CN117007519A - Appearance detection equipment of semiconductor chip frame - Google Patents
Appearance detection equipment of semiconductor chip frame Download PDFInfo
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- CN117007519A CN117007519A CN202310838065.2A CN202310838065A CN117007519A CN 117007519 A CN117007519 A CN 117007519A CN 202310838065 A CN202310838065 A CN 202310838065A CN 117007519 A CN117007519 A CN 117007519A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 97
- 238000001514 detection method Methods 0.000 title claims abstract description 73
- 230000002950 deficient Effects 0.000 claims abstract description 79
- 238000003860 storage Methods 0.000 claims description 83
- 238000007599 discharging Methods 0.000 claims description 29
- 230000007246 mechanism Effects 0.000 claims description 25
- 239000002699 waste material Substances 0.000 claims description 21
- 238000007689 inspection Methods 0.000 claims description 19
- 239000000428 dust Substances 0.000 claims description 15
- 239000011521 glass Substances 0.000 claims description 11
- 238000012360 testing method Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 7
- 230000033001 locomotion Effects 0.000 claims description 5
- 230000017525 heat dissipation Effects 0.000 claims description 2
- 238000011179 visual inspection Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 17
- 230000008569 process Effects 0.000 abstract description 15
- 230000007547 defect Effects 0.000 abstract description 7
- 238000004458 analytical method Methods 0.000 abstract description 3
- 238000005422 blasting Methods 0.000 description 7
- 230000009172 bursting Effects 0.000 description 7
- 238000005286 illumination Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 230000007306 turnover Effects 0.000 description 3
- 238000010191 image analysis Methods 0.000 description 2
- 210000001747 pupil Anatomy 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 230000000638 stimulation Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/02—Measures preceding sorting, e.g. arranging articles in a stream orientating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/34—Sorting according to other particular properties
- B07C5/342—Sorting according to other particular properties according to optical properties, e.g. colour
- B07C5/3422—Sorting according to other particular properties according to optical properties, e.g. colour using video scanning devices, e.g. TV-cameras
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/36—Sorting apparatus characterised by the means used for distribution
- B07C5/363—Sorting apparatus characterised by the means used for distribution by means of air
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
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- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
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- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The invention relates to the technical field of detecting appearance defects and flaws of semiconductors, and particularly discloses appearance detection equipment of a semiconductor chip frame, which comprises an appearance detection equipment body and a hub, wherein the hub comprises a hub body and a hub body, wherein the hub body is provided with a plurality of grooves, and the grooves are respectively provided with a plurality of grooves and a plurality of grooves: the appearance detection device is arranged around the lower surface of the appearance detection device body and is movably connected with the appearance detection device body; a feed inlet, a good product discharge outlet and a defective product discharge outlet; the invention adopts the structure that the feeding opening and the pneumatic pusher are arranged in the appearance detection equipment body, realizes the process of automatically feeding the semiconductor chip frame, completes the appearance detection process of the semiconductor chip frame by arranging the image detector structure in the appearance detection equipment body, performs defect analysis by detecting the surface picture of the semiconductor chip frame through image acquisition, judges whether the semiconductor chip frame is qualified or not, and further damages and conveys unqualified defective products through the defective product damaging device.
Description
Technical Field
The invention relates to the technical field of detecting appearance defects and flaws of semiconductors, in particular to appearance detection equipment of a semiconductor chip frame.
Background
With the continuous development of technology, semiconductor chips occupy a place of paramount importance in the field of electronic technology, and the quality control of the produced semiconductor chips is in the spotlight due to extremely high requirements on the manufacturing, processing and precision of the semiconductor chips. The chip frame has quality problems that can influence the normal operation of the chip, thereby influencing the performance and the service life of the product, so that people need to develop appearance detection equipment of the semiconductor chip frame for detecting appearance defects and flaws of the semiconductor product and avoiding functional disorder during the operation of the semiconductor chip frame.
The appearance detection equipment is mechanical equipment capable of automatically detecting fine defects on the surface of the chip frame, and the traditional appearance detection is that workers adopt a manual method to detect the chip frame through naked eye identification under sufficient illumination conditions.
In the prior art, mature digital image processing technology is integrated into the wide application of artificial intelligent detection analysis technology, semi-automatic detection is carried out on a chip frame through automatic equipment and optical cameras for collection and processing, but the existing appearance detection equipment of a semiconductor chip frame needs manual feeding, discharging and sorting of defective products, the problems of high detection labor cost and missing of defective product sorting exist, and the problems of large workload and long detection period caused by the fact that the appearance detection equipment cannot fully automatically feed, discharge and automatically sort out good products and defective products.
Disclosure of Invention
The present invention is directed to an appearance inspection apparatus for a semiconductor chip frame, which solves the technical problems mentioned in the background art.
In order to achieve the above object, the present invention discloses an appearance inspection apparatus for a semiconductor chip frame, comprising an appearance inspection apparatus body, further comprising a hub: the appearance detection device is arranged around the lower surface of the appearance detection device body and is movably connected with the appearance detection device body;
feed inlet, good product discharge gate and inferior product discharge gate: the pneumatic pusher and the good product discharge port are respectively arranged from one end to the other end of the middle part of the appearance detection equipment body, the defective product discharge port is arranged in the middle part of the appearance detection equipment body, and the positions and the structures of the pneumatic pusher and the good product discharge port are mutually symmetrical;
pneumatic pusher: the appearance detection device is arranged on one side of the middle part of the appearance detection device body, which is close to the back surface, is on the same side as the feeding hole, is fixedly connected with the appearance detection device body, and is movably connected with the feeding hole;
observing the glass door: the device is arranged in the middle of the front face of the appearance detection device body and is fixedly connected with the appearance detection device body;
laser scanner, image detector and conveying and sorting bad and defective product mechanism: the device is arranged in the appearance detection equipment body, is sequentially arranged from one end to the other end, and is fixedly connected with two ends of the upper surface in the appearance detection equipment body respectively;
defective product damaging device: install in the inside of outward appearance check out test set organism, and link up in proper order and be connected with pneumatic pusher, image detector, conveying letter sorting good defective goods mechanism, defective goods discharge gate and good product discharge gate, wherein, defective goods damage ware and defective goods discharge gate link to each other through conveying letter sorting good defective goods mechanism, just good product discharge gate and defective goods discharge gate are connected respectively in the both sides of conveying letter sorting good defective goods mechanism.
Optionally, the outward appearance check out test set organism includes the host computer base, the host computer base is close to the equal fixedly connected with side window in both sides of upper surface, the louvre has all been seted up to the host computer base both sides that are close to the lower surface, the upper surface fixedly connected with dust cover of host computer base, the both sides swing joint in dust cover middle part has the hinge, the front in dust cover middle part has the flip cover through hinge swing joint, the both ends at flip cover top just are located the inside of host computer base is provided with interior bracing telescopic link, the back of host computer base is provided with the access door, the socket has been seted up to one side at the host computer base back, is located the bottom at the host computer base back just is located the below of socket has been seted up the electric power storage hole, is located the bottom at the host computer base back just is located the outside swing joint in electric power storage hole has the waterproof cover.
Optionally, the pan feeding mouth is including putting core frame pan feeding storehouse storage box, put the middle part activity of core frame pan feeding storehouse storage box upper surface and cup jointed first direction target, put core frame pan feeding storehouse box and be close to the inner wall both sides of upper surface and seted up a set of target groove, be located the inner wall both sides of target groove just be located a plurality of groups chip frame groove have been seted up to the below of target groove, be located put the middle part of core frame pan feeding storehouse box and be located the inside activity in chip frame groove has cup jointed a plurality of semiconductor chip frame.
Optionally, pneumatic pusher includes the curb plate, the bottom swing joint of curb plate side has the charge-in board, the other end of charge-in board is provided with the centre gripping plate, the inside swing joint of centre gripping plate has pneumatic propelling movement needle, the side of curb plate is provided with flexible crawler attachment, just flexible crawler attachment's bottom track with the upper surface fixed of charge-in board one end links to each other, flexible crawler attachment is the repetitive motion, drives the charge-in board and slides in the curb plate is used for promoting the process of pneumatic propelling movement needle carrying out autoloading, feeding with the centre gripping plate that the charge-in board other end was connected.
Optionally, the good product discharging port comprises a good product conveying rail, one end of the upper surface of the good product conveying rail is movably connected with a core placing frame discharging storage box, a second direction standard plate is movably sleeved in the core placing frame discharging storage box, and a storage box container is arranged on the lower surface of the good product conveying rail; the image detector comprises an image detector and a light box, wherein the middle part of the upper surface of the light box is movably sleeved with the outer wall of the bottom end of the upper surface, which is close to the upper surface, of the image detector, the light box is square in shape, and the side length of the light box is larger than the width of the semiconductor chip frame, and the light box is used for carrying out illumination detection appearance on the semiconductor chip frame from the conveying crawler belt to the interior of the light box.
Optionally, the mechanism for conveying and sorting defective products comprises a pneumatic core pushing plate, wherein the upper surface of the pneumatic core pushing plate is movably connected with a sorter, the bottom of the side surface of the pneumatic core pushing plate is movably connected with a conveying chain, and one end, far away from the pneumatic core pushing plate, of the conveying chain is fixedly connected with the bottom of the sorter and is used for sorting defective products and good products of the semiconductor chip frame detected externally through the sorter; the utility model discloses a core frame waste storage box, including the core frame waste storage box, the core frame waste storage box is put to the interior activity of core frame waste storage box, the bottom of putting core frame waste storage box is provided with elevating system, puts the height of core frame waste storage box through the lift adjustment, passes through the transmission of inferior quality transfer rail with the defective quality that detects and alternates in the inside of putting core frame waste storage box.
Optionally, the defective products damage ware includes the laser blasting machine, the one end of laser blasting machine is provided with the inductor, is located the bottom of laser blasting machine just is located be provided with the conveyor track under the inductor, the middle part swing joint of laser blasting machine side has driving motor, is located the bottom of laser blasting machine side just is located driving motor's bottom is provided with the lift chain, driving motor is provided with the testing platform with the inside middle part of host computer base and links to each other fixedly for drive the removal of laser blasting machine horizontal direction through the lift chain on driving motor, make laser blasting machine control inductor ejection laser damage the semiconductor chip frame of appearance detection defective products.
Optionally, the middle part of flip cover with survey glass door is fixed link to each other for observe the condition of host computer base inside detection semiconductor chip frame through the front of dust cover from survey glass door, and the defective products pass through sensor laser damage mark, avoid laser to amass the pupil, the middle part of dust cover lower surface both sides links to each other with laser scanner's last fixed surface respectively, is used for responding to the pan feeding conveying of semiconductor chip frame and conveying the process of ejection of compact, the inside middle part of host computer base is provided with testing platform, just put core frame into feed bin storage box, curb plate, good product conveying track, image detector, carry track, driving motor, pneumatic core board and defective products conveying track and all set gradually on this platform for the ejection of compact flow of automation mechanized operation material loading, detection, conveying, letter sorting defective products.
Optionally, the shapes and the sizes of the storage box of the storage bin of the core placing frame, the discharge storage box of the core placing frame and the third direction target are equal, and the storage box is used for placing the semiconductor chip frame, has simple structure and consistent functions, is convenient for mass production, reduces the cost and is used for a plurality of operation links in the appearance detection flow; the diameter of the pneumatic pushing needle is smaller than the distance between two adjacent chip frame grooves, but the diameter of the pneumatic pushing needle is larger than the thickness of the semiconductor chip frame, and the pneumatic pushing needle is used for pushing one end of the semiconductor chip frame to place the core frame into the semiconductor chip frame feeding in the chip frame groove in the storage box, feeding from one end of the conveying crawler belt through the inside of the light box, and acquiring visual image analysis through the image detector, so that appearance detection is performed.
Optionally, the appearance inspection device of the semiconductor chip frame may be used as follows:
s1, automatic feeding: sequentially loading the semiconductor chip frames for producing finished products into chip frame grooves on a feeding bin storage box of a core frame, after filling, according to a first direction target indication direction on a target groove, putting the semiconductor chip frames into a feeding hole on one side of a host base close to a pneumatic pusher, starting the host base to work by inserting a power wire into a socket, so that a telescopic crawler device on a side plate reciprocates, a clamping plate on a feeding plate and a pneumatic pushing needle are driven to push the semiconductor chip frames in the feeding bin storage box to enter a conveying crawler for conveying, and meanwhile, a laser scanner timely detects the feeding process of the semiconductor chip frames;
s2, appearance detection: the semiconductor chip frames are conveyed to the inside of the light box through the conveying crawler, the appearance of the semiconductor chip frames is detected through illumination and the image detector, the yield of the semiconductor chip frames is detected and identified through the image, if good products are conveyed to the mechanism for conveying and sorting the good products along the conveying crawler, the semiconductor chip frames are pushed to the core rack on the good product conveying track through the conveying chain to be stored in the storage box, and the storage box is stored in the storage box container after the storage box is full;
s3, sorting defective products: if the image detector detects that the semiconductor chip frame is a defective product, the semiconductor chip frame is conveyed by the conveying crawler belt, the driving motor drives the laser film blaster to start the inductor at the lifting chain, laser damage is carried out on the surface of the semiconductor chip frame, the damaged semiconductor chip frame is conveyed to the pneumatic core pushing plate through the conveying crawler belt, the conveying chain drives the pneumatic core pushing plate to be pushed onto a defective product conveying track, and the semiconductor chip frame is conveyed by the defective product conveying track and is stored in the core frame waste storage box;
s4, real-time observation: in the storage box of the storage bin of the core placing frame, the discharge storage box of the core placing frame and the waste storage box of the core placing frame, a longitudinal lifting mechanism is adopted to drive the storage box of the storage bin of the core placing frame and the waste storage box of the core placing frame to carry out automatic feeding and discharging operation, a laser scanner can detect the material in real time in the discharging process, and personnel can observe the material in real time through a side window and an observation glass door;
s5, overhauling and maintaining: when appearance check out test set organism work trouble appears, then open the flip cover, strut the internal stay telescopic link, overhaul and maintain laser scanner, image detector, defective goods damaging ware, conveying letter sorting good defective goods mechanism and defective goods discharge gate inside the host computer base, perhaps overhaul the inside drive equipment of host computer base through opening the access door to and drive the transfer in outward appearance check out test set organism to equipment place through moving wheel hub.
Compared with the prior art, the invention has the following advantages:
according to the invention, the structure that the feeding port and the pneumatic pusher are arranged in the appearance detection equipment body is adopted, the automatic feeding process of the semiconductor chip frame is realized, the appearance detection process of the semiconductor chip frame is completed through arranging the image detector structure in the appearance detection equipment body, the defect analysis is carried out on the surface picture of the semiconductor chip frame through image acquisition detection, whether the defect is qualified or not is judged, the unqualified defective products are further damaged and conveyed through the defective product damaging device, the unqualified defective products and the good products detected through the appearance detection sorting mechanism are sorted, the qualified defective products detected are conveyed into the good product discharging port for storage, the unqualified defective products detected are conveyed into the defective product discharging port for induction, the appearance detection automatic efficiency of the semiconductor chip frame is improved, the appearance detection equipment achieves the effects of full-automatic feeding, detection, classification and discharging of the semiconductor chip frame, and the working efficiency and the detection accuracy are improved.
Drawings
Fig. 1 is a front view of the structure of the appearance inspection apparatus of the semiconductor chip frame of the present invention.
Fig. 2 is a structural side view of an appearance inspection apparatus of a semiconductor chip frame of the present invention.
Fig. 3 is a rear view showing the structure of the appearance inspection apparatus of the semiconductor chip frame of the present invention.
Fig. 4 is a schematic view showing an internal structure of an appearance inspection apparatus of a semiconductor chip frame according to the present invention.
Fig. 5 is a top view showing an internal structure of the appearance inspection apparatus of the semiconductor chip frame of the present invention.
Fig. 6 is a schematic view of a feed inlet structure of the present invention.
Fig. 7 is a schematic structural diagram of a pneumatic pusher according to the present invention.
Fig. 8 is a schematic diagram of the image detector and the defective product breaker according to the present invention.
Fig. 9 is a schematic diagram of a good product outlet, a mechanism for conveying and sorting good and bad products and a structure of a bad product outlet.
FIG. 10 is a flowchart of the steps used in the present invention.
The reference numerals are: 1. an appearance detecting device body; 101. a host base; 102. a side window; 103. a heat radiation hole; 104. a dust cover; 105. a hinge; 106. a flip cover; 107. an inner support telescopic rod; 108. an access door; 109. a socket; 1010. an electricity storage hole; 1011. a waterproof cover;
2. a hub;
3. a feed inlet; 301. placing the core frame into a storage bin; 302. a first direction target; 303. a target groove; 304. a chip frame slot; 305. a semiconductor chip frame;
4. pneumatic pusher; 401. a side plate; 402. a feeding plate; 403. clamping the plate; 404. a telescoping track assembly; 405. a pneumatic pushing needle;
5. observing a glass door;
6. a good product discharge port; 601. good product conveying tracks; 602. discharging and storing the box by the core frame; 603. a second direction indicator plate; 604. a storage box container;
7. a laser scanner;
8. an image detector; 801. an image detector; 802. a light box;
9. a defective product damaging device; 901. a laser popper; 902. an inductor; 903. a conveyor track; 904. a driving motor; 905. a lifting chain;
10. conveying and sorting the defective products; 1001. pneumatic core pushing plate; 1002. a sorter; 1003. a conveyor chain;
11. a defective product discharge port; 1101. a defective product conveying rail; 1102. a third direction target; 1103. and (5) placing core frame waste storage boxes.
Detailed Description
The technical scheme of the invention is explained in detail by specific examples.
Example 1
Referring to fig. 1-4, the invention provides appearance detection equipment of a semiconductor chip frame, which comprises an appearance detection equipment body 1, hubs 2 are movably connected to the periphery of the lower surface of the appearance detection equipment body 1, a pneumatic pusher 4 and a good product discharge port 6 are respectively arranged on two sides of the middle of the appearance detection equipment body 1, the positions and structures of the pneumatic pusher 4 and the good product discharge port 6 are symmetrical to each other, the pneumatic pusher 4 is arranged on one side of the middle of the appearance detection equipment body 1 close to the back and on the side of the feed port 3, an observation glass door 5 is arranged on the middle of the front of the appearance detection equipment body 1, an image scanner 7, an image detector 8, a good product discharge port 11 and a good product sorting mechanism 10 are sequentially arranged from one end to the other end, the pneumatic pusher 4, the image detector 8, the good product sorting mechanism 10, the good product discharge port 11 and the good product discharge port 6 are connected through a defective product damaging device 9, and the good product damaging device 11 are connected to the good product sorting mechanism 10 through the good product sorting mechanism 10, and the good product sorting mechanism 11 are respectively arranged on two sides.
In a preferred embodiment, it is specifically described that the appearance detection device body 1 includes a host base 101, side windows 102 are fixedly connected to two sides of the host base 101, which are close to the upper surface, heat dissipation holes 103 are formed on two sides of the host base 101, which are close to the lower surface, a dust cover 104 is fixedly connected to the upper surface of the host base 101, hinges 105 are movably connected to two sides of the middle of the dust cover 104, a turnover cover 106 is movably connected to the front of the middle of the dust cover 104 through the hinges 105, inner supporting telescopic rods 107 are arranged at two ends of the top of the turnover cover 106 and located inside the host base 101, an access door 108 is arranged at the back of the host base 101, a socket 109 is formed on one side of the back of the host base 101, a power storage hole 1010 is formed below the socket 109 and located at the bottom of the back of the host base 101, and a waterproof cover 1011 is movably connected to the outside of the power storage hole 1010.
Example 2
Referring to fig. 5-9, the present invention provides an appearance detecting device for a semiconductor chip frame, in which embodiment 1 further discloses that a feeding port 3 includes a core frame feeding storage box 301, a first direction target 302 movably sleeved in the middle of the upper surface of the core frame feeding storage box 301, a set of target slots 303 provided on two sides of an inner wall of the core frame feeding storage box 301 near the upper surface, a plurality of sets of chip frame slots 304 provided on two sides of the inner wall of the target slots 303 and below the target slots 303, and a plurality of semiconductor chip frames 305 movably sleeved in the middle of the core frame feeding storage box 301 and inside the chip frame slots 304.
In a preferred embodiment, it is specifically described that the pneumatic pusher 4 includes a side plate 401, a feeding plate 402 is movably connected to the bottom of the side surface of the side plate 401, a clamping plate 403 is disposed at the other end of the feeding plate 402, a pneumatic pushing needle 405 is movably connected to the inside of the clamping plate 403, a telescopic crawler device 404 is disposed on the side surface of the side plate 401, and a bottom crawler of the telescopic crawler device 404 is fixedly connected to the upper surface of one end of the feeding plate 402, and the telescopic crawler device 404 performs a repeated motion to drive the feeding plate 402 to slide on the side plate 401 in a telescopic manner, so that the clamping plate 403 connected to the other end of the feeding plate 402 pushes the pneumatic pushing needle 405 to perform an automatic feeding and feeding process.
In a preferred embodiment, it is specifically described that the good product discharge port 6 includes a good product conveying track 601, one end of the upper surface of the good product conveying track 601 is movably connected with a core frame discharge storage box 602, a second direction standard plate 603 is movably sleeved in the core frame discharge storage box 602, and a storage box container 604 is arranged on the lower surface of the good product conveying track 601; the image detector 8 comprises an image detector 801 and a light box 802, wherein the middle part of the upper surface of the light box 802 is movably sleeved with the outer wall of the bottom end of the image detector 801, which is close to the upper surface, the light box 802 is square, and the side length of the light box is larger than the width of the semiconductor chip frame 305, so that the semiconductor chip frame 305 is driven from the conveying crawler 903 to the inside of the light box 802 for illumination detection.
In a preferred embodiment, it is specifically explained that the mechanism 10 for conveying and sorting defective products includes a pneumatic core pushing plate 1001, a sorter 1002 is movably connected to the upper surface of the pneumatic core pushing plate 1001, a conveying chain 1003 is movably connected to the bottom of the side surface of the pneumatic core pushing plate 1001, and one end of the conveying chain 1003 away from the pneumatic core pushing plate 1001 is fixedly connected to the bottom of the sorter 1002, so that defective products and good products of the semiconductor chip frames detected by the appearance can be sorted by the sorter 1002; the defective goods discharge port 11 comprises a defective goods conveying track 1101, a core frame waste storage box 1103 is arranged at one end of the defective goods conveying track 1101, a third direction standard plate 1102 is movably sleeved in the core frame waste storage box 1103, a lifting mechanism is arranged at the bottom of the core frame waste storage box 1103, the height of the core frame waste storage box 1103 is adjusted through lifting, and detected defective goods are conveyed and inserted in the core frame waste storage box 1103 through the defective goods conveying track 1101.
In a preferred embodiment, it is specifically described that the defective product damaging device 9 includes a laser bursting device 901, an inductor 902 is disposed at one end of the laser bursting device 901, a conveying crawler 903 is disposed right below the inductor 902 and located at the bottom of the laser bursting device 901, a driving motor 904 is movably connected to the middle of the side surface of the laser bursting device 901, a lifting chain 905 is disposed at the bottom of the side surface of the laser bursting device 901 and located at the bottom of the driving motor 904, and the driving motor 904 is fixedly connected with a detecting platform in the middle of the host base 101, and is used for driving the laser bursting device 901 to move in the horizontal direction on the driving motor 904 through the lifting chain 905, so that the laser bursting device 901 controls the inductor 902 to emit laser to damage a semiconductor chip frame for detecting defective products on the appearance.
In a preferred embodiment, it is specifically described that the middle part of the flip cover 106 is fixedly connected with the observation glass door 5, and is used for observing the condition of detecting the semiconductor chip frame in the host base 101 from the observation glass door 5 through the front surface of the dust cover 104, and the defective products are marked by laser damage through the sensor 902, so as to avoid laser stimulation to pupils, the middle parts of two sides of the lower surface of the dust cover 104 are respectively fixedly connected with the upper surface of the laser scanner 7, and are used for sensing the feeding, conveying and discharging processes of the semiconductor chip frame, the middle part in the host base 101 is provided with a detection platform, and the feeding bin storage box 301, the side plate 401, the good product conveying track 601, the image detector 801, the conveying crawler 903, the driving motor 904, the pneumatic pushing core plate 1001 and the defective product conveying track 1101 are all sequentially arranged on the platform, so as to automatically operate the discharging processes of feeding, detecting, conveying and sorting the defective products.
In a preferred embodiment, the shapes and the sizes of the core placing rack feeding bin storage box 301, the core placing rack discharging bin storage box 602 and the third direction target 1102 are equal, so that the semiconductor chip frame is placed, and the structure is simple, the functions are consistent, the mass production is convenient, the cost is reduced, and the method is used for a plurality of operation links in the appearance detection process; the diameter of the pneumatic pushing needle 405 is smaller than the distance between two adjacent chip frame grooves 304, but the diameter of the pneumatic pushing needle 405 is larger than the thickness of the semiconductor chip frame 305, so that one end of the semiconductor chip frame 305 is pushed to be placed in the chip frame groove 304 in the bin storage box 301 for feeding the semiconductor chip frame 305, one end of the conveyor belt 903 is fed through the light box 802, visual image analysis is acquired through the image detector 801, and appearance detection is performed.
Example 3
Referring to fig. 10, the present invention provides an appearance inspection apparatus for a semiconductor chip frame, which is further disclosed in embodiments 1 and 2, and includes the following steps:
s1, automatic feeding: sequentially loading the semiconductor chip frames 305 for producing finished products into chip frame grooves 304 on a chip frame feeding bin storage box 301, after filling, putting the semiconductor chip frames into a feeding hole 3 on one side of a host base 101, which is close to a pneumatic pusher 4, according to the indication direction of a first direction target plate 302 on the target plate groove 303, and starting the host base 101 to work by inserting a power line into a socket 109, so that a telescopic crawler device 404 on a side plate 401 reciprocates, a clamping plate 403 and a pneumatic pushing needle 405 on the feeding plate 402 are driven to push the semiconductor chip frames 305 which are put into the bin storage box 301 to enter a conveying crawler 903 for conveying, and meanwhile, a laser scanner 7 timely detects the feeding process of the semiconductor chip frames 305;
s2, appearance detection: the semiconductor chip frames 305 are conveyed to the interior of the light box 802 through the conveying crawler 903, the appearance of the semiconductor chip frames 305 is detected through illumination and the image detector 801, the yield of the semiconductor chip frames 305 is identified through image detection, if the semiconductor chip frames are good, the semiconductor chip frames are conveyed to the mechanism 10 for conveying and sorting the good and defective products along the conveying crawler 903, the semiconductor chip frames 305 are pushed to the core rack discharging storage boxes 602 on the good product conveying track 601 through the conveying chain 1003 without laser damage of the sensor 902, and the semiconductor chip frames are stored in the storage box containers 604 after the storage is full;
s3, sorting defective products: if the image detector 801 detects that the semiconductor chip frame 305 is a defective product, the semiconductor chip frame 305 is conveyed by the conveying crawler 903, the driving motor 904 drives the laser popper 901 to start the sensor 902 at the lifting chain 905, laser damage is performed on the surface of the semiconductor chip frame 305, the damaged semiconductor chip frame 305 is conveyed to the pneumatic core pushing plate 1001 through the conveying crawler 903, the conveying chain 1003 drives the pneumatic core pushing plate 1001 to push onto the defective product conveying track 1101, and the damaged semiconductor chip frame is conveyed by the defective product conveying track 1101 and is accommodated in the core frame waste storage box 1103;
s4, real-time observation: in the core placing rack feeding bin storage box 301, the core placing rack discharging bin storage box 602 and the core placing rack waste bin storage box 1103, a longitudinal lifting mechanism is adopted to drive the core placing rack discharging bin storage box 301, the core placing rack discharging bin storage box 602 and the core placing rack waste bin storage box 1103 to carry out automatic feeding and discharging operation, a discharging process laser scanner 7 can detect in real time, and in the working process, personnel can observe in real time through a side window 102 and an observation glass door 5;
s5, overhauling and maintaining: when the appearance detection equipment body 1 fails, the turnover cover 106 is opened to open the inner supporting telescopic rod 107, so that the laser scanner 7, the image detector 8, the defective product damaging device 9, the conveying and sorting defective product mechanism 10 and the defective product discharging port 11 in the main machine base 101 are overhauled and maintained, or the access door 108 is opened to overhaul the internal driving equipment of the main machine base 101, and the appearance detection equipment body 1 is driven by the movable hub 2 to transfer the field of the equipment.
Finally: the foregoing description of the preferred embodiments of the present invention is not intended to be limiting, but it will be understood by those skilled in the art that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention.
Claims (9)
1. Appearance inspection equipment of semiconductor chip frame, including appearance inspection equipment organism (1), its characterized in that: further comprises a hub (2): the device is arranged around the lower surface of the appearance detection device body (1) and is movably connected with the appearance detection device body (1);
a feeding port (3), a good product discharging port (6) and a defective product discharging port (11): the pneumatic material pushing machine is characterized by being respectively arranged from one end to the other end of the middle part of the appearance detection equipment body (1), the defective material discharging port (11) is arranged in the middle part of the appearance detection equipment body (1), and the positions and the structures of the pneumatic material pushing machine (4) and the good material discharging port (6) are mutually symmetrical;
pneumatic pusher (4): the device is arranged on one side of the middle part of the appearance detection device body (1) close to the back surface and is connected with the same side of the feeding port (3), and is fixedly connected with the appearance detection device body (1) and is movably connected with the feeding port (3);
observation glass door (5): the device is arranged in the middle of the front surface of the appearance detection equipment body (1) and is fixedly connected with the appearance detection equipment body (1);
a laser scanner (7), an image detector (8) and a mechanism (10) for conveying and sorting defective products: the two laser scanners (7) are arranged in sequence from one end to the other end and are fixedly connected with two ends of the upper surface of the interior of the appearance detection equipment body (1);
defective product damaging device (9): install in the inside of outward appearance check out test set organism (1), and link up in proper order be connected with pneumatic pusher (4), image detector (8), conveying letter sorting defective products mechanism (10), defective products discharge gate (11) and good product discharge gate (6), wherein, defective products damage ware (9) and defective products discharge gate (11) link to each other through conveying letter sorting defective products mechanism (10), just good products discharge gate (6) and defective products discharge gate (11) are connected respectively in the both sides of conveying letter sorting defective products mechanism (10).
2. The appearance inspection apparatus of a semiconductor chip frame according to claim 1, wherein: appearance check out test set organism (1) is including host computer base (101), both sides that host computer base (101) are close to the upper surface are all fixedly connected with side window (102), heat dissipation hole (103) have all been seted up to both sides that host computer base (101) are close to the lower surface, the upper surface fixedly connected with dust cover (104) of host computer base (101), both sides swing joint at dust cover (104) middle part has hinge (105), the front at dust cover (104) middle part has flip cover (106) through hinge (105) swing joint, the both ends at flip cover (106) top just are located the inside of host computer base (101) is provided with interior bracing telescopic link (107), the back of host computer base (101) is provided with access door (108), socket (109) have been seted up to one side at the host computer base (101) back, are located the bottom at the host computer base (101) back just be located power storage hole (1010) have been seted up to the below at socket (109), are located the bottom at host computer base (101) back just be located power storage hole (1010) outside swing joint has waterproof (1011).
3. The appearance inspection apparatus of a semiconductor chip frame according to claim 2, wherein: the feeding port (3) comprises a core placing frame feeding bin storage box (301), a first direction target plate (302) is movably sleeved at the middle part of the upper surface of the core placing frame feeding bin storage box (301), a group of target plate grooves (303) are formed in two sides of the inner wall of the core placing frame feeding bin storage box (301) close to the upper surface, a plurality of groups of chip frame grooves (304) are formed in two sides of the inner wall of the target plate grooves (303) and below the target plate grooves (303), and a plurality of semiconductor chip frames (305) are movably sleeved at the middle part of the core placing frame feeding bin storage box (301) and inside the chip frame grooves (304).
4. A visual inspection apparatus for a semiconductor chip frame according to claim 3, wherein: pneumatic pusher (4) are including curb plate (401), the bottom swing joint of curb plate (401) side has delivery sheet (402), the other end of delivery sheet (402) is provided with centre gripping plate (403), the inside swing joint of centre gripping plate (403) has pneumatic propelling movement needle (405), the side of curb plate (401) is provided with flexible crawler attachment (404), just the bottom track of flexible crawler attachment (404) with the last fixed surface of delivery sheet (402) one end links to each other.
5. The appearance inspection apparatus of a semiconductor chip frame according to claim 4, wherein: the good product discharging port (6) comprises a good product conveying track (601), one end of the upper surface of the good product conveying track (601) is movably connected with a core frame discharging storage box (602), a second direction standard plate (603) is movably sleeved in the core frame discharging storage box (602), and a storage box container (604) is arranged on the lower surface of the good product conveying track (601); the image detector (8) comprises an image detector (801) and a light box (802), the middle part of the upper surface of the light box (802) is movably sleeved with the outer wall of the bottom end of the upper surface, close to the upper surface, of the image detector (801), the light box (802) is square, and the side length of the light box is larger than the width of the semiconductor chip frame (305).
6. The appearance inspection apparatus of a semiconductor chip frame according to claim 5, wherein: the mechanism (10) for conveying and sorting defective products comprises a pneumatic core pushing plate (1001), wherein a sorter (1002) is movably connected to the upper surface of the pneumatic core pushing plate (1001), a conveying chain (1003) is movably connected to the bottom of the side face of the pneumatic core pushing plate (1001), and one end, far away from the pneumatic core pushing plate (1001), of the conveying chain (1003) is fixedly connected with the bottom of the sorter (1002); the defective goods discharging port (11) comprises a defective goods conveying track (1101), a core frame waste storage box (1103) is arranged at one end of the defective goods conveying track (1101), and a third direction target plate (1102) is movably sleeved in the core frame waste storage box (1103).
7. The appearance inspection apparatus of a semiconductor chip frame according to claim 6, wherein: the defective goods damaging device (9) comprises a laser sheet blaster (901), an inductor (902) is arranged at one end of the laser sheet blaster (901), a conveying crawler belt (903) is arranged at the bottom of the laser sheet blaster (901) and under the inductor (902), a driving motor (904) is movably connected to the middle of the side face of the laser sheet blaster (901), a lifting chain (905) is arranged at the bottom of the side face of the laser sheet blaster (901) and at the bottom of the driving motor (904), and a detection platform is fixedly connected with the middle of the inside of a host base (101).
8. The appearance inspection apparatus of a semiconductor chip frame according to claim 7, wherein: the middle part of upset lid (106) with survey glass door (5) is fixed link to each other, the middle part of dust cover (104) lower surface both sides links to each other with the last fixed surface of laser scanner (7) respectively, the inside middle part of host computer base (101) is provided with testing platform, just put core frame income feed bin storage box (301), curb plate (401), good product conveying track (601), image detector (801), carry track (903), driving motor (904), pneumatic core board (1001) and inferior product conveying track (1101) all set gradually on this platform.
9. The appearance inspection apparatus of a semiconductor chip frame according to claim 7, wherein: the shapes and the sizes of the core placing frame feeding bin storage box (301), the core placing frame discharging bin storage box (602) and the third direction target (1102) are equal; the diameter of the pneumatic pushing needle (405) is smaller than the distance between two adjacent chip frame grooves (304), but the diameter of the pneumatic pushing needle (405) is larger than the thickness of the semiconductor chip frame (305).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310838065.2A CN117007519A (en) | 2023-07-10 | 2023-07-10 | Appearance detection equipment of semiconductor chip frame |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310838065.2A CN117007519A (en) | 2023-07-10 | 2023-07-10 | Appearance detection equipment of semiconductor chip frame |
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| CN117007519A true CN117007519A (en) | 2023-11-07 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117548360A (en) * | 2024-01-12 | 2024-02-13 | 中国传媒大学 | Image feature recognition method and device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117548360A (en) * | 2024-01-12 | 2024-02-13 | 中国传媒大学 | Image feature recognition method and device |
| CN117548360B (en) * | 2024-01-12 | 2024-03-26 | 中国传媒大学 | Image feature recognition method and device |
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