CN218619043U

CN218619043U - Tray grabbing mechanism and equipment

Info

Publication number: CN218619043U
Application number: CN202222671112.2U
Authority: CN
Inventors: 肖治祥; 朱涛; 商秋锋; 叶坤
Original assignee: Wuhan Jingce Electronic Group Co Ltd; Suzhou Hirose Opto Co Ltd
Current assignee: Wuhan Jingce Electronic Group Co Ltd; Suzhou Hirose Opto Co Ltd
Priority date: 2022-10-11
Filing date: 2022-10-11
Publication date: 2023-03-14
Anticipated expiration: 2032-10-11

Abstract

The utility model discloses a charging tray snatchs mechanism, including snatching the unit, it includes mounting platform, mounting panel, clamping jaw driving source and clamping jaw to snatch the unit, the clamping jaw driving source sets up mounting platform is last, the clamping jaw sets up the free end of clamping jaw driving source, the clamping jaw is including two single claws that each other is the mirror image, the tip of single claw is from outside to inside has set gradually two at least claws that length reduces gradually, the bottom of mounting panel is provided with the clamp plate, the clamp plate is located two single claw between the claw. And an apparatus using the tray gripping mechanism. The utility model discloses a with compatible mechanism and equipment that can realize not unidimensional charging tray, simple structure and easily control, low to the requirement of control accuracy, very big reduction in cost to can effectually prevent that the material from breaking away from the check groove and scattering.

Description

Tray grabbing mechanism and equipment

Technical Field

The utility model relates to a material tray grabbing mechanism, which is mainly applied to the rapid transportation of semiconductor materials loaded in a material tray and belongs to the technical field of semiconductors; still relate to an equipment that uses this kind of charging tray to snatch mechanism.

Background

In the field of testing of semiconductors, display, new energy and the like, materials to be tested are generally placed in a material tray to circulate. Taking the wafer production process as an example, the wafer inspection process is indispensable, and it often relates to the reliability and accuracy of the subsequent use of the wafer. After the wafer is cut into crystal grains, the crystal grains are loaded in the grooves of the tray, and the tray is generally grabbed by a manipulator and then conveyed to a detection station. When the crystal grain is automatically and optically detected, the specific surface of the crystal grain needs to be detected, so that the orientation of the crystal grain in the process of carrying the crystal grain is turned over or separated, and the subsequent detection process is adversely affected. And the crystal grains are easy to separate from the groove lattice and scatter due to reasons such as vibration or lifting speed change and the like in the carrying process of the material tray, so that the material loss influences the smooth operation of the detection work. In addition, due to product diversity, in order to meet the requirement of transferring materials in different batches, the sizes of material trays are various, the existing grabbing mechanism generally clamps the material trays with different sizes through the relative movement of a pair of clamping jaws, but the size difference between a large material tray and a small material tray is usually larger, the distance difference of the relative movement of the clamping jaws is overlarge, the complexity and the control precision requirement of the grabbing mechanism are increased, and the current market can contain less long-stroke clamping jaws within the range, so that the price is extremely high.

SUMMERY OF THE UTILITY MODEL

In view of the above-mentioned deficiencies of the prior art, the object of the present invention is to: the utility model provides a simple structure, with low costs, compatible high, the fast charging tray of conveying speed snatchs mechanism and equipment, this charging tray snatchs mechanism and equipment, can realize the compatibility of unidimensional charging tray, and simple structure and easily control are low to control accuracy's requirement, very big reduce cost to can effectually prevent that the material from breaking away from the check groove and scattering, snatch the transport more stably.

In order to realize the purpose of the utility model, the utility model provides a following technical scheme:

the utility model provides a charging tray snatchs mechanism, is including snatching the unit, it includes mounting platform, mounting panel, clamping jaw driving source and clamping jaw to snatch the unit, the clamping jaw driving source sets up mounting platform is last, the clamping jaw sets up the free end of clamping jaw driving source, the clamping jaw is including two single claws that are each other mirror image, the tip of single claw has set gradually two at least claw portions that length reduces gradually from outside to inside, the bottom of mounting panel is provided with the clamp plate, the clamp plate is located two single claw between the claw portion. The vertical movement type two-dimensional movement device has the beneficial effects that when the vertical movement type two-dimensional movement device works, the two-dimensional movement unit can drive the mounting platform to freely move on a vertical surface. When the material tray needs to be grabbed, the claw parts with corresponding intervals are selected according to the size of the material tray, then the pressing plates with corresponding sizes are selected, and the pressing plates are installed on the installation plate. The two-dimensional motion unit moves the pressing plate and the clamping jaws to be right above the material tray, and then drives the pressing plate and the clamping jaws to descend. During the descending process, the pressing plate firstly contacts the material tray and covers all the grid grooves for storing the materials. The two-dimensional driving unit continues to drive the clamping jaws to descend, the pressing plate gradually approaches the mounting platform and is pressed on the material tray all the time under the action of elastic force, and when the selected claw parts reach two sides of the material tray, the descending is stopped. At the moment, the clamping jaw driving source drives the two single jaws of the clamping jaw to approach each other, and the two selected jaws are clamped on two sides of the material tray to realize the grabbing of the material tray. After that, the two-dimensional motion unit can rapidly move the material tray on the vertical surface in any direction and at any speed, and the situation that the materials fall out of the grid groove under the action of inertia force is not needed to be worried. When a material tray with a smaller size is used, the descending depth is only required to be increased, the two claw parts which are closer to each other are descended to the two sides of the material tray, and the pressing plate needs to be quickly replaced by the pressing plate with a smaller size. The device realizes the compatibility of the charging trays with different sizes, has simple structure and easy control, and can realize the gripping of the charging trays with different sizes only by driving the clamping jaw driving source for a fixed distance without adopting a complex gripping mechanism and requiring extremely high control precision, thereby greatly reducing the cost; and can effectually prevent that the material from breaking away from the check groove and scattering, snatch the transport more stable.

The claw arms of the two single claws extend towards opposite directions, the end parts of the single claws are sequentially provided with a first claw part, a second claw part and a third claw part from outside to inside along the vertical direction, and the lengths of the first claw part, the second claw part and the third claw part are gradually reduced. The material tray clamping device has the advantages that when the first claw part grabs the material tray, the second claw part and the third claw part are positioned above the material tray and do not interfere with the material tray; when the second claw part grabs the material tray, the first claw part is positioned at two sides of the material tray, and the third claw part is positioned above the material tray and does not interfere with the material tray; when the third claw part grabs the material tray, the first claw part and the second claw part are positioned on two sides of the material tray and do not interfere with the material tray. The three-dimensional material tray is compatible by using a simple structure, the complexity of the motion logic and the requirements on the motion precision of the whole device are greatly reduced, and the cost is reduced.

Grooves are formed in the end portions of the first claw portion, the second claw portion and the third claw portion. The material tray clamping device has the beneficial effects that when the clamping jaw descends, the groove of the corresponding claw part is positioned above the material tray, when the clamping jaw descends, the material tray supporting platform with the lifting capacity is matched, the material tray is pressed down by the top surface of the groove, and the damage to materials caused by pressing other claw parts on the material tray is avoided. When the material tray does not descend excessively, the claw driving source drives the claw parts to fold, and the side walls of the grooves are clamped on two sides of the material tray. Which improves the reliability of the jaws.

The locating hole is seted up to one side of mounting panel, the installation adsorbs the piece in the locating hole, one side of clamp plate is provided with the locating pin, the locating pin adsorb in the locating hole. The novel pressure plate has the beneficial effects that when pressure plates with different sizes are replaced, the positioning pins of the original pressure plates are directly pulled out and taken away from the positioning holes, and the positioning pins of the new pressure plates are inserted into the positioning holes, so that the replacement can be completed, the replacement speed is high, and the reliability is high.

Wear to be equipped with the slide bar on the mounting platform, the mounting panel sets up the one end of slide bar, the mounting panel with between the mounting platform be provided with the elastic component that is in compression state on the slide bar, the other end of slide bar is provided with spacing cap. The material tray has the beneficial effects that the elastic piece can enable the mounting plate to always have the trend of moving downwards, and further enable the pressing plate on the mounting plate to be always attached to the material tray. The slide bar can provide even flexible guiding force, avoids the card to pause. The limiting cap can prevent the sliding rod from being separated.

The elastic piece is a spring. The beneficial effects are that the cost is low, the use reliability is high and the service life is long.

The mounting platform is arranged at the free end of the two-dimensional motion unit. The two-dimensional moving unit can drive the grabbing unit to realize free movement in the X direction and the Z direction so as to grab the discharging disc.

The two-dimensional motion unit includes first line driving source, first spacing track, second line driving source, the spacing track of second and support, first line driving source is fixed in on the first spacing track, the second line driving source set up in on the spacing track of second, and with first spacing track sliding connection, the second linear driving source with the one end of first line driving source is connected, the support slides and sets up on the spacing track of second, and with the one end of second line driving source is connected. The X-axis and Z-axis movable support has the advantages that free movement in a vertical plane determined by the X-axis and the Z-axis is achieved.

The support is provided with an induction sheet, the second limiting rail is sequentially provided with a plurality of sensors, and the lifting path of the induction sheet passes through the sensors and is used for indicating the lifting height of the support. The device has the advantages that the device provides position information for the lifting and grabbing processes, and the reliability of the device is improved.

A material tray grabbing device comprises the material tray grabbing mechanism. The clamping jaw driving source has the advantages that the compatibility of the charging trays with different sizes is realized, the structure is simple, the control is easy, the clamping jaw driving source can realize the clamping for the charging trays with different sizes only by driving the charging trays with different sizes for a fixed distance, a complex clamping mechanism is not needed, the control precision is not required to be extremely high, and the cost is greatly reduced; and can effectually prevent that the material from breaking away from the check groove and scattering, snatch the transport more stable.

Compared with the prior art, the beneficial effects of the utility model are that:

the utility model realizes the compatibility of the charging trays with different sizes, has simple structure and easy control, and the clamping jaw driving source can realize the gripping only by driving the fixed distance for the charging trays with different sizes without adopting a complex gripping mechanism and requiring extremely high control precision, thereby greatly reducing the cost; and can effectually prevent that the material from breaking away from the check groove and scattering, snatch the transport more stable.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly described below, and it is obvious that the drawings described below are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic structural view of a tray gripping mechanism according to a first embodiment of the present invention;

fig. 2 is a left side view schematically illustrating a grabbing unit according to an embodiment of the present invention.

Reference numerals: 10-a first wire driving source, 11-a first limit rail, 13-a second wire driving source, 14-a second limit rail, 15-a bearing, 16-a screw rod, 17-a linear slide rail, 18-a bracket, 20-a sensing sheet, 21-a first sensor, 22-a second sensor, 23-a third sensor, 30-a mounting platform, 31-a slide rod, 32-a limit cap, 33-an elastic piece, 34-a mounting plate, 35-a pressing plate, 40-a clamping jaw driving source, 41-a clamping jaw, 42-a first claw part, 43-a second claw part, 44-a third claw part, 45-a groove, 50-a material plate and 51-a grid groove.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely below, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

The first embodiment is as follows:

as shown in fig. 1 and 2, the present embodiment discloses a tray gripping mechanism including a two-dimensional movement unit and a gripping unit. The gripper unit includes a mounting platform 30, a mounting plate 34, a jaw drive source 40, and jaws 41. The mounting platform 30 is disposed at the free end of the two-dimensional motion unit. The mounting plate 34 is vertically slidably disposed at the bottom of the mounting platform 30. A resilient member 33 is provided between the mounting plate 34 and the mounting platform 30. A jaw drive source 40 is provided on the mounting platform 30. A jaw 41 is provided at the free end of the jaw drive source 40. The clamping jaw 41 comprises two single jaws which are mirror images of each other. The bottom of the single claw is sequentially provided with at least two claw parts with gradually reduced length from outside to inside. The bottom of the mounting plate 34 is provided with a pressure plate 35, the pressure plate 35 being located between the jaws of the two single jaws. In operation, the two-dimensional motion unit can drive the mounting platform 30 to move freely on a vertical plane. When the tray 50 needs to be grabbed, the claw parts with corresponding intervals are selected according to the size of the tray 50, then the pressing plate 35 with corresponding size is selected, and the pressing plate 35 is installed on the installation plate 34. The two-dimensional motion unit moves the platen 35 and the gripping jaws 41 directly above the tray 50, and then drives the platen 35 and the gripping jaws 41 down. During the lowering process, the platen 35 first contacts the tray 50 and covers all the pockets 51 where material is stored. The two-dimensional driving unit continues to drive the clamping jaws 41 to descend, the pressing plate 35 gradually approaches the mounting platform 30 and is pressed on the tray 50 all the time under the action of elastic force, and the descending is stopped when the selected claw parts reach the two sides of the tray 50. At this time, the jaw driving source 40 drives the two single jaws of the jaw to approach each other, and the two selected jaws clamp the two sides of the tray 50, so as to realize the gripping of the tray 50. Thereafter, the two-dimensional movement unit can rapidly move the tray 50 in any direction and speed on the vertical plane without worrying about the falling of the material out of the cell 51 by the inertia force. When a tray 50 with a smaller size is used, the descending depth is only required to be increased, two claw parts which are closer to each other are made to descend to two sides of the tray 50, and the pressing plate 35 needs to be quickly replaced by the pressing plate 35 with a smaller size. The device realizes the compatibility of the charging trays 50 with different sizes, has simple structure and easy control, and for the charging trays 50 with different sizes, the clamping jaw driving source 40 can realize the gripping only by driving for a fixed distance without adopting a complex gripping mechanism and requiring extremely high control precision, thereby greatly reducing the cost; and can effectually prevent that the material from breaking away from lattice groove 51 and scattering, snatch the transport more stable.

Specifically, the two-dimensional movement unit includes a first wire driving source 10, a first stopper rail 11, a second wire driving source 13, a second stopper rail 14, and a bracket 18. The first line drive source 10 and the first limit track 11 are fastened together. The first stopper rail 11 is in a horizontal direction, i.e., an X-axis direction. The second wire drive source 13 and the second limit rail 14 are fastened together, slidably disposed on the first limit rail 11, and connected to the free end of the first wire drive source 10. The second limit rail 14 is in the vertical direction, i.e., the Z-axis direction. The X-axis and Z-axis define a vertical plane. The bracket 18 is slidably disposed on the second limit rail 14 and is connected to the free end of the second wire drive source 13. Which allows free movement in a vertical plane defined by the X-axis and the Z-axis.

In a preferred embodiment of the present invention, the first limit rail 11 includes a bearing 15 and a linear guide 17 fastened together. A screw 16 is rotatably provided in the bearing 15. The screw 16 and the linear guide 17 are both along the X-axis direction. One end of the lead screw 16 is connected to the free end of the first wire drive source 10. The first line driving source 10 and the first limit rail 11 are slidably disposed on the linear guide 17. Threaded holes are formed in the first wire driving source 10 and the first limiting rail 11. The threaded hole is sleeved on the screw rod 16. The first linear driving source 10 drives the screw rod 16 to rotate, and the screw rod 16 is matched with the threaded hole, so that the linear motion of the first linear driving source 10 and the first limiting track 11 in the X-axis direction is realized.

In a preferred embodiment of the present invention, the second limit rail 14 includes a bearing 15 and a linear guide 17 fastened together. A screw 16 is rotatably provided in the bearing 15. The screw 16 and the linear guide 17 are both along the Z-axis direction. One end of the screw 16 is connected to the free end of the second wire driving source 13. The bracket 18 is slidably disposed on the linear guide 17. The bracket 18 is provided with a threaded hole. The threaded hole is sleeved on the screw rod 16. The second wire driving source 13 drives the screw rod 16 to rotate, and the screw rod 16 is matched with the threaded hole to realize the linear motion of the bracket 18 in the Z-axis direction.

The bracket 18 is provided with a sensing piece 20. A plurality of sensors are arranged on the second limiting rail 14 from bottom to top, and the lifting path of the induction sheet 20 passes through the sensors and is used for indicating the lifting height of the bracket 18.

Specifically, the sensors include a first sensor 21, a second sensor 22, and a third sensor 23 provided in this order from the bottom. The first sensor 21 is used to indicate the maximum lowering height, the third sensor 23 is used to indicate the maximum raising height and the second sensor 22 is used to indicate the working height. When the sensing piece 20 reaches the position of the first sensor 21, the sensing piece is not descended; when the sensing piece 20 reaches the position of the third sensor 23, the sensing piece does not ascend any more; when the working height is indicated, because the working heights of the different claw parts are different, a fence can be arranged on the induction sheet 20, and the distance between the fences is consistent with the length difference between the two adjacent claw parts; or by using the edges of the sensing piece 20 to indicate the working height of the different jaws.

The cross section of the mounting platform 30 is L-shaped. The mounting platform 30 is secured to the bracket 18 on one side and is horizontal on the other side. The mounting platform 30 is provided with a sliding rod 31 on a horizontal surface. A mounting plate 34 is provided at the bottom end of the slide bar 31. A resilient member 33 is provided in compression on the slide bar 31 between the mounting plate 34 and the mounting platform 30. The elastic member 33 can make the mounting plate 34 always have a downward movement tendency, so that the pressing plate 35 thereon is always attached to the tray 50. Preferably, the elastic member 33 is a spring.

The four slide rods 31 are respectively positioned at four sides of the mounting plate 34. It can improve even flexible guiding force, avoids the card to pause.

In a preferred embodiment of the present invention, a limiting cap 32 may be disposed on the top end of the sliding rod 31 to prevent the sliding rod 31 from being disengaged. The outer diameter of the limit cap 32 is larger than that of the slide rod 31.

In order to increase the speed of replacing the pressing plate 35, a positioning hole may be formed in the bottom of the mounting plate 34, and a suction member may be disposed in the positioning hole. The top of the pressure plate 35 is provided with a positioning pin. The positioning pin is absorbed in the positioning hole. When the pressing plate 35 with different sizes is replaced, the positioning pin of the original pressing plate 35 is directly pulled out of the positioning hole and taken away, and the new positioning pin of the pressing plate 35 is inserted into the positioning hole, so that the replacement can be completed, the replacement speed is high, and the reliability is high. Preferably, the adsorption piece has magnetism, and the locating pin is metal or magnetite.

The jaw drive source 40 is disposed at the bottom of the mounting platform 30 and between the slide bars 31. The clamping jaw 41 comprises two single jaws which are mirror images of each other. The claw arms of the two single claws extend in opposite directions. The bottom of the single claw is provided with a first claw part 42, a second claw part 43 and a third claw part 44 in sequence from outside to inside along the vertical direction. The lengths of the first claw portion 42, the second claw portion 43, and the third claw portion 44 gradually decrease. When the first claw part 42 grabs the tray 50, the second claw part 43 and the third claw part 44 are positioned above the tray 50, and do not interfere with the tray 50; when the second claw parts 43 grab the tray 50, the first claw parts 42 are positioned at two sides of the tray 50, and the third claw parts 44 are positioned above the tray 50, so that the interference on the tray 50 is avoided; when the third claw part 44 grabs the tray 50, the first claw part 42 and the second claw part 43 are positioned at two sides of the tray 50, and do not interfere with the tray 50. The three-size material tray 50 is compatible by using a simple structure, the complexity of the motion logic and the requirements of the motion precision of the whole device are greatly reduced, and the cost is reduced.

In a preferred embodiment of the present invention, the bottom of the first claw portion 42, the bottom of the second claw portion 43, and the bottom of the third claw portion 44 are all provided with a groove 45. The groove 45 extends from the bottom surfaces to the inner side surfaces of the first claw portion 42, the second claw portion 43, and the third claw portion 44. When the clamping jaws 41 descend, the grooves 45 of the corresponding claw parts are positioned above the material tray 50, when the clamping jaws descend, the grooves are matched with the material tray 50 bearing platform with lifting capacity, the material tray 50 can be pressed down by the top surfaces of the grooves 45, and the material is prevented from being damaged due to the fact that other claw parts are pressed on the material tray 50. When the material tray 50 does not descend too much, the claw driving source 40 drives the claw parts 42 to close, and the side walls of the grooves 45 are clamped on two sides of the material tray 50. Which improves the reliability of the clamping jaw 41.

In a preferred embodiment of the present invention, the jaw driving source 40 is a jaw cylinder. The clamping jaw air cylinder is only used for realizing action, the structure is simple and easy to control, and if the clamping jaw air cylinder is realized by other modes such as a motor, the structure and the control mode are complex.

The mechanism is snatched to charging tray that this embodiment provided is when carrying out the during operation:

the platen 35 corresponding to the size of the tray 50 of the lot to be worked is selected and the platen 35 is mounted to the bottom of the mounting plate 34. The claw portion corresponding to the size of the tray 50 of the lot to be worked is selected, and the descent height is set. The first wire drive source 10 drives the gripper 41 to move in the X-axis direction above the tray 50. The second wire driving source 13 drives the chuck jaws 41 downward in the Z-axis direction. In the process of descending the holding jaws 41, the pressing plate 35 first contacts the tray 50, and is retracted toward the mounting plate 34 as the holding jaws 41 continue to descend, and remains attached to the tray 50. When the corresponding claw parts descend to the two sides of the tray 50, the descending is stopped. The jaw drive source 40 drives the two single jaws of the jaw 41 towards each other until the jaws grip on the tray 50. The second wire driving source 13 drives the clamping jaws 41 to ascend along the Z-axis direction to enable the tray 50 to be separated from the home position, the first wire driving source 10 drives the clamping jaws 41 to move to the position above the position for releasing the tray 50 along the X-axis direction, the second wire driving source 13 drives the clamping jaws 41 to descend along the Z-axis direction to enable the tray 50 to reach the position for releasing the tray 50, and the clamping jaw driving source 41 drives the two single jaws to be far away to release the tray 50. All mechanisms are reset, and the next grabbing is continued.

The second embodiment:

the embodiment discloses a tray grabbing device which comprises a tray grabbing mechanism in the first embodiment.

Specifically, the first wire drive source 10 and the first stopper rail 11 are fastened to a frame of the apparatus. The device is internally provided with a feeding position and a discharging position for supporting the material tray 50. In operation, the tray gripping mechanism transfers the tray 50 from the loading position to the unloading position.

It should be noted that the X direction and the Z direction used in the above description are only for convenience of describing the relative relationship between the moving directions, and do not represent the spatial division on the horizontal plane, that is, the X direction may represent a direction parallel to the horizontal plane, or may represent a direction forming a certain inclination angle with the horizontal plane.

It is right above the utility model provides a charging tray snatchs mechanism and equipment and has introduced in detail, and it is right to have used specific individual example herein the utility model discloses a structure and theory of operation have explained, and the explanation of above embodiment is only used for helping to understand the utility model discloses a method and core thought. It should be noted that, for those skilled in the art, without departing from the principle of the present invention, the present invention can be further modified and modified, and such modifications and modifications also fall within the scope of the appended claims.

Claims

1. The utility model provides a mechanism is snatched to charging tray, its characterized in that, including snatching the unit, it includes mounting platform (30), mounting panel (34), clamping jaw driving source (40) and clamping jaw (41) to snatch the unit, clamping jaw driving source (40) set up on mounting platform (30), clamping jaw (41) set up the free end of clamping jaw driving source (40), clamping jaw (41) are including two single claws that are each other the mirror image, the tip of single claw is provided with two at least claw portions that length reduces gradually, the bottom of mounting panel (34) is provided with clamp plate (35), clamp plate (35) are located two single claw between the claw portion.

2. The tray gripping mechanism according to claim 1, wherein the claw arms of the two single claws extend in opposite directions, the end of the single claw is provided with a first claw part (42), a second claw part (43) and a third claw part (44), and the lengths of the first claw part (42), the second claw part (43) and the third claw part (44) are gradually reduced.

3. The tray grabbing mechanism according to claim 2, characterized in that the ends of the first claw part (42), the second claw part (43) and the third claw part (44) are all provided with grooves (45).

4. The tray grabbing mechanism according to claim 1, wherein one side of the mounting plate (34) is provided with a positioning hole, an adsorbing member is arranged in the positioning hole, and one side of the pressing plate (35) is provided with a positioning pin which is adsorbed in the positioning hole.

5. The tray grabbing mechanism according to claim 1, characterized in that a sliding rod (31) is arranged on the mounting platform (30) in a penetrating manner, the mounting plate (34) is arranged at one end of the sliding rod (31), an elastic member (33) in a compressed state is arranged on the sliding rod (31) between the mounting plate (34) and the mounting platform (30), and a limiting cap (32) is arranged at the other end of the sliding rod (31).

6. Tray handling mechanism according to claim 5, characterized in that the resilient member (33) is a spring.

7. The tray gripping mechanism according to claim 1, characterized by comprising a two-dimensional moving unit, the mounting platform (30) being arranged at the free end of the two-dimensional moving unit.

8. The tray gripping mechanism according to claim 7, wherein the two-dimensional movement unit comprises a first wire driving source (10), a first limit rail (11), a second wire driving source (13), a second limit rail (14), and a bracket (18), the first wire driving source (10) is fixed on the first limit rail (11), the second wire driving source (13) is arranged on the second limit rail (14) and is slidably connected with the first limit rail (11), the second wire driving source is connected with one end of the first wire driving source (10), and the bracket (18) is slidably arranged on the second limit rail (14) and is connected with one end of the second wire driving source (13).

9. The tray gripping mechanism according to claim 8, characterized in that the bracket (18) is provided with a sensing plate (20), and the second limit track (14) is provided with a plurality of sensors in sequence.

10. A tray gripping device, characterized by comprising a tray gripping mechanism according to any of claims 1-9.