CN116427015A - Czochralski silicon single crystal detection CCD camera - Google Patents
Czochralski silicon single crystal detection CCD camera Download PDFInfo
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- CN116427015A CN116427015A CN202310696325.7A CN202310696325A CN116427015A CN 116427015 A CN116427015 A CN 116427015A CN 202310696325 A CN202310696325 A CN 202310696325A CN 116427015 A CN116427015 A CN 116427015A
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- ccd camera
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- 239000013078 crystal Substances 0.000 title claims abstract description 44
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 30
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 28
- 239000010703 silicon Substances 0.000 title claims abstract description 28
- 238000001514 detection method Methods 0.000 title claims abstract description 9
- 238000004140 cleaning Methods 0.000 claims abstract description 102
- 229920000742 Cotton Polymers 0.000 claims abstract description 52
- 239000000428 dust Substances 0.000 claims abstract description 45
- 239000007788 liquid Substances 0.000 claims abstract description 28
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 51
- 230000001360 synchronised effect Effects 0.000 claims description 38
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 35
- 239000000741 silica gel Substances 0.000 claims description 34
- 229910002027 silica gel Inorganic materials 0.000 claims description 34
- 238000011084 recovery Methods 0.000 claims description 19
- 238000007790 scraping Methods 0.000 claims description 16
- 238000009423 ventilation Methods 0.000 claims description 14
- 229910000831 Steel Inorganic materials 0.000 claims description 13
- 239000010959 steel Substances 0.000 claims description 13
- 238000001816 cooling Methods 0.000 claims description 12
- 241000628997 Flos Species 0.000 claims description 8
- 239000000498 cooling water Substances 0.000 claims description 3
- 238000007689 inspection Methods 0.000 claims 9
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 229910052709 silver Inorganic materials 0.000 description 8
- 239000004332 silver Substances 0.000 description 8
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 7
- 239000012535 impurity Substances 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000004064 recycling Methods 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
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-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
- C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
- C30B15/26—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using television detectors; using photo or X-ray detectors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
- B08B1/12—Brushes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
- B08B1/16—Rigid blades, e.g. scrapers; Flexible blades, e.g. wipers
- B08B1/165—Scrapers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
- B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/50—Cleaning by methods involving the use of tools involving cleaning of the cleaning members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to the technical field of Czochralski silicon single crystals, in particular to a Czochralski silicon single crystal detection CCD camera, which comprises a bracket fixedly connected to a liquid port window of a single crystal furnace; the top of the bracket is fixedly connected with a CCD camera; the top of the bracket is fixedly connected with a cleaning structure; the cleaning structure comprises a shell fixedly connected to the top of the bracket; storage grooves are formed in two sides of the inner part of the shell; a cross beam is arranged between the two sides of the sliding groove in a sliding way; a cleaning cotton sliver is arranged at the top of the cross beam; the motor drives the movable screw rod to rotate, the driving cross beam slides over from the bottom of the lens of the CCD camera, the cleaning cotton sliver is driven to contact the lens of the CCD camera to slide over, and dust attached to the lens of the CCD camera is cleaned; the cross beam is controlled to translate repeatedly until the lens of the CCD camera is clean, and after the shot image is clear, the cleaning work of the CCD camera lens is completed; not only reduces the difficulty of cleaning the CCD camera, but also reduces the influence of dust on the CCD camera.
Description
Technical Field
The invention relates to the technical field of Czochralski silicon single crystals, in particular to a CCD camera for detecting the Czochralski silicon single crystals.
Background
Pulling a silicon single crystal by a Czochralski method is the most widely used technology for producing single crystal silicon at present, in the Czochralski method process, high-purity polycrystalline silicon is filled into a quartz crucible for heating and melting, then the silicon single crystal with a specific crystal orientation is contacted with molten silicon, silicon forms regular crystals on a solid-liquid interface along the arrangement structure of silicon atoms on seed crystals with a known crystal orientation to form a single crystal, the single crystal is continuously extended until the single crystal becomes a silicon ingot, and finally the growth process of the silicon single crystal is completed; in the whole process of pulling up silicon single crystal by the Czochralski method, the growth of the single crystal silicon in the single crystal furnace always needs to be detected by using a CCD camera.
When the CCD camera is used for detection, the CCD camera acquires an actual image of the growth of the monocrystalline silicon and an image of the reflection of the monocrystalline silicon, and the distance from the tip of the monocrystalline silicon to the liquid surface of the molten silicon is calculated according to the position of the actual image and the position of the image of the reflection; and accurately calculating the liquid port distance of the single crystal furnace based on the distance from the tail end of the single crystal silicon to the lower edge plane of the guide cylinder and the distance from the tip end of the single crystal silicon to the liquid surface of the silicon melt.
The CCD camera is fixedly arranged on the liquid port window of the single crystal furnace, and a lens of the CCD camera is directly aligned to the liquid port window of the single crystal furnace; with the use of a CCD camera, dust is gradually attached to a lens of the CCD camera, so that the definition and accuracy of an image shot by the CCD camera can be influenced, and excessive dust can block heat dissipation of the lens of the CCD camera, so that the temperature of the lens of the CCD camera is increased, and the service life and accuracy of the CCD camera are influenced.
Disclosure of Invention
Therefore, the technical problem to be solved by the invention is to overcome the problem that dust is gradually attached to the lens of the CCD camera in the prior art.
In order to solve the technical problems, the invention provides a Czochralski silicon single crystal detection CCD camera, which comprises a bracket fixedly connected to a liquid port window of a single crystal furnace; the top of the bracket is fixedly connected with a CCD camera; the top of the bracket is fixedly connected with a cleaning structure; the cleaning structure is sleeved outside the lens of the CCD camera; the cleaning structure comprises a shell fixedly connected to the top of the bracket; the shell is sleeved outside the lens of the CCD camera; storage grooves are formed in two sides of the inner part of the shell; the other two sides of the interior of the shell are provided with sliding grooves; a cross beam is arranged between the two sides of the sliding groove in a sliding way; a cleaning cotton sliver is arranged at the top of the cross beam; the top surface of the cleaning cotton sliver is in sliding fit with a lens of the CCD camera; a driving unit is arranged in the sliding groove and drives the cross beam to move; the working personnel remotely control the driving unit to drive the cross beam to slide out of the storage groove and slide along the sliding groove, so that the cross beam slides over from the bottom of the lens of the CCD camera, and drives the cleaning cotton sliver to contact the lens of the CCD camera to slide over, so that dust attached to the lens of the CCD camera is cleaned; the cross beam is controlled to translate repeatedly along the chute for a plurality of times until the lens of the CCD camera is clean, and after the shot image is clear, the cleaning work of the lens of the CCD camera is completed; not only reduces the difficulty of the staff to clean the CCD camera, but also reduces the influence of dust on the CCD camera.
In one embodiment of the invention, the driving unit comprises a movable screw rotatably mounted inside the chute on one side; the two ends of the movable screw rod rotate to penetrate through the outer wall of the shell; a motor is fixedly connected to the outer wall of one side of the shell; the rotating shaft of the motor is fixedly connected with one end of the movable screw rod; the movable screw rod penetrates through one end of the cross beam and is in threaded fit with the cross beam; a fixed screw is fixedly connected inside the sliding groove on the other side; the fixed screw rod penetrates through the other end of the cross beam in a sliding manner; the motor drives the movable screw rod to rotate, and the movable screw rod is matched with the cross beam through threads to drive the cross beam to slide along the sliding groove so as to provide power for the translation of the cross beam.
In one embodiment of the invention, the top surface of the cross beam is provided with a groove; a supporting plate is fixedly connected inside the groove; a plurality of springs are uniformly fixedly connected between the bottom surface of the supporting plate and the bottom surface of the groove; the cleaning cotton sliver is fixedly connected to the top surface of the supporting plate; a water pipe is fixedly connected to the inner top surface of the storage groove at one side; one end of the water pipe is communicated with the water tank through a pipeline, and cleaning liquid is filled in the water tank; a plurality of nozzles are uniformly arranged at the bottom of the water pipe; the cleaning cotton sliver is contacted with the nozzle at the bottom of the water pipe, and the cleaning liquid in the water pipe is sprayed into the cleaning cotton sliver through the nozzle, and meanwhile dust on the cleaning cotton sliver is washed, so that the cleaning degree of the cleaning cotton sliver is improved; the lens of the CCD camera is cleaned by utilizing cleaning, so that the cleaning effect is improved, and the damage to the lens of the CCD camera is reduced.
In one embodiment of the invention, a through groove is formed in the middle of the groove; a U-shaped plate is fixedly connected to the middle part of the bottom surface of the supporting plate; a right trapezoid block is fixedly connected to one side, close to the water pipe, of the bottom surface of the U-shaped plate, and an inclined surface of the right trapezoid block is arranged on one side, close to the middle of the U-shaped plate; a sliding plate is arranged in the U-shaped plate in a sliding manner; the bottom surface of the sliding plate is fixedly connected with an inverted trapezoid block, and the inclined surface of the inverted trapezoid block is arranged on one side close to the middle of the U-shaped plate; the positive trapezoid block is in sliding fit with the inverted trapezoid block; the two end parts of the sliding plate are in sliding fit with the interiors of the through grooves on the two sides; a pushing block is fixedly connected to the middle part of one side of the storage groove, which is far away from the cross beam, at both sides; the pushing block is in sliding fit with the inside of the through groove; the cleaning cotton sliver slides and withdraws from the inside of the groove of the cross beam, so that the cleaning cotton sliver absorbing the cleaning liquid cleans the lens of the CCD camera, and the cleaned cleaning cotton sliver is not contacted with the lens of the CCD camera, so that the pollution of waste cleaning liquid and dust after the lens of the CCD camera is used on the cleaning cotton sliver is reduced, and the cleaning effect of the lens of the CCD camera is improved.
In one embodiment of the invention, the two ends of one side of the cross beam far away from the water pipe are rotatably provided with synchronous wheels; the two synchronous wheels are respectively sleeved on the outer sides of the movable screw rod and the fixed screw rod; the movable screw is in threaded fit with the outer synchronous wheel; the outer sides of the two synchronous wheels are sleeved with synchronous belts; the outer ring of the synchronous belt is uniformly fixedly connected with a plurality of velvet brushes; the fluff brush is in sliding fit with a lens of the CCD camera; the velvet brush is rotationally contacted with the lens of the CCD camera, so that larger dust particles on the lens of the CCD camera are cleaned, and the phenomenon that the larger dust particles are pushed by a cleaning cotton sliver to rub with the lens of the CCD camera to cause scratch damage to the lens of the CCD camera is avoided.
In one embodiment of the invention, a mounting beam is fixedly connected to the bottom surface of one side of the cross beam, which is close to the synchronous belt; a collecting basket is hinged to one side of the mounting beam, which is close to the synchronous belt, and a torsion spring is arranged on a hinged rod of the collecting basket; a plurality of steel needle brushes are uniformly and fixedly connected to the inner bottom surface of the collecting basket; steel needles of the steel needle brush are in sliding fit with fluff of the fluff brush; the fluff brush is cleaned by dispersing the plurality of steel needle brushes, and dust and impurities on the fluff brush fall on the bottom of the collecting basket, so that the cleaning degree of the fluff brush is improved.
In one embodiment of the invention, the inner bottom surface of the storage groove on the other side is provided with a recovery groove; a dust collecting basket is arranged on the inner bottom surface of the recovery tank; square buckles are rotatably arranged in the middle of the bottom surface of one side of the collecting basket, which is close to the containing groove; the middle part of the top surface of one side of the recovery groove, which is close to the cross beam, is provided with a notch; a hook is fixedly connected at the notch of the recovery groove; the hook is in sliding fit with the square buckle; thereby being convenient for the staff to concentrate to process the collected dust and reducing the workload of the staff.
In one embodiment of the invention, a silica gel scraper is fixedly connected to the top of one side of the cross beam, which is close to the water pipe; the top of the silica gel scraper is in sliding fit with a lens of the CCD camera; an air cavity is formed in the silica gel scraping plate; an arc-shaped elastic grid plate is fixedly connected to the concave surface of the bottom of the silica gel scraper; a spiral air pipe is fixedly connected to the bottom of the silica gel scraping plate; the spiral air pipe is communicated with the air cavity; the other end of the spiral air pipe penetrates through the outer wall of the shell; one end of the spiral air pipe, which is far away from the silica gel scraping plate, is communicated with an air pump; the top of the silica gel scraper is tilted upwards, so that the silica gel scraper contacts with a lens of the CCD camera, and residual water stains of the lens of the CCD camera are scraped off; when the beam is reset, the silica gel scraping plate contracts, so that the contact between the silica gel scraping plate and a lens of the CCD camera is avoided, and the cleanliness of the lens of the CCD camera is further improved.
In one embodiment of the invention, the guide rails are fixedly connected to both sides of the bottom of the shell; a shielding basket is slidably arranged between the guide rails at two sides; hydraulic push rods are fixedly connected to two sides of the shell; the end part of a piston rod of the hydraulic push rod is fixedly connected with the top of the shielding basket; blocking dust and liquid drops generated during cleaning of a lens of the CCD camera; meanwhile, falling dust and liquid drop are prevented from falling into a liquid window of the single crystal furnace.
In one embodiment of the invention, a ventilation groove is formed in one side of the shielding basket away from the single crystal furnace; a filter screen is fixedly connected to one side of the ventilation groove, which is close to the middle part of the shielding basket; a fan is arranged in the ventilation groove; a cooling grid pipe is arranged in the ventilation groove, and the cooling grid pipe is positioned between the fan and the filter screen; the pipe orifices at the two ends of the cooling grid pipe are communicated with a cooling water tank; the lens of the CCD camera is cooled by cold air, so that the lens of the CCD camera is prevented from being damaged due to the fact that cleaning liquid with low temperature is coated on the lens of the CCD camera.
Compared with the prior art, the technical scheme of the invention has the following advantages:
1. the invention relates to a Czochralski silicon single crystal detection CCD camera, which is provided with a shell, a cross beam, a cleaning cotton sliver, a movable screw rod and a motor; the motor drives the movable screw rod to rotate, and the movable screw rod is matched with the cross beam through threads to drive the cross beam to slide along the sliding groove, so that the cross beam slides over the bottom of the lens of the CCD camera, and drives the cleaning cotton sliver to contact the lens of the CCD camera to slide over, so that dust attached to the lens of the CCD camera is cleaned; the cross beam is controlled to translate repeatedly along the chute for a plurality of times until the lens of the CCD camera is clean, and after the shot image is clear, the cleaning work of the lens of the CCD camera is completed; not only reduces the difficulty of the staff to clean the CCD camera, but also reduces the influence of dust on the CCD camera.
2. According to the Czochralski silicon single crystal detection CCD camera, a fixed screw rod, a synchronous wheel, a synchronous belt and a velvet brush are arranged; when the drive unit drives the crossbeam to slide the bottom of CCD camera, the crossbeam removes along deciding the screw rod, through the screw thread cooperation of synchronizing wheel and deciding the screw rod, simultaneously, the crossbeam drives the synchronizing wheel and removes for the synchronizing wheel is rotatory along deciding the outer lane of screw rod, makes hold-in range cooperation synchronizing wheel rotatory, drives a plurality of fine hair brush rotations and cleans, and fine hair brush rotation contact is with the camera lens of CCD camera, thereby cleans great dust granule on the camera lens of CCD camera, has avoided great dust granule to promote by clean silver with the camera lens friction of CCD camera then, causes the camera lens of CCD camera to produce the scratch damage.
Drawings
In order that the invention may be more readily understood, a more particular description of the invention will be rendered by reference to specific embodiments thereof that are illustrated in the appended drawings.
FIG. 1 is a perspective view of a first embodiment of the present invention;
FIG. 2 is an internal structural view of the housing in accordance with the first embodiment of the present invention;
FIG. 3 is a perspective view of a cross member in accordance with one embodiment of the present invention;
FIG. 4 is an internal cross-sectional view of the housing in accordance with a first embodiment of the invention;
FIG. 5 is an exploded view of a cleaning structure in accordance with a first embodiment of the present invention;
FIG. 6 is an exploded view of a beam in accordance with one embodiment of the present invention;
FIG. 7 is a cross-sectional view of a cross-beam in accordance with an embodiment of the present invention;
FIG. 8 is a perspective view of a silica gel scraper according to a first embodiment of the present invention;
FIG. 9 is a cross-sectional view of a shielding basket in accordance with a second embodiment of the present invention;
description of the specification reference numerals: 1. a bracket; 2. a CCD camera; 3. a housing; 4. a storage groove; 5. a chute; 6. a cross beam; 7. cleaning cotton sliver; 8. a movable screw; 9. a motor; 10. a fixed screw rod; 11. a groove; 12. a supporting plate; 13. a spring; 14. a water pipe; 15. a through groove; 16. a U-shaped plate; 17. a right trapezoid block; 18. a slide plate; 19. inverted trapezoid blocks; 20. a pushing block; 21. a synchronizing wheel; 22. a synchronous belt; 23. a velvet brush; 24. mounting a beam; 25. a collection basket; 26. a steel needle brush; 27. a recovery tank; 28. a dust collecting basket; 29. square buckle; 30. a hook; 31. a silica gel scraping plate; 32. an air cavity; 33. an elastic mesh plate; 34. a spiral air pipe; 35. a guide rail; 36. shielding basket; 37. a hydraulic push rod; 38. a vent groove; 39. a fan; 40. and cooling the grid tube.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and specific examples, which are not intended to be limiting, so that those skilled in the art will better understand the invention and practice it.
Example 1
Referring to fig. 1 to 7, a czochralski silicon single crystal detection CCD camera of the present invention includes a bracket 1 fixedly connected to a liquid window of a single crystal furnace; the CCD camera 2 is fixedly connected to the top of the bracket 1; the top of the bracket 1 is fixedly connected with a cleaning structure; the cleaning structure is sleeved outside the lens of the CCD camera 2; the cleaning structure comprises a shell 3 fixedly connected to the top of the bracket 1; the shell 3 is sleeved outside the lens of the CCD camera 2; the two sides of the interior of the shell 3 are provided with storage grooves 4; the other two sides of the interior of the shell 3 are provided with sliding grooves 5; a cross beam 6 is slidably arranged between the inner parts of the sliding grooves 5 at two sides; the top of the cross beam 6 is provided with a cleaning cotton sliver 7; the top surface of the cleaning cotton sliver 7 is in sliding fit with the lens of the CCD camera 2; a driving unit is arranged in the chute 5, and drives the cross beam 6 to move; when the CCD camera 2 works for a long time, a large amount of dust is attached to the lens of the CCD camera 2, after the definition of a shot image is affected, a worker remotely controls the driving unit to drive the cross beam 6 to slide out of the storage groove 4 and slide along the sliding groove 5, so that the cross beam 6 slides over the bottom of the lens of the CCD camera 2, drives the cleaning cotton sliver 7 to contact the lens of the CCD camera 2 to slide over, and cleans the dust attached to the lens of the CCD camera 2; the cross beam 6 is controlled to reciprocate and translate along the chute 5 for a plurality of times until the lens of the CCD camera 2 is clean, and after the shot image is clear, the cleaning work of the lens of the CCD camera 2 is completed; not only the difficulty of the cleaning of the CCD camera 2 by the staff is reduced, but also the influence of dust on the CCD camera 2 is reduced.
Referring to fig. 2 to 5, the driving unit includes a movable screw 8 rotatably installed inside the chute 5 at one side; the two ends of the movable screw rod 8 rotate to penetrate through the outer wall of the shell 3; a motor 9 is fixedly connected to the outer wall of one side of the shell 3; the rotating shaft of the motor 9 is fixedly connected with one end of the movable screw rod 8; the movable screw rod 8 penetrates through one end of the cross beam 6, and the movable screw rod 8 is in threaded fit with the cross beam 6; the fixed screw rod 10 is fixedly connected inside the sliding groove 5 at the other side; the fixed screw rod 10 slides through the other end of the cross beam 6; when the device works, a worker remotely controls the working state of the motor 9, the motor 9 drives the movable screw rod 8 to rotate, and the movable screw rod 8 is matched with the cross beam 6 through threads to drive the cross beam 6 to slide along the chute 5 so as to provide power for translation of the cross beam 6; meanwhile, the sliding direction of the cross beam 6 is controlled through the fixed screw rod 10, so that the probability that the cross beam 6 is separated from the inside of the chute 5 is reduced, and the moving stability of the cross beam 6 is improved.
Referring to fig. 3 to 7, a groove 11 is formed on the top surface of the cross beam 6; a supporting plate 12 is fixedly connected inside the groove 11; a plurality of springs 13 are uniformly fixedly connected between the bottom surface of the supporting plate 12 and the bottom surface of the groove 11; the cleaning cotton sliver 7 is fixedly connected to the top surface of the supporting plate 12; a water pipe 14 is fixedly connected to the inner top surface of the storage groove 4 at one side; one end of the water pipe 14 is communicated with the water tank through a pipeline, and cleaning liquid is filled in the water tank; a plurality of nozzles are uniformly arranged at the bottom of the water pipe 14; the supporting plate 12 is jacked up by the elasticity of the spring 13, so that the supporting plate 12 has a trend of sliding upwards, when the bottom of the CCD camera 2 which moves by the cross beam 6, the lens of the CCD camera 2 is contacted with the cleaning cotton sliver 7, the lens of the CCD camera 2 generates extrusion force on the cleaning cotton sliver 7, and the cleaning cotton sliver 7 is always clung to the lens of the CCD camera 2 by matching with the elasticity of the spring 13, so that the cleaning efficiency of the lens of the CCD camera 2 is improved; and, after the crossbeam 6 removes the bottom of the water pipe 14 of accomodating groove 4, at this moment, clean silver 7 is located the bottom of water pipe 14, the inside cleaning solution of water tank is under the transportation of water pump, the inside of water pipe 14 is carried to the inside of water tank, simultaneously, spring 13 jack-up layer board 12, clean silver 7 resets, make clean silver 7 and the nozzle contact of water pipe 14 bottom, the inside cleaning solution of water pipe 14 spouts the inside of clean silver 7 through the nozzle, dust on the clean silver 7 washes simultaneously, the clean degree of clean silver 7 has been improved, afterwards, the cleaning solution is absorbed by clean silver 7, utilize the cleanness to clean the camera lens of CCD camera 2, not only improved the cleaning effect, and the damage to the camera lens of CCD camera 2 has been reduced.
Referring to fig. 4 to 7, a through groove 15 is formed in the middle of the groove 11; a U-shaped plate 16 is fixedly connected to the middle part of the bottom surface of the supporting plate 12; a right trapezoid block 17 is fixedly connected to one side, close to the water pipe 14, of the bottom surface of the U-shaped plate 16, and an inclined surface of the right trapezoid block 17 is arranged on one side, close to the middle of the U-shaped plate 16; a sliding plate 18 is slidably arranged inside the U-shaped plate 16; the bottom surface of the sliding plate 18 is fixedly connected with an inverted trapezoid block 19, and the inclined surface of the inverted trapezoid block 19 is arranged on one side close to the middle of the U-shaped plate 16; the positive trapezoid block 17 is in sliding fit with the inverted trapezoid block 19; the two ends of the sliding plate 18 are in sliding fit with the interiors of the through grooves 15 on the two sides; a push block 20 is fixedly connected to the middle part of one side of the storage groove 4 at the two sides, which is far away from the cross beam 6; the push block 20 is in sliding fit with the inside of the through groove 15; in the initial state, the cross beam 6 is positioned in the storage groove 4 at the water pipe 14, the push block 20 is positioned in the water pipe 15, the inverted trapezoid block 19 is separated from the positive trapezoid block 17, and the cleaning cotton sliver 7 is in contact with the nozzle at the bottom of the water pipe 14; when the driving unit drives the cross beam 6 to slide across the bottom of the CCD camera 2 in the working state, at the moment, the spring 13 is in a stretching state to jack up the supporting plate 12, so that the cleaning cotton sliver 7 slides from the inside of the groove 11, the cleaning cotton sliver 7 contacts with the lens of the CCD camera 2, and the lens of the CCD camera 2 is cleaned; then, the cross beam 6 slides to the inside of the accommodating groove 4 at the other side, a push block 20 in the accommodating groove 4 is inserted into the through groove 15, a push sliding plate 18 slides to the other end of the through groove 15, an inverted trapezoid block 19 is driven to be attached to a positive trapezoid block 17 to slide, the inverted trapezoid block 19 slides to the top surface of the positive trapezoid block 17, the positive trapezoid block 17 is driven to slide downwards, a U-shaped plate 16 and a supporting plate 12 are driven to move downwards, a spring 13 is compressed, and the cleaning cotton sliver 7 is recovered to the inside of the groove 11; then, the driving unit drives the cross beam 6 to slide to the initial storage groove 4, and the cleaning cotton sliver 7 is not contacted with the lens of the CCD camera 2 when the cross beam 6 slides across the bottom of the CCD camera 2 because the cleaning cotton sliver 7 is stored in the groove 11; after the cross beam 6 moves into the storage groove 4 at the initial position, the push block 20 is inserted into the through groove 15, the push slide plate 18 is reset, the inverted trapezoid block 19 is separated from the positive trapezoid block 17, the spring 13 is reset, the supporting plate 12 is pushed to slide upwards, the cleaning cotton sliver 7 is pushed to slide out of the groove 11, and the cleaning cotton sliver 7 is contacted with the nozzle at the bottom of the water pipe 14; the cleaning cotton sliver 7 slides and withdraws from the inside of the groove 11 of the cross beam 6, the cleaning cotton sliver 7 absorbing the cleaning liquid cleans the lens of the CCD camera 2, the cleaned cleaning cotton sliver 7 is not contacted with the lens of the CCD camera 2, the pollution of the lens of the CCD camera 2 by the waste cleaning liquid and dust after being used on the cleaning cotton sliver 7 is reduced, and the cleaning effect of the lens of the CCD camera 2 is improved.
Referring to fig. 3 to 7, the two ends of one side of the cross beam 6 far away from the water pipe 14 are rotatably provided with synchronous wheels 21; the two synchronizing wheels 21 are respectively sleeved on the outer sides of the movable screw rod 8 and the fixed screw rod 10; the movable screw rod 8 is in threaded fit with the outer synchronous wheel 21; the outer sides of the two synchronous wheels 21 are sleeved with synchronous belts 22; a plurality of floss brushes 23 are uniformly and fixedly connected to the outer ring of the synchronous belt 22; the fluff brush 23 is in sliding fit with the lens of the CCD camera 2; when the CCD camera 2 is in operation, the driving unit drives the cross beam 6 to slide across the bottom of the CCD camera 2, the cross beam 6 moves along the fixed screw 10, the synchronous wheel 21 is driven to move through the threaded fit of the synchronous wheel 21 and the fixed screw 10, the synchronous wheel 21 rotates along the outer ring of the fixed screw 10, the synchronous belt 22 is matched with the synchronous wheel 21 to rotate, the plurality of hair brushes 23 are driven to rotate and clean, the hair brushes 23 are in rotary contact with the lens of the CCD camera 2, and accordingly larger dust particles on the lens of the CCD camera 2 are cleaned, and then larger dust particles are prevented from being pushed by the cleaning cotton sliver 7 to rub with the lens of the CCD camera 2, so that scratches and damages are generated on the lens of the CCD camera 2.
Referring to fig. 3 to 7, a mounting beam 24 is fixedly connected to the bottom surface of one side of the cross beam 6, which is close to the synchronous belt 22; a collecting basket 25 is hinged to one side of the mounting beam 24, which is close to the synchronous belt 22, and a torsion spring is arranged on a hinged rod of the collecting basket 25; a plurality of steel needle brushes 26 are uniformly fixedly connected to the inner bottom surface of the collecting basket 25; steel needles of the steel needle brush 26 are in sliding fit with the fluff of the fluff brush 23; when the synchronous belt 22 drives the plurality of floss brushes 23 to rotate during operation, when the floss brushes 23 rotate to the bottom of the synchronous belt 22, the floss brushes 23 horizontally pass through the collecting basket 25, the floss brushes 23 are cleaned in a dispersing way through the plurality of steel needle brushes 26, dust and impurities on the floss brushes 23 fall to the bottom of the collecting basket 25, and therefore the cleaning degree of the floss brushes 23 is improved.
Referring to fig. 4 to 7, a recovery groove 27 is formed on the inner bottom surface of the receiving groove 4 on the other side; a dust collection basket 28 is arranged on the inner bottom surface of the recovery groove 27; the middle part of the bottom surface of one side of the collecting basket 25, which is close to the containing groove 4, is rotatably provided with a square buckle 29; a notch is formed in the middle of the top surface of one side, close to the cross beam 6, of the recovery groove 27; a hook 30 is fixedly connected at the notch of the recovery groove 27; the hook 30 is in sliding fit with the square buckle 29; when the dust collector works, the collecting basket 25 is carried by the cross beam 6 and moves towards the recycling groove 27, the square buckle 29 at the bottom of the collecting basket 25 is clamped on the hook 30, so that the square buckle 29 rotates, the collecting basket 25 is pulled to rotate in the recycling groove 27, the collecting basket 25 is turned downwards, and dust and impurities at the bottom of the collecting basket 25 are poured into the dust collecting basket 28 in the recycling groove 27; then, when the cross beam 6 is reset, the cross beam 6 drives the collecting basket 25 to move out of the recovery groove 27, and at the moment, the torsion springs on the collecting basket 25 are reset to push the collecting basket 25 to reset; thereby being convenient for the staff to concentrate to process the collected dust and reducing the workload of the staff.
Referring to fig. 3 to 8, a silica gel scraper 31 is fixedly connected to the top of one side of the cross beam 6 close to the water pipe 14; the top of the silica gel scraper 31 is in sliding fit with the lens of the CCD camera 2; an air cavity 32 is formed in the silica gel scraping plate 31; an arc-shaped elastic grid plate 33 is fixedly connected to the concave surface of the bottom of the silica gel scraper 31; a spiral air pipe 34 is fixedly connected to the bottom of the silica gel scraping plate 31; the spiral air pipe 34 is communicated with the air cavity 32; the other end of the spiral air pipe 34 penetrates through the outer wall of the shell 3; one end of the spiral air pipe 34, which is far away from the silica gel scraping plate 31, is communicated with an air pump; when the CCD camera works, the cross beam 6 slides from the bottom of the lens of the CCD camera 2 and slides into the storage groove 4 at the position of the recovery groove 27, at the moment, the air pump conveys air into the air cavity 32 in the silica gel scraping plate 31 through the spiral air pipe 34, so that the air cavity 32 is expanded and is blocked by the elastic grid plate 33, the middle part of the elastic grid plate 33 protrudes outwards, the top of the elastic grid plate 33 is lifted upwards, the top of the silica gel scraping plate 31 is driven to lift upwards, the silica gel scraping plate 31 is contacted with the lens of the CCD camera 2, and residual water stains of the lens of the CCD camera 2 are scraped; when the cross beam 6 resets, the air pump pumps out air in the air cavity 32 through the spiral air pipe 34, so that the silica gel scraper 31 is contracted, the contact between the silica gel scraper 31 and the lens of the CCD camera 2 is avoided, and the cleanliness of the lens of the CCD camera 2 is further improved.
Referring to fig. 2, 5 and 6, guide rails 35 are fixedly connected to both sides of the bottom of the housing 3; a shielding basket 36 is slidably arranged between the guide rails 35 on both sides; the two sides of the shell 3 are fixedly connected with hydraulic push rods 37; the end part of a piston rod of the hydraulic push rod 37 is fixedly connected with the top of the shielding basket 36; when the CCD camera 2 lens cleaning device works, the hydraulic push rods 37 on two sides push the shielding basket 36 to move to the bottom of the shell 3 along the guide rail 35 to block dust and liquid drops generated when the CCD camera 2 lens cleaning device cleans the CCD camera 2 lens; meanwhile, falling dust and liquid drop are prevented from falling into a liquid window of the single crystal furnace.
Example two
Referring to fig. 9, in a first comparative example, as another embodiment of the present invention, a ventilation slot 38 is formed in the inner portion of one side of the shielding basket 36 away from the single crystal furnace; a filter screen is fixedly connected to one side of the ventilation groove 38 close to the middle of the shielding basket 36; a fan 39 is arranged in the ventilation groove 38; a cooling grid tube 40 is arranged in the ventilation groove 38, and the cooling grid tube 40 is positioned between the fan 39 and the filter screen; the orifices at the two ends of the cooling grid tube 40 are communicated with a cooling water tank; when the CCD camera is in operation, after the shielding basket 36 moves to the bottom of the shell 3 along the guide rail 35, the fan 39 is started, external air is sucked in and is cooled by the cooling grid tube 40 through the ventilation groove 38, generated cold air is blown into the shell 3, the cold air cools the lens of the CCD camera 2, and the cleaning solution with lower temperature is prevented from being coated on the lens of the CCD camera 2, so that the lens of the CCD camera 2 is prevented from being damaged.
Working principle: after the CCD camera 2 works for a long time, a large amount of dust is attached to a lens of the CCD camera 2, and after the definition of a shot image is affected, a worker performs remote control; the hydraulic push rods 37 on the two sides push the shielding basket 36 to move to the bottom of the shell 3 along the guide rail 35, the fan 39 is started, external air is sucked into the shell through the ventilation groove 38 and cooled through the cooling grid tube 40, generated cold air is blown into the shell 3, and the cold air cools the lens of the CCD camera 2; after the lens of the CCD camera 2 is cooled, the fan 39 is turned off;
in the initial state, the cross beam 6 is positioned in the storage groove 4 at the water pipe 14, the push block 20 is positioned in the water pipe 15, the inverted trapezoid block 19 is separated from the positive trapezoid block 17, and the cleaning cotton sliver 7 is in contact with the nozzle at the bottom of the water pipe 14; the cleaning liquid in the water tank is conveyed to the inside of the water through pipe 14 under the conveying of the water pump, meanwhile, the spring 13 jacks up the supporting plate 12, the cleaning cotton sliver 7 is reset, the cleaning cotton sliver 7 is in contact with the nozzle at the bottom of the water through pipe 14, the cleaning liquid in the water through pipe 14 is sprayed into the cleaning cotton sliver 7 through the nozzle, meanwhile, dust on the cleaning cotton sliver 7 is washed, the cleaning degree of the cleaning cotton sliver 7 is improved, and then the cleaning liquid is absorbed by the cleaning cotton sliver 7;
the motor 9 drives the movable screw rod 8 to rotate, and the movable screw rod 8 is matched with the cross beam 6 through threads to drive the cross beam 6 to slide along the sliding chute 5, so that the cross beam 6 slides from the bottom of the lens of the CCD camera 2; at this time, the air pump delivers air to the air cavity 32 inside the silica gel scraper 31 through the spiral air pipe 34, so that the air cavity 32 expands and is blocked by the elastic grid plate 33, the middle part of the elastic grid plate 33 protrudes outwards, so that the top of the elastic grid plate 33 is tilted upwards, and the top of the silica gel scraper 31 is driven to tilt upwards; the cross beam 6 moves along the fixed screw 10, the cross beam 6 drives the synchronous wheel 21 to move through the threaded cooperation of the synchronous wheel 21 and the fixed screw 10, the synchronous wheel 21 rotates along the outer ring of the fixed screw 10, the synchronous belt 22 rotates in cooperation with the synchronous wheel 21 to drive the plurality of fluff brushes 23 to rotationally clean, the fluff brushes 23 rotationally contact lenses of the CCD camera 2, so that larger dust particles on the lenses of the CCD camera 2 are cleaned, when the fluff brushes 23 rotate to the bottom of the synchronous belt 22, the fluff brushes 23 horizontally pass through the collecting basket 25, the fluff brushes 23 are subjected to dispersed cleaning of the plurality of steel needle brushes 26, and dust impurities on the fluff brushes 23 fall on the bottom of the collecting basket 25; then, the cleaning cotton sliver 7 slides over the lens of the CCD camera 2 to clean dust attached to the lens of the CCD camera 2; then, the silica gel scraping plate 31 contacts with the lens of the CCD camera 2 to scrape off water stains remained on the lens of the CCD camera 2;
the cross beam 6 slides to the storage groove 4 at the other side after sliding across the bottom of the CCD camera 2; the collecting basket 25 is carried by the cross beam 6 and moves towards the recovery groove 27, the square buckle 29 at the bottom of the collecting basket 25 is clamped on the hook 30, so that the square buckle 29 rotates, the collecting basket 25 is pulled to rotate in the recovery groove 27, the collecting basket 25 is turned downwards, and dust and impurities at the bottom of the collecting basket 25 are poured into the dust collecting basket 28 in the recovery groove 27; meanwhile, a pushing block 20 in the storage groove 4 is inserted into the through groove 15, a pushing slide plate 18 slides to the other end of the through groove 15, an inverted trapezoid block 19 is driven to be attached to a positive trapezoid block 17 to slide, the inverted trapezoid block 19 slides to the top surface of the positive trapezoid block 17, the positive trapezoid block 17 is driven to slide downwards, a U-shaped plate 16 and a supporting plate 12 are driven to move downwards, a spring 13 is compressed, and the cleaning cotton sliver 7 is recovered to the inside of the groove 11; the air pump pumps out air in the air cavity 32 through the spiral air pipe 34, so that the silica gel scraper 31 is contracted, and the silica gel scraper 31 is prevented from being contacted with a lens of the CCD camera 2;
then, the driving unit drives the cross beam 6 to reset, the cross beam 6 drives the collecting basket 25 to move out of the recovery groove 27, and at the moment, the torsion springs on the collecting basket 25 reset to push the collecting basket 25 to reset; after the cross beam 6 moves into the storage groove 4 at the initial position, the push block 20 is inserted into the through groove 15, the push slide plate 18 is reset, the inverted trapezoid block 19 is separated from the positive trapezoid block 17, the spring 13 is reset, the supporting plate 12 is pushed to slide upwards, the cleaning cotton sliver 7 is pushed to slide out of the groove 11, and the cleaning cotton sliver 7 is contacted with the nozzle at the bottom of the water pipe 14; the cleaning work of the CCD camera 2 lens is completed; not only the difficulty of the cleaning of the CCD camera 2 by the staff is reduced, but also the influence of dust on the CCD camera 2 is reduced.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations and modifications of the present invention will be apparent to those of ordinary skill in the art in light of the foregoing description. It is not necessary here nor is it exhaustive of all embodiments. And obvious variations or modifications thereof are contemplated as falling within the scope of the present invention.
Claims (10)
1. A Czochralski silicon single crystal detection CCD camera is characterized in that: comprises a bracket (1) fixedly connected on a liquid port window of a single crystal furnace; the top of the bracket (1) is fixedly connected with a CCD camera (2); the top of the bracket (1) is fixedly connected with a cleaning structure; the cleaning structure is sleeved outside the lens of the CCD camera (2); the cleaning structure comprises a shell (3) fixedly connected to the top of the bracket (1); the shell (3) is sleeved outside the lens of the CCD camera (2); storage grooves (4) are formed in two sides of the interior of the shell (3); the other two sides of the interior of the shell (3) are provided with sliding grooves (5); a cross beam (6) is slidably arranged between the two sides of the sliding groove (5); the top of the cross beam (6) is provided with a cleaning cotton sliver (7); the top surface of the cleaning cotton sliver (7) is in sliding fit with a lens of the CCD camera (2); a driving unit is arranged in the sliding groove (5), and the driving unit drives the cross beam (6) to move.
2. The czochralski silicon single crystal inspection CCD camera of claim 1, wherein: the driving unit comprises a movable screw rod (8) rotatably arranged in the chute (5) at one side; the two ends of the movable screw rod (8) rotate to penetrate through the outer wall of the shell (3); a motor (9) is fixedly connected to the outer wall of one side of the shell (3); the rotating shaft of the motor (9) is fixedly connected with one end of the movable screw rod (8); the movable screw rod (8) penetrates through one end of the cross beam (6), and the movable screw rod (8) is in threaded fit with the cross beam (6); a fixed screw (10) is fixedly connected in the sliding groove (5) at the other side; the fixed screw rod (10) penetrates through the other end of the cross beam (6) in a sliding mode.
3. The czochralski silicon single crystal inspection CCD camera of claim 1, wherein: the top surface of the cross beam (6) is provided with a groove (11); a supporting plate (12) is fixedly connected in the groove (11); a plurality of springs (13) are uniformly fixedly connected between the bottom surface of the supporting plate (12) and the bottom surface of the groove (11); the cleaning cotton sliver (7) is fixedly connected to the top surface of the supporting plate (12); a water pipe (14) is fixedly connected to the inner top surface of the storage groove (4) at one side; one end of the water pipe (14) is communicated with the water tank through a pipeline, and cleaning liquid is filled in the water tank; a plurality of nozzles are uniformly arranged at the bottom of the water pipe (14).
4. A czochralski silicon single crystal inspection CCD camera according to claim 3, wherein: a through groove (15) is formed in the middle of the groove (11); the middle part of the bottom surface of the supporting plate (12) is fixedly connected with a U-shaped plate (16); a right trapezoid block (17) is fixedly connected to one side, close to the water pipe (14), of the bottom surface of the U-shaped plate (16), and an inclined surface of the right trapezoid block (17) is arranged on one side, close to the middle of the U-shaped plate (16); a sliding plate (18) is slidably arranged in the U-shaped plate (16); the bottom surface of the sliding plate (18) is fixedly connected with an inverted trapezoid block (19), and the inclined surface of the inverted trapezoid block (19) is arranged on one side close to the middle of the U-shaped plate (16); the positive trapezoid block (17) is in sliding fit with the inverted trapezoid block (19); the two end parts of the sliding plate (18) are in sliding fit with the interiors of the through grooves (15) on the two sides; the middle part of one side of the storage groove (4) at the two sides, which is far away from the cross beam (6), is fixedly connected with a push block (20); the pushing block (20) is in sliding fit with the inside of the through groove (15).
5. A czochralski silicon single crystal inspection CCD camera according to claim 3, wherein: the two ends of one side of the cross beam (6) far away from the water pipe (14) are rotatably provided with synchronous wheels (21); the two synchronizing wheels (21) are respectively sleeved on the outer sides of the movable screw (8) and the fixed screw (10); the movable screw rod (8) is in threaded fit with the outer synchronous wheel (21); a synchronous belt (22) is sleeved on the outer sides of the two synchronous wheels (21); a plurality of floss brushes (23) are uniformly fixedly connected to the outer ring of the synchronous belt (22); the fluff brush (23) is in sliding fit with the lens of the CCD camera (2).
6. The czochralski silicon single crystal inspection CCD camera of claim 5, wherein: the bottom surface of one side of the cross beam (6) close to the synchronous belt (22) is fixedly connected with a mounting beam (24); a collecting basket (25) is hinged to one side, close to the synchronous belt (22), of the mounting beam (24), and a torsion spring is arranged on a hinged rod of the collecting basket (25); a plurality of steel needle brushes (26) are uniformly fixedly connected to the inner bottom surface of the collecting basket (25); the steel needles of the steel needle brush (26) are in sliding fit with the fluff of the fluff brush (23).
7. The czochralski silicon single crystal inspection CCD camera of claim 6, wherein: the bottom surface of the inside of the containing groove (4) on the other side is provided with a recovery groove (27); a dust collecting basket (28) is arranged on the inner bottom surface of the recovery groove (27); a square buckle (29) is rotatably arranged in the middle of the bottom surface of one side of the collecting basket (25) close to the containing groove (4); a notch is formed in the middle of the top surface of one side, close to the cross beam (6), of the recovery groove (27); a hook (30) is fixedly connected at the notch of the recovery groove (27); the hook (30) is in sliding fit with the square buckle (29).
8. A czochralski silicon single crystal inspection CCD camera according to claim 3, wherein: a silica gel scraper (31) is fixedly connected to the top of one side of the cross beam (6) close to the water pipe (14); the top of the silica gel scraper (31) is in sliding fit with a lens of the CCD camera (2); an air cavity (32) is formed in the silica gel scraping plate (31); an arc-shaped elastic grid plate (33) is fixedly connected to the concave surface of the bottom of the silica gel scraper (31); a spiral air pipe (34) is fixedly connected to the bottom of the silica gel scraping plate (31); the spiral air pipe (34) is communicated with the air cavity (32); the other end of the spiral air pipe (34) penetrates through the outer wall of the shell (3); one end of the spiral air pipe (34) far away from the silica gel scraping plate (31) is communicated with an air pump.
9. The czochralski silicon single crystal inspection CCD camera of claim 1, wherein: guide rails (35) are fixedly connected to two sides of the bottom of the shell (3); a shielding basket (36) is arranged between the guide rails (35) at two sides in a sliding way; the two sides of the shell (3) are fixedly connected with hydraulic push rods (37); the end part of a piston rod of the hydraulic push rod (37) is fixedly connected with the top of the shielding basket (36).
10. The czochralski silicon single crystal inspection CCD camera of claim 9, wherein: a ventilation groove (38) is formed in one side of the shielding basket (36) away from the single crystal furnace; a filter screen is fixedly connected to one side of the ventilation groove (38) close to the middle of the shielding basket (36); a fan (39) is arranged in the ventilation groove (38); a cooling grid pipe (40) is arranged in the ventilation groove (38), and the cooling grid pipe (40) is positioned between the fan (39) and the filter screen; and the pipe orifices at the two ends of the cooling grid pipe (40) are communicated with the cooling water tank.
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Also Published As
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|---|---|
| CN116427015B (en) | 2023-08-25 |
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