CN116448009A - Method and device for detecting relative errors of curvature radius of split lens - Google Patents
Method and device for detecting relative errors of curvature radius of split lens Download PDFInfo
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- G—PHYSICS
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
The invention relates to the technical field of optical detection, in particular to a method and a device for detecting relative errors of curvature radius of a splice lens. The method and the device principle are based on a wavefront sensing technology, and firstly, a beam expanding lens corresponding to the relative aperture is selected according to the relative aperture of two reflectors to be detected; the invention combines the corresponding wavefront sensing algorithm, can realize non-contact, automatic and measurement of the relative difference value of the curvature radius between the spliced mirrors, and makes up the technical scheme of detecting the relative error of the curvature radius of the spliced mirrors facing to the detection of the curvature radius of the spliced mirrors and having no non-contact and decoupling piston error in the prior art.
Description
Technical Field
The invention relates to the technical field of optical detection, in particular to a method and a device for detecting relative errors of curvature radius of a spliced lens.
Background
Along with the gradual increase of the astronomical observation requirements on telescope resolution and light collecting capability, the caliber of the telescope is gradually increased, the structure form of the primary mirror is developed from the traditional single structure to the direction of the spliced structure, and the consistency of curvature radius parameters of the spliced reflective telescope is an important problem affecting the imaging quality of the spliced reflective telescope. For the reflector of the large-caliber spliced optical system, a relatively continuous reflecting surface is formed after confocal co-phase of the sub-mirrors, so that the curvature radius of the spliced sub-mirrors is required to be matched to a higher degree, a relatively continuous curved surface with consistent curvature can be formed, and in order to realize high-precision splicing, the curvature radius error is generally required to be less than ten microns.
The common method for measuring the curvature radius of the large-caliber reflector comprises two main types of contact type and non-contact type:
the common large-caliber reflector contact type optical curvature radius measuring method mainly comprises a three-coordinate machine measuring method, and the three-coordinate machine has the advantages of being high in universality, high in measuring accuracy and the like. However, the contact type measuring scheme is easy to scratch and abrade the surface of the reflecting mirror, the measuring precision and efficiency of the three-coordinate method are influenced by the shape of the reflecting mirror to be measured, the measuring sampling scheme (for a large-caliber spliced optical system, the number of sub-mirrors is more, the detecting efficiency by using the three-coordinate method is lower, the detecting caliber is limited, if the shape of the sub-mirrors is singular, such as a fan shape, the shape of the inner ring and the outer ring is inconsistent, the measuring scheme is complicated), and the measuring precision of the three-coordinate measuring machine is influenced, the optimal measuring range is in the order of 500mm, and the method is not applicable to the reflecting mirror with the caliber being bigger.
The non-contact optical curvature radius measuring method of the large-caliber reflector comprises the following steps: spherical interferometry, laser differential confocal curvature radius measurement and the like, wherein the spherical interferometry is influenced by visual reading (cat eye image of an interferometer), and the measured caliber is 200mm maximum; the laser differential confocal curvature radius measurement method has higher precision, but has higher requirement on confocal precision, and the focusing operation scheme is more complex and the efficiency is lower when the number of spliced reflecting mirrors is larger; therefore, the conventional curvature radius measurement technical scheme cannot meet the aim of curvature radius consistency detection of the large-caliber spliced reflecting mirror.
For the relative detection of the curvature radius of the spliced reflecting mirror, the technical literature: lin Xudong, chen Tao, well known, wang Jianli, chen Baogang, dong Lei. Measurement of relative radius of curvature of spherical split mirrors [ J ] optical precision engineering, 2010, 18 (1): 75-82. A method for measuring the relative radius of curvature of spherical sub-mirrors based on Shack-Hartmann sensor is proposed, but still requires the cooperation of a contact high precision sphere to accomplish the measurement.
The limitations of the prior art are as follows: (1) The curvature radius measurement between the spliced reflectors still needs to be completed by matching with a contact type high-precision spherical diameter instrument, so that the surface of the high-reflection film system is scratched, and the like; (2) In addition, whether the laser differential confocal curvature radius measurement method or the Shack-Hartmann sensor is adopted to carry out confocal on the spliced reflecting mirror, the defocusing precision is in the order of hundreds of micrometers to tens of micrometers, and the translation between the sub-mirrors along the optical axis direction can not be detected and completely eliminated, namely, the piston error piston exists in the phase of the spliced reflecting mirror; if the piston cannot be eliminated, when the spherical diameter meter is used for measuring the deviation of the relative curvature radius, the spherical diameter meter is directly read at the position close to the edge of the sub-mirror, and the sum of the true curvature radius relative error and the axial piston error between the sub-mirrors is obtained according to the read value.
Therefore, to accurately measure the relative radius of curvature error between the mirrors of a tiled mirror must first go through mirror confocal, co-phase. And the piston error of the eliminating sub-mirror is larger along the optical axis direction.
For the problem of the co-phase of the split mirrors, the problem of consistency of the curvature radius of the split mirrors in the fine co-phase stage is a key problem which finally affects the imaging quality. The technical scheme for detecting the curvature radius error of the sub-mirrors is that a phase recovery method is adopted in a fine co-phase stage after coarse co-phase detection and adjustment of the piston errors among the sub-mirrors, the relative curvature radius error among the sub-mirrors is measured, and the curvature radius error is adjusted from 0.15mm to 10 mu m by a curvature radius adjusting device.
Disclosure of Invention
The embodiment of the invention provides a method and a device for detecting relative errors of curvature radius of a spliced lens, which are used for at least solving the technical problems of the prior technical scheme of detecting the relative errors of curvature radius of the spliced lens without facing the detection of curvature radius of the spliced lens and decoupling piston errors in a non-contact manner.
According to an embodiment of the present invention, there is provided a method for detecting a relative error of a radius of curvature of a split lens, based on a wavefront sensing technology, including the steps of:
selecting a beam expanding lens corresponding to the relative aperture according to the relative aperture of the two reflectors to be detected;
and detecting the relative errors of the curvature radiuses of the two reflectors to be detected by using a wavefront sensing system based on a light path structure similar to a Tasmann interferometer and matching with a beam expanding lens, and obtaining the relative errors of the curvature radiuses of the two reflectors to be detected.
Further, using the wavefront sensing system based on the optical path structure similar to the Tasman interferometer and matching with the beam expanding lens to detect the relative errors of the curvature radiuses of the two reflectors to be detected, the obtaining the relative errors of the curvature radiuses of the two reflectors to be detected comprises the following steps:
calibrating a sensor: cutting into a test light path light shielding plate, cutting out a calibration light path light shielding plate, and calibrating a detector of the system by adopting a laser light source and a white light source respectively;
testing light path rough alignment: cutting out a test light path light shielding plate, cutting into a calibration light path light shielding plate, aligning a splicing mirror by adopting a laser light source and a large-view-field coarse confocal camera, if no image point exists in a view field, searching a test light path return image point by using a corresponding image point searching algorithm, and then completing image point identification and automatic alignment of the test light path;
coarse confocal: after the image points of the two reflectors to be detected appear in the coarse confocal camera, adjusting the displacement of the corresponding motion control mechanism along the optical axis direction according to the corresponding algorithm to start to perform the coarse confocal of the image points;
fine confocal: the precise confocal shack Hartmann wavefront sensing system is matched with different working modes of a light shielding plate to respectively detect the inclined aberration and the defocusing aberration of the two reflectors to be detected, and the two reflectors are regulated by a motion control mechanism;
crude co-phase: detecting axial relative errors of two reflectors to be detected by adopting a coarse common phase error detection system and a wavefront sensing method based on dispersion fringe images, and adjusting the axial relative errors by a high-precision motion control mechanism;
fine phase-radius of curvature relative error detection: the precise common-phase error detection system is adopted to detect the relative defocus aberration of the two reflectors to be detected by matching with a corresponding phase difference method and a phase recovery method as the relative error output of the curvature radius.
According to another embodiment of the present invention, there is provided a device for detecting a relative error of a radius of curvature of a split lens, including: a curvature radius relative error detection system and a wavefront feedback motion control system based on a wavefront sensing technology; wherein:
firstly, installing two reflectors to be detected on a wave-front feedback motion control system; the curvature radius relative error detection system selects beam expanding lenses corresponding to the relative apertures according to the relative apertures of the two reflectors to be detected, and detects the curvature radius relative error of the two reflectors to be detected by using the beam expanding lenses to obtain the curvature radius relative error of the two reflectors to be detected.
Further, the device also comprises a test light path length adjusting frame for adjusting the test light path length according to different curvature radiuses of the reflecting mirror.
Further, firstly, respectively installing two reflectors to be detected on a wavefront feedback motion control system, then selecting a beam expanding lens with proper F# number for a curvature radius relative error detection system according to the relative aperture of the reflectors to be detected, then carrying out coarse confocal, fine confocal, coarse co-phasing and fine co-phasing on the two reflectors to be detected based on a wavefront sensing technology, then completing curvature radius relative error detection, and finally outputting curvature radius errors.
Further, the curvature radius relative error detection system includes: the system comprises a coarse confocal error detection system, a fine confocal error detection system, a coarse co-phase error detection system and a fine co-phase error detection system, wherein the two reflectors to be detected are subjected to coarse confocal, fine confocal, coarse co-phase and fine co-phase based on a wavefront sensing technology.
Further, the coarse confocal error detection system, the fine confocal error detection system, the coarse common phase error detection system and the fine common phase error detection system form a closed loop detection and motion control unit by the detector and the corresponding motion control mechanism, so that unit functions are realized.
A storage medium storing a program file capable of implementing the method for detecting a relative error of a radius of curvature of any one of the above-described split mirrors.
A processor for running a program, wherein the program runs to execute the method for detecting the relative error of the curvature radius of the split lens according to any one of the above methods.
The embodiment of the invention discloses a method and a device for detecting relative errors of curvature radiuses of a split lens, wherein a beam expanding lens corresponding to relative apertures is selected according to the relative apertures of two reflectors to be detected; the invention combines corresponding algorithm, can realize non-contact, automatic and splice mirror radius of curvature relative measurement, and makes up the technical scheme of splice mirror radius of curvature relative error detection of non-contact and decoupling piston error, which does not occur in the prior art, for the detection of the splice mirror radius of curvature relative error.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiments of the invention and together with the description serve to explain the invention and do not constitute a limitation on the invention. In the drawings:
FIG. 1 is a flow chart of the curvature radius mirror error detection of the splice mirror of the present invention;
FIG. 2 is a flow chart of the radius of curvature versus error detection system of the present invention;
FIG. 3 is a functional control block diagram of a radius of curvature versus error detection system according to the present invention;
FIG. 4 is a schematic light path diagram of a curvature radius detecting device according to the present invention;
FIG. 5 is a schematic view of a relative error detection system for detecting a relative error of a radius of curvature of a sub-mirror of a primary mirror tiled telescope system according to the present invention;
fig. 6 is a diagram of an arrangement of a key co-phasing element dispersion hartmann sensor in the process of detecting relative errors of the radii of curvature of sub-mirrors of a primary mirror tiled telescope system using the relative error detection system of the present invention.
Detailed Description
In order that those skilled in the art will better understand the present invention, a technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present invention and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments of the invention described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Example 1
Aiming at the defect problems in the prior art: the contact detection and the relative error detection result of the curvature radius are coupled with the piston error. The invention aims to provide a method and a device for detecting the relative error of the curvature radius of a split lens, which are used for detecting the curvature radius of the split lens, are designed according to a scheme for detecting the relative error of the pure curvature radius between sub-lenses of the non-contact decoupling piston error.
For a tiled mirror system, the focus is not on the tolerance of the actual optical reflecting surface curvature radius relative to the design value, but on the consistency of the curvature radius between each sub-mirror and the ideal design parameter error, so that the curvature radius parameter is not accurately detected, but the relative curvature radius error of each sub-mirror is accurately detected. That is, assuming there are N sub-mirrors to be processed, one tiled mirror, or synthetic aperture mirror, will be combined. A piece of lens is processed, and the curvature radius is known as a reference, and then the curvature radius true values of all the sub-lenses can be obtained by detecting the relative curvature radius errors of other N-1 sub-lenses relative to the first sub-lens.
The invention designs a detection scheme of the relative error of the curvature radius of the spliced mirror based on the wavefront sensing technology, and the scheme can realize non-contact, automatic and relative measurement of the curvature radius of the spliced mirror by combining corresponding algorithms. The scheme of the invention is basically described as follows:
the detection device for the relative error of the curvature radius of the spliced mirror based on the wavefront sensing technology is divided into four parts according to the modularization degree: the curvature radius relative error detection system based on the wavefront sensing technology is called a wavefront detection system for short. The large-motion-range high-precision motion control platform is called a wave-front feedback motion control system and can also be called a sample stage; the two spliced sub-mirrors with the curvature radius errors to be measured are called a mirror group to be measured, and the test light path length adjusting frame is used for adjusting the test light path length according to different curvature radiuses of the reflecting mirrors.
Detection of curvature radius errors of the spliced mirrors is achieved based on a wavefront sensing technology, and the detection comprises four functional units: coarse confocal, fine confocal, coarse co-phase, fine co-phase. The corresponding device is divided into four subsystems, each subsystem is formed by a detector and a corresponding motion control mechanism to realize closed loop detection and motion control of a unit, and unit functions are realized. The first three functional units are used for eliminating confocal errors and coarse common phase errors of the interference curvature radius relative error detection values as far as possible, and curvature radius relative error detection is completed in the fourth functional unit.
Firstly, respectively installing two mirrors (sub-mirrors) on a sample stage, then selecting a beam expanding lens with proper F# number for a curvature radius relative error detection system according to the relative aperture of the mirrors to be detected, then carrying out the most critical steps, carrying out coarse confocal, fine confocal, coarse co-phase and fine co-phase on the two sub-mirrors to be detected based on a wavefront sensing technology, then completing curvature radius relative error detection, and finally outputting curvature radius errors. If the curvature radius adjusting mechanism is checked, closed loop detection and adjustment can be realized.
Because the method is used for detecting the curvature radius error of the processing level, the detection range is not required to be large, and the detection range is usually on the order of 0.15mm according to the existing processing level.
As shown in the relative error detection flow of the curvature radius of the splice mirror in FIG. 1, the invention is described as follows:
the first step: a sub-mirror of a spliced reflecting mirror with relative error of curvature radius to be detected is arranged on a sample stage to be detected, namely a large-movement-range high-precision movement control platform;
and a second step of: selecting a beam expanding lens with a proper relative aperture according to the ratio of the curvature radius and the caliber of the reflector to be detected;
and a third step of: running a curvature radius relative error detection system of the splice mirror;
fourth step: giving out the relative error of the curvature radius of the two sub-mirrors;
the radius of curvature versus error detection system workflow is shown in fig. 2 and described as follows:
the first step: sensor calibration
Cutting in a test light path light shielding plate, cutting out a calibration light path light shielding plate, respectively calibrating a system detector by adopting a laser light source and a white light source, and generating common light path phase delay by cutting in different phase delay plates in the calibration process so as to prepare for detecting coarse co-phase errors by a template matching method;
and a second step of: coarse alignment of test light path
Cutting out a test light path light shielding plate, cutting into a calibration light path light shielding plate, aligning a splicing mirror by adopting a laser light source and a large-view-field coarse confocal camera, if no image point exists in a view field, searching a test light path return image point by using a corresponding image point searching algorithm, and then completing image point identification and automatic alignment of the test light path;
and a third step of: coarse confocal
After the image points of the two reflecting mirrors in the coarse confocal camera are adopted, the displacement of the corresponding motion control mechanism along the optical axis direction is adjusted according to the corresponding algorithm to start the coarse confocal of the image points, so that larger oblique aberration and larger defocusing aberration are eliminated;
fourth step: refined confocal point
The precise confocal shack Hartmann wavefront sensing system is matched with different working modes of a light shielding plate to respectively detect smaller inclined aberration and smaller defocusing aberration of the two reflecting mirrors, and the small inclined aberration and the smaller defocusing aberration are adjusted through a motion control mechanism;
fifth step: crude co-phase
The coarse common phase error detection system is adopted to detect the axial relative error of the two reflectors by matching with a wavefront sensing method based on a dispersion fringe image, and the axial relative error is regulated by a high-precision motion control mechanism;
sixth step: fine co-phase-radius of curvature relative error detection
The precise co-phase error detection system is adopted to detect the relative defocus aberration of the two reflectors by matching with a corresponding phase difference method and a phase recovery method to be used as the relative error output of the curvature radius.
The functional control block diagram of the present invention is shown in fig. 3, and is described as follows:
an industrial personal computer is used as a general control center and used for controlling light source switching, light path switching (including light screen working mode switching and phase retarder switching for reference light path calibration), data acquisition and processing of each sensor, high-precision movement mechanism movement, large-range movement mechanism movement, laser light source used for coarse and fine confocal and fine co-phase sensor working light source, broadband white light source used for coarse and fine co-phase sensor working light source, filter rotating wheels in the coarse and fine co-phase sensor controlled by the industrial personal computer to realize detection of different curvature radius error ranges in different wave bands, detector defocusing movement in the fine and fine co-phase sensor controlled by the industrial personal computer to obtain different defocusing amount images required by an algorithm, and the large-range movement mechanism used for executing movement parameters of output of a coarse and fine two-stage confocal system and the high-precision movement mechanism used for executing movement parameters of output of the coarse and fine two-stage co-phase system. And finally, outputting the relative error of the curvature radiuses of the two reflectors through the precise co-phase sensor.
The working principle of the curvature radius relative error detection system is shown in a schematic light path diagram of the curvature radius detection device in fig. 4, and the system is divided into a wavefront detection system whole, a lens group to be detected, a wavefront feedback motion control system and a test light path length adjusting system according to a modularized structure; wherein the labels of fig. 4 are shown as:
1. the first light source and the laser light source are used for emitting narrow-band light waves and are used for rapidly installing and aligning the lens group to be detected;
2. the second light source, bandwidth tunable broadband light source, function is to export the broadband light wave;
3. pinhole filter, point light source incidence;
4. an achromatic collimating mirror which collimates spherical waves emitted by the point light source into plane waves for emission;
5. the semi-transparent and semi-reflective beam splitter 1 is used for reflecting one part of incident light and transmitting the other part of incident light to exit;
6. the beam shielding plate 1 is used for switching reference (calibration) optical path working modes, and has four working modes: the full light-blocking and completely light-blocking light, the left half light path blocks the right half light Lu Tong light, the right half light path blocks the left half light Lu Tong light, and the full light-blocking and completely light-blocking light is not blocked;
7. a reference mirror as a reference mirror for back end unit calibration;
8. the beam shielding plate 2 is used for switching the working modes of the test light path, and has four working modes: the full light-blocking and completely light-blocking light, the left half light path blocks the right half light Lu Tong light, the right half light path blocks the left half light Lu Tong light, and the full light-blocking and completely light-blocking light is not blocked; when the precise confocal sensor works, working modes 2 and 3 are needed;
9. the beam expander group converts the collimated light beam into spherical wave to be emitted, and for the mirrors to be tested with different curvature radiuses, the beam expander group with different relative apertures is selected to obtain more return light for illuminating the mirror group to be tested with full caliber to the greatest extent;
10. the phase delay rotating wheel is used for generating half optical path phase delay, the delay phase is divided into a plurality of gears, and the delay phase is set according to the calibration requirement of a reference optical path;
11. the first diaphragm mask is used for standardizing the beam entrance pupil of the reflecting mirror to be tested with different shapes and calibers;
12. a half-transmitting and half-reflecting beam splitter 2, which reflects part of the light beam to the fine confocal detection unit and transmits part of the light beam to the coarse confocal detection unit;
13. an achromatic imaging lens group 1 for imaging by a coarse confocal detection unit;
14. a large target surface detector 1 for receiving a coarse confocal image;
15. a half-transmitting and half-reflecting beam splitter 2 for reflecting a part of the light beam to the precise confocal detection unit and transmitting a part of the light beam to other detection units;
16. the achromatic beam shrinking lens group 1 shrinks the collimated beam according to a certain proportion to concentrate the light energy;
17. a Shack-Hartmann sensor for the confocal detection unit wavefront;
18. the half-transmission half-reflection beam splitter 3 is used for enabling half of the light beams returned by the reference light path or the test light path to enter other detection units and half to enter the coarse co-phase detection unit;
19. the filter plate is used for selecting different wave bands to match corresponding curvature radius to-be-measured ranges;
20. an achromatic beam shrinking lens group 2, which shrinks the collimated beam according to a certain proportion to concentrate the light energy;
21. a second aperture stop mask for normalizing the dual beam interference entrance pupil shape;
22. a dispersive element including, but not limited to, a grating, a prism, etc., which may be selected as the dispersive element in order to allow the center wavelength of visible light to exit unbiased;
23. an achromatic imaging lens group 2 for imaging a dispersion fringe sensor in the coarse co-phase detection unit;
24. a large target detector 2, including but not limited to a CMOS type, CCD type detector, for receiving the coarse co-phase image;
25. the achromatic imaging lens group 3 is used for imaging by the precise co-phase detection unit;
26. small target surface detectors, including but not limited to CMOS, CCD type detectors, for receiving fine co-phase images;
27. the wavefront detection system of the whole curvature radius relative error detection device comprises a light source, a switching element and four sensing systems, wherein the systems are made into a closed box, and the switching device is controlled by an electric mechanism to execute switching motion;
28. a spherical mirror having a known radius of curvature;
29. a spherical reflector with a radius of curvature to be measured;
30. the high-precision large-range motion mechanism is used as a reflector mounting platform and is also used as a motion feedback unit of the wavefront detection system;
31. a six-degree-of-freedom electric displacement platform;
32. a piezoelectric ceramic actuator;
33. and the test light path length adjusting frame is used for adjusting the length of the test light path of the mirror to be tested according to different curvature radiuses.
The system is divided into four parts of a quasi-straight light path, a reference light path, a test light path and a wavefront sensing light path according to functions; the system structure form refers to a Talman green interferometer light path, a collimation light path is used for converting spherical waves of a point light source into plane waves for emergent, a reference light path is used for calibrating a wavefront sensing light path of an aberration-free plane wave, a test light path is used for emitting spherical waves to illuminate two spliced reflectors, and a wavefront sensing light path is used for wavefront sensing confocal co-phase (including curvature radius relative error detection) of the two spliced reflectors and comprises four parts of coarse confocal, fine confocal, coarse co-phase and fine co-phase; in the wavefront sensing light path, the coarse confocal light path is provided with corresponding algorithms such as image point searching, edge detection, centroid algorithm and the like to form a coarse confocal detection system; the precise confocal optical path is provided with a Xia Ke Hartmann sensor to form a precise confocal detection system; the coarse co-phase light path is provided with a co-phase error detection method based on a dispersion fringe image to form a coarse co-phase detection system; the precise co-phase optical path is provided with a phase difference method and a phase recovery method to form a precise co-phase detection system, and after the detection and adjustment (namely elimination) of confocal errors and piston errors are finished by the first three subsystems, the detection of the relative errors of the curvature radius of the pure splicing lens is carried out at the step.
The working principle of the system is described as follows:
a first light source 1 is adopted, and a laser light source is used for rapidly installing and aligning a lens group to be detected (two spliced reflectors); a second light source 2 is adopted, and a bandwidth-tunable broadband light source is used as a test light source and a wavefront sensing light path working light source; the two light sources are switched by the switching device and all pass through the pinhole filter 3 to be used as point light sources to enter the optical system; the spherical waves emitted by the point light sources are collimated into plane waves to be emitted through an achromatic collimating lens 4; the system comprises a reference light path, a reference mirror 7, a beam shielding plate 6, a phase retarder 10, a switching test light path and a reference light path, wherein a part of incident light is reflected to the reference light path through the half-transparent half-reflective beam splitter 5, and enters the wavefront sensing light path through the reference mirror 7, the beam shielding plate 6 is used for cutting in and cutting out the reference light path in the system, when the reference light path is required to work, the shielding plate is cut in the light path when the reference light path is not required to work, the phase retarder 10 is cut in the light path, the phase retarder 10 is not operated in the reference light path, and the reference light path comprises the phase retarder 10 and functions in calibrating four wavefront sensors.
The semi-transparent and semi-reflective beam splitter 5 converts the collimated light beam into spherical wave through the beam expander 9, and for the lenses to be tested with different curvature radiuses, the beam expander 9 with different relative apertures is selected, so that the lens to be tested can be illuminated with full aperture to the greatest extent to obtain more return light; the light beam shielding plate 8 is used for cutting in and cutting out a test light path, when the test light path is required to work, the light shielding plate is cut out of the light path, and when the test light path is not required to work, the light shielding plate is cut in the light path; the light beam is reflected back to the system through a spherical reflector 28 with a known curvature radius and a spherical reflector 29 with a to-be-measured curvature radius after passing through the beam expander group 9, wherein the reflectors 28 and 29 are arranged on a reflector mounting platform 30 of a high-precision large-range motion mechanism, 31 is a large-range six-degree-of-freedom electric displacement platform, 32 is a high-precision piezoelectric ceramic actuator, and the lengths of reflector test light paths with different curvature radii are adjusted by adjusting a test light path length adjusting frame.
The light beam passing through the test light path return system is shaped through the first diaphragm mask 11, the light beam entrance pupil of the reflecting mirror to be tested with different shapes and calibers is standardized, and then the light beam enters the wavefront sensing light path; firstly, a part of the light beam is reflected to a coarse confocal detection unit through a semi-transparent and semi-reflective beam splitter 12, and the other part of the light beam is transmitted to a subsequent detection unit; the light beam reflected to the coarse confocal detection unit is imaged on a coarse confocal detector 14 through a large-field achromatic imaging lens group 13.
The light beam transmitted to the subsequent detection unit passes through a semi-transparent and semi-reflective beam splitter 15, one part of the light beam is reflected to the precise confocal detection unit, and the other part of the light beam is transmitted to the subsequent detection unit; the fine confocal detection unit is provided with an achromatic beam-shrinking lens group 16, the collimated beam is shrunk according to a certain proportion to concentrate light energy, and a Xia Ke Hartmann (Shack-Hartmann) sensor 17 is arranged at the exit pupil position for the wavefront fine confocal detection of the lens group to be detected.
The light beam transmitted to the subsequent detection unit passes through a semi-transparent semi-reflective beam splitter 18 again, and half of the light beam is reflected to enter the coarse co-phase detection unit, and half of the light beam is transmitted to enter the subsequent detection unit; the light beam reflected into the coarse co-phase detection unit passes through a broadband filter 19, the element is a filter group with different bandwidths controlled by a rotating wheel, and different working wave bands are selected through rotating wheel switching so as to match the corresponding curvature radius error to-be-detected range; the collimated light beam is condensed according to a certain proportion by an achromatic beam condensing lens group 20 to concentrate light energy; a second aperture stop mask 21 is placed at the exit pupil position for normalizing the dual beam interference entrance pupil shape and enhancing the diffraction effect; the beam passing through the aperture diaphragm mask continues to pass through a dispersive element 22 to disperse the diffraction spots of different working wavelengths, wherein the dispersive element comprises, but is not limited to, a grating, a prism grid and the like, and the prism grid can be selected as the dispersive element for enabling the center wavelength of visible light to be emitted unbiasedly; an achromatic imaging lens group 23 is added to the coarse co-phase detection unit for imaging of the dispersion fringe sensor; and then through a large target detector 24, including but not limited to CMOS type, CCD type detector, for receiving the coarse co-phase image; the elements 21-24 in the coarse co-phase detection unit are called dispersion fringe sensors (dispersoddringesensor).
The light beam entering the subsequent detection unit passes through achromatic imaging lens group 25 and detector 26 (including but not limited to CMOS type, CCD type detectors) to form a fine co-phase detection unit, wherein detector 26 is movable back and forth out of focus for forming an in-focus, out-of-focus image as required by the algorithm. After the first three light splitting paths complete corresponding confocal and rough co-phase detection and adjustment, the curvature radius error of the splice lens is detected at the step.
Compared with the prior art, the invention has the advantages that:
the invention designs a method and a device for detecting relative errors of curvature radii of spliced mirrors based on a wavefront sensing system.
The implementation of the embodiment of the invention has the following three beneficial effects:
firstly, the detection efficiency is improved, when a large number of reflectors with the same curvature radius design value are subjected to physical detection, the curvature radius error of one of the sub-reflectors is detected, and then the curvature radius processing true value of all the sub-reflectors to be detected can be obtained by detecting the relative curvature radius error through the technical scheme provided by the case device in the method.
And (II) non-contact measurement, the curvature radius error can be detected as wavefront aberration by matching with a corresponding algorithm, and the design of the scheme of the invention can finish the detection of the curvature radius relative error of the two reflectors without using a direct contact detection device such as a sphere diameter meter.
And thirdly, the confocal precision is high, and in fact, the confocal-based curvature radius detection device has higher accuracy compared with detection based on a precise confocal method, and the detection result has no systematic error and can completely eliminate piston errors. In the prior art, the curvature radius errors of the spliced mirrors are detected, and the rough co-phase errors among the spliced mirrors, namely the piston errors along the optical axis direction, are not eliminated, so that the spherical diameter meter reads the piston errors along the optical axis direction among the two spliced mirrors in the curvature radius error results of the connected edges of the two spliced mirrors, and the piston errors are calibrated in a wave-front sensing calibration mode, so that the step is realized in the rough co-phase detection stage and can be eliminated by being matched with a corresponding motion platform, and the step can be regarded as a system error.
The modified design, alternative scheme and other purposes of the invention are as follows:
the invention can also be used for detecting errors of the curvature radius adjusting device:
the invention not only can measure the curvature radius error between processed and shaped spliced sub-mirrors, but also can detect the curvature non-uniformity of a plurality of reflecting mirrors with the same curvature; in addition, the adjusting function and the adjusting precision of the reflector curvature radius adjusting mechanism can be detected and verified in a closed loop mode by matching with a corresponding algorithm. Closed-loop motion control is realized through a large-range motion control platform and a high-precision piezoelectric ceramic actuator, and the curvature radius detection precision can reach tens of nanometers.
Secondly, the invention can detect the relative error of the curvature radius of each sub-reflector in the primary mirror spliced telescope system by slightly deforming and matching with a plurality of plane mirrors and a rotating mechanism;
as shown in the schematic diagram of the radius of curvature relative error detection system of fig. 5 for detecting the radius of curvature relative error of the sub-mirrors of the primary mirror tiled telescope system, reference numerals in fig. 5 are as follows:
1. the wavefront detection system of the whole curvature radius relative error detection device comprises a light source, a switching element and four sensing systems, which are equivalent to 27 in fig. 4;
2. the beam expander group is used for a primary mirror spliced telescope system with different relative apertures, and the beam expander group with different relative apertures is selected to illuminate the measured lens group to the greatest extent to obtain more return light, which is equivalent to 9 in fig. 4;
3. an optical path turning mirror of the telescope system;
4. three mirrors of the primary mirror spliced telescope system;
5. a secondary mirror of the telescope system;
6. the curvature radius of each sub-mirror is consistent with the curvature radius of the spliced primary mirror of the telescope system, and the relative error detection of the relative curvature radius between the sub-mirrors is required to be carried out through the device 1 and the proper 2;
7. a large-range high-precision six-degree-of-freedom motion control mechanism of each sub-mirror;
8. a plane reflector with inclination angle adjusting capability, which is used for returning the plane light wave primary path emitted from the curvature radius detection device and emitted through the telescope system;
9. the planar mirror rotation mechanism is used for rotationally aligning the splicing areas of the different sub-apertures.
The specific principle of fig. 5 is described as follows:
the laser light source and the broadband light source respectively emit from a wavefront detection system 1 of the whole relative error detection device of curvature radius, the laser light source and the broadband light source pass through a beam expanding lens group 2 and are incident on a light path turning lens 3 of a telescope system, the laser light source and the broadband light source pass through a three-lens 4, a secondary lens 5 and a reflection irradiation lens 6 of the telescope system, the three-lens and the secondary lens are spliced to form a telescope primary lens 6, each secondary lens of the primary lens is controlled by a large-range high-precision six-freedom-degree motion control system 7 to move the pose, reflected light of the primary lens continues to propagate forward to a plane mirror 8 and returns along an original path, the plane mirror can cover the splicing area of the three secondary lenses, a plane mirror rotating mechanism is arranged, the different projection areas of the primary lens can be covered by rotating the plane mirror, the three-layer secondary lens curvature radius error completion detection of an inner layer can be realized by rotating the plane mirror with unequal arms, the relative error detection links of curvature radius of curvature relative error between the secondary lenses are reasonably established, and the relative error of curvature radius error of all the secondary lenses is measured.
In order to further improve the detection efficiency of the curvature radius relative error detection device, some elements can be replaced, and a dispersion fringe sensor in the coarse common phase error detection system is replaced by a dispersion Hartmann sensor, so that the working principle is unchanged, and only the two aperture masks are changed into multi-aperture masks on the array arrangement of the selected areas of the diffraction sub-apertures, and the micro-element arrays in the corresponding dispersion directions are arranged. Fig. 6 illustrates an example of an arrangement of dispersive hartmann sensors in which one primary mirror is a three sub-mirror split telescope. The reference numerals in fig. 6 are explained as follows:
1-3, a first, a second and a third split mirrors;
4-6, a first, a second and a third splice lenses confocal and finely-confocal aperture selection area;
and 7-9, and a diffraction selection area between every two of the three sub-mirrors, wherein the rectangular gray scale gradient represents the dispersion direction of the dispersive element from shallow to deep.
Example 2
A storage medium storing a program file capable of implementing the method for detecting a relative error of a radius of curvature of any one of the above-described split mirrors.
Example 3
A processor for running a program, wherein the program runs to execute the method for detecting the relative error of the curvature radius of the split lens according to any one of the above methods.
The foregoing embodiment numbers of the present invention are merely for the purpose of description, and do not represent the advantages or disadvantages of the embodiments.
In the foregoing embodiments of the present invention, the descriptions of the embodiments are emphasized, and for a portion of this disclosure that is not described in detail in this embodiment, reference is made to the related descriptions of other embodiments.
In the several embodiments provided in the present application, it should be understood that the disclosed technology content may be implemented in other manners. The system embodiments described above are merely exemplary, and for example, the division of units may be a logic function division, and there may be another division manner in actual implementation, for example, multiple units or components may be combined or integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be through some interfaces, units or modules, or may be in electrical or other forms.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed over a plurality of units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
In addition, each functional unit in the embodiments of the present invention may be integrated in one processing unit, or each unit may exist alone physically, or two or more units may be integrated in one unit. The integrated units may be implemented in hardware or in software functional units.
The integrated units, if implemented in the form of software functional units and sold or used as stand-alone products, may be stored in a computer readable storage medium. Based on such understanding, the technical solution of the present invention may be embodied in essence or a part contributing to the prior art or all or part of the technical solution in the form of a software product stored in a storage medium, comprising several instructions for causing a computer device (which may be a personal computer, a server or a network device, etc.) to perform all or part of the steps of the method of the various embodiments of the present invention. And the aforementioned storage medium includes: a U-disk, a Read-Only Memory (ROM), a random access Memory (RAM, random Access Memory), a removable hard disk, a magnetic disk, or an optical disk, or other various media capable of storing program codes.
The foregoing is merely a preferred embodiment of the present invention and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present invention, which are intended to be comprehended within the scope of the present invention.
Claims (7)
1. The method for detecting the relative error of the curvature radius of the split-lens is based on a wavefront sensing technology, and is characterized by comprising the following steps:
selecting a beam expanding lens corresponding to the relative aperture according to the relative aperture of the two reflectors to be detected;
and detecting the relative errors of the curvature radiuses of the two reflectors to be detected by using a wavefront sensing system based on a light path structure similar to a Tasmann interferometer and matching with a beam expanding lens, and obtaining the relative errors of the curvature radiuses of the two reflectors to be detected.
2. The method for detecting relative errors of curvature radii of two mirrors to be detected according to claim 1, wherein the step of using the wavefront sensing system based on the optical path structure similar to the tatmann interferometer to match with the beam expanding lens to detect the relative errors of curvature radii of the two mirrors to be detected, and the step of obtaining the relative errors of curvature radii of the two mirrors to be detected includes:
calibrating a sensor: cutting into a test light path light shielding plate, cutting out a calibration light path light shielding plate, and calibrating a detector of the system by adopting a laser light source and a white light source respectively;
testing light path rough alignment: cutting out a test light path light shielding plate, cutting into a calibration light path light shielding plate, aligning a splicing mirror by adopting a laser light source and a large-view-field coarse confocal camera, if no image point exists in a view field, searching a test light path return image point by using a corresponding image point searching algorithm, and then completing image point identification and automatic alignment of the test light path;
coarse confocal: after the image points of the two reflectors to be detected appear in the coarse confocal camera, adjusting the displacement of the corresponding motion control mechanism along the optical axis direction according to the corresponding algorithm to start to perform the coarse confocal of the image points;
fine confocal: the precise confocal shack Hartmann wavefront sensing system is matched with different working modes of a light shielding plate to respectively detect the inclined aberration and the defocusing aberration of the two reflectors to be detected, and the two reflectors are regulated by a motion control mechanism;
crude co-phase: detecting axial relative errors of two reflectors to be detected by adopting a coarse common phase error detection system and a wavefront sensing method based on dispersion fringe images, and adjusting the axial relative errors by a high-precision motion control mechanism;
fine phase-radius of curvature relative error detection: the precise common-phase error detection system is adopted to detect the relative defocus aberration of the two reflectors to be detected by matching with a corresponding phase difference method and a phase recovery method as the relative error output of the curvature radius.
3. The utility model provides a relative error detection device of split joint mirror radius of curvature which characterized in that includes: a curvature radius relative error detection system and a wavefront feedback motion control system based on a wavefront sensing technology; wherein:
firstly, installing two reflectors to be detected on the wave-front feedback motion control system; and the curvature radius relative error detection system selects beam expanding lenses corresponding to the relative apertures according to the relative apertures of the two reflectors to be detected, and detects the curvature radius relative error of the two reflectors to be detected by using the beam expanding lenses to obtain the curvature radius relative error of the two reflectors to be detected.
4. A splice mirror radius of curvature relative error detection apparatus as claimed in claim 3, further comprising a test optical path length adjustment bracket for adjusting the test optical path length in response to different radii of curvature of the mirror.
5. The device for detecting relative error of curvature radius of split mirrors according to claim 3, wherein two mirrors to be detected are respectively installed on the wavefront feedback motion control system, then a beam expanding lens with proper F# number is selected for the relative error detection system according to the relative aperture of the mirrors to be detected, then coarse confocal, fine confocal, coarse co-phase and fine co-phase are performed on the two mirrors to be detected based on a wavefront sensing technology, then the relative error detection of curvature radius is completed, and finally the curvature radius error is output.
6. The apparatus of claim 5, wherein the system comprises: the system comprises a coarse confocal error detection system, a fine confocal error detection system, a coarse co-phase error detection system and a fine co-phase error detection system, wherein the two reflectors to be detected are subjected to coarse confocal, fine confocal, coarse co-phase and fine co-phase based on a wavefront sensing technology.
7. The device for detecting relative error of curvature radius of a split lens according to claim 6, wherein the coarse confocal error detection system, the fine confocal error detection system, the coarse common phase error detection system and the fine common phase error detection system are formed by a detector and a corresponding motion control mechanism to form a closed loop detection and motion control unit, so that unit functions are realized.
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