CN117030804B - Sensor and use method thereof - Google Patents
Sensor and use method thereof Download PDFInfo
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- CN117030804B CN117030804B CN202311302643.7A CN202311302643A CN117030804B CN 117030804 B CN117030804 B CN 117030804B CN 202311302643 A CN202311302643 A CN 202311302643A CN 117030804 B CN117030804 B CN 117030804B
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- detection plate
- mounting substrate
- pin needle
- plate
- humidity
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- 238000000034 method Methods 0.000 title claims abstract description 11
- 238000001514 detection method Methods 0.000 claims abstract description 104
- 239000000758 substrate Substances 0.000 claims abstract description 54
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 19
- 239000003990 capacitor Substances 0.000 claims description 6
- 238000004891 communication Methods 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 12
- 230000008859 change Effects 0.000 abstract description 10
- 230000004044 response Effects 0.000 abstract description 10
- 239000011540 sensing material Substances 0.000 abstract description 7
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 239000002135 nanosheet Substances 0.000 abstract description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 239000002055 nanoplate Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
Abstract
The application belongs to the technical field of sensors, and particularly relates to a sensor and a use method thereof, wherein the sensor comprises the following components: the device comprises a mounting substrate, a first detection plate, a second detection plate, a third detection plate, a first PIN needle, a second PIN needle and a third PIN needle; wherein the first detection plate, the second detection plate and the third detection plate are arranged on the mounting substrate; the first PIN needle passes through the mounting substrate to be electrically connected with the first detection plate, the second PIN needle passes through the mounting substrate to be electrically connected with the second detection plate, and the third PIN needle passes through the mounting substrate to be electrically connected with the third detection plate; the application adopts MXene as a sensing material through the first detection plate and the third detection plate, has excellent water sensitivity and conductivity, and can show the characteristics of high response speed, wide humidity response range, low hysteresis and high repeatability based on the principle that the distance between MXene nano sheets is influenced by the change of the concentration of water molecules so as to change the tunnel resistance.
Description
Technical Field
The application belongs to the technical field of sensors, and particularly relates to a sensor and a using method thereof.
Background
At present, a dry bulb hygrometer, a dew point hygrometer and the like are adopted as traditional humidity sensors, but the traditional humidity sensors have poor consistency, high cost, large volume and poor linearity and hysteresis characteristics, and cannot directly obtain a measurement result according to a measurement signal.
In addition, the aluminum electrode in the traditional humidity sensor is corroded by water vapor, the reliability is low, and impurities generated after corrosion are difficult to remove.
Therefore, there is a need to develop a new sensor and a method of using the same to solve the above-mentioned problems.
Disclosure of Invention
The application aims to provide a sensor and a using method thereof.
In order to solve the above technical problem, the present application provides a sensor, which includes: the device comprises a mounting substrate, a first detection plate, a second detection plate, a third detection plate, a first PIN needle, a second PIN needle and a third PIN needle; wherein the first detection plate, the second detection plate and the third detection plate are arranged on the mounting substrate; the first PIN needle passes through the mounting substrate and is electrically connected with the first detection plate, the second PIN needle passes through the mounting substrate and is electrically connected with the second detection plate, and the third PIN needle passes through the mounting substrate and is electrically connected with the third detection plate.
Further, the first detection plate and the second detection plate are arranged in a circular shape, and the diameter of the first detection plate is larger than that of the second detection plate; the second detection plate is positioned between the first detection plate and the mounting substrate.
Further, the first detection plate is fixed to the mounting substrate by high-temperature sintered glass.
Further, the first detection plate and the mounting substrate are sealed, so that the second detection plate is sealed between the first detection plate and the mounting substrate, or the first detection plate and the mounting substrate are opened, and the second detection plate is communicated with the atmosphere.
Further, the third sensing plate is disposed around the first sensing plate.
Further, the mounting substrate is a ceramic substrate.
Further, the first detection plate includes: a first moisture-sensitive metal plate; the first humidity-sensitive metal plate is used as a pressure sensing electrode and a humidity sensing electrode.
Further, the second detection plate includes: a first pressure capacitor substrate; the first pressure capacitor substrate is printed on the mounting substrate and serves as a pressure sensing electrode.
Further, the third detection plate includes: a second moisture-sensitive metal plate; the second humidity-sensitive metal plate serves as a humidity-sensitive electrode.
In another aspect, the present application provides a method of using a sensor as described above, comprising: the first PIN needle, the second PIN needle and the third PIN needle are connected with the acquisition equipment to output pressure signals and humidity signals.
The application has the beneficial effects that the MXene is adopted as a sensing material by the first detection plate and the third detection plate, so that the water-sensitive type humidity sensor has excellent water sensitivity and conductivity, and the characteristics of high response speed, wide humidity response range, low hysteresis and high repeatability can be shown on the basis of the principle that the distance between MXene nano sheets is influenced by the change of the concentration of water molecules so as to change the tunnel resistance.
Additional features and advantages of the application will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the application.
In order to make the above objects, features and advantages of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present application, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a block diagram of a sensor of the present application;
fig. 2 is a cross-sectional view of a sensor of the present application.
In the figure:
1. a mounting substrate; 2. a first detection plate; 3. a second detection plate; 4. a third detection plate; 5. a first PIN needle; 6. a second PIN needle; 7. a third PIN needle; 8. and sintering the glass at high temperature.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present application more apparent, the technical solutions of the present application will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
Embodiment 1, in the present embodiment, as shown in fig. 1 to 2, the present embodiment provides a sensor including: a mounting substrate 1, a first detection board 2, a second detection board 3, a third detection board 4, a first PIN 5, a second PIN 6, and a third PIN 7; wherein the first detection plate 2, the second detection plate 3 and the third detection plate 4 are arranged on the mounting substrate 1; the first PIN 5 passes through the mounting substrate 1 and is electrically connected with the first detection plate 2, the second PIN 6 passes through the mounting substrate 1 and is electrically connected with the second detection plate 3, and the third PIN 7 passes through the mounting substrate 1 and is electrically connected with the third detection plate 4.
Specifically, the first pick-up plate 2 is used for simultaneously sensing pressure and humidity, the second pick-up plate 3 is used for sensing pressure, the third pick-up plate 4 is used for sensing humidity, the first PIN needle 5 and the second PIN needle 6 are used for pressure detection, the first PIN needle 5 and the third PIN needle 7 are used for humidity detection, namely, the first PIN needle 5 is shared for pressure and humidity detection, three PIN needles are needed for pressure and humidity detection simultaneously, the traditional pressure detection and humidity detection need to be independently detected, the PIN needles cannot be shared, the cost is higher than that of the sensor, meanwhile, the circuit is more complex, and the volume is larger.
In this embodiment, the first detection plate 2 and the third detection plate 4 adopt MXene as the sensing material, which has excellent water sensitivity and conductivity, and can show the characteristics of fast response speed, wide humidity response range, low hysteresis and high repeatability based on the principle that the MXene nano-sheet spacing is affected by the change of the water molecule concentration so as to change the tunnel resistance.
In this embodiment, the first detection plate 2 and the second detection plate 3 are circularly arranged, and the diameter of the first detection plate 2 is larger than that of the second detection plate 3; the second pickup plate 3 is located between the first pickup plate 2 and the mounting substrate 1.
Specifically, since the diameter of the first detection plate 2 is larger than the diameter of the second detection plate 3, the first detection plate 2 can completely cover the second detection plate 3.
In this embodiment, the first detection plate 2 is fixed to the mounting substrate 1 by the high temperature sintered glass 8, and serves to receive the assembly load.
As an alternative embodiment of the first detecting plate 2 and the second detecting plate 3, the first detecting plate 2 and the mounting substrate 1 are sealed, so that the second detecting plate 3 is sealed between the first detecting plate 2 and the mounting substrate 1, and further, absolute pressure detection of pressure can be achieved.
As another alternative embodiment of the first detecting plate 2 and the second detecting plate 3, the first detecting plate 2 and the mounting substrate 1 are opened so that the second detecting plate 3 is communicated with the atmosphere, and thus gauge pressure detection of pressure can be achieved.
In the present embodiment, the third detection plate 4 is disposed around the first detection plate 2.
Specifically, the third detection plate 4 is provided in a ring shape.
In this embodiment, the mounting substrate 1 is a ceramic substrate.
Specifically, the mounting substrate 1 functions as a pressure-bearing, external mounting.
In this embodiment, the first detection plate 2 includes: a first moisture-sensitive metal plate; the first humidity-sensitive metal plate is used as a pressure sensing electrode and a humidity sensing electrode.
Specifically, the first humidity-sensitive metal plate is made of an MXene material, and is used as a capacitive pressure sensing other electrode on one hand and is used as a humidity-sensitive metal sensing material on the other hand.
In this embodiment, the second detection plate 3 includes: a first pressure capacitor substrate; the first pressure capacitor substrate is printed on the mounting substrate 1, and serves as a pressure sensing electrode.
Specifically, metal is printed onto the mounting substrate 1 to form a first pressure capacitance substrate as a capacitance-type pressure sensing electrode.
In this embodiment, the third detection plate 4 includes: a second moisture-sensitive metal plate; the second humidity-sensitive metal plate serves as a humidity-sensitive electrode.
Specifically, the second humidity-sensitive metal plate is made of an MXene material and is used as a humidity-sensitive metal sensing material.
Specifically, the first detection plate 2 and the third detection plate 4 have excellent water sensitivity and conductivity, and based on the principle that the water molecule concentration change affects the distance between MXene nano-sheets so as to change the tunnel resistance, the device has the characteristics of high response speed (12 s), wide humidity response range (11% -94% Relative Humidity (RH)), low hysteresis (7% RH), high repeatability and the like.
Embodiment 2, on the basis of embodiment 1, this embodiment provides a method for using the sensor provided in embodiment 1, including: the first PIN needle 5, the second PIN needle 6 and the third PIN needle 7 are connected with the acquisition equipment to output a pressure signal and a humidity signal.
In summary, the first detection plate and the third detection plate adopt MXene as sensing materials, so that the MXene nano-plate sensing material has excellent water sensitivity and conductivity, and the characteristics of high response speed, wide humidity response range, low hysteresis and high repeatability can be shown on the basis of the principle that the distance between MXene nano-plates is influenced by the change of the concentration of water molecules so as to change the tunnel resistance.
The components (components not illustrating the specific structure) selected in the present application are common standard components or components known to those skilled in the art, and the structures and principles thereof are known to those skilled in the art through technical manuals or through routine experimental methods.
In the description of embodiments of the present application, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application will be understood in specific cases by those of ordinary skill in the art.
In the description of the present application, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the several embodiments provided by the present application, it should be understood that the disclosed systems, devices, and methods may be implemented in other manners. The above-described apparatus embodiments are merely illustrative, for example, the division of the units is merely a logical function division, and there may be other manners of division in actual implementation, and for example, multiple units or components may be combined or integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be through some communication interface, device or unit indirect coupling or communication connection, which may be in electrical, mechanical or other form.
The units described as separate units may or may not be physically separate, and units shown as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
In addition, each functional unit in the embodiments of the present application may be integrated in one processing unit, or each unit may exist alone physically, or two or more units may be integrated in one unit.
With the above-described preferred embodiments according to the present application as an illustration, the above-described descriptions can be used by persons skilled in the relevant art to make various changes and modifications without departing from the scope of the technical idea of the present application. The technical scope of the present application is not limited to the description, but must be determined according to the scope of claims.
Claims (5)
1. A sensor, comprising:
the device comprises a mounting substrate, a first detection plate, a second detection plate, a third detection plate, a first PIN needle, a second PIN needle and a third PIN needle; wherein the method comprises the steps of
The first detection plate, the second detection plate and the third detection plate are arranged on the mounting substrate;
the first PIN needle passes through the mounting substrate to be electrically connected with the first detection plate, the second PIN needle passes through the mounting substrate to be electrically connected with the second detection plate, and the third PIN needle passes through the mounting substrate to be electrically connected with the third detection plate;
the first detection plate and the second detection plate are arranged in a circular shape, and the diameter of the first detection plate is larger than that of the second detection plate;
the second detection plate is positioned between the first detection plate and the mounting substrate;
the third detection plate is arranged around the first detection plate;
the first detection plate includes: a first moisture-sensitive metal plate;
the first humidity-sensitive metal plate is used as a pressure sensing electrode and a humidity sensing electrode;
the second detection plate includes: a first pressure capacitor substrate;
the first pressure capacitor substrate is printed on the mounting substrate and serves as a pressure sensing electrode;
the third detection plate includes: a second moisture-sensitive metal plate;
the second humidity-sensitive metal plate is used as a humidity sensing electrode;
the first humidity-sensitive metal plate is made of an MXene material, and the second humidity-sensitive metal plate is made of an MXene material.
2. The sensor of claim 1, wherein the sensor is configured to,
the first detection plate is fixed with the mounting substrate through high-temperature sintered glass.
3. A sensor according to claim 2, wherein,
the first detection plate and the mounting substrate are sealed, so that the second detection plate is sealed between the first detection plate and the mounting substrate, or
The first detection plate and the mounting substrate are open therebetween so that the second detection plate is in communication with the atmosphere.
4. The sensor of claim 1, wherein the sensor is configured to,
the mounting substrate is a ceramic substrate.
5. A method of using the sensor of any one of claims 1-4, comprising:
the first PIN needle, the second PIN needle and the third PIN needle are connected with the acquisition equipment to output pressure signals and humidity signals.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311302643.7A CN117030804B (en) | 2023-10-10 | 2023-10-10 | Sensor and use method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311302643.7A CN117030804B (en) | 2023-10-10 | 2023-10-10 | Sensor and use method thereof |
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| Publication Number | Publication Date |
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| CN117030804A CN117030804A (en) | 2023-11-10 |
| CN117030804B true CN117030804B (en) | 2023-12-12 |
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| CN202311302643.7A Active CN117030804B (en) | 2023-10-10 | 2023-10-10 | Sensor and use method thereof |
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| CN117030804A (en) | 2023-11-10 |
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