CN109253757A - A kind of flexible passive is wireless humidity, pressure integrated sensor - Google Patents
A kind of flexible passive is wireless humidity, pressure integrated sensor Download PDFInfo
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- CN109253757A CN109253757A CN201811123851.XA CN201811123851A CN109253757A CN 109253757 A CN109253757 A CN 109253757A CN 201811123851 A CN201811123851 A CN 201811123851A CN 109253757 A CN109253757 A CN 109253757A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/2405—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by varying dielectric
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Abstract
The present invention relates to sensor technical fields, disclose a kind of wireless humidity of flexible passive, pressure integrated sensor, the integrated sensor includes interdigital capacitive humidity sensor and interdigital capacitive pressure sensor, it is disposed with humidity sensitive film from top to bottom, upper metal layer, flexible base board, intermediate metal layer, dielectric layer, lower metal layer and encapsulated layer, upper metal layer includes humidity sensitive capacitance, intermediate metal layer includes presser sensor capacitor, interdigital capacitive humidity sensor includes humidity sensitive film, humidity sensitive capacitance and flexible base board, interdigital capacitive pressure sensor includes flexible base board, presser sensor capacitor, dielectric layer, lower metal layer and encapsulated layer.Above-mentioned integrated sensor is by forming double-resonant circuit for humidity sensitive capacitance, presser sensor capacitor, two capacity plate antennas and inductance connection, it realizes and the real-time radio of two humidity, pressure parameters is monitored, and two frequency signals are not interfere with each other, measurement accuracy is high, can adapt to more multi-environment.
Description
Technical field
The present invention relates to art of pressure sensors more particularly to a kind of wireless humidity of flexible passive, pressure integrated sensor.
Background technique
The development of wireless sensor technology is most important for establishing for Internet of Things.According to the basic structure of sensor, nothing
Line sensor is divided into active radio sensor and the big basic class of passive wireless sensor two, and wherein active radio senses
Device contains active device, and usually requires a power supply and provide energy, thus is subject to certain restrictions in practical application, and nothing
Source wireless sensor is not limited without power supply or other any active devices, service life by power supply, can adapt to more answer
With the parameter detecting under scene, including but not limited to inside of human body detection, epidermal wound monitoring, the detection of food and medicine package interior
Deng, thus the extensive concern by academia.
Typical passive wireless sensor is made of a sensitization capacitance and a fixed inductance, and the two is connected, and to form LC humorous
Shake circuit, and resonance frequency can wirelessly be read by reading coil, to realize the radio detection to parameter to be measured.It is answered certain
With under scene, need in environment multiple parameters carry out simultaneously detect, but work as multiple LC type passive wireless sensors be placed on one
When rising, because there are mutual inductance interference between each coil inductance, it can enable each sensor resonant frequency that division or offset occurs, so that reading
Deviation is excessive between the number coil resonance frequency measured and single sensor actual frequency, reading failure, thus is difficult to realize more
It is measured while a parameter.
Summary of the invention
In view of the problems of the existing technology, the present invention proposes a kind of wireless humidity stress integrated sensor of flexible passive,
By the way that humidity sensitive capacitance, presser sensor capacitor, two capacity plate antennas and inductance connection are formed double-resonant circuit, realize to wet
The real-time radio monitoring of two degree, pressure parameters, and two frequency signals are not interfere with each other, and measurement accuracy is high, this outer sensor by
Flexible passive wireless devices are constituted, and are not limited, be can adapt to more multi-environment by battery.
In order to achieve the above technical purposes, the embodiment of the present invention adopts the following technical scheme that
A kind of flexible passive is wireless humidity, pressure integrated sensor, the integrated sensor include that interdigital capacitive humidity passes
Sensor and interdigital capacitive pressure sensor, be disposed with from top to bottom humidity sensitive film, upper metal layer, flexible base board,
Intermediate metal layer, dielectric layer, lower metal layer and encapsulated layer, upper metal layer include humidity sensitive capacitance, and intermediate metal layer includes pressure
Power sensitization capacitance, interdigital capacitive humidity sensor include humidity sensitive film, humidity sensitive capacitance and flexible base board, interdigital electricity
Appearance formula pressure sensor includes flexible base board, presser sensor capacitor, dielectric layer, lower metal layer and encapsulated layer.
Further, upper metal layer includes humidity sensitive capacitance, shares top electrode, inner ring inductance and be set to inner ring inductance
The outer ring inductance of periphery, one end of inner ring inductance be provided with lead, inner ring inductance the other end and outer ring inductance one end phase
Even, the other end of outer ring inductance is provided with outer lead.
Further, inner ring inductance and outer ring inductance are planar spiral inductor, and inner ring inductance and the inductance of outer ring inductance are big
It is small equal.
Further, intermediate metal layer includes presser sensor capacitor, the first lower electrode and the second lower electrode, the first lower electrode
It is connected respectively with one end of presser sensor capacitor with the second lower electrode, presser sensor capacitor includes lead and outer lead.
Further, top electrode, the first lower electrode and flexible base board form the first capacity plate antenna；Top electrode, the second lower electricity
Pole and flexible base board form the second capacity plate antenna.
Further, flexible base board includes lead through-hole and outer lead through-hole, and the lead and pressure of inner ring inductance are quick
The lead that electrification holds is connected by lead through-hole, and the outer lead of outer ring inductance and the outer lead of presser sensor capacitor are outside
Lead hole is connected.
Further, dielectric layer is the thin polymer film that surface is provided with microstructure.
Further, microstructure includes the Minisize pyramid of array arrangement, and thin polymer film includes polydimethylsiloxanes
Alkane.
Further, humidity sensitive capacitance, presser sensor capacitor, the first capacity plate antenna, the second capacity plate antenna, inner ring inductance
It is linked to be double-resonant circuit with outer ring inductance.
Further, integrated sensor includes the first different resonance frequency of resonance frequency and the second resonance frequency, and first
Resonance frequency changes with the variation of humidity sensitive capacitance, and the second resonance frequency changes with the variation of presser sensor capacitor, outside
Circle inductance wirelessly exports humidity sensitive signal and presser sensor signal.
Compared to the prior art, the present invention has the following technical effect that
The invention proposes a kind of wireless humidity of flexible passive, pressure integrated sensor, which includes interdigital
Capacitance type humidity sensor and interdigital capacitive pressure sensor are disposed with humidity sensitive film, upper metal from top to bottom
Layer, flexible base board, intermediate metal layer, dielectric layer, lower metal layer and encapsulated layer, upper metal layer include humidity sensitive capacitance, intermediate
Metal layer includes presser sensor capacitor, interdigital capacitive humidity sensor include humidity sensitive film, humidity sensitive capacitance with it is soft
Property substrate, interdigital capacitive pressure sensor includes flexible base board, presser sensor capacitor, dielectric layer, lower metal layer and encapsulated layer.
Humidity that above-mentioned flexible passive is wireless, pressure integrated sensor are by by humidity sensitive capacitance, presser sensor capacitor, two plate electricity
Hold and form double-resonant circuit with inductance connection, realize and the real-time radio of two humidity, pressure parameters is monitored, and two frequency letters
It number not interfereing with each other, measurement accuracy is high, in addition, sensor is made of flexible passive wireless devices, do not limited by battery,
The needs that can adapt to more application scenarios are easy to batch making and promote.
Detailed description of the invention
Fig. 1 is a kind of wireless humidity of flexible passive, the layered structure of pressure integrated sensor that the embodiment of the present invention proposes
Schematic diagram；
Fig. 2 is the plane structure chart for the upper metal layer that the embodiment of the present invention proposes；
Fig. 3 is the plane structure chart for the intermediate metal layer that the embodiment of the present invention proposes；
Fig. 4 is the equivalent circuit diagram of the wireless humidity of flexible passive of proposition of the embodiment of the present invention, pressure integrated sensor；
Wherein: 1, humidity sensitive film；2, upper metal layer；21, humidity sensitive capacitance；22, top electrode is shared；23, inner ring
Inductance, 24, the lead of upper metal layer；25, outer ring inductance；26, the outer lead of upper metal layer；3, flexible base board；31, lead
Through-hole；32, outer lead through-hole；4, intermediate metal layer；41, the first lower electrode；42, the second lower electrode；43, presser sensor capacitor
Lead；44, presser sensor capacitor；45, the outer lead of presser sensor capacitor；5, dielectric layer；6, lower metal layer；7, encapsulated layer.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
In addition, the terms "and/or", only a kind of incidence relation for describing affiliated partner, indicates may exist
Three kinds of relationships, for example, A and/or B, can indicate: individualism A exists simultaneously A and B, these three situations of individualism B.Separately
Outside, character "/" herein typicallys represent the relationship that forward-backward correlation object is a kind of "or".
As shown in Figure 1, the embodiment of the present invention proposes a kind of wireless humidity of flexible passive, pressure integrated sensor, the collection
Include interdigital capacitive humidity sensor and interdigital capacitive pressure sensor at sensor, is disposed with humidity from top to bottom
Sensitive thin film 1, upper metal layer 2, flexible base board 3, intermediate metal layer 4, dielectric layer 5, lower metal layer 6 and encapsulated layer 7, upper metal layer
2 include humidity sensitive capacitance 21, and intermediate metal layer 4 includes presser sensor capacitor 44, and interdigital capacitive humidity sensor includes wet
Sensitive thin film 1, humidity sensitive capacitance 21 and flexible base board 3 are spent, interdigital capacitive pressure sensor includes flexible base board 3, pressure
Sensitization capacitance 44, dielectric layer 5, lower metal layer 6 and encapsulated layer 7.
Wherein, humidity sensitive film 1 is set to integrated sensor top layer, can incude ambient humidity variation in real time simultaneously
Variation is passed into upper metal layer 2.
Flexible base board 3 includes lead through-hole 31 and outer lead through-hole 32, the lead 24 of upper metal layer inner ring inductance with
The lead 43 of presser sensor capacitor is connected by lead through-hole 31, and the outer lead 26 and pressure of upper metal layer outer ring inductance are quick
The outer lead 45 that electrification holds is connected by outer lead through-hole 32.Flexible base board 3 can freely deformable, enable integrated sensor
The needs for enough adapting to more application scenarios are easy to batch making and promote.
Dielectric layer 5 is the thin polymer film that surface has micro-structure, including but not limited to dimethyl silicone polymer (PDMS)
Deng surface micro-structure includes but is not limited to micro- pyramid array, and dielectric layer is covered on interdigital capacitor surface, and thickness is with pressure
Size changes.
Humidity that above-mentioned flexible passive is wireless, pressure integrated sensor are by by humidity sensitive capacitance, presser sensor capacitor, two
A capacity plate antenna and inductance connection form double-resonant circuit, realize and monitor to the real-time radio of two humidity, pressure parameters, and two
A frequency signal is not interfere with each other, and measurement accuracy is high, and furthermore the sensor is made of flexible passive wireless devices, is not made by battery
It is limited, be can adapt to more multi-environment with the service life.
Preferably, as shown in Fig. 2, upper metal layer 2 includes humidity sensitive capacitance 21, shares top electrode 22, inner ring inductance 23
With the outer ring inductance 25 for being set to inner ring inductance periphery, one end of inner ring inductance 23 be provided with lead 24, inner ring inductance it is another
One end is connected with one end of outer ring inductance, and the other end of outer ring inductance 25 is provided with outer lead 26.
Wherein, inner ring inductance 23 and outer ring inductance 25 are planar spiral inductor, the inductance of inner ring inductance and outer ring inductance
It is equal in magnitude.
Preferably, as shown in figure 3, intermediate metal layer 4 includes the first lower electrode 41 and the second lower electrode 42, presser sensor electricity
Hold the 44, first lower electrode 41 to be connected with one end of presser sensor capacitor 44 respectively with the second lower electrode 42, presser sensor capacitor packet
Include lead 43 and outer lead 45.
Preferably, the first lower electrode 41 is identical as the second lower shape of electrode 42.
Preferably, it shares the lower electrode 41 of top electrode 22, first and forms the first capacity plate antenna with flexible base board 3；It shares and powers on
The lower electrode 42 in pole 22, second forms the second capacity plate antenna with flexible base board 3.
Preferably, the first capacity plate antenna is equal with the capacitance size of the second capacity plate antenna.
Specifically, the interdigitation humidity sensitive capacitance 21 in the integrated sensor, in humidity sensitive film 1, upper metal layer 2
A capacitance type humidity sensor is collectively formed with flexible base board 3, capacitance size changes with humidity；Flexible base board 3, in
Between the interdigitation presser sensor capacitor 43 of metal layer 4, dielectric layer 5, lower metal layer 6 and encapsulated layer a condenser type pressure is collectively formed
Force snesor, capacitance size change with pressure；Two of shared top electrode 22 and intermediate metal layer 4 in upper metal layer 2
A lower electrode (the lower electrode 42 of the first lower electrode 41, second) and flexible base board 3 together form two equal-sized plates
Capacitor；I.e. top electrode 22, lower electrode 41, flexible base board 3 together form a capacity plate antenna, while top electrode 22, lower electrode
42, flexible base board 3 together forms another capacity plate antenna, and two capacity plate antennas are equal in magnitude.
Above-mentioned two planar spiral inductor (inner ring inductance 23, outer ring inductance 25), humidity sensitive capacitance 21, one pressures
Power sensitization capacitance 43 and two capacity plate antennas, these capacitor and inductors collectively form a double-resonant circuit, which has two
A different resonance frequency, one of resonance frequency only change with presser sensor capacitance variations, another resonance frequency is only
Change with humidity sensitive capacitance and change, two resonance frequencies all pass through outer ring inductance and wirelessly export.The two independent resonance
Frequency, can be respectively with humidity, change in pressure, and the two is not interfere with each other, and joins to realize to humidity and pressure two
It is measured while number.
As shown in figure 4, two above-mentioned planar spiral inductors, a presser sensor capacitor, a humidity sensitive capacitance and
Two capacity plate antennas collectively form a double-resonant circuit, simplify circuit model as shown in figure 4, wherein Cx is presser sensor electricity
Holding, Cy is humidity sensitive capacitance, and C1 is two equal fixed capacities with C2, and L1 is outer ring inductance 25, and L2 is inner ring inductance 23,
L1 is equal to L2, and the two mutual inductance is M.There are two different resonance frequencies for sensor tool, and one of resonance frequency f1 is only with pressure
Sensitization capacitance Cx changes and changes, another resonance frequency f2 only changes with humidity sensitive capacitance Cy and changed, and the two is not done mutually
It disturbs, and is all wirelessly exported by outer ring inductance (25).
The course of work: when the ambient pressure suffered by the sensor changes, deformation occurs makes for 5 surface micro-structure of dielectric layer
Thickness of dielectric layers changes, and presser sensor capacitor Cx changes therewith, so as to cause a resonance frequency f1 offset and
Another frequency f2 is unaffected；When ambient humidity changes, the dielectric constant of humidity sensitive film 1 changes,
Humidity sensitive capacitance Cy changes therewith, so as to cause another resonance frequency f2 offset and frequency f1 is unaffected.
By the measurement of respective resonant frequencies, the variation of corresponding pressure, humidity can be obtained respectively.
Application method: the wireless humidity of the flexible passive, pressure integrated sensor according to the present invention, the palpus after completing
First sensor is demarcated, and establishes the pressure-dependent curve model of resonance frequency f1 and resonance frequency f2 respectively with humidity
The curve model of variation.After the completion of calibration, then in sensor is placed in environment to be measured, and using reading coil to sensor
Two resonance frequencies are detected, by the anti-variable quantity for releasing pressure, humidity of institute's measured frequency.
To sum up, the invention proposes a kind of wireless humidity of flexible passive, pressure integrated sensor, which includes
Interdigital capacitive humidity sensor and interdigital capacitive pressure sensor, be disposed with from top to bottom humidity sensitive film, on
Metal layer, flexible base board, intermediate metal layer, dielectric layer, lower metal layer and encapsulated layer, upper metal layer include humidity sensitive capacitance,
Intermediate metal layer includes presser sensor capacitor, and interdigital capacitive humidity sensor includes humidity sensitive film, humidity sensitive capacitance
With flexible base board, interdigital capacitive pressure sensor includes flexible base board, presser sensor capacitor, dielectric layer, lower metal layer and envelope
Fill layer.Humidity that above-mentioned flexible passive is wireless, pressure integrated sensor are made of flexible passive wireless devices completely, are not made by battery
It is limited with the service life, can adapt to more multi-environment, real-time radio monitoring of the realization to two humidity, pressure parameters, and two frequencies
Signal is not interfere with each other, and measurement accuracy is high.In addition, the integrated sensor structure is simple, it is low in cost, and material therefor is flexibility
Material can adapt to the needs of more application scenarios, is easy to batch making and promotes.
Through the above description of the embodiments, it is apparent to those skilled in the art that, for description
It is convenienct and succinct, only with the division progress of above-mentioned each functional unit for example, in practical application, can according to need and will be upper
It states function distribution to be completed by different functional units, i.e., the internal structure of device is divided into different functional units, to complete
All or part of function described above.The specific work process of the system, apparatus, and unit of foregoing description, before can referring to
The corresponding process in embodiment of the method is stated, details are not described herein.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
Those familiar with the art in the technical scope disclosed by the present invention, can easily think of the change or the replacement, and should all contain
Lid is within protection scope of the present invention.Therefore, protection scope of the present invention should be based on the protection scope of the described claims.
Claims (10)
1. a kind of flexible passive is wireless humidity, pressure integrated sensor, which is characterized in that the integrated sensor includes interdigital electricity
Appearance formula humidity sensor and interdigital capacitive pressure sensor, the integrated sensor are disposed with humidity sensitive from top to bottom
Film, upper metal layer, flexible base board, intermediate metal layer, dielectric layer, lower metal layer and encapsulated layer, the upper metal layer includes wet
Sensitization capacitance is spent, the intermediate metal layer includes presser sensor capacitor, and the interdigital capacitive humidity sensor includes described wet
Sensitive thin film, the humidity sensitive capacitance and the flexible base board are spent, the interdigital capacitive pressure sensor includes described soft
Property substrate, the presser sensor capacitor, the dielectric layer, the lower metal layer and the encapsulated layer.
2. flexible passive as described in claim 1 is wireless humidity, pressure integrated sensor, which is characterized in that the upper metal
Layer includes humidity sensitive capacitance, shares top electrode, inner ring inductance and the outer ring inductance for being set to inner ring inductance periphery, described
One end of inner ring inductance is provided with lead, the other end of the inner ring inductance is connected with one end of the outer ring inductance, described
The other end of outer ring inductance is provided with outer lead.
3. flexible passive as claimed in claim 2 is wireless humidity, pressure integrated sensor, which is characterized in that the inner ring electricity
Sense is planar spiral inductor with the outer ring inductance, and the inductance of the inner ring inductance and the outer ring inductance is equal in magnitude.
4. the wireless humidity of flexible passive as described in any one of claim 1-3, pressure integrated sensor, feature exist
In, the intermediate metal layer include presser sensor capacitor, the first lower electrode and the second lower electrode, described first descend electrode with it is described
Second lower electrode is connected with one end of the presser sensor capacitor respectively, and the presser sensor capacitor includes lead and draw outside
Line.
5. flexible passive as claimed in claim 4 is wireless humidity, pressure integrated sensor, which is characterized in that the top electrode,
Described first lower electrode and the flexible base board form the first capacity plate antenna；The top electrode, the second lower electrode with it is described
Flexible base board forms the second capacity plate antenna.
6. flexible passive as claimed in claim 4 is wireless humidity, pressure integrated sensor, which is characterized in that the flexibility base
Plate includes lead through-hole and outer lead through-hole, and the lead of the inner ring inductance and the lead of the presser sensor capacitor are logical
It crosses the lead through-hole to be connected, the outer lead of the outer lead of the outer ring inductance and the presser sensor capacitor passes through described outer
Lead hole is connected.
7. flexible passive as described in claim 1 is wireless humidity, pressure integrated sensor, which is characterized in that the dielectric layer
The thin polymer film of microstructure is provided with for surface.
8. flexible passive as claimed in claim 7 is wireless humidity, pressure integrated sensor, which is characterized in that the miniature knot
Structure includes the Minisize pyramid of array arrangement, and the thin polymer film includes dimethyl silicone polymer.
9. flexible passive as claimed in claim 5 is wireless humidity, pressure integrated sensor, which is characterized in that the humidity is quick
Electrification appearance, the presser sensor capacitor, first capacity plate antenna, second capacity plate antenna, the inner ring inductance with it is described
Outer ring inductance connection is at double-resonant circuit.
10. flexible passive as claimed in claim 9 is wireless humidity, pressure integrated sensor, which is characterized in that the integrated biography
Sensor includes the first different resonance frequency of resonance frequency and the second resonance frequency, and first resonance frequency is quick with the humidity
Variation that electrification holds and change, second resonance frequency changes with the variation of the presser sensor capacitor, outer ring electricity
Sense is wireless to export humidity sensitive signal and presser sensor signal.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811123851.XA CN109253757B (en) | 2018-09-26 | 2018-09-26 | Flexible passive wireless humidity and pressure integrated sensor |
| PCT/CN2018/117440 WO2020062529A1 (en) | 2018-09-26 | 2018-11-26 | Flexible passive wireless integrated humidity and pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811123851.XA CN109253757B (en) | 2018-09-26 | 2018-09-26 | Flexible passive wireless humidity and pressure integrated sensor |
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| CN109253757A true CN109253757A (en) | 2019-01-22 |
| CN109253757B CN109253757B (en) | 2020-05-19 |
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| CN201811123851.XA Active CN109253757B (en) | 2018-09-26 | 2018-09-26 | Flexible passive wireless humidity and pressure integrated sensor |
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| WO (1) | WO2020062529A1 (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110200636A (en) * | 2019-07-05 | 2019-09-06 | 北京中硕众联智能电子科技有限公司 | Plantar pressure sensor and its detection pressure, humidity and the method for collecting energy |
| CN111006802A (en) * | 2019-12-17 | 2020-04-14 | 华中科技大学 | Multi-mode metamorphic flexible sensor and signal acquisition system |
| CN111060230A (en) * | 2019-12-27 | 2020-04-24 | 天津大学 | Manufacturing method of wireless passive flexible pressure sensor based on LC resonance |
| CN112034019A (en) * | 2020-09-08 | 2020-12-04 | 东南大学 | Passive wireless humidity sensor based on cantilever beam structure |
| CN113418969A (en) * | 2021-06-07 | 2021-09-21 | 武汉大学 | High-sensitivity millimeter wave dielectric resonance sensor for biomedical detection |
| CN114136503A (en) * | 2021-10-27 | 2022-03-04 | 贵州航天智慧农业有限公司 | Method for integrating pressure sensor and humidity sensor |
| CN114858339A (en) * | 2022-04-08 | 2022-08-05 | 武汉大学 | Flexible array type humidity pressure sensor and preparation process thereof |
| CN117030804A (en) * | 2023-10-10 | 2023-11-10 | 冰零智能科技(常州)有限公司 | Sensor and use method thereof |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102749092A (en) * | 2012-07-13 | 2012-10-24 | 合肥工业大学 | Flexible compound type array sensor used for artificial sensitive skin of intelligent robot |
| CN102798403A (en) * | 2012-08-21 | 2012-11-28 | 江苏物联网研究发展中心 | MEMS (Micro Electro Mechanical System) film capacitive type multi-parameter sensor structure and integrated manufacturing method thereof |
| CN102944325A (en) * | 2012-11-29 | 2013-02-27 | 东南大学 | Passive wireless temperature and humidity integrated sensor |
| CN103148977A (en) * | 2013-02-27 | 2013-06-12 | 东南大学 | Flexible-substrate-based passive wireless pressure sensor with self-packaging function |
| CN103148970A (en) * | 2013-02-27 | 2013-06-12 | 东南大学 | Passive wireless pressure sensor based on flexible substrates |
| CN103196958A (en) * | 2013-04-08 | 2013-07-10 | 东南大学 | Organic-substrate-based passive radio capacitive humidity sensor packaging structure |
| EP3239681A1 (en) * | 2016-04-25 | 2017-11-01 | Sensirion AG | Sensor device including a pressure sensor and a humidity sensor |
-
2018
- 2018-09-26 CN CN201811123851.XA patent/CN109253757B/en active Active
- 2018-11-26 WO PCT/CN2018/117440 patent/WO2020062529A1/en active Application Filing
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102749092A (en) * | 2012-07-13 | 2012-10-24 | 合肥工业大学 | Flexible compound type array sensor used for artificial sensitive skin of intelligent robot |
| CN102798403A (en) * | 2012-08-21 | 2012-11-28 | 江苏物联网研究发展中心 | MEMS (Micro Electro Mechanical System) film capacitive type multi-parameter sensor structure and integrated manufacturing method thereof |
| CN102944325A (en) * | 2012-11-29 | 2013-02-27 | 东南大学 | Passive wireless temperature and humidity integrated sensor |
| CN103148977A (en) * | 2013-02-27 | 2013-06-12 | 东南大学 | Flexible-substrate-based passive wireless pressure sensor with self-packaging function |
| CN103148970A (en) * | 2013-02-27 | 2013-06-12 | 东南大学 | Passive wireless pressure sensor based on flexible substrates |
| CN103196958A (en) * | 2013-04-08 | 2013-07-10 | 东南大学 | Organic-substrate-based passive radio capacitive humidity sensor packaging structure |
| EP3239681A1 (en) * | 2016-04-25 | 2017-11-01 | Sensirion AG | Sensor device including a pressure sensor and a humidity sensor |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110200636B (en) * | 2019-07-05 | 2024-02-02 | 北京中硕众联智能电子科技有限公司 | Plantar pressure sensor and method for detecting pressure, humidity and collecting energy by plantar pressure sensor |
| CN110200636A (en) * | 2019-07-05 | 2019-09-06 | 北京中硕众联智能电子科技有限公司 | Plantar pressure sensor and its detection pressure, humidity and the method for collecting energy |
| CN111006802A (en) * | 2019-12-17 | 2020-04-14 | 华中科技大学 | Multi-mode metamorphic flexible sensor and signal acquisition system |
| CN111006802B (en) * | 2019-12-17 | 2021-07-27 | 华中科技大学 | Multi-mode metamorphic flexible sensor and signal acquisition system |
| CN111060230A (en) * | 2019-12-27 | 2020-04-24 | 天津大学 | Manufacturing method of wireless passive flexible pressure sensor based on LC resonance |
| CN112034019A (en) * | 2020-09-08 | 2020-12-04 | 东南大学 | Passive wireless humidity sensor based on cantilever beam structure |
| CN113418969A (en) * | 2021-06-07 | 2021-09-21 | 武汉大学 | High-sensitivity millimeter wave dielectric resonance sensor for biomedical detection |
| CN114136503A (en) * | 2021-10-27 | 2022-03-04 | 贵州航天智慧农业有限公司 | Method for integrating pressure sensor and humidity sensor |
| CN114136503B (en) * | 2021-10-27 | 2023-07-18 | 贵州航天智慧农业有限公司 | Method for integrating pressure sensor and humidity sensor |
| CN114858339B (en) * | 2022-04-08 | 2023-01-03 | 武汉大学 | Flexible array type humidity pressure sensor and preparation process thereof |
| CN114858339A (en) * | 2022-04-08 | 2022-08-05 | 武汉大学 | Flexible array type humidity pressure sensor and preparation process thereof |
| CN117030804A (en) * | 2023-10-10 | 2023-11-10 | 冰零智能科技(常州)有限公司 | Sensor and use method thereof |
| CN117030804B (en) * | 2023-10-10 | 2023-12-12 | 冰零智能科技(常州)有限公司 | Sensor and use method thereof |
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| Publication number | Publication date |
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| WO2020062529A1 (en) | 2020-04-02 |
| CN109253757B (en) | 2020-05-19 |
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