CN207839557U - Quartz wafer cleans fixing device - Google Patents
Quartz wafer cleans fixing device Download PDFInfo
- Publication number
- CN207839557U CN207839557U CN201721649894.2U CN201721649894U CN207839557U CN 207839557 U CN207839557 U CN 207839557U CN 201721649894 U CN201721649894 U CN 201721649894U CN 207839557 U CN207839557 U CN 207839557U
- Authority
- CN
- China
- Prior art keywords
- snap
- gauge
- quartz wafer
- side plate
- fixing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- Cleaning Or Drying Semiconductors (AREA)
- Cleaning In General (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses the research and development that a kind of quartz wafer cleans fixing device, it is desirable to provide and it is a kind of simple in structure, while the quartz wafer cleaning fixing device of cleaning degree and cleaning efficiency can be improved.The utility model includes that clamping assembly is adjusted in two blocks of symmetrically arranged side plates and the several groups being arranged between two blocks of side plates, the clamping assembly includes the first snap-gauge, the second snap-gauge and supporting backboard, first snap-gauge and second snap-gauge are slidably matched with the side plate, it is adapted between first snap-gauge and second snap-gauge and constitutes several screens, the supporting backboard is located at the underface of the screens, is provided on the side plate and the matched attachment device of exterior washings equipment.The utility model is applied to the technical field of quartz wafer processing.
Description
Technical field
The utility model is related to the technical field of quartz wafer processing, more particularly to a kind of fixed dress of quartz wafer cleaning
It sets.
Background technology
In quartz wafer process, cleaning process belongs to critical process, with industry production efficiency develop trend,
It grinds the big chip specification used and also increasingly tends to the development of bigger specification, the problem brought in process of production therewith is exactly clear
It washes, it is very strong between chip when cleaning to be attached together because chip itself is relatively thin when being especially worked into high-frequency chip,
Cause the sand grains between absorption that can not clean up, when wafer cleaning, is unable to fully scatter between piece and piece, especially in chip
After drying, it can be clearly visible the residual of surface grinding sand, so the cleaning of big chip must seek the method for new breakthrough,
And the new applicable cleaning device of research and development must be designed.
Utility model content
Technical problem to be solved in the utility model be overcome the deficiencies of the prior art and provide it is a kind of simple in structure,
The quartz wafer cleaning fixing device of cleaning degree and cleaning efficiency can be improved simultaneously.
Technical solution used by the utility model is：The utility model includes that two blocks of symmetrically arranged side plates and setting exist
Clamping assembly is adjusted in several groups between two blocks of side plates, and the clamping assembly includes the first snap-gauge, the second snap-gauge and holds
Snap-gauge, first snap-gauge and second snap-gauge is ask to be slidably matched with the side plate, first snap-gauge and described second
Several screens are adapted and constituted between snap-gauge, and the supporting backboard is located at the underface of the screens, is set on the side plate
It is equipped with and the matched attachment device of exterior washings equipment.
Further, several sliding grooves are provided on the side plate, first snap-gauge passes through institute with second snap-gauge
Sliding groove is stated to be slidably matched with the side plate.
Further, first snap-gauge and second snap-gauge by screw connection between the side plate.
Further, several card slots, and described first are equably provided on first snap-gauge and second snap-gauge
Card slot on snap-gauge is adapted to form the screens with the card slot on second snap-gauge.
Further, several limiting slots corresponding with the screens are provided on the supporting backboard.
Further, the supporting backboard is fixed by screws between the side plate.
Further, the attachment device is two connecting rods being arranged between the side plate, two connecting rods
It is respectively hinged at the rear and front end of the side plate.
The utility model has the beneficial effects that：Since the utility model includes two blocks of symmetrically arranged side plates and is arranged two
Clamping assembly is adjusted in several groups between side plate described in block, and the clamping assembly includes the first snap-gauge, the second snap-gauge and support
Snap-gauge, first snap-gauge and second snap-gauge are slidably matched with the side plate, and first snap-gauge blocks with described second
Several screens are adapted and constituted between plate, and the supporting backboard is located at the underface of the screens, is arranged on the side plate
Have with the matched attachment device of exterior washings equipment, so, the utility model is simple in structure, will be every by the clamping assembly
A quartz wafer is clamped in several screens, and fully quartz wafer scatter, phase between quartz wafer when avoiding cleaning
Mutually absorption improves cleaning degree and cleaning to avoid the problem that the sand grains between quartz wafer absorption can not clean up
Efficiency.
Description of the drawings
Fig. 1 is the structural schematic diagram of the utility model.
Specific implementation mode
As shown in Figure 1, in the present embodiment, the utility model includes two blocks of symmetrically arranged side plates 1 and is arranged at two pieces
Several groups between the side plate 1 are adjusted clamping assembly 2, the clamping assembly 2 include the first snap-gauge 21, the second snap-gauge 22 and
Supporting backboard 23, first snap-gauge 21 and second snap-gauge 22 are slidably matched with the side plate 1, first snap-gauge 21
Be adapted and constitute several screens between second snap-gauge 22, the supporting backboard 23 be located at the screens just under
It is square, it is provided with and the matched attachment device of exterior washings equipment on the side plate 1.In this design, pass through the clamping assembly 2
Each quartz wafer is clamped in several screens, fully quartz wafer is scatter, avoid cleaning when quartz wafer it
Between mutually adsorb, to improve cleaning degree and cleaning efficiency；It can be blocked with described second by adjusting first snap-gauge 21
The distance between plate 22, to adjust the size of the screens, to enable the quartz of the screens clamping different specification size
Chip improves the versatility of the utility model.
In the present embodiment, several sliding grooves 11 are provided on the side plate 1, first snap-gauge 21 blocks with described second
Plate 22 is slidably matched by the sliding groove 11 and the side plate 1.In this design, first snap-gauge 21 and second snap-gauge
22 can move on the sliding groove 11, so as to adjust between first snap-gauge 21 and second snap-gauge 22 away from
From the composition screens after enabling first snap-gauge 21 to be matched with second snap-gauge 22 is adapted to different size ruler
Very little quartz wafer.
In the present embodiment, first snap-gauge 21 and second snap-gauge 22 by screw 4 be connected to the side plate 1 it
Between.In this design, it is the convenience for dismounting to connect first snap-gauge 21 and second snap-gauge 22 using screw 4.
In the present embodiment, several card slots 201 are equably provided on first snap-gauge 21 and second snap-gauge 22,
And the card slot 201 on first snap-gauge 21 is adapted to form the screens with the card slot 201 on second snap-gauge 22.This sets
In meter, the card slot 201 is arranged according to the contour structures of quartz wafer, in order to promote fixed effect.
In the present embodiment, several limiting slots corresponding with the screens 202 are provided on the supporting backboard 23.This
In design, the limiting slot 202 is adapted with the bottom of quartz wafer, is limited to the bottom of quartz wafer, prevents from cleaning
When, quartz wafer bottom is rocked, and quartz wafer is caused to be fallen from the screens.
It is in the present embodiment, simple in structure between the supporting backboard 23 is fixedly connected on the side plate 1 by screw 4,
Easy disassembly.
In the present embodiment, the attachment device is two connecting rods 31 being arranged between the side plate 1, described in two
Connecting rod 31 is respectively hinged at the rear and front end of the side plate 1.In this design, the attachment device is for connecting the utility model
It is connected on quartz wafer cleaning equipment.
The utility model is applied to the technical field of quartz wafer processing.
Although the embodiments of the present invention are described with practical solution, does not constitute the utility model is contained
Justice limitation, for those skilled in the art, according to this specification to the modification of its embodiment and with the group of other schemes
Conjunction will be apparent from.
Claims (7)
1. a kind of quartz wafer cleans fixing device, it is characterised in that：It includes two blocks of symmetrically arranged side plates（1）And setting exists
Two blocks of side plates（1）Between several groups be adjusted clamping assembly（2）, the clamping assembly（2）Including the first snap-gauge（21）、
Second snap-gauge（22）And supporting backboard（23）, first snap-gauge（21）And second snap-gauge（22）With the side plate（1）
It is slidably matched, first snap-gauge（21）With second snap-gauge（22）Between be adapted and constitute several screens, it is described to hold
Hold in the palm snap-gauge（23）Positioned at the underface of the screens, the side plate（1）On be provided with and the matched connection of exterior washings equipment
Device.
2. quartz wafer according to claim 1 cleans fixing device, it is characterised in that：The side plate（1）On be provided with
Several sliding grooves（11）, first snap-gauge（21）With second snap-gauge（22）Pass through the sliding groove（11）With the side plate
（1）It is slidably matched.
3. quartz wafer according to claim 2 cleans fixing device, it is characterised in that：First snap-gauge（21）With institute
State the second snap-gauge（22）Pass through screw（4）It is connected to the side plate（1）Between.
4. quartz wafer according to claim 3 cleans fixing device, it is characterised in that：First snap-gauge（21）And institute
State the second snap-gauge（22）On be equably provided with several card slots（201）, and first snap-gauge（21）On card slot（201）With institute
State the second snap-gauge（22）On card slot（201）It is adapted to form the screens.
5. quartz wafer according to claim 4 cleans fixing device, it is characterised in that：The supporting backboard（23）On set
It is equipped with several limiting slots corresponding with the screens（202）.
6. quartz wafer according to claim 5 cleans fixing device, it is characterised in that：The supporting backboard（23）Pass through
Screw（4）It is fixedly connected on the side plate（1）Between.
7. quartz wafer according to claim 6 cleans fixing device, it is characterised in that：The attachment device is that setting exists
The side plate（1）Between two connecting rods（31）, two connecting rods（31）It is respectively hinged at the side plate（1）It is front and back
Both ends.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721649894.2U CN207839557U (en) | 2017-12-01 | 2017-12-01 | Quartz wafer cleans fixing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721649894.2U CN207839557U (en) | 2017-12-01 | 2017-12-01 | Quartz wafer cleans fixing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207839557U true CN207839557U (en) | 2018-09-11 |
Family
ID=63423076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721649894.2U Expired - Fee Related CN207839557U (en) | 2017-12-01 | 2017-12-01 | Quartz wafer cleans fixing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207839557U (en) |
-
2017
- 2017-12-01 CN CN201721649894.2U patent/CN207839557U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180911 Termination date: 20211201 |