JP5193101B2 - Reference member for inspection master of optical 3D measuring machine - Google Patents

Reference member for inspection master of optical 3D measuring machine Download PDF

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JP5193101B2
JP5193101B2 JP2009055980A JP2009055980A JP5193101B2 JP 5193101 B2 JP5193101 B2 JP 5193101B2 JP 2009055980 A JP2009055980 A JP 2009055980A JP 2009055980 A JP2009055980 A JP 2009055980A JP 5193101 B2 JP5193101 B2 JP 5193101B2
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進 浅沼
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Asanuma Giken Co Ltd
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本発明は、光学式の3次元測定機の精度検査や測定誤差の校正に使用する検査マスタの基準部材に関する。   The present invention relates to a reference member of an inspection master used for accuracy inspection of an optical three-dimensional measuring machine and calibration of measurement errors.

従来、自動車のエンジンや変速機のケース類のような機械部品類の寸法測定には、測定テーブル(ベッド)上にセッティングした被測定物に対してプローブ(測定子)の先端を接触させて測定を行うようにした3次元測定機が用いられている。   Conventionally, for measuring the dimensions of mechanical parts such as automobile engines and transmission cases, the tip of a probe (measuring element) is brought into contact with the object set on the measurement table (bed). A three-dimensional measuring machine adapted to perform is used.

このような3次元測定機は、測定精度を維持するために、高精度に仕上げられた基準となる検査マスタを用いて、定期的に精度の検査や測定誤差の校正が行われている。(特許文献1、2参照)   In order to maintain the measurement accuracy, such a three-dimensional measuring machine is periodically inspected for accuracy and calibrated for measurement errors by using an inspection master that is a highly accurate reference. (See Patent Documents 1 and 2)

これらの検査マスタは、3次元測定機のプローブが接触するための高精度に仕上げられた基準測定面を有する複数の基準部材を備えており、3次元測定機による異なる基準部材の基準測定面間の距離等の実測データを検査マスタの基準値と比較することにより、3次元測定機の精度を評価している。   These inspection masters are provided with a plurality of reference members having a reference measurement surface finished with high accuracy so that the probe of the three-dimensional measuring machine contacts, and between the reference measurement surfaces of different reference members by the three-dimensional measuring machine. The accuracy of the three-dimensional measuring machine is evaluated by comparing the actual measurement data such as the distances with the reference value of the inspection master.

前述したような、被測定物にプローブの先端を接触させて測定する接触式の3次元測定機は、被測定面がプローブとの接触で、傷つく恐れがあったり、あるいは、簡単に変形を生じる素材で製作された被測定物の寸法測定には不向きであり、このような被測定物の場合には、寸法測定を非接触で行うことのできる光学式の3次元測定機が用いられている。   As described above, the contact type three-dimensional measuring machine that measures by bringing the tip of the probe into contact with the object to be measured may be damaged due to contact with the probe or may be easily deformed. It is unsuitable for measuring the dimensions of a measurement object made of a material, and in the case of such a measurement object, an optical three-dimensional measuring machine capable of performing dimension measurement in a non-contact manner is used. .

光学式の3次元測定機は、被測定物に接触するプローブを備えておらず、代わりに測定光を被測定面に照射し、その反射光をCCDカメラ等の検出器で受光して、被測定面の位置を測定する構造になっている。   An optical three-dimensional measuring machine does not include a probe that contacts the object to be measured, but instead irradiates the surface to be measured with the measurement light and receives the reflected light with a detector such as a CCD camera. It is structured to measure the position of the measurement surface.

このような光学式の3次元測定機の精度検査や測定誤差の校正を行う場合、接触式の3次元測定機用に製作されている検査マスタは、基準測定面に光学的に距離を測定するための指標が設けられていないため、使用することができなかった。   When performing accuracy inspection and measurement error calibration of such an optical CMM, the inspection master manufactured for the contact CMM optically measures the distance to the reference measurement surface. It was not possible to use it because no indicator was provided.

そこで、検査マスタに装着する基準部材に球面状の被測定面を設け、この被測定面上に一点で互いに交差する複数の線状溝を形成し、これらの線状溝で光学式の3次元測定機から照射される測定光を乱反射させてその反射光を捉えることで、光学式の3次元測定機の精度検査や校正等を、接触式の3次元測定機と同様に行えるようにした技術が提案されている。(特許文献3参照)   Therefore, a spherical measurement target surface is provided on the reference member to be mounted on the inspection master, and a plurality of linear grooves intersecting each other at a single point are formed on the measurement target surface. Technology that enables the inspection and calibration of optical 3D measuring machines to be performed in the same way as contact 3D measuring machines by irregularly reflecting the measuring light emitted from the measuring machine and capturing the reflected light. Has been proposed. (See Patent Document 3)

特開2001−330428号公報JP 2001-330428 A 特開2002−195820号公報JP 2002-195820 A 特許第4049272号公報Japanese Patent No. 4049272

前述した光学式の3次元測定機用の検査マスタに装着する基準部材は、位置測定の精度を高めるため、被測定面上の指標となる線状溝の線幅は5μ程度と極めて微細に加工されている。   The reference member mounted on the inspection master for the optical three-dimensional measuring machine described above is processed extremely finely with the line width of the linear groove serving as an index on the surface to be measured being about 5 μm in order to improve the accuracy of position measurement. Has been.

そのため、CCDカメラが受光する線状溝からの反射光は微弱であり、特に、周囲の照明等の外光が被測定面にしてCCDカメラに入る場合等においては、指標となる線状溝の交差位置を見出すことが困難となる問題があった。   For this reason, the reflected light from the linear grooves received by the CCD camera is weak, and particularly when external light such as ambient illumination enters the CCD camera as a surface to be measured, etc. There was a problem that it was difficult to find the intersection position.

そこで、本発明は、前述したような、光学式の3次元測定機の検査マスタ用基準部材の問題を解消し、被測定面に設けられた、光学的に距離を測定する指標となる線状溝の交差位置を容易に見出すことができる光学式3次元測定機の検査マスタ用基準部材を提供することを目的とする。   Therefore, the present invention solves the problem of the reference member for the inspection master of the optical three-dimensional measuring machine as described above, and is a linear line that serves as an index for optically measuring the distance provided on the surface to be measured. It is an object of the present invention to provide a reference member for an inspection master of an optical three-dimensional measuring machine that can easily find the intersection position of grooves.

前記目的のために提供される本発明の検査マスタ用基準部材は、光学式3次元測定機の精度検査に使用する検査マスタ用基準部材であって、3次元測定機から照射された測定光を反射する被測定面を有し、前記被測定面が、球体表面に形成された円形の平坦面で構成され、前記被測定面には、その中心付近に測定光を乱反射させる微細な線状溝が当該被測定面の中心位置で互いに交差するように複数設けられているとともに、線状溝よりも幅広で測定光をより強く乱反射させるマーカー溝が、それぞれの線状溝の外側に隣接して被測定面の径方向に放射状に複数設けられている。   The reference member for inspection master according to the present invention provided for the above purpose is a reference member for inspection master used for accuracy inspection of an optical three-dimensional measuring machine, and the measurement light emitted from the three-dimensional measuring machine is used. The measurement target surface has a reflective surface, and the measurement target surface is formed of a circular flat surface formed on a spherical surface, and the measurement target surface has a fine linear groove for irregularly reflecting measurement light near the center thereof. Are provided so as to intersect each other at the center position of the surface to be measured, and marker grooves that are wider than the linear grooves and diffusely reflect the measurement light more strongly are adjacent to the outer sides of the respective linear grooves. A plurality of radials are provided in the radial direction of the surface to be measured.

本発明の検査マスタ用基準部材においては、線状溝とマーカ溝は、被測定面上で直交する2つの直径上にそれぞれ配置されているとともに、マーカー溝の中心寄りの端部は楔状に尖ってその先端に線状溝が連続していることが望ましい。また、被測定面を除いた部分が球面から構成されていることも望ましい。   In the inspection master reference member of the present invention, the linear groove and the marker groove are respectively arranged on two orthogonal diameters on the surface to be measured, and the end portion near the center of the marker groove is pointed like a wedge. It is desirable that a linear groove is continuous at the tip. It is also desirable that the portion excluding the surface to be measured is composed of a spherical surface.

請求項1に記載された発明によれば、3次元測定機から測定光が基準部材の被測定面に照射されると、線状溝の外側に設けられた複数のマーカー溝が測定光を強く乱反射するため、マーカー溝からの反射光を目印にして、これらのマーカー溝の内側にある微細な線状溝の交点位置を容易に見出すことができる。   According to the first aspect of the present invention, when the measurement light is irradiated from the three-dimensional measuring machine onto the surface to be measured of the reference member, the plurality of marker grooves provided outside the linear groove strengthen the measurement light. Because of irregular reflection, it is possible to easily find the position of the intersection of the fine linear grooves inside these marker grooves using the reflected light from the marker grooves as a mark.

また、基準部材は、高い寸法精度で仕上げられた既製の鋼球等の球体に、被測定面となる平坦面を加工して簡単に製作することができるため、高い精度が得られるとともに、低コストで製作することができる。   In addition, since the reference member can be easily manufactured by processing a flat surface as a surface to be measured on a sphere such as a ready-made steel ball finished with high dimensional accuracy, high accuracy is obtained and low Can be manufactured at a low cost.

請求項2に記載された発明によれば、線状溝とマーカー溝は、被測定面上で直交する2つの直径上にそれぞれ配置されているとともに、マーカー溝の中心寄りの端部は楔状に尖ってその先端が線状溝に連続しているため、十字状に配列されたマーカー溝の中心側に向くそれぞれの尖った先端の延長線上にある線状溝の交点位置をより簡単に見つけ出すことができる。   According to the second aspect of the present invention, the linear groove and the marker groove are respectively arranged on two diameters orthogonal to each other on the surface to be measured, and the end portion near the center of the marker groove has a wedge shape. Since the pointed tip is continuous with the linear groove, it is easier to find the position of the intersection of the linear groove on the extended line of each pointed tip toward the center of the marker groove arranged in a cross shape Can do.

本発明の検査マスタ用基準部材を装着した検査マスタを光学式3次元測定機にセットした状態を示す斜視図である。It is a perspective view which shows the state which set the inspection master equipped with the reference | standard member for inspection master of this invention to the optical three-dimensional measuring machine. 本発明の検査マスタ用基準部材が装着されている検査マスタの斜視図である。It is a perspective view of the inspection master with which the reference member for inspection master of the present invention is equipped. 本発明の検査マスタ用基準部材が装着されている検査マスタの平面図である。It is a top view of the inspection master with which the reference member for inspection master of the present invention is equipped. 図3のA−A断面図である。It is AA sectional drawing of FIG. 本発明の検査マスタ用基準部材の斜視図である。It is a perspective view of the reference member for inspection master of the present invention. 本発明の検査マスタ用基準部材の平面図である。It is a top view of the reference member for inspection masters of the present invention. 図6のB−B断面図である。It is BB sectional drawing of FIG.

図1は、本発明の検査マスタ用基準部材(以下、単に基準部材という。)を装着した検査マスタを、光学式3次元測定機(以下、単に3次元測定機という。)にセットした状態を示す斜視図であって、同図に示すように、3次元測定機1は、被測定物を載せる測定テーブル2を有し、この測定テーブル2の両側に、水平なX方向にスライド自在に設けられた門型の可動フレーム3と、前記可動フレーム3に対して、前記X方向と直交する水平なY方向にスライド自在に設けられたヘッド部4と、前記ヘッド部4に対し、Z方向すなわち上下方向にスライド自在に設けられた昇降筒5とを備えている。   FIG. 1 shows a state in which an inspection master equipped with an inspection master reference member (hereinafter simply referred to as a reference member) according to the present invention is set in an optical three-dimensional measuring machine (hereinafter simply referred to as a three-dimensional measuring machine). As shown in the figure, the three-dimensional measuring machine 1 has a measurement table 2 on which an object to be measured is placed, and is provided on both sides of the measurement table 2 so as to be slidable in the horizontal X direction. The gate-shaped movable frame 3, the head unit 4 slidable in the horizontal Y direction perpendicular to the X direction with respect to the movable frame 3, and the Z direction with respect to the head unit 4, And an elevating cylinder 5 slidably provided in the vertical direction.

前記昇降筒5の内部には、図示しないが、被測定物に向けて測定光としてのレーザ光を照射するレーザ光源と、前記被測定物から反射されてきたレーザ光を受光するCCDカメラが内蔵されており、可動フレーム3、ヘッド部4、及び、昇降筒5をそれぞれ、X、Y、Z方向へ移動させることによって、レーザー光源とともにCCDカメラの位置を測定テーブル2上の所望の位置へ3次元的に位置決めできるようになっている。   Although not shown, the elevating cylinder 5 includes a laser light source that emits laser light as measurement light toward the object to be measured, and a CCD camera that receives the laser light reflected from the object to be measured. The position of the CCD camera is moved to the desired position on the measurement table 2 together with the laser light source by moving the movable frame 3, the head unit 4, and the lifting cylinder 5 in the X, Y, and Z directions, respectively. It can be positioned dimensionally.

この3次元測定機1によって、エンジンブロック等のワークの仕上げ面の寸法測定等を行う場合には、測定テーブル2上にワークを載せ、昇降筒5の下端から下方に向けてレーザ光を照射して前記ワークの被測定面に当て、その反射光をCCDカメラで捉えて当該被測定面の座標位置を測定する。   When the dimensions of the finished surface of a work such as an engine block are measured by the three-dimensional measuring machine 1, the work is placed on the measurement table 2, and laser light is irradiated downward from the lower end of the lifting cylinder 5. Then, it is applied to the surface to be measured of the workpiece, the reflected light is captured by a CCD camera, and the coordinate position of the surface to be measured is measured.

一方、3次元測定機1の精度検査や測定誤差の校正を行う場合には、図1に示すように、ワークに代えて、測定テーブル2上に治具パレット6を固定して、この治具パレット6上に検査マスタ7を載置する。   On the other hand, when performing accuracy inspection of the three-dimensional measuring machine 1 or calibration of measurement errors, a jig pallet 6 is fixed on the measurement table 2 instead of the workpiece as shown in FIG. The inspection master 7 is placed on the pallet 6.

そして、検査マスタ7に設けた後述する複数の基準部材9の被測定面にそれぞれ、昇降筒5から測定光としてのレーザ光を当て、その反射光を昇降筒5内部のCCDカメラで捉えて3次元方向に各基準部材の被測定面上の測定点の座標位置を測定する。   Then, laser light as measurement light is applied to the measurement surfaces of a plurality of later-described reference members 9 provided on the inspection master 7, and the reflected light is captured by a CCD camera inside the elevating cylinder 5. The coordinate position of the measurement point on the measurement surface of each reference member is measured in the dimension direction.

図2は、本実施形態において使用する検査マスタ7の斜視図、図3はその平面図、図4は、図3におけるA−A線位置における縦断面図をそれぞれ示すものであって、これらの図に示すように、検査マスタ7は、外径が大小異なる扁平な2つの円筒部8A、8Bを2段組み合わせた形状のマスタ本体8と、このマスタ本体8に取り付けられている複数個の球状の基準部材9から構成されている。   2 is a perspective view of the inspection master 7 used in the present embodiment, FIG. 3 is a plan view thereof, and FIG. 4 is a longitudinal sectional view taken along the line AA in FIG. As shown in the figure, an inspection master 7 includes a master body 8 having a shape in which two flat cylindrical portions 8A and 8B having different outer diameters are combined in two stages, and a plurality of spherical shapes attached to the master body 8. It is comprised from the reference | standard member 9 of this.

マスタ本体8は、熱膨張係数が小さく寸法安定性に優れた不変鋼を機械加工して製作されており、図4に示すように、下段の円筒部8Aの上面S1と、上段の円筒部8Bの上面S2にはそれぞれ、基準部材9を取り付けるための球面状凹部aが設けられている。   The master body 8 is manufactured by machining an invariant steel having a small coefficient of thermal expansion and excellent dimensional stability. As shown in FIG. 4, the upper surface S1 of the lower cylindrical portion 8A and the upper cylindrical portion 8B. Each upper surface S2 is provided with a spherical recess a for attaching the reference member 9.

また、これらの凹部aの中心部にはそれぞれ基準部材9を固定するためのボルト10を下方から通すためのボルト挿通孔11が形成されている。これらのボルト挿通孔11の下部は、ボルト10の頭部を収容するために内径が拡大されており、この大径部分は下端がマスタ本体8の底面側に開口されている。   In addition, bolt insertion holes 11 are formed in the central portions of these recesses a for passing bolts 10 for fixing the reference member 9 from below. The lower part of these bolt insertion holes 11 has an inner diameter enlarged to accommodate the head of the bolt 10, and the lower end of the large diameter part is opened on the bottom side of the master body 8.

基準部材9は、図3に示すように、マスタ本体8の下段の円筒部8Aの上面S1に、円周方向に中心角90°毎の等間隔で4カ所取り付けられているとともに、上段の円筒部8Bの上面S2の周縁近傍に、前記円筒部8A側の基準部材9とは、それぞれ中心角で45°位置をずらして向きで、円周方向に中心角90°毎の等間隔で4カ所取り付けられている。なお、マスタ本体8の素材としては、熱膨張係数が小さく寸法安定性に優れたものであれば、不変鋼に限らず、石英やセラミックス等を用いてもよい。   As shown in FIG. 3, four reference members 9 are attached to the upper surface S1 of the lower cylindrical portion 8A of the master body 8 at equal intervals in the circumferential direction at 90 ° central angles, and the upper cylindrical portion. Near the periphery of the upper surface S2 of the portion 8B, the reference member 9 on the cylindrical portion 8A side is oriented with a 45 ° shift in the central angle, and at four locations at equal intervals of 90 ° in the circumferential direction. It is attached. In addition, as a raw material of the master main body 8, as long as it has a small thermal expansion coefficient and excellent dimensional stability, quartz, ceramics, or the like may be used instead of the invariant steel.

次に、図5は、基準部材9の斜視図、図6はその平面図、図7は図6のB−B断面図であって、これらの図に示すように、基準部材9は、球体の一部に被測定面としての、円形の平坦面9Aが形成されており、この平坦面9Aには、その中心位置を交点Oとして交差する2本の線状溝Gと、これらの線状溝Gの両端から、平坦面9Aの外周までその直径方向に放射状に延びる幅広の4つのマーカ溝Mが設けられている。   Next, FIG. 5 is a perspective view of the reference member 9, FIG. 6 is a plan view thereof, and FIG. 7 is a cross-sectional view taken along the line BB of FIG. A circular flat surface 9A as a surface to be measured is formed on a part of the flat surface 9A. Two linear grooves G intersecting with the center position of the flat surface 9A as an intersection point O, and these linear shapes Four wide marker grooves M extending radially in the diameter direction from both ends of the groove G to the outer periphery of the flat surface 9A are provided.

本実施形態のものにおいては、基準部材9は高い寸法精度に仕上げられた既製の直径20mmの鋼球で製作されていて、線状溝Gは平坦面9Aを放電加工することによって、約5μmの幅と深さに形成されている。   In the present embodiment, the reference member 9 is made of an off-the-shelf steel ball having a diameter of 20 mm and finished with high dimensional accuracy, and the linear groove G is formed by electric discharge machining of the flat surface 9A, and is about 5 μm. It is formed in width and depth.

一方、マーカー溝Mは、同じく平坦面9Aを放電加工することによって、幅2mm、深さ0.5mmに形成されている。それぞれのマーカー溝Mの、平坦面9Aの中心寄りの端部Tは、楔状に尖ってその先端に線状溝Gが連続している。   On the other hand, the marker groove M is formed to have a width of 2 mm and a depth of 0.5 mm by performing electric discharge machining on the flat surface 9A. The end T of each marker groove M near the center of the flat surface 9A is pointed like a wedge, and the linear groove G is continuous at the tip.

なお、基準部材9の平坦面9Aと、その外側の球状の表面は、鏡面に仕上げられており、線状溝Gとマーカー溝Mは、入射光を乱反射して光るように祖面に仕上げられている。   The flat surface 9A of the reference member 9 and the spherical surface outside thereof are finished to be mirror surfaces, and the linear groove G and the marker groove M are finished to the ancestor surface so that incident light is diffusely reflected and lighted. ing.

図7に示すように、基準部材9の平坦面9Aと反対側には、前記平坦面9Aに垂直で、且つ基準部材9の中心付近まで達する深さのねじ穴9Bが形成されていて、図4に示すように、検査マスタ7Aの底面側からボルト挿通孔11内にボルト10を差し込んで、前記ねじ穴9Bに螺合して締め付けることにより、基準部材9を検査マスタ本体8の球面状の凹部a内に着座させ、高精度に位置決めされた状態で安定して固定することができるようにしてある。   As shown in FIG. 7, on the side opposite to the flat surface 9A of the reference member 9, a screw hole 9B having a depth perpendicular to the flat surface 9A and reaching the vicinity of the center of the reference member 9 is formed. 4, the bolt 10 is inserted into the bolt insertion hole 11 from the bottom surface side of the inspection master 7 </ b> A, screwed into the screw hole 9 </ b> B, and tightened to tighten the reference member 9 into the spherical shape of the inspection master body 8. It is seated in the recess a and can be stably fixed in a state of being positioned with high accuracy.

なお、本実施形態においては、製作コスト低減のため、基準部材9を鋼球を加工して製作しているが、高い形状精度が要求される場合には、鋼球に代えて超硬やルビー、セラミックス等の硬質素材で基準部材を製作してもよい。その場合、マスタ本体へボルトで固定することが困難な材質である場合には、接着剤で固定してもよい。   In this embodiment, the reference member 9 is manufactured by processing a steel ball in order to reduce the manufacturing cost. However, when high shape accuracy is required, a carbide or ruby is used instead of the steel ball. The reference member may be made of a hard material such as ceramics. In that case, if the material is difficult to fix to the master body with bolts, it may be fixed with an adhesive.

前述した基準部材9を取り付けた検査マスタ7を用いて3次元測定機1の精度検査や測定誤差の校正を行う場合には、図2に示すようにマスタ本体8に取り付けられている8つの基準部材9について、それぞれの線状溝Gの交点Oの座標値を当該3次元測定機1によって測定する。   When the inspection master 7 to which the above-described reference member 9 is attached is used to inspect the accuracy of the coordinate measuring machine 1 and to calibrate the measurement error, as shown in FIG. For the member 9, the coordinate value of the intersection point O of each linear groove G is measured by the three-dimensional measuring machine 1.

そして、実測されたこれらの座標値から検査マスタ7のそれぞれの基準部材9の交点O間の距離を求め、これらを検査マスタ7に既定されている、それぞれの基準部材9の交点O間の距離の基準値と比較することにより、実測値と基準値との差に基づいて当該3次元測定機1の精度を評価したり、校正を行うことができる。   Then, the distance between the intersections O of the respective reference members 9 of the inspection master 7 is obtained from these actually measured coordinate values, and these are determined in the inspection master 7 and are the distances between the intersections O of the respective reference members 9. By comparing with the reference value, the accuracy of the three-dimensional measuring machine 1 can be evaluated or calibrated based on the difference between the actually measured value and the reference value.

この際、基準部材9の被測定面として形成されている平坦面9Aに測定光が照射されると、線状溝Gの周囲に設けられた幅広のマーカー溝Mが、線状溝Gよりも前記測定光を強く乱反射して光るため、これらのマーカー溝Mからの反射光を3次元測定機1のCCDカメラで鮮明に捉えることができ、この反射光を目印にしてマーカー溝の内側にある線状溝の交点位置を容易に見出すことができる。   At this time, when the measurement light is irradiated onto the flat surface 9 </ b> A formed as the measurement surface of the reference member 9, the wide marker groove M provided around the linear groove G is larger than the linear groove G. Since the measurement light is strongly diffusely reflected and emitted, the reflected light from the marker grooves M can be clearly captured by the CCD camera of the three-dimensional measuring machine 1, and the reflected light is used as a mark to be inside the marker grooves. The intersection position of the linear groove can be easily found.

なお、前述した実施形態の基準部材9においては、線状溝Gを平坦面9Aの中心位置で十字状に2本直交させ、また、マーカー溝Mは、これらの線状溝Gの両端から、平坦面9Aの外周までその直径方向に放射状に合計4つ設けているが、本発明は、この実施形態に限定するものではなく、線状溝は3本以上を平坦面の中心位置で交差させて設けることも可能であり、その場合、マーカー溝は、それぞれの線状溝の両外側に各一対ずつ、線状溝の数に応じた本数設ければよい。   In the reference member 9 of the above-described embodiment, two linear grooves G are orthogonally crossed at the center position of the flat surface 9A, and the marker grooves M are formed from both ends of these linear grooves G. Although a total of four radial surfaces are provided in the diameter direction up to the outer periphery of the flat surface 9A, the present invention is not limited to this embodiment, and three or more linear grooves intersect at the center position of the flat surface. In this case, the marker grooves may be provided in pairs corresponding to the number of the linear grooves, one pair on each outer side of each linear groove.

また、本実施形態のものにおいては、マーカー溝Mの中心寄りの端部Tは楔状に尖ってその先端に線状溝Gが連続している構成としているが、マーカー溝の端部は、これに限定するものではなく、例えば半円弧状に形成してもよい。また、線状溝とマーカー溝の間は連続させなくてもよい。   In addition, in the present embodiment, the end T near the center of the marker groove M is pointed like a wedge and the linear groove G is continuous at the tip, but the end of the marker groove is For example, it may be formed in a semicircular arc shape. Further, the linear groove and the marker groove need not be continuous.

また、前述した基準部材9は、測定光の光源をレーザ光源とする3次元測定機1の精度検査や誤差測定の校正に用いているが、これに限定するものではなく、他の光源、例えば、ランプや発光ダイオード等を測定光の光源とする光学式3次元測定機に用いてもよい。   Further, the reference member 9 described above is used for accuracy inspection and error measurement calibration of the three-dimensional measuring machine 1 using the light source of the measurement light as a laser light source, but is not limited to this, and other light sources such as, for example, The optical three-dimensional measuring machine using a lamp, a light emitting diode, or the like as a light source for measuring light may be used.

本発明の光学式3次元測定機の検査マスタ用基準部材は、測定光を被測定物に照射し、その反射光によって、被測定物の各部寸法測定を行う光学式3次元測定機の技術分野において、光学式3次元測定機の精度検査や測定誤差の校正を行う場合に利用することができる。   The inspection master reference member of the optical three-dimensional measuring machine according to the present invention irradiates the measurement light with the measurement light, and measures the dimensions of each part of the measurement with the reflected light. Can be used when performing accuracy inspection of an optical three-dimensional measuring machine and calibration of measurement errors.

1 3次元測定機
2 測定テーブル
3 可動フレーム
4 ヘッド部
5 昇降筒
6 治具パレット
7 検査マスタ
8 マスタ本体
8A、8B 円筒部
9 基準部材
9A 平坦面(被測定面)
9B ねじ穴
10 ボルト
11 ボルト挿通孔
S1、S2 上面
a 球面状凹部
G 線状溝
O 交点
M マーカー溝
T 端部
DESCRIPTION OF SYMBOLS 1 3D measuring machine 2 Measurement table 3 Movable frame 4 Head part 5 Lifting cylinder 6 Jig pallet 7 Inspection master 8 Master main body 8A, 8B Cylindrical part 9 Reference member 9A Flat surface (surface to be measured)
9B Screw hole 10 Bolt 11 Bolt insertion hole S1, S2 Upper surface a Spherical concave portion G Linear groove O Intersection M Marker groove T End

Claims (2)

光学式3次元測定機用検査マスタのマスタ本体に取り付けられる基準部材であって、3次元測定機から照射された測定光を反射する被測定面を有し、前記被測定面が球体表面に形成された円形の平坦面で構成され、前記被測定面には、その中心付近に測定光を乱反射させる微細な線状溝が当該被測定面の中心位置で互いに交差するように複数設けられているとともに、線状溝よりも幅広で測定光をより強く乱反射させるマーカー溝が、それぞれの線状溝の外側に隣接して被測定面の径方向に放射状に複数設けられていることを特徴とする光学式3次元測定機の検査マスタ用基準部材。   A reference member attached to a master body of an inspection master for an optical three-dimensional measuring machine, having a measured surface that reflects measurement light emitted from the three-dimensional measuring machine, and the measured surface is formed on a spherical surface The measurement surface is provided with a plurality of fine linear grooves that diffusely reflect measurement light near the center of the measurement surface so as to intersect each other at the center position of the measurement surface. In addition, a plurality of marker grooves that are wider than the linear grooves and diffusely reflect the measurement light more strongly are provided in the radial direction of the surface to be measured adjacent to the outer sides of the respective linear grooves. Reference member for inspection master of optical 3D measuring machine. 線状溝とマーカー溝は、被測定面上で直交する2つの直径上にそれぞれ配置されているとともに、マーカー溝の中心寄りの端部は楔状に尖ってその先端が線状溝に連続していることを特徴とする請求項1記載の光学式3次元測定機の検査マスタ用基準部材。   The linear groove and the marker groove are respectively arranged on two diameters that are orthogonal to each other on the surface to be measured, the end near the center of the marker groove is pointed like a wedge, and the tip is continuous with the linear groove. The inspection master reference member for an optical three-dimensional measuring machine according to claim 1.
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