CN210670709U - Plasma flame generator - Google Patents
Plasma flame generator Download PDFInfo
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- CN210670709U CN210670709U CN201921217502.4U CN201921217502U CN210670709U CN 210670709 U CN210670709 U CN 210670709U CN 201921217502 U CN201921217502 U CN 201921217502U CN 210670709 U CN210670709 U CN 210670709U
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Abstract
The utility model relates to a flame generator, especially a plasma flame generator, which comprises an anode and a cathode, wherein the anode is provided with a nozzle, one end of the nozzle is an air inlet, the other end of the nozzle is an air outlet, the cathode is arranged opposite to the air inlet of the nozzle, an air inlet gap is arranged between the cathode and the anode, and the air inlet gap is communicated with the nozzle; the ion generating device also comprises an electrode separating frame, wherein an ion generating cavity is arranged on the electrode separating frame, the cathode and the anode are respectively fixed on the electrode separating frame and are positioned in the ion generating cavity, and the air inlet gap is communicated with the ion generating cavity; the nozzle is connected with an air source, the nozzle is fixed on the electrode separation frame and communicated with the ion generation cavity, and the nozzle is configured to spray air to the ion generation cavity. The plasma flame generator provided by the utility model has the advantages of simple structure, long service life and low operation cost.
Description
Technical Field
The utility model relates to a flame generator, especially plasma flame generator.
Background
The industrial production process generates a large amount of dangerous gases, particularly in the semiconductor industry, and generates a large amount of high-risk waste gases such as fluorine and SF6、NF3Or perfluorocarbons (CF)4、C2F6Etc.), can cause serious environmental damage. The more effective waste gas treatment method is combustionBurning, i.e. igniting the waste gas by a high temperature flame, changes the waste gas into harmless gas by combustion.
At present, a flame generator is mostly adopted to ignite waste gas, the flame generator usually uses gas or fuel oil for combustion, and the method has higher operation cost.
SUMMERY OF THE UTILITY MODEL
In order to solve the above problems, the utility model provides a plasma flame generator that becomes low moves, and concrete technical scheme is:
the plasma flame generator comprises an anode and a cathode, wherein the anode is provided with a nozzle, one end of the nozzle is an air inlet, the other end of the nozzle is an air outlet, the cathode and the air inlet of the nozzle are oppositely arranged, an air inlet gap is arranged between the cathode and the anode, and the air inlet gap is communicated with the nozzle; the ion generating device also comprises an electrode separating frame, wherein an ion generating cavity is arranged on the electrode separating frame, the cathode and the anode are respectively fixed on the electrode separating frame and are positioned in the ion generating cavity, and the air inlet gap is communicated with the ion generating cavity; the nozzle is connected with an air source, the nozzle is fixed on the electrode separation frame and communicated with the ion generation cavity, and the nozzle is configured to spray air to the ion generation cavity.
Through adopting above-mentioned technical scheme, the nozzle jets gas to the ion generation chamber, and gas enters into the air inlet of anode nozzle through the air inlet clearance, and gas produces plasma flame in the air inlet clearance department between anode and negative pole, and plasma flame spouts from the gas outlet.
In order to form the plasma flame, the cathode and the anode must be electrically isolated from each other, an electrode separator frame insulates the anode from the cathode, and fixes the anode, the cathode, and the nozzle.
Preferably, the end part of the cathode opposite to the nozzle is provided with a cathode discharge surface, the air inlet of the nozzle is provided with an anode discharge surface, the cathode discharge surface and the anode discharge surface are both conical surfaces, the cathode discharge surface and the anode discharge surface are coaxial, and the cathode discharge surface and the anode discharge surface are oppositely arranged to form an annular cavity.
By adopting the technical scheme, the cathode is a cylinder. The tapered discharge surface can provide preferential discharge sites.
Preferably, the taper of the cathode discharge surface is the same as the taper of the anode discharge surface.
By adopting the technical scheme, the anode discharge surface and the cathode discharge surface are conical surfaces, have the same taper and are coaxially arranged, so that the discharge stability can be ensured.
Preferably, the conicity of the cathode discharge surface and the conicity of the anode discharge surface are both 116-150 degrees.
Preferably, the nozzle is an annular nozzle, the nozzle is provided with at least two spray holes, the spray holes are annularly arranged around the axis of the nozzle at equal intervals, the nozzle is arranged in the ion generation cavity and is coaxial with the cathode, and the spray holes are also opposite to the air inlet gap; the inner circular surface of the ion generating cavity is provided with an air inlet groove which is an annular groove and is communicated with the spray hole; and the electrode separation frame is provided with an air inlet which is communicated with the air inlet groove.
By adopting the technical scheme, the plurality of spray holes can form a larger airflow coverage area, so that a gas isolation film is formed on the discharge surface, the gas isolation film can reduce the corrosion to the anode, and the service life of the anode is ensured; and simultaneously, a stable plasma flame can be formed.
At present, people do not find how to solve the problem of short service life of the anode, and only find that the anode has short service life due to corrosion, and usually the anode is replaced after the anode is used for a standard time or replaced in advance, so that the reliability of continuous operation is ensured. Although the problem can be solved by merely replacing the anode, this has an impact on production and increases costs. Through analysis and test discovery can reduce the corruption of electric arc to the positive pole when the air current forms gaseous barrier film, has prolonged the life of positive pole greatly, and current inlet port only is equipped with one, and the air flow is little, can't form gaseous barrier film in discharge surface department, and plasma flame is unstable, corrodes the positive pole easily.
The gas flow sprayed from the spray holes directly enters the gap between the anode and the cathode, and the gas flow is stable at the moment, so that a gas isolation film can be formed.
The annular array of the spray holes can form stable airflow and reduce turbulence, so that the forming effect of the gas isolating membrane is improved, and the anode corrosion is effectively prevented.
Preferably, the spray holes are one or more of straight holes and tapered holes.
By adopting the technical scheme, the spray holes can adopt straight holes or tapered holes, or the straight holes and the tapered holes are arranged in a staggered mode. Wherein, the small hole end of the conical hole is positioned in the nozzle, and the large hole end of the conical hole is positioned outside the nozzle. The small hole end of the conical hole is positioned in the nozzle, so that the conical hole can concentrate airflow, the airflow is guided, and the formation of the gas isolation film is guaranteed.
Preferably, the axis of the nozzle hole intersects the axis of the nozzle perpendicularly, obliquely or not.
By adopting the technical scheme, the axis of the spray hole is intersected with the axis of the nozzle, namely the spray hole is a radial hole, the airflow sprayed by the spray hole directly enters the discharge surface, and a stable gas isolation film is formed on the discharge surface.
When the spray holes do not intersect with the axis of the nozzle, gas sprayed from the spray holes impacts the inner circular surface of the annular nozzle and then forms a vortex, and the turbine can form a stable gas isolation film on a discharge surface.
Preferably, the orifice is tangential to the inner circumferential surface of the nozzle.
By adopting the technical scheme, the jet holes are tangent to the inner circular surface of the nozzle, so that the air flow from the jet holes forms a vortex rapidly, the turbine is very stable, and a stable gas isolation film can be formed, thereby protecting the anode, reducing the corrosion of the anode and stabilizing the flame.
Preferably, the cathode separation frame further comprises a cathode fixing seat, wherein a cathode is arranged at the bottom of the cathode fixing seat, and the cathode fixing seat is fixed at the top of the electrode separation frame; and a cathode cooling cavity is arranged at the top of the cathode fixing seat.
By adopting the technical scheme, the cathode cooling cavity is close to the cathode, and the heat generated by the cathode in the discharging process is taken away by continuously flushing the circulating cooling water, so that the stable discharging of the cathode is ensured to the maximum extent.
Preferably, the nozzle is made of ceramic or glass fiber; the electrode separation frame is made of glass fiber; the cathode is made of tungsten or tungsten alloy; the anode is made of copper.
By adopting the technical scheme, the tungsten alloy and the copper are stable in discharge and long in service life. The anode is easy to corrode and has a large volume, so that the anode is made of cheap copper, and the maintenance cost is reduced.
Since arcing will likely occur at the nozzle, the nozzle is made of ceramic or glass fibers that are both temperature resistant and insulating.
The electrode separation support is made of a fiberglass dielectric material that acts as an electrical insulator between the two electrodes and is also slightly resistant to highly reactive plasma.
Compared with the prior art the utility model discloses following beneficial effect has:
the plasma flame generator provided by the utility model has the advantages of simple structure, long service life and low operation cost.
Drawings
FIG. 1 is a cross-sectional view of a plasma flame generator;
FIG. 2 is a schematic structural view of a nozzle;
FIG. 3 is a cross-sectional view of a nozzle with a straight orifice;
FIG. 4 is a cross-sectional view of a nozzle with a tapered bore;
FIG. 5 is a cross-sectional view of a nozzle with an orifice that is a slanted hole;
FIG. 6 is a cross-sectional view of the nozzle with the orifice tangential to the inner circular surface of the nozzle.
Detailed Description
The present invention will now be further described with reference to the accompanying drawings.
Example one
As shown in fig. 1 and 2, the plasma flame generator includes an anode 4 and a cathode 2, wherein the anode 4 is provided with a nozzle 41, one end of the nozzle 41 is an air inlet, the other end is an air outlet, the cathode 2 is arranged opposite to the air inlet of the nozzle 41, an air inlet gap 7 is arranged between the cathode 2 and the anode 4, and the air inlet gap 7 is communicated with the nozzle 41; the ion generating device also comprises an electrode separating frame 6, wherein an ion generating cavity is arranged on the electrode separating frame 6, the cathode 2 and the anode 4 are respectively fixed on the electrode separating frame 6 and are both positioned in the ion generating cavity, and the air inlet gap 7 is communicated with the ion generating cavity; and the nozzle 5 is connected with an air source, the nozzle 5 is fixed on the electrode separation frame 6, the nozzle 5 is communicated with the ion generation cavity, and the nozzle 5 is configured to spray air to the ion generation cavity.
The nozzle 5 sprays gas to the ion generating cavity, the gas enters the gas inlet of the nozzle 41 of the anode 4 through the gas inlet gap 7, the gas generates plasma flame at the gas inlet gap 7 between the anode 4 and the cathode 2, and the plasma flame is sprayed out from the gas outlet.
In order to form the plasma flame, the cathode 2 and the anode 4 must be electrically isolated from each other, the electrode separating frame 6 insulates the anode 4 from the cathode 2, and fixes the anode 4, the cathode 2, and the nozzle 5.
The nozzle 5 is connected with a gas source, the gas source is nitrogen or argon, and the gas inlet pressure is 0.1-0.5 Mpa.
The flame temperature of the plasma flame generator is about 2000 ℃.
Specifically, the end of the cathode 2 opposite to the nozzle 41 is provided with a cathode discharge surface 21, the air inlet of the nozzle 41 is provided with an anode discharge surface 42, the cathode discharge surface 21 and the anode discharge surface 42 are both conical surfaces, the cathode discharge surface 21 and the anode discharge surface 42 are coaxial, and the cathode discharge surface 21 and the anode discharge surface 42 are arranged opposite to form an annular cavity. The taper of the cathode discharge surface 21 is the same as the taper of the anode discharge surface 42. The conicity of the cathode discharge surface 21 and the anode discharge surface 42 is 116-150 degrees. The anode discharge surface 42 and the cathode discharge surface 21 are both conical surfaces, have the same taper, and are coaxially arranged, so that the discharge stability can be ensured. The tapered discharge surface can provide preferential discharge sites.
The nozzle 5 is an annular nozzle, the nozzle 5 is provided with at least two spray holes 51, the spray holes 51 are annularly arranged at equal intervals around the axis of the nozzle 5, the nozzle 5 is arranged in the ion generating cavity and is coaxial with the cathode 2, and the spray holes 51 are also opposite to the air inlet gap 7; the inner circular surface of the ion generating cavity is provided with an air inlet groove which is an annular groove and is communicated with the spray hole 51; the electrode separation frame 6 is provided with an air inlet 62, and the air inlet 62 is communicated with the air inlet groove.
The plurality of spray holes 51 can form a larger airflow coverage area, so that a gas isolation film is formed on the discharge surface, the gas isolation film can reduce corrosion to the anode 4, and the service life of the anode 4 is ensured; and simultaneously, a stable plasma flame can be formed.
At present, people do not find how to solve the problem of short service life of the anode 4, and only find that the anode 4 has short service life due to corrosion, and usually the anode is replaced after the standard time is used, or replaced in advance, so as to ensure the reliability of continuous operation. Although the problem can be solved by merely replacing the anode 4, this has an impact on production and increases costs. Through analysis and test discovery can reduce the corruption of electric arc to positive pole 4 when the air current forms gaseous barrier film, has prolonged positive pole 4's life greatly, and current inlet port only is equipped with one, and the air flow is little, can't form gaseous barrier film in discharge surface department, and plasma flame is unstable, corrodes positive pole 4 easily.
The gas flow from the nozzle holes 51 is preferably directed into the gas inlet gap 7 between the anode 4 and the cathode 2 because the gas flow is stable and a gas barrier film can be formed.
The annular array of the spray holes 51 can form stable airflow and reduce turbulence, thereby improving the forming effect of the gas barrier film and effectively preventing the anode 4 from being corroded.
As shown in fig. 2 to 5, the nozzle hole 51 is one or more of a straight hole and a tapered hole. The spray holes 51 may be straight holes or tapered holes, or the straight holes and the tapered holes may be staggered. Wherein, the small hole end of the conical hole is positioned inside the nozzle 5, and the large hole end of the conical hole is positioned outside the nozzle 5. The small hole end of the conical hole is positioned in the nozzle 5, so that the conical hole can concentrate airflow, the airflow is guided, and the formation of a gas isolation film is ensured.
The axis of the nozzle hole 51 intersects the axis of the nozzle 5 perpendicularly, obliquely or not.
When the axis of the spray hole 51 intersects with the axis of the nozzle 5, namely the spray hole 51 is a radial hole, the airflow sprayed out from the spray hole 51 directly enters the annular cavity, and a stable gas isolation film is formed in the annular cavity.
When the spray holes 51 do not intersect with the axis of the nozzle 5, the gas sprayed from the spray holes 51 impacts the inner circumferential surface of the annular nozzle 5 and then forms a vortex, and the turbine can form a stable gas isolation film in the annular cavity, so that the anode 4 is protected.
The cathode separation frame also comprises a cathode fixing seat 1, wherein a cathode 2 is arranged at the bottom of the cathode fixing seat 1, and the cathode fixing seat 1 is fixed at the top of the electrode separation frame 6; the top of the cathode fixing seat 1 is provided with a cathode cooling cavity 11. The cathode cooling cavity 11 is close to the cathode 2, and the heat generated by the cathode 2 in the discharging process is taken away by continuously injecting circulating cooling water, so that the stable discharging of the cathode 2 is ensured to the maximum extent.
The nozzle 5 is made of ceramics; the electrode separation frame 6 is made of glass fiber; the cathode 2 is made of tungsten or tungsten alloy; the anode 4 is made of copper. The tungsten and the copper are stable in discharge and long in service life. The anode 4 is easily corroded and has a large volume, so that the anode is made of cheap copper, and the maintenance cost is reduced. Since an electric arc will likely occur on the nozzle 5, the nozzle 5 is made of ceramic or glass fiber, which is resistant to high temperatures and is insulating. The electrode separation support is made of a fiberglass dielectric material that acts as an electrical insulator between the two electrodes and is also slightly resistant to highly reactive plasma.
Example two
As shown in fig. 6, the present embodiment is different from the first embodiment in that the nozzle hole 51 is tangential to the inner circular surface of the nozzle 5. The nozzle holes 51 are tangential to the inner circular surface of the nozzle 5, so that the gas flow from the nozzle holes 51 forms a vortex rapidly, and the turbine is very stable, and can form a stable gas barrier film, thereby protecting the anode 4, reducing the corrosion of the anode 4, and stabilizing the flame.
Claims (10)
1. The plasma flame generator comprises an anode and a cathode, and is characterized in that the anode is provided with a nozzle, one end of the nozzle is an air inlet, the other end of the nozzle is an air outlet, the cathode and the air inlet of the nozzle are oppositely arranged, an air inlet gap is arranged between the cathode and the anode, and the air inlet gap is communicated with the nozzle;
also comprises
The electrode separation frame is provided with an ion generation cavity, the cathode and the anode are respectively fixed on the electrode separation frame and are positioned in the ion generation cavity, and the air inlet gap is communicated with the ion generation cavity;
the nozzle is connected with an air source, the nozzle is fixed on the electrode separation frame and communicated with the ion generation cavity, and the nozzle is configured to spray air to the ion generation cavity.
2. The plasma flame generator of claim 1,
the end part of the cathode opposite to the nozzle is provided with a cathode discharge surface, the air inlet of the nozzle is provided with an anode discharge surface, the cathode discharge surface and the anode discharge surface are both conical surfaces, the cathode discharge surface and the anode discharge surface are coaxial, and the cathode discharge surface and the anode discharge surface are oppositely arranged to form an annular cavity.
3. The plasma flame generator of claim 2,
the taper of the cathode discharge surface is the same as that of the anode discharge surface.
4. The plasma flame generator of claim 3,
the conicity of the cathode discharge surface and the conicity of the anode discharge surface are both 116-150 degrees.
5. The plasma flame generator according to claim 1 or 2,
the nozzle is an annular nozzle, the nozzle is provided with at least two spray holes, the spray holes are annularly arranged at equal intervals around the axis of the nozzle, the nozzle is arranged in the ion generating cavity and is coaxial with the cathode, and the spray holes are also opposite to the air inlet gap;
the inner circular surface of the ion generating cavity is provided with an air inlet groove which is an annular groove and is communicated with the spray hole;
and the electrode separation frame is provided with an air inlet which is communicated with the air inlet groove.
6. The plasma flame generator of claim 5,
the spray holes are one or more of straight holes and tapered holes.
7. The plasma flame generator of claim 5,
the axis of the spray hole is vertically intersected, obliquely intersected or not intersected with the axis of the spray nozzle.
8. The plasma flame generator of claim 5,
the orifice is tangential to the inner circular surface of the nozzle.
9. The plasma flame generator of claim 1,
the cathode fixing seat is arranged at the bottom of the cathode fixing seat and fixed at the top of the electrode separation frame;
and a cathode cooling cavity is arranged at the top of the cathode fixing seat.
10. The plasma flame generator of claim 1,
the nozzle is made of ceramic or glass fiber;
the electrode separation frame is made of glass fiber;
the cathode is made of tungsten or tungsten alloy;
the anode is made of copper.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921217502.4U CN210670709U (en) | 2019-07-30 | 2019-07-30 | Plasma flame generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921217502.4U CN210670709U (en) | 2019-07-30 | 2019-07-30 | Plasma flame generator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210670709U true CN210670709U (en) | 2020-06-02 |
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ID=70810960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921217502.4U Active CN210670709U (en) | 2019-07-30 | 2019-07-30 | Plasma flame generator |
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| Country | Link |
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| CN (1) | CN210670709U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110324953A (en) * | 2019-07-30 | 2019-10-11 | 无锡光程新能源科技有限公司 | Plasma torch generator |
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2019
- 2019-07-30 CN CN201921217502.4U patent/CN210670709U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110324953A (en) * | 2019-07-30 | 2019-10-11 | 无锡光程新能源科技有限公司 | Plasma torch generator |
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