CN1167244A - 超高纯氧的生产 - Google Patents
超高纯氧的生产 Download PDFInfo
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Abstract
一种用于生产超高纯流体产品的方法,包括下列步骤:在一低温分馏区的下部收集产品;通过第一重沸器中的间接热交换,冷凝部分较低纯度成本的相同的流体产品,向所述分馏区提供重沸热,通过与较热的不纯流体液流进行间接热交换,蒸发所述部分较低纯度成分。
Description
许多工业部门和工业加工在其方法和制造系统中,对高纯度的氧的需求日渐增强。例如在电子工业中,由于如今对纯度的要求更严格,现有的由空气中分离氧的许多生产方法难以满足生产稳定数量的超高纯度氧气的需求。所需求的纯度在十亿分之几数量级,甚至极多级数的分馏亦难以提供超高纯氧产品。
现有的生产超高纯工业气体的方法常在低温塔中使用铝制热交换器。这种铝制热交换器有许多焊缝,其特性使之易产生流体之间的渗漏,所以可能形成超高纯产品的一个主要污染源。替代该铝制热交换器可用不锈钢壳管式热交换器,然而壳管式热交换器也必然有焊缝,也有可能使流体间相互渗漏。
为避免不同流体间的有害的渗漏和由其引发的空气分离方法中超高纯产品的污染这一主要问题,对此需要新的解决方式。
本发明涉及超高纯产品的生产方法和系统,其中所述的超高纯产品产自一蒸馏塔的底部,该塔的底部有一重沸器,与所述的超高纯产品液体相接触和其中在所述塔中的重沸热由在所述重沸器中的间接热交换,冷凝高纯流体来提供,该高纯流体与处于第二压力和温度的第二中间重沸器中热的不纯气体的间接热交换而蒸发。
依本发明的方法,当一超高纯产品产自一蒸馏塔的底部,且做为加热介质向该塔提供重沸热的液体的成分与所述超高纯产品不同时,一中间重沸器用来减弱各热交换器中的极大地影响超高纯产品纯度的渗漏。中级加热介质的成分最好是同一种流体的高纯度级,但不必达到所述超高纯产品成分那样的纯度。因此,如果在底部或中间重沸器发生渗漏或其它渗透,该超高纯产品所受的污染可减至最小。
我们已发现,当使用氮作为中间重沸器的加热介质时,生产超高纯产品的方法用于生产超高纯氧特别有效。
图1描绘了依本发明的低温塔的底部,包括底部重沸器和中间重沸器。
图2描绘了生产超高纯氧产品的整个提纯方法过程。
如图1所示,描绘了低温蒸馏塔的下部,其中超高纯氧产品通过管线12生产,其间包含浓度很低的杂质,重沸器10与该蒸馏塔的贮液槽中收集的超高纯氧流体8进行间接热交换。高纯度的流体提供至少一部分超高纯氧产品蒸发所需的热,在这种情况下,最好是工业级氧气蒸气通过管路26送至重沸器10。重沸器10最好位于塔30的分离仓区域。在这种情况下,该分离区域位于重沸器10之下,工业级的氧在其间蒸发,向重沸器10供热。
中间高纯度流体即工业级的氧经蒸发并送至重沸器10后,冷凝后的商业级氧由重沸器10中排出,经管道27返回分离区域。在分离区域,工业级的氧6聚集在第二重沸器20周围,在此热量由热的不纯料流22提供。在较佳实施例中,该超高纯产品即是工业级的氧,热的不纯料流以再循环的氮为好。热的循环氮向重沸器20供热以蒸发部分工业级的氧6,在此获得如上所述向重沸器10的可利用的热输入。
依照本发明,如果在重沸器20中发生了渗漏或其它渗透,中间流体(此处为工业级的氧)的污染,将不会直接污染超高纯氧气产品8。进而,依我们的发明,如果在重沸器10中发生了渗漏,中间流体(此处为工业级的氧)中相对低浓度的杂质,不会对超高纯产品造成根本性污染。
重沸器不必如图1所示那样为垂直构造,只要被蒸发的中间流体可通过管道装置供给重沸器,蒸发塔30的贮液槽中的液体。一般,在重沸器20之上分离区域内无蒸馏级,只有将已蒸发的中间流体送至蒸馏塔中的重沸器中的装置。
如图2,其中中间和初级重沸器用于氧的提纯方法,其进一步的特性和优点见下文。氧原料流14供给低温蒸馏塔30。氧原料基本不含碳氢化合物,送入蒸馏塔30之前已通过管道15和66在塔40中将其除去。液态氧原料供应由外源通过管线25进入塔40。氮通过管线61和重沸器65向塔40提供沸腾热,基本上所有碳氢化合物通过管线15被排掉。氧原料14在一中间的位置进入塔30。塔顶冷凝器11通过管线13将氨和其它轻质杂质去除。超高纯氧产品8收集于塔30的下部,重沸器10使塔重沸。向重沸器10供热的是中间高纯度流体最好是基本上是氧的部分冷凝。此时的较佳情形为,中间液体为工业级的氧,该液体收集于塔30的分离区域的底部。
依本发明,部分中间流体在重沸器20中被热的不纯流体加热蒸发。所谓“不纯的流体”是指与所述的超高纯产品成分不同,渗漏到超高纯产品中,会造成超高纯产品的所不允许的污染。超高纯产品通过管线12输出,在再冷凝器71中的热交换器70中被管线24中循环的氮再冷凝。循环氮通过管线17和18返回循环压缩机60,并返回提纯方法的流程中重复利用。较佳地,部分氮通过管道77和78流入冷凝器11。热交换器50从排气流中回收冷量,并冷却被压缩的循环氮,以使能量有效利用和保持平衡。
图2所描绘的为本发明氧的提纯方法的一个较佳实施例。但是,任何由蒸馏塔底部生产出超高纯产品的低温蒸馏均可采用本发明,以减小污染的危险,获取令人满意的结果。较佳地,当超高纯产品为氧时,包含低于十亿分之二十的杂质;更好地,低于约十亿分之十;最好地,杂质低于约十亿分之三。另外,当超高纯产品是在约5psig至8psig压力之间出产的氧,中间流体在约8至20psig压力之间被冷凝时,中间流体即为工业级的氧。所谓“工业级的氧”是指纯度约为99.9%的氧。进一步,当以循环氮作为加热介质来蒸发至少一部分中间流体,最好将氮在压力约60psig至110psig之间送入重沸器20。
本发明还设想一种用于生产超高纯流体的系统,其中该系统包括一其底部具有一重沸器的蒸馏塔。一非必需的但最好与蒸馏塔在同一容器中的第二重沸器,以蒸发至少一部分中间加热流体。管路装置用来将该已蒸发的加热介质送至该蒸馏塔中的重沸器中,并将已冷凝的中间加热流体由重沸器10中送回至重沸器20周围的贮液槽中。
较佳实施例和附图代表一种利用本发明的方法和系统的典型装置,但并不限制或减少本发明的范围,其范围和限定只取决于后附的权利要求书。本领域技术人员将可识别本发的范围以内的物理设备或附属的步骤和工序的改型。
Claims (16)
1.一种生产超高纯流体产品的方法,包括下列步骤:
(a)在低温分馏区的下部收集超高纯流体产品;
(b)通过第一重沸器中的间接热交换,冷凝一部分较低纯度成分的同样流体产品,向所述分馏区提供重沸热;
(c)通过间接热交换,用温度较高的不纯的液流来蒸发所述的较低纯度成分的所述部分。
2.如权利要求1所述的方法,其中超高纯流体产品是氧,所述较低纯度的成分是工业级的氧。
3.如权利要求2所述的方法,其中所述超高纯氧包含低于十亿分之二十的杂质。
4.如权利要求1所述的方法,其中所述不纯的流体为氮。
5.如权利要求4所述的方法,其中所述分馏塔为一氩分馏塔,用以在氧的提纯方法中从氧和氩的混合物中分离出氩。
6.一种生产超高纯氧产品的方法,包括下列步骤:
(a)向第一分馏塔中供给包含杂质的液氧;
(b)在所述第一塔中,通过分馏将沸点高于氧的杂质分离出来,以形成基本不含重质杂质的塔顶氧流;
(c)向第二低温蒸馏塔供应至少一部分所述的塔顶氧流;
(d)通过在所述第二蒸馏塔底部的第一重沸器中的间接热交换,冷凝一部分较低纯度级别的氧,向所述第二蒸馏塔提供重沸热;
(e)通过与较热的不纯的液流进行间接热交换蒸发所述的较低纯度流体的所述一部分。
7.如权利要求6所述的方法,其中所述较热的液流为循环的氮。
8.如权利要求6所述的方法,其中所述超高纯氧在约5psig至8psig压力之间生产。
9.如权利要求8所述的方法,其中所述较低纯度的氧在所述第一重沸器中,在约8psig至约20psig压力之间冷凝。
10.如权利要求9所述的方法,其中所述的循环氮在约60psig至约110psig压力之间送至所述的第二重沸器。
11.如权利要求6所述的方法,其中所述的超高纯氧产品包含低于十亿分之十的杂质。
12.如权利要求6所述的方法,其中所述的超高纯氧产品包含低于十亿分之三的杂质。
13.一种通过低温蒸馏法生产超高纯流体的系统,包括:
(a)一在其底部具有第一重沸器的分馏塔;
(b)一通过间接热交换蒸发部分流体的第二重沸器;
(c)将所述的部分蒸发的流体送至所述的第一重沸器,用于在所述第一重沸器中冷凝至少一部分所述液体的管路装置;
(d)运送不纯的流体至所述第二重沸器,为蒸发所述的部分中间流体供热的输送装置。
14.如权利要求13所述的系统,还包括除去重质馏分的蒸馏塔,用以从液态供氧流中分离沸点高于氧的组分;其中所述分馏塔为一氩塔,用以从所述的塔顶的氧流中分离出氩。
15.如权利要求13所述的系统,还包括一循环氮压缩机和管路装置,用于将压缩的氮送至所述的第二重沸器。
16.在一种生产收集于低温蒸馏塔底部的超高纯流体的方法中,蒸馏塔中具有一第一重沸器,其改进包括:
(a)将一热的不纯流体送至第二重沸器,以蒸发部分较低纯度的流体,在所述第一重沸器中冷凝部分所述的蒸发后的较低纯度的流体,为所述蒸镏塔提供重沸热,从所述蒸馏塔中生产出包含低于十亿分之十杂质的超高纯流体。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/514,291 US5582032A (en) | 1995-08-11 | 1995-08-11 | Ultra-high purity oxygen production |
US514291 | 1995-08-11 |
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Publication Number | Publication Date |
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CN1167244A true CN1167244A (zh) | 1997-12-10 |
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CN96112191A Pending CN1167244A (zh) | 1995-08-11 | 1996-08-09 | 超高纯氧的生产 |
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US (1) | US5582032A (zh) |
EP (1) | EP0767350B1 (zh) |
JP (1) | JPH09170873A (zh) |
KR (1) | KR970010644A (zh) |
CN (1) | CN1167244A (zh) |
DE (1) | DE69619455T2 (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101684983A (zh) * | 2008-09-22 | 2010-03-31 | 普莱克斯技术有限公司 | 制备高纯度氧的方法和设备 |
CN102506560A (zh) * | 2011-09-30 | 2012-06-20 | 浙江新锐空分设备有限公司 | 从废氩气中制取纯氩的方法 |
CN112524886A (zh) * | 2019-09-18 | 2021-03-19 | 乔治洛德方法研究和开发液化空气有限公司 | 高纯度氧生产系统 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5682764A (en) * | 1996-10-25 | 1997-11-04 | Air Products And Chemicals, Inc. | Three column cryogenic cycle for the production of impure oxygen and pure nitrogen |
JP3527609B2 (ja) * | 1997-03-13 | 2004-05-17 | 株式会社神戸製鋼所 | 空気分離方法および装置 |
US5836174A (en) * | 1997-05-30 | 1998-11-17 | Praxair Technology, Inc. | Cryogenic rectification system for producing multi-purity oxygen |
GB9711258D0 (en) * | 1997-05-30 | 1997-07-30 | Boc Group Plc | Air separation |
FR2767317B1 (fr) | 1997-08-14 | 1999-09-10 | Air Liquide | Procede de conversion d'un debit contenant des hydrocarbures par oxydation partielle |
US5918482A (en) * | 1998-02-17 | 1999-07-06 | Praxair Technology, Inc. | Cryogenic rectification system for producing ultra-high purity nitrogen and ultra-high purity oxygen |
EP0955509B1 (de) * | 1998-04-30 | 2004-12-22 | Linde Aktiengesellschaft | Verfahren und Vorrichtung zur Gewinnung von hochreinem Sauerstoff |
US6182471B1 (en) * | 1999-06-28 | 2001-02-06 | Praxair Technology, Inc. | Cryogenic rectification system for producing oxygen product at a non-constant rate |
US6327873B1 (en) | 2000-06-14 | 2001-12-11 | Praxair Technology Inc. | Cryogenic rectification system for producing ultra high purity oxygen |
DE10161584A1 (de) * | 2001-12-14 | 2003-06-26 | Linde Ag | Vorrichtung und Verfahren zur Erzeugung gasförmigen Sauerstoffs unter erhöhtem Druck |
US8528363B2 (en) * | 2009-12-17 | 2013-09-10 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process and apparatus for the separation of air by cryogenic distillation |
JP7313608B2 (ja) * | 2019-04-08 | 2023-07-25 | レール・リキード-ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | 高純度酸素および窒素製造システム |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3127260A (en) * | 1964-03-31 | Separation of air into nitrogen | ||
US2209748A (en) * | 1938-08-03 | 1940-07-30 | Air Reduction | Method of separating the constituents of gaseous mixtures |
US2729954A (en) * | 1951-08-01 | 1956-01-10 | Air Liquide | Separation of gaseous mixtures |
FR2542421B1 (fr) * | 1983-03-08 | 1985-07-05 | Air Liquide | Procede et appareil pour produire un gaz a haute purete par vaporisation d'un liquide cryogenique |
US4615716A (en) * | 1985-08-27 | 1986-10-07 | Air Products And Chemicals, Inc. | Process for producing ultra high purity oxygen |
US5049173A (en) * | 1990-03-06 | 1991-09-17 | Air Products And Chemicals, Inc. | Production of ultra-high purity oxygen from cryogenic air separation plants |
US5123947A (en) * | 1991-01-03 | 1992-06-23 | Air Products And Chemicals, Inc. | Cryogenic process for the separation of air to produce ultra high purity nitrogen |
JP2966999B2 (ja) * | 1992-04-13 | 1999-10-25 | 日本エア・リキード株式会社 | 超高純度窒素・酸素製造装置 |
US5341646A (en) * | 1993-07-15 | 1994-08-30 | Air Products And Chemicals, Inc. | Triple column distillation system for oxygen and pressurized nitrogen production |
US5511380A (en) * | 1994-09-12 | 1996-04-30 | Liquid Air Engineering Corporation | High purity nitrogen production and installation |
-
1995
- 1995-08-11 US US08/514,291 patent/US5582032A/en not_active Expired - Fee Related
-
1996
- 1996-08-07 EP EP96401749A patent/EP0767350B1/en not_active Expired - Lifetime
- 1996-08-07 DE DE69619455T patent/DE69619455T2/de not_active Expired - Fee Related
- 1996-08-09 CN CN96112191A patent/CN1167244A/zh active Pending
- 1996-08-09 JP JP8211439A patent/JPH09170873A/ja active Pending
- 1996-08-09 KR KR1019960033137A patent/KR970010644A/ko not_active Application Discontinuation
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101684983A (zh) * | 2008-09-22 | 2010-03-31 | 普莱克斯技术有限公司 | 制备高纯度氧的方法和设备 |
CN101684983B (zh) * | 2008-09-22 | 2013-12-04 | 普莱克斯技术有限公司 | 制备高纯度氧的方法和设备 |
CN102506560A (zh) * | 2011-09-30 | 2012-06-20 | 浙江新锐空分设备有限公司 | 从废氩气中制取纯氩的方法 |
CN112524886A (zh) * | 2019-09-18 | 2021-03-19 | 乔治洛德方法研究和开发液化空气有限公司 | 高纯度氧生产系统 |
Also Published As
Publication number | Publication date |
---|---|
EP0767350A2 (en) | 1997-04-09 |
DE69619455D1 (de) | 2002-04-04 |
KR970010644A (ko) | 1997-03-27 |
DE69619455T2 (de) | 2002-10-02 |
EP0767350B1 (en) | 2002-02-27 |
JPH09170873A (ja) | 1997-06-30 |
US5582032A (en) | 1996-12-10 |
EP0767350A3 (en) | 1997-11-19 |
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