CN116424677A - Conveying device and conveying method, sheet attaching device and sheet attaching method - Google Patents

Conveying device and conveying method, sheet attaching device and sheet attaching method Download PDF

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Publication number
CN116424677A
CN116424677A CN202211555514.4A CN202211555514A CN116424677A CN 116424677 A CN116424677 A CN 116424677A CN 202211555514 A CN202211555514 A CN 202211555514A CN 116424677 A CN116424677 A CN 116424677A
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CN
China
Prior art keywords
holding
unit
moving
detection
cutting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202211555514.4A
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Chinese (zh)
Inventor
高野健
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lintec Corp
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Lintec Corp
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Filing date
Publication date
Application filed by Lintec Corp filed Critical Lintec Corp
Publication of CN116424677A publication Critical patent/CN116424677A/en
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1694—Programme controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65C—LABELLING OR TAGGING MACHINES, APPARATUS, OR PROCESSES
    • B65C9/00—Details of labelling machines or apparatus
    • B65C9/02—Devices for moving articles, e.g. containers, past labelling station
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65C—LABELLING OR TAGGING MACHINES, APPARATUS, OR PROCESSES
    • B65C9/00—Details of labelling machines or apparatus
    • B65C9/08—Label feeding
    • B65C9/18—Label feeding from strips, e.g. from rolls
    • B65C9/1803—Label feeding from strips, e.g. from rolls the labels being cut from a strip
    • B65C9/1807—Label feeding from strips, e.g. from rolls the labels being cut from a strip and transferred directly from the cutting means to an article
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65C—LABELLING OR TAGGING MACHINES, APPARATUS, OR PROCESSES
    • B65C9/00—Details of labelling machines or apparatus
    • B65C9/26—Devices for applying labels
    • B65C9/30—Rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65C—LABELLING OR TAGGING MACHINES, APPARATUS, OR PROCESSES
    • B65C9/00—Details of labelling machines or apparatus
    • B65C9/26—Devices for applying labels
    • B65C9/36—Wipers; Pressers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65C—LABELLING OR TAGGING MACHINES, APPARATUS, OR PROCESSES
    • B65C9/00—Details of labelling machines or apparatus
    • B65C9/40—Controls; Safety devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/917—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers control arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65C—LABELLING OR TAGGING MACHINES, APPARATUS, OR PROCESSES
    • B65C9/00—Details of labelling machines or apparatus
    • B65C9/40—Controls; Safety devices
    • B65C2009/401—Controls; Safety devices for detecting the height of articles to be labelled

Abstract

The conveying device (EA) is provided with: a first detection unit (10) that detects the position of the object (WK) to be conveyed stored in the storage unit (SC); a holding unit (20) for holding the object to be conveyed; a moving unit (30) having a holding portion (31A) capable of selectively holding the first detecting unit and the holding unit, and capable of moving the first detecting unit or the holding unit held by the holding portion; and a control unit (40) for controlling the respective members in such a manner that the first detection unit is held by moving the holding portion to the first detection unit holding position (HP 1) via the moving unit, then the first detection unit is moved to detect the position of the object to be conveyed, the holding unit is held by moving the holding portion to the holding unit holding position (HP 2) via the moving unit, and then the object to be conveyed is held and conveyed by moving the holding unit based on the detection result of the first detection unit.

Description

Conveying device and conveying method, sheet attaching device and sheet attaching method
Technical Field
The invention relates to a conveying device and a conveying method, a sheet attaching device and a sheet attaching method.
Background
A conveying apparatus is known in which a position of a conveying object stored in a storage unit is detected by a detection unit, and a holding unit that holds the conveying object is moved based on a detection result to hold and convey the conveying object (for example, refer to patent document 1).
Patent document 1: japanese patent laid-open No. 7-153818
In the process apparatus (carrier apparatus) described in patent document 1, the wafer recognition apparatus 60 (first detection means) that recognizes the wafer 2 (the object to be carried) and the robot 5 (holding means) that holds the object to be carried are integrally formed and held by the wafer carrying robot 4 (moving means), and there is a problem in that the apparatus is large in size.
Disclosure of Invention
The invention aims to provide a conveying device and a conveying method, a sheet attaching device and a sheet attaching method, which can prevent the device from being enlarged.
As an aspect, the present invention adopts the aspects recited in the claims.
According to the present invention, the mobile unit has the holding portion capable of selectively holding the first detecting unit and the holding unit, and thus the device can be prevented from being enlarged.
Drawings
Fig. 1A is an explanatory view of a conveying device and a sheet attaching device according to an embodiment of the present invention.
Fig. 1B is an explanatory view of a conveying device and a sheet attaching device according to an embodiment of the present invention.
Fig. 1C is an explanatory diagram of a conveying apparatus according to a modification of the present invention.
Detailed Description
An embodiment of the present invention will be described below with reference to the drawings.
In the present embodiment, the X axis, the Y axis, and the Z axis are in an orthogonal relationship, and the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. In the present embodiment, when the direction is shown based on the view from the front direction of fig. 1A parallel to the Y axis, the arrow direction of the Z axis is "up", the arrow direction of the Z axis is "down", the arrow direction of the X axis is "left", the arrow direction of the X axis is "right", the front "is the front direction of fig. 1A parallel to the Y axis, and the arrow direction of the Z axis is" back ".
The conveying device EA is a device that conveys a conveyance target WK, and includes: a first detection unit 10 that performs a first detection step of detecting a position of the conveyance object WK stored in the storage unit SC capable of storing the conveyance object WK; a holding unit 20 that performs a holding step of holding the conveyance object WK; a moving unit 30 having a front end arm 31A as a holding portion capable of selectively holding the first detecting unit 10 and the holding unit 20, and performing a moving process of moving the first detecting unit 10 or the holding unit 20 held by the front end arm 31A; and a control unit 40 that performs a control step of controlling operations of the respective members constituting the conveyance device EA and the sheet attachment device EA 1.
The sheet attaching apparatus EA1 is an apparatus for attaching an adhesive sheet AS to a conveyance object WK, and includes: a carrying device EA; an attaching unit 50 that performs an attaching step of attaching the adhesive sheet base material AB to the conveyance object WK; and a cutting unit 60 for performing a cutting process of cutting the adhesive sheet base material AB into a predetermined shape to form the adhesive sheet AS. The sheet attaching device EA1 is disposed in the vicinity of a support table 70 as a support means for supporting the storage means SC and a conveyance object support means 80 for supporting the conveyance object WK.
The first detection unit 10 includes: a bracket 11 which can be held by the moving unit 30; the detection device 12 is supported by the carriage 11, and is configured by a photographing unit such as a video camera or a projector, various sensors such as an optical sensor and an ultrasonic sensor, and the like. The detection device 12 of the present embodiment is constituted by a photosensor having a light emitting element 12A and a light receiving element 12B.
The holding unit 20 is held by the moving unit 30, and includes a holding member 21, and the holding member 21 includes a holding surface 21A that can be sucked and held by a decompression unit (holding means) not shown, such as a decompression pump or a vacuum ejector.
The moving unit 30 includes a so-called multi-joint robot 31 as a moving device and a driving device, and the multi-joint robot 31 is constituted by a plurality of arms including a front end arm 31A, and can move an article supported by the front end arm 31A to any position and any angle within a working range thereof. The moving unit 30 of the present embodiment is provided so that the cutting unit 60 can be selectively held by the front end arm 31A as well.
The control unit 40 includes a control device 41 such as a personal computer and a sequencer, and controls the components by moving the front end arm 31A to the first detection unit holding position HP1 for holding the first detection unit 10 via the moving unit 30 to hold the first detection unit 10, then moving the first detection unit 10 to detect the position of the conveyance object WK, moving the front end arm 31A to the holding unit holding position HP2 for holding the holding unit 20 via the moving unit 30 to hold the holding unit 20, and then moving the holding unit 20 based on the detection result of the first detection unit 10 to hold the conveyance object WK.
The control unit 40 of the present embodiment moves the distal end arm 31A to the cutting unit holding position HP3 for holding the cutting unit 60 via the moving unit 30 to hold the cutting unit 60, and thereafter moves the cutting unit 60 to form the adhesive sheet AS.
The attaching unit 50 includes: a support roller 51 for supporting the adhesive sheet base AB; a guide roller 52 for guiding the adhesive sheet base AB; a pressing unit 53 for pressing and attaching the adhesive sheet base material AB to the conveyance object WK; a frame 55 supported by a slider 54A of a linear motor 54 as a driving device; a driving roller 56 supported by an output shaft, not shown, of a rotation motor 56A as a driving means supported by the frame 55, and sandwiching the adhesive sheet base material AB with a pinch roller 56B; the recovery roller 57 as recovery means is supported by an output shaft of a driving device, not shown, supported by the frame 55, and always imparts a predetermined tension to the unnecessary sheet US existing between the recovery roller 57 and the driving roller 56 during the automatic operation of the sheet attaching device EA1, thereby recovering the unnecessary sheet US. The unnecessary sheet US is a sheet obtained by cutting the adhesive sheet base material AB by the cutting unit 60, and cutting the adhesive sheet AS having a predetermined shape from the adhesive sheet base material AB.
The pressing unit 53 includes: a linear motor 53A as a driving device, which is supported on a slider 54B of the linear motor 54 via a bracket 54C; a pressing roller 53C rotatably supported by the output shaft 53B of the linear motor 53A.
The cutting unit 60 includes a cutting blade 61 as a cutting member that can be held by the moving unit 30.
The conveyance object supporting unit 80 includes: a direct-acting motor 81 as a driving device; the table 82 is supported by an output shaft 81A of the linear motor 81, and has a conveyance object support surface 82A that can be sucked and held by a decompression means (holding means) such as a decompression pump or a vacuum ejector, and a sheet support surface 82B that can support the adhesive sheet base material AB.
The storage unit SC includes a plurality of racks SC1 arranged in a vertical direction, and stores a plurality of objects WK in a plurality of layers without abutting each other.
The operation of the sheet attaching device EA1 including the above conveying device EA will be described.
First, with respect to the sheet attachment device EA1 in which each member is arranged at the initial position shown in fig. 1A, a user of the sheet attachment device EA1 (hereinafter, simply referred to as "user") sets the adhesive sheet base material AB as shown in the figure, and then inputs a signal for starting the automatic operation through an operation panel, a personal computer, or other operation means, not shown. Next, as shown in fig. 1A, a user, a transfer means, not shown, such as an articulated robot or a conveyor belt, places a storage means SC storing the object to be transferred WK at a predetermined position on the support table 70, and the control means 40 drives the articulated robot 31 via the moving means 30 to move the leading end arm 31A to the first detection means holding position HP1, thereby holding the carriage 11 supporting the detection means 12 by the leading end arm 31A. Thereafter, the control unit 40 drives the multi-joint robot 31 via the moving unit 30, moves the detecting device 12 so that the light emitting element 12A and the light receiving element 12B are positioned in the storage unit SC as shown by the two-dot chain line in fig. 1A and fig. 1B, and then lifts and lowers the detecting device 12 so that the detecting device 12 detects the position of the conveyance object WK stored in the storage unit SC.
Next, the control unit 40 drives the articulated robot 31 via the moving unit 30, returns the detection device 12 to the initial position, releases the holding of the carriage 11 by the tip arm 31A, and thereafter moves the tip arm 31A to the holding unit holding position HP2 to hold the holding member 21 by the tip arm 31A. Then, the control unit 40 drives the articulated robot 31 via the moving unit 30, and drives a decompression unit, not shown, via the holding unit 20, moves the holding member 21 based on the detection result of the detection device 12, starts holding the conveyance object WK by the holding surface 21A, moves the holding member 21, conveys the conveyance object WK, and places the conveyance object WK at a predetermined position on the conveyance object support surface 82A. Next, the control unit 40 stops driving of the decompression unit, not shown, via the holding unit 20, releases the holding of the conveyance object WK by the holding surface 21A, and thereafter drives the articulated robot 31 via the moving unit 30 to return the holding member 21 to the initial position. Thereafter, the control unit 40 drives the decompression unit and the linear motor 81, not shown, via the object support unit 80, starts suction holding of the object WK by the object support surface 82A, and raises the table 82 as indicated by the two-dot chain line in fig. 1A. Next, the control unit 40 drives the linear motor 53A and the linear motor 54 via the attaching unit 50, lowers the pressing roller 53C to press the adhesive sheet base AB against the sheet supporting surface 82B with a predetermined pressing force, and then moves the pressing roller 53C rightward as indicated by a two-dot chain line in fig. 1A to press the adhesive sheet base AB against the object to be conveyed WK and the sheet supporting surface 82B. Meanwhile, the control unit 40 drives the multi-joint robot 31 via the moving unit 30 to release the holding of the holding member 21 by the tip arm 31A, and thereafter moves the tip arm 31A to the cutting unit holding position HP3 where the cutting blade 61 is held, and holds the cutting blade 61 by the tip arm 31A.
Then, when the attachment of the adhesive sheet base material AB to the conveyance object WK is completed, the control unit 40 drives the articulated robot 31 via the moving unit 30, moves the cutting blade 61 to a position to cut the adhesive sheet base material AB as shown by a two-dot chain line in fig. 1A, pierces the adhesive sheet base material AB, and moves the cutting blade 61 along the outer periphery of the conveyance object WK. Thus, an adhesive sheet AS having the same shape AS the outer peripheral shape of the object to be conveyed WK is formed, the adhesive sheet AS remains in an attached state on the object to be conveyed WK, and a dummy sheet US is formed on the outer periphery of the adhesive sheet AS. Next, the control unit 40 drives the linear motor 54 and the rotary motor 56A via the attaching unit 50, and moves the frame 55 rightward as indicated by the two-dot chain line in fig. 1A, and recovers the unnecessary sheet US by the recovery roller 57 while peeling the unnecessary sheet US from the sheet supporting surface 82B. Meanwhile, the control unit 40 drives the multi-joint robot 31 via the moving unit 30 to return the cutter 61 to the initial position, releases the holding of the cutter 61 by the tip arm 31A, and thereafter holds the holding member 21 by the tip arm 31A.
After that, when the unnecessary sheet US is peeled off from the entire sheet support surface 82B, the control unit 40 drives the linear motor 81 via the conveyance object support unit 80 to return the table 82 to the initial position, and thereafter stops the driving of the decompression unit, not shown, to release the suction and holding of the conveyance object WK by the conveyance object support surface 82A. Next, the control unit 40 drives the articulated robot 31 via the moving unit 30, and drives a decompression unit, not shown, via the holding unit 20, so that the holding member 21 is moved onto the object to be conveyed WK to which the adhesive sheet AS is attached, and the holding surface 21A starts holding the object to be conveyed WK, and thereafter, the holding member 21 is moved based on the detection result of the detection device 12, so that the object to be conveyed WK is conveyed, and is stored in the storage unit SC at the original position. Then, the control unit 40 drives the linear motor 53A and the linear motor 54 via the attaching unit 50 to raise the pressing roller 53C, and then drives the linear motor 54 in a state where the driving of the turning motor 56A is stopped to return the pressing roller 53C and the frame 55 to the initial positions, and discharges the adhesive sheet base material AB to the conveyance object supporting unit 80. Next, the control unit 40 drives the articulated robot 31 via the moving unit 30 to return the holding member 21 to the initial position, releases the holding of the holding member 21 by the tip arm 31A, and then repeats the same operation as described above.
According to the above embodiment, the moving unit 30 has the front end arm 31A capable of selectively holding the first detecting unit 10 and the holding unit 20, and thus can prevent the device from being enlarged.
As described above, the optimal configuration, method, and the like for implementing the present invention are disclosed in the foregoing description, but the present invention is not limited thereto. That is, although the present invention has been particularly shown and described with respect to the specific embodiments, it is possible for those skilled in the art to implement various modifications in shape, material, number, and other detailed configurations to the above-described embodiments without departing from the scope of the technical spirit and the object of the present invention. The description of the above-described shapes, materials, and the like are illustrative for easy understanding of the present invention, and are not intended to limit the present invention, and thus, descriptions of names of utilization members in which some or all of the limitations of the shapes, materials, and the like are removed are also included in the present invention.
For example, the first detecting means 10 may be configured by one detecting device 12 including the light emitting element 12A and the other detecting device 12B, or may be configured by one detecting device 12 including three or more detecting devices 12, and may be configured to detect the position of the object WK in the storage means SC from the outside of the storage means SC.
The first detection unit 10 may include a plurality of detection devices 12, and may selectively hold one of the plurality of detection devices 12 according to the size, shape, type, or the like of the object to be transported WK and the storage unit SC to detect the position of the object to be transported WK. This can realize position detection corresponding to various objects WK to be transported and storage units SC, and can improve versatility of the transport device EA and the sheet attaching device EA1 of the present invention.
The holding unit 20 may hold the conveyance object WK by a gripping unit such as a mechanical chuck or a chuck cylinder, for example, instead of or in addition to the holding member 21.
The holding unit 20 may include a plurality of holding members 21, and one of the plurality of holding members 21 may be selectively held to hold the object to be transported WK according to the size, shape, type, or the like of the object to be transported WK and the storage unit SC. This can realize the holding of the various objects WK to be transported and the storage units SC, and can improve the versatility of the transport device EA and the sheet attaching device EA1 of the present invention.
The moving unit 30 may not be provided so as to be able to selectively hold the cutting unit 60 by the front end arm 31A.
The moving unit 30 may include a plurality of moving devices, and one of the plurality of moving devices may be selectively used to hold the detecting device 12, the holding member 21, or the cutting blade 61 according to the size, shape, or kind of the detecting device 12, the holding member 21, or the cutting blade 61. This can realize conveyance corresponding to various types of detecting devices 12, holding members 21, and cutting blades 61, and can improve versatility of the conveying device EA and the sheet attaching device EA1 of the present invention.
The attaching unit 50 may be configured to release the raw roll having the adhesive sheet base AB temporarily attached to the strip-shaped release sheet and attach the adhesive sheet base AB to the conveyance object WK by peeling the adhesive sheet base AB from the release sheet by a peeling member such AS a peeling plate or a peeling roller, may be configured to release the raw roll having the adhesive sheet AS temporarily attached to the strip-shaped release sheet and attach the adhesive sheet AS to the conveyance object WK by peeling the adhesive sheet AS from the release sheet by a peeling member such AS a peeling plate or a peeling roller, may be configured to release the adhesive sheet AS not temporarily attached to the release sheet and attach the adhesive sheet AS to the conveyance object WK, may be configured to support and guide the adhesive sheet base AB and the unnecessary sheet US by a plate-like member, a shaft member or the like instead of the rollers such AS the supporting roller 51 or the guide roller 52, may be configured to support the adhesive sheet base AB by, for example, or the fan-like, may be configured to not support the unnecessary sheet US by not winding the unnecessary sheet US by, for example, may be configured to cut and optionally collect the unnecessary sheet US by a paper shredder or the recovery unit, may be configured to not be configured to the recovery unit, may be configured to be disposed upside down and may be mounted on the surface of the conveyance object, and may be attached to the apparatus.
The cutting means 60 may be configured to form an adhesive sheet AS having the same shape or a different shape from the outer edge shape of the conveyance object WK, form an adhesive sheet AS smaller or larger than the outer edge shape of the conveyance object WK, and may be configured to hold the cutting blade 61 so AS to be capable of holding the adhesive sheet base material AB by the tip arm 31A, and in this case, the cutting blade 61 may be held by another driving device so AS to move the cutting blade 61 and cut the adhesive sheet base material AB so AS to attach the adhesive sheet base material AB to the conveyance object WK, or may be configured to cut the adhesive sheet base material AB before the adhesive sheet base material AB is attached to the conveyance object WK, or may be configured to cut the conveyance object WK, or may not be configured to attach the adhesive sheet base material AB to the conveyance device EA of the present invention.
The cutting unit 60 may include a plurality of cutting blades 61, and one of the plurality of cutting blades 61 may be selectively held according to the size, shape, type, or the like of the adhesive sheet base material AB and the object to be conveyed WK to cut the adhesive sheet base material AB and the object to be conveyed WK. This can realize cutting corresponding to various adhesive sheet substrates AB and conveyance objects WK, and can improve versatility of the conveyance device EA and the sheet attaching device EA1 of the present invention.
The storage unit SC may be one or a plurality of storage units, may be provided without the rack SC1, may be configured to store a plurality of conveyance objects WK in a stacked state by abutting each other, may be configured to store a plurality of conveyance objects WK in a flat state as in the embodiment, may store a plurality of conveyance objects WK in a vertical state, may store one or a plurality of conveyance objects WK, and may be mounted to the conveyance device EA and the sheet attaching device EA1 of the present invention, or may not be mounted.
The support unit may be configured such that the support table 70 that supports the storage units SC is movable by a driving device, casters, or the like, or may be configured to support a plurality of storage units SC, and may or may not be attached to the conveying device EA and the sheet attaching device EA1 of the present invention.
The conveyance object supporting unit 80 may not be capable of performing suction holding on the conveyance object supporting surface 82A, may be capable of performing suction holding on the sheet supporting surface 82B, may not be capable of performing suction holding, and may be mounted to the conveyance device EA and the sheet attaching device EA1 of the present invention, or may not be mounted.
As shown in fig. 1C, the conveying device EA may include a second detecting means 90 that detects the position of the object to be conveyed WK stored in the storage means SC without being moved by the moving means 30, and the control means 40 may move the holding means 20 via the moving means 30 based on the detection result of the first detecting means 10 or the second detecting means 90 to hold and convey the object to be conveyed WK.
The second detection unit 90 includes: a linear motor 91 as a driving means supported by the support table 70; a linear motor 92 as a driving means supported by an output shaft 91A of the linear motor 91; a detection device 93 supported by an output shaft 92A of the linear motor 92 and configured by various sensors such as a photographing unit such as a camera and a projector, an optical sensor, and an ultrasonic sensor; the control unit 40 drives the linear motors 91 and 92 via the second detection unit 90, and as shown by the two-dot chain line in fig. 1C, moves the detection device 93 to detect the position of the conveyance object WK stored in the storage unit SC. In this case, the first detection unit 10 or the second detection unit 90 can be selected according to, for example, the size, shape, type, or the like of the conveyance object WK.
The units and steps in the present invention are not limited in any way as long as the operations, functions, or steps described in the units and steps can be realized, and the configuration and steps of the single embodiment described in the above embodiments are not limited at all. For example, the holding means may be any means as long as it holds the object to be conveyed, and is not limited in any way as long as it is within the technical scope of the present technical knowledge of the application (the same applies to other means and steps).
The material, type, shape, and the like of the adhesive sheet base AB, the adhesive sheet AS, and the conveyance object WK are not particularly limited. For example, the adhesive sheet base AB, the adhesive sheet AS, and the conveyance object WK may have a polygonal shape such AS a circular shape, an elliptical shape, a triangular shape, or a quadrangular shape, or may have an adhesive form such AS pressure-sensitive adhesive property or heat-sensitive adhesive property, and in the case of using heat-sensitive adhesive property, the adhesive sheet base AB may be bonded by a suitable method such AS providing a suitable coil heater for heating the adhesive sheet base AB, a heating means such AS a heating side of a heat pipe, or the like. The adhesive sheet base AB may be, for example, a single layer of an adhesive layer, a single layer or a plurality of layers having an intermediate layer between the base and the adhesive layer, three or more layers such as a cover layer on the upper surface of the base, or a so-called double-sided adhesive sheet which can be peeled off the base from the adhesive layer. The conveyance object WK may be, for example, a single body such as a food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, an information recording substrate such as a circuit board or an optical disk, a glass plate, a steel plate, a ceramic, a wooden plate, or a resin, or a composite formed of two or more of them, and any type of member, article, or the like may be used. The adhesive sheet base AB may be replaced with any functional or functional label, such as an information recording label, a decorative label, a protective sheet, a dicing tape, a separator, a die bonding tape, a recording layer forming resin sheet, a film, a tape, or the like.
The driving device in the above embodiment may be an electric device such as a rotary motor, a linear motor, a single-axis robot, or a multi-joint robot having joints of two or more axes, an actuator such as a cylinder, a hydraulic cylinder, a rodless cylinder, or a rotary cylinder, or the like, and a combination of these may be used directly or indirectly.
In the above embodiment, when a rotating member such as a roller is used, a driving device for driving the rotating member to rotate may be provided, a deformable member such as rubber or resin may be used to form the surface of the rotating member, the rotating member itself may be used to form a non-deformable member, a rotating or non-rotating shaft, a doctor blade or other member may be used instead of the roller, and when a pressing member such as a pressing roller, a pressing head or the like, a pressing member or the like for pressing an object to be pressed is used, instead of or in addition to the roller, a round bar, a doctor member, a brush-like member, a deformable member such as rubber, resin, sponge or the like may be used to form the pressing object by blowing gas such as air, natural gas or the like, the present invention can be also configured by using a non-deformable member such as a metal or a resin, and in the case of using a peeling means such as a peeling plate or a peeling roller or a peeling member to peel off an object to be peeled, as an alternative or in addition to the above-described examples, a plate-like member, a round bar, a roller or the like may be used, and the peeled object can be configured by using a deformable member such as a rubber or a resin, or a non-deformable member, and in the case of using a supporting (holding) means, a supporting (holding) mechanism, a supporting (holding) member or the like to support (hold) a supported member (held) by a holding means such as a mechanical chuck or a chuck cylinder, coulomb force, an adhesive (adhesive sheet, adhesive tape), in the case of using a structure in which a member to be cut is cut by a cutting means, a cutting member, or the like, or a structure in which a notch or a cutting line is formed in the member to be cut, such as a magnetic force, bernoulli adsorption, suction adsorption, or a driving device, a structure in which cutting is performed by a cutter, a laser cutter, an ion beam, heat, water pressure, an electric wire, blowing of gas, liquid, or the like may be used instead of or in addition to the above-described example, or the structure in which cutting is performed may be moved by a combination of suitable driving devices.

Claims (5)

1. A conveying device for conveying an object to be conveyed, characterized by comprising:
a first detection unit that detects a position of the conveyance object stored in a storage unit capable of storing the conveyance object;
a holding unit that holds the conveyance object;
a moving unit having a holding portion capable of selectively holding the first detecting unit and the holding unit, the moving unit being capable of moving the first detecting unit or the holding unit held by the holding portion;
a control unit for controlling the operation of each component constituting the conveying device,
the control means controls each member to move the holding portion to a first detection means holding position for holding the first detection means via the moving means, then to move the first detection means to detect the position of the object to be conveyed, and to move the holding portion to a holding means holding position for holding the holding means via the moving means to hold the holding means, and then to move the holding means based on the detection result of the first detection means to hold and convey the object to be conveyed.
2. Handling device according to claim 1, wherein,
a second detecting unit for detecting the position of the object to be conveyed stored in the storing unit without moving by the moving unit,
the control means moves the holding means via the moving means based on the detection result of the first detection means or the second detection means, and holds and conveys the conveyance target.
3. A sheet attaching device for attaching an adhesive sheet to an object to be transported, comprising:
the handling device of claim 1 or 2;
an attaching unit that attaches an adhesive sheet base material to the conveyance object;
a cutting unit that cuts the adhesive sheet base material into a predetermined shape to form the adhesive sheet;
the moving unit is arranged to be able to selectively hold the cutting unit also with the holding portion,
the control means moves the holding portion to a cutting means holding position for holding the cutting means via the moving means to hold the cutting means, and then moves the cutting means to form the adhesive sheet.
4. A conveying method for conveying an object to be conveyed, characterized by comprising the steps of:
a first detection step of detecting, by a first detection means, a position of the conveyance object stored in a storage means capable of storing the conveyance object;
a holding step of holding the conveyance object by a holding means;
a moving step of moving the first detecting means or the holding means held by the holding portion by using a moving means having a holding portion capable of selectively holding the first detecting means and the holding means;
a control step of controlling the operations of the respective members for carrying out the conveyance method;
in the control step, the holding unit is moved to a first detection unit holding position for holding the first detection unit via the moving unit, the first detection unit is moved to perform the first detection step, the holding unit is held by moving the holding unit via the moving unit to a holding unit holding position for holding the holding unit, and the holding unit is moved based on a detection result of the first detection step to perform the holding step, thereby holding and conveying the conveyance target object.
5. A method for attaching a sheet to an object to be transported, comprising:
the handling method of claim 4;
an attaching step of attaching an adhesive sheet base material to the conveyance object; and
a cutting step of cutting the adhesive sheet base material into a predetermined shape by a cutting means to form the adhesive sheet,
the moving unit is arranged to be able to selectively hold the cutting unit also with the holding portion,
in the control step, the cutting means is held by moving the holding portion to a cutting means holding position for holding the cutting means via the moving means, and thereafter the cutting step is performed.
CN202211555514.4A 2022-01-11 2022-12-06 Conveying device and conveying method, sheet attaching device and sheet attaching method Pending CN116424677A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022002467A JP2023102104A (en) 2022-01-11 2022-01-11 Transport system and transport method, and sheet pasting device and sheet pasting method
JP2022-002467 2022-01-11

Publications (1)

Publication Number Publication Date
CN116424677A true CN116424677A (en) 2023-07-14

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Application Number Title Priority Date Filing Date
CN202211555514.4A Pending CN116424677A (en) 2022-01-11 2022-12-06 Conveying device and conveying method, sheet attaching device and sheet attaching method

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KR (1) KR20230108698A (en)
CN (1) CN116424677A (en)
TW (1) TW202333282A (en)

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TW202333282A (en) 2023-08-16
KR20230108698A (en) 2023-07-18

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