CN117086907A - Flexible adsorption device for exchange plate manipulator and exchange plate manipulator - Google Patents

Abstract

The application provides a flexible adsorption device for an exchange plate manipulator and the exchange plate manipulator, wherein the structure of the flexible adsorption device for the exchange plate manipulator comprises a vertical movement part, the upper part of the vertical movement part is connected with a lifting component of the exchange plate manipulator, and the vertical movement part can lift and move in the vertical direction; the leveling part is covered on the vertical movement part, the upper part of the vertical movement part is penetrated on the leveling part, the leveling part is movably connected with the vertical movement part, and the leveling part can incline relative to the vertical movement part; and the adsorption part is arranged on the leveling part and comprises a plurality of first adsorption components and a plurality of second adsorption components, the second adsorption components can stretch out and draw back, a plurality of adsorption points are arranged on the upper part of the mask, and the first adsorption components and the second adsorption components are used for adsorbing the adsorption points. The flexible adsorption device for the plate exchange manipulator can solve the problems that the conventional adsorption device is low in handover precision and the mask plate is easy to deform.

Description

Flexible adsorption device for exchange plate manipulator and exchange plate manipulator

Technical Field

The application relates to the technical field of exchange plate manipulators, in particular to a flexible adsorption device for an exchange plate manipulator and the exchange plate manipulator.

Background

The mask is an important material in the mask transmission process, and the exchange mask manipulator is responsible for carrying out material transmission between the mask table and the mask library. In the transmission process, the position accuracy, safety and reliability of the mask plate are required to be ensured. The adsorption device is used as an important component of the exchange plate manipulator, and plays a decisive role in the reliability, safety, handover precision and deformation of materials in the transmission process.

The existing adsorption device is large in weight, deformation of the mask plate is easy to cause due to the influence of dead weight, and the position of a flexible pivot of the adsorption device, which is far away from the surface of the mask plate, is too large, so that the resonance frequency of the adsorption device is small. In addition, the existing mask plate fixing mode mostly adopts a plate fork structure to bear the mask plate and uses an air cylinder to tightly prop up the mask plate. The plate fork is made of rigid materials, so that coplanarity is difficult to ensure, and the connection precision is easy to influence. Thus, a need exists for a new flexible adsorption device.

Disclosure of Invention

In view of the above, the present application provides a flexible adsorption device for a reticle manipulator and a reticle manipulator, which are used for solving the problems of low handover precision and easy deformation of a reticle of the existing adsorption device.

According to a first aspect of the present application, there is provided a flexible adsorption apparatus for a swap plate manipulator, wherein the flexible adsorption apparatus for a swap plate manipulator comprises: the upper part of the vertical movement part is connected with the lifting component of the exchange plate manipulator, and the vertical movement part can lift and move in the vertical direction; the leveling part is covered on the vertical movement part, the upper part of the vertical movement part is penetrated on the leveling part, the leveling part is movably connected with the vertical movement part, and the leveling part can incline relative to the vertical movement part; and the adsorption part is arranged on the leveling part and comprises a plurality of first adsorption components and a plurality of second adsorption components, the second adsorption components can stretch and retract, a plurality of adsorption points are arranged on the upper part of the mask plate, and the first adsorption components and the second adsorption components are used for adsorbing the adsorption points.

Preferably, the adsorption part further comprises a plurality of connecting rod brackets, the top ends of the connecting rod brackets are connected with the leveling part, and the top ends of the first adsorption component and the second adsorption component are connected with the bottom ends of the connecting rod brackets.

Preferably, the first adsorption assembly includes: the first rubber ring is adhered to the bottom end of the connecting rod bracket, and a first through hole is formed in the middle of the first rubber ring; the first fixing seat is arranged at the lower part of the first rubber ring, a first channel is formed in the first fixing seat, and an adsorption strip is arranged at the bottom of the first fixing seat; the first air pipe joint is arranged on the connecting rod bracket and is communicated with the first through hole and the first channel; the second adsorption assembly includes: the second rubber ring is adhered to the bottom end of the connecting rod bracket, and a second through hole is formed in the middle of the second rubber ring; the second fixing seat is arranged at the lower part of the second rubber ring, a second channel is formed in the second fixing seat, and an adsorption strip is arranged at the bottom of the second fixing seat; the second air pipe connector is arranged on the connecting rod bracket and is communicated with the second through hole and the second channel; the hardness of the first rubber ring is greater than the hardness of the second rubber ring.

Preferably, a plurality of the first adsorption assemblies and a plurality of the second adsorption assemblies are arranged in two rows on two sides of the leveling part, and the first adsorption assemblies and the second adsorption assemblies in each row are staggered.

Preferably, six adsorption points are arranged on the upper portion of the mask, the six adsorption points are uniformly arranged in two rows on the upper portion of the mask, two first adsorption assemblies and one second adsorption assembly are alternately arranged on the first side of the leveling part, two second adsorption assemblies and one first adsorption assembly are alternately arranged on the second side of the leveling part, and the second adsorption assemblies and the first adsorption assemblies correspond to the positions of the adsorption points.

Preferably, the adsorption part further includes: the working negative pressure air circuit comprises a first air circuit, a second air circuit and a third air circuit, wherein the first air circuit is communicated with the second adsorption component at the first end of the first side of the leveling part and the first adsorption component at the second end of the second side of the leveling part; the second air circuit is communicated with the second adsorption component at the second end of the first side of the leveling part and the first adsorption component at the first end of the second side of the leveling part; the third air passage is communicated with the first adsorption component in the middle of the first side of the leveling part and the second adsorption component in the middle of the second side of the leveling part; and the standby negative pressure air passage is communicated with the working negative pressure air passage.

Preferably, the flexible adsorption device for the exchange version manipulator further comprises a detection unit, the detection unit is mounted on the vertical movement part, the detection unit comprises at least three vacuum pressure sensors, and the three vacuum pressure sensors are respectively communicated with the first air channel, the second air channel and the third air channel.

Preferably, the vertical movement portion includes: the vertical connecting piece is connected with the lifting component of the exchange plate manipulator; the upper part of the main body connecting column penetrates through the leveling part and is connected with the vertical connecting piece, a Y-shaped fixing plate is arranged at the lower part of the main body connecting column, and first mounting grooves are formed in three end parts of the Y-shaped fixing plate; the fixed block is arranged in the first mounting groove, and a V-shaped groove is formed at the top of the fixed block; and an induction piece mounted at a side portion of the fixing block.

Preferably, the leveling part includes: the outer cover is arranged outside the vertical movement part and is Y-shaped, an upper cover is arranged at the top of the outer cover, and an opening for the main body connecting column to pass through is formed in the center of the upper cover; the support rods are arranged on the upper cover, the number of the support rods is at least three, the three support rods are respectively arranged corresponding to the three fixing blocks, the lower ends of the support rods are provided with ball heads, the ball heads are in contact with V-shaped grooves of the fixing blocks, and under the condition that the leveling parts are inclined relative to the vertical movement parts, the ball heads move in the V-shaped grooves; and the inductive sensors are arranged on the upper cover, the number of the inductive sensors is at least three, the three inductive sensors are respectively arranged corresponding to the three inductive pieces, and the inductive sensors stop triggering under the condition that the distance between the inductive sensors and the inductive pieces exceeds the preset distance.

According to a second aspect of the present application there is provided a swap plate manipulator, wherein the swap plate manipulator comprises a lifting assembly and a flexible suction device for a swap plate manipulator as described above, the lifting assembly being connected to the flexible suction device for a swap plate manipulator.

According to the flexible adsorption device for the exchange plate manipulator and the exchange plate manipulator, the upper part of the vertical movement part is connected with the lifting component of the exchange plate manipulator, and the vertical movement part can lift and move in the vertical direction; the leveling part is covered on the vertical movement part, the upper part of the vertical movement part is penetrated on the leveling part, and the leveling part is movably connected with the vertical movement part, so that the leveling part can incline relative to the vertical movement part; the adsorption part is installed in leveling portion, and the adsorption part includes a plurality of first adsorption components and a plurality of second adsorption components, and the second adsorption components can stretch out and draw back, and the upper portion of adsorbing the mask is provided with a plurality of adsorption points, and first adsorption components and second adsorption components are used for adsorbing adsorption points, the adsorption part has replaced original adsorption equipment, and telescopic second adsorption components has avoided the adsorption part to lead to the mask to warp because of the overconstraint in the in-process of adsorbing the mask, and can improve the coplanarity in the adsorption process, so can solve the problem that current adsorption equipment handing-over precision is low and easily causes the mask to warp effectively.

In order to make the above objects, features and advantages of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic view of a flexible suction device and reticle for a reticle exchange robot according to the present application.

Fig. 2 is a schematic view of a flexible adsorption device for a swap version robot according to the present application.

Fig. 3 is a schematic view of a part of structures of a leveling part and a vertical moving part of a flexible adsorption device for a swap plate manipulator according to the present application.

Fig. 4 is a schematic view of the internal structure of the flexible adsorption device for the exchange version robot according to the present application.

Fig. 5 is a schematic view of another angle of a flexible adsorption device for a swap plate manipulator according to the present application.

Fig. 6 is a schematic diagram of a reticle according to the application.

Fig. 7 is a schematic view of the working principle of the flexible adsorption device for the exchange version manipulator according to the present application.

Fig. 8 is a schematic view of a negative pressure gas circuit of a flexible adsorption device for a swap version robot according to the present application.

Reference numerals: 1-an adsorption part; 10-a connecting rod bracket; 100-adsorbing strips; 11-a first adsorption assembly; 110-a first rubber ring; 111-a first fixing seat; 112-a first air pipe joint; 12-a second adsorption module; 120-a second rubber ring; 121-a second fixing seat; 122-a second tracheal tube fitting; 13-working negative pressure air path; 131-a first air path; 132-a second air path; 133-a third air path; 14-standby negative pressure air circuit; 2-leveling part; 21-an outer cover; 210-an upper cover; 22-supporting rods; 220-ball head; 23-an inductive sensor; 3-a vertical movement part; 31-vertical connectors; 32-a body connection post; 320-Y-shaped fixing plate; 33-fixing blocks; 330-V-grooves; 34-sensing piece; 4-mask plate; 40-adsorption points; 5-a detection unit; 50-a cable transfer box; 51-vacuum pressure sensor.

Detailed Description

The following detailed description is provided to assist the reader in obtaining a thorough understanding of the methods, apparatus, and/or systems described herein. However, various changes, modifications, and equivalents of the methods, apparatuses, and/or systems described herein will be apparent after an understanding of the present disclosure. For example, the order of operations described herein is merely an example, and is not limited to the order set forth herein, but rather, obvious variations may be made upon an understanding of the present disclosure, other than operations that must occur in a specific order. In addition, descriptions of features known in the art may be omitted for the sake of clarity and conciseness.

The features described herein may be embodied in different forms and should not be construed as limited to the examples described herein. Rather, the examples described herein have been provided solely to illustrate some of the many possible ways of implementing the methods, devices, and/or systems described herein that will be apparent after understanding the present disclosure.

In the entire specification, when an element (such as a layer, region or substrate) is described as being "on", "connected to", "bonded to", "over" or "covering" another element, it may be directly "on", "connected to", "bonded to", "over" or "covering" another element or there may be one or more other elements interposed therebetween. In contrast, when an element is referred to as being "directly on," directly connected to, "or" directly coupled to, "another element, directly on," or "directly covering" the other element, there may be no other element intervening therebetween.

As used herein, the term "and/or" includes any one of the listed items of interest and any combination of any two or more.

Although terms such as "first," "second," and "third" may be used herein to describe various elements, components, regions, layers or sections, these elements, components, regions, layers or sections should not be limited by these terms. Rather, these terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first member, component, region, layer or section discussed in examples described herein could also be termed a second member, component, region, layer or section without departing from the teachings of the examples.

For ease of description, spatially relative terms such as "above … …," "upper," "below … …," and "lower" may be used herein to describe one element's relationship to another element as illustrated in the figures. Such spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "above" or "upper" relative to another element would then be oriented "below" or "lower" relative to the other element. Thus, the term "above … …" includes both orientations "above … …" and "below … …" depending on the spatial orientation of the device. The device may also be otherwise positioned (e.g., rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

The terminology used herein is for the purpose of describing various examples only and is not intended to be limiting of examples. Singular forms also are intended to include plural forms unless the context clearly indicates otherwise. The terms "comprises," "comprising," and "having" are intended to specify the presence of stated features, integers, operations, elements, and/or groups thereof, but do not preclude the presence or addition of one or more other features, integers, operations, elements, and/or groups thereof.

Variations from the shapes of the illustrations as a result, of manufacturing techniques and/or tolerances, are to be expected. Accordingly, the examples described herein are not limited to the particular shapes shown in the drawings, but include changes in shapes that occur during manufacture.

The features of the examples described herein may be combined in various ways that will be apparent upon an understanding of the present disclosure. Further, while the examples described herein have a variety of configurations, other configurations are possible as will be apparent after an understanding of the present disclosure.

As shown in fig. 1 to 8, according to a first aspect of the present application, there is provided a flexible adsorption device for a swap board manipulator including a vertical movement portion 3, a leveling portion 2, and an adsorption portion 1.

In the following description, a specific structure of the above-described components of the flexible adsorption device for a swap plate manipulator and a connection relationship of the above-described components will be specifically described with reference to fig. 1 to 8.

As shown in fig. 1 to 8, in an embodiment, an upper portion of the vertical movement portion 3 may be connected with a lifting assembly of the exchange plate robot so that the vertical movement portion 3 can be lifted and lowered in a vertical direction. The leveling part 2 can be covered on the vertical movement part 3, and the upper part of the vertical movement part 3 can be penetrated on the leveling part 2 to be connected with the lifting component. The leveling part 2 may be movably connected with the vertical movement part 3 such that the leveling part 2 can be inclined with respect to the vertical movement part 3. The suction part 1 may be mounted to the leveling part 2. The suction part 1 may include a plurality of first suction members 11 and a plurality of second suction members 12, wherein the second suction members 12 are telescopic. A plurality of adsorption points 40 may be provided on the upper portion of the reticle 4, and the first and second adsorption units 11 and 12 are used to adsorb the adsorption points 40, thereby adsorbing the reticle 4 to the adsorption unit 1. Because the second adsorption component 12 can stretch out and draw back, when the plurality of first adsorption components 11 and the plurality of second adsorption components 12 are simultaneously adsorbed on the adsorption points 40, the position of the second adsorption component 12 can be adjusted, so that the deformation of the mask 4 caused by over-constraint in the process of adsorbing the mask 4 by the adsorption part 1 is avoided.

Preferably, as shown in fig. 1 to 4, in an embodiment, the vertical movement part 3 may include a vertical connection member 31, a body connection post 32, a fixing block 33, and a sensing piece 34. Wherein, vertical connecting piece 31 is used for with the lifting assembly bolted connection of exchange version manipulator. The body connection post 32 may be formed in a cylindrical shape, and an upper portion of the body connection post 32 may be penetrated through the leveling part 2 and bolted to the vertical connection member 31. A Y-shaped fixing plate 320 is provided at the lower portion of the body connection post 32, the Y-shaped fixing plate 320 extends to three ends in three directions, and angles between the three ends may be 135 °, 135 ° and 90 °, respectively, preferably, the Y-shaped fixing plate 320 may be integrally formed with the body connection post 32. The Y-shaped fixing plate 320 is provided at each of three ends thereof with first mounting grooves, and the fixing blocks 33 may be adhered to the first mounting grooves. The top of the fixing block 33 may be formed with a V-shaped groove 330, and the V-shaped groove 330 is exposed from the upper plate surface of the Y-shaped fixing plate 320. The Y-shaped fixing plate 320 may further be provided with a second mounting groove at a side portion of the first mounting groove, the sensing piece 34 may be adhered in the second mounting groove, and a top portion of the sensing piece 34 is exposed from an upper plate surface of the Y-shaped fixing plate 320.

Preferably, as shown in fig. 1 to 4, in an embodiment, the leveling part 2 may include a housing 21, a support bar 22, and an inductive sensor 23. Wherein the outer cover 21 may be provided outside the vertical movement portion 3. The housing 21 may also be formed in a Y-shape to better house the Y-shaped fixing plate 320 therein. The top of the housing 21 may be provided with an upper cover 210, and the center of the upper cover 210 may be formed with an opening for passing through the upper portion of the body connection post 32. The support rod 22 may be screwed with the upper cover 210, and the lower end of the support rod 22 is disposed through the upper cover 210. The number of support rods 22 is at least three, and more preferably, the number of support rods 22 is three. The three support rods 22 are provided corresponding to the three fixing blocks 33, respectively. The lower end of the support bar 22 may also be bonded with a ball 220. Preferably, the ball 220 is a ceramic ball. Under the influence of gravity, the ball 220 contacts the V-shaped groove 330 of the fixed block 33. In the case where the leveling part 2 is inclined with respect to the vertical moving part 3, the ball 220 can move in the V-groove 330, and the three support bars 22 can keep the leveling part 2 horizontal according to the three-point leveling principle. The inductive sensor 23 may be mounted to the upper cover 210 by a screw connection, and the lower end of the inductive sensor 23 may be disposed through the upper cover 210. The number of the inductive sensors 23 is at least three, and it is further preferable that the number of the inductive sensors 23 is three. The three inductive sensors 23 are respectively provided corresponding to the three inductive pads 34. In case the preset distance is exceeded between the inductive sensor 23 and the inductive patch 34, the inductive sensor 23 will cease triggering. Preferably, the preset distance may be 0.8mm.

Preferably, as shown in fig. 1 to 5, in an embodiment, the adsorption part 1 may further include a plurality of link holders 10. Specifically, the number of the link brackets 10 may be three, and the top ends of the three link brackets 10 may be respectively bolted to three ends of the Y-shaped fixing plate 320 of the leveling part 2. The top ends of the first and second adsorption assemblies 11 and 12 may be bolted to the bottom ends of the link bracket 10. Preferably, the bottom end of the link bracket 10 may be simultaneously connected to one or more first adsorption assemblies 11 and second adsorption assemblies 12.

Preferably, as shown in fig. 1 to 5, in an embodiment, the first adsorption assembly 11 may include a first rubber ring 110, a first fixing base 111, and a first air tube joint 112. Wherein the first rubber ring 110 may be bonded to the bottom end of the link bracket 10. A first through hole is formed in the middle of the first rubber ring 110. Preferably, the bottom end of the link bracket 10 may be provided with a fixing ring, the bottom end of the link bracket 10 may be screw-coupled with the fixing ring, and the top surface of the first rubber ring 110 may be bonded with the bottom surface of the fixing ring. The first fixing base 111 may be a rectangular box. The first fixing base 111 may be adhered to the bottom surface of the first rubber ring 110, and a first channel may be formed inside the first fixing base 111, and the first channel may be aligned with the first through hole. The bottom of the first fixing base 111 may further be provided with an adsorption strip 100 for being adsorbed to the adsorption point 40 of the mask 4. A first air tube joint 112 may be mounted to the link bracket 10, the first air tube joint 112 communicating with the first through hole and the first passage. Similarly, the second suction assembly 12 may include a second rubber ring 120, a second fixing base 121, and a second air tube connector 122. Wherein the second rubber ring 120 may be bonded to the bottom end of the link bracket 10. A second through hole is formed in the middle of the second rubber ring 120. Preferably, the bottom end of the link bracket 10 may be provided with a fixing ring, the bottom end of the link bracket 10 may be screw-coupled with the fixing ring, and the top surface of the second rubber ring 120 may be bonded with the bottom surface of the fixing ring. The second fixing base 121 may be a rectangular box. The second fixing seat 121 may be adhered to the bottom surface of the second rubber ring 120, and a second channel may be formed inside the second fixing seat 121, and the second channel may be aligned with the second through hole. The bottom of the second fixing base 121 may further be provided with an adsorption strip 100 for being adsorbed to the adsorption point 40 of the reticle 4. A second air pipe joint 122 may be installed to the link bracket 10, the second air pipe joint 122 communicating with the second through hole and the second passage. Preferably, the hardness of the first rubber ring 110 is greater than the hardness of the second rubber ring 120. The higher hardness of the first rubber ring 110 can increase the rigidity of the adsorbing portion 1 in the vertical direction, and the lower hardness of the second rubber ring 120 can allow the second adsorbing assembly 12 to expand and contract to a certain extent in the vertical direction. Preferably, each of the absorbent strips 100 is in the same plane. The distance between the first and second rubber rings 110 and 120 and the adsorption strip 100 may be 13mm, and the conventional structure is about 25.2mm, thereby improving the resonance frequency of the flexible adsorption device for the exchange version robot. Preferably, the first order frequency may be 231.7Hz to avoid resonance damage to the reticle 4.

Further, preferably, as shown in fig. 1 to 6, in an embodiment, a plurality of first adsorption assemblies 11 and a plurality of second adsorption assemblies 12 may be disposed in two rows on both sides of the leveling part 2, and the first adsorption assemblies 11 may be disposed to be staggered with the second adsorption assemblies 12 in each row. Further, preferably, the reticle 4 may be a rectangular plate. The upper part of the reticle 4 may be provided with six adsorption sites 40. Six adsorption sites 40 are uniformly arranged in two rows on both sides of the upper portion of the reticle 4 (i.e., three adsorption sites 40 are arranged in each row). Preferably, the number of the first adsorption assemblies 11 and the second adsorption assemblies 12 may be three each. Two first adsorption assemblies 11 and one second adsorption assembly 12 may be alternately provided at a first side of the leveling part 2. Two second adsorption assemblies 12 and one first adsorption assembly 11 may be alternately provided at the second side of the leveling part 2. The second suction unit 12 and the first suction unit 11 correspond to the positions of the suction points 40. Specifically, three link holders 10 may be connected to one second adsorption unit 12, one first adsorption unit 11 and one second adsorption unit 12, and two first adsorption units 11 and one second adsorption unit 12, respectively. And three first adsorption assemblies 11 and three second adsorption assemblies 12 are mounted to three ends of the Y-shaped fixing plate 320.

Preferably, as shown in fig. 1 to 5 and 8, in an embodiment, the adsorption part 1 may further include a working negative pressure air path 13 and a standby negative pressure air path 14. The working negative pressure air path 13 may include a first air path 131, a second air path 132, and a third air path 133. The first air passage 131 may be in communication with the second suction member 12 at the first end of the first side of the leveling part 2 and the first suction member 11 at the second end of the second side of the leveling part 2. The second air path 132 may communicate the second adsorption assembly 12 of the second end of the first side of the leveling part 2 with the first adsorption assembly 11 of the first end of the second side of the leveling part 2. The third air path 133 may communicate the first adsorption assembly 11 in the middle of the first side of the leveling part 2 with the second adsorption assembly 12 in the middle of the second side of the leveling part 2. Specifically, the working negative pressure air path 13 may be connected to the first air pipe joint 112 and the second air pipe joint 122. The number of the standby negative pressure air paths 14 can be three, and the three standby negative pressure air paths 14 can be all communicated with the working negative pressure air path 13. This arrangement can prevent one or both of the gas paths of the suction portion 1 from malfunctioning, which may cause the reticle 4 to fall out and be damaged.

Preferably, as shown in fig. 1 to 5, in an embodiment, the flexible adsorption device for a swap board manipulator may further include a detection unit 5. The detection unit 5 may be mounted to the vertical connection 31 of the vertical movement portion 3. Specifically, the vertical connection member 31 may extend out of the end plate, and the detection unit 5 may include a cable transit box 50, and the cable transit box 50 may be bolted to an end of the end plate. The detection unit 5 may further comprise at least three vacuum pressure sensors 51, and it is further preferred that the number of vacuum pressure sensors 51 is three. Three vacuum pressure sensors 51 are bolted to the cable junction box 50. The three vacuum pressure sensors 51 are respectively connected to the first air path 131, the second air path 132, and the third air path 133, and are configured to detect the pressure in the negative pressure air path, and an operator can determine whether the adsorption portion 1 is adsorbing the reticle 4 through the pressure value.

Further, according to a second aspect of the present application, there is provided a swap plate manipulator comprising a lifting assembly and a flexible adsorption device for a swap plate manipulator as described above, the lifting assembly being connected to the flexible adsorption device for a swap plate manipulator.

In the use process, the lifting component drives the vertical movement part 3 to descend, and then drives the leveling part 2 and the adsorption part 1 to move downwards so as to move to the mask table to pick up the mask 4. As shown in fig. 7, since the surface of the reticle 4 has a certain inclination angle (angle is small), and the suction part 1 is kept horizontal during the descent, only a part of the suction assembly is first brought into contact with the reticle 4 during the contact of the suction part 1 with the reticle 4. After the suction assembly comes into contact, the leveling part 2 is inclined, and thus part of the inductive sensor 23 stops triggering. Thereafter, the suction part 1 continues to move toward the reticle 4 until all of the 3 inductive sensors 23 stop triggering, at which time the suction part 1 comes into full contact with the reticle 4. During the vertical movement of the flexible suction device for the plate exchange manipulator, the three balls 220 are respectively located at the centers of the three V-shaped grooves 330. During the contact between the suction part 1 and the mask 4, the three balls 220 slightly move in the three V-shaped grooves 330 to adapt to the inclined surface of the mask 4. In addition, the number of the first adsorption components 11 is three, which accords with the principle that three points determine one plane, so that over-constraint is avoided. The second adsorption component 12 realizes a certain degree of expansion and contraction through the second rubber ring 120, so that the second adsorption component 12 is decoupled from the mask 4 in contact, the deformation of the mask 4 caused by over-constraint is avoided, the coplanarity is improved, and the handover precision of the flexible adsorption device for the exchange plate manipulator is further improved.

Finally, it should be noted that: the above examples are only specific embodiments of the present application, and are not intended to limit the scope of the present application, but it should be understood by those skilled in the art that the present application is not limited thereto, and that the present application is described in detail with reference to the foregoing examples: any person skilled in the art may modify or easily conceive of the technical solution described in the foregoing embodiments, or perform equivalent substitution of some of the technical features, while remaining within the technical scope of the present disclosure; such modifications, changes or substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present application, and are intended to be included in the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims (10)

1. A flexible adsorption device for an exchange plate manipulator for adsorbing a reticle, the flexible adsorption device for an exchange plate manipulator comprising:

the upper part of the vertical movement part is connected with the lifting component of the exchange plate manipulator, and the vertical movement part can lift and move in the vertical direction;

the leveling part is covered on the vertical movement part, the upper part of the vertical movement part is penetrated on the leveling part, the leveling part is movably connected with the vertical movement part, and the leveling part can incline relative to the vertical movement part; and

the adsorption part is installed in the leveling part, the adsorption part includes a plurality of first adsorption components and a plurality of second adsorption components, the second adsorption component can stretch out and draw back, the upper portion of mask is provided with a plurality of adsorption points, first adsorption component with the second adsorption component is used for adsorbing the adsorption point.

2. The flexible suction device for a swap board manipulator according to claim 1, wherein the suction unit further comprises a plurality of link brackets, the top ends of the link brackets are connected to the leveling unit, and the top ends of the first suction unit and the second suction unit are connected to the bottom ends of the link brackets.

3. The flexible suction device for a swap board manipulator according to claim 2, wherein the first suction assembly comprises:

the first rubber ring is adhered to the bottom end of the connecting rod bracket, and a first through hole is formed in the middle of the first rubber ring;

the first fixing seat is arranged at the lower part of the first rubber ring, a first channel is formed in the first fixing seat, and an adsorption strip is arranged at the bottom of the first fixing seat; and

the first air pipe joint is arranged on the connecting rod bracket and is communicated with the first through hole and the first channel;

the second adsorption assembly includes:

the second rubber ring is adhered to the bottom end of the connecting rod bracket, and a second through hole is formed in the middle of the second rubber ring;

the second fixing seat is arranged at the lower part of the second rubber ring, a second channel is formed in the second fixing seat, and an adsorption strip is arranged at the bottom of the second fixing seat; and

the second air pipe connector is arranged on the connecting rod bracket and is communicated with the second through hole and the second channel;

the hardness of the first rubber ring is greater than the hardness of the second rubber ring.

4. A flexible suction device for a swap robot according to any one of claims 1-3, wherein a plurality of the first suction members and a plurality of the second suction members are arranged in two rows on both sides of the leveling portion, and the first suction members and the second suction members in each row are staggered.

5. The flexible adsorption device for a reticle manipulator according to claim 4, wherein six adsorption points are provided on an upper portion of the reticle, the six adsorption points are uniformly arranged in two rows on the upper portion of the reticle, two first adsorption assemblies and one second adsorption assembly are provided on a first side of the leveling portion in a staggered manner, and two second adsorption assemblies and one first adsorption assembly are provided on a second side of the leveling portion in a staggered manner, and the second adsorption assemblies and the first adsorption assemblies correspond to positions of the adsorption points.

6. The flexible suction device for a swap board manipulator according to claim 5, wherein the suction unit further comprises:

the working negative pressure air circuit comprises a first air circuit, a second air circuit and a third air circuit, wherein the first air circuit is communicated with the second adsorption component at the first end of the first side of the leveling part and the first adsorption component at the second end of the second side of the leveling part; the second air circuit is communicated with the second adsorption component at the second end of the first side of the leveling part and the first adsorption component at the first end of the second side of the leveling part; the third air passage is communicated with the first adsorption component in the middle of the first side of the leveling part and the second adsorption component in the middle of the second side of the leveling part; and

and the standby negative pressure air passage is communicated with the working negative pressure air passage.

7. The flexible adsorption device for a swap robot of claim 6, further comprising a detection unit mounted to the vertical motion section, the detection unit comprising at least three vacuum pressure sensors, the three vacuum pressure sensors being respectively connected to the first air path, the second air path, and the third air path.

8. The flexible suction device for a swap board manipulator according to claim 1, wherein the vertical motion portion comprises:

the vertical connecting piece is connected with the lifting component of the exchange plate manipulator;

the upper part of the main body connecting column penetrates through the leveling part and is connected with the vertical connecting piece, a Y-shaped fixing plate is arranged at the lower part of the main body connecting column, and first mounting grooves are formed in three end parts of the Y-shaped fixing plate;

the fixed block is arranged in the first mounting groove, and a V-shaped groove is formed at the top of the fixed block; and

and the induction piece is arranged at the side part of the fixed block.

9. The flexible suction device for a swap board manipulator according to claim 8, wherein the leveling portion comprises:

the outer cover is arranged outside the vertical movement part and is Y-shaped, an upper cover is arranged at the top of the outer cover, and an opening for the main body connecting column to pass through is formed in the center of the upper cover;

the support rods are arranged on the upper cover, the number of the support rods is at least three, the three support rods are respectively arranged corresponding to the three fixing blocks, the lower ends of the support rods are provided with ball heads, the ball heads are in contact with V-shaped grooves of the fixing blocks, and under the condition that the leveling parts are inclined relative to the vertical movement parts, the ball heads move in the V-shaped grooves; and

the inductive sensor is arranged on the upper cover, the number of the inductive sensors is at least three, the three inductive sensors are respectively arranged corresponding to the three inductive pieces, and the inductive sensors stop triggering under the condition that the distance between the inductive sensors and the inductive pieces exceeds the preset distance.

10. An exchange plate manipulator, comprising a lifting assembly and a flexible adsorption device for the exchange plate manipulator according to any one of claims 1 to 9, wherein the lifting assembly is connected with the flexible adsorption device for the exchange plate manipulator.