CN207560425U - A kind of hybrid plasma body generator for silica-base material processing - Google Patents
A kind of hybrid plasma body generator for silica-base material processing Download PDFInfo
- Publication number
- CN207560425U CN207560425U CN201721500145.3U CN201721500145U CN207560425U CN 207560425 U CN207560425 U CN 207560425U CN 201721500145 U CN201721500145 U CN 201721500145U CN 207560425 U CN207560425 U CN 207560425U
- Authority
- CN
- China
- Prior art keywords
- anode
- gas
- cathode
- generator
- silica
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
A kind of hybrid plasma body generator for silica-base material processing is mainly made of direct-current plasma generator and radio frequency induction plasma generator two parts；The direct-current plasma generator is mainly made of cathode portion, striking shell, first anode body, anode casing, second plate part, the first insulation sleeve, the second insulation sleeve；The radio frequency induction plasma generator is mainly made of quartz glass tube, induction coil；The cathode portion is mainly made of cathode block and cathode taps；The first anode body upper surface and striking cage connection, lower face is connect with the second insulation sleeve；The second plate part is made of anode head and anode tail-hood；The first insulation sleeve inner wall coordinates with cathode block, and outer wall coordinates with striking shell.Present apparatus secondary excitation arc plasma jet under the action of coil magnetic field improves the launching efficiency of reactivity particle, has very big promotion for the processing speed of silica-base material.
Description
Technical field
The utility model discloses a kind of hybrid plasma body generators for silica-base material processing, belong to plasma
Body processing equipment field.
Background technology
Silicon substrate ultraprecise part is applied more and more extensive in fields such as aerospace, astronomical observations in recent years, and demand is more next
It is more, also higher and higher, such as nano level surface roughness is required for material machined surface quality, finished surface is without rotten
The requirements such as layer and sub-surface damage.In order to realize more than target, with plasma exciatiaon such as CF4A kind of working gas generates work
Property reaction particle be leading track surface manufacturing condition, obtained the very big concern of domestic and international researcher.
The mode of excitation working gas generation active reaction particle relies primarily on radio frequency induction coupled plasma hair at present
Raw device.Such mode can realize that excitation working gas generates active reaction particle, by active reaction particle and silica-base material
Between occur chemical reaction generation gas-phase product, finished surface can be avoided damaged surface layer and sub-surface damage occur, but from feeling
It answers in coil region, Lorentz force can induce the strong convolution vortex of generation, and device jet orifice plasma in process is caused to be penetrated
The form of stream is simultaneously unstable, it is impossible to obtain constant beam spot diameter, machined surface quality can not reach dreamboat；And sense
There are the Kelvin effect of electric current in coil region, quartz glass tube axis is deviateed in high-temperature region, energy fully coupled to wait from
In daughter jet stream, cause processing efficiency not high.
Utility model content
To solve the above-mentioned problems, processing efficiency is improved, promotes the machined surface quality of silica-base material, the utility model is public
A kind of hybrid plasma body generator for silica-base material lithography has been opened, can generate and have excellent performance and can for a long time
The plasma jet of beam spot diameter, is kept constant, thus the surface quality of silica-base material under dreamboat requirement can be obtained.
The technical solution of the utility model is as described below.
A kind of hybrid plasma body generator for silica-base material processing, mainly by direct-current plasma generator and
Radio frequency induction plasma generator two parts form, it is characterised in that：The direct-current plasma generator is main
By cathode portion, striking shell, first anode body, anode casing, second plate part, the first insulation sleeve, the second insulation sleeve group
Into；The radio frequency induction plasma generator is mainly by quartz glass tube, induction coil composition.The cathode portion
Mainly it is made of cathode block and cathode taps；The first anode body upper surface and striking cage connection, lower face are exhausted with second
Edge set connection；The anode casing upper end is connected to second plate body binding post, the second plate part by anode head and
Anode tail-hood forms；The first insulation sleeve inner wall coordinates with cathode block, and outer wall coordinates with striking shell；Second insulation sleeve is by thin
Wall section and jet hit section two parts composition.
The cathode block is mainly made of cathode sheath, cathode, cathode terminal；There is a cooling in the cathode sheath upper surface
Water inlet；The cathode external cylindrical surface coordinates with cathode sheath inner wall；The cathode terminal connects with DC power supply cathode.
The cathode taps are processed using heat-resisting material tungsten or its alloy, by a cylinder and tangent arc surface structure
Into, be arc cathode attachment point.
The striking shell upper cylindrical surface is equipped with first anode junction block, and middle part external cylindrical surface is equipped with first annular point of gas
Room, inner cylinder face are equipped with 8~10 generation gas air admission holes connected with first annular sub-air chamber, wherein gas occurs as Ar, the work
It is 30 °~50 ° to make gas outlet axially bored line with inner cylinder face normal angle.
The first anode body uses red copper material, is mainly used for isolating working gas and cathode portion, avoids work gas
The reactivity particle corroding cathode part generated after body excitation.
The anode casing upper end is connected with second plate binding post, and top external cylindrical surface is equipped with one and gas air inlet occurs
Mouthful；Middle part external cylindrical surface is equipped with a cooling water outlet and a protection gas entrance, and anode casing inner wall is equipped with screw thread, is used for and anode
Head connection.
The anode tail-hood external cylindrical surface is equipped with a protection gas air inlet, and lower end surface is equipped with a duct and protection gas air inlet
Mouth connection, wherein protection gas is Ar.
The anode head external cylindrical surface is equipped with screw thread, for being threadedly coupled with above-mentioned anode casing；Upper end is equipped with the
Three annular sub-air chamber, for the hole link in above-mentioned anode tail-hood, anode head lower end surface is equipped with quartz glass tube peace
It behave affectedly, the small cylindrical surface of quartz glass tube installation cavity is equipped with rotation air drain, for cooling gas to be made to form vortex protection quartz glass
Pipe；The external cylindrical surface of quartz glass tube installation cavity is equipped with the first seal groove and the second seal groove；Anode head lower end surface is equipped with
Three uniformly distributed countersunk screw holes, for being fixed with above-mentioned anode tail-hood.
First insulation sleeve and the second insulation sleeve are made of polytetrafluoro material, and second insulation sleeve is by thin segment
With rotation gas section two parts composition, thin segment outside cylinder is equipped with one with gas air inlet and above-mentioned striking shell occur in above-mentioned anode seat
In the connection of first annular sub-air chamber duct；It revolves gas section external cylindrical surface and is equipped with the second annular sub-air chamber, inner cylinder face is equipped with 6~8
A work gas venthole connected with the second annular sub-air chamber, wherein work gas is CF4And O2 Mixed gas, the work gas
Outlet axially bored line is 30 °~50 ° with inner cylinder face normal angle.
A kind of hybrid plasma body generator for silica-base material processing described in the utility model has following excellent
Point.
1. generate stable plasma jet.Due to coupled using direct-current plasma generator and radio frequency induction etc. from
The mode of daughter generator combination, the high speed and high temperature channel that the arc plasma jet sprayed by the first jet orifice is formed can
The strong convolution vortex of generation, the plasma for spraying the second jet orifice can be induced to avoid in induction coil region internal cause Lorentz force
Body jet stream energy long-time retention property is excellent and the plasma jet of form stable.
2. optimize ignition process.The present apparatus is occurred using direct-current plasma generator and radio-frequency inductance coupling plasma
The mode of device two parts combination, the igniting of plasma overcome tradition by cathode portion and the electric spark of anode part generation
The problem of radio frequency induction plasma generator ignition process easy damaged quartz glass tube.
3. processing efficiency increases.In the present apparatus, arc plasma jet is by the high speed and high temperature channel along axisymmetrical
Double ionization is carried out into induction coil region, can release higher energy, generates active reaction particle in work gas
Rate increases, and the active reaction number of particles of unit volume increases in the second jet orifice, improves silica-base material removal rate, imitates processing
Rate increases.
4. finished surface surface quality increases.In the present apparatus, torch group is coupled using direct-current plasma torch and radio frequency induction
The mode of conjunction, the stability of the plasma jet of generation is high, the influence of unprotected gas mass velocity and eddy velocity parameter,
Therefore in the case where parameter setting is good, can be kept constant for a long time when processing silica-base material surface the grade of beam spot diameter, from
Constant removal function can be obtained in daughter jet stream, i.e. process, realizes the certainty processing to material surface, thus is carried
High machined surface quality.
5. push the application of plasma polishing material surface.The present apparatus greatly improves the steady of plasma jet
It is qualitative so that constant removal function is obtained during polishing material surface and is possibly realized, this will necessarily push plasma polishing skill
Art is further used in fields such as processing ultra-precision surfaces.
Description of the drawings
Fig. 1 hybrid plasma body generator architecture schematic diagrames.
Fig. 2 hybrid plasma body generator anode head end elevation views.
Fig. 3 hybrid plasma body generator A-A sectional views.
Fig. 4 hybrid plasma body generator B-B sectional views.
Wherein：10-- direct-current plasma generators, 20-- radio frequency induction plasma generators, 10a-- are initial
Electric arc, 10b-- operating arcs, the first jet orifices of 10E--, the second jet orifices of 20E--, 101-- cathode terminals, 102-- coolings
Water inlet, 103-- cathodes, the first insulation sleeves of 104--, 105-- striking shells, 106-- first anode bodies, 107-- protection gas
Air inlet, the first seal grooves of 108--, the second seal grooves of 109--, 110-- quartz glass tubes, 111-- induction coils, 112--
Three annular sub-air chamber, 113-- cooling water outlets, 114-- anode casings, 115-- anode tail-hoods, the second insulation sleeves of 116--,
117-- second plate binding posts, 118-- cathode taps, 119-- cathode blocks, 120-- first anode binding posts, 200-- anode heads,
201-- revolves air drain, 202-- quartz glass tubes installation room, 203-- countersunk screw holes, 301-- generation gas air admission holes, 302-- generations
Gas venthole, 401-- work gas air inlets, the second rings of 402-- occur for gas air intake duct, the first annular sub-air chamber of 303--, 304--
Shape sub-air chamber, 403-- work gas ventholes.
Specific embodiment
In order to preferably illustrate the utility model, the specific implementation of the utility model is carried out in conjunction with attached drawing
It is described in detail.
A kind of hybrid plasma body generator for silica-base material lithography disclosed in the utility model is by direct current
Plasma generator（10）With radio frequency induction plasma generator（20）Two parts form.Wherein direct-current plasma
Generator is mainly by cathode portion, striking shell, first anode body, anode casing, second plate part, the first insulation sleeve,
Two insulation sleeves form；Radio frequency induction plasma generator is mainly by quartz glass tube, induction coil composition.Cathode portion
By cathode taps（118）It is assembled with cathode block, cooling water is from cooling water inlet（102）Into, internal cooling-water duct is flowed through,
By cooling water outlet（113）Outflow；First insulation sleeve（104）Inner wall and cathode sheath（119）External cylindrical surface coordinates, the first insulation
Set（104）External cylindrical surface and striking shell（105）Cathode portion and striking shell are realized in cooperation（105）Insulation；Striking shell
（105）Upper cylindrical face is equipped with first anode junction block（120）, middle part external cylindrical surface is equipped with first annular sub-air chamber（303）, it is interior
Cylindrical surface is equipped with eight and first annular sub-air chamber（303）The generation gas venthole of connection（304）, wherein gas venthole occurs
（304）Axis is 30 °~50 ° with striking shell inner cylinder face normal angle, and generation gas is made to enter inside discharge cavity and is easily formed
Vortex, can come into full contact with electric arc, be easily formed plasma, striking shell（105）With the first anode（106）Contact, it is real
Existing DC power supply anode and first anode body（107）Conducting；Anode casing（114）Upper end and second plate binding post
（117）Connection, top external cylindrical surface are equipped with one and gas air inlet occur（301）；Middle part external cylindrical surface is equipped with a cooling water outlet
（113）With a protection gas entrance（401）, anode casing inner wall is equipped with screw thread, for being connect with anode head.Second plate part by
Anode tail-hood（115）And anode head（200）Composition, Anodic tail-hood（115）External cylindrical surface is equipped with a protection gas air inlet
（107）, lower end surface is equipped with a duct and protection gas air inlet（107）Connection, wherein protection gas is Ar；Anode head（200）Outside
Cylindrical surface be equipped with screw thread, for above-mentioned anode casing（114）Inner thread connects, and upper end is equipped with third annular sub-air chamber
（402）, for above-mentioned anode tail-hood（115）In hole link, anode head（200）Lower end surface is equipped with a quartz glass tube
Installation cavity（202）, the small cylindrical surface of quartz glass tube installation cavity, which is equipped with, revolves air drain（201）, for cooling gas to be made to form vortex
Protect quartz glass tube（110）, quartz glass tube installation cavity（202）External cylindrical surface be equipped with the first seal groove（108）With
Two seal grooves（109）, for placing O-ring；Second insulation sleeve（116）It is made of thin segment and rotation gas section two parts, thin segment
Inside and outside cylindrical surface respectively with striking shell（105）With anode tail-hood（115）Striking shell is realized in cooperation（105）And second plate
SI semi-insulation, thin segment external cylindrical surface are equipped with one and above-mentioned anode casing（301）Middle generation gas air inlet and above-mentioned striking shell
（105）In first annular sub-air chamber（303）The generation gas air intake duct of connection（302）, it is annular that rotation gas section external cylindrical surface is equipped with second
Sub-air chamber（402）, inner wall sets that there are six the work gas venthole connected with the second annular sub-air chamber, work gas gas outlet axis
It is 30 °~50 ° that line and inner cylinder face normal, which are angle, and work gas is made to enter inside discharge cavity and is easily formed vortex, improves reaction
The production rate of active particle；Quartz glass tube（111）Mounted on above-mentioned quartz glass tube installation cavity（202）It is interior, it is close by first
Sealing groove（108）With the second seal groove（109）In O-ring realize fix.
When hybrid plasma body generator works, first in cathode portion and first anode body（106）Between apply it is high
Frequency high pressure, cathode taps（118）With first anode body（106）Generate initial arc（10a）Afterwards, cathode portion and the first anode are disconnected
Body（107）Between high-frequency and high-voltage, in cathode taps（118）Apply high-frequency and high-voltage between second plate part, it will be above-mentioned initial
Electric arc (10a) is elongated to anode tail-hood（115）Rotation gas section, generate operating arc（10b）, the effect of first anode body is isolation
Working gas and cathode portion, the reactivity particle corroding cathode part that working gas is avoided to be generated after exciting, wherein working
Gas is CF4And O2Mixed gas, generation gas be Ar gas；CF in working gas4By with the high-velocity electrons in plasma jet
It collides, excitation generates reactivity particle, and induction coil is entered under the arc plasma jet propulsion of high-speed and high-temperature
（111）The zone of action；Direct-current plasma generator（10）The arc-plasma of formation passes through the first jet orifice（10E）Into
Enter quartz glass tube（112）In, the induction coil that the RF power supply other end is grounded is connect at one end（113）Electromagnetic induction effect under,
Arc-plasma carries out double ionization, further gives off energy, and the heat flow density of plasma jet increases；In working gas
Unexcited CF4It collides with the arc plasma jet stream of double ionization, further generates to etch the anti-of silica-base material
Answer active particle.Thus this generator is compared with the radio frequency induction plasma generator for being commonly used for silica-base material processing
With higher processing efficiency.Due to the impetus of high speed arc spraying plasma jet, counteract reactivity particle and feeling
Answer coil（113）The Lorentz force being subject in region avoids generating recycling vortex, ensures the second jet orifice（20E）Grade from
Daughter shape of plasma jet is stablized.Therefore, a kind of hybrid plasma body for silica-base material processing is disclosed using the utility model
When generator is processed by shot blasting material surface, it is straight beam spot can be kept constant for a long time under conditions of setup parameter is constant
Constant removal function diameter can be obtained in the plasma jet of diameter, i.e. process, realizes and material surface is determined
Property processing, thus improve machined surface quality.
Finally it is to be appreciated that Yi Shang case study on implementation is merely to illustrate the technical solution of the utility model and unrestricted, ability
Field technique personnel should be appreciated that either equivalent replacement of modifying to the technical solution of the utility model, and be detached from this practicality
Novel objective and range, should all cover in the scope of protection of the utility model.
Claims (7)
1. a kind of hybrid plasma body generator for silica-base material processing, mainly by direct-current plasma generator and penetrating
Frequency inductively coupled plasma generator two parts form, it is characterised in that：The direct-current plasma generator mainly by
Cathode portion, striking shell, first anode body, anode casing, second plate part, the first insulation sleeve, the second insulation sleeve composition；
The radio frequency induction plasma generator is mainly made of quartz glass tube, induction coil；The cathode portion master
It to be made of cathode block and cathode taps；The first anode body upper surface and striking cage connection, lower face and the second insulation
Set connection；The anode casing upper end is connected to second plate body binding post, and the second plate part is by anode head and sun
Pole tail-hood composition；The first insulation sleeve inner wall coordinates with cathode block, and outer wall coordinates with striking shell；Second insulation sleeve is by thin-walled
Section and jet hit section two parts composition；The first anode body upper surface coordinates with striking shell, and lower face is exhausted with second
The rotation gas section upper surface cooperation of edge set, effect is isolation working gas and cathode portion, working gas excitation is avoided to generate anti-
Answer active particle corroding cathode part；The anode head external cylindrical surface be equipped with screw thread, for above-mentioned anode casing inner thread
Connection；Upper end is equipped with third annular sub-air chamber, for the hole link in anode tail-hood, anode head lower end surface is equipped with
One quartz glass tube installation cavity, the inner cylinder face of quartz glass tube installation cavity is equipped with rotation air drain, for making cooling gas in quartz
Glass inside pipe wall forms vortex, avoids melting due to high temperature.
2. a kind of hybrid plasma body generator for silica-base material processing according to claim 1, feature exist
In：During work, apply high-frequency and high-voltage, cathode taps and first anode body between cathode portion and first anode body by DC power supply
After generating initial arc, the high-frequency and high-voltage between cathode portion and first anode body is disconnected, in cathode taps and second plate part
Between apply high-frequency and high-voltage, above-mentioned initial arc is elongated to the rotation gas section of anode tail-hood, is changed into operating arc；Introduce first
The effect of anode bodies is isolation working gas and cathode portion, the reactivity particle corrosion that working gas is avoided to be generated after exciting
Cathode portion, wherein work gas are the mixed gas of CF4 and O2, and generation gas is Ar gas；CF4 in working gas by with wait from
High-velocity electrons in sub- jet stream collide, and excitation generates reactivity particle, is pushed away in the arc plasma jet stream of high-speed and high-temperature
It is dynamic lower into the zone of action of induction coil；The arc-plasma that direct-current plasma generator is formed passes through the first jet orifice
Into in quartz glass tube, connect at one end the RF power supply other end ground connection induction coil electromagnetic induction effect under, electric arc etc. from
Daughter carries out double ionization, and the CF4 and the high energy arc plasma jet of double ionization not excited completely in working gas occur
Collision further generates the reactivity particle for etching silica-base material.
3. a kind of hybrid plasma body generator for silica-base material processing according to claim 1, feature exist
In：The striking shell upper cylindrical surface is equipped with first anode junction block, and middle part external cylindrical surface is equipped with first annular sub-air chamber, interior
Cylindrical surface is equipped with 8~10 a diameter of 2~3mm of Φ connected with first annular sub-air chamber and gas air admission hole, wherein work gas occurs
Outlet axially bored line is 30~50 ° with inner cylinder face normal.
4. a kind of hybrid plasma body generator for silica-base material processing according to claim 1, feature exist
In：First insulation sleeve inner wall coordinates with cathode block, and outer wall coordinates with striking shell, realizes cathode portion and striking casing insulation.
5. a kind of hybrid plasma body generator for silica-base material processing according to claim 1, feature exist
In：The anode tail-hood external cylindrical surface is equipped with a protection gas air inlet, and lower end surface is equipped with a duct and connects with protection gas air inlet
It is logical.
6. a kind of hybrid plasma body generator for silica-base material processing according to claim 1, feature exist
In：The second insulation sleeve thin segment outside cylinder is equipped in the generation gas air inlet and striking shell in one and above-mentioned anode casing
The duct of first annular sub-air chamber's connection.
7. a kind of hybrid plasma body generator for silica-base material processing according to claim 1, feature exist
In：The second insulation sleeve rotation gas section external cylindrical surface is equipped with the second annular sub-air chamber, and inner cylinder face is equipped with 6~8 and the second ring
The work gas venthole of a diameter of 2~3mm of Φ of shape sub-air chamber connection, wherein work gas outlet axially bored line and inner cylinder face normal
It is 30~50 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721500145.3U CN207560425U (en) | 2017-11-13 | 2017-11-13 | A kind of hybrid plasma body generator for silica-base material processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721500145.3U CN207560425U (en) | 2017-11-13 | 2017-11-13 | A kind of hybrid plasma body generator for silica-base material processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207560425U true CN207560425U (en) | 2018-06-29 |
Family
ID=62682792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721500145.3U Active CN207560425U (en) | 2017-11-13 | 2017-11-13 | A kind of hybrid plasma body generator for silica-base material processing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207560425U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107920411A (en) * | 2017-11-13 | 2018-04-17 | 四川大学 | A kind of hybrid plasma body generator for silica-base material processing |
| CN108770172A (en) * | 2018-08-06 | 2018-11-06 | 西安空天能源动力智能制造研究院有限公司 | A kind of DC arc plasma jet for hazardous waste disposal |
| CN109640504A (en) * | 2018-12-14 | 2019-04-16 | 四川大学 | A kind of multiple jet planting body activation hydrophilic means |
| CN110381660A (en) * | 2019-07-02 | 2019-10-25 | 苏州微木智能系统有限公司 | A kind of plasma generator |
| CN110576239A (en) * | 2019-09-11 | 2019-12-17 | 清华大学 | Arc milling device and method for rotating arc |
| CN110881239A (en) * | 2019-12-04 | 2020-03-13 | 中国科学院合肥物质科学研究院 | Multi-arc plasma reactor introducing external magnetic field and operation method |
| CN114192090A (en) * | 2021-12-01 | 2022-03-18 | 中国科学院合肥物质科学研究院 | Device for preparing zirconium oxide based on direct current arc plasma torch |
-
2017
- 2017-11-13 CN CN201721500145.3U patent/CN207560425U/en active Active
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107920411A (en) * | 2017-11-13 | 2018-04-17 | 四川大学 | A kind of hybrid plasma body generator for silica-base material processing |
| CN107920411B (en) * | 2017-11-13 | 2023-09-19 | 四川大学 | Hybrid plasma generator for processing silicon-based materials |
| CN108770172A (en) * | 2018-08-06 | 2018-11-06 | 西安空天能源动力智能制造研究院有限公司 | A kind of DC arc plasma jet for hazardous waste disposal |
| CN108770172B (en) * | 2018-08-06 | 2023-09-26 | 重庆新离子环境科技有限公司 | DC arc plasma torch for dangerous waste treatment |
| CN109640504A (en) * | 2018-12-14 | 2019-04-16 | 四川大学 | A kind of multiple jet planting body activation hydrophilic means |
| CN109640504B (en) * | 2018-12-14 | 2023-09-05 | 四川大学 | Porous jet implant activation hydrophilic device |
| CN110381660A (en) * | 2019-07-02 | 2019-10-25 | 苏州微木智能系统有限公司 | A kind of plasma generator |
| CN110576239A (en) * | 2019-09-11 | 2019-12-17 | 清华大学 | Arc milling device and method for rotating arc |
| CN110881239A (en) * | 2019-12-04 | 2020-03-13 | 中国科学院合肥物质科学研究院 | Multi-arc plasma reactor introducing external magnetic field and operation method |
| CN114192090A (en) * | 2021-12-01 | 2022-03-18 | 中国科学院合肥物质科学研究院 | Device for preparing zirconium oxide based on direct current arc plasma torch |
| CN114192090B (en) * | 2021-12-01 | 2023-08-25 | 中国科学院合肥物质科学研究院 | Device for preparing zirconia based on direct-current arc plasma torch |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207560425U (en) | A kind of hybrid plasma body generator for silica-base material processing | |
| CN107920411A (en) | A kind of hybrid plasma body generator for silica-base material processing | |
| CN101699928A (en) | Anode for non-transferred arc plasma torch and plasma torch | |
| CN202310265U (en) | Cyclone type low temperature plasma generator | |
| CN110067712B (en) | Magnetic plasma thruster inducing axial magnetic field | |
| MX2011009388A (en) | Plasma torch with a lateral injector. | |
| CN107124814A (en) | A kind of many negative electrode laminar flow plasma powder spheroidization devices | |
| CN203378130U (en) | Anode of supersonic speed plasma spray gun and supersonic speed plasma spray gun | |
| CN103458602A (en) | Electrode water-cooling integrated supersonic speed plasma torch | |
| CN102438387B (en) | Cyclone type low-temperature plasma generator | |
| CN110302909B (en) | High-power hot cathode supersonic plasma spraying gun | |
| CN109618483B (en) | Multi-arc plasma generator | |
| CN211128363U (en) | Cascade plasma generator | |
| CN1281102C (en) | Double anode heat plasma generator | |
| CN103074566A (en) | Method for preparing Y3O3 coating by using supersonic plasma spraying technology | |
| CN104470185A (en) | 100-KW high-frequency induction generator | |
| CN105764227A (en) | High-beam direct-current hollow cathode plasma source | |
| CN206894987U (en) | A kind of more negative electrode laminar flow plasma powder spheroidization devices | |
| CN112983283B (en) | Plasma torch rock breaking composite drill bit and plasma torch rock breaking composite drill | |
| CN109578233B (en) | Ablation type pulse plasma propeller based on multi-anode electrode structure | |
| CN112911780A (en) | Cascade plasma generator | |
| CN208273331U (en) | A kind of atmosphere inductively coupled plasma generator for processing silica-base material | |
| CN115218221B (en) | Rotary sliding arc plasma regulation and control combustion device | |
| CN109587917A (en) | A kind of large power long service life plasma torch based on permanent magnet constraint | |
| CN201079755Y (en) | Plasma spray gun |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |