CN218642867U - Single crystal furnace and CCD camera assembly thereof - Google Patents
Single crystal furnace and CCD camera assembly thereof Download PDFInfo
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- CN218642867U CN218642867U CN202223273572.6U CN202223273572U CN218642867U CN 218642867 U CN218642867 U CN 218642867U CN 202223273572 U CN202223273572 U CN 202223273572U CN 218642867 U CN218642867 U CN 218642867U
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Abstract
The utility model discloses a single crystal growing furnace and CCD camera subassembly thereof, this CCD camera subassembly, include: the device comprises a base, a CCD camera and a protective cover, wherein an air inlet hole is formed in the part, between the CCD camera and the base, of the first side wall of the protective cover and is used for being connected with a compressed air pipeline; a second side wall of the protective cover opposite to the first side wall is provided with an air outlet hole which is distributed in contraposition with the air inlet hole; the single crystal furnace CCD camera component also comprises: and the cleaning mechanism is arranged on the base and used for cleaning the gold-plated glass. On one hand, the air inlet hole and the air outlet hole are formed in the corresponding positions of the protective cover, so that a compressed air pipeline is conveniently connected to purge and clean dust covered on the CCD camera and/or the gold-plated glass; on the other hand realizes cleaning the dust that covers on the gilded glass through clean mechanism and clean, and through the cooperation of these two kinds of modes, can realize cleaning earlier the clean effect that sweeps afterwards, promotes the clean effect that falls into the dust in the protection casing, can effectively avoid having the risk that the acquisition signal is beated.
Description
Technical Field
The utility model relates to a vertical pulling single crystal equipment technical field, in particular to single crystal growing furnace and CCD camera subassembly thereof.
Background
The CCD camera is installed on a furnace cover of the single crystal furnace through a support, the position of the camera can be adjusted by adjusting the support, the CCD camera is used for observing the diameter of a crystal bar, the distance of a liquid port, the brightness of the liquid level and the like in the furnace in real time, and a protective cover which is processed in a light-shielding manner is installed on the outer side of the CCD camera, so that the influence of other light sources is avoided in the operation process.
In the CCD camera assembly, a base is arranged on a furnace cover of a single crystal furnace, a support and a protective cover are fixed on the base, and when the outer protective cover is in a semi-closed state, dust easily enters the inside of the CZ furnace during the single crystal pulling process and covers gold-plated glass and a camera lens, so that the risk of jumping of an acquired signal exists; when the protective cover is a totally-enclosed protective cover, heat is not easy to dissipate, and camera parts are easy to damage.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a single crystal furnace CCD camera component, on one hand, through set up inlet port and venthole in the protection casing relevant position, in order to insert the compressed air pipeline, realize sweeping the dust that covers on CCD camera and/or gilded glass clean; on the other hand is through being equipped with the clean mechanism that is used for cleaning the gilded glass dust, realizes cleaning the dust that covers on the gilded glass, and through the cooperation of these two kinds of modes, still can realize cleaning earlier the clean effect that sweeps afterwards, and then help promoting the clean effect that falls into the inside dust of protection casing to can effectively avoid having the risk that the signal acquisition is beated.
In order to achieve the above object, the utility model provides a following technical scheme:
a single crystal furnace CCD camera assembly comprising: the device comprises a base, a CCD camera and a protective cover, wherein an air inlet hole is formed in the part, between the CCD camera and the base, of the first side wall of the protective cover and is used for being connected with a compressed air pipeline; a second side wall of the protective cover opposite to the first side wall is provided with air outlet holes which are distributed in an aligned mode with the air inlet holes;
the single crystal furnace CCD camera component also comprises:
and the cleaning mechanism is arranged on the base and used for cleaning the gold-plated glass of the furnace cover of the single crystal furnace.
Preferably, the cleaning mechanism comprises:
and the cleaning brush mechanism is arranged between the two opposite parts of the base and can slide along the length direction of the two parts.
Preferably, the first part of the base is opposite to the second part, the first part is provided with first sliding grooves which penetrate through the inner side wall and the outer side wall of the base and are distributed along the length direction of the first part, and the inner side wall of the second part is provided with second sliding grooves which are distributed along the length direction of the second part;
the cleaning brush mechanism includes: a cleaning strip, a brush and an operating head;
the first end of the cleaning strip is slidably arranged in the first sliding groove, the second end of the cleaning strip is slidably arranged in the second sliding groove, the middle part of the cleaning strip is arranged between the first part and the second part, and the bottom of the cleaning strip is provided with the brush used for being in contact fit with the gold-plated glass; the operating head is located on the outer side wall of the first portion and connected with the first end of the cleaning strip.
Preferably, a first guide groove is formed in a groove wall of the first sliding groove along the length direction of the first part; the outer wall of the first end of the cleaning strip is provided with a first guide boss matched with the first guide groove;
a second guide groove is formed in the groove wall of the second sliding groove along the length direction of the second part; the outer wall of the second end of the cleaning strip is provided with a second guide boss matched with the second guide groove.
Preferably, the method further comprises the following steps:
and the driving mechanism is used for being arranged on the furnace cover and driving the operating head to move back and forth along the length direction of the first part.
Preferably, the drive mechanism comprises: a lead screw assembly;
the screw rod assembly is arranged on the furnace cover along the length direction of the first portion, and the movable end of the screw rod assembly is connected with the operating head.
Preferably, the number of the air inlet holes is multiple, and the air inlet holes are distributed in parallel along the direction parallel to the base;
the air outlet is a strip-shaped air outlet and is parallel to the air inlets and distributed in an alignment mode.
Preferably, the number of the strip-shaped air outlet holes is multiple, and the strip-shaped air outlet holes are distributed in parallel along the direction perpendicular to the base.
Preferably, the method further comprises the following steps: a compressed air pipeline, an electromagnetic valve and a flow control valve;
the first end of the compressed air pipeline is connected with an air inlet of the protective cover, the second end of the compressed air pipeline is used for accessing compressed air, the middle part of the compressed air pipeline is respectively provided with the electromagnetic valve and the flow control valve, and the electromagnetic valve is positioned between the second end of the compressed air pipeline and the flow control valve; the electromagnetic valve and the flow control valve are both used for being in communication connection with a control system of the single crystal furnace.
A single crystal furnace comprises a CCD camera component, wherein the CCD camera component is the single crystal furnace CCD camera component.
According to the technical scheme, on one hand, the single crystal furnace CCD camera component is provided with the air inlet and the air outlet at the corresponding positions of the protective cover, so that a compressed air pipeline is conveniently connected, and the sweeping and cleaning of dust covered on the CCD camera and/or the gold-plated glass are realized; on the other hand is through being equipped with the clean mechanism that is used for cleaning the gilded glass dust, realizes cleaning the dust that covers on the gilded glass, and through the cooperation of these two kinds of modes, still can realize cleaning earlier the clean effect that sweeps afterwards, and then help promoting the clean effect that falls into the inside dust of protection casing to can effectively avoid having the risk that the signal acquisition is beated.
The utility model also provides a single crystal growing furnace, because this scheme has adopted foretell single crystal growing furnace CCD camera subassembly, consequently it also has corresponding beneficial effect, specifically can refer to preceding explanation, and no longer give unnecessary details here.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a single crystal furnace CCD camera assembly provided by an embodiment of the present invention;
FIG. 2 is a schematic view of a CCD camera assembly of a single crystal furnace according to another embodiment of the present invention;
fig. 3 is a bottom view of a CCD camera assembly of a single crystal furnace according to an embodiment of the present invention;
fig. 4 is an installation schematic view of a cleaning brush mechanism provided by an embodiment of the present invention on a base;
fig. 5 is a top view of the cleaning brush mechanism provided in the embodiment of the present invention mounted on the base;
FIG. 6 isbase:Sub>A cross-sectional view A-A of FIG. 5;
FIG. 7 is a control schematic diagram of a control system of a single crystal furnace according to an embodiment of the present invention.
Wherein, 10 is the base, 11 is the first part, 11.1 is the first spout, 12 is the second part, 12.1 is the second spout, 20 is the CCD camera, 30 is the protection casing, 31 is the bar venthole, 40 is the compressed air pipeline, 50 is the cleaning brush mechanism, 51 is the cleaning strip, 51.1 is the first direction boss, 51.2 is the second direction boss, 52 is the operating head, 60 is the solenoid valve, 70 is the flow control valve, 80 is the control system, 90 is the support, 100 is the compressed air, 110 is the actuating mechanism.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
The embodiment of the utility model provides a single crystal growing furnace CCD camera subassembly, as shown in fig. 1 to fig. 3, include: the CCD camera comprises a base 10, a CCD camera 20 and a protective cover 30, wherein an air inlet hole is formed in the part, between the CCD camera 20 and the base 10, of the first side wall of the protective cover 30 and is used for being connected with a compressed air pipeline 40; a second side wall of the protective cover 30 opposite to the first side wall is provided with an air outlet hole which is distributed in alignment with the air inlet hole;
the single crystal growing furnace CCD camera subassembly still includes:
and the cleaning mechanism is arranged on the base 10 and is used for cleaning the gold-plated glass on the furnace cover of the single crystal furnace.
It should be noted that, in the present embodiment, the base 10, the CCD camera 20 and the protective cover 30 adopt the existing installation relationship, and the base 10 is installed at the gold-plated glass of the furnace cover, which is not described herein again. In addition, the air inlet and the air outlet that the counterpoint distributes are seted up respectively to the relative both sides wall of protection casing 30, and the air inlet of protection casing 30 is used for external compressed air pipeline 40 to let in compressed air inside protection casing 30, so that blow off the dust that covers on CCD camera 20 and/or the gilded glass, the air outlet that can follow protection casing 30 from the dust blown off moreover blows off, and this kind sweeps the clean mode and also is convenient for the inside heat dissipation of protection casing 30. In addition, this scheme still is equipped with the clean mechanism that is used for cleaning gilded glass's dust, and then in order to reach the clean effect that sweeps after cleaning earlier, helps promoting the clean effect that falls into the inside dust of protection casing 30 to can effectively avoid having the risk that the signal of gathering beats.
According to the technical scheme, the single crystal furnace CCD camera component provided by the embodiment of the utility model has the advantages that on one hand, the air inlet and the air outlet are arranged at the corresponding positions of the protective cover, so that the compressed air pipeline is conveniently connected, and the sweeping and cleaning of dust covered on the CCD camera and/or the gold-plated glass are realized; on the other hand is through being equipped with the clean mechanism that is used for cleaning the gilded glass dust, realizes cleaning the dust that covers on the gilded glass, and through the cooperation of these two kinds of modes, still can realize cleaning earlier the clean effect that sweeps after, and then help promoting the clean effect that falls into the inside dust of protection casing to can effectively avoid having the risk that the acquisition signal beats.
In this aspect, as shown in fig. 3, the cleaning mechanism includes:
and a cleaning brush mechanism 50 which is provided between the two opposite portions of the base 10 and can slide along the length direction of the two portions. That is, the cleaning mechanism of the present embodiment is a cleaning brush mechanism 50 disposed in the cavity of the base 10 and capable of moving back and forth along the length direction of the cavity of the base 10 to clean the gold-plated glass; moreover, the design of the scheme is convenient for realizing the built-in design of the cleaning mechanism and is also beneficial to effectively cleaning the gold-plated glass. Of course, other cleaning mechanisms, such as a dust suction cleaning mechanism, can be selected for use in the scheme, and the details are not repeated here.
Specifically, as shown in fig. 4, a first portion 11 of the base 10 is opposite to a second portion 12, the first portion 11 is provided with a first sliding slot 11.1 penetrating through an inner side wall and an outer side wall thereof and distributed along a length direction thereof, that is, the first sliding slot 11.1 is a penetrating sliding slot, and the inner side wall of the second portion 12 is provided with a second sliding slot 12.1 distributed along the length direction thereof; as shown in fig. 5, the first portion 11 and the second portion 12 of the base 10 are two opposite long side portions of the base 10; of course, the cleaning brush mechanism 50 of the present embodiment may also be disposed between two opposite short edge portions of the base 10, which is not described herein again;
the cleaning brush mechanism 50 includes: a cleaning bar 51, a brush, and an operating head 52;
the first end of the cleaning strip 51 is slidably arranged in the first sliding chute 11.1, the second end is slidably arranged in the second sliding chute 12.1, the middle part is arranged between the first part 11 and the second part 12, and the bottom of the cleaning strip is provided with a brush used for being in contact fit with the gold-plated glass; the operating head 52 is located on the outer side wall of the first portion 11, and is connected to the first end of the cleaning strip 51, so that the cleaning strip 51 is driven by the operating head 52 (which can be manually operated) to slide back and forth along the long side portion of the base 10, thereby realizing the back and forth sweeping of the gold-plated glass. That is to say, the equal slidable embedded spout in base 10 in both ends of this scheme cleaning strip 51 helps making a round trip to clean more steadily, reliably of making a round trip to make the cleaning brush mechanism, and the cleaning brush mechanism 50 of this scheme designs like this moreover, still has simple structure, cleans characteristics such as convenient.
Furthermore, a first guide groove is formed in the groove wall of the first chute 11.1 along the length direction of the first part 11; as shown in fig. 6, the outer wall (lower wall) of the first end of the cleaning strip 51 is provided with a first guide projection 51.1 for cooperating with the first guide groove;
the groove wall of the second sliding groove 12.1 is provided with a second guide groove along the length direction of the second part 12; as shown in fig. 6, the outer wall (lower wall) of the second end of the cleaning strip 51 is provided with a second guide projection 51.2 for cooperating with the second guide groove. That is to say, this scheme cleaning strip 51 each end all with correspond to be equipped with the complex guide structure between the spout to in the direction slip of the long limit part of base 10 is followed to the both ends of realizing cleaning strip 51, this not only can make cleaning strip 51's slip more steady, but also can avoid cleaning strip 51 to take place to slide and drop. In addition, in order to facilitate the installation of the cleaning strip 51 on the base 10, the base 10 may adopt a top half and bottom half butt assembly structure (bolt connection), which will not be described herein.
Still further, the embodiment of the utility model provides a single crystal growing furnace CCD camera subassembly still includes:
and the driving mechanism is used for being arranged on the furnace cover and driving the operating head 52 to move back and forth along the length direction of the first part 11. That is, in this scheme, accessible actuating mechanism orders about the back and forth cleaning operation that drives cleaning brush mechanism 50 to be convenient for realize the effect of automatic cleaning gilded glass dust.
Specifically, the drive mechanism includes: a lead screw assembly;
the screw assembly is arranged on the furnace cover along the length direction of the first part 11, and the movable end of the screw assembly is connected with the operating head 52. That is to say, this scheme selects for use lead screw assembly to realize the straight line reciprocating motion of cleaning brush mechanism 50, and this kind of mode simple structure, motion are steady reliable.
In the scheme, the number of the air inlet holes is multiple, and the air inlet holes are distributed in parallel along the direction parallel to the base 10; as shown in fig. 1, the number of the air inlets of the protection cover 30 is three, and the three air inlets are correspondingly connected with three joints of the compressed air pipeline 40 one by one;
as shown in fig. 1, the air outlet is a strip-shaped air outlet 31, and is parallel to and aligned with the plurality of air inlets. This scheme design like this, not only be convenient for increase compressed air's the volume of letting in, but also be convenient for compressed air carries the dust and from the exit vent department discharge protection casing 30, and the inside heat of the protection casing 30 of also being convenient for simultaneously scatters from the exit vent department, prevents that inside high temperature from damaging the camera component.
Further, as shown in fig. 2, the plurality of strip-shaped air outlets 31 are distributed in parallel along a direction perpendicular to the base 10. Therefore, not only dust carried by compressed air can be better taken out of the protective cover 30 from the air outlet, but also heat in the protective cover 30 can be better dissipated from the air outlet.
Still further, the embodiment of the utility model provides a single crystal growing furnace CCD camera subassembly still includes: a compressed air pipe 40, a solenoid valve 60, and a flow control valve 70;
the first end of the compressed air pipeline 40 is connected with the air inlet of the protective cover 30, the second end is used for accessing compressed air 80, the middle part is respectively provided with an electromagnetic valve 60 and a flow control valve 70, namely the compressed air pipeline 40 is additionally provided with the electromagnetic valve 60 and the flow control valve 70, and the electromagnetic valve 60 is positioned between the second end of the compressed air pipeline 40 and the flow control valve 70; as shown in FIG. 7, the solenoid valve 60 and the flow control valve 70 are both adapted to be communicatively connected to a control system 80 of the single crystal furnace. The design like this of this scheme to when feeding operation at every turn, accessible control system 80 control solenoid valve 60 is opened automatically and is convenient for compressed air to sweep that the protection casing 30 is inside clean, and control flow control valve 70's aperture realizes compressed air's flow control, and control system 80 cooperative control that is accessible single crystal growing furnace realizes that the inside automation of protection casing 30 sweeps cleanly promptly, and this operation of not only being convenient for match the single crystal growing furnace, but also can reduce manual operation.
Specifically, the timing and duration of the opening of the solenoid valve 60, and the degree of opening of the flow control valve 70, may be controlled by the control system 80 at each charging operation, and these parameters may be set as part of the control system 80. In addition, as shown in fig. 7, the control system 80 can also be in communication connection with the above-mentioned driving mechanism (motor in the lead screw assembly) so as to realize automatic cleaning of the gold-plated glass, and also to realize cleaning effects of cleaning before purging.
The embodiment of the utility model provides a single crystal growing furnace is still provided, including CCD camera subassembly, CCD camera subassembly is as above single crystal growing furnace CCD camera subassembly. Because the scheme adopts the CCD camera component of the single crystal furnace, the CCD camera component has corresponding beneficial effects, and specific reference can be made to the previous description, so that the detailed description is omitted.
In the present specification, the embodiments are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. A single crystal furnace CCD camera assembly comprising: the CCD camera comprises a base (10), a CCD camera (20) and a protective cover (30), and is characterized in that an air inlet hole is formed in the portion, between the CCD camera (20) and the base (10), of the first side wall of the protective cover (30) and used for being connected with a compressed air pipeline (40); a second side wall of the protective cover (30) opposite to the first side wall is provided with air outlet holes which are distributed in an alignment way with the air inlet holes;
the single crystal furnace CCD camera component also comprises:
and the cleaning mechanism is arranged on the base (10) and is used for cleaning the gold-plated glass on the furnace cover of the single crystal furnace.
2. The single crystal furnace CCD camera assembly of claim 1, wherein the cleaning mechanism comprises:
and a cleaning brush mechanism (50) which is arranged between two opposite parts of the base (10) and can slide along the length direction of the two parts.
3. The single crystal furnace CCD camera component of claim 2, wherein the first part (11) of the base (10) is opposite to the second part (12), the first part (11) is provided with a first sliding groove (11.1) which penetrates through the inner side wall and the outer side wall of the first part and is distributed along the length direction of the first part, and the inner side wall of the second part (12) is provided with a second sliding groove (12.1) which is distributed along the length direction of the second part;
the cleaning brush mechanism (50) includes: a cleaning strip (51), a brush and an operating head (52);
the first end of the cleaning strip (51) is slidably arranged in the first sliding chute (11.1), the second end of the cleaning strip is slidably arranged in the second sliding chute (12.1), the middle part of the cleaning strip is arranged between the first part (11) and the second part (12), and the bottom of the cleaning strip is provided with the brush used for being in contact fit with the gold-plated glass; the operating head (52) is located on the outer side wall of the first part (11) and is connected with the first end of the cleaning strip (51).
4. The single crystal furnace CCD camera component according to claim 3, characterized in that the groove wall of the first chute (11.1) is provided with a first guiding groove along the length direction of the first part (11); the outer wall of the first end of the cleaning strip (51) is provided with a first guide boss (51.1) matched with the first guide groove;
the groove wall of the second sliding groove (12.1) is provided with a second guide groove along the length direction of the second part (12); and a second guide boss (51.2) matched with the second guide groove is arranged on the outer wall of the second end of the cleaning strip (51).
5. The single crystal furnace CCD camera assembly of claim 3, further comprising:
and the driving mechanism is arranged on the furnace cover and used for driving the operating head (52) to move back and forth along the length direction of the first part (11).
6. The single crystal furnace CCD camera assembly of claim 5, wherein the driving mechanism comprises: a lead screw assembly;
the screw rod assembly is arranged on the furnace cover along the length direction of the first part (11), and the movable end of the screw rod assembly is connected with the operating head (52).
7. The single crystal furnace CCD camera component according to claim 1, characterized in that the number of the air inlet holes is a plurality and the air inlet holes are distributed in parallel along the direction parallel to the base (10);
the air outlet holes are strip-shaped air outlet holes (31) and are parallel to the air inlet holes and distributed in an alignment mode.
8. The single crystal furnace CCD camera component according to claim 7, characterized in that the number of the strip-shaped air outlets (31) is multiple and the air outlets are distributed in parallel along the direction perpendicular to the base (10).
9. The single crystal furnace CCD camera assembly of claim 1, further comprising: a compressed air pipe (40), a solenoid valve (60) and a flow control valve (70);
the first end of the compressed air pipeline (40) is connected with an air inlet hole of the protective cover (30), the second end of the compressed air pipeline is used for accessing compressed air, the middle part of the compressed air pipeline is respectively provided with the electromagnetic valve (60) and the flow control valve (70), and the electromagnetic valve (60) is positioned between the second end of the compressed air pipeline (40) and the flow control valve (70); the electromagnetic valve (60) and the flow control valve (70) are used for being in communication connection with a control system (80) of the single crystal furnace.
10. A single crystal furnace comprising a CCD camera component, wherein the CCD camera component is the single crystal furnace CCD camera component as claimed in any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202223273572.6U CN218642867U (en) | 2022-12-07 | 2022-12-07 | Single crystal furnace and CCD camera assembly thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202223273572.6U CN218642867U (en) | 2022-12-07 | 2022-12-07 | Single crystal furnace and CCD camera assembly thereof |
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| CN218642867U true CN218642867U (en) | 2023-03-17 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116427015A (en) * | 2023-06-13 | 2023-07-14 | 苏州晨晖智能设备有限公司 | Czochralski silicon single crystal detection CCD camera |
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2022
- 2022-12-07 CN CN202223273572.6U patent/CN218642867U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116427015A (en) * | 2023-06-13 | 2023-07-14 | 苏州晨晖智能设备有限公司 | Czochralski silicon single crystal detection CCD camera |
| CN116427015B (en) * | 2023-06-13 | 2023-08-25 | 苏州晨晖智能设备有限公司 | Czochralski silicon single crystal detection CCD camera |
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