CN116798927A - Automatic correction type wafer material box feeding carrier - Google Patents
Automatic correction type wafer material box feeding carrier Download PDFInfo
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- CN116798927A CN116798927A CN202311083063.3A CN202311083063A CN116798927A CN 116798927 A CN116798927 A CN 116798927A CN 202311083063 A CN202311083063 A CN 202311083063A CN 116798927 A CN116798927 A CN 116798927A
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- 239000000463 material Substances 0.000 title claims abstract description 78
- 230000000903 blocking effect Effects 0.000 claims abstract description 19
- 230000002457 bidirectional effect Effects 0.000 claims abstract description 13
- 230000007246 mechanism Effects 0.000 claims description 17
- 230000005540 biological transmission Effects 0.000 claims description 12
- 230000000694 effects Effects 0.000 claims description 9
- 230000000149 penetrating effect Effects 0.000 claims description 7
- 239000000428 dust Substances 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 3
- 230000007423 decrease Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 17
- 230000008569 process Effects 0.000 description 15
- 238000009434 installation Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- 241001330002 Bambuseae Species 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses an automatic correction type wafer material box feeding carrier, which belongs to the technical field of wafer material feeding, and comprises a feeding carrier body; a material blocking dust-proof plate is fixedly arranged at the rear part of the feeding carrier body; further comprises: the left side and the right side of the top surface of the feeding carrier body are respectively provided with a bidirectional threaded rod through bearings in a rotating way, and the outer walls of the front side and the rear side of the bidirectional threaded rods on the left side and the right side are respectively connected with the bottom ends of the deviation correcting guide plates in a threaded way; wherein, a dustproof shielding plate is arranged in the middle of a pushing notch in the material blocking dustproof plate in a sliding way; the middle parts of the top surfaces of the deviation correcting guide plates are symmetrically arranged, and the driving box bodies are fixedly arranged in the middle of the top surfaces of the deviation correcting guide plates. This automatic correction formula wafer magazine material loading carrier, material loading lift platform and location diaphragm are fixed a position the wafer magazine, prevent by rectifying deflector and rectifying guide pulley that the wafer magazine can not take place the skew when the feed to through the backward movement and the decline of dustproof shielding plate, and then be convenient for the follow-up feed work to the wafer body of wafer magazine.
Description
Technical Field
The invention relates to the technical field of wafer loading, in particular to an automatic correction type wafer material box loading carrier.
Background
The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor circuit, and after grinding, polishing and slicing, a silicon wafer is formed, namely, the wafer is required to be orderly conveyed to processing equipment in the batch production process, and external dust and offset damage to a wafer body are required to be prevented in the process;
the publication number CN219418975U discloses an automatic loading platform device for a wafer material box, an unlocking mechanism and a vacuum chuck are arranged on a mounting plate, three positioning columns which are arranged in a triangle shape are arranged on the loading platform, a mounting groove is arranged in the middle of the loading platform, a clamping hook is rotationally arranged in the mounting groove, so that the positioning and the fixing of the wafer material box are realized, the overturning of the wafer material box in the feeding process is avoided, and the feeding safety is improved; the accurate positioning, automatic detection and judgment of the wafer material box are realized, the cover is automatically opened, and the material taking accuracy of the wafer is ensured;
however, the automatic loading and feeding device for the wafer cassettes has the following problems in the actual use process: bear the weight of the wafer magazine through loading platform to fix a position the wafer magazine by unlocking mechanism, but fix a position the wafer magazine through the trip of loading platform top in the use, this kind of location structure can't guarantee the stability of wafer magazine in the installation and the in-process of opening and shutting, and two-point type unlocking mechanism will not work once the skew appears at the wafer magazine simultaneously, and then influences the accuracy and the dustproof effect of wafer magazine feed.
Therefore, we propose an automatic correction type wafer magazine loading carrier to solve the above-mentioned problems.
Disclosure of Invention
The invention aims to provide an automatic correction type wafer material box feeding carrier, which solves the problems that in the prior art, a loading platform is used for carrying a wafer material box and an unlocking mechanism is used for positioning the wafer material box, but in the use process, the wafer material box is positioned only by a clamping hook above the loading platform, the positioning structure cannot ensure the stability of the wafer material box in the installation and opening and closing processes, and meanwhile, once the wafer material box is deviated, a two-point unlocking mechanism cannot work, so that the accuracy of the wafer material box feeding and the dustproof effect are affected.
In order to achieve the above purpose, the present invention provides the following technical solutions: the automatic correction type wafer material box feeding carrier comprises a feeding carrier body and a feeding lifting platform which is arranged at the central position inside the top end of the feeding carrier body in a sliding manner, wherein a positioning transverse plate is fixedly arranged on the top surface of the feeding lifting platform;
the feeding carrier comprises a feeding carrier body, wherein a feeding dustproof plate is fixedly arranged at the rear of the feeding carrier body, a pushing notch is formed in the upper part of the feeding dustproof plate, and guide frames are fixedly arranged at the left side and the right side of the rear of the feeding dustproof plate; further comprises:
the left side and the right side of the top surface of the feeding carrier body are respectively provided with a bidirectional threaded rod through bearings in a rotating way, and the outer walls of the front side and the rear side of the bidirectional threaded rods on the left side and the right side are respectively connected with the bottom ends of the deviation correcting guide plates in a threaded way;
the middle part of the pushing notch in the material blocking dustproof plate is provided with a dustproof shielding plate in a sliding manner, four corners of the back of the dustproof shielding plate are fixedly connected to the inner ends of the anti-drop brackets, and the middle part of the back of the dustproof shielding plate is fixedly provided with a pushing valve cylinder;
the driving box bodies are fixedly installed in the middle of the top surface of the deviation correcting guide plates and symmetrically arranged, and driving gears are arranged at the inner center positions of the driving box bodies in a rotating mode through bearings.
Preferably, the whole feeding carrier body is arranged in a vertical rectangular structure, a vertical coaxial distribution is arranged between the feeding carrier body and the feeding lifting platform and the positioning transverse plate which are arranged in a sliding manner, and the left side and the right side of the rear top surface of the positioning transverse plate are connected to the bottom end of the pressure transverse plate in a sliding manner.
Preferably, the inside slip through connection in place ahead of location diaphragm is in the middle part of locating frame, and through reset spring interconnect between the bottom surface outer wall of locating frame's the lower extreme left and right sides and location diaphragm to the bottom left and right sides of locating frame all fixed connection in the bottom of traction rope, the top of the equal fixed connection in the bottom surface outer wall of the pressure diaphragm of locating diaphragm top left and right sides of the both sides traction rope moreover.
Preferably, the inside of the left and right sides direction frame in material resistance dust guard rear all is provided with the lift threaded rod through the bearing rotation, and the top of left and right sides lift threaded rod passes through main chain wheel mechanism intermeshing and connects to the bottom fixed connection of left side lift threaded rod is in servo motor's output shaft top.
Preferably, the outer ends of the anti-falling brackets at four corners of the back of the dustproof shielding plate are connected to the inner ends of the guide traction blocks in a sliding clamping manner, the outer ends of the guide traction blocks which are symmetrically arranged are connected to the outer walls of the lifting threaded rods on the left side and the right side in a threaded penetrating manner, and the two groups of the anti-falling brackets and the guide traction blocks are symmetrically distributed and arranged about the vertical central axis of the material blocking dustproof plate.
Preferably, the middle part sliding block in the back of dustproof shielding plate is in the dull and stereotyped lower extreme that slides, and the inside left and right sides of the upper end of dull and stereotyped that slides all rotates through the bearing and be provided with the guide sleeve to through vice sprocket mechanism intermeshing connection between the guide sleeve of left and right sides, the inside equal screw thread penetration connection of guide sleeve in the middle part of guide threaded rod in the left and right sides moreover, the equal fixed connection in the back of dustproof shielding plate of guide threaded rod front end in the left and right sides simultaneously.
Preferably, the inside of the guide plate top surface drive box body that rectifies that the symmetry set up all rotates the top that sets up to be connected in the transmission pivot through the bearing, and transmission pivot fixed connection is in drive gear's pivot department to be connected through the intermeshing of conical gear between the bottom of transmission pivot and the outer wall of two-way threaded rod, be the mode interconnect of slip block between two-way threaded rod and the conical gear moreover.
Preferably, the top surface sliding block of the guide plate that rectifies that the symmetry set up is connected in the bottom of rectifying flat board, and the top surface of the dull and stereotyped that rectifies that the symmetry set up all rotates through the bearing and is provided with the guide pulley that rectifies to the left side top and the right side below of the dull and stereotyped that rectifies that the symmetry set up all articulate in the inner of propelling movement turning rod.
Preferably, the inside left and right sides of deflector top surface drive box body that rectifies that the symmetry set up all slides and is provided with the drive rack, and the drive rack of left and right sides all meshes to be connected in drive gear's outer wall to the outer end of left and right sides drive rack all articulates to be connected in the outer end of propelling movement upset pole, and gliding drive rack will rectify dull and stereotyped inboard propelling movement through articulated propelling movement upset pole moreover.
Preferably, the front middle part of the sliding plate is fixedly connected to the rear end of the pushing valve plate, the front end of the pushing valve plate is slidably arranged in the pushing valve cylinder at the rear of the dustproof shielding plate, the dustproof shielding plate which slides backwards conveys air in front of the pushing valve cylinder to the inside of the wafer material box to reduce working resistance, and the dustproof shielding plate which resets forwards pushes air in the wafer material box to the inside of the pushing valve cylinder to ensure sealing effect.
Compared with the prior art, the invention has the beneficial effects that: this automatic correction formula wafer magazine material loading carrier fixes a position the wafer magazine through material loading lift platform and location diaphragm, prevents by the deflector of rectifying that the symmetry set up and the guide pulley of rectifying that the wafer magazine can not take place the skew when the feed to through the back of dustproof shielding plate with descend, and then be convenient for follow-up feed work to the wafer body of wafer magazine, its concrete content is as follows:
1. through the arrangement of the pressure cross plate above the positioning cross plate and the positioning frame, the wafer material box can drive the pressure cross plate to descend according to the self weight, and the parallel positioning frame ascends to lock and position the front end of the wafer material box, so that the wafer material box is ensured not to deviate in the horizontal direction according to the movement of the wafer material box in the process of disassembly and working feeding, and the accuracy in the wafer conveying process is improved;
2. through the arrangement of the two-way threaded rods on the left side and the right side of the feeding carrier body, when the wafer material box is positioned on the feeding carrier body, the outer wall of the wafer material box is positioned by the symmetrically arranged deviation correcting guide plates and the deviation correcting guide wheels on the top, and the rotatable deviation correcting guide wheels can not influence the sliding operation of the wafer material box in the working process of the wafer material box, and can correct the lateral deviation of the wafer material box, so that the stability of the wafer material box in the feeding process is improved;
3. through the dustproof shielding plate and the sliding flat plate behind the material blocking dustproof plate, in the process of opening the wafer material box to realize the material loading, the air in the pushing valve cylinder is conveyed into the wafer material box by the backward movement of the dustproof shielding plate, so that the resistance in the backward movement process of the dustproof shielding plate is reduced, and meanwhile, the dustproof shielding plate can be opened for the opened pushing notch so as to ensure the dustproof effect and the material loading effect of the wafer material box in the opened state and the closed state;
4. through the setting of blocking dustproof board back guide frame, can assist dustproof shielding board lift operation after the back moves, distinguish dustproof shielding board to the closed condition and the open condition of propelling movement notch for dustproof shielding board can be in the inside air discharge of wafer magazine in reset process to well propelling movement valve section of thick bamboo, supplementary wafer magazine discharges inside air and forms the negative pressure of certain effect, more effectively promotes the connection effect of dustproof shielding board and wafer magazine.
Drawings
FIG. 1 is a schematic view of the overall three-dimensional structure of the present invention;
FIG. 2 is a schematic diagram of a three-dimensional structure of a material-blocking dust-proof plate according to the present invention;
FIG. 3 is a schematic view of the installation structure of the dust-proof shielding plate of the present invention;
FIG. 4 is a schematic perspective view of a positioning cross plate according to the present invention;
FIG. 5 is an enlarged schematic view of the structure of FIG. 4A according to the present invention;
FIG. 6 is a schematic view of a skid plate mounting structure of the present invention;
FIG. 7 is a schematic view of the installation structure of the dust-proof shielding plate of the present invention;
FIG. 8 is a schematic view of the dust-proof shielding structure after opening the present invention;
FIG. 9 is a schematic diagram of the connection structure of the anti-drop bracket and the guide traction block;
FIG. 10 is a schematic perspective view of a deviation correcting guide plate according to the present invention;
FIG. 11 is a schematic view of the mounting structure of the drive rack of the present invention;
FIG. 12 is a schematic view of a connection structure of a driving shaft and a bi-directional threaded rod according to the present invention;
fig. 13 is a schematic diagram of a three-dimensional side sectional structure of a push valve cartridge of the present invention.
In the figure: 1. a loading carrier body; 2. a loading lifting platform; 3. positioning a transverse plate; 4. a material-blocking dust-proof plate; 5. pushing the notch; 6. a guide frame; 7. a two-way threaded rod; 8. deviation correcting guide plates; 9. a dust-proof shielding plate; 10. an anti-falling bracket; 11. driving the box body; 12. a drive gear; 13. a pressure cross plate; 14. a positioning frame; 15. a return spring; 16. pulling a pull rope; 17. lifting the threaded rod; 18. a main sprocket mechanism; 19. a servo motor; 20. a guide traction block; 21. a slip plate; 22. a guide sleeve; 23. a secondary sprocket mechanism; 24. a guide threaded rod; 25. a transmission rotating shaft; 26. a bevel gear; 27. a deviation rectifying flat plate; 28. correcting the guide wheel; 29. pushing a turning rod; 30. a drive rack; 31. pushing the valve plate; 32. pushing the valve cylinder.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-13, the present invention provides the following technical solutions: the automatic correction type wafer material box feeding carrier comprises a feeding carrier body 1 and a feeding lifting platform 2 which is arranged at the central position inside the top end of the feeding carrier body 1 in a sliding manner, wherein a positioning transverse plate 3 is fixedly arranged on the top surface of the feeding lifting platform 2; the left side and the right side of the rear top surface of the positioning transverse plate 3 are both in sliding connection with the bottom end of the pressure transverse plate 13; the front inner part of the positioning transverse plate 3 is connected to the middle part of the positioning frame 14 in a sliding and penetrating way, the left side and the right side of the lower end of the positioning frame 14 are connected with the outer wall of the bottom surface of the positioning transverse plate 3 through a reset spring 15, the left side and the right side of the bottom end of the positioning frame 14 are fixedly connected to the bottom ends of the traction ropes 16, and the top ends of the traction ropes 16 on the left side and the right side are fixedly connected to the outer wall of the bottom surface of the pressure transverse plate 13 on the left side and the right side of the top end of the positioning transverse plate 3; as shown in fig. 1-2 and fig. 4-5, the wafer material box is placed on the top surface of the positioning transverse plate 3, so that the wafer material box drives the pressure transverse plate 13 to slide downwards through the weight of the wafer material box, and then the fixedly connected traction pull rope 16 is loosened, and after the traction pull rope 16 does not limit the positioning frame 14, the reset spring 15 drives the positioning frame 14 to slide upwards, and then is clamped in the front end of the wafer material box;
the left side and the right side of the top surface of the feeding carrier body 1 are respectively provided with a bidirectional threaded rod 7 through bearings in a rotating way, and the outer walls of the front side and the rear side of the bidirectional threaded rods 7 on the left side and the right side are respectively connected with the bottom end of a deviation rectifying guide plate 8 in a threaded way; the middle parts of the top surfaces of the symmetrically arranged deviation correcting guide plates 8 are fixedly provided with driving box bodies 11, and driving gears 12 are arranged in the symmetrically arranged driving box bodies 11 in a rotating mode through bearings; the inside of the top surface driving box body 11 of the symmetrically arranged deviation correcting guide plate 8 is rotatably connected to the top end of a transmission rotating shaft 25 through a bearing, the transmission rotating shaft 25 is fixedly connected to the rotating shaft of a driving gear 12, the bottom end of the transmission rotating shaft 25 is in meshed connection with the outer wall of the bidirectional threaded rod 7 through a conical gear 26, and the bidirectional threaded rod 7 is in sliding clamping connection with the conical gear 26; as shown in fig. 2, 10-12, the bidirectional threaded rods 7 on the left and right sides inside the feeding carrier body 1 rotate, so as to drive the deviation correcting guide plates 8 in threaded connection on the front and rear sides to move inwards, and simultaneously the bidirectional threaded rods 7 rotate the transmission rotating shaft 25 and the driving gear 12 inside the driving box body 11 through the conical gears 26 in sliding clamping connection;
the rear of the feeding carrier body 1 is fixedly provided with a material blocking dustproof plate 4, a pushing notch 5 is formed in the upper part of the material blocking dustproof plate 4, and guide frames 6 are fixedly arranged on the left side and the right side of the rear of the material blocking dustproof plate 4; the middle part of the pushing notch 5 in the material blocking dustproof plate 4 is provided with a dustproof shielding plate 9 in a sliding manner, four corners of the back of the dustproof shielding plate 9 are fixedly connected to the inner ends of the anti-falling brackets 10, and the middle part of the back of the dustproof shielding plate 9 is fixedly provided with a pushing valve cylinder 32; the inside of the guide frames 6 at the left side and the right side behind the material-blocking dust-proof plate 4 is provided with lifting threaded rods 17 through bearings in a rotating way, the top ends of the lifting threaded rods 17 at the left side and the right side are connected with each other in a meshed way through a main chain wheel mechanism 18, and the bottom ends of the lifting threaded rods 17 at the left side are fixedly connected with the top ends of output shafts of servo motors 19; as shown in fig. 6, 8-9, the lifting threaded rod 17 engaged and connected by the main chain wheel mechanism 18 drives the guiding traction block 20 in threaded connection with the outer wall to slide downwards, and simultaneously the anti-falling bracket 10 and the dustproof shielding plate 9 in sliding and clamping connection with the guiding traction block 20 slide downwards, so that the dustproof shielding plate 9 does not seal the pushing notch 5 formed in the material blocking dustproof plate 4;
the front middle part of the sliding flat plate 21 is fixedly connected to the rear end of the pushing valve plate 31, the front end of the pushing valve plate 31 is slidably arranged in the pushing valve cylinder 32 behind the dustproof shielding plate 9, the dustproof shielding plate 9 which slides backwards conveys air in front of the pushing valve cylinder 32 to the inside of the wafer material box to reduce working resistance, and the dustproof shielding plate 9 which resets forwards pushes air in the wafer material box to the inside of the pushing valve cylinder 32 to ensure sealing effect.
The outer ends of the anti-drop brackets 10 at four corners of the back surface of the dustproof shielding plate 9 are connected to the inner ends of the guide traction blocks 20 in a sliding and clamping manner, and the outer ends of the symmetrically arranged guide traction blocks 20 are connected to the outer walls of the lifting threaded rods 17 at the left side and the right side in a threaded penetrating manner; the middle part of the back of the dustproof shielding plate 9 is slidably clamped at the lower end of the sliding plate 21, the left side and the right side of the inner part of the upper end of the sliding plate 21 are respectively provided with a guide sleeve 22 through bearings in a rotating way, the guide sleeves 22 on the left side and the right side are mutually meshed and connected through a secondary chain wheel mechanism 23, the inner parts of the guide sleeves 22 on the left side and the right side are respectively connected with the middle part of a guide threaded rod 24 in a threaded penetrating way, and the front ends of the guide threaded rods 24 on the left side and the right side are respectively fixedly connected with the back of the dustproof shielding plate 9; as shown in fig. 3 and fig. 6-7, the guide sleeve 22 rotates through the auxiliary sprocket mechanism 23, so that the guide threaded rod 24 in threaded connection with the left and right sides inside the guide sleeve 22 is driven, and meanwhile, the guide threaded rod 24 is fixedly connected to the outer wall of the back of the dustproof shielding plate 9, so that the rotating guide sleeve 22 drives the threaded guide threaded rod 24 to drive the fixedly connected dustproof shielding plate 9 to slide towards the rear of the material blocking dustproof plate 4;
the top surfaces of the symmetrically arranged deviation rectifying guide plates 8 are connected to the bottom end of the deviation rectifying flat plate 27 in a sliding and clamping manner, the top surfaces of the symmetrically arranged deviation rectifying flat plates 27 are respectively provided with a deviation rectifying guide wheel 28 through bearing rotation, and the upper left side and the lower right side of the symmetrically arranged deviation rectifying flat plates 27 are respectively and hingedly connected to the inner end of the pushing turning rod 29; the left and right sides of the inside of the top surface driving box body 11 of the symmetrically arranged deviation correcting guide plate 8 are respectively provided with a driving rack 30 in a sliding way, the driving racks 30 on the left and right sides are respectively connected with the outer wall of the driving gear 12 in a meshed manner, and the outer ends of the driving racks 30 on the left and right sides are respectively connected with the outer ends of the pushing turnover rod 29 in a hinged manner; as shown in fig. 10-11, the driving racks 30 and the hinged pushing turning rods 29 engaged and connected at the left and right sides slide outwards, and then the outer end of the deviation rectifying flat plate 27 hinged to the outer end of the pushing turning rods 29 slides inwards, so that the deviation rectifying flat plate 27 drives the deviation rectifying guide wheels 28 at the top end to be attached to the outer wall of the wafer material box, and further the deviation is prevented from occurring, and the normal operation of the wafer material box is not affected.
Working principle: before the automatic correcting type wafer material box loading carrier is used, the whole condition of the device is required to be checked firstly to confirm that normal work can be carried out, and according to the method shown in fig. 1-13, the wafer material box is placed on the top surface of the positioning transverse plate 3, so that the wafer material box drives the pressure transverse plate 13 to slide downwards through self weight, the fixedly connected traction pull rope 16 is further loosened, and then after the traction pull rope 16 does not limit the positioning frame 14, the positioning frame 14 is clamped in the front end of the wafer material box in an upward sliding manner, and falling off in the subsequent feeding process is prevented;
the bidirectional threaded rods 7 on the left side and the right side of the interior of the feeding carrier body 1 rotate to move the deviation rectifying guide plates 8 in threaded connection inwards, so that the transmission rotating shaft 25 and the driving gear 12 in the driving box body 11 rotate, the driving rack 30 and the hinged pushing turning rod 29 slide outwards, the deviation rectifying flat plate 27 with the hinged outer end is driven by the pushing turning rod 29 to be attached to the outer wall of the wafer box, and the deviation rectifying guide wheels 28 are prevented from deviating in the feeding process of the wafer box;
the driving mechanism drives the auxiliary sprocket mechanism 23 to enable the rotating guide sleeve 22 to drive the guide threaded rod 24 in threaded connection to drive the fixedly connected dustproof shielding plate 9 to slide to the rear of the material blocking dustproof plate 4, so that a pushing notch 5 formed in the material blocking dustproof plate 4 cannot block the subsequent dustproof shielding plate 9, and meanwhile, a pushing valve cylinder 32 driven by the dustproof shielding plate 9 extrudes internal air through a pushing valve plate 31 and is conveyed to the inside of the wafer material box to reduce working resistance;
the servo motor 19 goes up and down the threaded rod 17 and rotates, simultaneously with the slip-off prevention support 10 and the dustproof shielding plate 9 of direction traction block 20 slip block connection slide downwards for dustproof shielding plate 9 no longer seals the propelling movement notch 5 of hindering material dust guard 4 inside seting up, and then is convenient for the wafer magazine with the inside wafer body propelling movement to the rear of hindering material dust guard 4.
In the description of the present invention, unless otherwise indicated, the meaning of "a plurality" is two or more; the terms "upper," "lower," "left," "right," "inner," "outer," "front," "rear," "head," "tail," and the like are used as an orientation or positional relationship based on that shown in the drawings, merely to facilitate description of the invention and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the invention. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "connected," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
Although the present invention has been described with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements and changes may be made without departing from the spirit and principles of the present invention.
Claims (10)
1. An automatic correction type wafer material box feeding carrier comprises a feeding carrier body (1) and a feeding lifting platform (2) which is arranged at the central position inside the top end of the feeding carrier body (1) in a sliding manner, wherein a positioning transverse plate (3) is fixedly arranged on the top surface of the feeding lifting platform (2);
the feeding carrier comprises a feeding carrier body (1), wherein a material blocking dustproof plate (4) is fixedly arranged at the rear of the feeding carrier body (1), a pushing notch (5) is formed in the upper part of the material blocking dustproof plate (4), and guide frames (6) are fixedly arranged at the left side and the right side of the rear of the material blocking dustproof plate (4);
characterized by further comprising:
the left side and the right side of the top surface of the feeding carrier body (1) are respectively provided with a bidirectional threaded rod (7) through bearings in a rotating way, and the outer walls of the front side and the rear side of the bidirectional threaded rods (7) on the left side and the right side are respectively connected with the bottom ends of the deviation rectifying guide plates (8) in a threaded way;
the middle part of a pushing notch (5) in the material blocking dustproof plate (4) is provided with a dustproof shielding plate (9) in a sliding manner, four corners of the back of the dustproof shielding plate (9) are fixedly connected to the inner ends of the anti-falling brackets (10), and a pushing valve cylinder (32) is fixedly arranged in the middle of the rear of the dustproof shielding plate (9);
the driving box bodies (11) are fixedly installed in the middle of the top surface of the deviation correcting guide plates (8) which are symmetrically arranged, and driving gears (12) are rotatably arranged at the inner center positions of the driving box bodies (11) which are symmetrically arranged through bearings.
2. The automatic leveling wafer magazine loading vehicle of claim 1, wherein: the whole feeding carrier body (1) is arranged in a vertical rectangular structure, a vertical coaxial arrangement is arranged between the feeding carrier body (1) and the feeding lifting platform (2) and the positioning transverse plate (3) which are arranged in a sliding manner, and the left side and the right side of the rear top surface of the positioning transverse plate (3) are connected to the bottom end of the pressure transverse plate (13) in a sliding manner.
3. The automatic leveling wafer magazine loading vehicle of claim 1, wherein: the front inner part of the positioning transverse plate (3) is connected to the middle part of the positioning frame (14) in a sliding and penetrating way, the left side and the right side of the lower end of the positioning frame (14) are connected with the outer wall of the bottom surface of the positioning transverse plate (3) through reset springs (15), the left side and the right side of the bottom end of the positioning frame (14) are fixedly connected to the bottom end of the traction rope (16), and the top ends of the traction ropes (16) on the left side and the right side are fixedly connected to the outer wall of the bottom surface of the pressure transverse plate (13) on the left side and the right side of the top end of the positioning transverse plate (3).
4. The automatic leveling wafer magazine loading vehicle of claim 1, wherein: the inside of hinder material dust guard (4) rear left and right sides direction frame (6) is provided with lift threaded rod (17) through the bearing rotation, and the top of left and right sides lift threaded rod (17) is through main sprocket mechanism (18) intermeshing connection to the bottom fixed connection of left side lift threaded rod (17) is in the output shaft top of servo motor (19).
5. The automatic leveling wafer magazine loading vehicle of claim 1, wherein: the outer ends of the anti-falling brackets (10) at four corners of the back of the dustproof shielding plate (9) are connected to the inner ends of the guide traction blocks (20) in a sliding clamping mode, the outer ends of the guide traction blocks (20) which are symmetrically arranged are connected to the outer walls of the lifting threaded rods (17) on the left side and the right side in a threaded mode in a penetrating mode, and the two groups of the anti-falling brackets (10) and the guide traction blocks (20) are symmetrically distributed and arranged about the vertical central axis of the material blocking dustproof plate (4).
6. The automatic leveling wafer cassette loading carrier of claim 5, wherein: the dustproof shielding plate (9) is characterized in that the middle part of the back of the dustproof shielding plate (9) is clamped at the lower end of the sliding plate (21), guide sleeves (22) are arranged on the left side and the right side of the inner part of the upper end of the sliding plate (21) in a rotating mode through bearings, the guide sleeves (22) on the left side and the right side are connected with each other in a meshed mode through auxiliary sprocket mechanisms (23), the inner parts of the guide sleeves (22) on the left side and the right side are connected with the middle part of a guide threaded rod (24) in a threaded penetrating mode, and meanwhile the front ends of the guide threaded rods (24) on the left side and the right side are fixedly connected with the back of the dustproof shielding plate (9).
7. The automatic leveling wafer magazine loading vehicle of claim 1, wherein: the inside of rectifying deflector (8) top surface drive box body (11) that the symmetry set up all rotates the top that sets up through the bearing and is connected in transmission pivot (25), and transmission pivot (25) fixed connection is in the pivot department of drive gear (12) to be connected through conical gear (26) intermeshing between the outer wall of bottom and the two-way threaded rod (7) of transmission pivot (25), be the mode interconnect of slip block between two-way threaded rod (7) and conical gear (26) moreover.
8. The automatic leveling wafer cassette loading carrier of claim 7, wherein: the top surface sliding block of rectifying deflector (8) of symmetry setting is connected in the bottom of rectifying dull and stereotyped (27), and the top surface of rectifying dull and stereotyped (27) of symmetry setting all rotates through the bearing and is provided with rectifying guide pulley (28) to the left side top and the right side below of rectifying dull and stereotyped (27) of symmetry setting all articulate and are connected in the inner of propelling movement turning rod (29).
9. The automatic leveling wafer magazine loading vehicle of claim 8, wherein: the inside left and right sides of deflector (8) top surface drive box body (11) that rectifies that the symmetry set up all slides and is provided with drive rack (30), and drive rack (30) of left and right sides all mesh and connect in the outer wall of drive gear (12) to the outer end of left and right sides drive rack (30) all articulates and connects in the outer end of propelling movement upset pole (29), and gliding drive rack (30) will rectify dull and stereotyped (27) inboard propelling movement through articulated propelling movement upset pole (29).
10. The automatic leveling wafer cassette loading carrier of claim 6, wherein: the front middle part of the sliding flat plate (21) is fixedly connected to the rear end of the pushing valve plate (31), the front end of the pushing valve plate (31) is slidably arranged in the pushing valve cylinder (32) at the rear of the dustproof shielding plate (9), the air in front of the inside of the pushing valve cylinder (32) is conveyed to the inside of the wafer material box by the dustproof shielding plate (9) which slides backwards, the working resistance is reduced, and the air in the wafer material box is pushed to the inside of the pushing valve cylinder (32) by the dustproof shielding plate (9) which resets forwards, so that the sealing effect is ensured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311083063.3A CN116798927B (en) | 2023-08-28 | 2023-08-28 | Automatic correction type wafer material box feeding carrier |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311083063.3A CN116798927B (en) | 2023-08-28 | 2023-08-28 | Automatic correction type wafer material box feeding carrier |
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| Publication Number | Publication Date |
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| CN116798927A true CN116798927A (en) | 2023-09-22 |
| CN116798927B CN116798927B (en) | 2023-11-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202311083063.3A Active CN116798927B (en) | 2023-08-28 | 2023-08-28 | Automatic correction type wafer material box feeding carrier |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117276162A (en) * | 2023-11-22 | 2023-12-22 | 深圳市恒运昌真空技术有限公司 | Plasma processing equipment |
| CN117612988A (en) * | 2024-01-19 | 2024-02-27 | 宇弘研科技(苏州)有限公司 | Wafer buffering type positioning bracket for glue spreading developing machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112490168A (en) * | 2020-12-16 | 2021-03-12 | 福州大学 | Device and method for automatically positioning and calibrating wafer center |
| CN113002150A (en) * | 2021-02-04 | 2021-06-22 | 昆山市和博电子科技有限公司 | Full-automatic screen printing machine for wafer |
| CN217043302U (en) * | 2022-01-12 | 2022-07-26 | 广东汉特包装材料有限公司 | But joint sealing that dislocation was used is glued processing with even coating equipment of environment-friendly |
| CN116110834A (en) * | 2023-02-10 | 2023-05-12 | 芯朋半导体科技(如东)有限公司 | Chip production is with last unloader |
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2023
- 2023-08-28 CN CN202311083063.3A patent/CN116798927B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112490168A (en) * | 2020-12-16 | 2021-03-12 | 福州大学 | Device and method for automatically positioning and calibrating wafer center |
| CN113002150A (en) * | 2021-02-04 | 2021-06-22 | 昆山市和博电子科技有限公司 | Full-automatic screen printing machine for wafer |
| CN217043302U (en) * | 2022-01-12 | 2022-07-26 | 广东汉特包装材料有限公司 | But joint sealing that dislocation was used is glued processing with even coating equipment of environment-friendly |
| CN116110834A (en) * | 2023-02-10 | 2023-05-12 | 芯朋半导体科技(如东)有限公司 | Chip production is with last unloader |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117276162A (en) * | 2023-11-22 | 2023-12-22 | 深圳市恒运昌真空技术有限公司 | Plasma processing equipment |
| CN117276162B (en) * | 2023-11-22 | 2024-03-22 | 深圳市恒运昌真空技术股份有限公司 | Plasma processing equipment |
| CN117612988A (en) * | 2024-01-19 | 2024-02-27 | 宇弘研科技(苏州)有限公司 | Wafer buffering type positioning bracket for glue spreading developing machine |
| CN117612988B (en) * | 2024-01-19 | 2024-04-05 | 宇弘研科技(苏州)有限公司 | Wafer buffering type positioning bracket for glue spreading developing machine |
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| Publication number | Publication date |
|---|---|
| CN116798927B (en) | 2023-11-21 |
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