CN116659772A - Leak detection device and leak detection method for thin film equipment - Google Patents
Leak detection device and leak detection method for thin film equipment Download PDFInfo
- Publication number
- CN116659772A CN116659772A CN202310703242.6A CN202310703242A CN116659772A CN 116659772 A CN116659772 A CN 116659772A CN 202310703242 A CN202310703242 A CN 202310703242A CN 116659772 A CN116659772 A CN 116659772A
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- Prior art keywords
- sealing
- thin film
- vacuum
- leak detection
- sealing ring
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- 238000001514 detection method Methods 0.000 title claims abstract description 63
- 239000010409 thin film Substances 0.000 title claims abstract description 39
- 238000007789 sealing Methods 0.000 claims abstract description 132
- 239000007769 metal material Substances 0.000 claims description 4
- 239000001307 helium Substances 0.000 abstract description 7
- 229910052734 helium Inorganic materials 0.000 abstract description 7
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 abstract description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
The application relates to a leak detection device and a leak detection method for thin film equipment, wherein the leak detection device comprises a vacuum detection part, a sealing disc and a sealing ring, the vacuum detection part is connected with the sealing disc and is used for vacuumizing the sealing disc and detecting vacuum values, the sealing disc is in sealing connection with a cavity of the thin film equipment through the sealing ring, one or more through holes are formed in the sealing disc, the through holes are communicated with the hollow cavity of the sealing disc, and the sealing ring is arranged in the through holes to seal the through holes. The application can avoid using helium leak detector as detection device, simplify leak detection method, save detection time and improve leak rate detection efficiency.
Description
Technical Field
The application relates to the technical field of semiconductor equipment, in particular to a leak detection device and a leak detection method for thin film equipment.
Background
In the semiconductor manufacturing process, silicon wafers are processed into various microstructures in thin film devices, and non-silicon materials are introduced through the thin film to achieve different functions. Leak rate detection of the chambers of the thin film devices is often required when the thin film devices are serviced or repaired. The prior art adopts the following mode to leak hunting: the leak detector pipeline interface is connected with the machine, the leak detector is started, the machine is vacuumized, then each part of the machine is sprayed one by a helium gun, if the display screen is larger in value, the leak points are indicated, but the scheme has the following defects: the helium leak detector body is heavy, and the machine is disassembled for leak detection by the nitrogen leak detector, so that the machine is at risk of secondary leakage; the operation is not easy, and the detection efficiency is low; in addition, the helium is sprayed outside the machine, and other gases can interfere with the helium, so that the leakage detection effect is poor.
Disclosure of Invention
The application aims to provide a leak detection device and a leak detection method for thin film equipment, so that a helium leak detector is not used as a detection device, the leak detection method is simplified, the detection time is saved, and the leak rate detection efficiency is improved.
The aim of the application is achieved by adopting the following technical scheme. The leak detection device for the thin film equipment comprises a vacuum detection part, a sealing disc and a sealing ring, wherein the vacuum detection part is connected with the sealing disc and is used for vacuumizing the sealing disc and detecting a vacuum value, the sealing disc is in sealing connection with a cavity of the thin film equipment through the sealing ring, one or more through holes are formed in the sealing disc, the through holes are communicated with the hollow cavity of the sealing disc, and the sealing ring is arranged in the through holes to seal the through holes.
In some embodiments, the bottom of the sealing disc is provided with a groove, the sealing ring is arranged in the groove, part of the sealing ring extends out of the groove, and the part of the sealing ring extending out of the groove is in sealing connection with the cavity of the thin film device.
In some embodiments, the through hole is opened at a bottom wall of the groove.
JDP221198CN page 2/5
In some embodiments, the through hole is opened at a side wall of the groove.
In some embodiments, the groove is configured as an annular shape.
In some embodiments, the vacuum detection part includes a vacuum pump, a vacuum pressure gauge, and a connection pipe, the vacuum pump is connected with the sealing disk through the connection pipe, and is used for vacuumizing the sealing disk, and the vacuum pressure gauge is disposed on the connection pipe, and is used for detecting a vacuum value.
In some embodiments, the sealing disk is configured as a circle.
In some embodiments, the sealing disk is made of a metallic material.
The application also provides a leak detection method for the thin film equipment, which comprises the following steps of: s11, connecting the connecting pipes with the vacuum pump and the sealing disc respectively; s12, arranging a vacuum pressure gauge on the connecting pipe; s13, starting the vacuum pump; s14, setting a standard value of a vacuum value, and if the vacuum pressure gauge cannot reach the standard value, checking whether the sealing ring is installed in place and whether the sealing ring is damaged or not; and S15, if the vacuum pressure gauge still cannot reach the standard value after the sealing ring is installed in place or replaced again, indicating that a leakage point exists in the sealing disc.
The beneficial effects of the application at least comprise:
the sealing disc is connected with the sealing disc through the vacuum detection part, the sealing disc is used for vacuumizing the sealing disc and detecting vacuum values, the sealing disc is in sealing connection with the cavity of the thin film equipment through the sealing ring, one or more through holes are formed in the sealing disc and are communicated with the hollow cavity of the sealing disc, the sealing ring is arranged in the through holes to seal the through holes, the sealing disc can form a closed cavity through the sealing ring, if the vacuum detection part vacuumizes the sealing disc and detects that the obtained vacuum values are smaller than standard values, the sealing ring can be proved to be damaged or not installed in place, and therefore tightness between the sealing disc and the cavity of the thin film equipment can be detected, the helium leak detector can be prevented from being used as a detection device, a leak detection method is simplified, detection time is saved, and leak rate detection efficiency is improved.
The foregoing description is only an overview of the present application, and is intended to be implemented in accordance with the teachings of the present application, as well as the preferred embodiments thereof, together with the following detailed description of the application given in conjunction with the accompanying drawings.
Drawings
FIG. 1 shows a schematic diagram of a leak detection apparatus for a thin film device in accordance with one embodiment of the application;
fig. 2 shows a schematic view of a part of the structure of a sealing disk, a sealing ring and a groove of a leak detection device for a thin film device according to an embodiment of the application.
JDP221198CN page 3/5
Detailed Description
In order to further explain the technical means of the present application, the following detailed description will be given of a leak detection device and a leak detection method for thin film devices according to the present application, with reference to the accompanying drawings and preferred embodiments. The following examples are only for more clearly illustrating the technical aspects of the present application, and thus are merely examples, and are not intended to limit the scope of the present application.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application; the term "comprising" in the description of the application and the claims and in the description of the figures above and any variants thereof.
In the description of the present application, it should also be noted that, unless explicitly specified and limited otherwise, the term "connected" should be construed broadly, and may be a fixed connection, a removable connection, or an integral connection, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances. The meaning of "plurality" is two or more.
As shown in fig. 1 and 2, the leak detection device for a thin film device according to the present application includes a vacuum detection portion 1, a sealing disc 2, and a sealing ring 3, where the vacuum detection portion 1 is connected to the sealing disc 2 and is used for vacuumizing the sealing disc 2 and detecting a vacuum value, the sealing disc 2 is covered on the top of a cavity of the thin film device, the sealing ring 3 is disposed on the bottom of the sealing disc 2, the sealing ring 3 is in contact with the bottom of the sealing disc 2 and the top of the cavity, and the sealing disc 2 is connected with the cavity of the thin film device in a sealing manner through the sealing ring 3. The sealing disc 2 is provided with one or more through holes 211, the inside of the sealing disc 2 is hollow, the through holes 211 are communicated with the hollow cavity of the sealing disc 2, and part of the sealing ring 3 is arranged inside the through holes 211 to seal the through holes 211. The shape of the sealing disc 2 may be adapted to the shape of the cavity, and in one or more embodiments the sealing disc 2 may be configured as a circle. In one or more embodiments, the sealing disk 2 is made of a metallic material, such as stainless steel.
In one or more embodiments, the bottom of the sealing disc 2 is provided with a groove 21, a part of the sealing ring 3 is arranged inside the groove 21, a part of the sealing ring 3 extends out of the groove 21, and the part of the sealing ring 3 extending out of the groove 21 is in sealing connection with the cavity of the thin film device. In one or more embodiments, the recess 21 is configured as an annular shape, the recess 21 having a depth such that the sealing ring 3 can be tightly plugged.
The recess 21 has diapire and lateral wall, and the first end of the lateral wall of recess 21 is close to the top of cavity, and the second end of the lateral wall of recess 21 is connected with the diapire, and sealing washer 3 all contacts with diapire and lateral wall. In one or more embodiments, the bottom wall of the groove 21 is provided with a through hole 211, the through hole 211 is communicated with the hollow cavity of the sealing disc 2, and a part of the sealing ring 3 is arranged inside the through hole 211 to seal the through hole 211. In some other embodiments, JDP221198CN, page 4/5, has a through hole 211 formed in the sidewall of the groove 21, the through hole 211 is in communication with the hollow cavity of the sealing disc 2, and a part of the sealing ring 3 is disposed inside the through hole 211 to seal the through hole 211. In one or more embodiments, two through holes 211 are formed in the groove 21, and the two through holes 211 are symmetrical about the symmetry axis of the annular groove 21.
In one or more embodiments, the vacuum detecting part 1 includes a vacuum pump 11, a vacuum pressure gauge 12, and a connection pipe 13, the vacuum pump 11 is connected to the sealing plate 2 through the connection pipe 13 for evacuating the sealing plate 2, and illustratively, a first end of the connection pipe 13 is connected to the vacuum pump 11 through a first joint, and a second end of the connection pipe 13 is connected to the sealing plate 2 through a second joint, wherein the first joint may be an interlocking joint, such as a shiweilok joint, and the second joint may be a screw welding joint. In one or more embodiments, the connection tube 3 is made of a metallic material, such as stainless steel. A vacuum pressure gauge 12 is provided on the connection pipe 13 for detecting a vacuum value.
It should be noted that, in the case where the seal ring 3 is in place and is not broken, the vacuum value detected by the vacuum pressure gauge 12 is a standard value (for example, -25 psi) which is related to the size of the hollow cavity of the seal disc 2, and if the seal ring 3 is not in place or broken, the vacuum value detected by the vacuum pressure gauge 12 is smaller than the standard value.
According to the application, the vacuum detection part 1 is connected with the sealing disc 2 and is used for vacuumizing the sealing disc 2 and detecting a vacuum value, the sealing disc 2 is in sealing connection with the cavity of the thin film equipment through the sealing ring 3, one or more through holes 211 are formed in the sealing disc 2 and are communicated with the hollow cavity of the sealing disc 2, the sealing ring 3 is arranged in the through holes 211 to seal the through holes 211, the sealing disc 2 can form a closed cavity through the sealing ring 3, if the vacuum detection part 1 vacuumizes the sealing disc 2 and detects that the obtained vacuum value is smaller than a standard value, the sealing ring 3 can be proved to be damaged or not installed in place, so that the tightness between the sealing disc 2 and the cavity of the thin film equipment can be detected, the sealing ring 3 can be directly replaced or the sealing ring 3 can be reinstalled, and if the vacuum value detected by the vacuum detection part 1 is still smaller than the standard value after the sealing ring 3 is replaced or the sealing ring 3 is reinstalled, the sealing disc 2 can be directly replaced, so that the leak detector can be prevented from being used as a detection device, the detection time can be shortened, and the detection efficiency can be improved.
Based on the leak detection device for the thin film equipment, the application also provides a leak detection method for the thin film equipment, which comprises the following steps:
s11, connecting the connecting pipes 13 with the vacuum pumps 11 and the sealing disc 2 respectively;
s12, arranging a vacuum pressure gauge 12 on the connecting pipe 13;
s13, starting the vacuum pump 11;
s14, setting a standard value of the vacuum value, and if the vacuum pressure gauge 12 cannot reach the standard value, checking whether the sealing ring 3 is installed in place and whether the sealing ring is damaged;
JDP221198CN page 5/5
S15, if the vacuum pressure gauge 12 still cannot reach the standard value after the sealing ring 3 is installed in place or the sealing ring 3 is replaced again, the leakage point of the sealing disc 2 is indicated.
The previous description of the disclosed aspects is provided to enable any person skilled in the art to practice the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other aspects without departing from the scope of the application. Thus, the present application is not intended to be limited to the aspects shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (9)
1. The utility model provides a leak hunting device for thin film device, its characterized in that, includes vacuum detection portion, sealing disk and sealing washer, vacuum detection portion with the sealing disk is connected, is used for right the sealing disk evacuation detects the vacuum value, the sealing disk with thin film device's cavity passes through sealing washer sealing connection, one or more through-holes have been seted up on the sealing disk, the through-hole with sealing disk's cavity intercommunication, the sealing washer set up in the inside of through-hole is in order to seal the through-hole.
2. The leak detection apparatus for a thin film device according to claim 1, wherein a groove is provided at the bottom of the sealing disk, the sealing ring is disposed in the groove, and a part of the sealing ring extends out of the groove, and a part of the sealing ring extending out of the groove is in sealing connection with the cavity of the thin film device.
3. The leak detection apparatus for a thin film apparatus as defined in claim 2, wherein the through hole is opened at a bottom wall of the groove.
4. The leak detection apparatus for a thin film device as defined in claim 2, wherein the through hole is opened at a side wall of the groove.
5. The leak detection apparatus for a thin film apparatus as defined in claim 2, wherein the groove is configured in a ring shape.
6. The leak detection apparatus for a thin film device according to claim 1, wherein the vacuum detection section includes a vacuum pump connected to the sealing plate through the connection pipe for evacuating the sealing plate, a vacuum pressure gauge provided on the connection pipe for detecting a vacuum value, and a connection pipe.
7. The leak detection apparatus for a thin film apparatus as defined in claim 1, wherein the sealing disk is configured in a circular shape.
8. The leak detection apparatus for a thin film apparatus as defined in claim 1, wherein the sealing disk is made of a metallic material.
9. A leak detection method for a thin film apparatus using the leak detection apparatus for a thin film apparatus according to any one of claims 1 to 8, comprising the steps of:
s11, connecting the connecting pipes with the vacuum pump and the sealing disc respectively;
s12, arranging a vacuum pressure gauge on the connecting pipe;
s13, starting the vacuum pump;
s14, setting a standard value of a vacuum value, and if the vacuum pressure gauge cannot reach the standard value, checking whether the sealing ring is installed in place and whether the sealing ring is damaged or not;
and S15, if the vacuum pressure gauge still cannot reach the standard value after the sealing ring is installed in place or replaced again, indicating that a leakage point exists in the sealing disc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310703242.6A CN116659772A (en) | 2023-06-14 | 2023-06-14 | Leak detection device and leak detection method for thin film equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310703242.6A CN116659772A (en) | 2023-06-14 | 2023-06-14 | Leak detection device and leak detection method for thin film equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116659772A true CN116659772A (en) | 2023-08-29 |
Family
ID=87722244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310703242.6A Pending CN116659772A (en) | 2023-06-14 | 2023-06-14 | Leak detection device and leak detection method for thin film equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116659772A (en) |
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2023
- 2023-06-14 CN CN202310703242.6A patent/CN116659772A/en active Pending
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