CN218041882U - Remote plasma source dissociation cavity assembly - Google Patents

Abstract

The utility model discloses a long-range plasma source dissociation cavity subassembly relates to plasma source dissociation cavity technical field. The center of the utility model is wrapped with a circular ring tubular cavity, and the cavity component comprises a metal shell, a magnetic tank structure and a fixed buckle structure; the metal shell is in a ring shape formed by splicing a plurality of arc-shaped shells, and an insulating barrier plate is arranged between a crack formed between every two adjacent arc-shaped shells; the magnetic tank structure comprises a holding plate, a scraping plate and a central limiting sleeve; the fixing buckle structure comprises a trapezoidal plate, an upper connecting scraping edge and a lower connecting scraping edge. The utility model solves the defects of the remote plasma source cavity caused by the over-small arc degree of the rectangular corner, and reduces the impact damage of the moving spiral plasma source to the cavity caused by uneven distribution of the magnetic field; as the metal casing structure of heat radiation structure is exquisite, and the radiating efficiency is high, adopts fixed buckle structure to fix, and the manual work has been saved and the time cost is saved in convenient to detach and equipment.

Description

Remote plasma source dissociation cavity assembly

Technical Field

The utility model belongs to the technical field of the plasma source cavity that dissociates, especially relate to a long-range plasma source cavity subassembly that dissociates.

Background

In the field of current semiconductor production, a remote plasma source synthesizes plasma outside a reaction region by utilizing a plasma source, introduces the plasma into the reaction region under the action of air flow, an electric field, a magnetic field and the like, is commonly used for surface modification, chamber cleaning, film etching and plasma auxiliary deposition, and particularly relates to a remote plasma source dissociation cavity consisting of a chamber, an air inlet, an air outlet, a magnetic core and an ignition port. The remote plasma source is used for cleaning the process cavity of the semiconductor equipment at the atomic level, a fluorine-containing compound is used as fluorine raw material gas to enter the cavity, the raw material gas is dissociated under the action of an alternating electric field and a magnetic field, fluorine free radicals are released, active ions F-enter the process chamber to react with pollution materials in the process chamber, such as silicon oxide, silicon nitride and the like, and generated gasified new substances are pumped out of the process chamber by a vacuum pump, so that the cleanness of the process chamber is ensured.

The existing remote plasma source dissociation cavity has the following disadvantages: (1) The structure is complex, the accessories are various, the assembly is not easy, and the outer surface of the chamber made of harder aluminum materials is easy to damage, so that the service life of the chamber is greatly shortened; (2) The magnetic conductive magnetic cores of the outer sleeve of the cavity are separated, so that the magnetic field distribution is uneven, the motion radian of the plasma is small, the plasma is restrained by a weak magnetic field, the plasma is excessively contacted with the inner wall of the cavity, the service life of the cavity is shortened, dust particles generated by the cavity of the remote plasma source are polluted, the cleaning capacity is reduced, and the production yield of chips is reduced; (3) The cavity adopts multistage mosaic structure, makes the cavity gas tightness reduce, can't guarantee the aseptic of inside clean environment, so reduced the cavity to dust particle pollution's clean ability, the outside rectangle shell of cavity, turning are unfavorable for the motion of plasma because turning radian undersize. Therefore, it is important to provide a remote plasma source dissociation chamber assembly to solve the above problems.

SUMMERY OF THE UTILITY MODEL

The utility model provides a long-range plasma source dissociation cavity subassembly has solved above problem.

In order to solve the technical problem, the utility model discloses a realize through following technical scheme:

the utility model discloses a remote plasma source dissociation cavity component, the center is wrapped with a circular ring tubular cavity, and both ends of the cavity are respectively provided with an air inlet and an air outlet;

the cavity assembly comprises a metal shell, two symmetrically arranged magnetic tank structures and a plurality of fixing buckle structures, wherein the metal shell is wrapped on the peripheral side part of the cavity in a two-piece attaching mode, the two symmetrically arranged magnetic tank structures are wrapped on the whole outer part of the attached metal shell in a two-piece attaching mode, and the fixing buckle structures are arranged on the outer part of the magnetic tank structures and used for fixing the metal shell and the magnetic tank structures to form a whole with the cavity;

the metal shell is in a ring shape formed by splicing a plurality of arc-shaped shells, and an insulating barrier plate is arranged between a crack formed between every two adjacent arc-shaped shells; one side part of the metal shell is provided with an accommodating groove which is in half accommodating fit with the peripheral side of the cavity, and two ends of the accommodating groove are provided with clamping limiting notches which are in half accommodating fit with the air inlet and the air outlet respectively;

the magnetic tank structure comprises a holding plate, a scraping plate and a central limiting sleeve, wherein the scraping plate is arranged on one side of the holding plate in a surrounding mode and used for wrapping the metal shell, and the central limiting sleeve is arranged in the central position of the holding plate and used for being matched with the scraping plate to wrap the metal shell; the other side of the clamping plate is provided with a limiting groove matched with the fixing buckle structure, and the scraper plate is positioned between two adjacent limiting grooves and is provided with a gap groove;

the fixing buckle structure comprises a trapezoidal plate, an upper connecting scraping edge arranged at the upper bottom edge of the trapezoidal plate and a lower connecting scraping edge arranged at the lower bottom edge of the trapezoidal plate; the limiting grooves at two opposite positions on the surfaces of the two magnetic tank structures after being attached to each other are respectively provided with a fixing buckle structure, and the fixing buckle structures penetrate through the connecting holes on the upper connecting scraping edge and the lower connecting scraping edge respectively through connecting bolts and then are fixed, so that the buckles are connected with each other.

Furthermore, two clamping limit notches oppositely arranged on the metal shell correspond to a pair of notch grooves oppositely arranged on the scraper, so that the air inlet and the air outlet penetrate and are exposed.

Furthermore, the outer surface of one metal shell is provided with a circular groove which is coaxial with the central hole, and a high-voltage ignition coil and a high-frequency magnetic field coil which are coaxial are arranged in the circular groove; two ignition terminals are arranged on the high-voltage ignition coil; two magnetic field coil output terminals are arranged on the high-frequency magnetic field coil; and the ignition terminal and the magnetic field coil output terminal are respectively exposed out through the transition groove on the surface of the metal shell.

Furthermore, the high-frequency magnetic field coil and the high-voltage ignition coil are pressed tightly by the joint of the magnetic tank structure and the circular groove.

Furthermore, the holding plate, the scraper and the central limiting sleeve of the magnetic tank structure form a pressing cavity to press the insulating barrier plate in the crack and the metal shells at two sides, and the fixing buckle structure arranged on the limiting groove is opposite to the crack.

Furthermore, the insulating barrier plate is formed by two spliced plate bodies, a circular through hole is formed in the center of the whole insulating barrier plate, and rectangular openings are symmetrically formed in the two sides of each spliced plate body, and the high-voltage ignition coil and the high-frequency magnetic field coil penetrate through the rectangular openings in a surrounding mode.

Further, the diameter of the circular through hole is consistent with the outer diameter of the cavity, and the insulating barrier plate is compressed by the compression cavity of the magnetic tank structure.

Further, the number of the insulating barrier plates is consistent with that of the arc-shaped shells of the metal shell.

Compared with the prior art, the utility model following beneficial effect including:

1. the utility model adopts the circular magnetic tank structure to wrap the outside of the circular ring-shaped tubular cavity, the magnetic tank structure and the cavity are provided with the high-voltage ignition coil and the high-frequency magnetic field coil, so that the magnetic field is uniformly distributed, the wrapped magnetic tank structure is adopted to manufacture the magnetic field control plasma to make the spiral motion on the inner wall of the cavity, the magnetic field of the wrapped magnetic tank is uniformly distributed, the defects that the arc degree of a corner of a remote plasma source cavity is too small and the arc degree of the corner of the rectangular plasma source cavity is too small are overcome, and the impact damage of the moving spiral plasma source to the cavity caused by the non-uniform distribution of the magnetic field is reduced;

2. the metal shell and the cavity of the utility model are both in circular ring structures, and the cavity has fewer divided parts, which is beneficial to the movement of plasma in an alternating magnetic field; the annular metal shell reduces the contact probability of the plasma with the cavity wall when the plasma moves in the cavity, and solves the problem of bad influence on the aspects of loss, cleanliness, dissociation rate and the like of the separation cavity; the chamber is in a circular ring tubular structure, which is beneficial to the movement of plasma in an alternating magnetic field, and the metal shell structure as a heat dissipation structure is exquisite and has high heat dissipation efficiency

3. The utility model discloses a magnetism jar structure and metal casing specifically adopt the fixed buckle structure to fix, and convenient to detach and equipment have saved manual work and time cost.

Of course, it is not necessary for any particular product to achieve all of the above-described advantages simultaneously.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments are briefly introduced below, it is obvious that the drawings in the description below are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

Fig. 1 is a schematic structural view of a remote plasma source dissociation chamber assembly of the present invention after being assembled and combined with a chamber;

FIG. 2 is a schematic diagram of the structure at view A in FIG. 1;

FIG. 3 is a front view of the structure of FIG. 1;

FIG. 4 is a top view of the structure of FIG. 1;

FIG. 5 isbase:Sub>A cross-sectional view taken along line A-A of FIG. 4;

FIG. 6 is a front view of the structure of FIG. 5;

FIG. 7 is a schematic diagram of a chamber;

FIG. 8 is a schematic structural view of two magnetic cans after the structures are attached;

FIG. 9 is a front view of the structure of FIG. 8;

FIG. 10 is a schematic structural view of a single magnet pot structure;

FIG. 11 is a schematic view of the magnetic cup structure and the fixing clip structure of FIG. 1 with the magnetic cup structure removed;

FIG. 12 is a top view of the structure of FIG. 11 with the chamber removed;

FIG. 13 is a schematic view of the high voltage ignition coil, high frequency magnetic field coil and an arc housing of FIG. 12 with portions removed;

FIG. 14 is a schematic view of the structure at view C in FIG. 13;

FIG. 15 is a schematic view of the structure of FIG. 13 with one of the metal shells removed;

FIG. 16 is a front view of the structure of FIG. 15;

FIG. 17 is a diagram of the distribution of the insulating barrier in FIG. 1;

FIG. 18 is a front view of the structure of FIG. 17;

FIG. 19 is a schematic view of the structure of a single insulating barrier of FIG. 17;

FIG. 20 is a view showing the arrangement of the fixing clip structure in FIG. 1;

FIG. 21 is a schematic view of a single fixed snap feature of FIG. 20;

FIG. 22 is a schematic view of the structure of FIG. 21 from view D;

FIG. 23 is a schematic diagram of a conventional RPS structure;

FIG. 24 is a schematic view of a conventional chamber;

FIG. 25 is a schematic view of the structure at view E in FIG. 24;

FIG. 26 is a schematic view of the structure of FIG. 24 with the retaining buckle and bolt removed;

FIG. 27 is a schematic view of the structure of FIG. 26 with the core removed;

FIG. 28 is a front elevational view of the structure of FIG. 27;

in the drawings, the reference numbers indicate the following list of parts:

1-chamber, 101-gas inlet, 102-gas outlet, 2-magnetic tank structure, 201-clamping plate, 202-scraping plate, 203-notch groove, 204-central limiting sleeve, 205-limiting groove, 3-metal shell, 301-clamping limiting notch, 302-central hole, 303-accommodating groove, 304-crack, 4-fixing buckle structure, 401-trapezoidal plate, 402-upper connecting scraping edge, 403-connecting hole, 404-lower connecting scraping edge, 305-circular groove, 5-insulating barrier plate, 501-circular through hole, 502-rectangular opening, 6-high-voltage ignition coil and 7-high-frequency magnetic field coil.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "two ends", "outer", "peripheral side", "outer", "side", "adjacent", "surface", "outer surface", "coaxial" and the like indicate positional or positional relationships, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the referenced components or elements must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.

As shown in fig. 23-26, the structure diagram of the existing remote plasma source model is shown, which includes two parts of power supply and remote plasma source cavity, because the power supply is electrified differently, generally 208V/380V three-phase ac input, the power supply provides an ac electric signal of 400KHz and 15KW for the remote plasma source cavity, so that the remote plasma source cavity forms an alternating magnetic field to accelerate particles. Then introducing Ar (argon) through the air inlet for ignition, and successfully introducing NF into the gas ₃ Gas enters the cavity to be dissociated and cleaned;

as shown in FIGS. 27-28, which are schematic structural views of a conventional dissociation chamber, a remote plasma source apparatusThe device is arranged above a process gas inlet of semiconductor thin film equipment, is vacuumized by an extraction opening of an equipment process chamber, ar (argon) is introduced, rarefied argon is introduced into a remote plasma source cavity, the remote plasma source excites and ignites the argon in the remote plasma source cavity, the argon forms plasma gas, an alternating magnetic field applied by the remote plasma source cavity maintains the plasma state, and then NF (nitrogen-nitrogen) is introduced ₃ The (nitrogen trifluoride) or other cleaning process gas enters the remote plasma source cavity to be dissociated, the gas ions dissociated into plasma enter the equipment process chamber to be subjected to cleaning process reaction, and then the generated other gas is pumped out from the air outlet of the equipment process chamber, so that the dissociation and cleaning effects inside the remote plasma source cavity are realized.

As can be seen from the figure, the existing dissociation cavity structure includes a cavity, an air inlet, an air outlet, a magnetic core, and an ignition port; the existing remote plasma source cavity has more structural parts, and high-precision alignment is required for assembly so as to ensure the air tightness in the cavity and increase the time and labor cost; therefore, in view of the above problems, it is important to provide a remote plasma source dissociation chamber assembly, and the following technical solutions are provided.

Referring to fig. 1-22, a ring-shaped tubular chamber 1 is wrapped at the center of a remote plasma source dissociation chamber assembly of the present invention, and an air inlet 101 and an air outlet 102 are respectively disposed at two ends of the chamber 1;

the cavity assembly comprises a metal shell 3 which is wrapped on the peripheral side part of the cavity 1 in a two-piece attaching mode, two symmetrically arranged magnetic tank structures 2 which are wrapped on the whole outer part of the attached metal shell 3 in a two-piece attaching mode, and a plurality of fixing buckle structures 4 which are arranged on the outer part of the magnetic tank structures 2 and used for fixing the metal shell 3 and the magnetic tank structures 2 to form a whole with the cavity 1;

in the embodiment, the metal shell 3 is in a ring shape formed by splicing four arc-shaped shells, and an insulating barrier plate 5 is arranged between a crack 304 formed between two adjacent arc-shaped shells; one side of the metal shell 3 is provided with an accommodating groove 303 which is in half accommodating fit with the outer periphery of the chamber 1, and two ends of the accommodating groove 303 are provided with clamping limiting notches 301 which are respectively in half accommodating fit with the air inlet 101 and the air outlet 102;

the magnetic tank structure 2 adopts a magnetic core with the shape shown in fig. 8-9, and the magnetic tank structure 2 comprises a holding plate 201, a scraper 202 arranged on one side of the holding plate 201 in a surrounding manner and used for wrapping the metal shell 3, and a central limiting sleeve 204 arranged in the central position of the holding plate 201 and used for being matched with the scraper 202 to wrap the metal shell 3; the other side of the clamping plate 201 is provided with a limit groove 205 matched with the fixed buckle structure 4, and the scraper 202 is positioned between two adjacent limit grooves 205 and is provided with a gap groove 203;

the fixing buckle structure 4 comprises a trapezoidal plate 401, an upper connecting scraping edge 402 arranged at the upper bottom edge of the trapezoidal plate 401, and a lower connecting scraping edge 404 arranged at the lower bottom edge of the trapezoidal plate 401; the two limiting grooves 205 at two opposite positions on the surfaces of the two attached magnetic tank structures 2 are respectively provided with a fixed buckle structure 4, and the two limiting grooves are fixed after penetrating through connecting holes 403 on the upper connecting scraping edge 402 and the lower connecting scraping edge 404 through connecting bolts, so that the buckle connection is realized.

Two clamping limit notches 301 which are oppositely arranged on the metal shell 3 correspond to a pair of notch grooves 203 which are oppositely arranged on the scraper 202, so that the air inlet 101 and the air outlet 102 penetrate and are exposed.

The outer surface of one of the metal shells 3 is provided with an annular groove 305 coaxially arranged with the central hole 302, and the annular groove 305 is internally provided with a high-voltage ignition coil 6 and a high-frequency magnetic field coil 7 coaxially arranged; two ignition terminals are arranged on the high-voltage ignition coil 6; the high-frequency magnetic field coil 7 is provided with two magnetic field coil output terminals; the ignition terminal and the output terminal of the magnetic field coil are respectively exposed through the transition groove on the surface of the metal shell 3.

Wherein, the high-frequency magnetic field coil 7 and the high-voltage ignition coil 6 are pressed tightly by the magnetic tank structure 2 which is jointed with the circular groove 305.

The clamping chamber formed by the clamping plate 201, the scraper 202 and the central limiting sleeve 204 of the magnetic tank structure 2 compresses the insulating barrier plate 5 in the gap 304 and the metal shells 3 on the two sides, and the fixing buckle structure 4 mounted on the limiting groove 205 is opposite to the gap 304.

The insulating barrier plate 5 is formed by two spliced plate bodies, a circular through hole 501 is formed in the center of the whole insulating barrier plate 5, and rectangular openings 502 through which the high-voltage ignition coil 6 and the high-frequency magnetic field coil 7 pass in a surrounding manner are symmetrically formed in the two sides of each spliced plate body.

Wherein, the diameter of the circular through hole 501 is consistent with the outer diameter of the chamber 1, and the insulating barrier plate 5 is compressed by the compression chamber of the magnetic tank structure 2.

The number of the insulating barrier plates 5 is the same as that of the arc-shaped shells of the metal shell 3, specifically four, and the insulating barrier plates are circumferentially arranged.

This technical scheme adopts the mode of outer cover magnetic conduction magnetic core in the magnetic jar structure 2 replacement original structure of parcel formula, and high-pressure ignition coil 6 arranges in between magnetic core and the cavity, establishes high-frequency magnetic field coil 7 at 3 overcoat metal casing as the heating panel, makes the magnetic field distribution of cavity 1 even, has reduced the damage that the inside motion spiral plasma that leads to because of magnetic field distribution is inhomogeneous causes the chamber 1 inner wall stereoplasm anode film to the inside pollution that leads to of cavity of dust granule has been reduced.

This principle is used because the charged particles make a helical motion in the magnetic field, and the motion of the plasma is confined near the magnetic induction lines in the strong magnetic field, so that the plasma can only move longitudinally along the magnetic induction lines and cannot cross transversely, and the transverse motion is inhibited only when the plasma collides. According to the technical scheme, the magnetic mirror device is adopted, when the transverse motion of the plasma is restrained, the longitudinal motion is reflected by the magnetic mirror, but the longitudinal motion speed is too high, the plasma escapes from two sides, a magnetic field is additionally arranged outside the Tokamak device, the situation that the plasma escapes due to the fact that the longitudinal motion speed is too high can be avoided, the probability that the plasma collides with the inner wall of the cavity when the plasma does spiral motion in the cavity is reduced, and therefore the cavity is protected to a certain extent.

In this concrete embodiment, cavity 1 specifically adopts ring metal cooling plate structure that metal casing 3 replaces the polygonized structure of former cavity promptly, annular metal casing 3 of circle has reduced the cavity wearing and tearing that cause because of the appearance problem on the one hand, on the other hand has also reduced the cost of manufacture and the equipment degree of difficulty, the design of outside magnetic tank structure 2 also makes the inside magnetic field distribution of cavity more even, the contact of the plasma of 1 inside motion of cavity and cavity inner wall has been reduced, thereby solve the striking destruction of the plasma of motion to cavity inner wall anodic oxidation film.

And (3) testing:

the method comprises the following steps: carrying out air leakage test on the assembled dissociation cavity on a machine table, respectively assembling an air inlet valve and an air outlet valve on the air inlet 101 and the air outlet 102, opening the air valve for testing, vacuumizing, then closing the air outlet valve, and observing the air pressure change in the dissociation cavity 1;

step two: and (3) carrying out water leakage test on the assembled dissociation cavity on the machine table, installing a water inlet pipe and a water outlet pipe, opening a water outlet valve, then opening a water inlet valve, simply seeing whether water leaks or not, and then closing the water outlet valve. Carrying out pressure maintaining test to see whether side water leakage occurs or not for a long time;

step three: measuring power, increasing the volume of given gas, and observing the changes of the power of the measuring table, the bus voltage and the three-phase current;

step four: measuring functions;

step five: measuring data;

the existing remote plasma source cavity measurement data are as follows: (N) ₂ FWD is input power REV reflected power for nitrogen input):

N 2 (ml)	FWD(w)	REV(w)
			0	226	89
1000	5115	42
			5000	9477	31
8000	11787	26

the utility model discloses technical scheme designs the data of measurationing:

N 2 (ml)	FWD(w)	REV(w)
			0	256	79
1000	5471	35
			5000	9863	27
8000	12557	20

by the design, the defects that the cavity of the remote plasma source is too small due to the fact that the arc degree of the rectangular corner is too small and the defect that the cavity is damaged due to impact of the moving spiral plasma source on the cavity caused by uneven magnetic field distribution are overcome, the designed remote plasma source is a major breakthrough in the field of semiconductor process equipment, and convenience and development direction can be provided for the service life and the cleanliness of the remote plasma source cavity in the future.

This technical scheme adopts magnetism jar structure 2 parcel in the cavity 1 outside, and high-pressure ignition head is connected by ignition coil between magnetism jar structure 2 and the cavity 1, is distributing high frequency magnetic field coil 7 between magnetism jar structure 2 and the cavity 1 for magnetic field distributes evenly, adopts the fixing clip structure to fix magnetism jar structure 2, and convenient to detach and equipment have saved manual work and time cost. According to the technical scheme, the remote plasma source cavity is less in split part, and the metal heat dissipation plate is of a circular ring structure, so that the plasma can move in an alternating magnetic field. According to the technical scheme, the wrapped magnetic tank structure 2 is adopted to manufacture the magnetic field control plasma to do spiral motion on the inner wall of the cavity, the magnetic fields of the wrapped magnetic tanks are uniformly distributed, and impact damage of the plasma to the inner wall of the cavity 1 due to nonuniform magnetic field distribution is reduced.

The design realizes a remote plasma source cavity wrapping type magnetic tank structure, the annular metal shell 3 reduces the contact probability of the plasma with the cavity wall when the plasma moves in the cavity, and the problem of bad influence on the aspects of loss, cleanliness, dissociation rate and the like of the separation cavity is solved; the chamber 1 is of a circular ring tubular structure, which is beneficial to the movement of plasma in an alternating magnetic field, the metal shell 3 serving as a heat dissipation structure is exquisite in structure and can be designed to be provided with a water cooling structure, the heat dissipation efficiency is high, the process for manufacturing the chamber in the semiconductor industry breaks through old ideas and concepts in the aspects of requirements and design in the future, and innovation and development opportunities are met.

The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and its practical applications, to thereby enable others skilled in the art to best understand the invention for and utilize the invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims (8)

1. The utility model provides a long-range plasma source dissociation cavity body subassembly, center parcel has annular tubular cavity (1) of circle, cavity (1) both ends are provided with air inlet (101) and gas outlet (102) respectively, its characterized in that:

the cavity assembly comprises a metal shell (3) wrapping the peripheral side part of the cavity (1) in a two-piece attaching mode, two symmetrically-arranged magnetic tank structures (2) wrapping the whole outer part of the attached metal shell (3) in a two-piece attaching mode, and a plurality of fixing buckle structures (4) which are arranged outside the magnetic tank structures (2) and used for fixing the metal shell (3) and the magnetic tank structures (2) to form a whole with the cavity (1);

the metal shell (3) is in a ring shape formed by splicing a plurality of arc-shaped shells, and an insulating barrier plate (5) is arranged between a crack (304) formed between every two adjacent arc-shaped shells; an accommodating groove (303) which is in half accommodating fit with the outer peripheral side of the cavity (1) is formed in one side of the metal shell (3), and clamping limiting notches (301) which are in half accommodating fit with the air inlet (101) and the air outlet (102) respectively are formed in two ends of the accommodating groove (303);

the magnetic tank structure (2) comprises a holding plate (201), a scraping plate (202) arranged on one side of the holding plate (201) in a surrounding mode and used for wrapping the metal shell (3), and a central limiting sleeve (204) arranged in the central position of the holding plate (201) and used for being matched with the scraping plate (202) to wrap the metal shell (3); the other side of the clamping plate (201) is provided with a limiting groove (205) matched with the fixed buckle structure (4), and the scraper (202) is positioned between two adjacent limiting grooves (205) and is provided with a notch groove (203);

the fixing buckle structure (4) comprises a trapezoidal plate (401), an upper connecting scraping edge (402) arranged at the upper bottom edge of the trapezoidal plate (401), and a lower connecting scraping edge (404) arranged at the lower bottom edge of the trapezoidal plate (401); and two limiting grooves (205) at two opposite positions on the surfaces of the two attached magnetic tank structures (2) are respectively provided with a fixed buckle structure (4), and the two limiting grooves are fixed after penetrating through connecting holes (403) on an upper connecting scraping edge (402) and a lower connecting scraping edge (404) respectively through connecting bolts, so that the buckles are connected.

2. The dissociation chamber assembly of claim 1, wherein the two clamping limit notches (301) of the metal housing (3) are opposite to the pair of notch grooves (203) of the scraper (202), so that the gas inlet (101) and the gas outlet (102) are exposed through the notches.

3. The dissociation chamber assembly of a remote plasma source according to claim 1, characterized in that an outer surface of the metal housing (3) is provided with an annular groove (305) coaxially arranged with the central hole (302), and the annular groove (305) is internally provided with a high-voltage ignition coil (6) and a high-frequency magnetic field coil (7) coaxially arranged; two ignition terminals are arranged on the high-voltage ignition coil (6); two magnetic field coil output terminals are arranged on the high-frequency magnetic field coil (7); the ignition terminal and the magnetic field coil output terminal are respectively exposed through a transition groove on the surface of the metal shell (3).

4. The dissociation chamber assembly of claim 3, wherein the HF magnetic field coil (7) and the HV coil (6) are compressed by the magnetic canister structure (2) engaging the annular recess (305).

5. The dissociation chamber assembly of a remote plasma source according to claim 1, wherein the holding plate (201), the scraper (202) and the central position-limiting sleeve (204) of the magnetic tank structure (2) form a pressing chamber to press the insulating barrier plate (5) in the crack (304) and the metal shells (3) at two sides, and the fixing buckle structures (4) arranged on the position-limiting grooves (205) are opposite to the crack (304).

6. The dissociation chamber assembly of a remote plasma source according to claim 1, wherein the insulating barrier plate (5) is formed by two spliced plate bodies, a circular through hole (501) is formed in the center of the insulating barrier plate (5), and rectangular openings (502) are symmetrically formed in the two sides of each spliced plate body, and the rectangular openings are penetrated by the high-voltage ignition coil (6) and the high-frequency magnetic field coil (7).

7. The remote plasma source dissociation chamber assembly according to claim 6, wherein the circular through hole (501) has a diameter corresponding to an outer diameter of the chamber (1), and the insulating barrier plate (5) is compressed by the compression chamber of the magnet pot structure (2).

8. The remote plasma source dissociation chamber assembly of claim 6, wherein the number of the insulating barrier plates (5) is the same as the number of the arc-shaped shells of the metal outer shell (3).

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