CN110487452A - A kind of Bionic flexible pressure sensor, device for pressure measurement and monitoring system - Google Patents

A kind of Bionic flexible pressure sensor, device for pressure measurement and monitoring system Download PDF

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Publication number
CN110487452A
CN110487452A CN201910793841.5A CN201910793841A CN110487452A CN 110487452 A CN110487452 A CN 110487452A CN 201910793841 A CN201910793841 A CN 201910793841A CN 110487452 A CN110487452 A CN 110487452A
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CN
China
Prior art keywords
pole plate
module
pressure
sensor
data
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Pending
Application number
CN201910793841.5A
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Chinese (zh)
Inventor
董瑛
韩留洋
王晓浩
张旻
钱翔
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Shenzhen Graduate School Tsinghua University
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Shenzhen Graduate School Tsinghua University
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Filing date
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Priority to CN201910793841.5A priority Critical patent/CN110487452A/en
Publication of CN110487452A publication Critical patent/CN110487452A/en
Pending legal-status Critical Current

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    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/44Detecting, measuring or recording for evaluating the integumentary system, e.g. skin, hair or nails
    • A61B5/441Skin evaluation, e.g. for skin disorder diagnosis
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/14Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors

Abstract

The invention discloses a kind of Bionic flexible pressure sensor, device for pressure measurement and system, pressure sensor includes bionical patch module, sensor module and wireless transport module;Bionical patch module includes patch substrate and biomimetic features group, sensor module includes the first pole plate, the second pole plate, third pole plate and dielectric layer, second pole plate and third pole plate are arranged in parallel in the same plane, the plane is parallel with the first pole plate, dielectric layer is set between plane and the first pole plate, biomimetic features group is set in the one side of patch substrate, then the data of sensor measurement are sent to external equipment by being provided with wireless transport module;It solves pressure sensor in the prior art to be difficult to preferably contact and fix with object to be measured, so that there is relatively large deviation in the data of measurement, and the technical issues of data of measurement can not being sent to external equipment by wireless transmission method, provide a kind of Bionic flexible pressure sensor that achievable data are wirelessly transferred, measurement accuracy is high.

Description

A kind of Bionic flexible pressure sensor, device for pressure measurement and monitoring system
Technical field
The present invention relates to pressure sensor technique fields, fill more particularly, to a kind of Bionic flexible pressure sensor, pressure Set and monitor system.
Background technique
PEN: polyethylene naphthalate;
PDMS: dimethyl silicone polymer;
Ecoflex: the organic platinum gold silicon rubber of Smooth-On company, U.S. production.
With the continuous development of science and technology, so that monitoring, detection technique in every field have been similarly obtained widely Using.Pressure sensor as important monitoring, detection device, play the role of in field of medical device it is vital, Stability in the accuracy and use process of pressure sensor measurement decides the result of monitoring or detection.
However, cannot achieve it preferably with object to be measured in use due to the structural factor of pressure sensor Contact and fixation so that biggish deviation occur in the data of measurement, and how wireless transmission function is integrated in pressure It is equally puzzlement those skilled in the art to realize the wireless transmission of measurement data and the multifunction of sensor in force snesor The technical problem of member.
Summary of the invention
The present invention is directed to solve at least some of the technical problems in related technologies.For this purpose, of the invention One purpose is to provide a kind of Bionic flexible pressure sensor that achievable data are wirelessly transferred, measurement accuracy is high.
The technical scheme adopted by the invention is that:
In a first aspect, the present invention provides a kind of Bionic flexible pressure sensor comprising:
Bionical patch module, the bionical patch module include patch substrate and biomimetic features group, the biomimetic features group It is set to the one side of the patch substrate;
Sensor module, the sensor module include the first pole plate, the second pole plate, third pole plate and dielectric layer, institute It states the second pole plate and the third pole plate is parallel in the same plane, and the plane is parallel with first pole plate, it is described Dielectric layer is set between the plane and first pole plate;
Wireless transport module, the wireless transport module are connect with second pole plate and the third pole plate respectively, are used In the pressure data information of the sensor module is sent to external equipment;
The another side of the patch substrate is fixedly connected with first pole plate so that the bionical patch module with it is described Sensor is fixedly connected.
Further, the Bionic flexible pressure sensor further include:
Sensor flexible substrates, second pole plate, the third pole plate and the wireless transport module are all set in institute It states in sensor flexible substrates.
Further, the biomimetic features group includes that microtrabeculae is expanded in multiple ends;Expand microtrabeculae Cheng Zhen in multiple ends Array structure is set to the one side of the patch substrate.
Further, it includes vertical microtrabeculae and enlarged end that microtrabeculae is expanded in the end, the bottom of the vertical microtrabeculae with The patch substrate is fixedly connected on one side, and the enlarged end is set to the top of the vertical microtrabeculae.
Further, the base of dielectric and multiple electrolyte blocks, the electrolyte blocks are in pyramid structure, described The top of pyramid structure is fixedly connected with first pole plate, the bottom of the pyramid structure with the dielectric base Bottom is linked together, and the base of dielectric is covered on second pole plate and the third pole plate.
Further, the wireless transport module includes transmission coil and transfer wire, the first end of the transmission coil Connect by the transfer wire with second pole plate, the second end of the transmission coil by the transfer wire with it is described The connection of third pole plate.
Second aspect, the present invention provide a kind of device for pressure measurement, which is characterized in that including data read module and described Bionic flexible pressure sensor;
The data read module is connect with the wireless transport module, to obtain the Bionic flexible pressure sensor Pressure data information.
Further, the data read module includes data capture unit, data processing unit and display unit;
The data capture unit is connect with the wireless transport module, to obtain the pressure data information;
The data processing unit is connect with the data capture unit, handle to the pressure data information To pressure value;
The display unit is connect with the data processing unit, for showing the pressure value.
Further, the data read module further includes data information transmission unit, the data information transmission unit It is connect with the data processing unit, the pressure value is sent to external equipment.
The third aspect, the present invention provide a kind of jugular vein pressure measurement monitoring system comprising: terminal, server and institute The device for pressure measurement stated;
The device for pressure measurement is used to measure the jugular pressure value of object to be measured;
The data information transmission unit is connect with the terminal, and the pressure value is sent to the terminal;
The terminal is connect with the server, and the pressure value is uploaded to the server.
The beneficial effects of the present invention are:
A kind of Bionic flexible pressure sensor in the present invention comprising bionical patch module, sensor module and wireless biography Defeated module;Bionical patch module includes patch substrate and the biomimetic features group for being set to patch substrate one side, and biomimetic features group is used In realize with object to be measured it is reliable, come into contact in a large area, sensor module including the first pole plate, the second pole plate, third pole plate and Dielectric layer, the second pole plate and third pole plate are parallel in the same plane, and the plane is parallel with the first pole plate, dielectric layer It is arranged between the plane and the first pole plate, the first pole plate is fixedly connected with patch substrate so that bionical patch module and sensor Module is fixedly connected, and the pressure data information of sensor module is sent to external equipment by wireless transport module, is solved In the prior art, due to the factor of the structure of pressure sensor, it is caused to cannot achieve in use with object to be measured It is preferable to contact and fix, so that there is biggish deviation in the data of measurement, and can not be by way of wireless transmission The technical issues of data of sensor measurement are sent to external equipment, provide a kind of achievable data wireless transmission, survey The high Bionic flexible pressure sensor of accuracy of measurement.
Detailed description of the invention
Fig. 1 is an a kind of specific embodiment structural schematic diagram of Bionic flexible pressure sensor in the present invention;
Fig. 2 is a specific embodiment shape of sensor module in a kind of Bionic flexible pressure sensor use process of the present invention State changes schematic diagram;
Fig. 3 is an a kind of specific embodiment module frame chart of device for pressure measurement in the present invention;
Fig. 4 is a kind of Bionic flexible pressure in data capture unit and the present invention in a kind of device for pressure measurement in the present invention One specific embodiment schematic equivalent circuit of sensor communication;
Fig. 5 is an a kind of specific embodiment system architecture schematic diagram of jugular vein pressure measurement monitoring system in the present invention.
Specific embodiment
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase Mutually combination.
Embodiment one:
The embodiment of the invention provides a kind of Bionic flexible pressure sensors, including bionical patch module, sensor module With line transmission module;Wherein, bionical patch module includes patch substrate and biomimetic features group, and sensor module includes the first pole Plate, the second pole plate, third pole plate and dielectric layer, the second pole plate and third pole plate are arranged in parallel in the same plane, and should Plane is parallel with the first pole plate, and dielectric layer is set between the plane and the first pole plate, and biomimetic features group is set to patch In the one side of substrate, the another side of patch substrate and the first pole plate are fixed to be connect, in use process, biomimetic features group be covered in Survey the surface of object, obtain bigger forced area and to paste it is more stable so that the result of measurement is more accurate, The process of measurement is more stable, sets finally by being provided with wireless transport module the data of sensor measurement being sent to outside It is standby, solve in the prior art, due to the factor of the structure of pressure sensor, cause its in use with object to be measured without Method is realized preferable contact and is fixed, so that biggish deviation occur in the data of measurement, and can not pass through wireless transmission The mode the technical issues of data of sensor measurement are sent to external equipment.
Specifically, referring to Fig.1, Fig. 1 is an a kind of specific embodiment structure of Bionic flexible pressure sensor in the present invention Schematic diagram;Comprising: the bionical patch module being made of patch substrate 100 and biomimetic features group, by the first pole plate 300, second The sensor module that pole plate 400, third pole plate 500 and dielectric layer 600 form, by transmission coil 700 and 710 groups of transfer wire At wireless transport module and sensor flexible substrates 800;Wherein, biomimetic features group includes that microtrabeculae 200 is expanded in multiple ends, and It includes vertical microtrabeculae 220 and enlarged end 210 that microtrabeculae is expanded in end, and it is in array that microtrabeculae 200 is expanded in the one side of substrate in end Structure is uniformly arranged setting, microtrabeculae 200 is expanded in end is arranged in an array the evenly arranged purpose of structure and be: when using this hair When Bionic flexible pressure sensor in bright embodiment, microtrabeculae is expanded in end can uniformly, comprehensively be received from object to be measured Pressure information, and with the surface of object to be measured carry out conformal contact, improve sensor output signal signal-to-noise ratio (such as when to When survey object is human body, human skin has high roughness under micro-meter scale, and directly pastes sensor on the skin not It can guarantee complete fitting, there is air gap therebetween, the reduction of the contact area of sensor and skin surface is caused to further result in The signal-to-noise ratio of sensor output signal reduces, or even the output signal of sensor can be made to be submerged in noise completely) it improves and surveys The accuracy of amount.In the embodiment of the present invention, the material of the substrate 100 in bionical patch module is PEN material, vertical microtrabeculae 220 Material with enlarged end 210 is PDMS material, wherein vertical microtrabeculae 220 is using curing agent content height (15%~20% Wt. rigid PDMS), enlarged end 210 uses the flexible PDMS of curing agent content low (5%~7.5%wt.), to make swollen The elasticity modulus of big end 210 close to human skin elasticity modulus (such as object to be measured be people when, can be by enlarged end 210 springform analog quantity setting is similar with the modulus of human skin), it ensure that conformal between biomimetic features group and human skin Contact improves the accuracy of measurement, and since vertical microtrabeculae 220 uses rigidity PDMS, so that when measuring, even if It ensure that imitative prevented also from vertical microtrabeculae 220 there is a phenomenon where buckling collapsing or mutually winding in the case where by larger pressure The job stability of raw pliable pressure sensor.
Referring to Fig.1, patch substrate 100 is fixedly connected with the first pole plate 300 in the embodiment of the present invention, 400 He of the second pole plate Third pole plate 500 is arranged in parallel in the same plane, and the plane is parallel with the first pole plate 300, and the setting of dielectric layer 600 exists Between the plane and the first pole plate 300, wherein dielectric layer 600 includes base of dielectric 620 and multiple electrolyte blocks 610, electricity Medium block 610 is in pyramid structure, and the top of pyramid structure is fixedly connected with the first pole plate 300, pyramid structure Bottom is linked together with base of dielectric 620, and base of dielectric 620 is made to be covered in the second pole plate 400 and third pole plate 500 On, the array structure that the electrolyte blocks 610 of multiple pyramid structures expand microtrabeculae 200 corresponding to end is uniformly arranged, Duo Ge electricity Medium block 610 is equally uniformly arranged in array structure in base of dielectric 620, and corresponding array structure between the two is uniformly arranged Cloth can be comprehensively transmitted to sensor module by force information when 200 stress of microtrabeculae is expanded in end, improves measurement result Accuracy.In addition, dielectric layer 600 is using Ecoflex material, (i.e. electrolyte blocks 610 and base of dielectric 620 are all made of Ecoflex material), Ecoflex material has lower elasticity modulus, and biggish shape can be obtained under lesser pressure Become, so that Bionic flexible pressure sensor is higher to the detection sensitivity of faint pressure.In the embodiment of the present invention, dielectric layer 600 using Ecoflex materials and are arranged to 610 pieces of dielectric of multiple pyramid structures and make: (1) top of pyramid structure The concentration of local for resulting in stress, equivalent to increase the stress being applied on dielectric layer 600, so that the inspection to faint pressure It surveys sensitiveer;(2) the air gap between pyramid structure is equivalent to the whole modulus for reducing dielectric layer 600, increases The compressibility of dielectric layer 600 may make dielectric layer 600 to generate bigger deformation at the same pressure;(3) electricity is situated between Matter layer 600, which generates bigger deformation, to be caused between the first pole plate 300 and the second pole plate 400 and the first pole plate 300 and third pole plate 500 Between Ecoflex material and the volume ratio of air become larger, equivalent to increase effective dielectric constant, further increase sensor Sensitivity;(4) pyramid structure reduces the intrinsic viscoelastic sexual behaviour of Ecoflex material, ensure that in pressure release phase Dielectric layer 600 can Quick-return to original shape, reduce the response time of Bionic flexible pressure sensor, guarantee bionical soft Property pressure sensor is able to detect the pressure change of upper frequency.
Referring to Fig.1, in the embodiment of the present invention, the first end of transmission coil 700 is connected to second by transfer wire 710 The second end of transmission coil 700 is connected third pole plate 500 by pole plate 400, and by the second pole plate 400, third pole plate 500, pass Defeated coil 700 and transfer wire 710 are set in sensor flexible substrates 800, complete Bionic flexible pressure of the embodiment of the present invention The overall structure of force snesor is in the embodiment of the present invention, according to biography using the purpose of three electrode pad sensor modules The bipolar electrode electrode plate structure of system connects 710 meeting of transfer wire between upper layer pole plate (the first pole plate 300) and transmission coil 700 There is hanging structure, it means that will be by sacrifice layer process when sensor production, and this hanging structure is unfavorable for device Whole structural stability.Therefore, Bionic flexible sensor structure is conducive to using the sensor module of three electrode pad structures Stability and the manufacturing simplification.Under the structure of three electrode pads, transmission coil 700 is connected in the embodiment of the present invention Be equivalent to the first capacitor and the first pole plate 300 and the formation of third pole plate 500 that the first pole plate 300 and the second pole plate 400 are formed The second capacitor series connection after sensor capacitance.
Referring to Fig. 2, in the embodiment of the present invention, the measuring principle of Bionic flexible pressure sensor is by the first pole plate 300 It is under pressure, dielectric layer 600 is compressed, the spacing of the first pole plate 300 and the second pole plate 400, the first pole plate 300 and third pole The spacing of plate 500 becomes smaller, i.e., extruding Ecoflex material make between the first pole plate 300 and the second pole plate 400, the first pole plate 300 The volume ratio of Ecoflex material and air between third pole plate 500 becomes larger, equivalent to increase dielectric constant, and When the pressure release that the first pole plate 300 is subject to, due to the elasticity of Ecoflex material, dielectric layer 600 can restore to original shape The capacitance of shape, Bionic flexible pressure sensor turns also to initial value, is based on this sensing principle, can be by the change of ambient pressure Reliable measurements are realized in the variation for changing the capacitance for being converted into sensor capacitance.
To sum up, the bionical patch module that the embodiment of the present invention is made of setting patch substrate 100 and biomimetic features group, The sensor module being made of the first pole plate 300, the second pole plate 400, third pole plate 500 and dielectric layer 600, by transmission coil 700 and transfer wire 710 form wireless transport module and sensor flexible substrates 800 solve pressure sensing in the prior art Device is in use since the factor of its structure causes to cannot achieve preferably contact with the contact of object to be measured and fixes, in turn So that equally there is biggish deviation in the data of measurement, and can not be by way of wireless transmission by the data of sensor measurement The technical issues of being sent to external equipment provides a kind of Bionic flexible that achievable data are wirelessly transferred, measurement accuracy is high Pressure sensor.
Embodiment two:
Referring to Fig. 3, in the embodiment of the present invention, device for pressure measurement includes data read module and as described in embodiment one Bionic flexible pressure sensor;Wherein, data read module is connected with the wireless transmission module, to obtain Bionic flexible pressure biography The pressure data information of sensor.
In the present embodiment, data read module includes data capture unit, data processing unit and display unit;
Data capture unit is connected with the wireless transmission module, to obtain pressure data information;
Data processing unit is connect with data capture unit, to be handled to obtain pressure value to pressure data information;
Display unit is connect with the data processing unit, for showing pressure value.
In the embodiment of the present invention, in data capture unit include power supply VS and connect to power supply by resistance R1, inductance L1, The reading data rlc circuit that capacitor C1 is connected in series, then Bionic flexible sensor passes through wireless transport module and data acquisition list The equivalent circuit of pressure data information transmission between member is as shown in Figure 4, wherein C2 indicates first capacitor and second in embodiment one The sensor capacitance that capacitor is connected in series, R2 indicate that the equivalent resistance of the transfer wire 710 in embodiment one, L2 indicate embodiment In transmission coil 700, M indicates the mutual inductance of inductance in rlc circuit in transmission coil 700 and data capture unit, then may be used Electric current I1 in data capture unit is sent to after carrying out data processing in data processing unit and obtains the imitative of corresponding current I1 The pressure value that raw pliable pressure sensor is subject to, finally can be transmitted to display module for pressure value and show.It is needing to treat When surveying object progress real-time monitoring, corresponding waveform diagram can be drawn in time sequencing by the pressure value to acquisition come to be measured Object carries out real-time monitoring.
In addition, data read module further includes data information transmission unit, data information transmission unit and data processing list After member connection, pressure value can be sent in external equipment, realize the transfer function of measurement result.In the embodiment of the present invention, number It can be bluetooth module and/or 4G radio receiving transmitting module etc. according to information transmitting unit.
To sum up, one kind is provided in the embodiment of the present invention realizes zero-power (without in Bionic flexible pressure in measurement part Integrated power supply in sensor) device for pressure measurement.
Embodiment three:
Referring to Fig. 5, the embodiment of the invention provides a kind of jugular vein pressure measurements to monitor system comprising terminal, service Device and the device for pressure measurement as described in embodiment two;Wherein the Bionic flexible pressure sensor in device for pressure measurement is covered on After the neck of object to be measured, the jugular pressure of object to be measured is obtained in real time, is sensor electricity by jugular pressure conversion The capacitance of appearance exports, then after jugular pressure is calculated by data processing unit in measuring device, is believed by data Interest statement member is sent to terminal, and terminal will can reach in real time server and realize to the long-range real-time of jugular pressure on pressure data Monitoring.Such as terminal may include the intelligent terminals such as mobile phone or Pad in the present embodiment, set the medical institutions such as hospital for server Server, then the jugular vein pressure of long-range monitoring patient can be achieved, obtain the real-time jugular pressure information of patient, when going out When existing unusual condition, reply in time or prompting patient should be noted that item.
To sum up, the embodiment of the invention provides a kind of jugular venous pressures that real-time monitoring can be remotely carried out to jugular pressure Power measures monitoring system.
It is to be illustrated to preferable implementation of the invention, but the invention is not limited to the implementation above Example, those skilled in the art can also make various equivalent variations on the premise of without prejudice to spirit of the invention or replace It changes, these equivalent deformations or replacement are all included in the scope defined by the claims of the present application.

Claims (10)

1. a kind of Bionic flexible pressure sensor characterized by comprising
Bionical patch module, the bionical patch module include patch substrate and biomimetic features group, the biomimetic features group setting In the one side of the patch substrate;
Sensor module, the sensor module include the first pole plate, the second pole plate, third pole plate and dielectric layer, and described the Two pole plates and the third pole plate are parallel in the same plane, and the plane is parallel with first pole plate, and the electricity is situated between Matter layer is set between the plane and first pole plate;
Wireless transport module, the wireless transport module are connect with second pole plate and the third pole plate respectively, and being used for will The pressure data information of the sensor module is sent to external equipment;
The another side of the patch substrate is fixedly connected with first pole plate, so that the bionical patch module and the sensing Device module is fixedly connected.
2. Bionic flexible pressure sensor according to claim 1, which is characterized in that the Bionic flexible pressure sensor Further include:
Sensor flexible substrates, second pole plate, the third pole plate and the wireless transport module are all set in the biography In sensor flexible substrates.
3. Bionic flexible pressure sensor according to claim 1 or 2, which is characterized in that the biomimetic features group includes Expand microtrabeculae in multiple ends;Expand the one side that microtrabeculae is set to the patch substrate at array structure in multiple ends.
4. Bionic flexible pressure sensor according to claim 3, which is characterized in that it includes perpendicular that microtrabeculae is expanded in the end Straight microtrabeculae and enlarged end, the bottom of the vertical microtrabeculae and being fixedly connected on one side for the patch substrate, the enlarged end It is set to the top of the vertical microtrabeculae.
5. Bionic flexible pressure sensor according to claim 1,2 or 4, which is characterized in that the base of dielectric and Multiple electrolyte blocks, the electrolyte blocks are in pyramid structure, the top of the pyramid structure with first pole plate It is fixedly connected, the bottom of the pyramid structure is linked together with the base of dielectric, and the base of dielectric covers In on second pole plate and the third pole plate.
6. Bionic flexible pressure sensor according to claim 5, which is characterized in that the wireless transport module includes passing The first end of defeated coil and transfer wire, the transmission coil is connect by the transfer wire with second pole plate, described The second end of transmission coil is connect by the transfer wire with the third pole plate.
7. a kind of device for pressure measurement, which is characterized in that including data read module and as described in any one of claim 1 to 6 Bionic flexible pressure sensor;
The data read module is connect with the wireless transport module, to obtain the pressure of the Bionic flexible pressure sensor Data information.
8. device for pressure measurement according to claim 7, which is characterized in that the data read module includes data acquisition Unit, data processing unit and display unit;
The data capture unit is connect with the wireless transport module, to obtain the pressure data information;
The data processing unit is connect with the data capture unit, is pressed with being handled the pressure data information Force value;
The display unit is connect with the data processing unit, for showing the pressure value.
9. device for pressure measurement according to claim 8, which is characterized in that the data read module further includes data letter Transmission unit is ceased, the data information transmission unit is connect with the data processing unit, the pressure value is sent to outer Portion's equipment.
10. a kind of jugular vein pressure measurement monitors system characterized by comprising terminal, server and such as claim 9 institute The device for pressure measurement stated;
The device for pressure measurement is used to measure the jugular pressure value of object to be measured;
The data information transmission unit is connect with the terminal, and the pressure value is sent to the terminal;
The terminal is connect with the server, and the pressure value is uploaded to the server.
CN201910793841.5A 2019-08-27 2019-08-27 A kind of Bionic flexible pressure sensor, device for pressure measurement and monitoring system Pending CN110487452A (en)

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CN112254766A (en) * 2020-10-19 2021-01-22 三峡大学 Iron tower stress and vibration detection device
CN114235226A (en) * 2021-12-14 2022-03-25 西安电子科技大学 Off-electric wireless passive flexible pressure sensor, preparation and application

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CN109141689A (en) * 2018-07-17 2019-01-04 东莞成启瓷创新材料有限公司 A kind of low-temperature co-fired ceramics LTCC pressure sensor
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CN204286649U (en) * 2014-11-19 2015-04-22 衢州学院 A kind of bionic three-dimensional capacitance type touch sensor of tentacle structure
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CN114235226B (en) * 2021-12-14 2023-02-24 西安电子科技大学 Off-electric wireless passive flexible pressure sensor, preparation and application

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