CN202762707U - Fixture for washing and degumming silicon wafer - Google Patents
Fixture for washing and degumming silicon wafer Download PDFInfo
- Publication number
- CN202762707U CN202762707U CN 201220334481 CN201220334481U CN202762707U CN 202762707 U CN202762707 U CN 202762707U CN 201220334481 CN201220334481 CN 201220334481 CN 201220334481 U CN201220334481 U CN 201220334481U CN 202762707 U CN202762707 U CN 202762707U
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- side plate
- pair
- degumming
- bar
- silicon chip
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- Expired - Fee Related
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- Cleaning Or Drying Semiconductors (AREA)
Abstract
The utility model discloses a fixture for washing and degumming a silicon wafer. The fixture for washing and degumming the silicon wafer comprises a degumming basket and a silicon wafer clamping part. The degumming basket comprises a first side plate, a second side plate, a pair of horizontal rods and a pair of supporting rods, wherein the first side plate and the second side plate are arranged in parallel, the pair of horizontal rods and the pair of supporting rods are installed between two side plates, the pair of horizontal rods is arranged at an upper section of an opposite face of the two side plates, and the pair of supporting rods is arranged at a lower section of an opposite face of the two side plates. The silicon wafer clamping part comprises two groups of strip brush supporting mechanisms. Each group of strip brush supporting mechanism comprises a strip brush, a plurality of strip brush fixing blocks, two torsional springs and a supporting shaft. And at the same time, each strip brush is fixed in a strip brush installation groove which is arranged in each fixing blocks of each group. A first hole is arranged in each strip brush fixing block. Each group of strip brush penetrates through the same supporting shaft through the first hole. Two ends of each supporting shaft are respectively connected with the first side plate and the second side plate. The fixture for washing and degumming the silicon wafer is reasonable in structure and thoroughly solves the problems that the silicon wafer is easy to slip and the ratio of qualified products is low.
Description
Technical field
The utility model belongs to mechanical equipment technical field, relates to a kind of clamper for cleaning and degumming silicon chip.
Background technology
Before monocrystalline silicon piece cutting, silicon rod need to be bonded on the glass plate and cut, cut into silicon chip after, through cleaning and degumming, make silicon chip break away from glass plate.
In the existing cleaning and degumming silicon chip process, clamper for cleaning and degumming silicon chip is provided with baffle plate, the silicon chip after baffle plate can fixedly come unstuck effectively, but baffle plate can damage silicon chip, affects Si wafer quality, has reduced yields.
Summary of the invention
The purpose of this utility model provides a kind of clamper for cleaning and degumming silicon chip, has solved that baffle plate arranges not science in the prior art, silicon chip easy damaged, the problem that yields is low.
The technical scheme that the utility model adopts is, a kind of clamper for cleaning and degumming silicon chip comprises come unstuck basket and silicon chip clamping part,
The described basket structure of coming unstuck is, comprise the first side plate and the second side plate and be installed on a pair of cross bar and pair of support rods between the biside plate, the first side plate wherein and the second side plate opposing parallel arrange, a pair of cross bar is arranged on the upper fragment position between the first side plate and the second side plate, is fixedly connected with this biside plate; Pair of support rods is arranged on the lower fragment position between the first side plate and the second side plate, is fixedly connected with this biside plate;
Described silicon chip clamping partly comprises two groups of bar brush supporting mechanisms,
Every group of bar brush supporting mechanism comprises bar brush, several brush fixed blocks, two torsion springs and a bolster, the bar brush is fixed in every group of bar brush mounting groove on the bar brush fixed block simultaneously, bar brush fixed block is provided with the first hole, and every group of bar brush fixed block all is through on the same bolster by the first hole separately is coaxial; Each bolster one end is connected with the first side plate, and each bolster other end is connected with the second side plate.
Clamper for cleaning and degumming silicon chip of the present utility model is further characterized in that:
Described each bolster two ends respectively are provided with a torsion spring, and one of them torsion spring one end is fixedly connected with the first side plate, and the other end is fixedly connected with handle; Another torsion spring one end is fixedly connected with the second side plate, and the other end is fixedly connected with handle.
Described the brush fixed block also is provided with the second hole, jointly is installed with a turning cylinder in the second hole of described every group of bar brush fixed block.
The beneficial effects of the utility model are, rational in infrastructure, thoroughly solved the problem that silicon chip easily slips, yields is low, be used for thin disc such as semiconductor wafer, glass substrate or similar articles clamping, the clamping when being used in particular for solar silicon wafers and carrying out cleaning and degumming.
Description of drawings
Fig. 1 is the forward sight structural representation of the utility model device;
Fig. 2 is the side-looking structural representation of the utility model device;
Fig. 3 is the single hole structural representation of the bar brush fixed block of the utility model device embodiment 1;
Fig. 4 is the double-pore structure schematic diagram of the bar brush fixed block of the utility model device embodiment 2.
Among the figure, 1. silicon chip, a 2. brush, a 3. brush fixed block, 4. torsion spring, 5. bolster, 6. support bar, 7. the first side plate, 8. the second side plate, 9. cross bar, 10. the first hole, 11. second holes, 12. brush mounting grooves, 13. handles.
The specific embodiment
Below in conjunction with the drawings and specific embodiments the utility model is elaborated.
With reference to Fig. 1, Fig. 2, clamper for cleaning and degumming silicon chip of the present utility model comprises come unstuck basket and silicon chip clamping part,
The described basket structure of coming unstuck is, comprise the first side plate 7, the second side plate 8 and be installed on a pair of cross bar 9 and pair of support rods 6 between the biside plate, the first side plate 7 wherein and the 8 opposing parallel settings of the second side plate, a pair of cross bar 9 is arranged between the first side plate 7 and the second side plate 8, be positioned at the epimere of this biside plate opposite face, the two ends of a pair of cross bar 9 are fixedly connected with this biside plate; Pair of support rods 6 is arranged between the first side plate 7 and the second side plate 8, is positioned at the hypomere of this biside plate opposite face, and the two ends of pair of support rods 6 are fixedly connected with this biside plate;
Described silicon chip clamping partly comprises two groups of bar brush supporting mechanisms, every group of bar brush supporting mechanism comprises bar brush 2, several brush fixed blocks 3, two torsion springs 4 and a bolster 5, the bar that bar brush 2 is fixed on several brush fixed blocks 3 is simultaneously brushed in the mounting groove 12, bar brush fixed block 3 is provided with the first hole 10, and several brush fixed blocks 3 are by the first hole 10 coaxial being through on the same bolster 5; Each bolster 5 one end is connected with the first side plate 7, and each bolster 5 other end is connected with the second side plate 8, and each bolster 5 two ends respectively is provided with a torsion spring 4, and one of them torsion spring 4 one end is fixedly connected with the first side plate 7, and the other end is fixedly connected with handle 13; Another torsion spring 4 one ends are fixedly connected with the second side plate 8, and the other end is fixedly connected with handle 13.
With reference to Fig. 3, the bolster 5 among the embodiment 1 is rotary, and handle 13 is used for manual operation rotary supporting shaft 5.
With reference to Fig. 4, each bar brush fixed block 3 can also be provided with the second hole 11, the second hole 11 interior turning cylinders that jointly are installed with of every group of bar brush fixed block 3 adopt the handle among the turning cylinder replacement embodiment 1, realize rotary supporting shaft 5 by jointly be installed with a turning cylinder in the second hole.
Be in free state when bar brush supporting mechanism is idle, bar brush 2 is in not contact condition with silicon chip 1; When bar brush supporting mechanism was in running order, bar brush 2 was parallel with silicon chip 1 contact and bottom.
Clamper for cleaning and degumming silicon chip of the present utility model when carrying out silicon wafer stripping, is brushed bar first the handle of supporting mechanism and is opened, and freely discharges.Then put silicon chip 1 to be come unstuck into the basket that comes unstuck, wait rinse silicon chip after, forward handle to duty, the bar brush 2 on both sides was up rotated the end of from, until support silicon chip 1, handle is fixed with limiting block at this state, begin to come unstuck.Come unstuck finish after, handle forwarded to drags for the material state, drag for the material state between duty and free state, when dragging for material, bar is brushed supporting mechanism, silicon chip drops on the support bar 6, but bar brush supporting mechanism also will contact with silicon chip, plays supporting role, begins to drag for material.Drag for the material finish after, forward handle to free state, once the work of coming unstuck is finished.
Claims (3)
1. clamper for cleaning and degumming silicon chip is characterized in that: comprise come unstuck basket and silicon chip clamping part,
The described basket structure of coming unstuck is, comprise the first side plate (7) and the second side plate (8) and a pair of cross bar (9) and pair of support rods (6), the first side plate (7) wherein and the second side plate (8) opposing parallel setting, a pair of cross bar (9) is arranged on the upper fragment position between the first side plate (7) and the second side plate (8), and the two ends of a pair of cross bar (9) are fixedly connected with this biside plate; Pair of support rods (6) is arranged on the lower fragment position between the first side plate (7) and the second side plate (8), and the two ends of pair of support rods (6) are fixedly connected with this biside plate;
Described silicon chip clamping partly comprises two groups of bar brush supporting mechanisms,
Every group of bar brush supporting mechanism comprises a bar brush (2), several brush fixed block (3), two torsion springs (4) and a bolster (5), the bar that bar brush (2) is fixed on every group of bar brush fixed block (3) is simultaneously brushed in the mounting groove (12), bar brush fixed block (3) is provided with the first hole (10), and every group of bar brush fixed block (3) all is through on the same bolster (5) by the first hole (10) separately is coaxial; Each bolster (5) one end is connected with the first side plate (7), and each bolster (5) other end is connected with the second side plate (8).
2. clamper for cleaning and degumming silicon chip according to claim 1, it is characterized in that: described each bolster (5) two ends respectively are provided with a torsion spring (4), one of them torsion spring (4) one end is fixedly connected with the first side plate (7), and the other end is fixedly connected with handle (13); Another torsion spring (4) one ends are fixedly connected with the second side plate (8), and the other end is fixedly connected with handle (13).
3. clamper for cleaning and degumming silicon chip according to claim 1 is characterized in that: brush fixed block (3) for described and also be provided with the second hole (11), jointly be installed with a turning cylinder in second hole (11) of described every group of bar brush fixed block (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220334481 CN202762707U (en) | 2012-07-11 | 2012-07-11 | Fixture for washing and degumming silicon wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220334481 CN202762707U (en) | 2012-07-11 | 2012-07-11 | Fixture for washing and degumming silicon wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202762707U true CN202762707U (en) | 2013-03-06 |
Family
ID=47769311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220334481 Expired - Fee Related CN202762707U (en) | 2012-07-11 | 2012-07-11 | Fixture for washing and degumming silicon wafer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202762707U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116454012A (en) * | 2023-05-06 | 2023-07-18 | 江苏旭泰电子科技有限公司 | Cleaning and degumming equipment for photovoltaic silicon wafer |
| CN117259319A (en) * | 2023-11-23 | 2023-12-22 | 苏州晨晖智能设备有限公司 | Automatic degumming equipment for monocrystalline silicon wafer production |
-
2012
- 2012-07-11 CN CN 201220334481 patent/CN202762707U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116454012A (en) * | 2023-05-06 | 2023-07-18 | 江苏旭泰电子科技有限公司 | Cleaning and degumming equipment for photovoltaic silicon wafer |
| CN116454012B (en) * | 2023-05-06 | 2023-11-24 | 江苏旭泰电子科技有限公司 | Cleaning and degumming equipment for photovoltaic silicon wafer |
| CN117259319A (en) * | 2023-11-23 | 2023-12-22 | 苏州晨晖智能设备有限公司 | Automatic degumming equipment for monocrystalline silicon wafer production |
| CN117259319B (en) * | 2023-11-23 | 2024-01-26 | 苏州晨晖智能设备有限公司 | Automatic degumming equipment for monocrystalline silicon wafer production |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Xi'an Longji Jingyi Semiconductor Materials Co Ltd Assignor: Xi'an Longji Silicon Material Co., Ltd.|Wuxi Longji Silicon Material Co., Ltd.|Yinchuan Longji Silicon Material Co., Ltd.|Ningxia Longji Silicon Material Co., Ltd. Contract record no.: 2014610000149 Denomination of utility model: Clamper for cleaning and degumming silicon chip Granted publication date: 20130306 License type: Exclusive License Record date: 20140926 |
|
| LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 710100 Changan District, Shaanxi Province, aerospace Road, No. 388, No. Co-patentee after: Wuxi LONGi Silicon Materials Corp. Patentee after: Longji green energy Polytron Technologies Inc Co-patentee after: Ningxia LONGi Silicon Material Co.,Ltd. Co-patentee after: Yinchuan LONGi Silicon Material Co.,Ltd. Address before: 710100 Changan District, Shaanxi Province, aerospace Road, No. 388, No. Co-patentee before: Wuxi LONGi Silicon Materials Corp. Patentee before: Xi'an Longji-Silicon Co., LTD. Co-patentee before: Ningxia LONGi Silicon Material Co.,Ltd. Co-patentee before: Yinchuan LONGi Silicon Material Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130306 Termination date: 20190711 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |