CN114570129A - Automatic dust collector of vacuum tail gas of continuous charging czochralski crystal growing furnace - Google Patents
Automatic dust collector of vacuum tail gas of continuous charging czochralski crystal growing furnace Download PDFInfo
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- CN114570129A CN114570129A CN202210254428.3A CN202210254428A CN114570129A CN 114570129 A CN114570129 A CN 114570129A CN 202210254428 A CN202210254428 A CN 202210254428A CN 114570129 A CN114570129 A CN 114570129A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
- B01D46/12—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces in multiple arrangements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/24—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies
- B01D46/26—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies rotatable
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/42—Auxiliary equipment or operation thereof
- B01D46/48—Removing dust other than cleaning filters, e.g. by using collecting trays
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
- Y02A50/2351—Atmospheric particulate matter [PM], e.g. carbon smoke microparticles, smog, aerosol particles, dust
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to the field of continuous charging czochralski crystal growing furnaces, in particular to an automatic vacuum tail gas dust removal device of a continuous charging czochralski crystal growing furnace, which comprises a fine dust collection box, an annular support frame, a filter cartridge, a slotted connecting frame, a slotted filter box and the like; the top surface of the fine dust collecting box is fixedly provided with an annular supporting frame, the annular supporting frame is fixedly provided with a filter cartridge, the top of the filter cartridge is fixedly connected with a slotted connecting frame, and the top surface of the slotted connecting frame is fixedly provided with a slotted filter box. Through the filter screen frame that sets up, the tail gas that the continuous feeding czochralski crystal growing furnace produced can get into the fluting rose box in the back, and the filter screen frame can filter gas, and a large amount of dust and particulate matter are blockked by the filter screen frame in the gas and drop downwards for gas and dust and particulate matter separation.
Description
Technical Field
The invention relates to the field of continuous charging czochralski crystal growing furnaces, in particular to an automatic vacuum tail gas dust removal device for a continuous charging czochralski crystal growing furnace.
Background
Continuous feeding czochralski crystal growing furnace is a device for melting polycrystalline materials such as polycrystalline silicon and the like by a graphite heater in vacuum and inert gas environments, and growing dislocation-free single crystals by a czochralski method.
The existing dust removal mode is that gas passes through a dust removal device before being pumped into a vacuum pump, a filter element inside the dust removal device filters a large amount of dust, and due to the fact that the number of particles in the dust and carbon monoxide is large, the filter element is easily blocked by the particles in the dust and the carbon monoxide under the long-time working condition, airflow blockage is caused, and the pressure in a single crystal furnace is rapidly increased, so that the dust removal device needs to be cleaned, but the filter element needs to be taken out to clean attached dust after a growth furnace stops working, the cleaning process is relatively troublesome, the consumed time is long, and certain influence is caused on crystal pulling efficiency.
Therefore, it is necessary to design a continuous charging czochralski crystal growing furnace vacuum tail gas automatic dust removal device which can fully separate gas from dust and particulate matters, can clean dust attached to a filter element and can clean the dust in the working state of a growing furnace, aiming at the defects of the prior art.
Disclosure of Invention
The invention aims to provide a vacuum tail gas automatic dust removal device of a continuous feeding czochralski crystal growing furnace, which comprises a fine dust collection box, an annular support frame, a filter cylinder, a slotted connecting frame and a slotted filter box, wherein the annular support frame is fixedly arranged on the top surface of the fine dust collection box, the filter cylinder is fixedly arranged on the annular support frame, the top of the filter cylinder is fixedly connected with the slotted connecting frame, the slotted filter box is fixedly arranged on the top surface of the slotted connecting frame, and the vacuum tail gas automatic dust removal device also comprises: the coarse dust filtering assembly is connected to the slotted filter box in a bolt connection mode and is used for removing dust in tail gas of the continuous feeding Czochralski crystal growing furnace and particles in carbon monoxide; the dust scraping assembly is positioned in the slotted filter box and used for scraping dust on the coarse dust filter assembly, the dust scraping assembly comprises electric magnetic stripes, reciprocating scrapers, brushes and a first electromagnetic block, the two sides in the slotted filter box are fixedly connected with the two electric magnetic stripes, the reciprocating scrapers are connected in the slotted filter box in a sliding mode in an evenly-arranged mode, the brushes are evenly distributed on the two sides of the reciprocating scrapers and are in contact with adjacent filter screen frames, the first electromagnetic blocks are symmetrically and fixedly connected to the reciprocating scrapers, and the first electromagnetic blocks are in contact with the electromagnetic strips positioned on the same side below; the non-stop powder cleaning component is arranged on the slotting connecting frame and used for cleaning dust in the working state of the growth furnace.
As an improvement of the scheme, the coarse dust filtering component comprises an air inlet frame, an air exhaust frame and a filter screen frame, the front side of the slotted filter box is connected with the air inlet frame in a bolt connection mode, the air exhaust frame is connected with the rear side of the slotted filter box in a bolt connection mode, and the filter screen frame is fixedly connected in the slotted filter box in an evenly-arranged mode.
As an improvement of the proposal, the non-stop powder cleaning component comprises a conveying strip, a trapezoidal material leaking frame, a perforated ball valve, a three-way block, an adjusting gear, a rectangular slotted frame, a sliding rack frame, an electromagnetic block II, a reset spring, a coarse powder dust collecting box and a connecting plate, wherein the conveying strip is connected with the bottom in the slotted frame in a uniformly arranged mode, the trapezoidal material leaking frame is connected with the top in the slotted frame in a uniformly arranged mode, the trapezoidal material leaking frame is communicated with the slotted filter box, the bottom of the trapezoidal material leaking frame is rotatably connected with the perforated ball valve, the perforated ball valve is rotatably connected with the adjacent conveying strip, the perforated ball valve is rotatably connected with the three-way block, the three-way block is positioned in the conveying strip, the perforated ball valve is fixedly connected with the adjusting gear, the rectangular slotted frame is symmetrically and fixedly connected in the slotted frame, the sliding rack frame is connected on the two rectangular slotted frames in a common sliding mode, and the sliding rack frame is meshed with the adjusting gear, be provided with two electromagnetism pieces two on the slip rack, the same rigid coupling has electromagnetism piece two on the rectangle fluting frame, two adjacent electromagnetism piece two contact each other, a pair of reset spring of fixedly connected with on the slip rack, reset spring one end and homonymy rectangle fluting frame rigid coupling, be connected with three pairs of connecting plates through bolted connection's mode on the fluting link, the fluting rose box rear side is connected with a pair of connecting plate through bolted connection's mode equally, be connected with two coarse powder dirt collecting boxes through bolted connection's mode jointly on four pairs of connecting plates, the coarse powder dirt collecting box communicates with each other with the conveyer strip.
As the improvement of above-mentioned scheme, it has three powder outlet to open on the trompil ball valve, and the trompil ball valve is arranged in carrying the direction to the particulate matter among dust and the carbon monoxide spacing, guarantees can not carry the particulate matter among dust and the carbon monoxide to the conveyer strip opposite side when the trompil ball valve rotates certain direction.
As the improvement of the proposal, the dust collection device also comprises a lens plate, and one side of the coarse dust collection box is provided with three lens plates.
As an improvement of the scheme, the filter box further comprises a conductive frame, the top of the slotted filter box is connected with the conductive frame in an evenly-arranged mode, and the conductive frame is connected with the filter screen frame through a circuit.
As the improvement of above-mentioned scheme, still including fine dust filtering component, be provided with fine dust filtering component on the cartridge filter, fine dust filtering component is including connecting conduit and filtration pole head, and the intercommunication has connecting conduit on the frame of airing exhaust, and connecting conduit and cartridge filter intercommunication filter pole head rotary type and connect in the cartridge filter bottom, filter pole head below and be connected with fine dust collecting box rotary type.
As the improvement of above-mentioned scheme, still including rotating assembly, the bottom surface is provided with rotating assembly in the cartridge filter, and rotating assembly is including driving motor, rotatory pinion and rotatory gear wheel, and bottom surface fixed mounting has driving motor in the cartridge filter, and the rigid coupling has rotatory pinion on the driving motor output shaft, filters the rigid coupling of round bar head below and has rotatory gear wheel, rotatory pinion and rotatory gear wheel meshing.
As the improvement of above-mentioned scheme, still including scraping the powder subassembly, cartridge filter internal top fixed mounting scrapes the powder subassembly, scrapes the powder subassembly and connects frame and fixed brush board including fixed three, and cartridge filter internal top fixed mounting has fixed three to connect the frame, and fixed three connects to put up fixedly connected with three fixed brush board, three fixed brush board all with filter the round bar head contact.
Compared with the prior art, the invention has the following advantages:
1. through the filter screen frame that sets up, the tail gas that the continuous feeding czochralski crystal growing furnace produced can get into back in the fluting rose box, and the filter screen frame can filter gas, and the particulate matter in a large amount of dust and the carbon monoxide in the gas is blockked by the filter screen frame and is dropped downwards for particulate matter separation in gas and dust and the carbon monoxide.
2. Through two pairs of electromagnetic strips intermittent type nature circular telegrams, reciprocating scraper blade and brush can last up-and-down reciprocating motion, and brush up-and-down reciprocating motion can brush the dust on the filter screen frame, avoids the dust too much to block up filter screen frame mesh to avoid the sharp rising of pressure in the single crystal growing furnace.
3. Through the circular telegram of control electromagnetism piece two, the trompil ball valve rotates the direction of delivery who changes the particulate matter in dust and the carbon monoxide, can make in gaseous particulate matter with in dust and the carbon monoxide blows the coarse powder dirt collecting box of one side wherein, and the staff of being convenient for clears up the dust in the coarse powder dirt collecting box of opposite side under the state of growth stove work.
4. Through the filtration pole head that sets up, filter the pole head and further filter gas for tiny dust can remain to filtering the pole overhead in the gas, realizes the purpose with gas and dust intensive segregation.
Drawings
Fig. 1 is a schematic perspective view of a first embodiment of the present invention.
Fig. 2 is a schematic perspective view of a second embodiment of the present invention.
Fig. 3 is a partial perspective view of the present invention.
Fig. 4 is a schematic cross-sectional perspective view of a coarse dust filter assembly of the present invention.
Fig. 5 is a schematic perspective view, partially in section, of a dust scraper assembly of the present invention.
Fig. 6 is a schematic perspective view of a portion of a dust scraping assembly of the present invention.
Fig. 7 is a schematic view of a partially cut-away perspective structure of the powder cleaning assembly without stopping the machine.
Fig. 8 is a schematic view of a first partially disassembled solid structure of the non-stop dusting assembly of the present invention.
Fig. 9 is a schematic view of a second partially disassembled solid structure of the non-stop dusting assembly of the present invention.
Fig. 10 is a partial perspective view of the powder cleaning assembly without stopping the machine.
Fig. 11 is a schematic sectional perspective view of the rotary assembly and the powder scraping assembly of the present invention.
Number designation in the figures: 1. fine dust collection box, 21, annular support frame, 22, filter cartridge, 23, slotted link frame, 24, slotted filter box, 3, coarse dust filter component, 31, air inlet frame, 32, exhaust frame, 33, filter screen frame, 4, dust scraping component, 41, electromagnetic bar, 42, reciprocating scraper, 43, brush, 44, electromagnetic block I, 5, non-stop dust cleaning component, 51, conveying bar, 52, trapezoidal material leaking frame, 53, perforated ball valve, 54, three-way block, 55, adjusting gear, 56, rectangular slotted frame, 57, sliding rack frame, 58, electromagnetic block II, 59, reset spring, 510, coarse dust collection box, 511, connecting plate, 6, lens plate, 7, conductive frame, 8, fine dust filter component, 81, connecting conduit, 82, filter round rod head, 9, rotating component, 91, driving motor, 92, rotating pinion, 93, rotating bull gear, 10. powder scraping component 101, fixed three-connection frame 102 and fixed brush plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
Referring to fig. 1 to 10, the automatic dust removing device for vacuum tail gas of a continuous charging czochralski crystal growing furnace comprises a fine dust collecting box 1, an annular supporting frame 21, a filter cartridge 22 and a slotted connecting frame 23, the top surface of the fine dust collecting box 1 is fixedly provided with an annular supporting frame 21, the annular supporting frame 21 is fixedly provided with a filter cartridge 22, the top of the filter cartridge 22 is fixedly connected with a slotted connecting frame 23, the top surface of the slotted connecting frame 23 is fixedly provided with a slotted filter box 24, the slotted filter box 24 is connected with the coarse dust filtering component 3 for filtering and removing dust from tail gas generated by the continuous feeding direct-pulling single crystal furnace in a bolt connection mode, the dust scraping component 4 is positioned in the slotted filter box 24, the slotted connecting frame 23 is provided with the non-stop dust cleaning component 5, and the non-stop dust cleaning component 5 is used for cleaning dust in a state that the growth furnace does not stop working.
The coarse dust filtering component 3 comprises an air inlet frame 31, an air outlet frame 32 and a filtering screen frame 33, the front side of the slotted filtering box 24 is connected with the air inlet frame 31 in a bolt connection mode, the air inlet frame 31 is used for conveying tail gas generated by the continuous charging czochralski crystal growing furnace, the air outlet frame 32 is connected to the rear side of the slotted filtering box 24 in a bolt connection mode, the air outlet frame 32 is used for discharging filtered gas, the filtering screen frame 33 is fixedly connected in the slotted filtering box 24 in an evenly-arranged mode, and the filtering screen frame 33 is used for filtering the gas.
The dust scraping component 4 comprises an electric magnetic strip 41, a reciprocating scraper 42, a brush 43 and an electromagnetic block 44, two electric magnetic strips 41 are fixedly connected to two sides in the slotted filter box 24, the reciprocating scraper 42 is connected in the slotted filter box 24 in an evenly-arranged mode in a sliding mode, the brush 43 is evenly distributed on two sides of the reciprocating scraper 42, the brush 43 is used for brushing dust on the filter screen frame 33, the brush 43 is in contact with the adjacent filter screen frame 33, the electromagnetic block 44 is symmetrically and fixedly connected to the reciprocating scraper 42, and the electromagnetic block 44 is in contact with the electromagnetic strip 41 on the same side of the lower portion.
The non-stop powder cleaning component 5 comprises a conveying strip 51, a trapezoidal leakage frame 52, a perforated ball valve 53, a three-way block 54, an adjusting gear 55, a rectangular slotted frame 56, a sliding rack frame 57, a second electromagnetic block 58, a reset spring 59, a coarse powder dust collecting box 510 and a connecting plate 511, wherein the conveying strip 51 for conveying particles in dust and carbon monoxide is connected to the bottom of the slotted connecting frame 23 in a uniformly arranged mode, the trapezoidal leakage frame 52 is connected to the top of the slotted connecting frame 23 in a uniformly arranged mode, the trapezoidal leakage frame 52 is used for guiding the particles in the dust and the carbon monoxide, the trapezoidal leakage frame 52 is communicated with the slotted filter box 24, the perforated ball valve 53 is rotatably connected to the bottom of the trapezoidal leakage frame 52, the perforated ball valve 53 is rotatably connected with the adjacent conveying strip 51, the perforated ball valve 53 is rotatably connected with the three-way block 54, the three-way block 54 is positioned in the conveying strip 51, an adjusting gear 55 is fixedly connected on the perforated ball valve 53, rectangular slotted brackets 56 are symmetrically and fixedly connected in the slotted connecting bracket 23, sliding rack brackets 57 are jointly and slidably connected on the two rectangular slotted brackets 56, the sliding rack brackets 57 are meshed with the adjusting gear 55, two electromagnetic blocks 58 are fixedly connected on the sliding rack brackets 57, the two electromagnetic blocks 58 are also fixedly connected on the rectangular slotted brackets 56, the two adjacent electromagnetic blocks 58 are mutually contacted, a pair of return springs 59 are fixedly connected on the sliding rack brackets 57, one ends of the return springs 59 are fixedly connected with the rectangular slotted brackets 56 on the same side, three pairs of connecting plates 511 are connected on the slotted connecting bracket 23 in a bolt connection mode, a pair of connecting plates 511 are also connected on the rear side of the slotted filter box 24 in a bolt connection mode, two coarse powder dust collecting boxes 510 are jointly connected on the four pairs of connecting plates 511 in a bolt connection mode, and the dust collecting boxes 510 are used for collecting particles in dust and carbon monoxide, the coarse dust collection box 510 communicates with the conveyor strip 51.
The air inlet frame 31 is connected with a tail gas port of the continuous charging straight-pull single crystal furnace, the exhaust frame 32 is connected with a vacuum pump, the continuous charging straight-pull single crystal furnace is in a crystal growing process, a continuous straight-pull single crystal technology is applied, the special straight-pull single crystal furnace is adopted, single crystal pulling is carried out while feeding and melting are carried out, dust and particles in carbon monoxide can be generated in the furnace, the vacuum pump operates to pump out air in the continuous charging straight-pull single crystal furnace through the slotted filter box 24, tail gas generated by the continuous charging straight-pull single crystal furnace can enter the slotted filter box 24, the gas is filtered by the filter screen frame 33, the gas is separated from the dust and the particles, a large amount of particles in the dust and the carbon monoxide are blocked by the filter screen frame 33 and fall downwards, and the gas pumped by the vacuum pump basically does not contain the dust and the particles.
The staff controls electric magnetic stripe 41 intermittent type nature circular telegram, two electric magnetic stripes 41 circular telegrams of below make produce magnetism and an electromagnetism piece 44 mutual repulsion, two electric magnetic stripes 41 circular telegrams of top make produce magnetism and adsorb an electromagnetism piece 44, make an electromagnetism piece 44 and reciprocal scraper blade 42 upwards move, when electric magnetic stripe 41 outage, reciprocal scraper blade 42 and last device can the downstream, it produces magnetism to pass through electric magnetic stripe 41 intermittent type nature circular telegram, make reciprocal scraper blade 42 and last device last up-and-down reciprocating motion, brush 43 up-and-down reciprocating motion brushes the dust on to filtering screen frame 33, avoid the dust too much to block up the mesh of filtering screen frame 33.
The dust and the particulate matters in the carbon monoxide at the bottom of the slotted filter box 24 can slide into the conveying strip 51 through the trapezoid leakage frame 52 and the perforated ball valve 53, and part of the gas in the slotted filter box 24 can also enter the conveying strip 51 through the trapezoid leakage frame 52 and the perforated ball valve 53, so that the gas blows the particulate matters in the dust and the carbon monoxide into the coarse dust collection box 510 on one side of the slotted filter box. When this coarse dust collecting box 510 fills up the back, the two 58 circular telegrams of steerable four electromagnetic blocks of staff, two 58 mutual repulsion of electromagnetic block of homonymy, make two 58 drive the motion of slip rack 57 towards being close to the frame 31 direction of admitting air, make slip rack 57 drive adjusting gear 55 and trompil ball valve 53 rotate, make dust in the trompil ball valve 53 and the particulate matter in the carbon monoxide can get into in the coarse dust collecting box 510 of opposite side, staff's accessible dismantles the coarse dust collecting box 510 that will fill up the dust this moment, the staff clears up the dust in the coarse dust collecting box 510, then install the coarse dust collecting box 510 that finishes clearing up again. After the coarse dust collecting box 510 of opposite side was filled with, the staff controlled two electromagnetic block two 58 outage, the reset spring 59 that compressed resets and drives the slip rack 57 towards keeping away from the motion of air inlet frame 31 direction, slip rack 57 can drive adjusting gear 55 and trompil ball valve 53 antiport and reset, make trompil ball valve 53 rotate the direction of delivery that changes the particulate matter in dust and the carbon monoxide, the staff of being convenient for clears up the dust under the state that the growth furnace does not stop work, and because the continuous straight single crystal growing furnace that draws can continuously carry out single crystal drawing and reinforced melting, guarantee that equipment is in continuous running state always.
Example 2
On the basis of embodiment 1, please refer to fig. 1 to 2, further comprising a lens plate 6, wherein three lens plates 6 are disposed on one side of the coarse dust collecting box 510, and the lens plates 6 can facilitate the staff to observe the dust collecting condition inside the coarse dust collecting box 510.
The worker can observe the dust collection inside the coarse dust collecting box 510 through the lens plate 6.
Example 3
On the basis of embodiment 1, please refer to fig. 2 and 4, further comprising a conductive frame 7, the top of the slotted filter box 24 is connected with the conductive frame 7 for conducting electricity in a uniform arrangement manner, and the conductive frame 7 is connected with the filter screen frame 33 through a circuit.
Electrically conductive frame 7 and outside connection of electric lines, outside electric lines supply power for electrically conductive frame 7, electrically conductive frame 7 with the leading-in filter screen frame 33 of electric current on for filter screen frame 33 can adsorb the dust, makes gas and dust and particulate matter fully separated, brush 43 up-and-down reciprocating motion clears up the dust of adsorbing on to filter screen frame 33 afterwards.
Example 4
On the basis of embodiment 1, please refer to fig. 10 to 11, further including a fine dust filtering component 8, the fine dust filtering component 8 is disposed on the filter cartridge 22, the fine dust filtering component 8 is used for filtering smaller dust, the fine dust filtering component 8 includes a connecting conduit 81 and a filtering circular rod head 82, the exhaust frame 32 is communicated with the connecting conduit 81, the connecting conduit 81 is communicated with the filter cartridge 22, the filtering circular rod head 82 is rotatably connected to the bottom inside the filter cartridge 22, the filtering circular rod head 82 is used for further filtering the gas, and the lower part of the filtering circular rod head 82 is rotatably connected to the fine dust collecting box 1.
The lower part of the filter cartridge 22 can be connected with a vacuum pump, the vacuum pump can pump the gas in the slotted filter box 24 into the connecting conduit 81, the connecting conduit 81 then conveys the gas into the filter rod head 82, and the filter rod head 82 further filters the gas, so that the smaller dust in the gas can be remained on the filter rod head 82.
Example 5
On the basis of embodiment 1, please refer to fig. 11, further comprising a rotating component 9, wherein the rotating component 9 is disposed on the inner bottom surface of the filter cartridge 22, the rotating component 9 is used for rotating the filter rod head 82, the rotating component 9 comprises a driving motor 91, a rotating pinion 92 and a rotating gearwheel 93, the driving motor 91 is fixedly mounted on the inner bottom surface of the filter cartridge 22 for driving, the rotating pinion 92 is fixedly connected to an output shaft of the driving motor 91, the rotating gearwheel 93 is fixedly connected to the lower portion of the filter rod head 82, and the rotating pinion 92 is engaged with the rotating gearwheel 93.
The manual driving motor 91 that starts of staff, driving motor 91 output shaft drive rotatory pinion 92 and rotate, and rotatory pinion 92 drives rotatory gear wheel 93 and filters the round bar head 82 and rotates for in filtering round bar head 82 goes up by filterable dust can the landing to thin dust collecting box 1, the back that finishes, and the staff is manual to be closed driving motor 91, makes equipment stop function.
Example 6
On the basis of embodiment 1, please refer to fig. 11, further including a powder scraping component 10, the powder scraping component 10 is fixedly installed at the top inside the filter cartridge 22, the powder scraping component 10 is used for scraping off dust on the inner surface of the filter rod head 82, the powder scraping component 10 includes a fixed three-connection frame 101 and a fixed brush plate 102, the fixed three-connection frame 101 is fixedly installed at the top inside the filter cartridge 22, the fixed three-connection frame 101 is fixedly connected with three fixed brush plates 102, the three fixed brush plates 102 are all in contact with the filter rod head 82, and the fixed brush plate 102 is used for brushing off dust remaining on the inner surface of the filter rod head 82.
When the filtering round rod head 82 rotates, the fixed brush plate 102 can brush the residual dust on the inner surface of the filtering round rod head 82, so that the dust on the filtering round rod head 82 fully slides into the fine dust collecting box 1, the filtering holes are prevented from being blocked by the residual dust on the inner surface of the filtering round rod head 82, and then the filtered gas is discharged through the vacuum pump.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (9)
1. Continuous reinforced czochralski crystal growing furnace vacuum tail gas automatic dust collector, including fine dust collecting box (1), ring support frame (21), cartridge filter (22), fluting link (23) and fluting rose box (24), fine dust collecting box (1) top surface fixed mounting has ring support frame (21), fixed mounting has cartridge filter (22) on ring support frame (21), cartridge filter (22) top rigid coupling has fluting link (23), fluting link (23) top surface fixed mounting has fluting rose box (24), a serial communication port, still including:
the coarse dust filtering component (3) is connected to the slotted filtering box (24) in a bolt connection mode, and the coarse dust filtering component (3) is used for removing dust in tail gas of the continuous feeding Czochralski crystal growing furnace and particles in carbon monoxide;
the dust scraping component (4) is positioned in the slotted filter box (24), the dust scraping component (4) is used for scraping dust on the coarse dust filter component (3), the dust scraping component (4) comprises electric magnetic stripes (41), reciprocating scrapers (42), brushes (43) and electromagnetic blocks (44), two electric magnetic stripes (41) are fixedly connected to two sides in the slotted filter box (24), the reciprocating scrapers (42) are connected in the slotted filter box (24) in a sliding mode in an evenly-arranged mode, the brushes (43) are uniformly distributed on two sides of the reciprocating scrapers (42), the brushes (43) are in contact with adjacent filter screen frames (33), the electromagnetic blocks (44) are symmetrically and fixedly connected to the reciprocating scrapers (42), and the electromagnetic blocks (44) are in contact with the electric magnetic stripes (41) on the same side of the lower portion;
the non-stop powder cleaning component (5) is arranged on the slotting connecting frame (23), and the non-stop powder cleaning component (5) is used for cleaning dust in the working state of the growth furnace.
2. The automatic dust removal device for vacuum tail gas of the continuous charging czochralski crystal growing furnace according to claim 1, wherein the coarse dust filtering component (3) comprises an air inlet frame (31), an air outlet frame (32) and a filter screen frame (33), the air inlet frame (31) is connected to the front side of the slotted filter box (24) in a bolt connection mode, the air outlet frame (32) is connected to the rear side of the slotted filter box (24) in a bolt connection mode, and the filter screen frame (33) is fixedly connected to the slotted filter box (24) in a uniform arrangement mode.
3. The automatic dust removal device for the vacuum tail gas of the continuous charging czochralski crystal growing furnace according to claim 1, characterized in that the non-stop dust removal assembly (5) comprises a conveying strip (51), a trapezoidal material leaking frame (52), a perforated ball valve (53), a three-way block (54), an adjusting gear (55), a rectangular slotted frame (56), a sliding rack frame (57), a second electromagnetic block (58), a reset spring (59), a coarse powder dust collecting box (510) and a connecting plate (511), the conveying strip (51) is connected to the bottom of the slotted connecting frame (23) in a uniformly arranged manner, the trapezoidal material leaking frame (52) is connected to the top of the slotted connecting frame (23) in a uniformly arranged manner, the trapezoidal material leaking frame (52) is communicated with the slotted filter box (24), the perforated ball valve (53) is rotatably connected to the bottom of the trapezoidal material leaking frame (52), and the perforated ball valve (53) is rotatably connected to the adjacent conveying strip (51), the hole-opening ball valve (53) is rotatably connected with a three-way block (54), the three-way block (54) is positioned in the conveying strip (51), the hole-opening ball valve (53) is fixedly connected with an adjusting gear (55), rectangular slotted frames (56) are symmetrically and fixedly connected in the slotted connecting frame (23), the two rectangular slotted frames (56) are jointly and slidably connected with a sliding rack frame (57), the sliding rack frame (57) is meshed with the adjusting gear (55), two electromagnetic blocks II (58) are arranged on the sliding rack frame (57), the rectangular slotted frames (56) are also fixedly connected with electromagnetic blocks II (58), two adjacent electromagnetic blocks II (58) are mutually contacted, a pair of reset springs (59) are fixedly connected on the sliding rack frame (57), one end of each reset spring (59) is fixedly connected with the same-side rectangular slotted frame (56), and the slotted connecting frame (23) is connected with three pairs of connecting plates (511) in a bolt connection mode, the rear side of the slotted filter box (24) is also connected with a pair of connecting plates (511) in a bolt connection mode, the four pairs of connecting plates (511) are jointly connected with two coarse dust collecting boxes (510) in a bolt connection mode, and the coarse dust collecting boxes (510) are communicated with the conveying strips (51).
4. The automatic dust removal device for vacuum tail gas of the continuous charging czochralski crystal growing furnace according to claim 3, wherein three powder outlet holes are formed in the perforated ball valve (53), and the perforated ball valve (53) is used for limiting the conveying direction of the particles in the dust and the carbon monoxide, so that the particles in the dust and the carbon monoxide cannot be conveyed to the other side of the conveying strip (51) when the perforated ball valve (53) rotates in a certain direction.
5. The automatic dust removing device for vacuum tail gas of the continuous charging czochralski crystal growing furnace according to claim 3, further comprising three lens plates (6) arranged on one side of the coarse dust collecting box (510).
6. The automatic dust removal device for vacuum tail gas of the continuous charging czochralski crystal growing furnace according to claim 1, further comprising a conductive frame (7), wherein the conductive frames (7) are connected to the top of the slotted filter box (24) in a uniform arrangement manner, and the conductive frame (7) is connected with the filter screen frame (33) through a circuit.
7. The automatic dust removal device for the vacuum tail gas of the continuous charging czochralski crystal growing furnace according to claim 1, further comprising a fine dust filtering component (8), wherein the fine dust filtering component (8) is arranged on the filter cylinder (22), the fine dust filtering component (8) comprises a connecting conduit (81) and a filtering circular rod head (82), the exhaust frame (32) is communicated with the connecting conduit (81), the connecting conduit (81) is communicated with the filter cylinder (22), the filtering circular rod head (82) is rotatably connected to the inner bottom of the filter cylinder (22), and the lower part of the filtering circular rod head (82) is rotatably connected with the fine dust collecting box (1).
8. The automatic dust removal device for vacuum tail gas of the continuous charging czochralski crystal growing furnace according to claim 1, which is characterized by further comprising a rotating assembly (9), wherein the rotating assembly (9) is arranged on the inner bottom surface of the filter cylinder (22), the rotating assembly (9) comprises a driving motor (91), a rotating pinion (92) and a rotating gearwheel (93), the driving motor (91) is fixedly arranged on the inner bottom surface of the filter cylinder (22), the rotating pinion (92) is fixedly connected to an output shaft of the driving motor (91), the rotating gearwheel (93) is fixedly connected to the lower part of the filter lever head (82), and the rotating pinion (92) is meshed with the rotating gearwheel (93).
9. The automatic dust removal device for vacuum tail gas of the continuous charging czochralski crystal growing furnace according to claim 1, further comprising a powder scraping component (10), wherein the powder scraping component (10) is fixedly installed at the inner top of the filter cartridge (22), the powder scraping component (10) comprises a fixed three-joint frame (101) and fixed brush plates (102), the fixed three-joint frame (101) is fixedly installed at the inner top of the filter cartridge (22), the fixed three-joint frame (101) is fixedly connected with three fixed brush plates (102), and the three fixed brush plates (102) are all in contact with the filtering circular rod head (82).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210254428.3A CN114570129A (en) | 2022-03-16 | 2022-03-16 | Automatic dust collector of vacuum tail gas of continuous charging czochralski crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210254428.3A CN114570129A (en) | 2022-03-16 | 2022-03-16 | Automatic dust collector of vacuum tail gas of continuous charging czochralski crystal growing furnace |
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| Publication Number | Publication Date |
|---|---|
| CN114570129A true CN114570129A (en) | 2022-06-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210254428.3A Withdrawn CN114570129A (en) | 2022-03-16 | 2022-03-16 | Automatic dust collector of vacuum tail gas of continuous charging czochralski crystal growing furnace |
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| Country | Link |
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| CN (1) | CN114570129A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116427015A (en) * | 2023-06-13 | 2023-07-14 | 苏州晨晖智能设备有限公司 | Czochralski silicon single crystal detection CCD camera |
-
2022
- 2022-03-16 CN CN202210254428.3A patent/CN114570129A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116427015A (en) * | 2023-06-13 | 2023-07-14 | 苏州晨晖智能设备有限公司 | Czochralski silicon single crystal detection CCD camera |
| CN116427015B (en) * | 2023-06-13 | 2023-08-25 | 苏州晨晖智能设备有限公司 | Czochralski silicon single crystal detection CCD camera |
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