CN115993055A - Single crystal silicon growth furnace vacuum tail gas automatic dust removal device - Google Patents

Abstract

The invention discloses a vacuum tail gas automatic dedusting device for a single crystal silicon growth furnace, which relates to the technical field of a single crystal silicon growth furnace; An annular support frame is fixedly installed on the top surface of the fine dust collection box, a filter cartridge is fixedly installed on the annular support frame, a slotted connection frame is fixedly connected to the top of the filter cartridge, and a slotted filter box is fixedly installed on the top surface of the slotted connection frame; Through the set filter screen frame, the exhaust gas generated by the monocrystalline silicon growth furnace will enter the slotted filter box, and the filter screen frame can filter the gas. A large amount of dust and carbon monoxide particles in the gas are blocked by the filter screen frame and fall downward. , allowing gas to be separated from dust and carbon monoxide particles.

Description

Single crystal silicon growth furnace vacuum tail gas automatic dust removal device

technical field

The invention belongs to the technical field of single crystal silicon growth furnaces, and in particular relates to an automatic dust removal device for vacuum tail gas of single crystal silicon growth furnaces.

Background technique

Monocrystalline silicon growth furnace is a kind of equipment that melts polycrystalline silicon and other polycrystalline materials with graphite heater in vacuum and inert gas environment, and grows dislocation-free single crystal by Czochralski method. , in order to ensure the vacuum in the single crystal growth furnace, it is usually necessary to connect a vacuum pump. During the vacuuming process of the vacuum pump, dust and carbon monoxide particles generated in the furnace will be directly sucked into the vacuum pump, causing the dust to mix with the lubricating oil in the vacuum pump. Lubrication failure, failure to replace the lubricating oil in time will cause damage to the vacuum pump.

The existing dust removal method is to pass through a dust removal device before the gas is pumped into the vacuum pump, and filter a large amount of dust through the filter element inside the dust removal device. Due to the large amount of dust and carbon monoxide particles, the filter element is easily blocked by dust and carbon monoxide particles under long-term working conditions. As a result, the air flow is blocked and the pressure in the single crystal furnace rises sharply. Therefore, the dust removal device must be cleaned. However, after the growth furnace stops working, the filter element needs to be taken out to clean the attached dust. The cleaning process is cumbersome and time-consuming. It has a certain influence on the crystal pulling efficiency.

Therefore, it is necessary to address the shortcomings of the prior art to design a monocrystalline silicon that can fully separate the gas from the dust and carbon monoxide particles, can clean the dust attached to the filter element, and can clean the dust while the growth furnace is working. Growth furnace vacuum tail gas automatic dust removal device.

Contents of the invention

In order to solve the defects and deficiencies of the prior art, the purpose of the present invention is to provide a single crystal silicon growth furnace vacuum tail gas automatic dedusting device with simple structure, reasonable design and convenient use.

In order to achieve the above object, the technical solution adopted by the present invention is: it includes a fine dust collection box, an annular support frame, a filter cartridge, a slotted connecting frame and a slotted filter box, and the top surface of the fine dust collection box is fixedly equipped with an annular support frame , the filter cartridge is fixedly installed on the ring support frame, the top of the filter cartridge is fixedly connected with a slotted connection frame, and the slotted filter box is fixedly installed on the top surface of the slotted connection frame, and also includes: coarse dust filter assembly, on the slotted filter box The coarse dust filter assembly is connected by bolt connection, and the coarse dust filter assembly is used to remove the dust and carbon monoxide particles in the tail gas of the monocrystalline silicon growth furnace; the dust scraper assembly, the dust scraper assembly is positioned in the slotted filter box, The dust scraping assembly is used to scrape off the dust on the coarse dust filter assembly. The dust scraping assembly includes an electromagnetic strip, a reciprocating scraper, a brush and an electromagnetic block. Two electromagnetic strips are fixedly connected to both sides of the slotted filter box. The reciprocating scraper is slidably connected in the slotted filter box in a uniform arrangement, brushes are evenly distributed on both sides of the reciprocating scraper, and the brush is in contact with the adjacent filter frame, and the reciprocating scraper is symmetrically fixed with electromagnetic Block 1, electromagnetic block 1 is in contact with the electromagnetic strip located on the same side below; the non-stop powder cleaning component is installed on the slotted connecting frame, and the non-stop powder cleaning component is used when the growth furnace is working Clean up the dust.

As preferably, the coarse dust filter assembly includes an air intake frame, an exhaust frame and a filter screen frame, the front side of the slotted filter box is connected to the air intake frame by bolt connection, and the exhaust frame is connected to the slot by bolt connection. On the rear side of the filter box, the slotted filter box is fixedly connected with filter screen frames in a uniform arrangement.

As a preference, the non-stop powder cleaning assembly includes a conveying bar, a trapezoidal leakage frame, an open-hole ball valve, a tee block, an adjustment gear, a rectangular slotted frame, a sliding rack frame, an electromagnetic block two, a return spring, and a coarse dust collection box. And the connecting plate, the bottom of the slotted connecting frame is connected with the conveying strip in a uniform arrangement, and the top of the slotted connecting frame is connected with a trapezoidal leaking frame in a uniform arrangement. The trapezoidal leaking frame communicates with the slotted filter box, and the trapezoidal The bottom of the leakage frame is rotatably connected with a perforated ball valve, and the perforated ball valve is rotatably connected with the adjacent conveying bar. Adjusting the gear, a rectangular slotted frame is symmetrically fixed in the slotted connecting frame, a sliding rack frame is slidably connected to the two rectangular slotted frames, the sliding rack frame meshes with the adjusting gear, and the sliding rack frame is provided with Two electromagnetic blocks 2, the electromagnetic block 2 is also fixedly connected to the rectangular slotted frame. The frame is fixed, and the slotted connecting frame is connected with three pairs of connecting plates by means of bolt connection, and the rear side of the slotted filter box is also connected with a pair of connecting plates by means of bolt connection, and the four pairs of connecting plates are jointly connected by means of bolt connection There are two coarse dust collection boxes, and the coarse dust collection boxes communicate with the conveying bar.

As a preference, there are three powder outlet holes on the perforated ball valve, and the perforated ball valve is used to limit the conveying direction of dust and carbon monoxide particles, so as to ensure that the perforated ball valve will not be transported to the conveying bar when the perforated ball valve rotates in a certain direction. The other side.

Preferably, a lens plate is also included, and three lens plates are arranged on one side of the coarse dust collection box.

Preferably, a conductive frame is also included, and the top of the slotted filter box is connected to the conductive frame in a uniform arrangement, and the conductive frame is connected to the filter screen frame through a circuit.

Preferably, it also includes a fine dust filter assembly, the filter cartridge is provided with a fine dust filter assembly, the fine dust filter assembly includes a connecting conduit and a filter rod head, the exhaust frame is communicated with a connecting conduit, and the connecting conduit communicates with the filter cartridge , the filter rod head is rotatably connected to the inner bottom of the filter cartridge, and the bottom of the filter rod head is rotatably connected to the fine dust collection box.

Preferably, it also includes a rotating assembly, the inner bottom surface of the filter cartridge is provided with a rotating assembly, the rotating assembly includes a driving motor, a rotating pinion gear and a rotating large gear, the inner bottom surface of the filter cartridge is fixedly installed with a driving motor, and the output shaft of the driving motor is fixedly connected to There is a small rotating gear, and a large rotating gear is fixedly connected to the bottom of the filter rod head, and the small rotating gear meshes with the large rotating gear.

Preferably, it also includes a powder scraping assembly, the top of the filter cartridge is fixedly installed with a powder scraping assembly, the powder scraping assembly includes a fixed tripod and a fixed brush plate, the top of the filter cartridge is fixedly installed with a fixed tripod, and the fixed tripod The frame is fixedly connected with three fixed brush plates, and the three fixed brush plates are all in contact with the filter round rod head.

Compared with prior art, the beneficial effect of the present invention is:

1. Through the set filter screen frame, the exhaust gas generated by the monocrystalline silicon growth furnace will enter the slotted filter box, and the filter screen frame can filter the gas. A large amount of dust and carbon monoxide particles in the gas are blocked by the filter screen frame downwards fall, allowing gas to separate from dust and carbon monoxide particles.

2. Through the intermittent energization of two pairs of electromagnetic strips, the reciprocating scraper and the brush will continue to reciprocate up and down, and the reciprocating movement of the brush will wipe the dust on the filter frame to avoid excessive dust from clogging the mesh of the filter frame , so as to avoid a sharp increase in the pressure in the single crystal furnace.

3. By controlling the second energization of the electromagnetic block, the opening ball valve rotates to change the conveying direction of dust and carbon monoxide particles, so that the gas can blow the dust and carbon monoxide particles into the coarse dust collection box on one side, which is convenient for the staff to work in the growth furnace. Clean up the dust in the coarse dust collection box on the other side under the state.

4. Through the set filter rod head, the filter rod head further filters the gas, so that the finer dust in the gas will remain on the filter rod head, so as to fully separate the gas from the dust.

Description of drawings

For ease of illustration, the present invention is described in detail by the following specific implementations and accompanying drawings.

Fig. 1 is a schematic diagram of the first three-dimensional structure of the present invention.

Fig. 2 is a schematic diagram of the second three-dimensional structure of the present invention.

Fig. 3 is a schematic diagram of a partial three-dimensional structure of the present invention.

Fig. 4 is a schematic diagram of a cross-sectional three-dimensional structure of the coarse dust filter assembly of the present invention.

Fig. 5 is a schematic diagram of a partially cutaway three-dimensional structure of the dust scraping assembly of the present invention.

Fig. 6 is a schematic diagram of a partial three-dimensional structure of the dust scraping assembly of the present invention.

Fig. 7 is a schematic diagram of a partially cutaway three-dimensional structure of the non-stop powder cleaning assembly of the present invention.

Fig. 8 is a schematic diagram of the first partially disassembled three-dimensional structure of the non-stop powder cleaning assembly of the present invention.

Fig. 9 is a schematic diagram of the second partially disassembled three-dimensional structure of the non-stop powder cleaning assembly of the present invention.

Fig. 10 is a schematic diagram of a partial three-dimensional structure of the non-stop powder cleaning assembly of the present invention.

Fig. 11 is a schematic cross-sectional three-dimensional structure diagram of the rotating assembly and the powder scraping assembly of the present invention.

Label names in the figure: 1. Fine dust collection box, 21. Ring support frame, 22. Filter cartridge, 23. Slotted connection frame, 24. Slotted filter box, 3. Coarse dust filter assembly, 31. Air intake frame, 32. Exhaust frame, 33. Filter screen frame, 4. Dust scraping assembly, 41. Electromagnetic strip, 42. Reciprocating scraper, 43. Brush, 44. Electromagnetic block one, 5. Non-stop powder cleaning assembly, 51 , conveying bar, 52, trapezoidal material leakage frame, 53, perforated ball valve, 54, tee block, 55, adjusting gear, 56, rectangular slotted frame, 57, sliding rack frame, 58, electromagnetic block two, 59, Return spring, 510, coarse dust collection box, 511, connection plate, 6, lens plate, 7, conductive frame, 8, fine dust filter assembly, 81, connecting conduit, 82, filter round rod head, 9, rotating assembly, 91 , drive motor, 92, rotating pinion, 93, rotating gear, 10, powder scraping assembly, 101, fixing tripod, 102, fixing brush plate.

Detailed ways

In order to make the object, technical solution and advantages of the present invention clearer, the present invention is described below through specific embodiments shown in the accompanying drawings. It should be understood, however, that these descriptions are exemplary only and are not intended to limit the scope of the present invention. Also, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily obscuring the concept of the present invention.

Here, it should also be noted that, in order to avoid obscuring the present invention due to unnecessary details, only the structures and/or processing steps closely related to the solution according to the present invention are shown in the drawings, and the related Other details are not relevant to the invention.

Example 1

Please refer to Figure 1 to Figure 10 for the vacuum tail gas automatic dust removal device of monocrystalline silicon growth furnace, including fine dust collection box 1, ring support frame 21, filter cartridge 22, slotted connecting frame 23, slotted filter box 24, coarse dust Filter assembly 3, dust scraping assembly 4 and non-stop powder cleaning assembly 5, the top surface of the fine dust collection box 1 is fixedly installed with an annular support frame 21, and a filter cartridge 22 is fixedly installed on the annular support frame 21, and the top of the filter cartridge 22 is fixed There is a slotted connecting frame 23, and a slotted filter box 24 is fixedly installed on the top surface of the slotted connecting frame 23, and the slotted filter box 24 is connected with a coarse filter for filtering and dusting the tail gas produced by the monocrystalline silicon growth furnace through bolt connection. The dust filter assembly 3 and the dust scraper assembly 4 are positioned in the slotted filter box 24, and the slotted connecting frame 23 is provided with a non-stop powder cleaning assembly 5, which is used in the state where the growth furnace does not stop working Clean up the dust.

The coarse dust filter assembly 3 includes an air intake frame 31, an exhaust frame 32, and a filter screen frame 33. The front side of the slotted filter box 24 is connected with an air intake frame 31 by means of bolt connection, and the air intake frame 31 is used to transport single crystal For the exhaust gas produced by the silicon growth furnace, the exhaust frame 32 is connected to the rear side of the slotted filter box 24 through bolt connection. The exhaust frame 32 is used to discharge the filtered gas, and the slotted filter box 24 is fixed in a uniform arrangement. A filter screen frame 33 is connected, and the filter screen frame 33 is used for filtering the gas.

The dust scraping assembly 4 includes an electromagnetic strip 41, a reciprocating scraper 42, a hair brush 43 and an electromagnetic block 44. Two electromagnetic strips 41 are fixedly connected to both sides of the slotted filter box 24, and the reciprocating scraper 42 is evenly arranged. It is slidingly connected in the slotted filter box 24, and there are brushes 43 evenly distributed on both sides of the reciprocating scraper 42. The brushes 43 are used to wipe the dust on the filter screen frame 33. The brushes 43 and the adjacent filter screens The frame 33 is in contact, and the reciprocating scraper 42 is symmetrically fixed with an electromagnetic block one 44, and the electromagnetic block one 44 is in contact with the electromagnetic strip 41 on the same side below.

The non-stop powder cleaning assembly 5 includes a conveying bar 51, a trapezoidal material leakage frame 52, a perforated ball valve 53, a three-way block 54, an adjustment gear 55, a rectangular slotted frame 56, a sliding rack frame 57, an electromagnetic block 2 58, a reset The spring 59, the coarse dust collection box 510 and the connection plate 511, the bottom of the slotted connection frame 23 are evenly arranged and connected with the conveying strip 51 for conveying dust and carbon monoxide particles, and the top of the slotted connection frame 23 is uniformly arranged Connected with a trapezoidal leakage frame 52, which is used to guide dust and carbon monoxide particles, the trapezoidal leakage frame 52 communicates with the slotted filter box 24, and the bottom of the trapezoidal leakage frame 52 is rotatably connected with an open-hole ball valve 53 , the perforated ball valve 53 is rotationally connected with the adjacent conveying bar 51, the perforated ball valve 53 is rotatably connected with a tee block 54, the tee block 54 is located in the conveying bar 51, and the perforated ball valve 53 is fixedly connected with an adjusting gear 55, A rectangular slotted frame 56 is fixed symmetrically in the slotted connecting frame 23, and a sliding rack frame 57 is jointly slidably connected on the two rectangular slotted frames 56, and the sliding rack frame 57 meshes with the adjusting gear 55, and the sliding rack frame Two electromagnetic blocks 2 58 are affixed on the 57, and the electromagnetic block 2 58 is also affixed on the rectangular slotted frame 56, and two adjacent electromagnetic blocks 2 58 are in contact with each other, and a pair of back-moving springs are fixedly connected on the sliding rack frame 57 59. One end of the return spring 59 is affixed to the rectangular slotted frame 56 on the same side. The slotted connecting frame 23 is connected with three pairs of connecting plates 511 by means of bolt connection, and the rear side of the slotted filter box 24 is also connected with a For the connecting plate 511, four pairs of connecting plates 511 are connected with two coarse dust collection boxes 510 by means of bolt connection. The coarse dust collection box 510 is used to collect dust and carbon monoxide particles, and the coarse dust collection box 510 communicates with the conveyor bar 51 .

The intake frame 31 is connected to the exhaust port of the monocrystalline silicon growth furnace, and the exhaust frame 32 is connected to the vacuum pump. During the crystal growth process of the monocrystalline silicon growth furnace, dust and carbon monoxide particles will be generated in the furnace, and the vacuum pump operates through the slotted filter box 24 The air inside the monocrystalline silicon growth furnace is extracted, and the tail gas produced by the monocrystalline silicon growth furnace will enter the slotted filter box 24, and the filter screen frame 33 will filter the gas, so that the gas is separated from dust and carbon monoxide particles, and a large amount of dust and The carbon monoxide particles are blocked by the filter screen frame 33 from falling downwards, so that the gas extracted by the vacuum pump is substantially free of dust and carbon monoxide particles.

The working principle of this embodiment is:

The staff controls the electromagnetic strips 41 to be energized intermittently. The two electromagnetic strips 41 below are energized to generate magnetism and the electromagnetic block one 44 to repel each other. One 44 and the reciprocating scraper 42 move upward. When the electromagnetic strip 41 is powered off, the reciprocating scraper 42 and its upper device will move downward, and the electromagnetic strip 41 is intermittently energized to generate magnetism, so that the reciprocating scraper 42 and its upper device Continue to reciprocate up and down, and the brush 43 reciprocates up and down to brush the dust on the filter screen frame 33, so as to prevent the dust from clogging up the filter screen frame 33 meshes.

The dust and carbon monoxide particles at the bottom of the slotted filter box 24 will slide down into the conveying bar 51 through the trapezoidal leaking frame 52 and the perforated ball valve 53, and part of the gas in the slotted filter box 24 will also pass through the trapezoidal leaking frame 52 and the opening. The ball valve 53 enters the conveyor bar 51 so that the gas blows the dust and carbon monoxide particles into the coarse dust collection box 510 on one side thereof. When the coarse dust collection box 510 here is full, the staff can control four electromagnetic blocks 2 58 to be energized, and the two electromagnetic blocks 58 on the same side repel each other, so that the electromagnetic block 2 58 drives the sliding rack 57 toward the intake air The frame 31 moves in the direction so that the sliding rack 57 drives the adjustment gear 55 and the perforated ball valve 53 to rotate, so that the dust and carbon monoxide particles in the perforated ball valve 53 will enter the coarse dust collection box 510 on the other side. The coarse dust collection box 510 full of dust can be disassembled by dismounting the bolts, and the staff cleans the dust in the coarse dust collection box 510, and then installs the cleaned coarse dust collection box 510. When the coarse dust collection box 510 on the other side was full, the staff controlled the two electromagnetic blocks 258 to cut off the power, and the compressed return spring 59 resets to drive the sliding rack frame 57 to move away from the air intake frame 31, and the sliding tooth The bar frame 57 will drive the adjustment gear 55 and the perforated ball valve 53 to reversely rotate and reset, so that the perforated ball valve 53 rotates to change the conveying direction of the dust and carbon monoxide particles, which is convenient for the staff to clean the dust when the growth furnace does not stop working.

Example 2

On the basis of embodiment 1, please refer to Fig. 1 to Fig. 2, also comprise lens plate 6, three lens plates 6 are arranged on one side of coarse dust collection box 510, lens plate 6 can be convenient for the staff to observe coarse dust collection box 510 Internal dust collection conditions.

The staff can observe the dust collection situation inside the coarse dust collection box 510 through the lens plate 6 .

Example 3

On the basis of embodiment 1, please refer to Fig. 2 and Fig. 4, also comprise conductive frame 7, the mode that slotted filter box 24 tops is evenly arranged is connected with conductive frame 7 for conducting, conductive frame 7 and filter screen Box 33 is connected by a circuit.

Conductive frame 7 is connected with external electric wire, and external electric wire provides power supply for conductive frame 7, and conductive frame 7 leads electric current on filter screen frame 33, makes filter screen frame 33 can absorb dust, makes gas and dust and carbon monoxide particle fully separate, then The brush 43 reciprocates up and down to clean up the dust adsorbed on the filter screen frame 33 .

Example 4

On the basis of Embodiment 1, please refer to Fig. 10 to Fig. 11, it also includes a fine dust filter assembly 8, the filter cartridge 22 is provided with a fine dust filter assembly 8, and the fine dust filter assembly 8 is used to treat smaller dust For filtering, the fine dust filter assembly 8 includes a connecting conduit 81 and a filter rod head 82. The exhaust frame 32 is communicated with a connecting conduit 81. The connecting conduit 81 communicates with the filter cartridge 22, and the filter rod head 82 is rotatably connected to the filter. At the inner bottom of the cylinder 22, the filter round rod head 82 is used to further filter the gas, and the bottom of the filter round rod head 82 is connected to the fine dust collection box 1 in a rotatable manner.

The bottom of the filter cartridge 22 can be connected with a vacuum pump, and the vacuum pump will extract the gas in the slotted filter box 24 into the connecting conduit 81, and the connecting conduit 81 will transport the gas to the filter rod head 82, and the filter rod head 82 will filter the gas. Further filtering, so that the smaller dust in the gas will remain on the filter round rod head 82 .

Example 5

On the basis of Embodiment 1, please refer to FIG. 11 , it also includes a rotating assembly 9, the inner bottom surface of the filter cartridge 22 is provided with a rotating assembly 9, and the rotating assembly 9 is used to rotate the filter round rod head 82, and the rotating assembly 9 includes Drive motor 91, rotating pinion 92 and rotating large gear 93, the drive motor 91 that is used for driving is fixedly installed on filter cylinder 22 inner bottom surfaces, is fixedly connected with rotating pinion 92 on the output shaft of drive motor 91, and filter round bar head 82 below fixed Connected with the large rotating gear 93, the rotating pinion 92 meshes with the large rotating gear 93.

The staff manually starts the driving motor 91, the output shaft of the driving motor 91 drives the rotating pinion 92 to rotate, and the rotating pinion 92 drives the rotating large gear 93 and the filter round rod head 82 to rotate, so that the filtered dust on the filter round rod head 82 will slide down In the fine dust collection box 1, after the work is finished, the staff manually closes the driving motor 91 to stop the operation of the equipment.

Example 6

On the basis of Embodiment 1, please refer to FIG. 11 , it also includes a powder scraping assembly 10, the top of the filter cartridge 22 is fixedly installed with a powder scraping assembly 10, and the powder scraping assembly 10 is used to filter the inner surface of the round rod head 82 For dust scraping, the powder scraping assembly 10 includes a fixed tripod 101 and a fixed brush plate 102, the inner top of the filter cartridge 22 is fixedly installed with a fixed tripod 101, and the fixed tripod 101 is fixedly connected with three fixed brushes 102, The three fixed brush plates 102 are all in contact with the filter rod head 82 , and the fixed brush plates 102 are used to wipe off the dust remaining on the inner surface of the filter rod head 82 .

When the filter round rod head 82 rotates, the fixed brush plate 102 can brush the residual dust on the inner surface of the filter round rod head 82, so that the dust on the filter round rod head 82 can fully slide down into the fine dust collection box 1, avoiding the filter circle. The remaining dust on the inner surface of the rod head 82 blocks the filter hole, and the filtered gas is then discharged through the vacuum pump.

It will be apparent to those skilled in the art that the invention is not limited to the details of the above-described exemplary embodiments, but that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Accordingly, the embodiments should be regarded in all points of view as exemplary and not restrictive, the scope of the invention being defined by the appended claims rather than the foregoing description, and it is therefore intended that the scope of the invention be defined by the appended claims rather than by the foregoing description. All changes within the meaning and range of equivalents of the elements are embraced in the present invention.

In addition, it should be understood that although this specification is described according to implementation modes, not each implementation mode only contains an independent technical solution, and this description in the specification is only for clarity, and those skilled in the art should take the specification as a whole , the technical solutions in the various embodiments can also be properly combined to form other implementations that can be understood by those skilled in the art.

Claims (9)

1. Automatic dust collector of monocrystalline silicon growth stove vacuum tail gas, its characterized in that: the novel dust collector comprises a fine dust collecting box (1), an annular supporting frame (21), a filter cartridge (22), a slotted connecting frame (23) and a slotted filter box (24), wherein the annular supporting frame (21) is fixedly arranged on the top surface of the fine dust collecting box (1), the filter cartridge (22) is fixedly arranged on the annular supporting frame (21), the slotted connecting frame (23) is fixedly connected to the top of the filter cartridge (22), and the slotted filter box (24) is fixedly arranged on the top surface of the slotted connecting frame (23), and is characterized by further comprising: the coarse dust filtering component (3) is connected with the slotted filtering box (24) in a bolt connection mode, and the coarse dust filtering component (3) is used for removing dust and carbon monoxide particles in tail gas of the monocrystalline silicon growing furnace; the dust scraping assembly (4), dust scraping assembly (4) is positioned in slotting filter box (24), dust scraping assembly (4) is used for scraping the dust on coarse dust filter assembly (3), dust scraping assembly (4) is including electromagnetic stripe (41), reciprocal scraper blade (42), brush (43) and electromagnetic piece one (44), both sides fixedly connected with two electromagnetic strips (41) in slotting filter box (24), reciprocal scraper blade (42) are in the mode sliding connection of even range in slotting filter box (24), reciprocal scraper blade (42) both sides evenly distributed have brush (43), brush (43) contact with adjacent filter screen frame (33), symmetrical rigid coupling has electromagnetic piece one (44) on reciprocal scraper blade (42), electromagnetic piece one (44) and electromagnetic strip (41) that are located the downside homonymy are contacted each other; the non-stop powder cleaning assembly (5) is arranged on the slotting connecting frame (23), and the non-stop powder cleaning assembly (5) is used for cleaning dust in a working state of the growth furnace.

2. The automatic vacuum tail gas dust removing device for a monocrystalline silicon growth furnace according to claim 1, wherein: the coarse dust filtering component (3) comprises an air inlet frame (31), an air outlet frame (32) and a filter screen frame (33), wherein the air inlet frame (31) is connected to the front side of the slotted filter tank (24) in a bolt connection mode, the air outlet frame (32) is connected to the rear side of the slotted filter tank (24) in a bolt connection mode, and the filter screen frame (33) is fixedly connected in the slotted filter tank (24) in a uniform arrangement mode.

3. The automatic vacuum tail gas dust removing device for a monocrystalline silicon growth furnace according to claim 1, wherein: the non-stop powder cleaning component (5) comprises a conveying strip (51), a trapezoid material leakage frame (52), a perforated ball valve (53), a tee joint block (54), an adjusting gear (55), a rectangular slotted frame (56), a sliding slotted frame (57), an electromagnetic block II (58), a reset spring (59), a coarse dust collecting box (510) and a connecting plate (511), wherein the conveying strip (51) is connected to the inner bottom of the slotted connecting frame (23) in a uniformly arranged mode, the trapezoid material leakage frame (52) is connected to the inner top of the slotted connecting frame (23) in a uniformly arranged mode, the trapezoid material leakage frame (52) is communicated with a slotted filter box (24), the bottom of the trapezoid material leakage frame (52) is rotationally connected with the perforated ball valve (53), the perforated ball valve (53) is rotationally connected with the adjacent conveying strip (51), the tee joint block (54) is rotationally connected to the perforated ball valve (53), the tee joint block (54) is positioned in the conveying strip (51), the adjusting gear (55) is fixedly connected to the perforated ball valve (53), the rectangular slotted frame (56) is symmetrically fixedly connected to the inner of the slotted connecting frame (23), the two rectangular slotted frames (56) are jointly connected to the slotted ball valve (56), the two electromagnetic blocks (57) are jointly connected to the sliding slotted frame (57), electromagnetic blocks II (58) are fixedly connected to the rectangular slotting frame (56) as well, two adjacent electromagnetic blocks II (58) are in contact with each other, a pair of reset springs (59) are fixedly connected to the sliding rack frame (57), one ends of the reset springs (59) are fixedly connected to the rectangular slotting frame (56) on the same side, three pairs of connecting plates (511) are connected to the slotting connecting frame (23) in a bolt connection mode, a pair of connecting plates (511) are connected to the rear side of the slotting filter box (24) in a bolt connection mode as well, two coarse dust collecting boxes (510) are connected to the four pairs of connecting plates (511) in a bolt connection mode together, and the coarse dust collecting boxes (510) are communicated with the conveying strip (51).

4. The automatic dust removal device for vacuum tail gas of monocrystalline silicon growth furnace according to claim 3, wherein three powder outlet holes are formed in the perforated ball valve (53), the perforated ball valve (53) is used for limiting the conveying direction of dust and carbon monoxide particles, and the dust and carbon monoxide particles are not conveyed to the other side of the conveying strip (51) when the perforated ball valve (53) rotates in a certain direction.

5. The automatic vacuum tail gas dust removing device for a monocrystalline silicon growth furnace according to claim 3, further comprising a lens plate (6), wherein three lens plates (6) are arranged on one side of the coarse powder dust collecting box (510).

6. The automatic dust removal device for vacuum tail gas of a monocrystalline silicon growth furnace according to claim 1, further comprising a conductive frame (7), wherein the conductive frame (7) is connected to the top of the grooved filter box (24) in a uniformly arranged mode, and the conductive frame (7) is connected with the filter screen frame (33) through a circuit.

7. The automatic dust removal device for vacuum tail gas of monocrystalline silicon growing furnace according to claim 1, further comprising a fine dust filtering component (8), wherein the fine dust filtering component (8) is arranged on the filtering cylinder (22), the fine dust filtering component (8) comprises a connecting pipe (81) and a filtering round rod head (82), the connecting pipe (81) is communicated with the exhaust frame (32), the connecting pipe (81) is communicated with the filtering cylinder (22), the filtering round rod head (82) is rotatably connected to the inner bottom of the filtering cylinder (22), and the lower part of the filtering round rod head (82) is rotatably connected with the fine dust collecting box (1).

8. The automatic dust removal device for vacuum tail gas of monocrystalline silicon growth furnace according to claim 1, further comprising a rotating assembly (9), wherein the rotating assembly (9) is arranged on the inner bottom surface of the filter cartridge (22), the rotating assembly (9) comprises a driving motor (91), a rotating pinion (92) and a rotating large gear (93), the driving motor (91) is fixedly arranged on the inner bottom surface of the filter cartridge (22), the rotating pinion (92) is fixedly connected to an output shaft of the driving motor (91), the rotating large gear (93) is fixedly connected to the lower portion of the filter round head (82), and the rotating pinion (92) is meshed with the rotating large gear (93).

9. The automatic dust removal device for vacuum tail gas of monocrystalline silicon growing furnace according to claim 1, further comprising a powder scraping component (10), wherein the powder scraping component (10) is fixedly arranged at the inner top of the filter cartridge (22), the powder scraping component (10) comprises a fixed triple frame (101) and a fixed brush plate (102), the fixed triple frame (101) is fixedly arranged at the inner top of the filter cartridge (22), three fixed brush plates (102) are fixedly connected to the fixed triple frame (101), and the three fixed brush plates (102) are all in contact with the filter round head (82).

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