CN116719132A - Optical fiber coupling device of semiconductor laser - Google Patents
Optical fiber coupling device of semiconductor laser Download PDFInfo
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- CN116719132A CN116719132A CN202310585178.6A CN202310585178A CN116719132A CN 116719132 A CN116719132 A CN 116719132A CN 202310585178 A CN202310585178 A CN 202310585178A CN 116719132 A CN116719132 A CN 116719132A
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- light
- collimating lens
- axis collimating
- beam combining
- optical fiber
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 48
- 230000008878 coupling Effects 0.000 title claims abstract description 36
- 238000010168 coupling process Methods 0.000 title claims abstract description 36
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 36
- 239000004065 semiconductor Substances 0.000 title claims abstract description 35
- 230000010287 polarization Effects 0.000 claims description 15
- 239000000835 fiber Substances 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000002834 transmittance Methods 0.000 claims description 4
- 230000004075 alteration Effects 0.000 abstract description 9
- 238000000034 method Methods 0.000 description 6
- 230000006872 improvement Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4296—Coupling light guides with opto-electronic elements coupling with sources of high radiant energy, e.g. high power lasers, high temperature light sources
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
The invention discloses a semiconductor laser optical fiber coupling device, which comprises: a light source, a fast axis collimating lens, a slow axis collimating lens, a dichroic mirror, an optical fiber, and a concave mirror. Wherein the fast axis collimating lens, the slow axis collimating lens and the dichroic mirror are sequentially arranged along the light path of the light emitted by the light source, the concave mirror is arranged on the light path of the emergent light of the dichroic mirror, and the beam combining structures consisting of the light sources, the fast axis collimating lenses, the slow axis collimating lenses and the dichroic mirrors are uniformly arranged around the circumference of the concave mirror, and the wavelengths of the light emitted by the light sources are different from each other, so that the beams emitted by the light sources with different wavelengths are combined. The optical fiber is positioned at the focusing point of the reflecting light path of the concave mirror so as to focus the light beam of the spatial beam combination to a focus point and further couple the light beam into the optical fiber for output. The semiconductor laser optical fiber coupling device can effectively reduce spherical aberration and eliminate chromatic aberration influence, and obtains laser output with higher efficiency and better beam quality.
Description
Technical Field
The invention relates to the technical field of optical fiber coupling, in particular to an optical fiber coupling device of a semiconductor laser.
Background
The information disclosed in the background of the invention is only for enhancement of understanding of the general background of the invention and is not necessarily to be taken as an admission or any form of suggestion that this information forms the prior art already known to a person of ordinary skill in the art.
Compared with solid laser and gas laser, the semiconductor laser has the advantages of high efficiency, small volume, long service life, low cost and the like. And semiconductor lasers are the fastest growing ones of all lasers, which account for the largest share of the laser market. With the progress of growth technology, the improvement of packaging capability, the reduction of cost and the like, the application fields of semiconductor lasers are expanding, such as medical and aesthetic fields, industrial welding fields, cutting fields, communication fields, military fields, display fields and the like.
At present, the fields of multi-color display of a semiconductor laser and the like have higher requirements on the quality of laser beams, and the key process for obtaining high-beam quality output is how to arrange an optical path system and how to combine beams of a plurality of single-mode chips with different wavelengths into a small-core-diameter optical fiber or even a single-mode optical fiber except for the influence of the inherent level of the chips. The beam combining method of the semiconductor fiber laser at the present stage comprises the following steps: (1) spatially combining: the chips are arranged on a heat sink or a shell with a height difference, the space dislocation is realized by utilizing the height difference, the light beams of the chips are not mutually shielded, and the light beams are simultaneously coupled into the optical fiber by a certain height difference, so that the beam combination is realized. Although this method realizes multi-beam combination and achieves high-power output, the disadvantages of poor output spot quality and blurred edges are present due to the limitations of the optical elements NA and CA. (2) polarization beam combining: the beam combination is completed by the excellent polarization characteristics of the semiconductor laser chip. However, the coupling lens or the bonding lens is required to complete the optical fiber beam combination in the mode, and the coupling lens or the bonding lens used in the mode cannot completely eliminate the influence of aberration, and is extremely influenced by spherical aberration and chromatic aberration when the mode is applied to a single-mode optical fiber, so that the beam combination efficiency is low and the beam quality is poor.
Disclosure of Invention
The invention provides a semiconductor laser optical fiber coupling device which can effectively reduce spherical aberration and eliminate chromatic aberration influence to obtain laser output with higher efficiency and better beam quality. In order to achieve the above purpose, the present invention discloses the following technical solutions.
First, the present invention discloses a first semiconductor laser optical fiber coupling device, comprising: a light source, a fast axis collimating lens, a slow axis collimating lens, a dichroic mirror, an optical fiber, and a concave mirror. Wherein: the fast axis collimating lens, the slow axis collimating lens and the dichroic mirror are sequentially arranged along the light path of the light emitted by the light source, the concave mirror is arranged on the light path of the emergent light of the dichroic mirror, a plurality of groups of beam combining structures consisting of the light source, the fast axis collimating lens, the slow axis collimating lens and the dichroic mirror are uniformly arranged around the circumference of the concave mirror, and the light emitted by the light source is different in wavelength, so that the light emitted by the light source with different wavelengths is combined. The optical fiber is positioned at the focusing point of the reflecting light path of the concave mirror so as to focus the light beam of the spatial beam combination to a focus, and then the light beam is coupled into the optical fiber for output, thereby realizing the output with high efficiency and high light beam quality.
Further, each group of beam combining structures comprises a plurality of parallel beam combining structures which are composed of the light source, the fast axis collimating lens, the slow axis collimating lens and the dichroic mirror, and the dichroic mirrors of the beam combining structures are positioned on the same straight line.
Further, each row of beam combining structures at least comprises two light sources which are arranged in parallel and emit light beams with the same wavelength, and the light sources of the beam combining structures in different rows emit light beams with different wavelengths. Each row of beam combining structures comprises a polarizer which is arranged on a light path between the slow axis collimating lens and the dichroic mirror, so that the light beams with the same wavelength emitted by the light sources in the same row of beam combining structures are combined by the polarizer, then reflected by the dichroic mirror, and combined with the light beams with different wavelengths emitted by the dichroic mirrors of the beam combining structures in other rows.
Next, the present invention discloses a second semiconductor laser optical fiber coupling device, comprising: a light source, a fast axis collimating lens, a slow axis collimating lens, a dichroic mirror, an optical fiber, a concave mirror, and a polarizer. Wherein: the fast axis collimating lens, the slow axis collimating lens and the dichroic mirror are sequentially arranged along the light path of the light emitted by the light source, the polarizer is arranged on the light path of the emergent light of the dichroic mirror, the concave mirror is arranged on the light path of the emergent light of the polarizer, and the optical fiber is positioned at the focusing point of the reflecting light path of the concave mirror. And a plurality of groups of beam combining structures consisting of the light source, the fast axis collimating lens, the slow axis collimating lens and the dichroic mirror are uniformly arranged around the circumference of the concave mirror, each group of beam combining structures comprises two groups of beam combining structures which are mutually perpendicular, and the polarizer is arranged at the intersection point of emergent rays of the dichroic mirrors of the two groups of beam combining structures which are mutually perpendicular.
Further, each group of beam combining structures comprises a plurality of parallel beam combining structures which are composed of the light source, the fast axis collimating lens, the slow axis collimating lens and the dichroic mirror, and the dichroic mirrors of the beam combining structures are positioned on the same straight line.
Further, the reflecting surface of the concave mirror is aspheric.
Further, the reflecting surface of the concave mirror is coated with a reflecting film. Preferably, the reflective film is made of a high reflective film having as low an absorptivity as possible in a wavelength band corresponding to the light source. Preferably, the high reflection film has a reflectance of not less than 99.8%.
Further, the polarizer needs to be matched with the polarization characteristics and high transmittance of the wavelength of the corresponding light source, namely: the polarization beam combining characteristics of the polarizer need to match the polarization state of the light source, and the polarizer needs to have a high transmittance corresponding to the transmitted light source wavelength.
Compared with the prior art, the invention has at least the following beneficial effects: when the semiconductor laser optical fiber coupling device of the invention is used for beam combination, the light beam does not need to pass through an optical device with refractive index affected by wavelength such as a lens (for example, a coupling lens and the like), so that polychromatic light (multiple wavelengths) cannot be converged to one point. The optical fiber coupling device of the semiconductor laser enables light beams to be directly reflected on the surface of the concave mirror, the refractive index of the process is kept to be consistent, the phenomenon of non-coincident polychromatic light focuses caused by wavelength changes can be reduced or even eliminated, the influence of spherical aberration and chromatic aberration of a coupling lens and a cementing lens when the multi-wavelength chips are combined is reduced and eliminated, all the light beams are converged to a diffraction limit, and the beam combining efficiency and the light beam quality are improved. Meanwhile, the requirements on the power damage threshold and heat dissipation of the lens are reduced, so that the optical fiber coupling device can bear the beam combination of light beams with higher density and realize higher beam combination power.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention.
Fig. 1 is a schematic structural view of a semiconductor laser optical fiber coupling device of the following embodiment 1.
Fig. 2 is a schematic structural view of a semiconductor laser optical fiber coupling device of the following embodiment 2.
Fig. 3 is a schematic structural view of a semiconductor laser optical fiber coupling device of the following embodiment 3.
The reference numerals in the above figures represent respectively: a 1-LD light source, a 2-fast axis collimating lens, a 3-slow axis collimating lens, a 4-dichroic mirror, a 5-optical fiber, a 6-concave mirror and a 7-polarizer.
Detailed Description
It should be noted that the following detailed description is illustrative and is intended to provide further explanation of the invention. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.
For convenience of description, the words "upper", "lower", "left" and "right" in the present invention, if they mean only that the directions are consistent with the upper, lower, left, and right directions of the drawings per se, and do not limit the structure, only for convenience of description and simplification of the description, but do not indicate or imply that the apparatus or element to be referred to needs to have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. In addition, any methods and materials similar or equivalent to those described herein can be used in the methods of the present invention.
Example 1
A semiconductor laser fiber coupling apparatus, referring to fig. 1, comprising: an LD light source 1, a fast axis collimating lens 2, a slow axis collimating lens 3, a dichroic mirror 4, an optical fiber 5, and a concave mirror 6. Wherein: the three light sources 1 are arranged side by side from left to right, and the light beam emission ports of the light sources 1 face downwards. The fast axis collimating lens 2, the slow axis collimating lens 3 and the dichroic mirror 4 are sequentially arranged on the lower light path of each light source 1, namely, a beam combining structure consisting of the LD light source 1, the fast axis collimating lens 2, the slow axis collimating lens 3 and the dichroic mirror 4 is divided into three rows from left to right. The incident angle and the reflection angle of the dichroic mirror 4 and the light path are both 45 degrees, i.e. the light reflected by the dichroic mirror 4 is emitted horizontally to the right. In the above-described three-column beam combining structure, the dichroic mirrors 4 are positioned on the same horizontal line. The reflecting surface of the concave mirror 6 is an aspherical surface, which is disposed on the right side of the dichroic mirror 4 and on the optical path of the outgoing light of the dichroic mirror 4.
The upper part and the lower part of the left side of the concave mirror 6 are respectively distributed with three rows of beam combining structures, and the three rows of beam combining structures on the upper part and the three rows of beam combining structures on the lower part are arranged in one-to-one symmetry. And the wavelength of the emitted light of the LD light source 1 in the upper three columns of the beam combining structure is different from the wavelength of the emitted light of the LD light source 1 in the lower three columns of the beam combining structure.
Since the dichroic mirror is capable of reflecting light of one wavelength band and transmitting light of another wavelength band; for example: the dichroic mirror can reflect 620-750nm and transmit 400-590nm from the concave mirror side in sequence; reflecting 505-700nm, and transmitting 380-470nm; reflection 400-700. Therefore, the LD light sources 1 in the upper three rows of the beam combining structures can sequentially emit red light (with a wavelength of 640 nm), green light (with a wavelength of 520 nm) and blue light (with a wavelength of 450 nm) from right to left, so that the following green light and blue light can penetrate through the dichroic mirrors corresponding to the red light, beam combining of the light with three wavelengths is completed, and then the light is incident on the concave mirror 6. The optical fibers 5 are positioned at the focal points of the reflected lights of the concave mirrors 6, that is, the optical fibers 5 are horizontally arranged on the horizontal central line between the upper three columns of the beam combining structures and the lower three columns of the beam combining structures.
The light beams emitted by the LD light source 1 are shaped by the fast axis collimating lens 2 and the fast axis collimating lens 3, then are incident on the corresponding dichroic mirrors 4, and then are reflected to the concave mirror 6 by the dichroic mirrors 4, so that the light beams with different wavelengths after spatial beam combination are focused to a focus and are coupled into the optical fiber 5 for output, and thus, the output with high efficiency and high light beam quality is realized.
Example 2
A semiconductor laser optical fiber coupling device, referring to fig. 2, differs from the semiconductor laser optical fiber coupling device of the above-described embodiment 1 in that: each row of the beam combining structures comprises two LD light sources 1 which are arranged in parallel and emit light beams with the same wavelength, and the wavelengths of the light beams emitted by the LD light sources 1 of the beam combining structures in different rows are different. In order to combine the light beams emitted by the two LD light sources 1 in each column of the beam combining structure, the present embodiment sets a polarizer 7 on the optical path between the slow axis collimating lens 3 and the dichroic mirror 4 in each column of the beam combining structure, and the polarizer 7 needs to match the polarization characteristics and high transmittance of the wavelengths of the corresponding LD light sources 1. Namely: the polarizer 7 is formed by combining a polarized reflection beam combiner and a half-wave plate, and can be glued together or separated. The polarizer of the embodiment is a polarization beam combiner formed by combining a polarization reflection beam combiner and a half-wave plate; it may pass directly through one of the P light or S light, and the other light is reflected, thereby completing the beam combination. The half wave plate can be used for mutually converting P light or S light; the polarization beam combiner needs to correspond to the initial polarization characteristics of the corresponding LD light source. For example: in the two LD light sources 1 in the same beam combining structure, the S light emitted by one LD light source 1 directly passes through the corresponding polarizer 7, the S light emitted by the other LD light source 1 is converted into P light by a half-wave plate on the polarization beam combiner, and is reflected and combined into a beam with the same size by the polarization reflection beam combining mirror, and then output, and is incident on the corresponding dichroic mirror 4, is reflected to the concave mirror 6 after being combined by the dichroic mirror 4, and finally coupled into the optical fiber 5 for output.
Example 3
A semiconductor laser optical fiber coupling device, referring to fig. 3, differs from the semiconductor laser optical fiber coupling device of the above-described embodiment 1 in that: and the right parts of the three upper rows of beam combining structures are sequentially provided with three rows of beam combining structures from top to bottom, so that two groups of beam combining structures which are mutually perpendicular are formed. Similarly, three rows of beam combining structures are sequentially arranged on the right part of the lower three rows of beam combining structures from top to bottom.
A polarizer 7 is arranged at the intersection point of the outgoing light rays of the two dichroic mirrors 4 with the mutually perpendicular combined beam structures, so that the two light beams after being combined by the dichroic mirrors 4 are combined again through the polarizer 7, the two light beams are converted into light with only one polarization state and then output, and then the light is incident on the concave mirror 6 and finally coupled into the optical fiber 5 for output.
Example 3
A semiconductor laser optical fiber coupling device is different from the above-described embodiment 1 in that the reflecting surface of the concave mirror 6 is coated with a reflecting film having a reflectance of not less than 99.8% for the wavelength range of the combined beam, so that the absorption rate is kept low for the wavelength band of the LD light source 1, and the light beam reflected into the optical fiber 5 as much as possible is coupled. The semiconductor laser optical fiber coupling device of the present embodiment can reduce the use of the polarizer 7 relative to embodiment 2; the semiconductor laser optical fiber coupling device of the embodiment is not limited to multi-wavelength light source beam combination, and can simultaneously use spatial beam combination (step difference mode) to carry out beam combination of more numbers of same light sources, thereby effectively utilizing the characteristics of high reflectivity and high damage threshold of the reflective mirror surface.
Finally, it should be noted that any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention. While the foregoing description of the embodiments of the present invention has been presented in conjunction with the drawings, it should be understood that it is not intended to limit the scope of the invention, but rather, it is intended to cover all modifications or variations within the scope of the invention as defined by the claims of the present invention.
Claims (9)
1. A semiconductor laser fiber coupling device, comprising: light source, fast axis collimating lens, slow axis collimating lens, dichroic mirror, optical fiber and concave mirror, wherein:
the fast axis collimating lens, the slow axis collimating lens and the dichroic mirror are sequentially arranged along the light path of the light emitted by the light source, and the concave mirror is arranged on the light path of the emergent light of the dichroic mirror;
a beam combining structure consisting of a plurality of groups of light sources, a fast axis collimating lens, a slow axis collimating lens and a dichroic mirror is uniformly arranged around the circumference of the concave mirror, and the wavelengths of the light emitted by the plurality of groups of light sources are different; the optical fiber is positioned at a focusing point of a reflected light path of the concave mirror.
2. The semiconductor laser fiber coupling device according to claim 1, wherein each of the beam combining structures comprises a plurality of parallel beam combining structures comprising the light source, the fast axis collimating lens, the slow axis collimating lens, and the dichroic mirror, and the dichroic mirrors of the beam combining structures are positioned on the same straight line.
3. The semiconductor laser fiber coupling device according to claim 2, wherein each of the beam combining structures includes at least two light sources which are arranged in parallel and emit light beams having the same wavelength, and the light sources of each of the beam combining structures emit light beams having different wavelengths; each column of the beam combining structures includes a polarizer disposed in the optical path between the slow axis collimating lens and the dichroic mirror.
4. A semiconductor laser fiber coupling device, comprising: a light source, a fast axis collimating lens, a slow axis collimating lens, a dichroic mirror, an optical fiber, a concave mirror, and a polarizer, wherein:
the fast axis collimating lens, the slow axis collimating lens and the dichroic mirror are sequentially arranged along the light path of the light rays emitted by the light source;
the polarizer is arranged on the light path of the emergent light of the dichroic mirror, the concave mirror is arranged on the light path of the emergent light of the polarizer, and the optical fiber is positioned at the focusing point of the reflecting light path of the concave mirror;
and a plurality of groups of beam combining structures consisting of the light source, the fast axis collimating lens, the slow axis collimating lens and the dichroic mirror are uniformly arranged around the circumference of the concave mirror, each group of beam combining structures comprises two groups of beam combining structures which are mutually perpendicular, and the polarizer is arranged at the intersection point of emergent rays of the dichroic mirrors of the two groups of beam combining structures which are mutually perpendicular.
5. The semiconductor laser fiber coupling device according to claim 4, wherein each of the beam combining structures comprises a plurality of parallel beam combining structures comprising the light source, the fast axis collimating lens, the slow axis collimating lens, and the dichroic mirror, and the dichroic mirrors of the beam combining structures are positioned on the same straight line.
6. A semiconductor laser fiber coupling device according to any of claims 1 to 5, wherein the reflecting surface of the concave mirror is aspherical.
7. The semiconductor laser fiber coupling device according to any of claims 1 to 5, wherein the reflecting surface of the concave mirror is coated with a reflecting film.
8. The optical fiber coupling device according to claim 7, wherein the reflective film is made of a high reflective film having as low an absorptivity as possible for a wavelength band of the corresponding light source; preferably, the high reflection film has a reflectance of not less than 99.8%.
9. The semiconductor laser fiber coupling device according to any of claims 1 to 5, wherein the polarization combining characteristics of the polarizer are required to match the polarization state of the light source, and the polarizer is required to have a high transmittance corresponding to the wavelength of the transmitted light source.
Priority Applications (1)
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CN202310585178.6A CN116719132A (en) | 2023-05-23 | 2023-05-23 | Optical fiber coupling device of semiconductor laser |
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CN202310585178.6A CN116719132A (en) | 2023-05-23 | 2023-05-23 | Optical fiber coupling device of semiconductor laser |
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CN116719132A true CN116719132A (en) | 2023-09-08 |
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CN202310585178.6A Pending CN116719132A (en) | 2023-05-23 | 2023-05-23 | Optical fiber coupling device of semiconductor laser |
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