CN117203374A - 金属薄膜制造装置 - Google Patents
金属薄膜制造装置 Download PDFInfo
- Publication number
- CN117203374A CN117203374A CN202280031118.3A CN202280031118A CN117203374A CN 117203374 A CN117203374 A CN 117203374A CN 202280031118 A CN202280031118 A CN 202280031118A CN 117203374 A CN117203374 A CN 117203374A
- Authority
- CN
- China
- Prior art keywords
- titanium
- electrolyte
- thin film
- plate
- metal thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 124
- 239000002184 metal Substances 0.000 title claims abstract description 124
- 239000010409 thin film Substances 0.000 title claims abstract description 81
- 239000010936 titanium Substances 0.000 claims abstract description 119
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 113
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 113
- 239000003792 electrolyte Substances 0.000 claims abstract description 90
- 238000004519 manufacturing process Methods 0.000 claims abstract description 54
- 239000007774 positive electrode material Substances 0.000 claims abstract description 42
- 238000005323 electroforming Methods 0.000 claims abstract description 18
- 239000010408 film Substances 0.000 claims description 18
- 238000003466 welding Methods 0.000 claims description 9
- 238000003860 storage Methods 0.000 claims description 4
- 238000005406 washing Methods 0.000 claims description 3
- 239000007921 spray Substances 0.000 claims description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 25
- 239000010410 layer Substances 0.000 description 24
- 239000011889 copper foil Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 12
- 238000000151 deposition Methods 0.000 description 11
- 239000010949 copper Substances 0.000 description 9
- 230000008021 deposition Effects 0.000 description 9
- 239000008151 electrolyte solution Substances 0.000 description 8
- 230000003014 reinforcing effect Effects 0.000 description 8
- 239000010406 cathode material Substances 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 6
- 238000004804 winding Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000002356 single layer Substances 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 229910000048 titanium hydride Inorganic materials 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- -1 titanium hydride Chemical compound 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 241001124569 Lycaenidae Species 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 235000014987 copper Nutrition 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910001431 copper ion Inorganic materials 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000000752 ionisation method Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/04—Wires; Strips; Foils
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/06—Wires; Strips; Foils
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/06—Wires; Strips; Foils
- C25D7/0614—Strips or foils
- C25D7/0685—Spraying of electrolyte
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrolytic Production Of Metals (AREA)
- Electroplating Methods And Accessories (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2021-0053583 | 2021-04-26 | ||
| KR1020210053583A KR102515268B1 (ko) | 2021-04-26 | 2021-04-26 | 금속박막 제조장치 |
| PCT/KR2022/004560 WO2022231143A1 (ko) | 2021-04-26 | 2022-03-31 | 금속박막 제조장치 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117203374A true CN117203374A (zh) | 2023-12-08 |
Family
ID=83846983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202280031118.3A Pending CN117203374A (zh) | 2021-04-26 | 2022-03-31 | 金属薄膜制造装置 |
Country Status (4)
| Country | Link |
|---|---|
| KR (1) | KR102515268B1 (ko) |
| CN (1) | CN117203374A (ko) |
| TW (1) | TW202242200A (ko) |
| WO (1) | WO2022231143A1 (ko) |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4076597A (en) * | 1976-12-06 | 1978-02-28 | Gould Inc. | Method of forming iron foil at high current densities |
| JP3076565B2 (ja) * | 1998-08-03 | 2000-08-14 | 住友特殊金属株式会社 | 金属箔、金属箔片の製造装置および製造方法 |
| JP2001085015A (ja) * | 1999-09-17 | 2001-03-30 | Sumitomo Metal Steel Products Inc | アルカリ蓄電池負極用多孔ニッケル箔およびその製造方法 |
| KR101325359B1 (ko) * | 2011-11-15 | 2013-11-08 | 주식회사 포스코 | 고속 금속박 제조방법 및 장치 |
| KR101569185B1 (ko) | 2013-09-13 | 2015-11-17 | (주)테크윈 | 불용성 전극 및 이를 구비하는 전해동박장치 |
| KR102273727B1 (ko) | 2017-11-09 | 2021-07-05 | 주식회사 엘지에너지솔루션 | 전해 동박 제조 장치 |
| JP6970603B2 (ja) * | 2017-12-08 | 2021-11-24 | 日鉄工材株式会社 | 金属箔製造装置，電極板及び金属箔の製造方法 |
| KR102260510B1 (ko) * | 2019-05-16 | 2021-06-03 | 이문찬 | 전해증착용 음극드럼과 그의 제조방법 |
-
2021
- 2021-04-26 KR KR1020210053583A patent/KR102515268B1/ko active IP Right Grant
-
2022
- 2022-03-31 WO PCT/KR2022/004560 patent/WO2022231143A1/ko active Application Filing
- 2022-03-31 CN CN202280031118.3A patent/CN117203374A/zh active Pending
- 2022-04-21 TW TW111115221A patent/TW202242200A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| KR20220146834A (ko) | 2022-11-02 |
| WO2022231143A1 (ko) | 2022-11-03 |
| KR102515268B1 (ko) | 2023-03-29 |
| TW202242200A (zh) | 2022-11-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |