CN220338639U - FFU purifying system for removing particles and chemical pollutants in microelectronic laboratory - Google Patents
FFU purifying system for removing particles and chemical pollutants in microelectronic laboratory Download PDFInfo
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- CN220338639U CN220338639U CN202321563233.3U CN202321563233U CN220338639U CN 220338639 U CN220338639 U CN 220338639U CN 202321563233 U CN202321563233 U CN 202321563233U CN 220338639 U CN220338639 U CN 220338639U
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- 239000000126 substance Substances 0.000 title claims abstract description 48
- 238000004377 microelectronic Methods 0.000 title claims abstract description 36
- 239000002245 particle Substances 0.000 title claims abstract description 19
- 239000003344 environmental pollutant Substances 0.000 title abstract description 16
- 231100000719 pollutant Toxicity 0.000 title abstract description 16
- 238000000746 purification Methods 0.000 claims abstract description 37
- 238000009826 distribution Methods 0.000 claims abstract description 18
- 230000001105 regulatory effect Effects 0.000 claims abstract description 15
- 238000009434 installation Methods 0.000 claims abstract description 12
- 238000002474 experimental method Methods 0.000 claims abstract description 8
- 230000033228 biological regulation Effects 0.000 claims description 77
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 70
- 229910052782 aluminium Inorganic materials 0.000 claims description 70
- 229910000838 Al alloy Inorganic materials 0.000 claims description 33
- 239000012634 fragment Substances 0.000 claims description 32
- 239000011159 matrix material Substances 0.000 claims description 22
- 239000000356 contaminant Substances 0.000 claims description 10
- 210000001503 joint Anatomy 0.000 claims description 10
- 239000010935 stainless steel Substances 0.000 claims description 8
- 229910001220 stainless steel Inorganic materials 0.000 claims description 8
- 238000010030 laminating Methods 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000005202 decontamination Methods 0.000 claims 1
- 230000003588 decontaminative effect Effects 0.000 claims 1
- 238000013461 design Methods 0.000 abstract description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- 239000007789 gas Substances 0.000 description 10
- 230000001276 controlling effect Effects 0.000 description 7
- 238000001914 filtration Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 230000003749 cleanliness Effects 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 5
- CPELXLSAUQHCOX-UHFFFAOYSA-N Hydrogen bromide Chemical compound Br CPELXLSAUQHCOX-UHFFFAOYSA-N 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000012286 potassium permanganate Substances 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 238000001259 photo etching Methods 0.000 description 3
- 229910015900 BF3 Inorganic materials 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- 239000005922 Phosphane Substances 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 2
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000002920 hazardous waste Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 229910000042 hydrogen bromide Inorganic materials 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000006386 neutralization reaction Methods 0.000 description 2
- 230000033116 oxidation-reduction process Effects 0.000 description 2
- 239000012466 permeate Substances 0.000 description 2
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- 230000002411 adverse Effects 0.000 description 1
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- 239000012535 impurity Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
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- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The utility model provides an FFU purification system for removing particles and chemical pollutants in a microelectronic laboratory, which comprises the following components: an outer wall assembly of the experiment room; a laboratory interior wall assembly mounted within the laboratory exterior wall assembly; the outdoor air distribution device is arranged on the outer side of the top of the outdoor wall assembly of the experiment room; the FFU air supply control system is arranged at the top of the laboratory interior wall assembly; the floor return air control system is arranged at the bottom of the laboratory interior wall assembly; and the central controller sets the return air quantity of the electric air quantity regulating valve under the corresponding antistatic floor according to the air speed data collected by the air speed sensor, so that the air speeds of the FFU air supply layer and the floor return air layer are uniform. The FFU purification system for removing particles and chemical pollutants in the microelectronic laboratory can not only enable the air speed of the FFU air supply layer surface and the air return layer surface of the floor to be uniform and consistent, but also greatly facilitate the installation and the disassembly of the FFU fan filter screen unit through the structural design of the FFU fan filter screen unit.
Description
Technical Field
The utility model relates to the technical field of laboratory installation, in particular to an FFU purification system for removing particles and chemical pollutants in a microelectronic laboratory.
Background
The microelectronic laboratory has extremely high requirements on temperature and humidity, air cleanliness, vibration, noise, electromagnetic interference and the like of the environment, the photoetching machine of the high-precision chip needs to reduce the interference of fine particles in the environment and the air to the photoetching process as much as possible, various environmental influence factors are fully considered in the establishment and design of the laboratory, for example, the electron beam photoetching machine is sensitive to the content of pollutants in the gas, once the flowing air contains out-of-standard impurities or pollutants, the quality of a chip sample can be adversely affected, meanwhile, the circulating wind speed in the laboratory also can affect the quality of the chip sample, and once the circulating wind speed in the laboratory is uneven, the quality of chip products in the same batch or different batches is unstable, so that the influence on the quality of the chip sample in the chip manufacturing process can be reduced only in the environment (the temperature of 22 ℃ +/-0.1 ℃ and the humidity of +/-2%) with high precision and stable constant temperature and humidity.
FFU English is called Fan Filter Unit (Fan Filter Unit), chinese is Fan Filter Unit. The FFU fan filter screen unit can be connected in a modularized mode, is widely applied to application occasions such as clean rooms, clean tables, clean production lines, assembled clean rooms, local hundred-level and the like, and is suitable for obtaining high-level clean environments in various environments. It provides high quality clean air for clean rooms and microenvironments with different sizes and different cleanliness levels. In the new clean room and clean factory building reconstruction and renovation, the cleanliness level can be improved, the noise and vibration can be reduced, the cost can be greatly reduced, the installation and maintenance are convenient, and the clean room cleaning device is an ideal component of clean environment.
The FFU fan filter screen unit can be installed at the laboratory interior wall assembly top of current microelectronics laboratory, the indoor internal circulation wind in laboratory is from the antistatic floor aperture return air of laboratory interior wall assembly bottom to the wind channel that the laboratory indoor outer wall formed when the space between the roof of FFU fan filter screen unit and the laboratory outer wall assembly flows back again, because wind channel structure causes the wind pressure to decrease, lead to the wind speed of returning air on the antistatic floor of whole laboratory internal foraminiferous and the wind speed of whole FFU supply air face inhomogeneous, the local amount of wind and the wind speed can be greater near the interior wall periphery more, thereby lead to the wind speed inhomogeneous in the microelectronics laboratory, the wind speed inhomogeneous can cause the quality of same batch or different batch chip products unstable.
In addition, in the prior art, 2 constructors are generally required to stand at the pedal of the top surface of another FFU or on a T-shaped keel to sequentially place a chemical purification module and a high-efficiency filter on the T-shaped keel from top to bottom, the T-shaped keel is hung on a top plate supporting frame by a hanging rod, and then the main body box of the FFU is lifted to be sealed and stacked on the chemical purification module; because the FFU is not installed from the lower side of the T-shaped keel frame, the FFU belongs to the field of overhead operation, has heavy weight and has hidden danger on construction safety; especially, the ultra-efficient filter in the FFU fan filter screen unit needs regular cleaning and replacement, and many people are needed to carry out high-altitude operation maintenance, so that the operation is inconvenient, the labor cost is high, and the operation is unsafe.
Disclosure of Invention
Aiming at the defects of the prior art, the utility model provides an FFU purifying system for removing particles and chemical pollutants in a microelectronic laboratory, which can lead the air speed of an FFU air supply layer and the air return layer to be uniform and consistent.
In order to achieve the above technical solution, the present utility model provides an FFU purification system for removing particles and chemical pollutants in a microelectronic laboratory, comprising: an outer wall assembly of the experiment room; the laboratory inner wall assembly is arranged in the laboratory outer wall assembly, and an air channel is formed between the laboratory outer wall assembly and the laboratory inner wall assembly; the outdoor air distribution device is arranged on the outer side of the top of the outdoor wall assembly of the experiment room; the FFU air supply control system is arranged at the top of the laboratory interior wall assembly and consists of a plurality of FFU filter units which are arranged at the top of the laboratory interior wall assembly and distributed in a square matrix; the floor return air control system is arranged at the bottom of the laboratory interior wall assembly and consists of a plurality of anti-static floors which are arranged at the bottom of the laboratory interior wall assembly and distributed in a square matrix, the surface of each anti-static floor is uniformly provided with air holes, and an electric air quantity regulating valve is arranged below each anti-static floor; the central controller is electrically connected with each FFU filter unit, each wind speed sensor and each electric air quantity regulating valve respectively, and the central controller sets the air return quantity of the corresponding electric air quantity regulating valve below the antistatic floor according to the wind speed data collected by the wind speed sensors, so that the wind speeds of the FFU air supply layer and the floor air return layer are uniform and consistent.
In the technical scheme, when the intelligent air conditioner works actually, the outside treated air is firstly distributed to the FFU air supply control system arranged at the top of the laboratory interior wall assembly through the air duct between the laboratory exterior wall assembly and the top of the laboratory interior wall assembly by the outdoor air distribution device, the FFU air supply control system can obtain air speed data according to the air speed sensors arranged in all FFU filter units, and the central controller sets the air return quantity of the electric air quantity regulating valve below the corresponding antistatic floor according to the air speed data collected by the air speed sensors, so that the air speed of the FFU air supply layer is uniform with the air speed of the floor air return layer, the defect that in the prior art, the internal circulation air in the laboratory flows back to the space between the FFU filter unit and the top plate of the laboratory exterior wall assembly from the antistatic floor small holes at the bottom of the laboratory interior wall assembly, and the air return speed on the antistatic floor with holes is uneven due to the air pressure decrease caused by the air duct structure, and the air speed of the whole FFU air supply surface on the antistatic floor with holes in the whole laboratory is uneven, the air speed near the periphery of the inner wall is overcome, and the quality of the chip is improved.
Preferably, the FFU filter units distributed in a square matrix in the FFU air supply control system are divided into three FFU air supply air speed regulation and control combinations i, ii and iii capable of being controlled independently according to different air supply areas, the air outlet of each FFU filter unit is provided with an air speed sensor, the FFU air supply air speed regulation and control combination i corresponds to peripheral units of the FFU filter units distributed in a square matrix, the FFU air supply air speed regulation and control combination ii corresponds to middle units of the FFU filter units distributed in a square matrix, and the FFU air supply air speed regulation and control combination iii corresponds to a center unit of the FFU filter units distributed in a square matrix.
Preferably, the antistatic floor which is distributed in square matrix in the floor return air control system is divided into three independently controllable ground return air speed regulation and control combinations I, II and III according to different return air areas, wherein the return air area of the ground return air speed regulation and control combination I corresponds to the air supply area of the FFU air supply speed regulation and control combination I, the return air area of the ground return air speed regulation and control combination II corresponds to the air supply area of the FFU air supply speed regulation and control combination II, and the return air area of the ground return air speed regulation and control combination III corresponds to the air supply area of the FFU air supply speed regulation and control combination III. In actual operation, the three FFU air supply wind speed regulation and control combinations I, II and III which can be independently controlled are divided according to different air supply areas, the air quantity and the air speed of the air supply areas corresponding to the FFU air supply wind speed regulation and control combinations I, II and III can be controlled by independently controlling each FFU filter unit in the FFU air supply wind speed regulation and control combinations I, II and III (the air speed can be obtained by an air speed sensor arranged at the air outlet of the FFU filter unit), and then the air quantity and the air speed of the air return areas corresponding to the air return areas are controlled by controlling each electric air quantity regulating valve in the ground air return wind speed regulation and control combinations I, II and III. The FFU air supply and air speed regulation combination I, the ground air return and air speed regulation combination II and the FFU air supply and air speed regulation combination III and the ground air return and air speed regulation combination III are correspondingly arranged, so that the air speed control of different areas in the FFU air supply layer surface and the floor air return layer surface is facilitated, and stable and uniform air supply and air return speeds are formed.
Preferably, FFU filter unit includes FFU filter unit body, chemical purification module, high-efficient filter and aluminium alloy fossil fragments subassembly, aluminium alloy fossil fragments subassembly is formed by four aluminium alloy fossil fragments end to end splices, aluminium alloy fossil fragments end to end splice department is through fossil fragments connecting piece fixed connection, the left and right sides of every aluminium alloy fossil fragments all is provided with inserted sheet butt joint hook piece, the aluminium alloy inserted sheet passes through the hook site and fixes on aluminium alloy fossil fragments and outwards protrusion after the inserted sheet butt joint hook piece agrees with, the top of every aluminium alloy fossil fragments all is provided with the top hook groove, the bottom of jib subassembly is through the top hook inslot of T type screw embedding aluminium alloy fossil fragments, the top of jib subassembly is hung on the roof of the outdoor wall assembly of experiment, the bottom at chemical purification module is installed in the laminating of high-efficient filter, the bottom at FFU filter unit body is installed in the laminating of four terminal limits of high-efficient filter are put respectively on four aluminium alloy fossil fragments of inserting into, wind speed sensor installs the air outlet in high-efficient filter bottom, with make things convenient for high-efficient filter department accurate the taking monitor of wind speed. During actual installation, four aluminum profile keels are spliced end to form an aluminum profile keel assembly through keel connectors, then the assembled aluminum profile keel assembly is hung on a top plate of a laboratory through a hanging rod assembly, then an efficient filter, a chemical purification module and an FFU filter unit body are installed into an integrated FFU assembly, the FFU assembly is placed on a lifter platform, the FFU assembly is lifted to the upper side of the aluminum profile keel assembly through a frame hole in the center of the aluminum profile keel assembly through the lifter platform, then an aluminum profile inserting sheet is inserted into a slot of an inserting sheet butt joint hook piece of the aluminum profile keel in an inclined position, the rotating aluminum profile inserting sheet is pushed horizontally, pulled outwards after being lifted upwards, moved downwards to be pushed inwards, so that the inserting sheet butt joint hook piece is tightly hooked with the hook position of the aluminum profile inserting sheet, the aluminum profile inserting sheet is fixedly connected to the aluminum profile keel, the aluminum profile inserting sheet is used as a supporting piece of the FFU assembly, the lifter platform is controlled to descend, and the FFU assembly is placed on the aluminum profile in the descending process, and the supporting of the FFU assembly is realized. When the FFU component needs to be disassembled, only the lifter platform is needed to be used for jacking the FFU component, the aluminum profile inserting piece is reversely operated, the aluminum profile inserting piece is separated from the aluminum profile keel, and then the FFU component is lowered to the ground from the frame hole in the center of the aluminum profile keel component through the lifter platform, so that the FFU fan filter screen unit is greatly convenient to install and disassemble.
Preferably, two stainless steel safety bolts are correspondingly arranged on the front side and the rear side of the FFU filter unit body respectively, an outward protruding contact pin is arranged in each stainless steel safety bolt, after the FFU filter unit body is mounted in practice, the contact pins of the stainless steel safety bolts keep protruding, and when a certain aluminum profile inserting piece on a keel is out of question, the contact pins on the safety bolts can be supported by other perfect aluminum profile inserting pieces in the falling process of the FFU filter unit body, so that safety accidents are prevented.
Preferably, the jib subassembly includes jib, jib installing frame and T type screw rod, the top locking of T type screw rod is installed in the bottom of jib installing frame, and the T type end embedding of T type screw rod is installed in the top hook inslot of aluminium alloy fossil fragments, the bottom locking fastening of jib is at the top of jib installing frame, and the top of jib hangs on the roof of the outer wall assembly of laboratory to make things convenient for the quick installation of jib subassembly and aluminium alloy fossil fragments, roof.
Preferably, each aluminum profile keel is suspended on the top plate of the outdoor wall assembly of the laboratory through two suspender components so as to ensure the hoisting balance and stability of each aluminum profile keel.
Preferably, the handle is installed at the top of FFU filter unit body to make things convenient for the transport of FFU filter unit body.
Preferably, the FFU filter unit body comprises a shell, the fan is arranged in the shell, an air inlet is formed in the position opposite to the fan at the top of the shell, and a guide vane is arranged at the air outlet of the fan. During actual operation, the air distribution of the outdoor air distribution device is sucked from the air inlet through the operation of the fan, the air quantity of the air inlet can be controlled by controlling the power of the fan, and the air is blown into the laboratory interior wall assembly after being guided by the guide vane.
Preferably, the chemical purification module is internally filled with a fine aluminum oxide filtering substrate with high specific surface area and micropores, and the surface of the aluminum oxide filtering substrate is soaked with strong oxidized potassium permanganate and potassium hydroxide. In actual operation, potassium permanganate and potassium hydroxide molecules fully permeate and firmly adsorb on the inner surfaces of the micropores of the aluminum oxide filtering substrate, and when acid and organic chemical gas molecules pass through the capillary micropores, various acid chemical pollution gases and volatile organic pollution gases generated in the manufacturing and cleaning processes of microelectronic components can be efficiently removed through oxidation-reduction and neutralization reactions, such as: chlorine, HCL, HF, H 2 NO 3 The harmless salt solid generated by hydrogen bromide, silane, dichlorosilane, disilane, boron trifluoride, phosphane, arsine and the like is remained in the micropores of the substrate, and no hazardous waste is formed.
The FFU purification system for removing particles and chemical pollutants in a microelectronic laboratory has the beneficial effects that:
(1) The FFU purification system for removing particles and chemical pollutants in the microelectronic laboratory is reasonable in design, can ensure the air hundred-level cleanliness and low-concentration chemical pollution gas in the microelectronic laboratory, reduces interference factors in the process of experimental samples of microelectronic chip elements and improves the laboratory working environment of scientific researchers; the unique FFU upper air supply and lower return air volume automatic control fine adjustment system ensures uniformity of air volume and air speed from top to bottom. During actual operation, outside processed air is firstly distributed to the FFU air supply control system arranged at the top of the laboratory interior wall assembly through the air duct between the laboratory exterior wall assembly and the top of the laboratory interior wall assembly by the outdoor air distribution device, the FFU air supply control system can obtain wind speed data according to wind speed sensors arranged in all FFU filter units, the central controller sets the air return quantity of the electric air quantity regulating valve under the corresponding antistatic floor according to the wind speed data collected by the wind speed sensors, so that the wind speeds of the FFU air supply layer and the floor air return layer are uniform, the defect that in the prior art, when internal circulating air in a laboratory returns to a space between the FFU filter unit and a top plate of the laboratory exterior wall assembly from small holes in the antistatic floor at the bottom of the laboratory interior wall assembly, the air return is caused by the air duct structure, wind pressure is decreased, the wind speed of the air return on the antistatic floor with holes in the whole laboratory and the wind speed of the whole FFU air supply surface are uneven, and the wind quantity and the wind speed of the place near the periphery of the inner wall are large is overcome, and the quality stability of chip products is improved.
(2) The FFU purification system for removing particles and chemical pollutants in the microelectronic laboratory is divided into three FFU air supply wind speed regulation and control combinations I, II and III which can be independently controlled according to different air supply areas, and the air quantity and the air speed of the FFU air supply area corresponding to the FFU air supply regulation and control combination I, the FFU air supply wind speed regulation and control combination II and the FFU air supply wind speed regulation and control combination III can be controlled by independently controlling each FFU filter unit in the FFU air supply wind speed regulation and control combinations I, II and III (the air quantity and the air speed of the FFU air supply area corresponding to the FFU air supply wind speed regulation and control combination III can be obtained through an air speed sensor arranged at an air outlet of the FFU filter unit), and then by controlling each electric air quantity regulating valve in the ground air return wind speed regulation and control combination I, the ground air return wind speed regulation and control combination II and the ground air return wind speed regulation and control combination III, and the air quantity and the air speed of the ground air return wind speed regulation and control combination III are controlled, so that the air quantity and the air speed of the FFU layer and the floor air return wind speed are uniform.
(3) The FFU purification system for removing particles and chemical pollutants in the microelectronic laboratory is greatly convenient to install and detach the FFU fan filter unit through the structural design of the FFU filter unit. During actual installation, four aluminum profile keels are spliced end to form an aluminum profile keel assembly through keel connectors, then the assembled aluminum profile keel assembly is hung on a top plate of a laboratory through a hanging rod assembly, then an efficient filter, a chemical purification module and an FFU filter unit body are installed into an integrated FFU assembly, the FFU assembly is placed on a lifter platform, the FFU assembly is lifted to the upper side of the aluminum profile keel assembly through a frame hole in the center of the aluminum profile keel assembly through the lifter platform, then an aluminum profile inserting sheet is inserted into a slot of an inserting sheet butt joint hook piece of the aluminum profile keel in an inclined position, the rotating aluminum profile inserting sheet is pushed horizontally, pulled outwards after being lifted upwards, moved downwards to be pushed inwards, so that the inserting sheet butt joint hook piece is tightly hooked with the hook position of the aluminum profile inserting sheet, the aluminum profile inserting sheet is fixedly connected to the aluminum profile keel, the aluminum profile inserting sheet is used as a supporting piece of the FFU assembly, the lifter platform is controlled to descend, and the FFU assembly is placed on the aluminum profile in the descending process, and the supporting of the FFU assembly is realized. When the FFU component needs to be disassembled, only the lifter platform is needed to be used for jacking the FFU component, the aluminum profile inserting piece is reversely operated, the aluminum profile inserting piece is separated from the aluminum profile keel, and then the FFU component is lowered to the ground from the frame hole in the center of the aluminum profile keel component through the lifter platform, so that the FFU fan filter screen unit is greatly convenient to install and disassemble.
Drawings
FIG. 1 is a schematic diagram of the overall structure assembly of the present utility model.
FIG. 2 is a schematic diagram of an FFU air supply control system of the present utility model.
Fig. 3 is a layout of the floor return air control system of the present utility model.
Fig. 4 is a schematic view illustrating the assembly of the FFU filter assembly in a three-dimensional structure according to the present utility model.
Fig. 5 is an exploded perspective view of an FFU filtration unit according to the present utility model.
Fig. 6 is a sectional view showing an assembled structure of the FFU filter assembly of the present utility model.
Fig. 7 is a schematic view of a three-dimensional assembly structure of a boom assembly and an aluminum profile keel of an FFU filtration unit according to the utility model.
Fig. 8 is a schematic diagram of an assembly structure of a boom assembly and an aluminum profile keel, an aluminum profile insert of an FFU filtration unit according to the present utility model.
Fig. 9 is a schematic structural diagram of an installation step of an aluminum profile insert and an aluminum profile keel of the FFU filter unit according to the utility model.
In the figure: 1. a laboratory interior wall assembly; 2. FFU air supply control system; 21. FFU air supply speed regulation and control combination I; 22. FFU air supply wind speed regulation combination II; 23. FFU air supply speed regulation and control combination III; 211. FFU filter unit body; 212. a safety latch; 213. a chemical purification module; 214. a high-efficiency filter; 215. a boom assembly; 2151. a boom; 2152. a boom mounting frame; 2153. a T-shaped screw; 216. a keel connection; 217. an aluminum profile inserting piece; 218. aluminum profile keels; 2181. a top hook slot; 2182. the inserting piece is abutted with the hook piece; 219. a wind speed sensor; 2110. a handle; 2111. a housing; 2112. an air inlet; 2113. a blower; 2114. a deflector; 3. a floor return air control system; 31. the ground return air speed regulation and control combination I; 32. a ground return air speed regulation and control combination II; 33. a ground return air speed regulation and control combination III; 4. an outer wall assembly of the experiment room; 5. an outdoor wind distribution device; 6. an electric air quantity regulating valve.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments obtained by those skilled in the art without making any inventive effort are within the scope of the present utility model.
Examples: an FFU purification system for removing particles and chemical pollutants in a microelectronic laboratory.
Referring to fig. 1-9, a microelectronic laboratory particle and chemical contaminant removal FFU cleaning system, comprising:
the laboratory outer wall assembly 4, the laboratory outer wall assembly 4 is airtight space for realize the external separation of microelectronics laboratory.
The laboratory inner wall assembly 1 is arranged in the laboratory outer wall assembly 4, an air channel is formed between the laboratory outer wall assembly 4 and the laboratory inner wall assembly 1, and outdoor fresh air and internal circulating air can flow in the air channel formed between the laboratory outer wall assembly 4 and the laboratory inner wall assembly 1.
And the outdoor air distribution device 5 is arranged on the outer side of the top of the outer wall assembly 4 of the laboratory, and the outdoor air distribution device 5 is used for supplementing fresh air into the microelectronic laboratory.
Install FFU air supply control system 2 at laboratory interior wall assembly 1 top, FFU air supply control system 2 comprises a plurality of FFU filter units of installing at laboratory interior wall assembly 1 top and square matrix distribution, FFU filter unit that is square matrix distribution in the FFU air supply control system 2 divide into three FFU air supply wind speed regulation and control combination I21, FFU air supply wind speed regulation and control combination II 22 and FFU air supply wind speed regulation and control combination III 23 that can independent control according to the difference of air supply region, and wind speed sensor 219 is all installed to the air outlet of every FFU filter unit.
Wherein, FFU filter unit includes FFU filter unit body 211, chemical purification module 213, high-efficient filter 214 and aluminium alloy fossil fragments subassembly, aluminium alloy fossil fragments subassembly is formed by four aluminium alloy fossil fragments 218 end to end concatenations, and aluminium alloy fossil fragments 218 end to end concatenation department passes through fossil fragments connecting piece 216 fixed connection, wherein, the left and right sides of every aluminium alloy fossil fragments 218 all is provided with inserted sheet butt joint hook piece 2182, aluminium alloy inserted sheet 217 is fixed on aluminium alloy fossil fragments 218 and outwards protrusion after passing through the hooked position and inserted sheet butt joint hook piece 2182, the top of every aluminium alloy fossil fragments 218 all is provided with top hook groove 2181, the bottom of jib subassembly 215 is hung in the roof of aluminium alloy fossil fragments 218 through T type screw 2153 embedding top hook groove 2181, the top of jib subassembly is hung on the roof of the outdoor wall assembly, jib subassembly 215 includes jib 2151, jib mounting frame 2152 and T type screw 2153, the top locking of T type screw 2153 installs the bottom at mounting frame 2152, and the top of T type end embedding in the aluminium alloy fossil fragments 218 is hung in the top hook 2181, can install the top of jib 2151 in the roof plate assembly fast, can install the roof plate 2151 with the roof plate assembly fast. And each aluminum profile keel 218 is suspended on the top plate of the laboratory outdoor wall assembly through two suspension rod assemblies 215, so that the hoisting balance and stability of each aluminum profile keel 218 are ensured.
The high-efficiency filter 214 is attached to the bottom of the chemical purification module 213, the chemical purification module 213 is attached to the bottom of the FFU filter unit body 211, and four end edges of the high-efficiency filter 214 are respectively placed on four aluminum profile inserting sheets 217 inserted into four aluminum profile keels 218. Two stainless steel safety bolts 212 are correspondingly arranged on the front side and the rear side of the FFU filter unit body 211 respectively, an outward protruding inserting needle is arranged in each stainless steel safety bolt 212, when the FFU filter unit body 211 is mounted in practice, the inserting needle of the stainless steel safety bolt 212 keeps a protruding state, and when a certain aluminum profile inserting sheet 217 on a keel is out of question, the inserting needle on the safety bolt 212 can be supported by other intact aluminum profile inserting sheets 217 in the falling process of the FFU filter unit body 211, so that safety accidents are prevented. The handle 2110 is installed at the top of the FFU filter unit body 211 to facilitate the transportation of the FFU filter unit body 211. A wind speed sensor 219 is installed at the bottom of the high-efficiency filter 214, so that accurate monitoring of wind speed at the high-efficiency filter 214 is facilitated.
In this embodiment, the FFU filter unit body 211 includes a housing 2111, a fan 2113 is installed in the housing 2111, an air inlet 2112 is provided at a position opposite to the fan 2113 at the top of the housing 2111, and a deflector 2114 is installed at an air outlet of the fan 2113. In actual operation, the outdoor air distribution device 5 is operated to suck air from the air inlet 2112, the power of the fan 2113 is controlled to control the air quantity of the air, and the air is guided by the guide vane 2114 and then supplied to the interior wall assembly 1 of the laboratory.
In this embodiment, the chemical purification module 213 is filled with a high specific surface area, microporous, fine aluminum oxide filter substrate, the surface of which is impregnated with highly oxidized potassium permanganate and potassium hydroxide. In actual operation, potassium permanganate and potassium hydroxide molecules fully permeate and firmly adsorb on the inner surfaces of the micropores of the aluminum oxide filtering substrate, and when acid and organic chemical gas molecules pass through the capillary micropores, various acid chemical pollution gases and volatile organic pollution gases generated in the manufacturing and cleaning processes of microelectronic components can be efficiently removed through oxidation-reduction and neutralization reactions, such as: chlorine, HCL, HF, H 2 NO 3 The harmless salt solid generated by hydrogen bromide, silane, dichlorosilane, disilane, boron trifluoride, phosphane, arsine and the like is remained in the micropores of the substrate, and no hazardous waste is formed. The utility model adds a special chemical purifying module 213. The circulating ventilation times of more than 300 per hour are ensured to air hundred-grade cleanliness and low-concentration chemical pollution gas in a microelectronic laboratory under the comprehensive technical application of an ultra-efficient (purification efficiency is 99.9995%) particle pollutant purification system and a chemical purification module 213 of a special formula, so that the interference factor in the process of a microelectronic chip element experimental sample is reduced.
The utility model greatly facilitates the installation and the disassembly of the FFU fan filter screen unit through the structural design of the FFU filter screen unit. In actual installation, four aluminum profile keels 218 are spliced end to form an aluminum profile keel assembly by means of keel connectors 216, then the assembled aluminum profile keel assembly is hung on a top plate of a laboratory by means of hanging rod assemblies 215, then an efficient filter 214, a chemical purification module 213 and an FFU filter unit body 211 are installed into an integrated FFU assembly, the FFU assembly is placed on an elevator platform, the FFU assembly is lifted to the upper side of the aluminum profile keel assembly through a frame hole in the center of the aluminum profile keel assembly by means of the elevator platform, then the aluminum profile inserting sheet 217 is inserted into a groove of an inserting sheet butt-joint hook piece 2182 of the aluminum profile keel 218 in an inclined position, the rotating aluminum profile inserting sheet 217 is horizontally pushed in, pulled outwards after the upward movement and pushed inwards downwards, the inserting sheet butt-joint hook piece 2182 is tightly hooked with the hook position of the aluminum profile inserting sheet 217, the aluminum profile inserting sheet 217 is tightly connected to the aluminum profile keel 218, the aluminum profile inserting sheet 217 is used as a supporting piece of the FFU assembly, the elevator platform is controlled to descend, the aluminum profile inserting sheet 217 is inserted into an FFU assembly in a supporting groove, and the FFU assembly is protruded outwards on the FFU assembly in the descending process, and the FFU assembly is achieved. When the FFU component is required to be disassembled, only the lifter platform is required to be used for jacking the FFU component, the aluminum profile inserting sheet 217 is reversely operated, the aluminum profile inserting sheet 217 is separated from the aluminum profile keel 218, and then the FFU component is lowered to the ground from the frame hole in the center of the aluminum profile keel component through the lifter platform, so that the FFU fan filter screen unit is greatly convenient to install and disassemble.
The floor return air control system 3 is arranged at the bottom of the laboratory interior wall assembly 1, the floor return air control system 3 consists of a plurality of antistatic floors which are arranged at the bottom of the laboratory interior wall assembly and distributed in a square matrix, the surfaces of each antistatic floor are uniformly provided with air holes, the antistatic floors which are distributed in the square matrix in the floor return air control system are divided into three independently controllable ground return air speed regulation and control combinations I31, ground return air speed regulation and control combinations II 32 and ground return air speed regulation and control combinations III 33 according to different return air areas, and the electric air quantity regulating valve 6 is arranged below each antistatic floor. In this embodiment, the FFU supply air speed regulation and control combination i 21 corresponds to a peripheral unit of the FFU filter unit distributed in a square matrix, and corresponds to a return air area of the ground return air speed regulation and control combination i 31 in the floor return air control system 3; the FFU air supply and wind speed regulation and control combination II 22 corresponds to the middle unit of the FFU filter units distributed in a square matrix and corresponds to the air return area of the ground air return wind speed regulation and control combination II 32 in the floor air return control system 3; the FFU air supply and wind speed regulation and control combination III 23 corresponds to a central unit of FFU filter units distributed in a square matrix and corresponds to a return air area of the ground return air speed regulation and control combination III 33 in the floor return air control system 3. The corresponding arrangement of the FFU air supply air speed regulation and control combination I21, the ground air return air speed regulation and control combination I31, the FFU air supply air speed regulation and control combination II 22, the ground air return air speed regulation and control combination II 32 and the FFU air supply air speed regulation and control combination III 23 and the ground air return air speed regulation and control combination III 33 is convenient for controlling the air speeds of different areas in the FFU air supply layer and the floor air return layer, and stable and uniform air supply air speed and air return air speed are formed.
The central controller is electrically connected with each FFU filter unit, each wind speed sensor 219 and each electric air quantity regulating valve 6 respectively, and the central controller sets the air return quantity of the corresponding electric air quantity regulating valve 6 below the antistatic floor according to the wind speed data collected by the wind speed sensors 219, so that the wind speeds of the FFU air supply layer and the floor air return layer are uniform.
The FFU purification system for removing particles and chemical pollutants in the microelectronic laboratory is reasonable in design, can ensure the air hundred-level cleanliness and low-concentration chemical pollution gas in the microelectronic laboratory, reduces interference factors in the process of experimental samples of microelectronic chip elements and improves the laboratory working environment of scientific researchers; the unique FFU upper air supply and lower return air volume automatic control fine adjustment system ensures uniformity of air volume and air speed from top to bottom. In actual operation, the outside treated air is firstly distributed to the FFU air supply control system 2 arranged at the top of the laboratory interior wall assembly 1 through the air duct between the laboratory exterior wall assembly 4 and the top of the laboratory interior wall assembly 1 by the outdoor air distribution device 5, the FFU air supply control system 2 is composed of a plurality of FFU filter units which are arranged at the top of the laboratory interior wall assembly and distributed in square matrix, and are divided into three FFU air supply speed regulation and control combinations I21, FFU air supply speed regulation and control combinations II 22 and FFU air supply speed regulation and control combinations III 23 which can be independently controlled according to different air supply areas, the air quantity and the air return speed of the FFU air supply speed regulation and control combinations I21, FFU air supply speed regulation and control combinations II 22 and FFU air supply speed regulation and control combinations III 23 can be controlled by independent control of each FFU filter unit in the FFU air supply speed regulation and control combinations I21, FFU air supply speed regulation and control combinations II 22 and FFU air supply speed regulation and control combinations III corresponding to the air quantity and air speed of the air supply area (the air speed sensors arranged at the air outlet of the FFU filter units) and the air outlet air speed of the air supply area, and the air return air speed level II control combinations are controlled by controlling the floor surface air speed I31 and the air return air speed regulation and control combinations III, the air quantity is uniform to control combinations 33 and the air return air level 32 in the floor surface area regulation and control combinations, the utility model provides an in the prior art in the laboratory internal circulation wind from the static floor aperture return air of laboratory interior wall assembly 1 bottom to the wind channel that laboratory outer wall formed the time of the roof between FFU fan filter unit and the outer wall assembly of laboratory again, because wind channel structure causes the wind pressure to decrease, lead to the wind speed of returning air on the static floor of foraminiferous in the whole laboratory and the inhomogeneous of wind speed of whole FFU air supply face, the local amount of wind and wind speed can be bigger defect more near the interior wall periphery, the fluctuation of air flow has been reduced, the quality stability of chip product has been improved.
The foregoing is a preferred embodiment of the present utility model, but the present utility model should not be limited to the embodiment and the disclosure of the drawings, so that the equivalents and modifications can be made without departing from the spirit of the disclosure.
Claims (9)
1. An FFU decontamination system for microelectronics laboratory de-particle and chemical contaminants, comprising:
an outer wall assembly of the experiment room;
the laboratory inner wall assembly is arranged in the laboratory outer wall assembly, and an air channel is formed between the laboratory outer wall assembly and the laboratory inner wall assembly;
the outdoor air distribution device is arranged on the outer side of the top of the outdoor wall assembly of the experiment room;
the FFU air supply control system is arranged at the top of the laboratory interior wall assembly and consists of a plurality of FFU filter units which are arranged at the top of the laboratory interior wall assembly and distributed in a square matrix;
the floor return air control system is arranged at the bottom of the laboratory interior wall assembly and consists of a plurality of anti-static floors which are arranged at the bottom of the laboratory interior wall assembly and distributed in a square matrix, the surface of each anti-static floor is uniformly provided with air holes, and an electric air quantity regulating valve is arranged below each anti-static floor;
the central controller is electrically connected with each FFU filter unit, each wind speed sensor and each electric air quantity regulating valve respectively, and the central controller sets the air return quantity of the corresponding electric air quantity regulating valve below the antistatic floor according to the wind speed data collected by the wind speed sensors, so that the wind speeds of the FFU air supply layer and the floor air return layer are uniform and consistent.
2. The microelectronic laboratory de-particle and chemical contaminant FFU purification system of claim 1, wherein: FFU filter unit that is square matrix distribution among the FFU air supply control system divide into three FFU air supply wind speed regulation and control combination I, FFU air supply wind speed regulation and control combination II and FFU air supply wind speed regulation and control combination III that can independent control according to the difference of air supply region, wind speed sensor is all installed to the air outlet of every FFU filter unit, FFU air supply wind speed regulation and control combination I corresponds the peripheral unit of the FFU filter unit that forms square matrix distribution, FFU air supply wind speed regulation and control combination II corresponds the middle unit of the FFU filter unit that forms square matrix distribution, FFU air supply wind speed regulation and control combination III corresponds the center unit of the FFU filter unit that forms square matrix distribution.
3. The microelectronic laboratory de-particle and chemical contaminant FFU purification system of claim 2, wherein: the anti-static floor which is distributed in a square matrix in the floor return air control system is divided into three independently controllable ground return air speed regulation and control combinations I, II and III according to different return air areas, wherein the return air area of the ground return air speed regulation and control combination I corresponds to the air supply area of the FFU air supply speed regulation and control combination I, the return air area of the ground return air speed regulation and control combination II corresponds to the air supply area of the FFU air supply speed regulation and control combination II, and the return air area of the ground return air speed regulation and control combination III corresponds to the air supply area of the FFU air supply speed regulation and control combination III.
4. The microelectronic laboratory de-particle and chemical contaminant FFU purification system of claim 1, wherein: FFU filter unit includes FFU filter unit body, chemical purification module, high-efficient filter and aluminium alloy fossil fragments subassembly, aluminium alloy fossil fragments subassembly is formed by four aluminium alloy fossil fragments end to end concatenations, aluminium alloy fossil fragments head and tail concatenation department is through fossil fragments connecting piece fixed connection, the left and right sides of every aluminium alloy fossil fragments all is provided with inserted sheet butt joint hook piece, the aluminium alloy inserted sheet passes through the hook position and matches the back and fix on aluminium alloy fossil fragments and outwards protrusion with inserted sheet butt joint hook piece, the top of every aluminium alloy fossil fragments all is provided with the top hook groove, the bottom of jib subassembly is through the top hook inslot of T type screw embedding aluminium alloy fossil fragments, the top of jib subassembly is hung on the roof of the outer wall assembly of laboratory, high-efficient filter laminating is installed in chemical purification module's bottom, chemical purification module laminating is installed in the bottom of FFU filter unit body, four terminal edges of high-efficient filter are taken respectively and are put on four aluminium alloy inserted sheets of four aluminium alloy fossil fragments, wind speed sensor installs the air outlet in high-efficient filter bottom.
5. The FFU purification system for the removal of particulates and chemical contaminants from a microelectronic laboratory as set forth in claim 4, wherein: two stainless steel safety bolts are correspondingly arranged on the front side and the rear side of the FFU filter unit body respectively, and an outwards protruding contact pin is arranged in each stainless steel safety bolt.
6. The FFU purification system for the removal of particulates and chemical contaminants from a microelectronic laboratory as set forth in claim 4, wherein: the hanger rod assembly comprises a hanger rod, a hanger rod installation frame and a T-shaped screw rod, wherein the top of the T-shaped screw rod is locked and installed at the bottom of the hanger rod installation frame, the T-shaped end of the T-shaped screw rod is embedded and installed in a top hook groove of an aluminum profile keel, the bottom of the hanger rod is locked and fixed at the top of the hanger rod installation frame, and the top of the hanger rod is suspended on a top plate of an outer wall assembly of a laboratory.
7. The FFU purification system for the removal of particulates and chemical contaminants from a microelectronic laboratory as set forth in claim 4, wherein: each aluminum profile keel is suspended on the top plate of the outdoor wall assembly of the laboratory through two suspender components.
8. The FFU purification system for the removal of particulates and chemical contaminants from a microelectronic laboratory as set forth in claim 4, wherein: the handle is installed at the top of FFU filter unit body.
9. The FFU purification system for the removal of particulates and chemical contaminants from a microelectronic laboratory as set forth in claim 4, wherein: the FFU filter unit body comprises a shell, the fan is arranged in the shell, an air inlet is formed in the position, opposite to the fan, of the top of the shell, and a guide vane is arranged at the air outlet of the fan.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321563233.3U CN220338639U (en) | 2023-06-19 | 2023-06-19 | FFU purifying system for removing particles and chemical pollutants in microelectronic laboratory |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321563233.3U CN220338639U (en) | 2023-06-19 | 2023-06-19 | FFU purifying system for removing particles and chemical pollutants in microelectronic laboratory |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220338639U true CN220338639U (en) | 2024-01-12 |
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ID=89457312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321563233.3U Active CN220338639U (en) | 2023-06-19 | 2023-06-19 | FFU purifying system for removing particles and chemical pollutants in microelectronic laboratory |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220338639U (en) |
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2023
- 2023-06-19 CN CN202321563233.3U patent/CN220338639U/en active Active
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