CN117091535B - Multi-mode integrated laser measuring head device and measuring method thereof - Google Patents
Multi-mode integrated laser measuring head device and measuring method thereof Download PDFInfo
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- CN117091535B CN117091535B CN202311085135.8A CN202311085135A CN117091535B CN 117091535 B CN117091535 B CN 117091535B CN 202311085135 A CN202311085135 A CN 202311085135A CN 117091535 B CN117091535 B CN 117091535B
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- 238000000034 method Methods 0.000 title claims abstract description 21
- 238000005259 measurement Methods 0.000 claims abstract description 61
- 230000007246 mechanism Effects 0.000 claims abstract description 24
- 238000003384 imaging method Methods 0.000 claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 19
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 22
- 229910052742 iron Inorganic materials 0.000 claims description 11
- 230000008569 process Effects 0.000 claims description 9
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- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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Abstract
The invention discloses a multimode integrated laser measuring head device and a measuring method thereof; the device comprises a substrate, a point laser, a collimation lens barrel, an imaging mechanism, a light beam switching mechanism and a first magnetic mounting seat; the point laser, the collimating lens barrel, the first magnetic mounting seat and the imaging mechanism are all fixed on the substrate; the point laser, the collimating lens barrel and the first magnetic mounting seat are sequentially arranged along the laser emission direction of the point laser; the imaging mechanism is used for imaging the light beam reflected from the measured workpiece; the beam switching mechanism comprises a plurality of quick-release lens barrel units; each quick-release lens barrel unit corresponds to one measuring lens barrel and is used for switching measuring modes. The invention is characterized in that a plurality of quick-release lens barrel units are arranged; and the device is fixed on the substrate in a magnetic attraction mode, so that the rapid switching among three measurement modes of diffuse reflection wide light spots, diffuse reflection fine light spots and specular reflection is realized, the measurement application range of the laser measuring head is effectively expanded, the measurement flexibility is increased, and the measurement cost is reduced.
Description
Technical Field
The invention belongs to the technical field of laser non-contact precision measurement, and particularly relates to a multi-mode integrated laser measuring head device and a measuring method thereof.
Background
In the field of machine manufacturing, the geometry and shape of a part are often important indicators of its quality and performance. For example, in the automotive field, the size and shape of the engine block is critical to the performance and life of the engine; in the aerospace field, the size and shape of aircraft parts directly affect their flight safety and performance; in the field of electronic device manufacturing, the size and shape of microelectronic chips determine their electrical performance and reliability. Therefore, in order to ensure that the part performs its intended function, precise inspection of its geometry and shape is required. At present, the main modes of product geometric dimension and shape detection are divided into two types of contact type and non-contact type, wherein the laser non-contact type measurement mode has the advantages of rapidness, no contact force, continuous improvement of measurement precision and the like, and is the development trend of part geometric dimension and shape detection technology.
The surfaces of parts made of different materials have different optical reflection characteristics, such as the surfaces of parts made of common plastics, rubber, ceramics and the like generally have diffuse reflection characteristics; the surfaces of glass, crystal, glossy plastic and other parts generally have specular reflection characteristics. On parts of the same material, the surfaces obtained by different processing methods have different optical reflection characteristics, for example, rough processed surfaces on metal parts generally have diffuse reflection characteristics, and finished surfaces, for example, surfaces after grinding and polishing generally have specular reflection characteristics. The measurement of surfaces with different optical reflection characteristics requires the use of different types of laser probes.
For surfaces with the same optical reflection characteristics, when the measurement requirements are different, different types of laser probes are also required, for example, for parts with diffuse reflection surfaces, if the overall shape of the part surface needs to be obtained, a wide-spot laser probe is required, and the effect of fine and uneven surfaces can be homogenized by a wide spot, so that stable measurement on a rough surface is facilitated. If fine structures on the part are to be acquired, such as the height of the array foot on the IC chip, a fine spot laser gauge head is required.
With the development of manufacturing industry, in order to realize complex functions and excellent performances, the shape and surface characteristics of mechanical parts are increasingly complex, and various different types of surfaces may be integrated on the same part, so as to ensure the function realization of the part, and the measurement requirement is developed toward diversification. The current method for solving the requirement of laser non-contact multi-element measurement is mainly a measuring head switching method, namely, different types of commercial laser measuring heads are respectively used for different types of surfaces and different measurement requirements. For example, keyence LK-H025 laser measuring head can be used to measure the whole shape of diffuse reflection surface; measuring the detail structure of the diffuse reflection surface, wherein a Keyence LK-H020 type laser measuring head can be adopted; the measuring mirror surface emitting surface can adopt a Keyence LK-H027K type laser measuring head.
The switching method can realize the requirement of laser non-contact diversified measurement, but has some problems and disadvantages: (1) Different measurement requirements require the use of different laser probes, resulting in increased measurement costs; (2) The disassembly and clamping of the plurality of laser measuring heads and the calibration of the pose of the sensor require time, so that the measurement efficiency is directly affected; (3) The data obtained by the plurality of laser measuring heads are required to be fused, and a multi-sensor repositioning error is introduced during fusion, so that the measurement accuracy is affected.
Disclosure of Invention
The invention aims to provide a multimode integrated laser measuring head device and a measuring method thereof
In a first aspect, the present invention provides a multimode integrated laser gauge head device, which includes a substrate, a point laser, a collimating lens barrel, an imaging mechanism, a beam switching mechanism, and a first magnetic mounting seat; the point laser, the collimating lens barrel, the first magnetic mounting seat and the imaging mechanism are all fixed on the substrate; the point laser, the collimating lens barrel and the first magnetic mounting seat are sequentially arranged along the laser emission direction of the point laser; the imaging mechanism is used for imaging the light beam reflected from the surface of the tested workpiece;
the light beam switching mechanism comprises a plurality of quick-release lens barrel units. The quick-release lens barrel unit comprises a magnetic mounting block and a measuring lens barrel; the lens structures in the measuring lens barrels in the different quick-release lens barrel units are different and are used for different measuring modes. The measuring lens barrel is adsorbed on the first magnetic mounting seat through the magnetic mounting block; the magnetic attraction mounting block and the first magnetic attraction mounting seat are provided with positioning structures matched with each other.
When the magnetic mounting block in one quick-release lens barrel unit is adsorbed on the first magnetic mounting seat, the point laser, the collimating lens barrel and the measuring lens barrel in the quick-release lens barrel unit are arranged into a straight line; after passing through the collimating lens barrel and the measuring lens barrel in turn, the laser emitted by the point laser is reflected at the workpiece, and the reflected light rays are emitted to the imaging mechanism.
Preferably, the number of the quick-release lens barrel units is three; the measuring lens barrels in the three quick-release lens barrel units are a cylindrical lens barrel, a focusing lens barrel and a deflection lens barrel respectively; the cylindrical lens barrel is used for converting the laser beam emitted by the point laser into a laser beam with an elliptical cross section, irradiating the laser beam on the surface of the workpiece to be detected and generating diffuse reflection; the diameter of the long axis of the cross section of the laser beam with the elliptic cross section is 1000-2000 mu m, and the diameter of the short axis is 50-70 mu m; the focusing lens barrel is used for focusing the laser beam emitted by the point laser into a laser beam with a circular cross section, irradiating the laser beam on the surface of the tested workpiece and generating diffuse reflection; the diameter of the cross section of the laser beam with the circular cross section is 25-50 mu m; the deflection lens barrel is used for deflecting the laser beam emitted by the point laser by a preset angle and then irradiating the laser beam on the surface of the tested workpiece (16), and the laser beam is subjected to specular reflection.
Preferably, the lens in the cylindrical lens barrel is a cylindrical convex lens; the lens in the focusing lens barrel is one or a plurality of focusing lenses which are sequentially arranged. The plurality of focusing lenses include plano-convex lenses and positive meniscus convex lenses.
Preferably, the lens in the deflection lens barrel is a deflection lens, and the top end face of the deflection lens is perpendicular to the axis of the deflection lens barrel. The deflection mirror is provided with a first chamfer and a second chamfer. The included angle between the first bevel and the normal plane of the axis of the deflection lens barrel is alpha. The included angle between the second bevel and the axis of the deflection lens barrel is alpha/2. In the laser measurement process, laser vertically irradiates into the top end face of the deflection mirror, and after being reflected by the second inclined tangent plane, the laser vertically irradiates out of the deflection mirror.
Preferably, an iron block is embedded and fixed in the central position of the first magnetic mounting seat; the end face of the iron block is flush with the surface of the first magnetic mounting seat; three positioning grooves are formed in the first magnetic mounting seat; the three positioning grooves are arranged around the iron block in a triangle shape. The end part of the magnetic mounting block is provided with a permanent magnet corresponding to the position of the iron block and three positioning hemispheres matched with the three positioning grooves.
Preferably, the substrate is also provided with a plurality of standby magnetic mounting seats corresponding to the number of the quick-release lens barrel units; the structure of the standby magnetic suction mounting seat is the same as that of the first magnetic suction mounting seat and is used for placing each quick-release lens barrel unit.
Preferably, the imaging mechanism includes a photosensor and a receiving barrel; the photoelectric sensor and the receiving lens barrel are fixed on the substrate; the photoelectric sensor is provided with a light receiving surface; the central axis of the receiving lens barrel is vertical to the light receiving surface of the photoelectric sensor, and the vertical foot is the central point of the light receiving surface of the photoelectric sensor; in the working process, reflected light generated after laser emitted by the point laser is reflected on the surface of the tested workpiece passes through the receiving lens barrel and irradiates on the light receiving surface of the photoelectric sensor.
Preferably, different marks are arranged on the magnetic mounting blocks of different quick-release lens barrel units; the mark is used for indicating the type of the measuring lens barrel in the quick-release lens barrel unit.
Preferably, the photoelectric sensor adopts a linear array CCD element or a linear array CMOS element.
In a second aspect, the present invention provides a multimode integrated laser measurement method comprising the steps of
Step one, mounting a substrate on a three-dimensional motion platform; if the surface of the tested workpiece is a diffuse reflection surface, mounting the quick-release lens barrel unit corresponding to the cylindrical lens barrel on the first magnetic mounting seat; if the surface of the tested workpiece is a mirror surface, mounting the quick-release lens barrel unit corresponding to the deflection lens barrel on the first magnetic mounting seat;
step two, placing the measured workpiece into a working platform of a three-dimensional motion platform, and establishing a measurement coordinate system;
step three, the three-dimensional moving platform drives the laser measuring head device to move along the Y direction and/or the X direction of the three-dimensional moving platform, and the surface of the workpiece to be measured is scanned transversely point by point;
step four, when the laser measuring head device finishes one transverse scanning on the surface of the workpiece to be measured, the three-dimensional moving platform drives the laser measuring head device to longitudinally feed a longitudinal scanning step length, and the transverse scanning is continued along the opposite direction of the step four;
and fifthly, repeating the third step and the fourth step until the whole surface of the tested workpiece is scanned.
Step six, if the surface of the measured workpiece is a mirror surface, finishing the measurement; if the surface of the measured workpiece is the diffuse reflection surface, the quick-release lens barrel unit corresponding to the focusing lens barrel is arranged on the first magnetic mounting seat, the steps two to five are repeated, the contour information of the measured workpiece is obtained according to the data measured by the cylindrical lens barrel, and the local concave-convex information of the measured workpiece is obtained according to the data measured by the focusing lens barrel.
The invention has the beneficial effects that:
1. the invention is characterized in that a plurality of quick-release lens barrel units are arranged; and the device is fixed on the substrate in a magnetic attraction mode, so that the rapid switching among three measurement modes of diffuse reflection wide light spots, diffuse reflection fine light spots and specular reflection is realized, the measurement application range of the laser measuring head is effectively expanded, the measurement flexibility is increased, and the measurement cost is reduced.
2. According to the invention, the positioning hemispherical structures distributed in a triangle are arranged on the bosses of the first magnetic mounting seat and the standby magnetic mounting seat, so that the holding clamp can realize good repositioning precision in the mounting process; and the pose calibration and the coordinate unification operation of the measured data of the sensor are not required to be repeated during multiple measurements, so that the measurement precision of the laser non-contact type multi-element measurement can be effectively ensured.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of a substrate structure according to the present invention;
FIG. 3 is a schematic view of a first retaining clip according to the present invention;
FIG. 4a is a first overall structure of a third retaining clip according to the present invention;
FIG. 4b is a schematic view of a second overall structure of a third retaining clip according to the present invention;
fig. 5 is a schematic view of the internal structure of the cylindrical lens barrel according to the present invention;
fig. 6 is a schematic view of an internal structure of a focusing lens barrel in the present invention;
fig. 7a is a schematic view of the internal structure of the deflection cylinder of the present invention;
FIG. 7b is a front projection view of the deflection mirror of the present invention;
FIG. 8 is a schematic diagram of the operation of the diffuse reflection wide spot measurement mode of the present invention;
FIG. 9 is a schematic diagram of the measurement principle of the diffuse reflection wide spot measurement mode in the present invention;
FIG. 10 is a schematic diagram of the measurement principle of the diffuse reflection fine spot measurement mode in the present invention;
fig. 11 is a schematic diagram of the measurement principle of the specular reflection measurement mode in the present invention.
In the figure: 1. a substrate; 1-1, a first boss; 1-2, a second boss; 1-3, a third boss; 1-4, a fourth boss; 1-5, a fifth boss; 1-6, a sixth boss; 1-7, a seventh boss; 1-8 parts of a first magnetic mounting seat, 1-8-1 parts of a first center hole; 1-8-2 parts of iron block; 1-8-3, positioning a hemispherical groove; 1-9, connecting plates; 1-10, mounting surface; 1-11, first wide spot marks; 1-12, first fine light spot marks; 1-13, a first light deflection mark; 2. a spot laser; 3. a first retaining clip; 3-1, a first clamping through hole; 3-2, a first abdicating through groove; 3-3, a first fastening screw; 3-4, ear plates; 3-5, mounting holes; 4. a collimating lens barrel; 5. a second holding clip; 6. a cylindrical lens barrel; 6-1, a cylindrical convex lens; 7. a first clamping base; 7-1, a second clamping through hole; 7-2, a second abdicating through groove; 7-3, a second fastening screw; 7-4, marking a second wide light spot; 7-5, a second central hole; 7-6, permanent magnets; 7-7, positioning hemispheres; 8. focusing lens barrel; 8-1, plano-convex lens; 8-2, positive meniscus lens; 9. a second clamping base; 10. deflecting the lens barrel; 10-1, deflection mirror; 10-1-1, a first chamfer; 10-1-2, a second chamfer; 11. a third clamping base; 12. a sensor holder; 13. a photoelectric sensor; 14. a receiving barrel; 15. a third holding clip; 16. the workpiece to be tested.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
As shown in fig. 1 and 2, a multimode integrated laser probe device includes a substrate 1, a point laser 2, a first holding clamp 3, a collimating lens barrel 4, a second holding clamp 5, an imaging mechanism, and a beam switching mechanism.
As shown in fig. 2, the upper end of the base plate 1 is provided with integrally formed connecting plates 1-9, the connecting plates 1-9 are arranged at right angles with the base plate 1, and the connecting plates 1-9 are provided with mounting holes. The side of the base plate 1 facing away from the connection plate is provided with mounting surfaces 1-10. The mounting surface 1-10 of the base plate 1 is provided with a plurality of bosses which are integrally formed with the base plate 1, and the bosses are respectively a first boss 1-1, a second boss 1-2, a sixth boss 1-6, a seventh boss 1-7, a first magnetic mounting seat 1-8 and a standby magnetic mounting seat.
As shown in fig. 1 and 3, the first holding clip 3 is fixed to the first boss 1-1 by a screw. The first holding clamp 3 is provided with a first clamping through hole 3-1; the first holding clamp 3 is also provided with a first abdication through groove 3-2 communicated with the first clamping through hole 3-1; two first fastening screws 3-3 are arranged on the side wall of the first abdication through groove 3-2 side by side. The two sides of the mounting end of the first retaining clamp 3 are provided with ear plates 3-4, and the ear plates 3-4 are provided with mounting holes 3-5. The second holding clip 5 and the third holding clip 15 have the same structure as the first holding clip 3, and are not described herein. In the mounting process, the first holding clamp 3 is vertically mounted on the first boss 1-1, and the spot laser 2 is mounted in the first clamping through hole 3-1. The second boss 1-2 and the first magnetic mount 1-8 are arranged in order along the irradiation direction of the spot laser 2. The second holding clip 5 is fixed to the second boss 1-2 by a screw. The collimator lens barrel 4 is mounted on the second holding clip 5. And the central axis of the collimator lens barrel 4 coincides with the laser beam emitted from the spot laser 2.
As shown in fig. 1 and 2, a first central hole 1-8-1 is arranged at the central position of a first magnetic mounting seat 1-8, a cylindrical iron block 1-8-2 is fixedly embedded in the first central hole 1-8-1, and the end face of the iron block 1-8-2 is flush with the surface of the first magnetic mounting seat 1-8; three positioning hemispherical grooves 1-8-3 distributed in a triangular shape are arranged on the periphery of the first central hole 1-8-1. The standby magnetic attraction mounting seat comprises a third boss 1-3, a fourth boss 1-4 and a fifth boss 1-5 which are sequentially arranged on one side of the point laser 2. And the three bosses are identical to the first magnetic mounting seats 1-8 in structure, and are not described herein.
The imaging mechanism includes a sensor mount 12, a photosensor 13, a receiving barrel 14, and a third holding clip 15. The sensor holder 12 and the third holding clip 15 are fixed to the sixth boss 1-6 and the seventh boss 1-7, respectively, by screws. The photoelectric sensor 13 is fixed on the sensor fixing seat 12; the photosensor 13 is provided with a light receiving surface for receiving the reflected light and imaging the reflected light. The receiving barrel 14 is mounted on the third holding clip 15. The central axis of the receiving lens barrel 14 is perpendicular to the light receiving surface of the photoelectric sensor 13, and the vertical foot is the center point of the light receiving surface of the photoelectric sensor 13.
The photosensor 13 is a linear array CCD element or a linear array CMOS element. The central axes of the collimator barrel 4 and the receiving barrel 14 are located on the same plane as the laser beam emitted from the spot laser 2, and the plane is parallel to the mounting surfaces 1 to 10 of the substrate 1. The included angle between the central axis of the receiving lens barrel 14 and the central axis of the collimating lens barrel 4 is alpha, and the alpha is 25-35 degrees. Setting the central position of the light receiving detection section of the photoelectric sensor as S 0 The upper limit point is S 1 The lower limit point is S 2 Interval S 1 S 2 Is the light receiving detection section of the photoelectric sensor.
As shown in fig. 1 and 2, the light beam switching mechanism includes three quick-release barrel units; the quick-release lens barrel unit comprises a magnetic mounting block and a measuring lens barrel; the lens structures in the measuring lens barrels in the different quick-release lens barrel units are different and are used for different measuring modes. When in use, the selected quick-release lens barrel unit is taken down from the standby magnetic mounting seat and is adsorbed on the first magnetic mounting seat 1-8.
As shown in fig. 4a and 4b, the magnetic mounting block is divided into a first clamping base 7, a second clamping base 9 and a third clamping base 11. The first clamping base 7 is rectangular and is provided with a second clamping through hole 7-1. The first clamping base 7 is provided with a second yielding through groove 7-2 communicated with the second clamping through hole 7-1. The second yielding through groove 7-2 is provided with a second fastening screw 7-3. The center position of the installation end surface of the first clamping base 7 is provided with a second center hole 7-5, a cylindrical permanent magnet 7-6 is fixedly embedded in the second center hole 7-5, and the end surface of the permanent magnet 7-6 is flush with the installation end surface of the first clamping base 7. Wherein, the cylindrical permanent magnet 7-6 adopts a neodymium-iron-boron permanent magnet. The periphery of the second center hole 7-5 is provided with three positioning hemispheres 7-7 distributed in a triangle shape, and the three positioning hemispheres 7-7 correspond to the three positioning hemispheric grooves 1-8-3 on the first magnetic mounting seat 1-8. The second clamping base 9, the third clamping base 11 and the first clamping base 7 have the same shape, structure and dimensions, and are not described herein.
The outer end surfaces of the first clamping base 7, the second clamping base 9 and the third clamping base 11 are respectively stuck with a second wide light spot mark 7-4, a second fine light spot mark 9-1 and a second light deflection mark 11-1. The shapes of the second wide spot mark 7-4, the second fine spot mark 9-1 and the second light deflection mark 11-1 are respectively identical to the shapes of the first wide spot mark 1-11, the first fine spot mark 1-12 and the first light deflection mark 1-13. The first clamping base 7, the second clamping base 9 and the third clamping base 11 are respectively adsorbed on the third boss 1-3, the fourth boss 1-4 and the fifth boss 1-5 through magnetic force. One side of the third boss 1-3, the fourth boss 1-4 and the fifth boss 1-5 is respectively stuck with an elliptical first wide light spot mark 1-11, a circular first fine light spot mark 1-12 and a first light deflection mark 1-13.
The measuring cylinder is divided into a cylindrical cylinder 6, a focusing cylinder 8 and a deflection cylinder 10, which are mounted on a first clamping mount 7, a second clamping mount 9 and a third clamping mount 11, respectively. In the measuring process, the first clamping base 7, the second clamping base 9 and the third clamping base 11 loaded with the measuring lens barrel are switched between the first magnetic mounting seats 1-8 and the standby magnetic mounting seats according to the measuring requirement. When the measuring lens barrel is mounted on the first magnetic mounting base 1-8, the axis of the measuring lens barrel coincides with the central axis of the collimating lens barrel 4.
In this embodiment, the substrate 1, the first holding clamp 3, the second holding clamp 5, the first clamping base 7, the second clamping base 9, the third clamping base 11, the third holding clamp 15, and the sensor fixing base 12 are all made of aviation aluminum.
As shown in the figure5, a cylindrical convex lens 6-1 arranged coaxially is fixed in the cylindrical lens barrel 6. As shown in fig. 9, when the first clamping base 7 is mounted on the first magnet mount 1-8, the spot laser 2, the collimator barrel 4, the cylindrical barrel 6, the receiving barrel 14, and the photosensor 13 constitute a diffuse reflection wide spot measurement mode. The cylindrical convex lens 6-1 is used for converting the laser beam emitted by the point laser 2 into a laser beam with an elliptical cross section and irradiating the laser beam on the surface of the workpiece 16 to be measured; and the measured point is reflected into an imaging mechanism for imaging through diffuse reflection. Set H 1 Is the upper limit point of the measuring range of the laser measuring head, and H 1 And the lower limit point S of the working range of the photoelectric sensor 13 2 Corresponding to the above. H 2 Is the lower limit point of the measuring range of the laser measuring head, and H 2 Upper limit point S of working range of photoelectric sensor 13 1 Corresponding to the above. Set up a point H on the laser gauge head light path 0 The measuring reference point is a measuring reference point of the laser measuring head; and H is 0 Midpoint S of the operating range of the photosensor 13 0 Corresponding to the above. If the current measured point is H x Then H x The generated part of diffuse reflection light is focused by the receiving lens barrel 14 and then imaged on the photoelectric sensor 13, and the image point is an elliptic light spot. The measurement system extracts the center point S of the elliptic image point by an image graph processing algorithm, such as a Hough transformation algorithm x The spot sensor 13 outputs S x And S is equal to 0 The distance between them, the output value is deltas. H x And H is 0 The distance Δh between them is expressed as:
wherein α is an angle between the central axis of the laser beam and the central axis of the receiving cylinder 14; u is the distance from the intersection point of the laser beam and the central axis of the receiving lens barrel 14 to the optical center of the receiving lens barrel 14; v is the distance from the intersection point of the photosensitive surface of the photoelectric sensor 13 and the central axis of the receiving lens barrel 14 to the optical center of the receiving lens barrel 14; and set as S x Is positioned at S 0 Near S 2 On one side, ±takes the plus sign, whereas, ±takes the minus sign.
During the measurement processIf the measuring reference point H of the laser measuring head 0 The coordinate value in the measurement coordinate system is (x 0 ，y 0 ，z 0 ) Then when S on the photosensor 13 x Is positioned at S 0 Near S 2 On one side, the measured point H x The coordinate values of (a) may be expressed as:
when S on the photosensor 13 x Is positioned at S 0 Near S 1 On one side, the coordinate values thereof may be expressed as:
as shown in fig. 6, a focusing lens group is fixed in the focusing lens barrel 8, and the focusing lens group is composed of a plano-convex lens 8-1 positioned above and a positive meniscus-convex lens 8-2 positioned below, the focal lengths of the plano-convex lens and the positive meniscus-convex lens are equal, and the convex surfaces of the two convex lenses face the same direction. When the second clamping base 9 is mounted on the first magnetic mounting base 1-8, the point laser 2, the collimating lens barrel 4, the focusing lens barrel 8, the receiving lens barrel 14 and the photoelectric sensor 13 form a diffuse reflection fine spot measurement mode. As shown in fig. 10, the measurement difference between the diffuse reflection fine spot measurement mode and the diffuse reflection wide spot measurement mode is that: the laser beam emitted by the point laser 2 passes through the collimating lens cone 4 and the focusing lens cone 6 to form a laser beam with a circular cross section. If the current measured point is H x Then H x The generated part of diffuse reflection light is focused by the receiving lens barrel 14 and then imaged on the photoelectric sensor 13, and the image point is a circular light spot.
As shown in fig. 7a and 7b, the deflection lens barrel 10 is fixed with a deflection lens 10-1 having a cylindrical shape, and the tip end surface of the deflection lens 10-1 is perpendicular to the lens barrel axis. The deflection mirror 10-1 is provided with a first chamfer 10-1-1 and a second chamfer 10-1-2 on both sides thereof, respectively. The bottom end of the deflection mirror 10-1 where the first chamfer 10-1-1 and the second chamfer 10-1-2 intersect; the angle between the first chamfer 10-1-1 and the normal plane of the lens barrel axis is alpha. The included angle between the second bevel 10-1-2 and the axis of the lens barrel is alpha/2. When the deflection lens barrel 10 is mounted on the first magnetic mounting seat 1-8 through the third clamping base 11, the first chamfer 10-1-1 and the second chamfer 10-1-2 are perpendicular to the mounting surface 1-10 of the base plate 1. In the laser measurement process, laser vertically irradiates into the top end face of the deflection mirror, and after being reflected by the second inclined tangent plane, the laser vertically irradiates out of the deflection mirror perpendicular to the first inclined tangent plane; at this time, the spot laser 2, the collimator barrel 4, the deflection barrel 10, the receiving barrel 14, and the photosensor 13 constitute a specular reflection measurement mode.
The measurement principle of the specular reflection measurement mode is shown in fig. 11, in which the laser beam emitted from the point laser 2 passes through the collimator tube 4 to form parallel light, and the parallel light passes through the deflection tube 10 to deflect α toward the receiving tube 14, so as to irradiate the surface of the workpiece 16 to be measured. Specular reflection occurs at the surface of the workpiece 16 to be measured, and the specular reflection light is imaged on the photosensor 13 after passing through the receiving cylinder 14. H in FIG. 11 1 、H 2 、H 0 、S 1 、S 2 、S 0 Meaning the same as in the diffuse broad spot measurement mode. The current measured point is H x When in use, H x The generated specular reflection light passes through the receiving lens barrel 14 and then forms an image on the photosensor 13, and the image point is a circular light spot. The measurement system extracts the center point S of the circular image point by an image processing algorithm, such as Hough transformation algorithm x The photosensor 13 outputs S x And S is equal to 0 Distance deltas therebetween. In the measuring process, if the measuring reference point H of the laser measuring head 0 The coordinate value in the measurement coordinate system is (x 0 ，y 0 ，z 0 ) When the photoelectric sensor 13 is on S x Is positioned at S 0 Near S 2 On one side, then the measured point H x The coordinate values of (2) are expressed as:
when the photoelectric sensor 13 is on S x Is positioned at S 0 Near S 1 On one side, then the measured point H x The coordinate values of (2) are expressed as:
wherein alpha is an included angle between the central axis of the laser beam and the central axis of the receiving cylinder 14; k is a scale factor, and the value of k can be obtained through calibration, and the calibration method is specifically as follows:
s1, installing a laser measuring head device at the tail end of a Z axis of a three-dimensional motion platform through an installation hole on a connecting plate 1-9, unloading a third clamping base 11 from a fifth boss 1-5, and installing the third clamping base on a first magnetic installation seat 1-8 through magnetic force.
S2, taking two gauge blocks with the length difference of Deltal (Deltal is less than or equal to 1 mm), and placing the two gauge blocks on a measuring platform side by side so as to grind one measuring surface of the gauge blocks with the measuring platform.
S3, driving the three-dimensional motion platform to enable the laser measuring head to measure the measuring surface of one of the gauge blocks, and setting the output of the photoelectric sensor 13 as deltas 1 。
S4, locking a Z-axis driver by the three-dimensional motion platform, moving in the X-axis and Y-axis directions to enable the laser measuring head to be aligned with the measuring surface of the other gauge block and measuring, and setting the output of the photoelectric sensor 13 as deltas at the same time 2 。
S5, obtaining a k value through the following formula:
in the formula, when the output delta s of two measurements 1 、Δs 2 Is positioned at the center point S of the light receiving surface of the photoelectric sensor 13 0 In the same side of (1), minus or plus is taken; when the two sides are positioned, the plus sign is taken.
S6, repeating the steps S3-S5 for more than five times to obtain a group of measured values k i I=1, 2,3 … n, (n. Gtoreq.5). Taking k i Average value of (2)As a calibration value for k.
The specific measurement steps of the invention are as follows:
step one, mounting a substrate 1 at the tail end of a Z axis of a three-dimensional motion platform through connecting plates 1-9. If the surface of the workpiece to be detected is a diffuse reflection surface, mounting the quick-release lens barrel unit corresponding to the cylindrical lens barrel 6 on the first magnetic mounting seat 1-8; and if the surface of the tested workpiece is a mirror surface, mounting the quick-release lens barrel unit corresponding to the deflection lens barrel 10 on the first magnetic mounting seat by 1-8.
Step two, using reference point H 0 A sensor measurement coordinate system is established for the fiducial point. Placing a standard ball in a measurement platform of the three-dimensional motion platform, and driving the three-dimensional motion platform to enable the laser measuring head device to measure the standard ball; after the measurement is completed, fitting the measurement data into a spherical surface by using a least square method, and obtaining the spherical center coordinates of the spherical surface; and establishing a measurement coordinate system by taking the spherical center coordinate as a reference point.
And step three, driving the three-dimensional moving platform to enable the moving platform to drive the laser measuring head device to move along the Y direction and/or the X direction of the three-dimensional moving platform, and scanning the surface of the workpiece 16 transversely point by point.
And step four, when the laser measuring head device finishes one transverse scanning on the surface of the workpiece 16 to be measured, the three-dimensional moving platform drives the laser measuring head device to longitudinally feed a longitudinal scanning step length, and the transverse scanning is continued along the opposite direction of the step four.
And fifthly, repeating the third step and the fourth step until the surface of the whole tested workpiece 16 is scanned, and storing data.
Step six, if the surface of the workpiece 16 to be measured is a mirror surface, the measurement is finished; if the surface of the workpiece to be measured is a diffuse reflection surface, the focusing lens barrel 8 is arranged on the first magnetic suction mounting seat 1-8, the steps two to five are repeated, the contour information of the workpiece to be measured 16 is obtained according to the data measured by the cylindrical lens barrel 6, and the local concave-convex information of the workpiece to be measured 16 is obtained according to the data measured by the focusing lens barrel 8.
And step seven, taking down the fixing clamp which is arranged on the first magnetic mounting seats 1-8 and is loaded with the lens barrel, and placing the fixing clamp on the corresponding standby magnetic mounting seat.
Claims (9)
1. A multi-mode integrated laser measuring head device comprises a substrate (1), a point laser (2), a collimating lens barrel (4), an imaging mechanism and a beam switching mechanism; the method is characterized in that: the device also comprises a first magnetic mounting seat (1-8); the point laser (2), the collimating lens barrel (4), the first magnetic mounting seats (1-8) and the imaging mechanism are all fixed on the substrate (1); the point laser (2), the collimating lens barrel (4) and the first magnetic mounting seats (1-8) are sequentially arranged along the laser emission direction of the point laser (2); the imaging mechanism is used for imaging the light beam reflected from the surface of the tested workpiece (16);
the light beam switching mechanism comprises a plurality of quick-release lens barrel units; the quick-release lens barrel unit comprises a magnetic mounting block and a measuring lens barrel; the lens structures in the measuring lens barrels in the different quick-release lens barrel units are different and are used for different measuring modes; the measuring lens barrel is adsorbed on the first magnetic mounting seat (1-8) through the magnetic mounting block; the magnetic mounting block and the first magnetic mounting seat (1-8) are provided with positioning structures matched with each other;
when the magnetic mounting block in one quick-release lens barrel unit is adsorbed on the first magnetic mounting seat, the point laser (2), the collimating lens barrel (4) and the measuring lens barrel in the quick-release lens barrel unit are arranged into a straight line; after laser emitted by the point laser (2) sequentially passes through the collimating lens cone (4) and the measuring lens cone, the laser is reflected at the workpiece, and reflected light rays are emitted to the imaging mechanism;
the number of the quick-release lens barrel units is three; the measuring lens barrels in the three quick-release lens barrel units are a cylindrical lens barrel (6), a focusing lens barrel (8) and a deflection lens barrel (10) respectively; the cylindrical lens barrel (6) is used for converting the laser beam emitted by the point laser (2) into a laser beam with an elliptical cross section, irradiating the laser beam on the surface of the workpiece (16) to be detected, and generating diffuse reflection; the diameter of the long axis of the cross section of the laser beam with the elliptic cross section is 1000-2000 mu m, and the diameter of the short axis is 50-70 mu m; the focusing lens barrel (8) is used for focusing the laser beam emitted by the point laser (2) into a laser beam with a circular cross section, irradiating the laser beam on the surface of the tested workpiece (16) and generating diffuse reflection; the diameter of the cross section of the laser beam with the circular cross section is 25-50 mu m; the deflection lens barrel (10) is used for deflecting the laser beam emitted by the point laser (2) by a preset angle and then irradiating the laser beam on the surface of the tested workpiece (16) and generating specular reflection.
2. A multimode integrated laser gauge head device according to claim 1, wherein: the lens in the cylindrical lens barrel (6) is a cylindrical convex lens (6-1); the lens in the focusing lens barrel (8) is one or a plurality of focusing lenses which are sequentially arranged; the plurality of focusing lenses include a plano-convex lens (8-1) and a positive meniscus convex lens (8-2).
3. A multimode integrated laser gauge head device according to claim 1, wherein: the lens in the deflection lens barrel (10) is a deflection lens (10-1), and the top end face of the deflection lens (10-1) is perpendicular to the axis of the deflection lens barrel (10); the deflection mirror is provided with a first chamfer (10-1-1) and a second chamfer (10-1-2); the included angle between the first bevel (10-1-1) and the normal plane of the axis of the deflection lens cone (10) is alpha; the included angle between the second bevel (10-1-2) and the axis of the deflection lens cone (10) is alpha/2; in the laser measurement process, laser vertically irradiates into the top end face of the deflection mirror, and after being reflected by the second inclined tangent plane, the laser vertically irradiates out of the deflection mirror.
4. A multimode integrated laser gauge head device according to claim 1, wherein: the iron block (1-8-2) is embedded and fixed in the center of the first magnetic mounting seat (1-8); the end face of the iron block (1-8-2) is flush with the surface of the first magnetic mounting seat (1-8); three positioning grooves (1-8-3) are formed in the first magnetic mounting seat (1-8); three positioning grooves (1-8-3) are arranged around the iron block (1-8-2) in a triangle shape; the end part of the magnetic mounting block is provided with a permanent magnet (7-6) corresponding to the position of the iron block (1-8-2) and three positioning hemispheres (7-7) matched with the three positioning grooves (1-8-3).
5. A multimode integrated laser gauge head device according to claim 1, wherein: the base plate (1) is also provided with a plurality of standby magnetic mounting seats corresponding to the number of the quick-release lens barrel units; the structure of the standby magnetic mounting seat is the same as that of the first magnetic mounting seat (1-8) and is used for placing each quick-release lens barrel unit.
6. A multimode integrated laser gauge head device according to claim 1, wherein: the imaging mechanism comprises a photoelectric sensor (13) and a receiving lens barrel (14); the photoelectric sensor (13) and the receiving lens barrel (14) are fixed on the substrate (1); the photoelectric sensor (13) is provided with a light receiving surface; the central axis of the receiving lens barrel (14) is vertical to the light receiving surface of the photoelectric sensor (13), and the vertical foot is the central point of the light receiving surface of the photoelectric sensor (13); in the working process, reflected light generated after laser emitted by the point laser (2) is reflected on the surface of the tested workpiece (16) passes through the receiving lens barrel (14) and irradiates on the light receiving surface of the photoelectric sensor (13).
7. A multimode integrated laser gauge head device according to claim 1, wherein: different marks are arranged on the magnetic mounting blocks of different quick-release lens barrel units; the mark is used for indicating the type of the measuring lens barrel in the quick-release lens barrel unit.
8. A multimode integrated laser gauge head device according to claim 6, wherein: the photoelectric sensor (13) adopts a linear array CCD element or a linear array CMOS element.
9. A multimode integrated laser measurement method is characterized in that: use of a multimode integrated laser gauge head device according to claim 1; the measuring method comprises the following steps:
step one, mounting a substrate (1) on a three-dimensional motion platform; if the surface of the detected workpiece (16) is a diffuse reflection surface, mounting the quick-release lens barrel unit corresponding to the cylindrical lens barrel (6) on the first magnetic mounting seat (1-8); if the surface of the tested workpiece (16) is a mirror surface, mounting the quick-release lens barrel unit corresponding to the deflection lens barrel (10) on the first magnetic mounting seat (1-8);
step two, placing a measured workpiece (16) into a working platform of a three-dimensional motion platform, and establishing a measurement coordinate system;
step three, the three-dimensional moving platform drives the laser measuring head device to move along the Y direction and/or the X direction of the three-dimensional moving platform, and the surface of the workpiece (16) to be measured is scanned transversely point by point;
step four, when the laser measuring head device finishes one transverse scanning on the surface of the workpiece (16) to be measured, the three-dimensional moving platform drives the laser measuring head device to longitudinally feed a longitudinal scanning step length, and the transverse scanning is continued along the opposite direction of the step four;
step five, repeating the step three and the step four until the scanning of the surface of the whole tested workpiece (16) is completed;
step six, if the surface of the measured workpiece (16) is a mirror surface, finishing the measurement; if the surface of the tested workpiece (16) is a diffuse reflection surface, the quick-release lens barrel unit corresponding to the focusing lens barrel (8) is arranged on the first magnetic mounting seat (1-8), the steps two to five are repeated, the contour information of the tested workpiece (16) is obtained according to the data measured by the cylindrical lens barrel (6), and the local concave-convex information of the tested workpiece (16) is obtained according to the data measured by the focusing lens barrel (8).
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