CN116657966A - High-precision constant temperature and humidity microelectronic hundred-grade clean laboratory - Google Patents

High-precision constant temperature and humidity microelectronic hundred-grade clean laboratory Download PDF

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Publication number
CN116657966A
CN116657966A CN202310725482.6A CN202310725482A CN116657966A CN 116657966 A CN116657966 A CN 116657966A CN 202310725482 A CN202310725482 A CN 202310725482A CN 116657966 A CN116657966 A CN 116657966A
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air
laboratory
humidity
chamber
ffu
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CN116657966B (en
Inventor
唐汉湘
李振洪
邓财亮
孙英健
黄科源
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Guangzhou Aoqi Laboratory Technology Co ltd
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Guangzhou Aoqi Laboratory Technology Co ltd
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
    • F24F8/108—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering using dry filter elements
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/62—Insulation or other protection; Elements or use of specified material therefor
    • E04B1/66—Sealings
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/62—Insulation or other protection; Elements or use of specified material therefor
    • E04B1/92—Protection against other undesired influences or dangers
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B9/00—Ceilings; Construction of ceilings, e.g. false ceilings; Ceiling construction with regard to insulation
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B9/00—Ceilings; Construction of ceilings, e.g. false ceilings; Ceiling construction with regard to insulation
    • E04B9/006—Ceilings; Construction of ceilings, e.g. false ceilings; Ceiling construction with regard to insulation with means for hanging lighting fixtures or other appliances to the framework of the ceiling
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B9/00—Ceilings; Construction of ceilings, e.g. false ceilings; Ceiling construction with regard to insulation
    • E04B9/02—Ceilings; Construction of ceilings, e.g. false ceilings; Ceiling construction with regard to insulation having means for ventilation or vapour discharge
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B9/00—Ceilings; Construction of ceilings, e.g. false ceilings; Ceiling construction with regard to insulation
    • E04B9/06—Ceilings; Construction of ceilings, e.g. false ceilings; Ceiling construction with regard to insulation characterised by constructional features of the supporting construction, e.g. cross section or material of framework members
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04H—BUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
    • E04H5/00—Buildings or groups of buildings for industrial or agricultural purposes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/62—Control or safety arrangements characterised by the type of control or by internal processing, e.g. using fuzzy logic, adaptive control or estimation of values
    • F24F11/63—Electronic processing
    • F24F11/64—Electronic processing using pre-stored data
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/70—Control systems characterised by their outputs; Constructional details thereof
    • F24F11/72—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
    • F24F11/74—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/89—Arrangement or mounting of control or safety devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/28—Arrangement or mounting of filters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/16—Drying solid materials or objects by processes not involving the application of heat by contact with sorbent bodies, e.g. absorbent mould; by admixture with sorbent materials
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/62—Insulation or other protection; Elements or use of specified material therefor
    • E04B1/92—Protection against other undesired influences or dangers
    • E04B2001/925—Protection against harmful electro-magnetic or radio-active radiations, e.g. X-rays
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04H—BUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
    • E04H5/00—Buildings or groups of buildings for industrial or agricultural purposes
    • E04H2005/005—Buildings for data processing centers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

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  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Physics & Mathematics (AREA)
  • Structural Engineering (AREA)
  • Civil Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical & Material Sciences (AREA)
  • Signal Processing (AREA)
  • Mathematical Physics (AREA)
  • Molecular Biology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Fluid Mechanics (AREA)
  • Fuzzy Systems (AREA)
  • Air Conditioning Control Device (AREA)
  • Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)

Abstract

The invention provides a high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory, which comprises the following steps: an outer wall assembly of the experiment room; the laboratory inner wall assembly is arranged in the laboratory outer wall assembly, and an air channel is formed between the laboratory outer wall assembly and the laboratory inner wall assembly; a top plate arranged above the outer wall assembly of the laboratory; the fresh air clean air conditioner control system is arranged on the outer side of the top plate; the outdoor air distribution device is arranged on the outer side of the top of the outdoor wall assembly of the experiment room; and the FFU air quantity and floor return air quantity control system is arranged in the outer wall combination body of the inspection chamber. The high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory is reasonable in design, can realize precise control on the environment with uniform air speed and constant temperature and humidity in the microelectronic laboratory, ensures air hundred-grade cleanliness and low-concentration chemical pollution gas in the microelectronic laboratory, reduces interference factors in the process of a microelectronic chip element experimental sample, and improves the chip production quality.

Description

High-precision constant temperature and humidity microelectronic hundred-grade clean laboratory
Technical Field
The invention relates to the technical field of laboratory equipment, in particular to a high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory.
Background
Microelectronic technology is a new technology developed with integrated circuits, especially very large scale integrated circuits. Various toxic, corrosive and irritant chemical gaseous pollutants such as silane, dichlorosilane, disilane, boron trichloride, boron trifluoride, phosphane, arsine, chlorine, HCL, HF, H2NO3, hydrogen bromide, ammonia, nitrous oxide, carbon dioxide and the like are continuously generated in the manufacturing process flow of the microelectronic chip, and certain pollution is caused to indoor and outdoor air environments, so that the waste gas and wastewater treatment is required to be fully considered in the microelectronic laboratory.
The microelectronic laboratory has extremely high requirements on temperature and humidity, air cleanliness, vibration, noise, electromagnetic interference and the like of the environment, the photoetching machine of the high-precision chip needs to reduce the interference of fine particles in the environment and the air to the photoetching process as much as possible, various environmental influence factors such as the electron beam photoetching machine, temperature, humidity and fluctuation of wind speed need to be fully considered when the laboratory is built in the position and design, the influence on the quality of the chip sample in the chip manufacturing can be greatly reduced only in the high-precision stable constant temperature and humidity hundred-level clean environment (the temperature is 22+/-0.1 ℃ and the humidity is +/-2%).
Most of hundreds of laboratories of microelectronic laboratories built on the market at present adopt ultra-efficient FFU (flexible filter unit) filter modules in the air laminar flow process, so that the hundred-level requirements on particle pollutants in indoor air are met, but chemical gaseous pollutants which have quality influence on the process cannot be treated sufficiently, the control of constant temperature and humidity environment is at a relatively rough level, and the requirements on precise control of fluctuation degree and stability cannot be met. When the FFU module with ultra-efficient filtration is replaced and installed, the FFU module must be climbed to the top (when the height space is enough) or be obliquely taken and placed at high altitude below, so that the maintenance difficulty and the safety risk of staff are increased. In addition, when the internal circulation wind in the existing microelectronic laboratory returns air from the antistatic floor small holes at the bottom of the inner wall assembly of the laboratory to the air channel formed by the outer wall of the laboratory and then flows back to the space between the FFU fan filter screen unit and the top plate of the outer wall assembly of the laboratory, the wind pressure decreases due to the air channel structure, so that the wind speed of the return air on the antistatic floor with holes in the whole laboratory and the wind speed of the whole FFU air supply surface are uneven, the wind quantity and the wind speed are larger at the place near the periphery of the inner wall, and the wind speed in the microelectronic laboratory is uneven, so that the quality of chip products in the same batch or different batches is unstable due to the uneven wind speed.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory, which can realize the precise control of constant temperature and humidity and uniform wind speed environment in the microelectronic laboratory, ensure the air hundred-grade cleanliness and low-concentration chemical pollution gas in the microelectronic laboratory, reduce the interference factor in the process of a microelectronic chip element experimental sample and improve the production quality of microelectronic chips.
In order to achieve the technical scheme, the invention provides a high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory, which comprises the following steps: the laboratory outer wall assembly is formed by shielding a plurality of anti-condensation aluminum honeycomb cold and heat radiation outer walls, each anti-condensation aluminum honeycomb cold and heat radiation outer wall comprises an anti-condensation aluminum honeycomb cold and heat radiation plate, an installation pressing strip and a color steel plate outer wall, and the anti-condensation aluminum honeycomb cold and heat radiation plate is attached to the inner side surface of the color steel plate outer wall through the installation pressing strip; the laboratory inner wall assembly is arranged in the laboratory outer wall assembly, an air duct is formed between the laboratory outer wall assembly and the laboratory inner wall assembly, the laboratory inner wall assembly is formed by enclosing a plurality of anti-condensation aluminum honeycomb cold and heat radiation inner walls, each anti-condensation aluminum honeycomb cold and heat radiation inner wall comprises an anti-condensation aluminum honeycomb cold and heat radiation plate, a concave keel and a keel connecting piece, wherein the two anti-condensation aluminum honeycomb cold and heat radiation plates are symmetrically embedded in the concave keel and are locked through the keel connecting piece; the top plate is arranged above the outer wall assembly of the laboratory, and the anti-condensation aluminum honeycomb cold and heat radiation plate is arranged on the inner side of the top plate; the fresh air clean air conditioner control system is used for acquiring temperature and relative humidity values of hundred-grade clean rooms in real time, drawing an enthalpy-humidity diagram, dividing the enthalpy-humidity diagram into different meteorological partitions according to isenthalpic lines and isomoisture content lines according to indoor temperature and humidity parameter requirements, calculating dew point temperature which is obtained by calculating the indoor required temperature and relative humidity to be a target value, and controlling outdoor fresh air parameters according to different external environments corresponding to air conditioning working conditions so as to achieve indoor temperature and humidity indexes required by the clean rooms; the outdoor air distribution device is arranged on the outer side of the top of the laboratory outer wall assembly and is used for uniformly distributing constant-temperature and constant-humidity fresh air processed by the fresh air clean air conditioner control system to the top of the laboratory inner wall assembly; the FFU air quantity and floor return air quantity control system is arranged in an outdoor wall combination body of the test chamber and is used for carrying out air quantity fine adjustment control according to a field condition grouping system, an air speed sensor is arranged in an FFU filter unit of an air blowing face, an electric air quantity regulating valve is arranged under an anti-static floor of return air, a proper face air speed is set in a touch screen system, laminar face air speed of the system is detected in real time, fan air quantity is increased or reduced by two FFU filter units in real time according to the face air speed fed back by the face air speed sensor so as to achieve FFU air quantity fine adjustment control, and the opening of an electric air quantity regulating valve of return air is properly fine-adjusted, so that the air speeds of an FFU air blowing face and a floor return air face in a laboratory are uniform.
Preferably, the high-precision constant temperature and humidity microelectronic hundred-level clean laboratory further comprises a cold and heat radiation plate flow control system, the cold and heat radiation plate flow control system is arranged into four groups, and is respectively arranged on the inner side of an anti-condensation aluminum honeycomb cold and heat radiation outer wall, the outer side of an anti-condensation aluminum honeycomb cold and heat radiation inner wall, the inner side of the anti-condensation aluminum honeycomb cold and heat radiation inner wall and the inner side of a top plate of the anti-condensation aluminum honeycomb cold and heat radiation plate of the laboratory, the cold and heat radiation plate flow control system is respectively electrically connected with an electric adjusting water valve and a temperature sensor of a water outlet and a water inlet of a cold loop pipe arranged on the anti-condensation aluminum honeycomb cold and heat radiation plate, the cold and heat radiation plate flow control system controls the opening of the electric adjusting water valve in real time according to the return water temperature, controls the flow of the cold and heat radiation plate, realizes the adjustment of the return water temperature, and obtains the optimal water flow.
Preferably, the anti-condensation aluminum honeycomb cold and heat radiation plate comprises an electrostatic spraying aluminum plate, an aluminum honeycomb radiation plate and a water cooling loop pipe, wherein the water cooling loop pipe is embedded and installed in the aluminum honeycomb radiation plate, a top water outlet and a water inlet of the water cooling loop pipe extend to the outer side of the aluminum honeycomb radiation plate, heat conduction sealant is filled in a hole at the butt joint position of the water cooling loop pipe and the aluminum honeycomb radiation plate, drying agents are filled in the holes of the aluminum honeycomb radiation plate, front and rear electrostatic spraying aluminum plates are respectively attached and installed on the front side and the rear side of the aluminum honeycomb radiation plate, water pipe joints are installed at the top water outlet and the water inlet of the water cooling loop pipe, the water outlet and the water inlet at the top of the water cooling loop pipe are connected with an external circulating water pipe through the water pipe joints, and an electric adjusting water valve and a temperature sensor are installed at the water outlet and the water inlet at the top of the cold loop pipe.
Preferably, the fresh air clean air conditioner control system comprises an outdoor fresh air temperature and humidity treatment device, wherein the outdoor fresh air temperature and humidity treatment device is formed by splicing a first outer shell, a second outer shell and a third outer shell, an air inlet chamber, a first filtering chamber, a preheating chamber and a first surface cooling chamber are sequentially arranged in the first outer shell along the air flow direction, a filter assembly is arranged in the first filtering chamber, an electric heating tube is arranged in the preheating chamber, an evaporating coil is arranged in the first surface cooling chamber, a humidifying chamber, a second surface cooling chamber and a reheating chamber are sequentially arranged in the second outer shell along the air flow direction, a humidifier is arranged in the humidifying chamber, an evaporating coil is arranged in the second surface cooling chamber, an electric heating tube is arranged in the reheating chamber, a fan chamber, an efficient and an air outlet chamber are sequentially arranged in the third outer shell along the air flow direction, an EC fan is arranged in the fan chamber, and an efficient filter is arranged in the efficient chamber; a first differential pressure switch is arranged between the air inlet chamber and the first filtering chamber on the first shell body, a second differential pressure switch is arranged at the air inlet of the fan chamber, and a third differential pressure switch is arranged between the air outlet of the fan chamber and the high-efficiency filtering chamber; a water inlet pipe and a water outlet pipe which are communicated with an evaporation coil pipe in the first surface cooling chamber are arranged on the first outer shell and are respectively provided with a first electric adjusting water valve and a second electric adjusting water valve; the first temperature and humidity sensor and the enthalpy sensor are arranged on the second outer shell body and located at the humidifying chamber, and the second temperature and humidity sensor is arranged on the third outer shell body and located at the air outlet chamber.
Preferably, the FFU air quantity and floor return air quantity control system comprises an FFU air supply control system arranged at the top of the laboratory interior wall assembly, the FFU air supply control system consists of a plurality of FFU filter units which are arranged at the top of the laboratory interior wall assembly and distributed in a square matrix, the FFU filter units distributed in the square matrix in the FFU air supply control system are divided into three FFU air supply speed regulation and control combinations I, II and III which can be independently controlled according to different air supply areas, and an air speed sensor is arranged at an air outlet of each FFU filter unit; the floor return air control system is arranged at the bottom of the laboratory interior wall assembly and consists of a plurality of anti-static floors which are arranged at the bottom of the laboratory interior wall assembly and distributed in a square matrix, the surfaces of each anti-static floor are uniformly provided with air holes, the anti-static floors which are distributed in a square matrix in the floor return air control system are divided into three independently controllable ground return air speed regulation and control combinations I, ground return air speed regulation and control combinations II and ground return air speed regulation and control combinations III according to different return air areas, and an electric air quantity regulating valve is arranged below each anti-static floor; the central controller is electrically connected with each FFU filter unit, each wind speed sensor and each electric air quantity regulating valve respectively, and the central controller sets the air return quantity of the corresponding electric air quantity regulating valve below the antistatic floor according to the wind speed data collected by the wind speed sensors, so that the wind speeds of the FFU air supply layer and the floor air return layer are uniform and consistent.
Preferably, FFU filter unit includes FFU filter unit body, chemical purification module, high-efficient filter and aluminium alloy fossil fragments subassembly, aluminium alloy fossil fragments subassembly is formed by four aluminium alloy fossil fragments end to end splices, aluminium alloy fossil fragments head and tail splice department is through fossil fragments connecting piece fixed connection, the left and right sides of every aluminium alloy fossil fragments all is provided with inserted sheet butt joint hook piece, the aluminium alloy inserted sheet passes through the hook position and matches the back with inserted sheet butt joint hook piece and fix on aluminium alloy fossil fragments and outwards protrusion, the top of every aluminium alloy fossil fragments all is provided with the top hook groove, the bottom of jib subassembly is through the top hook inslot of T type screw embedding aluminium alloy fossil fragments, the top of jib subassembly is hung on the roof of the outdoor wall assembly of experiment, high-efficient filter laminating is installed in chemical purification module's bottom, chemical purification module laminating is installed in the bottom of FFU filter unit body, four terminal limits of high-efficient filter are put respectively on four aluminium alloy inserted to four inserted sheet fossil fragments, wind speed sensor installs the air outlet in high-efficient filter bottom, two corresponding two stainless steel bolts of following two sides of FFU filter unit body are all installed to two safety pins.
Preferably, the jib subassembly includes jib, jib installing frame and T type screw rod, the top locking of T type screw rod is installed in the bottom of jib installing frame, and the T type end embedding of T type screw rod is installed in the top hook groove of aluminium alloy fossil fragments, the bottom locking of jib is fixed at the top of jib installing frame, and the top of jib hangs on the roof of the outer wall assembly of laboratory, and every aluminium alloy fossil fragments all hang on the roof of the outer wall assembly of laboratory through two jib subassemblies, FFU filter unit body includes the shell, and the fan is installed in the shell, shell top is just to being provided with the income wind gap with the fan, and the guide vane is installed to the air outlet department of fan.
Preferably, the chemical purification module is internally filled with a fine aluminum oxide filtering substrate with high specific surface area and micropores, and the surface of the aluminum oxide filtering substrate is soaked with strong oxidized potassium permanganate and potassium hydroxide.
Preferably, the high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory also comprises CO 2 Positive pressure control system, air conditioner water circulation control system, lighting system and central control system in comfort level exhaust and supplement air chamber, wherein the CO 2 CO (carbon monoxide) installed in comfort level exhaust and air supplementing chamber through laboratory by positive pressure control system 2 Sensor, differential pressure sensor, real-time detection laboratory CO 2 Concentration of CO 2 When the concentration is too high, the fresh air quantity of the system is increased in real time, and when the concentration is too high, the system is used for generating CO 2 When the concentration is in a comfortable range, the fresh air quantity is regulated, the pressure in the laboratory is detected in real time through the pressure difference sensor while the fresh air quantity of the air supplement is regulated, the opening of the exhaust valve is regulated in real time according to the pressure parameter, and the comfort level of the laboratory and the positive pressure stability of the system are controlled; the air conditioner water circulation control system adjusts the opening of a bypass electric butterfly valve arranged on a laboratory circulating water supply main pipe and a return water main pipe through a three-position floating point control method, so that the pressure difference between the laboratory circulating water supply main pipe and the return water main pipe is always kept within a set value allowable error range; the illumination system controls illumination of a laboratory through a touch screen control or a panel switch; the central control system is respectively and fully connected withFresh air clean air conditioner control system, FFU air quantity, floor return air quantity control system and CO 2 The comfort level exhaust and air supplementing chamber internal positive pressure control system, the air conditioner water circulation control system and the lighting system are connected and used for realizing a fresh air clean air conditioner control system, an FFU air quantity and floor return air quantity control system and CO 2 And the comfort level is automatically adjusted by the positive pressure control system, the air conditioner water circulation control system and the lighting system in the exhaust and supplement chamber.
Preferably, the anti-static floor in the laboratory interior wall assembly is provided with a photoetching machine, a fume hood and a laboratory table, the top of the photoetching machine is provided with a wind speed sensor and a smoke sensor, and the top of the laboratory interior wall assembly is provided with a TVOC sensor, a temperature and humidity sensor and a CO sensor 2 The sensor, waterway pipeline are installed between the clearance of laboratory interior wall assembly and the outer wall assembly of laboratory, install gas circuit valve, camera, particle counter, intercom and lighting switch on the inner wall of laboratory interior wall assembly, be provided with safe airtight door and buffering room airtight door on the lateral wall of the outer wall assembly of laboratory, frozen inlet tube and frozen water outlet pipe are installed in the roof outside, frozen inlet tube has electric flow water valve, install temperature sensor on the frozen water outlet pipe.
The high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory provided by the invention has the beneficial effects that:
(1) The high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory is characterized in that the whole laboratory structure, the laboratory outer wall assembly structure, the laboratory inner wall assembly structure, the fresh air clean air conditioner control system, the FFU air quantity and floor return air quantity control system and the CO 2 The novel design of key structures such as a positive pressure control system in a comfort level exhaust and supplement chamber and a cold and heat radiation plate flow control system can realize precise control on constant temperature and humidity and uniform wind speed environments in a microelectronic laboratory, ensure air hundred-level cleanliness and low-concentration chemical pollution gas in the microelectronic laboratory, reduce interference factors in the process of experimental samples of microelectronic chip elements and improve the production quality of microelectronic chips.
(2) The high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory can ensure the air hundred-grade cleanliness and low-concentration chemical pollution gas in the microelectronic laboratory through the innovative design of the FFU air quantity and floor return air quantity control system, reduce interference factors in the process of microelectronic chip element experimental samples and improve the laboratory working environment of scientific researchers; the unique FFU upper air supply and lower return air volume automatic control fine adjustment system ensures uniformity of air volume and air speed from top to bottom. During actual operation, outside processed air is firstly distributed to the FFU air supply control system arranged at the top of the laboratory interior wall assembly through the air duct between the laboratory exterior wall assembly and the top of the laboratory interior wall assembly by the outdoor air distribution device, the FFU air supply control system can obtain wind speed data according to wind speed sensors arranged in all FFU filter units, the central controller sets the air return quantity of the electric air quantity regulating valve under the corresponding antistatic floor according to the wind speed data collected by the wind speed sensors, so that the wind speeds of the FFU air supply layer and the floor air return layer are uniform, the defect that in the prior art, when internal circulating air in a laboratory returns to a space between the FFU filter unit and a top plate of the laboratory exterior wall assembly from small holes in the antistatic floor at the bottom of the laboratory interior wall assembly, the air return is caused by the air duct structure, wind pressure is decreased, the wind speed of the air return on the antistatic floor with holes in the whole laboratory and the wind speed of the whole FFU air supply surface are uneven, and the wind quantity and the wind speed of the place near the periphery of the inner wall are large is overcome, and the quality stability of chip products is improved.
(3) The high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory is greatly convenient for the installation and the disassembly of the FFU fan filter screen unit through the structural design of the FFU filter screen unit. During actual installation, four aluminum profile keels are spliced end to form an aluminum profile keel assembly through keel connectors, then the assembled aluminum profile keel assembly is hung on a top plate of a laboratory through a hanging rod assembly, then an efficient filter, a chemical purification module and an FFU filter unit body are installed into an integrated FFU assembly, the FFU assembly is placed on a lifter platform, the FFU assembly is lifted to the upper side of the aluminum profile keel assembly through a frame hole in the center of the aluminum profile keel assembly through the lifter platform, then an aluminum profile inserting sheet is inserted into a slot of an inserting sheet butt joint hook piece of the aluminum profile keel in an inclined position, the rotating aluminum profile inserting sheet is pushed horizontally, pulled outwards after being lifted upwards, moved downwards to be pushed inwards, so that the inserting sheet butt joint hook piece is tightly hooked with the hook position of the aluminum profile inserting sheet, the aluminum profile inserting sheet is fixedly connected to the aluminum profile keel, the aluminum profile inserting sheet is used as a supporting piece of the FFU assembly, the lifter platform is controlled to descend, and the FFU assembly is placed on the aluminum profile in the descending process, and the supporting of the FFU assembly is realized. When the FFU component needs to be disassembled, only the lifter platform is needed to be used for jacking the FFU component, the aluminum profile inserting piece is reversely operated, the aluminum profile inserting piece is separated from the aluminum profile keel, and then the FFU component is lowered to the ground from the frame hole in the center of the aluminum profile keel component through the lifter platform, so that the FFU fan filter screen unit is greatly convenient to install and disassemble.
(4) The high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory can process outdoor fresh air entering the laboratory through the structural design of the fresh air clean air conditioner control system, and is convenient for precisely controlling the constant temperature and humidity environment in the microelectronic laboratory. During actual operation, the EC fan installed in the fan chamber generates a suction force, so that outdoor air sequentially passes through the air inlet chamber, the first filter chamber, the preheating chamber and the first surface cooling chamber in the first outer shell, the humidifying chamber, the second surface cooling chamber and the reheating chamber in the second outer shell, and the fan chamber, the high-efficiency filter chamber and the air outlet chamber in the third outer shell finally enter the chambers of the microelectronic laboratory. When outdoor air passes through the first filtering chamber, large-particle impurities, dust and polluted chemical gas possibly contained in the outdoor air are filtered through the filter assembly arranged in the first filtering chamber, then enter the preheating chamber, the air is preheated to a set temperature through the electric heating tube arranged in the preheating chamber, then enter the first surface cooling chamber, the humidity of the air is controlled through the evaporation coil arranged in the first surface cooling chamber, then the air enters the humidifying chamber to regulate and control the humidity of the air again, the humidified air enters the second surface cooling chamber, the precise humidity control is carried out again through the evaporation coil arranged in the second surface cooling chamber, the air subjected to the precise humidity control is conveyed to the reheating chamber to carry out the precise temperature regulation, then the air enters the room of the microelectronic laboratory through the induced air of the EC fan in the fan chamber after the efficient filtering of the efficient filter in the efficient filtering chamber, the humidity and the stable fresh air are provided for the microelectronic laboratory through the air outlet chamber, the humidity and the temperature fluctuation of the fresh air are reduced, and the precise constant temperature control of the humidity environment in the microelectronic laboratory is facilitated.
(5) The high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory can realize the uninterrupted dynamic fine adjustment control of the temperature of the water-cooling heat circulation system through the innovative structural design of the flow control system of the cold and heat radiation plates, continuously realize the heat exchange of indoor air by the heat exchange of the air of the room by the anti-condensation aluminum honeycomb cold and heat radiation plates arranged on the inner side of the anti-condensation aluminum honeycomb cold and heat radiation outer wall of the laboratory, the inner side of the anti-condensation aluminum honeycomb cold and heat radiation inner wall and the inner side of the top plate of the anti-condensation aluminum honeycomb cold and heat radiation inner wall, and the water medium in the cold and heat circulation system, thereby realizing the temperature regulation of the indoor air, and having the characteristics of energy conservation, no condensation, no dust collection and less maintenance; when the temperature is reduced, the temperature of the inner side of the anti-condensation aluminum honeycomb cold and heat radiation outer wall is lower than that of indoor air, heat in the air is continuously absorbed and conducted into cooling water of a refrigerant circulation system, and the heat is discharged through a waterway circulation outer machine; when the temperature of the coolant circulation system is increased in the heating process, the heat of the circulating water is conducted, radiated and convected into indoor high-frequency internal circulation air through the aluminum honeycomb radiation plate, and the air temperature is uniformly regulated, so that the accurate control of the indoor constant temperature and humidity environment can be ensured.
(6) The high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory can keep continuous cold and heat quantity conduction, radiation or absorption and convection through the structural design of the condensation-preventing aluminum honeycomb cold and heat radiation plate, and prevent condensation and moisture regain on the surface of the plate. During actual operation, cooling water with the similar temperature of air conditioner control can be walked in the water-cooling return circuit pipe, cold and hot volume is through aluminium honeycomb radiant panel conduction, radiation or absorption for the temperature on electrostatic spraying aluminum plate surface can remain the temperature similar with the air conditioner control all the time, and through filling the drier at aluminium honeycomb radiant panel's honeycomb Kong Litian, make the air in the aluminium honeycomb radiant panel inner cell hole that is sealed by two-sided electrostatic spraying aluminum plate and outside isolated, and be in dry state all the time, and then can prevent that condensation, anti-tide phenomenon from appearing on electrostatic spraying aluminum plate's surface, be favorable to the accurate control to the indoor constant temperature and humidity environment of microelectronics experiment.
Drawings
FIG. 1 is a schematic view of the installation of the internal three-dimensional structure I of the present invention.
Fig. 2 is a perspective view of the installation of the structure of the present invention.
Fig. 3 is an internal perspective structure installation schematic diagram ii of the present invention.
Fig. 4 is a schematic diagram of the system control of the present invention.
Fig. 5 is a schematic view of the mounting structure of the present invention.
Fig. 6 is a schematic diagram of an installation structure of an outdoor fresh air temperature and humidity treatment device in the invention.
FIG. 7 is a schematic diagram of an FFU blower control system of the present invention.
Fig. 8 is a layout of the floor return air control system of the present invention.
Fig. 9 is a schematic view illustrating the assembly of the FFU filter assembly in a three-dimensional structure according to the present invention.
Fig. 10 is an exploded perspective view of an FFU filtration unit according to the present invention.
Fig. 11 is a sectional view showing an assembled structure of the FFU filter assembly of the present invention.
Fig. 12 is a schematic view of a three-dimensional assembly structure of a boom assembly and an aluminum profile keel of an FFU filtration unit of the invention.
Fig. 13 is a schematic diagram of an assembly structure of a boom assembly and an aluminum profile keel, an aluminum profile insert of an FFU filtration unit according to the present invention.
Fig. 14 is a schematic structural diagram of an installation step of an aluminum profile insert and an aluminum profile keel of the FFU filter unit according to the invention.
Fig. 15 is a schematic perspective view of an anti-condensation aluminum honeycomb cold and heat radiation plate according to the invention.
Fig. 16 is an installation schematic view of the internal structure of the condensation-preventing aluminum honeycomb cold and heat radiation plate in the invention.
Fig. 17 is a transverse sectional view of the condensation-preventing aluminum honeycomb cold and heat radiation plate of the invention.
Fig. 18 is an exploded perspective view of the inner wall of the aluminum honeycomb cold and heat radiation preventing device.
Fig. 19 is a transverse cross-sectional view of the cold and heat radiation inner wall of the anti-condensation aluminum honeycomb in the invention.
FIG. 20 is a schematic view showing the installation of the internal structure of the cold and heat radiation inner wall of the anti-condensation aluminum honeycomb.
FIG. 21 is an exploded view of the perspective structure of the anti-condensation aluminum honeycomb cold and heat radiation outer wall of the invention.
Fig. 22 is a transverse cross-sectional view of the cold and heat radiation outer wall of the anti-condensation aluminum honeycomb of the invention.
In the figure: 1. a laboratory interior wall assembly; 2. FFU air supply control system; 3. a floor return air control system; 4. an outer wall assembly of the experiment room; 5. an outdoor wind distribution device; 6. an electric air quantity regulating valve; 7. outdoor fresh air temperature and humidity treatment device; 8. an anti-condensation aluminum honeycomb cold and heat radiation plate; 9. a waterway pipeline; 10. TVOC sensor; 11. a temperature and humidity sensor; 12. CO 2 A sensor; 13. a wind speed sensor; 14. a smoke sensor; 15. an antistatic floor; 16. an experiment table; 17. a safety airtight door; 18. a top plate; 19. freezing the water inlet pipe; 20. an electric flow water valve; 21. a water temperature sensor; 22. a chilled water outlet pipe; 23. a buffer room airtight door; 24. a fume hood; 25. a photoetching machine; 26. an air path valve; 27. a camera; 28. a particle counter; 29. an interphone; 30. an illumination switch;
201. FFU air supply speed regulation and control combination I; 202. FFU air supply wind speed regulation combination II; 203. FFU air supply speed regulation and control combination III; 211. FFU filter unit body; 212. a safety latch; 213. a chemical purification module; 214. a high-efficiency filter; 215. a boom assembly; 2151. a boom; 2152. a boom mounting frame; 2153. a T-shaped screw; 216. a keel connection; 217. an aluminum profile inserting piece; 218. aluminum profile keels; 2181. a top hook slot; 2182. the inserting piece is abutted with the hook piece; 219. a wind speed sensor; 2110. a handle; 2111. a housing; 2112. an air inlet; 2113. a blower; 2114. a deflector;
31. the ground return air speed regulation and control combination I; 32. a ground return air speed regulation and control combination II; 33. a ground return air speed regulation and control combination III;
71. a first outer case; 72. a second outer case; 73. a third outer case; 74. an air inlet chamber; 75. a first filtering chamber; 76. a preheating chamber; 77. a first surface cooling chamber; 78. a humidification chamber; 79. a second surface cooling chamber; 710. reheating chamber; 711. a fan chamber; 712. a high-efficiency filtering chamber; 713. an air outlet chamber; 714. a first differential pressure switch; 715. a first electrically operated water valve; 716. a second electrically operated water valve; 717. a first temperature and humidity sensor; 718. an enthalpy sensor; 719. a third electrically operated water valve; 720. a fourth electrically operated water valve; 721. a second differential pressure switch; 722. a third differential pressure switch; 723. a second temperature and humidity sensor;
81. Electrostatic spraying of an aluminum plate; 82. aluminum honeycomb radiation plate; 83. a water-cooling loop pipe; 84. a drying agent; 85. a thermally conductive sealant; 86. wiring grooves; 87. a concave keel; 88. a keel connection; 89. installing a pressing bar; 810. color steel plate outer wall.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments obtained by those skilled in the art without making any inventive effort are within the scope of the present invention.
Examples: a high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory.
A high precision constant temperature and humidity microelectronic hundred-grade clean laboratory comprising: referring to fig. 1, 21 and 22, the laboratory outer wall assembly 4 is formed by enclosing a plurality of condensation-preventing aluminum honeycomb cold and heat radiation outer walls, each condensation-preventing aluminum honeycomb cold and heat radiation outer wall comprises a condensation-preventing aluminum honeycomb cold and heat radiation plate 8, a mounting pressing strip 89 and a color steel plate outer wall 810, and the condensation-preventing aluminum honeycomb cold and heat radiation plate 8 is mounted on the inner side surface of the color steel plate outer wall 810 in a lamination manner through the mounting pressing strip 89. The laboratory inner wall assembly 1 installed in the laboratory outer wall assembly 4, referring to fig. 1 and 18 to 20, an air channel is formed between the laboratory outer wall assembly 4 and the laboratory inner wall assembly 1, the laboratory inner wall assembly 1 is formed by enclosing a plurality of condensation-preventing aluminum honeycomb cold and heat radiation inner walls, each condensation-preventing aluminum honeycomb cold and heat radiation inner wall comprises a condensation-preventing aluminum honeycomb cold and heat radiation plate 8, a concave keel 87 and a keel connecting piece 88, wherein the two condensation-preventing aluminum honeycomb cold and heat radiation plates 8 are symmetrically embedded in the concave keel 87 and locked through the keel connecting piece 88. A top plate 18 arranged above the laboratory outdoor wall assembly 4, wherein an anti-condensation aluminum honeycomb cold and heat radiation plate 8 is arranged on the inner side of the top plate 18.
Referring to fig. 1 to 3, a photolithography machine 25, a fume hood 24 and a laboratory table 16 are installed on an antistatic floor 15 in the laboratory interior wall assembly 1, a wind speed sensor 13 and a smoke sensor 14 are installed at the top of the photolithography machine 25, and a TVOC sensor 10, a temperature and humidity sensor 11 and a CO are installed at the top of the laboratory interior wall assembly 1 2 The sensor 12, waterway pipeline 9 are installed between the clearance of laboratory interior wall assembly 1 and laboratory outer wall assembly 4, install gas circuit valve 26, camera 27, particle counter 28, intercom 29 and lighting switch 30 on the inner wall of laboratory interior wall assembly 1, be provided with safe airtight door 17 and buffering room airtight door 23 on the lateral wall of laboratory outer wall assembly 4, frozen inlet tube 19 and frozen water outlet pipe 22 are installed in the roof 18 outside, frozen inlet tube 19 has electric flow water valve 20, install temperature sensor 21 on the frozen water outlet pipe 22.
Referring to fig. 15 and 17, the condensation-preventing aluminum honeycomb cold and heat radiation plate 8 includes: the aluminum plate 81 is sprayed electrostatically, the aluminum honeycomb radiating plate 82 and the water-cooling loop pipe 83 are embedded and installed in the aluminum honeycomb radiating plate 82, the water-cooling loop pipe 83 is a copper pipe which is formed by one-step bending, no break joint exists, and the characteristics ensure that no water seepage and water leakage need to be maintained in the aluminum honeycomb radiating plate 82. The top delivery port and the water inlet of water-cooling return circuit pipe 83 extend to the outside of aluminium honeycomb radiation board 82, and water-cooling return circuit pipe 83 and aluminium honeycomb radiation board 82 butt joint department's hole intussuseption is filled with heat conduction sealant 85, ensures that water-cooling return circuit pipe 83 and aluminium honeycomb radiation board 82 butt joint department has good leakproofness, and the coupling is all installed to water-cooling return circuit pipe 83 top delivery port and water inlet, water-cooling return circuit pipe 83 top's delivery port and water inlet are connected with outside chilled water outlet pipe 22 and chilled water inlet pipe 19 respectively through the coupling to the water injection circulation in the water-cooling return circuit pipe 3, electric control water valve and temperature sensor are all installed to water-cooling return circuit pipe 83 top's delivery port and water inlet, and are connected with cold and hot radiation board flow control system. The drying agent 84 is filled in the honeycomb holes of the aluminum honeycomb radiation plate 82, the front and rear electrostatic spraying aluminum plates 81 are respectively attached to the front and rear sides of the aluminum honeycomb radiation plate 82, and the drying agent 84 is filled in the honeycomb Kong Litian of the aluminum honeycomb radiation plate 82, so that air in the honeycomb holes in the aluminum honeycomb radiation plate 82 sealed by the two-sided electrostatic spraying aluminum plates 81 is isolated from the outside, is always in a dry state, and cannot cause the condition of condensation and water seepage. The wiring grooves 86 penetrating through the top and the bottom of the aluminum honeycomb radiating plate 82 are embedded in the aluminum honeycomb radiating plate 82, so that the construction difficulty of threading wires or data transmission lines in the installation process is reduced, and the wiring attractiveness is enhanced.
The condensation-proof aluminum honeycomb cold and heat radiation plate 8 has reasonable design and simple structure, can keep continuous cold and heat conduction, radiation or absorption and convection, and prevents condensation and moisture regain on the surface of the plate. In actual operation, the water cooling loop pipe 83 can be used for cooling water with the temperature similar to that of the air conditioner control, and the cold and hot energy is conducted, radiated or absorbed by the aluminum honeycomb radiation plate 82, so that the temperature of the surface of the electrostatic spraying aluminum plate 81 can be always kept similar to that of the air conditioner control, and further condensation and anti-moisture phenomena on the surface of the electrostatic spraying aluminum plate 81 can be prevented. Because the surface of the electrostatic spraying aluminum plate 81 is subjected to electrostatic powder spraying operation, the heat radiation surface area of the aluminum honeycomb radiation plate 82 is increased, and meanwhile, the honeycomb Kong Litian of the aluminum honeycomb radiation plate 82 is filled with the drying agent 84, so that the air in the honeycomb holes in the aluminum honeycomb radiation plate 82 sealed by the two-sided electrostatic spraying aluminum plate 81 is isolated from the outside and always in a dry state, the condition of condensation and water seepage can not occur, the effects of preventing condensation and moisture regain on the surface are further improved, and the accurate control of the constant temperature and humidity environment in a microelectronic laboratory is facilitated.
Referring to fig. 4, the high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory further comprises a cold and heat radiation plate flow control system, the cold and heat radiation plate flow control system is arranged into four groups, and is respectively arranged on the inner side of an anti-condensation aluminum honeycomb cold and heat radiation outer wall, the outer side of an anti-condensation aluminum honeycomb cold and heat radiation inner wall, the inner side of the anti-condensation aluminum honeycomb cold and heat radiation inner wall and the inner side of a top plate 18 of the laboratory, the cold and heat radiation plate flow control system is respectively electrically connected with an electric adjusting water valve and a temperature sensor of a water outlet and a water inlet of a cold loop pipe arranged on the anti-condensation aluminum honeycomb cold and heat radiation plate 8, the cold and heat radiation plate flow control system controls the opening of the electric adjusting water valve in real time according to the return water temperature, controls the flow of the cold and heat radiation plate, realizes the adjustment of the return water temperature, and obtains the optimal water flow. The novel structural design of the flow control system of the cold and heat radiating plates can realize the dynamic fine adjustment control of the temperature of the water-cooling heat circulation system which is kept uninterrupted, the anti-condensation aluminum honeycomb cold and heat radiating plates 8 which are arranged on the inner side of the anti-condensation aluminum honeycomb cold and heat radiating outer wall, the outer side of the anti-condensation aluminum honeycomb cold and heat radiating inner wall and the inner side of the top plate 18 of a laboratory continuously realize the heat exchange of indoor air by convection, radiation or absorption and conduction with water medium in the cold and heat circulation system, realize the temperature regulation of the indoor air, have the characteristics of energy conservation, no condensation, no dust collection and little maintenance, and the air circulation channels formed at intervals between the inner wall and the outer wall do not need maintenance; when the temperature is reduced, the temperature of the inner side of the anti-condensation aluminum honeycomb cold and heat radiation outer wall is lower than that of indoor air, heat in the air is continuously absorbed and conducted into cooling water of a refrigerant circulation system, and the heat is discharged through a waterway circulation outer machine; when the temperature of the coolant circulation system is increased in the heating process, the heat of the circulating water is conducted, radiated and convected into indoor high-frequency internal circulation air through the aluminum honeycomb radiation plate, and the air temperature is uniformly regulated, so that the accurate control of the indoor constant temperature and humidity environment can be ensured.
Referring to fig. 1 to 6, the high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory further comprises a fresh air clean air conditioner control system arranged on the outer side of the top plate. Because of the precise control of temperature and relative humidity parameters in the traditional air conditioner control, it is difficult to ensure a certain control precision. In practice, due to certain coupling phenomena between temperature and relative humidity, namely under the condition of unchanged absolute moisture content, the temperature is increased, the relative humidity is reduced, the temperature is reduced, the relative humidity is increased, and due to the fact that the coupling of the temperature and the relative humidity and the process precision control are not strict enough, the phenomenon of mutual cancellation of cold and heat in the treatment process is caused, so that energy is greatly wasted. Based on the above, the fresh air clean air conditioner control system provided by the invention adopts the dew point temperature calculated by the temperature and the relative humidity required by a clean laboratory as a target control value, and avoids the phenomenon of energy source large waste caused by mutual cancellation of cold and heat in the treatment process due to the fact that the coupling of the temperature and the relative humidity and the process precision control are not strict enough.
The fresh air clean air conditioner control system is used for acquiring temperature and relative humidity values in hundred-grade clean rooms in real time, drawing an enthalpy-humidity diagram, dividing the enthalpy-humidity diagram into different meteorological partitions according to isenthalpic lines and isomoisture content lines according to indoor temperature and humidity parameter requirements, calculating dew point temperature according to indoor temperature and relative humidity requirements to be target values, and controlling outdoor fresh air parameters according to different external environments corresponding to air conditioner working conditions so as to achieve indoor temperature and humidity indexes required by the clean rooms.
Referring to fig. 5 and 6, the fresh air clean air conditioner control system includes an outdoor fresh air temperature and humidity treatment device 7, the outdoor fresh air temperature and humidity treatment device 7 is formed by splicing a first outer shell 71, a second outer shell 72 and a third outer shell 73, the first outer shell 71, the second outer shell 72 and the third outer shell 73 are square stainless steel boxes with left and right open ends, and four airtight surfaces including front, back, upper and lower surfaces, and an air inlet chamber 74 and a first air inlet chamber are sequentially arranged in the first outer shell 71 along the air flow directionThe filter chamber 75, the preheating chamber 76 and the first surface cooling chamber 77, wherein a filter assembly is installed in the first filter chamber 75, the filter assembly comprises a primary filter, a chemical filter module and a middle-effect filter which are sequentially arranged along the gas flow direction, and in actual working, large particle impurities, dust and the like contained in air can be removed by filtering through the primary filter and the middle-effect filter, and chemical pollutants NO possibly contained in the air can be removed through chemical reaction by the arranged special chemical filter module applying the chemical molecular gas phase filtration technology x 、SO 2 、H 2 S, etc. An electric heating tube is installed in the preheating chamber 76, the preheating chamber 76 is used for preheating filtered air to a set temperature, an evaporating coil is installed in the first surface cooling chamber 77, and the evaporating coil is used for controlling the humidity of the air in the first surface cooling chamber 77. The second casing 72 is provided with a humidifying chamber 78, a second surface cooling chamber 79 and a reheating chamber 710 in sequence along the gas flowing direction, the humidifying chamber 78 is provided with a humidifier, and the humidifying chamber 78 is used for performing necessary humidifying operation on the air evaporated by the first surface cooling chamber 77 so as to better control the air humidity. An evaporation coil is installed in the second surface cooling chamber 79, and the second surface cooling chamber 79 is used for performing surface evaporation on the humidified air again so as to more accurately control the humidity in the air. An electric heating tube is installed in the reheating chamber 710, and air can be precisely heated to a required temperature through the electric heating tube installed in the reheating chamber 710. A fan chamber 711, a high-efficiency filter chamber 712 and an air outlet chamber 713 are sequentially arranged in the third outer shell 73 along the air flow direction, an EC fan is installed in the fan chamber 711, and when in actual work, suction force is generated through the EC fan to control the air flow direction. The high-efficiency filter is installed in the high-efficiency filter chamber 712, and the high-efficiency filter can filter tiny impurities in the air, so that the cleanliness of the air is further improved.
Referring to fig. 5 and 6, a first differential pressure switch 714 is installed on the first casing 71 between the air inlet chamber 74 and the first filtering chamber 75, a second differential pressure switch 721 is installed at the air inlet of the fan chamber 711, and a third differential pressure switch 722 is installed between the air outlet of the fan chamber 711 and the high efficiency filtering chamber 712. In the actual working process, only after the suction force is generated by the EC fan installed in the fan chamber 711, the first pressure difference switch 714, the second pressure difference switch 721 and the third pressure difference switch 722 are started, the first pressure difference switch 714, the second pressure difference switch 721 and the third pressure difference switch 722 are automatically opened, and if the pressure difference does not reach the set values of the first pressure difference switch 714, the second pressure difference switch 721 and the third pressure difference switch 722, the first pressure difference switch 714, the second pressure difference switch 721 and the third pressure difference switch 722 are in the closed state, and the whole system is also in the closed state. A water inlet pipe and a water outlet pipe which are communicated with the evaporation coil pipe in the first surface cooling chamber 77 are arranged on the first outer shell 71 and are positioned at the first surface cooling chamber 77, and a first electric adjusting water valve 715 and a second electric adjusting water valve 716 are respectively arranged on the water inlet pipe and the water outlet pipe. In actual operation, the evaporation amount of the moisture in the air can be controlled by controlling the opening of the first electric adjusting water valve 715 and the opening of the second electric adjusting water valve 716, so that the accurate control of the air humidity is realized. A first temperature and humidity sensor 717 and an enthalpy sensor 718 are mounted on the second housing 72 at the humidifying chamber 78, and a second temperature and humidity sensor 723 is mounted on the third housing 73 at the air outlet chamber 713. In actual operation, the humidity and enthalpy of the air in the humidification chamber 78 may be accurately collected by the first temperature and humidity sensor 717 and the enthalpy sensor 718 to provide parameters for subsequent control. The humidity of the air in the outlet chamber 713 may be accurately sensed by the second temperature and humidity sensor 723 to provide parameters for subsequent accurate control.
In actual operation, the central control system of the microelectronic laboratory is respectively connected with the first differential pressure switch 714, the first electric adjusting water valve 715, the second electric adjusting water valve 716, the first temperature and humidity sensor 717, the enthalpy sensor 718, the third electric adjusting water valve 719, the fourth electric adjusting water valve 720, the second differential pressure switch 721, the third differential pressure switch 722 and the second temperature and humidity sensor 723 through signal control lines, so as to obtain the temperature and relative humidity values in the hundred-level clean room in real time. And then drawing an enthalpy-humidity diagram, dividing the enthalpy-humidity diagram into four meteorological partitions, namely an air-conditioning working condition area, according to an isenthalpic line and an isenthalpic moisture content line, wherein the air-conditioning working condition area I is a temperature increasing and humidifying working condition, the air-conditioning working condition area II is a cooling and humidifying working condition, the air-conditioning working condition area III and the air-conditioning working condition area IV are cooling and dehumidifying working conditions, and the air-conditioning working conditions correspond to different external environments to realize indoor temperature-humidity demand control. The fresh air conditioning box takes the dew point temperature calculated by the temperature and the relative humidity of the indoor demand as a target value, and controls the outdoor fresh air parameter according to different external environments corresponding to the working condition of the air conditioner, and then the fresh air parameter is mixed with return air passing through the aluminum honeycomb radiation plate, so that the indoor temperature and humidity index of the clean room demand is achieved.
When the external environment air is in the air conditioner working condition I area, the temperature rising and humidifying treatment is carried out on the outdoor air: the second electric adjusting water valve 716 of the first surface cooling chamber 77 and the third electric adjusting water valve 719 on the reheating chamber 710 are closed, the first electric adjusting water valve 715 on the preheating chamber 76 and the humidifier in the humidifying chamber 78 are opened, the opening of the first electric adjusting water valve 715 on the preheating chamber 76 is controlled according to the enthalpy value of the enthalpy value sensor 718 before the humidifying chamber 78, the opening of the third electric adjusting water valve 719 at the reheating chamber 710 is controlled through the second temperature and humidity sensor 723 temperature set value of the downstream air outlet section of the high-efficiency filtering chamber 712, and then the fresh air reaching the target parameter is uniformly mixed with the return air processed by the condensation-preventing aluminum honeycomb cold and heat radiation plate 8 and sent to the clean chamber when the fresh air reaches the top of the clean chamber.
When the external environment air is in the air conditioner working condition II area, the outdoor air is cooled and humidified: closing a first electric regulating water valve 715 on the preheating chamber 76, opening a second electric regulating water valve 716 of the first surface cooling chamber 77 and a humidifier of the humidifying chamber 78, controlling the opening of the second electric regulating water valve 716 of the first surface cooling chamber 77 according to the enthalpy value of an enthalpy value sensor 718 before the humidifying chamber 78, and controlling the opening of a third electric regulating water valve 719 at the position of the reheating chamber 710 through the temperature set value of a second temperature and humidity sensor 723 of an air outlet section downstream of the high-efficiency filtering chamber 712, so that fresh air reaching target parameters is uniformly mixed with return air processed by an anti-condensation aluminum honeycomb cold and heat radiation plate 8 and is sent to the clean chamber when the fresh air reaching target parameters is sent to the top of the clean chamber.
When the external environment air is in the air conditioning working condition III area and the air conditioning working condition IV area, the outdoor air is required to be cooled and dehumidified: closing a first electric regulating water valve 715 of the preheating chamber 76, opening a second electric regulating water valve 716 of the first surface cooling chamber 77, a fourth electric regulating water valve 720 on the second surface cooling chamber 79 and a humidifier of the humidifying chamber 78, regulating the opening of the second electric regulating water valve 716 according to the set temperature after the surface cooling coil is arranged at the first surface cooling chamber 77, reducing the temperature and the moisture content of the air to be treated by using the medium-temperature chilled water, and then uniformly mixing the fresh air reaching the target parameters with the return air treated by the condensation-preventing aluminum honeycomb cold-heat radiation plate 8 when the fresh air reaches the top of the clean chamber according to the opening of the fourth electric regulating water valve 720 at the second surface cooling chamber 79 with the low-temperature chilled water in the air supply dew point regulation by the humidifier of the humidifying chamber 78. Therefore, accurate control of the temperature and humidity requirements in the laboratory is realized according to different external environments corresponding to the working conditions of the air conditioner.
The fresh air clean air conditioner control system is reasonable in design and convenient to operate, can process outdoor fresh air entering a laboratory, and is convenient for precisely controlling the constant temperature and humidity environment in a microelectronic laboratory. In actual operation, the EC blower installed in the blower chamber 711 generates a suction force, so that the outdoor air sequentially passes through the air inlet chamber 74, the first filter chamber 75, the preheating chamber 76, the first surface cooling chamber 77 in the first outer housing 71, the humidifying chamber 78, the second surface cooling chamber 79 and the reheating chamber 710 in the second outer housing 72, the blower chamber 711, the high-efficiency filter chamber 712 and the air outlet chamber 713 in the third outer housing 73, and finally enters the room of the microelectronic laboratory through the outdoor air distribution device 5. When the outdoor air passes through the first filtering chamber 75, the large-particle impurities, dust and polluted chemical gas possibly contained in the outdoor air are filtered through the filter assembly installed in the first filtering chamber 75, then enter the preheating chamber 76, the air is preheated to a set temperature through the electric heating tube installed in the preheating chamber 76, then enter the first surface cooling chamber 77, the humidity of the air is controlled through the evaporating coil installed in the first surface cooling chamber 77, then the humidity of the air is regulated and controlled again through the humidifying chamber 78, the humidified air enters the second surface cooling chamber 79, the precise humidity control is carried out again through the evaporating coil installed in the second surface cooling chamber 79, the air with the precise control of the humidity is conveyed to the reheating chamber 710 for precise temperature regulation, then the air enters the room of the microelectronic laboratory through the air outlet chamber 713 after the efficient filtration of the efficient filter in the efficient filter, the humidity and stable fresh air are provided for the microelectronic laboratory, the humidity and the humidity of the new air are reduced, and the humidity of the fresh air in the microelectronic laboratory is convenient to control the constant humidity and the humidity of the constant humidity environment in the microelectronic laboratory.
Referring to fig. 1 to 14, the high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory further comprises: FFU amount of wind and floor return air amount of wind control system, FFU amount of wind and floor return air amount of wind control system are used for carrying out the fine setting control of amount of wind according to the field conditions grouping system, through installing wind speed sensor 219 in the FFU filter unit of face of blowing, install electric air regulating valve 6 under the antistatic floor of return air, set up suitable face wind speed at the touch-sensitive screen system, real-time detection system laminar face wind speed, two sets of FFU filter unit are in real time according to the face wind speed of face wind speed sensor 219 feedback, increase or reduce the fan amount of wind, in order to reach FFU amount of wind fine setting control, electric air regulating valve 6 aperture of return air is fine setting again appropriately, make the even unanimity of the wind speed of FFU air supply level and floor return air level in the laboratory.
In the FFU air quantity and floor return air quantity control system, each FFU filter unit is regulated and controlled by a controller. The controller is arranged on the FFU filter unit, directly obtains a working power supply from the FFU filter unit, is connected with a motor of the FFU filter unit in situ by a two-core cable, and provides a speed regulation power supply for the motor. The controller may detect the motor status and generate status information. Each FFU filter train controller has an RS485 interface for communicating with the central controller, receiving commands and returning to motor status. On a twisted pair, at most 256 FFU controllers are allowed to be connected simultaneously, and the controllers are distinguished by address codes. In other words, 256 FFUs can be controlled simultaneously, forming a network. The central controller is communicated with the master control system through TCP/IP, and the master control system can control each FFU filter unit or control the FFU filter units in groups and display the working state and fault information of the FFU filter units. The system has less wiring and convenient maintenance in future. One FFU filter unit fails, and the work of other FFU filter units cannot be influenced.
Referring to fig. 7 to 14, the FFU air volume and floor return air volume control system includes: the outdoor air distribution device 5 is arranged on the outer side of the top of the laboratory outer wall assembly 4, and the outdoor air distribution device 5 is used for uniformly distributing constant temperature and humidity fresh air processed by the fresh air clean air conditioner control system to the top of the laboratory inner wall assembly 1. Install FFU air supply control system 2 at laboratory interior wall assembly 1 top, FFU air supply control system 2 comprises a plurality of FFU filter units of installing at laboratory interior wall assembly 1 top and square matrix distribution, FFU filter unit that is square matrix distribution in the FFU air supply control system 2 divide into three FFU air supply wind speed regulation and control combination I201, FFU air supply wind speed regulation and control combination II 202 and FFU air supply wind speed regulation and control combination III 203 that can independent control according to the difference of air supply region, and wind speed sensor 219 is all installed to the air outlet of every FFU filter unit.
Referring to fig. 9 to 14, the FFU filter unit includes FFU filter unit body 211, chemical purification module 213, high efficiency filter 214 and aluminium alloy fossil fragments subassembly, aluminium alloy fossil fragments subassembly is formed by four aluminium alloy fossil fragments 218 end to end concatenations, and aluminium alloy fossil fragments 218 end to end concatenation department passes through fossil fragments connecting piece 216 fixed connection, wherein, the left and right sides of every aluminium alloy fossil fragments 218 all is provided with inserted sheet butt joint hook piece 2182, aluminium alloy inserted sheet 217 passes through the hooked position and fixes on aluminium alloy fossil fragments 218 and outwards protrudes with inserted sheet butt joint hook piece 2182, and the top of every aluminium alloy fossil fragments 218 all is provided with top hook groove 2181, and the bottom of suspender subassembly 215 is hung on the roof of the outdoor wall assembly through the top hook groove 2181 of T type screw 2153 embedding aluminium alloy fossil fragments 218, suspender subassembly 215 includes suspender 2151, suspender mounting frame 2152 and T type screw 2153, the top locking of T type screw 2153 is installed in the bottom of mounting frame 2, and the top of suspender 2151 is hung on the roof of the top of the quick-lock assembly 2151 through the top hook groove 2151 of suspender subassembly. And each aluminum profile keel 218 is suspended on the top plate of the laboratory outdoor wall assembly through two suspension rod assemblies 215, so that the hoisting balance and stability of each aluminum profile keel 218 are ensured.
The high-efficiency filter 214 is attached to the bottom of the chemical purification module 213, the chemical purification module 213 is attached to the bottom of the FFU filter unit body 211, and four end edges of the high-efficiency filter 214 are respectively placed on four aluminum profile inserting sheets 217 inserted into four aluminum profile keels 218. Two stainless steel safety bolts 212 are correspondingly arranged on the front side and the rear side of the FFU filter unit body 211 respectively, an outward protruding inserting needle is arranged in each stainless steel safety bolt 212, when the FFU filter unit body 211 is mounted in practice, the inserting needle of the stainless steel safety bolt 212 keeps a protruding state, and when a certain aluminum profile inserting sheet 217 on a keel is out of question, the inserting needle on the safety bolt 212 can be supported by other intact aluminum profile inserting sheets 217 in the falling process of the FFU filter unit body 211, so that safety accidents are prevented. The handle 2110 is installed at the top of the FFU filter unit body 211 to facilitate the transportation of the FFU filter unit body 211. A wind speed sensor 219 is installed at the bottom of the high-efficiency filter 214, so that accurate monitoring of wind speed at the high-efficiency filter 214 is facilitated.
In this embodiment, the FFU filter unit body 211 includes a housing 2111, a fan 2113 is installed in the housing 2111, an air inlet 2112 is provided at a position opposite to the fan 2113 at the top of the housing 2111, and a deflector 2114 is installed at an air outlet of the fan 2113. In actual operation, the outdoor air distribution device 5 is operated to suck air from the air inlet 2112, the power of the fan 2113 is controlled to control the air quantity of the air, and the air is guided by the guide vane 2114 and then supplied to the interior wall assembly 1 of the laboratory.
In this embodiment, the chemical purification module 213 is filled with a high specific surface area, microporous, fine aluminum oxide filter substrate, the surface of which is impregnated with highly oxidized potassium permanganate and potassium hydroxide. In actual operation, potassium permanganateAnd potassium hydroxide molecules are fully permeated and firmly adsorbed on the inner surfaces of the micropores of the alumina filter substrate, and when acid and organic chemical gas molecules pass through the capillary micropores, various acid chemical pollution gases and volatile organic pollution gases generated in the manufacturing and cleaning processes of microelectronic components can be efficiently removed through oxidation-reduction and neutralization reactions, such as: chlorine, HCL, HF, H 2 NO 3 The harmless salt solid generated by hydrogen bromide, silane, dichlorosilane, disilane, boron trifluoride, phosphane, arsine and the like is remained in the micropores of the substrate, and no hazardous waste is formed. The invention adds a special chemical purifying module 213. The circulating ventilation times of more than 300 per hour are ensured to air hundred-grade cleanliness and low-concentration chemical pollution gas in a microelectronic laboratory under the comprehensive technical application of an ultra-efficient (purification efficiency is 99.9995%) particle pollutant purification system and a chemical purification module 213 of a special formula, so that the interference factor in the process of a microelectronic chip element experimental sample is reduced.
The invention greatly facilitates the installation and the disassembly of the FFU fan filter screen unit through the structural design of the FFU filter screen unit. In actual installation, four aluminum profile keels 218 are spliced end to form an aluminum profile keel assembly by means of keel connectors 216, then the assembled aluminum profile keel assembly is hung on a top plate of a laboratory by means of hanging rod assemblies 215, then an efficient filter 214, a chemical purification module 213 and an FFU filter unit body 211 are installed into an integrated FFU assembly, the FFU assembly is placed on an elevator platform, the FFU assembly is lifted to the upper side of the aluminum profile keel assembly through a frame hole in the center of the aluminum profile keel assembly by means of the elevator platform, then the aluminum profile inserting sheet 217 is inserted into a groove of an inserting sheet butt-joint hook piece 2182 of the aluminum profile keel 218 in an inclined position, the rotating aluminum profile inserting sheet 217 is horizontally pushed in, pulled outwards after the upward movement and pushed inwards downwards, the inserting sheet butt-joint hook piece 2182 is tightly hooked with the hook position of the aluminum profile inserting sheet 217, the aluminum profile inserting sheet 217 is tightly connected to the aluminum profile keel 218, the aluminum profile inserting sheet 217 is used as a supporting piece of the FFU assembly, the elevator platform is controlled to descend, the aluminum profile inserting sheet 217 is inserted into an FFU assembly in a supporting groove, and the FFU assembly is protruded outwards on the FFU assembly in the descending process, and the FFU assembly is achieved. When the FFU component is required to be disassembled, only the lifter platform is required to be used for jacking the FFU component, the aluminum profile inserting sheet 217 is reversely operated, the aluminum profile inserting sheet 217 is separated from the aluminum profile keel 218, and then the FFU component is lowered to the ground from the frame hole in the center of the aluminum profile keel component through the lifter platform, so that the FFU fan filter screen unit is greatly convenient to install and disassemble.
In this embodiment, FFU amount of wind and floor return air amount of wind control system still includes the floor return air control system 3 of installing in laboratory interior wall assembly 1 bottom, floor return air control system 3 comprises the antistatic floor 15 of polylith installation in laboratory interior wall assembly bottom and square matrix distribution, and every antistatic floor 15 surface all evenly has seted up the wind hole, but the antistatic floor 15 that is square matrix distribution in the floor return air control system divide into three independent control's ground return air wind speed regulation and control combination I31, ground return air wind speed regulation and control combination II 32 and ground return air wind speed regulation and control combination III 33 according to the difference in return air region, and electric air quantity regulating valve 6 is all installed to the below of every antistatic floor 15. In this embodiment, the FFU supply air speed regulation and control combination i 201 corresponds to peripheral units of the FFU filter units distributed in a square matrix, and corresponds to a return air area of the ground return air speed regulation and control combination i 31 in the floor return air control system 3; the FFU air supply and wind speed regulation and control combination II 202 corresponds to the middle unit of the FFU filter units distributed in a square matrix and corresponds to the air return area of the ground air return wind speed regulation and control combination II 32 in the floor air return control system 3; the FFU air supply and wind speed regulation and control combination III 203 corresponds to a central unit of FFU filter units distributed in a square matrix and corresponds to a return air area of the ground return air speed regulation and control combination III 33 in the floor return air control system 3. Through the corresponding arrangement of the FFU air supply and air speed regulation combination I201, the ground air return and air speed regulation combination I31, the FFU air supply and air speed regulation combination II 202, the ground air return and air speed regulation combination II 32 and the FFU air supply and air speed regulation combination III 203 and the ground air return and air speed regulation combination III 33, the air speed control of different areas in the FFU air supply layer surface and the floor air return layer surface is facilitated, and stable and uniform air supply and air return speeds are formed.
The FFU air quantity and floor return air quantity control system further comprises a central controller, wherein the central controller is electrically connected with each FFU filter unit, each air speed sensor 219 and each electric air quantity regulating valve 6 respectively, and the central controller sets the return air quantity of the corresponding electric air quantity regulating valve 6 below the antistatic floor according to the air speed data collected by the air speed sensors 219, so that the air speeds of the FFU air supply layer and the floor return air layer are uniform.
The high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory can ensure the air hundred-grade cleanliness and low-concentration chemical pollution gas in the microelectronic laboratory through the innovative design of the FFU air quantity and floor return air quantity control system, reduce interference factors in the process of microelectronic chip element experimental samples and improve the laboratory working environment of scientific researchers; the unique FFU upper air supply and lower return air volume automatic control fine adjustment system ensures uniformity of air volume and air speed from top to bottom. In actual operation, the outside treated air is firstly distributed to the FFU air supply control system 2 arranged at the top of the laboratory interior wall assembly 1 through the air duct between the laboratory exterior wall assembly 4 and the top of the laboratory interior wall assembly 1 by the outdoor air distribution device 5, the FFU air supply control system 2 is composed of a plurality of FFU filter units which are arranged at the top of the laboratory interior wall assembly and distributed in square matrix, and are divided into three FFU air supply speed regulation and control combinations I201, FFU air supply speed regulation and control combinations II 202 and FFU air supply speed regulation and control combinations III 203 which can be independently controlled according to different air supply areas, the air quantity and the air return speed of the FFU air supply speed regulation and control combinations I201, FFU air supply speed regulation and control combinations II 202 and FFU air supply speed regulation and control combinations III 203 can be controlled by independent control of each FFU filter unit in the FFU air supply speed regulation and control combinations I201, FFU air supply speed regulation and control combinations II 202 and III corresponding to the air quantity and air speed of the air supply area (the air speed sensors arranged at the air outlet of the FFU filter units) and the air speed of the air return air speed level II can be obtained by controlling the air speed sensors arranged at the air outlet of the air filter units in the air supply areas, then the floor surface area 31, the air return air speed regulation and control combinations II and control combinations III are uniform to control the air quantity level 32 in the floor surface area 32 and the air return air speed regulation and control combinations, and control combinations of the air speed II, and air level 32, the utility model provides an in the prior art in the laboratory internal circulation wind from the static floor aperture return air of laboratory interior wall assembly 1 bottom to the wind channel that laboratory outer wall formed the time of the roof between FFU fan filter unit and the outer wall assembly of laboratory again, because wind channel structure causes the wind pressure to decrease, lead to the wind speed of returning air on the static floor of foraminiferous in the whole laboratory and the inhomogeneous of wind speed of whole FFU air supply face, the local amount of wind and wind speed can be bigger defect more near the interior wall periphery, the fluctuation of air flow has been reduced, the quality stability of chip product has been improved.
Referring to fig. 4, the high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory further comprises: CO 2 Positive pressure control system in comfort level exhaust and supplement chamber, and CO 2 CO (carbon monoxide) installed in comfort level exhaust and air supplementing chamber through laboratory by positive pressure control system 2 Sensor, differential pressure sensor, real-time detection laboratory CO 2 Concentration of CO 2 When the concentration is too high, the fresh air quantity of the system is increased in real time, and when the concentration is too high, the system is used for generating CO 2 When the concentration is in a comfortable range, the fresh air quantity is regulated, the pressure in the laboratory is detected in real time through the pressure difference sensor while the fresh air quantity of the air supplement is regulated, and the opening of the exhaust valve is regulated in real time according to the pressure parameter, so that the comfort level of the laboratory and the positive pressure stability of the system are controlled.
In this embodiment, the air exhausting and supplementing adopts a mode of upper air supply and lower air return. The air supplement is processed by the fresh air clean air conditioner control system and then sent to a laboratory, and the air supplement quantity is configured according to the people's average of no less than 40m 3/h. System real-time detection of CO 2 Concentration of CO 2 When the concentration is too high, the fresh air quantity of the system is increased in real time, and when the concentration is too high, the system is used for generating CO 2 And when the concentration is in the comfort range, the fresh air quantity is adjusted back. When the fresh air quantity of the air supplement is regulated, the system detects the room pressure in real time through the differential pressure sensor, and the opening of the exhaust valve is regulated in real time according to the precompression parameter so as to control the comfort level of a laboratory and the positive pressure stability of the system. Indoor air is connected to the exhaust main pipe of the whole laboratory through the exhaust valve in a butt joint way, and purification is performed After treatment, the mixture is discharged to the atmosphere.
Referring to fig. 4, the high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory further comprises: and the air-conditioning water circulation control system adjusts the opening of a bypass electric butterfly valve arranged on the laboratory circulating water supply main pipe and the return water main pipe through a three-position floating point control method, so that the pressure difference between the laboratory circulating water supply main pipe and the return water main pipe is always kept within the range of a set value allowable error. When the water pump is actually in operation, the circulating water pump is dual-purpose, and when no fault occurs, the system automatically selects the water pump with shorter operation time to start according to the operation time of the water pump when the water pump is started next time. When the failure occurs, the system will ignore the operation time strategy and immediately start each water pump, so as to reduce the heat load brought to the cooling module machine by the failure of the water pump as much as possible.
Referring to fig. 4, the high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory further comprises: a lighting system that controls illumination of the laboratory through a touch screen control or a panel switch.
Referring to fig. 4, the high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory further comprises: the central control system is respectively connected with the fresh air clean air conditioner control system, the FFU air quantity and floor return air quantity control system and the CO 2 The positive pressure control system, the cold and heat radiation plate flow control system, the air conditioner water circulation control system and the lighting system in the comfort level exhaust and supplement chamber are connected. The central control system is used as the control brain of the high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory and is mainly used for coordinating the fresh air clean air conditioner control system, the FFU air quantity and the floor return air quantity control system and the CO 2 The positive pressure control system, the cold and heat radiation plate flow control system, the air conditioner water circulation control system and the connecting lighting system in the comfort level exhaust and supplementing chamber operate according to a set program.
The high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory controls the system, the FFU air quantity and the floor return air quantity and controls the system and the CO of the fresh air clean air conditioner 2 Positive pressure control system in comfort level exhaust and supplement air chamber, cold and heat radiation plate flow control system and air conditionerThe innovative design of the water-regulating circulation control system and the lighting system can realize the precise control of the environment with constant temperature and humidity and uniform wind speed in the microelectronic laboratory, ensure the air hundred-level cleanliness and low-concentration chemical pollution gas in the microelectronic laboratory, and reduce the interference factors in the process of the microelectronic chip element experimental sample.
The foregoing is a preferred embodiment of the present invention, but the present invention should not be limited to the embodiment and the disclosure of the drawings, so that the equivalents and modifications can be made without departing from the spirit of the disclosure.

Claims (10)

1. A high precision constant temperature and humidity microelectronic hundred-grade clean laboratory, characterized by comprising:
the laboratory outer wall assembly is formed by shielding a plurality of anti-condensation aluminum honeycomb cold and heat radiation outer walls, each anti-condensation aluminum honeycomb cold and heat radiation outer wall comprises an anti-condensation aluminum honeycomb cold and heat radiation plate, an installation pressing strip and a color steel plate outer wall, and the anti-condensation aluminum honeycomb cold and heat radiation plate is attached to the inner side surface of the color steel plate outer wall through the installation pressing strip;
install the laboratory interior wall assembly in the outer wall assembly of laboratory, form the wind channel between laboratory outer wall assembly and the laboratory interior wall assembly, the laboratory interior wall assembly is enclosed by the cold and hot radiation interior wall of polylith anti-condensation aluminium honeycomb and is covered, and every anti-condensation aluminium honeycomb cold and hot radiation interior wall all includes anti-condensation aluminium honeycomb cold and hot radiation board, concave fossil fragments and fossil fragments connecting piece. Wherein, two anti-condensation aluminum honeycomb cold and heat radiation plates are symmetrically embedded and installed in the concave keel and locked by the keel connecting piece;
The top plate is arranged above the outer wall assembly of the laboratory, and the anti-condensation aluminum honeycomb cold and heat radiation plate is arranged on the inner side of the top plate;
the fresh air clean air conditioner control system is used for acquiring temperature and relative humidity values of hundred-grade clean rooms in real time, drawing an enthalpy-humidity diagram, dividing the enthalpy-humidity diagram into different meteorological partitions according to isenthalpic lines and isomoisture content lines according to indoor temperature and humidity parameter requirements, calculating dew point temperature which is obtained by calculating the indoor required temperature and relative humidity to be a target value, and controlling outdoor fresh air parameters according to different external environments corresponding to air conditioning working conditions so as to achieve indoor temperature and humidity indexes required by the clean rooms;
the outdoor air distribution device is arranged on the outer side of the top of the laboratory outer wall assembly and is used for uniformly distributing constant-temperature and constant-humidity fresh air processed by the fresh air clean air conditioner control system to the top of the laboratory inner wall assembly;
the FFU air quantity and floor return air quantity control system is arranged in an outdoor wall combination body of the test chamber and is used for carrying out air quantity fine adjustment control according to a field condition grouping system, an air speed sensor is arranged in an FFU filter unit of an air blowing face, an electric air quantity regulating valve is arranged under an anti-static floor of return air, a proper face air speed is set in a touch screen system, laminar face air speed of the system is detected in real time, fan air quantity is increased or reduced by two FFU filter units in real time according to the face air speed fed back by the face air speed sensor so as to achieve FFU air quantity fine adjustment control, and the opening of an electric air quantity regulating valve of return air is properly fine-adjusted, so that the air speeds of an FFU air blowing face and a floor return air face in a laboratory are uniform.
2. The high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory as claimed in claim 1, further comprising a cold and heat radiation plate flow control system, wherein the cold and heat radiation plate flow control system is arranged into four groups, and is respectively arranged on the inner side of an anti-condensation aluminum honeycomb cold and heat radiation outer wall, the outer side of an anti-condensation aluminum honeycomb cold and heat radiation inner wall, the inner side of an anti-condensation aluminum honeycomb cold and heat radiation inner wall and the inner side of a top plate of the laboratory, the cold and heat radiation plate flow control system is respectively electrically connected with an electric adjusting water valve and a temperature sensor of a water outlet and a water inlet at the top of a cold loop pipe arranged on the anti-condensation aluminum honeycomb cold and heat radiation plate, and the cold and heat radiation plate flow control system is used for controlling the opening of the electric adjusting water valve in real time according to the backwater temperature, controlling the flow of the cold and heat radiation plate, realizing the adjustment of backwater temperature and obtaining the optimal water flow.
3. The high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory according to claim 1 or 2, wherein the condensation-preventing aluminum honeycomb cold and heat radiation plate comprises an electrostatic spraying aluminum plate, an aluminum honeycomb radiation plate and a water cooling loop pipe, the water cooling loop pipe is embedded and installed in the aluminum honeycomb radiation plate, a top water outlet and a water inlet of the water cooling loop pipe extend to the outer side of the aluminum honeycomb radiation plate, heat-conducting sealant is filled in a pore at the butt joint position of the water cooling loop pipe and the aluminum honeycomb radiation plate, drying agents are filled in honeycomb holes of the aluminum honeycomb radiation plate, a front electrostatic spraying aluminum plate and a rear electrostatic spraying aluminum plate are respectively attached and installed on the front side and the rear side of the aluminum honeycomb radiation plate, water pipe connectors are installed at the top water outlet and the water inlet of the water cooling loop pipe, the water outlet and the water inlet at the top of the water cooling loop pipe are connected with an external circulating water pipe through water pipe connectors, and an electric regulating water valve and a temperature sensor are installed at the water outlet and the water inlet at the top of the water cooling loop pipe.
4. The high-precision constant temperature and humidity microelectronic hundred-level clean laboratory is characterized in that the fresh air clean air conditioning control system comprises an outdoor fresh air temperature and humidity treatment device, wherein the outdoor fresh air temperature and humidity treatment device is formed by splicing a first outer shell, a second outer shell and a third outer shell, an air inlet chamber, a first filter chamber, a preheating chamber and a first surface cooling chamber are sequentially arranged in the first outer shell along the air flow direction, a filter assembly is arranged in the first filter chamber, an electric heating tube is arranged in the preheating chamber, an evaporation coil is arranged in the first surface cooling chamber, a humidifying chamber, a second surface cooling chamber and a reheating chamber are sequentially arranged in the second outer shell along the air flow direction, a humidifier is arranged in the second surface cooling chamber, an electric heating tube is arranged in the reheating chamber, a fan chamber, a high-efficiency air outlet chamber, an EC fan and a high-efficiency filter are sequentially arranged in the third outer shell along the air flow direction, and the high-efficiency filter is arranged in the fan chamber; a first differential pressure switch is arranged between the air inlet chamber and the first filtering chamber on the first shell body, a second differential pressure switch is arranged at the air inlet of the fan chamber, and a third differential pressure switch is arranged between the air outlet of the fan chamber and the high-efficiency filtering chamber; a water inlet pipe and a water outlet pipe which are communicated with an evaporation coil pipe in the first surface cooling chamber are arranged on the first outer shell and are respectively provided with a first electric adjusting water valve and a second electric adjusting water valve; the first temperature and humidity sensor and the enthalpy sensor are arranged on the second outer shell body and located at the humidifying chamber, and the second temperature and humidity sensor is arranged on the third outer shell body and located at the air outlet chamber.
5. The high-precision constant temperature and humidity microelectronic hundred-level clean laboratory as claimed in claim 1 or 4, wherein the FFU air quantity and floor return air quantity control system comprises an FFU air supply control system arranged at the top of a laboratory interior wall assembly, the FFU air supply control system consists of a plurality of FFU filter units which are arranged at the top of the laboratory interior wall assembly and distributed in square matrix, the FFU filter units distributed in square matrix in the FFU air supply control system are divided into three FFU air supply air speed regulation and control combinations I, II and III which can be independently controlled according to different air supply areas, and an air outlet of each FFU filter unit is provided with an air speed sensor; the floor return air control system is arranged at the bottom of the laboratory interior wall assembly and consists of a plurality of anti-static floors which are arranged at the bottom of the laboratory interior wall assembly and distributed in a square matrix, the surfaces of each anti-static floor are uniformly provided with air holes, the anti-static floors which are distributed in a square matrix in the floor return air control system are divided into three independently controllable ground return air speed regulation and control combinations I, ground return air speed regulation and control combinations II and ground return air speed regulation and control combinations III according to different return air areas, and an electric air quantity regulating valve is arranged below each anti-static floor; the central controller is electrically connected with each FFU filter unit, each wind speed sensor and each electric air quantity regulating valve respectively, and the central controller sets the air return quantity of the corresponding electric air quantity regulating valve below the antistatic floor according to the wind speed data collected by the wind speed sensors, so that the wind speeds of the FFU air supply layer and the floor air return layer are uniform and consistent.
6. The high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory of claim 5, wherein the FFU filter unit comprises an FFU filter unit body, a chemical purification module, high-efficiency filters and aluminum profile keel components, the aluminum profile keel components are formed by splicing four aluminum profile keels in an end-to-end mode, the splicing parts of the aluminum profile keels are fixedly connected through keel connecting pieces, the left side and the right side of each aluminum profile keel are respectively provided with an inserting piece butt-joint hook piece, the aluminum profile inserting pieces are fixed on the aluminum profile keels and protrude outwards after being matched with the inserting pieces butt-joint hook pieces through hook positions, the top of each aluminum profile keel is provided with a top hook groove, the bottom of each suspender component is embedded into the top hook groove of the aluminum profile keels through a T-shaped screw, the top of each suspender component is suspended on the top plate of the outdoor wall assembly of the laboratory, the high-efficiency filters are mounted at the bottom of the chemical purification module in a laminating mode, the four end edges of each high-efficiency filter are respectively placed on four aluminum profile inserted into the four aluminum profile keels, the wind speed sensor is mounted at the bottom of each FFU filter unit body, and two stainless steel pins are mounted at the front of each stainless steel plug pins are mounted on the two sides of the FFU filter unit.
7. The high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory of claim 5, wherein the boom assembly comprises a boom, a boom mounting frame and a T-shaped screw, the top of the T-shaped screw is locked and mounted at the bottom of the boom mounting frame, the T-shaped end of the T-shaped screw is embedded and mounted in a top hook groove of an aluminum profile keel, the bottom of the boom is locked and fastened at the top of the boom mounting frame, the top of the boom is suspended on a top plate of a laboratory outer wall assembly, each aluminum profile keel is suspended on the top plate of the laboratory outer wall assembly through two boom assemblies, the FFU filter unit body comprises a housing, a fan is mounted in the housing, an air inlet is formed at the position opposite to the top of the fan, and a deflector is mounted at the air outlet of the fan.
8. The high precision constant temperature and humidity microelectronic hundred grade clean laboratory of claim 5 wherein the chemical purification module is filled with a high specific surface area, microporous fine aluminum oxide filter substrate, the surface of which is impregnated with strong oxidized potassium permanganate and potassium hydroxide.
9. The high precision constant temperature and humidity microelectronic hundred grade clean laboratory of claim 1, further comprising CO 2 Positive pressure control system, air conditioner water circulation control system, lighting system and central control system in comfort level exhaust and supplement air chamber, wherein the CO 2 CO (carbon monoxide) installed in comfort level exhaust and air supplementing chamber through laboratory by positive pressure control system 2 Sensor, differential pressure sensor, real-time detection laboratory CO 2 Concentration of CO 2 When the concentration is too high, the fresh air quantity of the system is increased in real time, and when the concentration is too high, the system is used for generating CO 2 When the concentration is in a comfortable range, the fresh air quantity is regulated, the pressure in the laboratory is detected in real time through the pressure difference sensor while the fresh air quantity of the air supplement is regulated, the opening of the exhaust valve is regulated in real time according to the pressure parameter, and the comfort level of the laboratory and the positive pressure stability of the system are controlled; the air conditioner water circulation control system adjusts the opening of a bypass electric butterfly valve arranged on a laboratory circulating water supply main pipe and a return water main pipe through a three-position floating point control method, so that the pressure difference between the laboratory circulating water supply main pipe and the return water main pipe is always kept within a set value allowable error range; the illumination system controls illumination of a laboratory through a touch screen control or a panel switch; the central control system is respectively connected with a fresh air clean air conditioner control system, an FFU air quantity and a floor return air quantity control system and CO 2 The comfort level exhaust and supplement air chamber internal positive pressure control system, the air conditioner water circulation control system and the lighting system are connected and are used for realizing the fresh air clean air conditioner control systemFFU air quantity and floor return air quantity control system and CO 2 And the comfort level is automatically adjusted by the positive pressure control system, the air conditioner water circulation control system and the lighting system in the exhaust and supplement chamber.
10. The high-precision constant temperature and humidity microelectronic hundred-grade clean laboratory according to claim 1, wherein a photoetching machine, a fume hood and a laboratory table are installed on an antistatic floor in the laboratory interior wall assembly, a wind speed sensor and a smoke sensor are installed at the top of the photoetching machine, and a TVOC sensor, a temperature and humidity sensor and a CO sensor are installed at the top of the laboratory interior wall assembly 2 The sensor, waterway pipeline are installed between the clearance of laboratory interior wall assembly and the outer wall assembly of laboratory, install gas circuit valve, camera, particle counter, intercom and lighting switch on the inner wall of laboratory interior wall assembly, be provided with safe airtight door and buffering room airtight door on the lateral wall of the outer wall assembly of laboratory, frozen inlet tube and frozen water outlet pipe are installed in the roof outside, frozen inlet tube has electric flow water valve, install temperature sensor on the frozen water outlet pipe.
CN202310725482.6A 2023-06-19 2023-06-19 High-precision constant temperature and humidity microelectronic hundred-grade clean laboratory Active CN116657966B (en)

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