CN116454012B - Cleaning and degumming equipment for photovoltaic silicon wafer - Google Patents
Cleaning and degumming equipment for photovoltaic silicon wafer Download PDFInfo
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- CN116454012B CN116454012B CN202310499553.5A CN202310499553A CN116454012B CN 116454012 B CN116454012 B CN 116454012B CN 202310499553 A CN202310499553 A CN 202310499553A CN 116454012 B CN116454012 B CN 116454012B
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 78
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 78
- 239000010703 silicon Substances 0.000 title claims abstract description 78
- 238000004140 cleaning Methods 0.000 title claims abstract description 19
- 230000005540 biological transmission Effects 0.000 claims abstract description 29
- 239000007788 liquid Substances 0.000 claims abstract description 14
- 235000012431 wafers Nutrition 0.000 claims description 69
- 238000003756 stirring Methods 0.000 claims description 8
- 230000000694 effects Effects 0.000 abstract description 6
- 239000012790 adhesive layer Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 3
- 238000010248 power generation Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/044—Cleaning involving contact with liquid using agitated containers in which the liquid and articles or material are placed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Photovoltaic Devices (AREA)
Abstract
The invention provides a cleaning and degumming device for a photovoltaic silicon wafer, which relates to the field of photovoltaic silicon wafer processing and comprises an degumming inclined barrel; the top of the degumming inclined barrel is groove-shaped, a gear motor is arranged at the top of the degumming inclined barrel, the bottom of the gear motor is connected with a rotating shaft, and the rotating shaft is positioned in the degumming inclined barrel; the bottom of the degumming inclined barrel is provided with a liquid outlet, and a liquid outlet valve is arranged at the liquid outlet. According to the invention, the upper movable turntable and the lower movable turntable are driven to synchronously rotate by the transmission rod, the movable turntable drives the two double-rod movable frames to synchronously move inwards by the connecting rod, and the double-rod movable frames are used for clamping and fixing the photovoltaic silicon wafer, so that the double-rod movable frames can ensure the clamping and fixing effect of the photovoltaic silicon wafer, and the clamping and fixing operation of the photovoltaic silicon wafer is simpler and more convenient. The problem of current photovoltaic silicon chip is with wasing equipment of coming unstuck is comparatively loaded down with trivial details to photovoltaic silicon chip centre gripping fixed when using, need consume long time just can be with the photovoltaic silicon chip in the fixed inside equipment of arranging.
Description
Technical Field
The invention relates to the technical field of photovoltaic silicon wafer processing, in particular to a cleaning and degumming device for a photovoltaic silicon wafer.
Background
Photovoltaic is a short term of solar photovoltaic power generation system, and is a novel power generation system for directly converting solar radiation energy into electric energy by utilizing the photovoltaic effect of a solar cell semiconductor material, wherein silicon wafers in the production of the used semiconductor devices are strictly cleaned by cleaning and degumming equipment so as to remove residual adhesive layers on the surfaces of the silicon wafers.
The traditional photovoltaic silicon wafer cleaning and degumming operation needs to be carried out on the photovoltaic silicon wafer after clamping and fixing, then the photovoltaic silicon wafer after clamping and fixing can be cleaned and degummed, the traditional photovoltaic silicon wafer cleaning and degumming equipment is complicated in clamping and fixing the photovoltaic silicon wafer when in use, the photovoltaic silicon wafer can be fixed in the equipment in an arrangement mode only after a long time is consumed, the cleaning and degumming efficiency of the photovoltaic silicon wafer is affected, and the high-efficiency processing requirement of the photovoltaic silicon wafer is difficult to meet.
Disclosure of Invention
In view of the above, the invention provides a cleaning and degumming device for a photovoltaic silicon wafer, so as to solve the problems that when the existing cleaning and degumming device for the photovoltaic silicon wafer is used, the clamping and fixing of the photovoltaic silicon wafer are complicated, the photovoltaic silicon wafer can be fixed in an arrangement shape in the device only after a long time is required, the cleaning and degumming efficiency of the photovoltaic silicon wafer is affected, and the high-efficiency processing of the photovoltaic silicon wafer is difficult to meet.
The invention provides a cleaning and degumming device for a photovoltaic silicon wafer, which specifically comprises the following steps: degumming inclined barrel; the top of the degumming inclined barrel is groove-shaped, a gear motor is arranged at the top of the degumming inclined barrel, the bottom of the gear motor is connected with a rotating shaft, and the rotating shaft is positioned in the degumming inclined barrel; the bottom of the degumming inclined barrel is provided with a liquid outlet, and a liquid outlet valve is arranged at the liquid outlet; four degumming holding frames are arranged in the degumming inclined barrel in a surrounding manner, and the upper end and the lower end of the degumming holding frames are respectively contacted with the degumming inclined barrel; two double-rod movable frames are symmetrically arranged in the degumming holding frame, the outer sides of the upper end and the lower end of the degumming holding frame are respectively connected with movable turntables, two connecting rods are connected to the outer sides of the movable turntables, the connecting rods are connected with the double-rod movable frames, and the upper end and the lower end of the double-rod movable frames are respectively connected with the two connecting rods; the top of the degumming holding frame is provided with a handle, the inside of the degumming holding frame is connected with a transmission rod, and the upper end and the lower end of the transmission rod are respectively connected with two movable turntables; the inside of the degumming holding frame is arranged up and down, and the two ends of the photovoltaic silicon wafer are respectively contacted with the two double-rod movable frames.
Further, four slide holes are respectively formed in the upper end and the lower end of the degumming holding frame, the upper end and the lower end of the double-rod movable frame are respectively connected in the slide holes formed in the upper end and the lower end of the degumming holding frame in a sliding mode, clamping piece grooves are formed in one side of the double-rod movable frame in an arrangement mode, two ends of the photovoltaic silicon wafer are respectively located in the clamping piece grooves formed in the double-rod movable frame, when the photovoltaic silicon wafer is placed in the degumming holding frame in an arrangement mode, the two double-rod movable frames are moved inwards to be adjusted, the interval distance between the two double-rod movable frames is shortened, two ends of the photovoltaic silicon wafer are respectively contacted in the clamping piece grooves formed in the two double-rod movable frames, and the photovoltaic silicon wafer is clamped and fixed through the double-rod movable frames.
Further, the movable turntable is rotationally connected with the degumming holding frame, one end of the connecting rod is rotationally connected with the movable turntable, the other end of the connecting rod is rotationally connected with the double-rod movable frame, and the movable turntable is respectively connected with the two double-rod movable frames through two connecting rods.
Further, the transfer line is connected with the frame rotation that holds that comes unstuck, and the transfer line top is equipped with the hand wheel, and both ends are equipped with the gear respectively about the transfer line, and movable carousel one side is equipped with the arc rack, and the gear meshes with the arc rack that movable carousel was equipped with, drives the transfer line through the hand wheel and rotates, and the transfer line passes through the gear to drive two movable turntables synchronous rotation about, and the movable turnplate passes through the connecting rod and drives two bipole movable frames synchronous inwards movement.
Further, the top of the degumming holding frame is provided with a screw hole, a bolt is in threaded connection with the screw hole, a stress block is arranged outside one movable turntable, one end of the bolt is in contact with the stress block arranged on the movable turntable, after the transmission rod rotates and adjusts, the bolt is rotated, the bolt is in contact with the stress block arranged on the movable turntable, the movable turntable is fixed through the bolt, the movable turntable is prevented from reversely rotating, and accordingly the other movable turntable is fixed through the transmission rod connected with the movable turntable.
Further, the top of the degumming inclined barrel is provided with four taking and placing openings in a surrounding mode, the degumming containing frame is placed in the degumming inclined barrel through the taking and placing openings, four groups of upper limiting blocks are arranged on the top of the degumming inclined barrel in a surrounding mode, each group of upper limiting blocks is divided into three, the three upper limiting blocks are located at the taking and placing opening portions, and the periphery of the top of the degumming containing frame is respectively contacted with the three upper limiting blocks.
Further, be the encircling in the inclined barrel bottom that comes unstuck and be equipped with four lower stoppers, it is equipped with spacing jack to hold the frame bottom to come unstuck, and lower stopper top is pegged graft in the spacing jack that holds the frame bottom and be equipped with that comes unstuck, holds the frame when placing in the inclined barrel that comes unstuck inside, comes into contact with three upper stopper at the inclined barrel top that comes unstuck, and the inside lower stopper that is equipped with of inclined barrel bottom that comes unstuck is pegged graft in that holds the frame bottom that comes unstuck is equipped with spacing jack, holds the frame upper and lower both ends through upper stopper and lower stopper and carries out spacingly.
Further, the pivot is rotated with the inclined barrel that comes unstuck and is connected, and the pivot is located the inside central part of inclined barrel that comes unstuck, and the pivot outside is encircleed the form and is equipped with four stirring leaves, and four degumping hold the frame and are encircleed the form and lie in the pivot periphery, and gear motor drives the pivot and rotates, and the pivot flows through stirring She Jiaodong inclined barrel inside solution that comes unstuck, makes the outside glue film of photovoltaic silicon chip can contact reaction with more solution that comes unstuck.
Advantageous effects
1. When the photovoltaic silicon wafers are placed in the degumming holding frame in an arrangement mode, the two double-rod movable frames are moved inwards to be adjusted, the interval distance between the two double-rod movable frames is reduced, two ends of the photovoltaic silicon wafers are respectively contacted with clamping piece grooves arranged on the two double-rod movable frames, the photovoltaic silicon wafers are clamped and fixed through the double-rod movable frames, and the stability of the photovoltaic silicon wafers in the degumming holding frame in the subsequent degumming process is guaranteed; the transmission rod is driven to rotate through the hand wheel, the transmission rod drives the upper movable turntable and the lower movable turntable to synchronously rotate through the gear, and the movable turntable drives the two double-rod movable frames to synchronously move inwards through the connecting rod, so that the synchronism of the movement adjustment of the upper ends and the lower ends of the two double-rod movable frames is ensured; after the transmission rod rotates and adjusts, the bolt is rotated, the bolt is enabled to be in contact with a stress block arranged on the movable turntable, the movable turntable is fixed through the bolt, the movable turntable is prevented from rotating reversely, the transmission rod connected with the movable turntable is used for fixing another movable turntable, the clamping and fixing effects of the double-rod movable frame on the photovoltaic silicon wafers are guaranteed, and the clamping and fixing operation of the photovoltaic silicon wafers is simpler and more convenient.
2. When the degumming holding frame is placed in the degumming inclined barrel, the top of the degumming inclined barrel is contacted with three upper limiting blocks, the lower limiting blocks arranged in the bottom of the degumming inclined barrel are inserted into limiting jacks arranged in the bottom of the degumming holding frame, and the upper and lower ends of the degumming holding frame are limited by the upper limiting blocks and the lower limiting blocks, so that the stability of the state of the degumming holding frame is ensured; the rotating shaft is driven to rotate by the gear motor, the degumming solution inside the stirring She Jiaodong degumming inclined barrel flows through the rotating shaft, so that the outer adhesive layer of the photovoltaic silicon wafer can be in contact reaction with more degumming solutions, the adhesive layer falling off from the outer part of the photovoltaic silicon wafer is removed by the degumming solution in a flowing state, and the cleaning degumming efficiency of the photovoltaic silicon wafer is improved.
Drawings
In order to more clearly illustrate the technical solution of the embodiments of the present invention, the drawings of the embodiments will be briefly described below.
The drawings described below are only for illustration of some embodiments of the invention and are not intended to limit the invention.
In the drawings:
FIG. 1 is a schematic view of the overall axial side structure of a cleaning and degumming apparatus for photovoltaic silicon wafers according to an embodiment of the present invention;
FIG. 2 is a schematic axial side structural view of a degumming inclined barrel according to an embodiment of the present invention;
FIG. 3 is a schematic cross-sectional structural view of a degummed oblique bucket of an embodiment of the present invention;
FIG. 4 is a schematic view of an axial side structure of a photovoltaic wafer in a clamped state according to an embodiment of the present invention;
FIG. 5 is a schematic view of the connection structure of the degumming holding rack and the double-rod movable rack according to the embodiment of the invention;
FIG. 6 is a schematic axial side view of a degummed holding rack in accordance with an embodiment of the present invention;
FIG. 7 is a schematic view of a two-bar mobile frame, mobile turntable and link connection structure according to an embodiment of the present invention;
fig. 8 is a schematic diagram of a side structure of a drive shaft according to an embodiment of the present invention.
List of reference numerals
1. Degumming inclined barrel; 101. a taking and placing port; 102. a liquid outlet; 103. an upper limiting block; 104. a lower limiting block; 105. a liquid discharge valve; 2. a speed reducing motor; 3. a rotating shaft; 301. stirring the leaves; 4. degumming containing rack; 401. a handle; 402. a slide hole; 403. a screw hole; 404. limiting jack; 5. a double-rod movable frame; 501. a clip groove; 6. a movable turntable; 601. an arc-shaped rack; 602. a stress block; 7. a connecting rod; 8. a transmission rod; 801. a hand wheel; 802. a gear; 9. a bolt; 10. and (3) a photovoltaic silicon wafer.
Description of the embodiments
Examples: please refer to fig. 1 to 8:
the invention provides a cleaning and degumming device for a photovoltaic silicon wafer, which comprises a degumming inclined barrel 1; the top of the degumming inclined barrel 1 is groove-shaped, a gear motor 2 is arranged at the top of the degumming inclined barrel 1, the bottom of the gear motor 2 is connected with a rotating shaft 3, and the rotating shaft 3 is positioned in the degumming inclined barrel 1; the bottom of the degumming inclined barrel 1 is provided with a liquid outlet 102, and a liquid outlet valve 105 is arranged at the position of the liquid outlet 102; four degumming holding frames 4 are arranged in the degumming inclined barrel 1 in a surrounding manner, and the upper end and the lower end of the degumming holding frames 4 are respectively contacted with the degumming inclined barrel 1; two double-rod movable frames 5 are symmetrically arranged in the degumming holding frame 4, movable turntables 6 are respectively connected to the outer sides of the upper end and the lower end of the degumming holding frame 4, two connecting rods 7 are connected to the outer sides of the movable turntables 6, the connecting rods 7 are connected with the double-rod movable frames 5, and the upper end and the lower end of the double-rod movable frames 5 are respectively connected with the two connecting rods 7; a lifting handle 401 is arranged at the top of the degumming holding frame 4, a transmission rod 8 is connected inside the degumming holding frame 4, and the upper end and the lower end of the transmission rod 8 are respectively connected with two movable turntables 6; four sliding holes 402 are respectively formed in the upper end and the lower end of the degumming holding frame 4, the upper end and the lower end of the double-rod movable frame 5 are respectively connected in the sliding holes 402 formed in the upper end and the lower end of the degumming holding frame 4 in a sliding manner, clamping piece grooves 501 are formed in one side of the double-rod movable frame 5 in an arrangement manner, two ends of the photovoltaic silicon wafer 10 are respectively positioned in the clamping piece grooves 501 formed in the double-rod movable frame 5, when the photovoltaic silicon wafer 10 is placed in the degumming holding frame 4 in an arrangement manner, the two double-rod movable frames 5 are moved inwards to be adjusted, the interval distance between the two double-rod movable frames 5 is shortened, the two ends of the photovoltaic silicon wafer 10 are respectively contacted in the clamping piece grooves 501 formed in the two double-rod movable frames 5, and the photovoltaic silicon wafer 10 is clamped and fixed through the double-rod movable frames 5, so that the stability of the photovoltaic silicon wafer 10 in the degumming holding frame 4 in the subsequent degumming process is ensured; the inside of the degumming holding frame 4 is provided with photovoltaic silicon wafers 10 which are arranged up and down, and two ends of the photovoltaic silicon wafers 10 are respectively contacted with the two double-rod movable frames 5; the movable turntable 6 is rotationally connected with the degumming holding frame 4, one end of the connecting rod 7 is rotationally connected with the movable turntable 6, the other end of the connecting rod 7 is rotationally connected with the double-rod movable frame 5, the movable turntable 6 is respectively connected with the two double-rod movable frames 5 through the two connecting rods 7, the transmission rod 8 is rotationally connected with the degumming holding frame 4, the top end of the transmission rod 8 is provided with a hand wheel 801, the upper end and the lower end of the transmission rod 8 are respectively provided with a gear 802, one side of the movable turntable 6 is provided with an arc-shaped rack 601, the gear 802 is meshed with the arc-shaped rack 601 arranged on the movable turntable 6, the transmission rod 8 is driven to rotate through the hand wheel 801, the transmission rod 8 drives the upper movable turntable 6 and the lower movable turntable 6 to synchronously rotate, the movable turntable 6 drives the two double-rod movable frames 5 to synchronously move inwards through the connecting rod 7, and the synchronism of the upper end and the lower end of the two double-rod movable frames 5 is ensured.
Wherein, screw holes 403 are arranged at the top of the degumming holding frame 4, a bolt 9 is connected in the screw holes 403 in a threaded manner, a stress block 602 is arranged outside one movable turntable 6, and one end of the bolt 9 is contacted with the stress block 602 arranged on the movable turntable 6; by adopting the technical scheme, after the transmission rod 8 rotates and adjusts, the bolt 9 is rotated, so that the bolt 9 is in contact with the stress block 602 arranged on the movable turntable 6, the movable turntable 6 is fixed through the bolt 9, the movable turntable 6 is prevented from reversely rotating, the transmission rod 8 connected with the movable turntable 6 is used for fixing the other movable turntable 6, the clamping and fixing effects of the double-rod movable frame 5 on the photovoltaic silicon wafers 10 are guaranteed, and the clamping and fixing operation of the photovoltaic silicon wafers 10 is simpler and more convenient.
Four taking and placing ports 101 are formed in the top of the degumming inclined barrel 1 in a surrounding mode, the degumming holding frame 4 is placed in the degumming inclined barrel 1 through the taking and placing ports 101, four groups of upper limiting blocks 103 are arranged on the top of the degumming inclined barrel 1 in a surrounding mode, each group of upper limiting blocks 103 is divided into three, the three upper limiting blocks 103 are located at the position of the taking and placing ports 101, the periphery of the top of the degumming holding frame 4 is respectively contacted with the three upper limiting blocks 103, four lower limiting blocks 104 are arranged in the bottom of the degumming inclined barrel 1 in a surrounding mode, limiting jacks 404 are formed in the bottom of the degumming holding frame 4, and the top ends of the lower limiting blocks 104 are inserted into the limiting jacks 404 formed in the bottom of the degumming holding frame 4; by adopting the technical scheme, when the degumming holding frame 4 is placed in the degumming inclined barrel 1, the top of the degumming inclined barrel 1 is contacted with the three upper limiting blocks 103, the lower limiting block 104 arranged in the bottom of the degumming inclined barrel 1 is inserted in the limiting jack 404 arranged at the bottom of the degumming holding frame 4, and the upper end and the lower end of the degumming holding frame 4 are limited by the upper limiting block 103 and the lower limiting block 104, so that the stability of the state of the degumming holding frame 4 is ensured.
The rotating shaft 3 is rotationally connected with the degumming inclined barrel 1, the rotating shaft 3 is positioned at the central part inside the degumming inclined barrel 1, four stirring blades 301 are arranged outside the rotating shaft 3 in a surrounding manner, and four degumming holding frames 4 are positioned at the periphery of the rotating shaft 3 in a surrounding manner; by adopting the technical scheme, the rotating shaft 3 is driven to rotate by the gear motor 2, the rotating shaft 3 agitates the degumming solution in the degumming inclined barrel 1 to flow by the stirring blade 301, so that the external adhesive layer of the photovoltaic silicon wafer 10 can be in contact reaction with more degumming solutions, the adhesive layer which is in a flowing state and falls off from the external of the photovoltaic silicon wafer 10 is removed by the degumming solution, and the degumming efficiency of the photovoltaic silicon wafer 10 is improved.
Specific use and action of the embodiment: in the invention, when the photovoltaic silicon wafers 10 are placed in an array shape in the degumming holding frame 4, the hand wheel 801 drives the transmission rod 8 to rotate, the transmission rod 8 drives the upper movable turntable 6 and the lower movable turntable 6 to synchronously rotate through the gear 802, and the movable turntable 6 drives the two double-rod movable frames 5 to synchronously move inwards through the connecting rod 7, so that the synchronism of the movement adjustment of the upper ends and the lower ends of the two double-rod movable frames 5 is ensured; the two double-rod movable frames 5 move inwards to adjust, so that the interval distance between the two double-rod movable frames 5 is reduced, two ends of the photovoltaic silicon wafer 10 are respectively contacted in clamping piece grooves 501 arranged on the two double-rod movable frames 5, the photovoltaic silicon wafer 10 is clamped and fixed through the double-rod movable frames 5, and the stability of the photovoltaic silicon wafer 10 in the degumming holding frame 4 in the subsequent degumming process is ensured; after the transmission rod 8 is rotated and adjusted, the bolt 9 is rotated to enable the bolt 9 to be in contact with a stress block 602 arranged on the movable turntable 6, the movable turntable 6 is fixed through the bolt 9, and the movable turntable 6 is prevented from rotating reversely, so that the other movable turntable 6 is fixed through the transmission rod 8 connected with the movable turntable 6, the clamping and fixing effect of the double-rod movable frame 5 on the photovoltaic silicon wafer 10 is ensured, and the clamping and fixing operation of the photovoltaic silicon wafer 10 is simpler and more convenient; next, the degumming holding frame 4 is placed in the degumming inclined barrel 1 through the taking opening 101, the top of the degumming inclined barrel 1 is contacted with three upper limiting blocks 103, a lower limiting block 104 arranged in the bottom of the degumming inclined barrel 1 is inserted into a limiting jack 404 arranged at the bottom of the degumming holding frame 4, the upper end and the lower end of the degumming holding frame 4 are limited through the upper limiting block 103 and the lower limiting block 104, and the stability of the state of the degumming holding frame 4 is ensured; then the rotating shaft 3 is driven to rotate by the gear motor 2, the rotating shaft 3 agitates the degumming solution in the degumming inclined barrel 1 to flow by the stirring blade 301, so that the external adhesive layer of the photovoltaic silicon wafer 10 can be in contact reaction with more degumming solution, the adhesive layer which is fallen off from the external of the photovoltaic silicon wafer 10 is removed by the degumming solution in a flowing state, and the degumming efficiency of the photovoltaic silicon wafer 10 is improved; after the photovoltaic silicon wafer 10 is washed and degummed, the degummed accommodating frame 4 is taken out from the degummed inclined barrel 1, the bolts 9 are reversely rotated, the bolts 9 are separated from the movable turntables 6, the two movable turntables 6 can be driven to reversely rotate through the transmission rods 8, the movable turntables 6 drive the two double-rod movable frames 5 to synchronously move outwards through the connecting rods 7, the double-rod movable frames 5 are separated from the photovoltaic silicon wafer 10, and the degummed accommodating frame 4 can be used for taking out and intensively accommodating the degummed photovoltaic silicon wafer 10 after the degummed accommodating frame 4 is washed.
Claims (4)
1. The cleaning and degumming equipment for the photovoltaic silicon wafers is characterized by comprising an degumming inclined barrel (1); the top of the degumming inclined barrel (1) is groove-shaped, a gear motor (2) is arranged at the top of the degumming inclined barrel (1), a rotating shaft (3) is connected to the bottom of the gear motor (2), and the rotating shaft (3) is positioned in the degumming inclined barrel (1); a liquid outlet (102) is arranged at the bottom of the degumming inclined barrel (1), and a liquid outlet valve (105) is arranged at the position of the liquid outlet (102); four degumming holding frames (4) are installed in a surrounding mode in the degumming inclined barrel (1), and the upper end and the lower end of each degumming holding frame (4) are respectively contacted with the degumming inclined barrel (1); two double-rod movable frames (5) are symmetrically arranged in the degumming holding frame (4), movable turntables (6) are respectively connected to the outer sides of the upper end and the lower end of the degumming holding frame (4), two connecting rods (7) are connected to the outer parts of the movable turntables (6), the connecting rods (7) are connected with the double-rod movable frames (5), and the upper end and the lower end of the double-rod movable frames (5) are connected with the two connecting rods (7) respectively; a lifting handle (401) is arranged at the top of the degumming holding frame (4), a transmission rod (8) is connected inside the degumming holding frame (4), and the upper end and the lower end of the transmission rod (8) are respectively connected with two movable turntables (6); the inside of the degumming holding frame (4) is provided with photovoltaic silicon wafers (10) which are arranged up and down, and two ends of each photovoltaic silicon wafer (10) are respectively contacted with the two double-rod movable frames (5); four sliding holes (402) are respectively formed in the upper end and the lower end of the degumming holding frame (4), the upper end and the lower end of the double-rod movable frame (5) are respectively connected in the sliding holes (402) formed in the upper end and the lower end of the degumming holding frame (4) in a sliding manner, clamping piece grooves (501) are formed in one side of the double-rod movable frame (5) in an arrangement manner, and two ends of the photovoltaic silicon wafer (10) are respectively located in the clamping piece grooves (501) formed in the double-rod movable frame (5); the movable turntable (6) is rotationally connected with the degumming holding frame (4), one end of the connecting rod (7) is rotationally connected with the movable turntable (6), the other end of the connecting rod (7) is rotationally connected with the double-rod movable frame (5), and the movable turntable (6) is respectively connected with the two double-rod movable frames (5) through the two connecting rods (7); the transmission rod (8) is rotationally connected with the degumming holding frame (4), a hand wheel (801) is arranged at the top end of the transmission rod (8), gears (802) are respectively arranged at the upper end and the lower end of the transmission rod (8), an arc-shaped rack (601) is arranged on one side of the movable turntable (6), and the gears (802) are meshed with the arc-shaped rack (601) arranged on the movable turntable (6); the top of the degumming holding frame (4) is provided with a screw hole (403), a bolt (9) is in threaded connection with the screw hole (403), a stress block (602) is arranged outside one of the movable turntables (6), and one end of the bolt (9) is in contact with the stress block (602) arranged on the movable turntable (6).
2. The cleaning and degumming device for a photovoltaic silicon wafer according to claim 1, wherein: the top of the degumming inclined barrel (1) is provided with four taking and placing openings (101) in a surrounding mode, the degumming containing frame (4) is placed in the degumming inclined barrel (1) through the taking and placing openings (101), four groups of upper limiting blocks (103) are arranged on the top of the degumming inclined barrel (1) in a surrounding mode, each group of upper limiting blocks (103) is divided into three, the three upper limiting blocks (103) are located at the positions of the taking and placing openings (101), and the periphery of the top of the degumming containing frame (4) is respectively contacted with the three upper limiting blocks (103).
3. The cleaning and degumming device for a photovoltaic silicon wafer according to claim 1, wherein: four lower limiting blocks (104) are arranged in the bottom of the degumming inclined barrel (1) in a surrounding mode, limiting jacks (404) are arranged at the bottom of the degumming holding frame (4), and the top ends of the lower limiting blocks (104) are inserted into the limiting jacks (404) arranged at the bottom of the degumming holding frame (4).
4. The cleaning and degumming device for a photovoltaic silicon wafer according to claim 1, wherein: the rotary shaft (3) is rotationally connected with the degumming inclined barrel (1), the rotary shaft (3) is positioned at the central part inside the degumming inclined barrel (1), four stirring blades (301) are arranged outside the rotary shaft (3) in a surrounding mode, and four degumming holding frames (4) are positioned at the periphery of the rotary shaft (3) in a surrounding mode.
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| CN202310499553.5A CN116454012B (en) | 2023-05-06 | 2023-05-06 | Cleaning and degumming equipment for photovoltaic silicon wafer |
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| CN202310499553.5A CN116454012B (en) | 2023-05-06 | 2023-05-06 | Cleaning and degumming equipment for photovoltaic silicon wafer |
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