful gas by venturi tube coupling plasma arc torch

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