CN116504601A - X射线源以及用于产生x射线辐射的方法 - Google Patents

X射线源以及用于产生x射线辐射的方法 Download PDF

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Publication number
CN116504601A
CN116504601A CN202310689884.5A CN202310689884A CN116504601A CN 116504601 A CN116504601 A CN 116504601A CN 202310689884 A CN202310689884 A CN 202310689884A CN 116504601 A CN116504601 A CN 116504601A
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CN
China
Prior art keywords
liquid target
width
electron beam
liquid
axis
Prior art date
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Pending
Application number
CN202310689884.5A
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English (en)
Chinese (zh)
Inventor
比约恩·汉森
波尔·塔克曼
王育立
田中志穂
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Excillum AB
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Excillum AB
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Application filed by Excillum AB filed Critical Excillum AB
Publication of CN116504601A publication Critical patent/CN116504601A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/153—Spot position control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/002—Supply of the plasma generating material
    • H05G2/0027—Arrangements for controlling the supply; Arrangements for measurements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H01J2235/082—Fluids, e.g. liquids, gases

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • X-Ray Techniques (AREA)
CN202310689884.5A 2017-12-01 2018-11-30 X射线源以及用于产生x射线辐射的方法 Pending CN116504601A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
EP17204949.6 2017-12-01
EP17204949.6A EP3493239A1 (en) 2017-12-01 2017-12-01 X-ray source and method for generating x-ray radiation
CN201880077013.5A CN111542906B (zh) 2017-12-01 2018-11-30 X射线源以及用于产生x射线辐射的方法
PCT/EP2018/083138 WO2019106145A1 (en) 2017-12-01 2018-11-30 X-ray source and method for generating x-ray radiation

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201880077013.5A Division CN111542906B (zh) 2017-12-01 2018-11-30 X射线源以及用于产生x射线辐射的方法

Publications (1)

Publication Number Publication Date
CN116504601A true CN116504601A (zh) 2023-07-28

Family

ID=60569730

Family Applications (2)

Application Number Title Priority Date Filing Date
CN202310689884.5A Pending CN116504601A (zh) 2017-12-01 2018-11-30 X射线源以及用于产生x射线辐射的方法
CN201880077013.5A Active CN111542906B (zh) 2017-12-01 2018-11-30 X射线源以及用于产生x射线辐射的方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201880077013.5A Active CN111542906B (zh) 2017-12-01 2018-11-30 X射线源以及用于产生x射线辐射的方法

Country Status (8)

Country Link
US (2) US11342154B2 (enExample)
EP (2) EP3493239A1 (enExample)
JP (2) JP7195648B2 (enExample)
KR (2) KR20240150529A (enExample)
CN (2) CN116504601A (enExample)
AU (1) AU2018374514B2 (enExample)
TW (1) TWI687959B (enExample)
WO (1) WO2019106145A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3493239A1 (en) 2017-12-01 2019-06-05 Excillum AB X-ray source and method for generating x-ray radiation
EP3579664A1 (en) * 2018-06-08 2019-12-11 Excillum AB Method for controlling an x-ray source
EP3648135A1 (en) 2018-11-05 2020-05-06 Excillum AB Mechanical alignment of x-ray sources
JPWO2021199563A1 (enExample) * 2020-04-03 2021-10-07
EP4075474A1 (en) * 2021-04-15 2022-10-19 Excillum AB Liquid jet target x-ray source
JP7337312B1 (ja) * 2022-03-31 2023-09-01 キヤノンアネルバ株式会社 Ｘ線発生装置、ｘ線撮像装置、および、ｘ線発生装置の調整方法
CN114945237B (zh) * 2022-04-25 2025-12-05 上海科技大学 桌面型飞秒硬x射线脉冲源装置及脉冲产生方法
SE2351080A1 (en) * 2023-09-18 2025-03-19 Northvolt Ab A battery cell imaging apparatus

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JPH05258692A (ja) 1992-03-10 1993-10-08 Nikon Corp Ｘ線発生方法およびｘ線発生装置
US6324255B1 (en) * 1998-08-13 2001-11-27 Nikon Technologies, Inc. X-ray irradiation apparatus and x-ray exposure apparatus
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EP1573774A2 (en) * 2002-12-11 2005-09-14 Koninklijke Philips Electronics N.V. X-ray source for generating monochromatic x-rays
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DE102004013620B4 (de) * 2004-03-19 2008-12-04 GE Homeland Protection, Inc., Newark Elektronenfenster für eine Flüssigmetallanode, Flüssigmetallanode, Röntgenstrahler und Verfahren zum Betrieb eines solchen Röntgenstrahlers
US7208746B2 (en) * 2004-07-14 2007-04-24 Asml Netherlands B.V. Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
US8213576B2 (en) * 2007-08-09 2012-07-03 Shimadzu Corporation X-ray tube apparatus
DE102008026938A1 (de) * 2008-06-05 2009-12-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Strahlungsquelle und Verfahren zum Erzeugen von Röntgenstrahlung
US8681943B2 (en) * 2009-01-26 2014-03-25 Excillum Ab X-ray window
EP2743963B8 (en) * 2009-04-03 2015-10-28 Excillum AB Supply of a liquid-metal target in x-ray generation
HUP1000635A2 (en) * 2010-11-26 2012-05-29 Ge Hungary Kft Liquid anode x-ray source
EP3089192B1 (en) * 2010-12-22 2018-05-09 Excillum AB Focusing an electron beam in an x-ray source
WO2013020130A1 (en) 2011-08-04 2013-02-07 John Lewellen Bremstrahlung target for intensity modulated x-ray radiation therapy and stereotactic x-ray therapy
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EP2837016B1 (de) * 2012-06-15 2016-08-17 Siemens Aktiengesellschaft Röntgenstrahlungsquelle und deren verwendung und verfahren zum erzeugen von röntgenstrahlung
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EP3493239A1 (en) 2017-12-01 2019-06-05 Excillum AB X-ray source and method for generating x-ray radiation

Also Published As

Publication number Publication date
US11342154B2 (en) 2022-05-24
JP7488600B2 (ja) 2024-05-22
KR102714936B1 (ko) 2024-10-07
JP2023027189A (ja) 2023-03-01
EP3718127B1 (en) 2023-12-20
CN111542906A (zh) 2020-08-14
CN111542906B (zh) 2023-06-30
TWI687959B (zh) 2020-03-11
KR20200090885A (ko) 2020-07-29
US20220254595A1 (en) 2022-08-11
EP3493239A1 (en) 2019-06-05
TW201926396A (zh) 2019-07-01
US11963286B2 (en) 2024-04-16
JP7195648B2 (ja) 2022-12-26
WO2019106145A1 (en) 2019-06-06
JP2021504906A (ja) 2021-02-15
AU2018374514A1 (en) 2020-07-16
EP3718127A1 (en) 2020-10-07
KR20240150529A (ko) 2024-10-15
US20210027974A1 (en) 2021-01-28
AU2018374514B2 (en) 2021-11-11

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