CN117184884A - Material tray clamping mechanism and material tray conveying equipment - Google Patents

Abstract

The application discloses a tray clamping mechanism and tray conveying equipment. This charging tray clamping mechanism includes: the clamping jaw comprises a clamping main body part and an extension part. The clamping device comprises a clamping main body part, a clamping jaw, a first driving piece, a clamping main body part, a clamping head and a clamping head, wherein the clamping main body part is arranged on a base; the first driving piece is used for driving the clamping jaw to move along the second direction of the base so as to enable the clamping main body part to clamp the tray along the second direction and enable the extending part to clamp the tray along the first direction respectively. By adopting the tray clamping mechanism, the clamping main body part and the extending part of the clamping jaw are used for clamping the tray from the second direction and the first direction respectively when the clamping jaw is used for grabbing the tray, so that the clamping point positions of the tray can be increased, and the tray can be firmly clamped.

Description

Material tray clamping mechanism and material tray conveying equipment

Technical Field

The application relates to the field of semiconductor production, in particular to a conveying mechanism.

Background

In semiconductor production, trays are typically used to store semiconductor products and transfer of the semiconductor products is accomplished by handling the trays.

In the related art, a sucker is generally used to adsorb a tray, and an air cylinder, a motor and other transmission structures are used to drive the sucker to convey the tray to a target position. The mode that uses the sucking disc to adsorb the charging tray, when charging tray or sucking disc surface have the dust, the unable condition of normal absorption charging tray of sucking disc appears easily. In the handling process, because the sucker is in single-sided contact with the material disc, the sucker is not firm enough, and especially when the air source fluctuates, the accident that the material disc falls is likely to happen, and the production safety and the production efficiency are affected.

Disclosure of Invention

The embodiment of the application discloses a tray clamping mechanism which can improve the reliability in the process of grabbing and carrying trays and is beneficial to improving the production safety and the production efficiency.

To achieve the above object, in a first aspect, the present application discloses a tray clamping mechanism, comprising:

a base;

the first driving piece is arranged on the base;

the clamping jaw comprises a clamping main body part and an extension part, one end of the clamping main body part is connected with the first driving piece, and the extension part is connected with one end of the clamping main body part, which is far away from the first driving piece;

the first driving piece is used for driving the clamping jaw to move along a first direction of the base so as to enable the clamping main body part to clamp the tray along the first direction and enable the extending part to clamp the tray along the second direction respectively;

wherein the second direction intersects the first direction.

As an alternative embodiment, the clamping jaws are arranged in pairs and are symmetrically located on opposite sides of the base along the first direction;

each jaw is driven by a separate first driving member.

As an alternative to this embodiment of the present application,

the clamping main body part comprises a first clamping surface, the normal vector of the first clamping surface is parallel to the first direction, and the first clamping surface is used for being connected with the material tray so as to clamp the material tray along the first direction;

the extension part comprises a second clamping surface and a third clamping surface, the second clamping surface is connected with the first clamping surface, and the normal vector of the second clamping surface is coplanar with the first direction and is used for clamping the material tray along the second direction;

the third clamping surface is connected with the second clamping surface and is used for auxiliary clamping of the material tray along the second direction.

As an alternative embodiment, the base comprises a first surface and a second surface along the first direction, the first driving member is arranged on the first surface, and the third clamping surface is parallel to the second surface and forms a clamping space with the second surface for clamping the tray;

the tray clamping mechanism further comprises a buffer piece, the buffer piece is arranged at the corner of the base, which is close to the clamping jaw, the buffer piece is at least partially arranged on the side of the second surface, and the buffer piece is used for being in contact with the tray so as to buffer the clamping impact action of the base on the tray.

As an optional implementation manner, the tray clamping mechanism further comprises a limiting structure, wherein the limiting structure is arranged on the base and is used for limiting the position of the tray along a third direction;

the third direction intersects with the first direction and the second direction in pairs.

As an alternative embodiment, the tray clamping mechanism further includes sensors, the sensors are disposed at two ends of the base in pairs, and the sensors are used for detecting the clamping condition of the tray.

In a second aspect, the present application discloses a tray handling apparatus comprising:

frame, first transport mechanism, second transport mechanism and as set forth in any one of the above, first transport mechanism set up in the frame, just first transport mechanism can be relative the frame is along the third direction motion, second transport mechanism connect in first transport mechanism, just second transport mechanism can be relative the base is along the second direction motion, tray clamping mechanism fixed connection in second transport mechanism is in order to follow under the drive of second transport mechanism the second direction motion, and follow the third direction motion under the drive of first transport mechanism.

As an alternative embodiment, the frame includes a bracket and a mounting plate, the mounting plate being connected to the bracket;

the first carrying mechanism comprises a second driving piece and a transmission assembly, the second driving piece is arranged on the mounting plate, and the transmission assembly is connected with the second driving piece so as to move along the third direction under the driving action of the second driving piece;

the second carrying mechanism comprises a third driving piece and a connecting piece, the driving structure is connected to the transmission assembly, the tray clamping mechanism is connected with the third driving piece through the connecting piece, and the third driving piece is used for driving the tray clamping mechanism to move along the second direction.

As an alternative embodiment, the frame further includes a drag chain and a tray, the tray is disposed on the mounting plate and extends along the third direction, one end of the drag chain is connected to the third driving member, and the other end of the drag chain is connected to the tray, so that the drag chain is at least partially located on the tray.

As an alternative embodiment, the third driving member includes a fixed end, a sliding end, and an elastic member;

the fixed end is connected with the transmission assembly, the sliding end is slidably connected with the fixed end, and the tray clamping mechanism is connected with the sliding end so as to move along the second direction relative to the fixed end under the drive of the sliding end;

the elastic piece is connected between the sliding end and the fixed end and is used for limiting the sliding travel of the sliding end relative to the fixed end.

Compared with the prior art, the application has the beneficial effects that:

through the mode that uses the clamping jaw as grabbing the feeding tray, when grabbing the feeding tray, utilize clamping main part and the extension of clamping jaw to follow second direction and first direction centre gripping feeding tray respectively to can increase the centre gripping point position to the feeding tray, replace among the correlation technique adopt the sucking disc face to adsorb and appear adsorbing the not firm mode easily, effectively improve the centre gripping reliability to the feeding tray, and then be favorable to improving production safety and production efficiency.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is an isometric view of a tray clamping mechanism according to an embodiment of the present application; the method comprises the steps of carrying out a first treatment on the surface of the

FIG. 2 is an elevation view of a tray clamping mechanism provided by an embodiment of the present application;

FIG. 3 is an isometric view of the jaw of FIG. 1;

fig. 4 is a schematic diagram of a tray handling apparatus according to an embodiment of the present application;

fig. 5 is a schematic view of the third driving member in fig. 4.

Reference numerals illustrate:

a first direction, Y; a second direction, Z; third direction, X;

a base, 1; a first surface, 11; a second surface 12;

a first driving member, 2;

clamping jaw, 3; a clamping body part 31; a first clamping surface 311; an extension 32; a second clamping surface 321; a third clamping surface 322;

a buffer member 4;

a limit structure 5;

a sensor, 6;

a frame (7); a bracket 71; a mounting plate 72; drag chain 73; a tray 74;

a first carrying mechanism 8; a second driving member 81; a transmission assembly 82; a timing belt 821; a guide 822;

a second carrying mechanism 9; a third driving member 91; a fixed end, 911; a slide end 912; an elastic member 913; a connecting piece; 92.

Detailed Description

The following description of the embodiments of the present application will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.

In the present application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate an azimuth or a positional relationship based on that shown in the drawings. These terms are only used to better describe the present application and its embodiments and are not intended to limit the scope of the indicated devices, elements or components to the particular orientations or to configure and operate in the particular orientations.

Also, some of the terms described above may be used to indicate other meanings in addition to orientation or positional relationships, for example, the term "upper" may also be used to indicate some sort of attachment or connection in some cases. The specific meaning of these terms in the present application will be understood by those of ordinary skill in the art according to the specific circumstances.

Furthermore, the terms "mounted," "configured," "provided," "connected," and "connected" are to be construed broadly. For example, it may be a fixed connection, a removable connection, or a unitary construction; may be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements, or components. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.

Furthermore, the terms "first," "second," and the like, are used primarily to distinguish between different devices, elements, or components (the particular species and configurations may be the same or different), and are not used to indicate or imply the relative importance and number of devices, elements, or components indicated. Unless otherwise indicated, the meaning of "a plurality" is two or more.

In semiconductor manufacturing, trays are typically used to store semiconductor products and then transferred by transporting the trays containing the semiconductor products. Therefore, a large number of semiconductor chips can be transferred at a time, and meanwhile, the semiconductor chips are protected by the tray, so that the semiconductor chips can be prevented from being damaged due to collision in the transfer process. In addition, the standardized tray is beneficial to corresponding equipment to identify and position the semiconductor products in the tray in the subsequent process, so that the production efficiency is improved.

In the related art, a suction cup is generally used to adsorb the upper surface of the tray, and the suction cup is driven by a cylinder, a motor and other transmission structures to convey the tray to a target position. The mode that uses the sucking disc to adsorb the charging tray, when charging tray or sucking disc surface have the dust, the unable condition of normal absorption charging tray of sucking disc appears easily. In the handling, because the sucking disc is in single-sided contact with the charging tray, the vacuum pipeline connected with the sucking disc is likely to bend due to the fact that the position of the sucking disc is changed, or the suction force of the sucking disc is fluctuated at the air source, the suction force of the sucking disc is instantaneously reduced, the accident that the charging tray falls is caused, and the production safety and the production efficiency are affected.

Based on this, the present application discloses, in a first aspect, a tray clamping mechanism comprising: the clamping jaw comprises a clamping main body part and an extension part. The clamping device comprises a clamping main body part, a clamping jaw, a first driving piece, a clamping main body part, a clamping head and a clamping head, wherein the clamping main body part is arranged on a base; the first driving piece is used for driving the clamping jaw to move along the second direction of the base so as to enable the clamping main body part to clamp the tray along the second direction and enable the extending part to clamp the tray along the first direction respectively. According to the application, the clamping main body part and the extension part of the clamping jaw are used for clamping the material tray from the second direction and the first direction respectively when the material tray is grabbed by using the clamping jaw as the material tray grabbing mode, so that the clamping point positions of the material tray can be increased, and the material tray can be firmly clamped.

In a second aspect, the application further discloses a tray conveying device, which comprises a frame, a first conveying mechanism, a second conveying mechanism and a tray clamping mechanism in the first aspect, wherein the first conveying mechanism is arranged on the frame and can move along a third direction relative to the frame, the second conveying mechanism is connected with the first conveying mechanism, the second conveying mechanism can move along a second direction relative to the base, and the tray clamping mechanism is fixedly connected with the second conveying mechanism so as to move along the second direction under the drive of the second conveying mechanism and move along the third direction under the drive of the first conveying mechanism. By adopting the tray conveying equipment provided by the application, the tray can be stably conveyed.

In order to facilitate understanding of the structure of the tray clamping mechanism and the tray handling device, the technical solution of the present application will be further described with reference to the embodiments and the accompanying drawings.

Referring to fig. 1 to 3, in a first aspect, a tray clamping mechanism provided in an embodiment of the present application includes: a base 1, a first driving member 2, a clamping jaw 3. The base 1 has a first surface 11 and a second surface 12, and the first driver 2 is mounted to the first surface 11. When clamping the tray, the second surface 12 is parallel to the upper surface of the tray, and clamps the tray together with the clamping jaw 3. The jaws 3 are arranged in pairs symmetrically on both sides of the base 1 and each jaw 3 is driven by a separate first drive 2. Under the driving action of the first driving member 2, the two opposing clamping jaws 3 move towards each other, thereby clamping the tray. For ease of understanding, the direction of movement of the jaw 3 is referred to as a first direction Y and the direction of the normal vector of the second surface 12 is referred to as a second direction Z, wherein the first direction Y and the second direction Z intersect.

Alternatively, the clamping jaw 3 may comprise a clamping body portion 31 and an extension 32, the clamping body portion 31 comprising a first clamping surface 311 and the extension 32 comprising a second clamping surface 321 and a third clamping surface 322. The first driving member 2 is connected to the clamping body portion 31, and the extension portion 32 is connected to an end of the clamping body portion 31 facing away from the first driving member 2. The direction of the normal vector of the first clamping surface 311 is parallel to the first direction Y, the direction of the normal vector of the third clamping surface 322 is parallel to the second direction Z, the second clamping surface 321 connects the first clamping surface 311 and the third clamping surface 322, it is easy to understand that the normal vector of the second clamping surface 321 intersects the first direction Y and the second direction Z, and the normal vector of the second clamping surface 321, the first direction Y and the second direction Z are coplanar. Thus, the third gripping surface 322 is parallel to the second surface 12 and a gripping gap for gripping the take-off tray is formed between the third gripping surface 322 and the second surface 12. When the tray is clamped, under the driving action of the driving piece 2, the clamping jaw 3 approaches the tray along the first direction Y, and in the process, the third clamping surface 322 stretches into the lower part of the tray to assist clamping, the second clamping surface 321 contacts the tray, and the first clamping surface 311 positions and clamps the tray. It is easy to understand that, during the clamping process, the direction of the clamping force of the first clamping surface 311 against the tray is parallel to the first direction Y, so as to clamp the tray in the first direction Y. The clamping force of the second clamping surface 321 on the tray (denoted as F ₂ ) Is the contact force of the second clamping surface 321 to the tray, and the direction is the normal vector direction of the second clamping surface 321, so F ₂ Can be decomposed into a component force F along a first direction Y _2y Directed towards the opposite other jaw 3, and a component force F in a second direction Z _2z Pointing towards the first surface 11. Thereby, the second clamping surface 321 clamps the tray with the second surface 12 in the second direction Z. The third clamping surface 322 holds the tray in the second direction, i.e. the third clamping surface 322 is on the side of the tray remote from the second surface 12 in the second direction Z, preventing the tray from slipping out of this direction.

It will be appreciated that the jaws 3 may also be used individually, rather than in pairs. At this time, one or more surfaces for clamping can be arranged on the side of the base 1, where the clamping jaw is not arranged, and the clamping jaw 3 clamps the tray. Therefore, the tray clamping mechanism provided by the application has fewer movable elements and simpler structural design.

Alternatively, the base 1 may be substantially in a long strip shape, for example, may be a rectangular plate, and the first direction Y may be a longitudinal direction of the base, and the second direction Z may be a thickness direction of the base. When being arranged, the two clamping jaws 3 can be respectively arranged at two ends of the base along the first direction Y, so that two ends of the tray can be clamped along the first direction Y. The first driving members 2 may be disposed in the middle of the base 1, and the two first driving members 2 are disposed at intervals, so as to control the two clamping jaws 3 respectively.

Further, the first surface 11 may be an upper surface of the base 1, i.e. the side provided with the first driving member 2, and the second surface 12 may be a lower surface of the base 1, the second surface 12 being adapted to be in contact with the tray when the clamping jaw 3 clamps the tray, such that the tray is clamped between the extension 32 of the clamping jaw and the second surface 12 in the second direction Z.

As an alternative example, the first driver 2 may be a biaxial or triaxial cylinder. When the double-shaft air cylinder or the triple-shaft air cylinder is selected, the plane where the axes of the double-shaft air cylinder or the triple-shaft air cylinder are positioned is required to be parallel to the second surface 12, and the triple shafts of the double-shaft air cylinder or the triple-shaft air cylinder are simultaneously connected with the clamping jaw 3, so that the clamping force distribution of the second clamping surface 321 and the third clamping surface 322 is more uniform, when the surfaces of the material tray, which are contacted with the second surface 12, are not parallel, the clamping jaw 3 clamps the material tray, so that a torsion moment around the second direction Z can be generated, and the double-shaft air cylinder and the triple-shaft air cylinder can better resist the moment, thereby improving the clamping stability.

As a further alternative example, the first driver 2 may also be a rotary cylinder. When a rotary cylinder is selected, a pair of jaws 3 are simultaneously connected using a link mechanism such that, when the rotary cylinder rotates, the pair of jaws 3 will simultaneously extend or retract in the first direction Y. Thus, when the tray is released, the consistency of the position of the tray is better than that of the tray using a linear cylinder, so that the clamping precision is higher.

Of course, it is easy to understand that various servo motors can be used for the first driving member 2, so that the clamping force of the clamping jaw 3 can be controlled more accurately.

Optionally, the tray clamping mechanism of the present application may further include a buffer member 4, where the buffer member 4 is disposed at a corner of the base 1 adjacent to the clamping jaw 3, and at least a portion of the buffer member 4 is located on a side of the second surface 12. When the tray clamping mechanism of the present application clamps the tray, the tray needs to be approached along the first direction Z, so that the impact of the tray clamping mechanism of the present application to the tray when the tray is contacted by the base 1 can be buffered when the buffer members 4 are provided at the four corners of the base 1.

Preferably, as can be seen from the foregoing, the base is substantially in the shape of an elongated plate, and therefore, the cushioning members may be provided at four corners of the base. This is because, considering the fact that the tray is clamped and released in practice, the base 1 and the tray are not perfectly parallel, in which case the corners of the base 1 are the first positions to contact and separate from the tray, and the cushioning members 4 are provided at the corners to facilitate the cushioning effect thereof. Of course, in other embodiments, the buffer member may be disposed only at two opposite corners of the base, which is not particularly limited in this embodiment.

Alternatively, the buffer member 4 may be a resilient member such as a spring, a pad made of various rubber or silica gel, or a sponge, and may be freely selected in practice based on the material of the tray, the replaceability, durability, and electrostatic influence of the buffer member 4, which is not particularly limited in this embodiment.

In some embodiments, the tray clamping mechanism may further comprise a limiting structure 5. The limiting structures 5 are arranged on two sides of the base 1 along the third direction X. The limiting structure 5 may be a metal block, for example, arranged along the third direction X on the side of the base 1 where the clamping jaw 3 is not arranged. The limiting structure may be connected to the base 1 by a fastener such as a bolt or a rivet, and when the tray clamping mechanism of the present application clamps the tray, the lower surface of the limiting structure 5 is lower than the upper surface of the tray. Thus, when the tray is clamped, the movement of the tray in the third direction X is prevented by the limiting structure 5, thereby preventing the tray from slipping in the third direction X. It will be appreciated that in other embodiments, the limiting structure 5 may be a protruding portion of the base 1, and the limiting structure 5 is integrally formed with the base, so that in a working scenario with vibration, the limiting structure 5 will not be separated from the base 1 to cause failure.

In some embodiments, the tray clamping mechanism of the present application may further comprise a sensor 6. The sensor 6 is arranged on the base 1 for detecting the clamping condition of the tray. Preferably, the sensors 6 are provided in pairs at both ends or corners of the base 1. Considering that the process of clamping and releasing the tray is not completely parallel in practice, in this case, the corners or two ends of the base 1 are the positions which are firstly contacted with and far away from the tray, the arrangement mode of the sensor 6 is favorable for timely detection when the tray slips and other anomalies occur, and the central control system controls the tray clamping mechanism and the tray carrying equipment to stop.

Illustratively, the sensor may include, but is not limited to, an optoelectronic, capacitive or ultrasonic proximity sensor or other type of proximity sensor, and other sensors capable of identifying whether the tray is successfully clamped, and in practice may be freely selected based on factors such as the material of the tray, the specific working environment, and the influence of light/electricity/magnetism on the tray and the stored products in the tray, which is not particularly limited in this embodiment.

Optionally, in order to facilitate maintenance personnel to timely learn about the clamping condition of the material tray, the sensor 6 may be connected with an alarm device such as a tri-color lamp, and the alarm device may alert maintenance personnel when an abnormality such as slipping of the material tray occurs.

Referring to fig. 4, in a second aspect, the tray conveying apparatus provided in this embodiment includes a frame 7, a first conveying mechanism 8, a second conveying mechanism 9, and the tray clamping mechanism described above. Wherein the frame 7 may include a bracket 71 and a mounting plate 72; the first handling mechanism 8 may comprise a second drive 81 and a transmission assembly 82; the second handling mechanism 9 may include a third drive 91 and a link 92. The bracket 71 is fixed on a mounting base, such as the ground or a milled flat large plate, the mounting plate 72 is connected to the bracket 71, the second driving member 81 is arranged on the mounting plate 72, the transmission assembly 82 is arranged along the third direction X, the transmission assembly is movably connected to the second driving member 81, the third driving member 91 is connected to the transmission assembly 82, and the connecting member 92 is connected to the third driving member 91. The transmission assembly 82 is movable in a third direction X relative to the mounting plate 72 under the drive of the second drive member 81 to move the third drive member 91 in the third direction X. The third driving member 91 is capable of driving the connecting member 92 to move in a first direction Z relative to the mounting plate 72, thereby driving the tray clamping mechanism of the present application to move in the first direction. In this way, the tray can be clamped by the tray clamping mechanism of the application, and is driven to move along the first direction Z by the second carrying mechanism 9, and is driven to move along the third direction X by the first carrying mechanism 8, so that the tray is carried from one place to the other place.

Optionally, the frame 7 may also include a drag chain 73 and a pallet 74. The tray 74 is attached to the mounting plate 72, one end of the drag chain 73 is attached to the tray 74, the other end is attached to the third driving member 91, and the portion between the two ends is placed on the tray 74. The third drive 91 and the circuitry of the tray clamping mechanism of the present application and/or the tubing may be organized and housed within the drag chain 73 such that the circuitry is prevented from being damaged by movement of the first and second handling mechanisms 8, 9 and friction with other hard components. Assuming that the tray 74 is not used to support the drag chain 73, the drag chain 73 naturally hangs down due to gravity, and the first carrying mechanism 8 and the second carrying mechanism 9 move to strike the installation base for many times, or a plurality of small-radius bending parts occur, so that the internal wires and/or the pipelines are subjected to larger bending stress and are easy to fatigue damage for a long time. Particularly, when the pipe includes an air pipe, the small radius bending part may make the air flow pass through abnormally, which affects the normal operation of the parts connected to the air pipe. Providing the tray 74 can prevent this from occurring. It will be readily appreciated that the component to which the air pipe is connected may be the first driving member 2 of the above-described air cylinder.

Alternatively, the second driving member 81 may be a motor, and the transmission assembly 82 may include a timing belt and a guide rail. The timing belt is connected to the motor and the guide rail is provided to the mounting plate 72 in the third direction X. The third driving member 91 is connected to the timing belt and slidably connected to the guide rail. Like this the motor can be through hold-in range drive third driving piece 91, the guide effect of cooperation guide rail for third driving piece 91 moves along third direction X, and then the charging tray clamping mechanism who is connected with third driving piece 91 can follow third direction X and move, thereby the charging tray of being held by charging tray clamping mechanism can follow third direction X. Synchronous belt matched with guide rail is a common transmission mode for converting motor rotation motion into linear motion of load. If the synchronous belt is used alone to drag the load, the load lacks guiding function under the dragging of the synchronous belt because of the elasticity of the synchronous belt, and the motion track of the load is a random curve. By using the scheme provided by the embodiment, the advantage of high-precision transmission of the synchronous belt is brought into play, the gravity of the load is borne by the guide rail, and the synchronous belt only plays a role in dragging, so that the service life of the synchronous belt is prolonged. It is to be readily understood that the load corresponds to the third driving member 91, the tray clamping mechanism to which the driving member 91 is connected, and the tray clamped by the tray clamping mechanism in this embodiment.

Alternatively, the third driving member 91 may be a pneumatic sliding table, a linear motor, or a mechanism that can realize linear motion by combining a rotary motor with a screw mechanism, a rack-and-pinion mechanism, or the like. The rotating motor is matched with other modes for realizing the linear motion mechanism, and the rotating motor generally has the function of power-off self-locking, can self-lock in the face of sudden power-off, gas-off and other conditions, and has higher safety. The pneumatic sliding table is simple in structure, low in cost and convenient to maintain and replace. The linear motor can accurately adjust the stroke of motion and the output force, and has wide application range.

Referring to fig. 5, when the third driving member is a pneumatic sliding table or a linear motor, the third driving member 91 may include a fixed end 911, a sliding end 912 and an elastic member 913. The fixed end 911 is connected with the transmission assembly 82, the sliding end 912 is slidably connected to the fixed end 911, and the tray clamping mechanism of the present application is connected to the sliding end 912 through the connecting piece 92, so as to move along the first direction Z relative to the fixed end 911 under the driving of the sliding end 912. Under the condition that the elastic piece 913 is not arranged, when power failure and gas failure occur suddenly or production personnel operate by mistake, the pneumatic sliding table or the linear motor generally does not have the power failure and gas failure self-locking function, and the sliding end 912 and the tray clamping mechanism of the application drop off from the fixed end 911 to fall on other parts due to the action of gravity. The elastic member 913 is used to connect the fixed end 911 and the sliding end 912, so that the stroke of the sliding end 912 relative to the fixed end 911 in the extreme case can be limited, thereby preventing the sliding end 912 from being separated from the fixed end 911, and causing accidents such as falling and bumping.

Alternatively, the resilient member may include, but is not limited to, a spring, a tension spring, or the like.

The following is a brief description of a process of clamping a tray by the tray clamping mechanism of the present application and carrying the tray by the tray carrying apparatus of the present application:

s1: the material tray is positioned at the material loading position;

s2: the tray clamping mechanism is driven by the first carrying mechanism 8 to move to the position right above the tray, and the clamping jaw 3 is driven by the first driving piece 2 to move to the positive limit;

s3: the tray clamping mechanism is driven by the second carrying mechanism 9 to descend until the buffer piece 4 contacts the tray, and/or the sensor 6 detects that the distance between the tray clamping mechanism and the tray accords with a preset distance; at this time, the tray clamping mechanism is positioned at the loading position;

s4: the clamping jaw 3 is driven by the first carrying mechanism 8 to move towards the negative limit, the third clamping surface 322 moves to the lower side of the material tray, the second clamping surface 321 contacts the material tray, and the first clamping surface 311 contacts the material tray until the first clamping surface 311 clamps the material tray along the first direction Y, and the second clamping surface 321 and the second surface 12 along the second direction Z; after the step is finished, the tray clamping mechanism of the application clamps the tray;

s5: the tray clamping mechanism of the present application holds the tray clamped by the first conveying mechanism 8 and the second conveying mechanism 9, and moves to the discharging position. In the process, the sensor 6 keeps detecting the material tray, and if the material tray is not detected, a signal is sent to enable the central control system to control the stop and enable the alarm equipment to alarm.

S6: the clamping jaw 3 is driven by the first driving piece 2 to move to the positive limit, and the material tray is released. The tray clamping mechanism of the application is driven by the second carrying mechanism 9 to lift up and wait for clamping and taking down the next tray.

The following is an explanation of some nouns in the above steps:

feeding: the preset position of the material taking disc is clamped by the material disc clamping mechanism; in this position, the tray clamping mechanism can be ensured to safely and stably clamp the material tray;

positive limit: a pair of clamping jaws 3 move away from the tray in a first direction Y to a limit position; in this position, it can be ensured that the tray is located between the clamping jaws 3 when the tray clamping mechanism of the application is lowered to the upper level;

preset distance: when the preset tray clamping mechanism clamps the material taking tray, the distance between the second surface 12 and the upper surface of the material taking tray is kept. Within a certain range of the distance, the clamping jaw 3 can be ensured to clamp the tray, and the base 1 cannot crush the tray to be clamped;

negative limit: the pair of jaws 3 moves in the first direction Y close to the tray to the extreme position. In this position, it can be ensured that the clamping jaw 3 clamps the tray;

the following materials: the position of the release tray is preset. At this position, can guarantee the position that the charging tray released, can not too high fall the charging tray promptly, can link up the subsequent process again.

It should be noted that, for the sake of understanding, the foregoing numbers and lists the processes for clamping the tray by the tray clamping mechanism according to the present application, but the foregoing processes do not represent that the tray clamping mechanism according to the present application must operate in the exact order described. In practice, the order of the steps may be configured according to actual needs, or several steps in the foregoing may be combined, split, deleted, or steps not mentioned in the foregoing may be inserted.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present application, and not for limiting the same; although the application has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the application.

Claims (10)

1. A tray clamping mechanism is characterized by comprising

A base;

the first driving piece is arranged on the base;

the clamping jaw comprises a clamping main body part and an extension part, one end of the clamping main body part is connected with the first driving piece, and the extension part is connected with one end of the clamping main body part, which is far away from the first driving piece;

the first driving piece is used for driving the clamping jaw to move along a first direction of the base so as to enable the clamping main body part to clamp the tray along the first direction and enable the extending part to clamp the tray along the second direction respectively;

wherein the second direction intersects the first direction.

2. The tray clamping mechanism of claim 1 wherein said jaws are arranged in pairs and are symmetrically located on opposite sides of said base along said first direction;

each jaw is driven by a separate first driving member.

3. The tray clamping mechanism of claim 1, wherein the clamping body portion includes a first clamping surface having a normal vector parallel to the first direction, the first clamping surface for connecting with the tray for clamping the tray in the first direction;

the extension portion comprises a second clamping surface and a third clamping surface, the second clamping surface is connected with the first clamping surface and the third clamping surface and is located between the first clamping surface and the third clamping surface, the normal vector of the second clamping surface is coplanar with the first direction and is used for clamping the tray along the second direction, and the third clamping surface is used for auxiliary clamping the tray along the second direction.

4. A tray clamping mechanism according to claim 3 wherein the base comprises a first surface and a second surface along the first direction, the first drive member being disposed on the first surface, the third clamping surface being parallel to the second surface and forming a clamping gap with the second surface for clamping the tray;

the tray clamping mechanism further comprises a buffer piece, the buffer piece is arranged at the corner of the base, which is close to the clamping jaw, the buffer piece is at least partially arranged on the side of the second surface, and the buffer piece is used for being in contact with the tray so as to buffer the clamping impact action of the base on the tray.

5. The tray clamping mechanism of claim 1, further comprising a limit structure disposed on the base, the limit structure for limiting a position of the tray in a third direction;

the third direction intersects with the first direction and the second direction in pairs.

6. The tray clamping mechanism of claim 1, further comprising sensors disposed in pairs at both ends of the base for detecting a clamping condition of the tray.

7. A tray conveying device, characterized in that the tray conveying mechanism comprises a frame, a first conveying mechanism, a second conveying mechanism and a tray clamping mechanism according to any one of claims 1 to 6, wherein the first conveying mechanism is arranged on the frame, the first conveying mechanism can move along a third direction relative to the frame, the second conveying mechanism is connected with the first conveying mechanism, the second conveying mechanism can move along a second direction relative to the base, and the tray clamping mechanism is fixedly connected with the second conveying mechanism so as to move along the second direction under the drive of the second conveying mechanism and move along the third direction under the drive of the first conveying mechanism.

8. The tray handling apparatus of claim 7, wherein the rack comprises a bracket and a mounting plate, the mounting plate being connected to the bracket;

the first carrying mechanism comprises a second driving piece and a transmission assembly, the second driving piece is arranged on the mounting plate, and the transmission assembly is connected with the second driving piece so as to move along the third direction under the driving action of the second driving piece;

the second carrying mechanism comprises a third driving piece and a connecting piece, the driving structure is connected to the transmission assembly, the tray clamping mechanism is connected with the third driving piece through the connecting piece, and the third driving piece is used for driving the tray clamping mechanism to move along the second direction.

9. The tray handling device of claim 8, wherein the rack further comprises a drag chain and a tray, the tray being disposed on the mounting plate and extending in the third direction, one end of the drag chain being connected to the third driving member, and the other end of the drag chain being connected to the tray such that the drag chain is at least partially located on the tray.

10. The tray handling apparatus of claim 8, wherein the third drive member comprises a fixed end, a sliding end, and an elastic member;

the fixed end is connected with the transmission assembly, the sliding end is slidably connected with the fixed end, and the tray clamping mechanism is connected with the sliding end so as to move along the second direction relative to the fixed end under the drive of the sliding end;

the elastic piece is connected between the sliding end and the fixed end and is used for limiting the sliding travel of the sliding end relative to the fixed end.