CN116399831B - Refractive index detection device and detection method - Google Patents

Refractive index detection device and detection method Download PDF

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CN116399831B
CN116399831B CN202310661963.5A CN202310661963A CN116399831B CN 116399831 B CN116399831 B CN 116399831B CN 202310661963 A CN202310661963 A CN 202310661963A CN 116399831 B CN116399831 B CN 116399831B
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mask
unit
refractive index
curvature
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CN116399831A (en
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周辉
王月虹
曹海峰
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Guangdong Medical Research And Development Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41Refractivity; Phase-affecting properties, e.g. optical path length
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106General arrangement of respective parts
    • G01N2021/0112Apparatus in one mechanical, optical or electronic block

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Abstract

The application provides a refractive index detection device and a detection method, comprising the following steps: the device comprises a He-Ne laser (1), a lens (2), a clamping table (3), a beam splitting cube (4), a wavefront shaping unit (5), a first mask (6), a second mask (7), a camera acquisition unit (8) and a computer unit (9), wherein the clamping table (3) is arranged between the lens (2) and the beam splitting cube (4), a sample (10) to be measured is fixed on the clamping table (3), the sample (10) to be measured can be selectively arranged in a light path, and the detection device and the detection method provided by the application can be used for obtaining the refractive index of the sample (10) to be measured according to the reflection modulation curvature by selectively arranging the sample (10) to be measured in the light path.

Description

Refractive index detection device and detection method
Technical Field
The application relates to the technical field of optical measurement, in particular to a refractive index detection device and a refractive index detection method.
Background
Currently, refractive index measurement methods can be classified into geometrical optical measurement methods and wave optical measurement methods according to the principle. Wherein the geometrical optical measurement method comprises: the key ideas of the total reflection critical angle method (namely Abbe method), the V prism method and the minimum deflection angle method are to utilize the Snell's law. The wave optical measurement method mainly comprises the following steps: newton's ring interferometry, michelson interferometry, wedge interferometry, surface plasmon resonance photonic crystal fiber methods, optical frequency comb methods, and Fabry-Perot interferometry, the core idea being based on the mapping relationship of the phase difference of coherent light with the refractive index. The total reflection critical angle method has low measurement accuracy, and compared with the refractive index of the known material, the total reflection critical angle method has the measurement range of 1.3-1.7. The angle measuring device of the minimum deflection angle method is quite complex, the sample needs to be processed into a triangular prism shape, the requirements on each angle of the triangular prism are strict, and the measuring cost is high. And the method is applied to special containers which are used for measuring the refractive index of liquid and need to be manufactured with accurate and known vertex angles, has high process difficulty and has higher constraint requirements on the thickness degree of surrounding transmission glass materials and the like. The V prism refraction method has a large error source, and it is difficult to achieve high-precision measurement. The interferometry is traced to the laser frequency without tracing to an angle standard, and high-precision measurement can be realized. But the system structure is complex and the system maintenance is relatively difficult.
The refractive index of optical glass is a physical parameter that varies with the optical glass material, ambient temperature, air pressure, and the wavelength of incident light. Under the condition that the wavelength line width of incident light is extremely narrow and the pressure and temperature change are not large, the refractive index change of the optical glass material is very small and is only related to the property of the material. Under normal temperature and normal atmospheric pressure, the refractive index of the optical glass for a specific wavelength of incident light is known, if we want to determine the specific refractive index and material of a certain optical glass material, or an unusual or unusual material under normal temperature and normal atmospheric pressure, the refractive index of the optical glass material must be obtained through actual measurement, and the measurement by using the existing refractive index measurement device and method is a better way, but the existing device and method often comprises a large-scale precise optical instrument, or the system is difficult to build or adjust, or the optical path is complex and difficult to maintain, or the cost is high, the cost performance is low, or the automation degree of the application operation is complex and low.
Disclosure of Invention
In view of this, it is necessary to provide a refractive index detection device and a detection method that have a simple structure, low cost, convenient operation, high measurement efficiency, stable and reliable measurement results, and can be self-calibrated against the defects existing in the prior art.
In order to solve the problems, the application adopts the following technical scheme:
one of the objects of the present application is to provide a refractive index detection device comprising: he-Ne laser instrument (1), lens (2), clamping platform (3), beam splitting cube (4), wavefront plastic unit (5), first mask (6), second mask (7), camera collection unit (8) and computer unit (9), clamping platform (3) set up in lens (2) with between beam splitting cube (4), computer unit (9) electric connection He-Ne laser instrument (1) wavefront plastic unit (5) with camera collection unit (8), clamping platform (3) are fixed with sample (10) to be measured, sample (10) to be measured can be selectively placed in the light path, wherein:
the collimating laser emitted by the He-Ne laser (1) is incident to the lens (2), the lens (2) converts the incident laser into a divergent cone beam, the divergent cone beam is incident to the beam splitting cube (4), a part of light is reflected by the beam splitting cube (4) and then is incident to the wave-front shaping unit (5), the beam reflected by the wave-front shaping unit (5) is transmitted by the beam splitting cube (4), and then sequentially passes through the first mask (6) and the second mask (7) and then is incident to the camera acquisition unit (8), the camera acquisition unit (8) transmits acquired image information to the computer unit (9), and the half divergence angle of the divergent cone beam is that
When the optical path is not arranged in the sample (10) to be detected, the computer unit (9) controls the reflection modulation curvature loaded by the wave-front shaping unit (5)Continuously changing, when the camera acquisition unit (8) acquires image information and displays that two well words in the pupils of the first mask (6) and the second mask (7) are completely overlapped, the computer unit (9) records the reflection modulation curvature loaded by the wave-front shaping unit (5) at the moment>
When the sample (10) to be measured is placed in the light path, the computer unit (9) controls the reflection modulation curvature loaded by the wave-front shaping unit (5)Continuously changing, when the camera acquisition unit (8) acquires image information, displaying the first mask (6) and the second maskWhen the two well-shaped parts in the pupil of the mould (7) are completely coincident, the computer unit (9) records the reflection modulation curvature loaded by the wave front shaping unit (5) at the moment>
The computer unit (9) calculates the refractive index of the sample (10) to be measured according to the following formula:
wherein:for the refractive index of the sample (10) to be tested,/->The thickness of the sample (10) to be tested, < >>Modulating the curvature of the spatial light modulator without the sample (10) to be measured,/->Modulating the curvature of the spatial light modulator for the addition of the sample (10) to be tested,/->Is the half divergence angle of the laser beam.
The second object of the present application is to provide a method for detecting the refractive index of the device, comprising the following steps:
when the optical path is not arranged in the sample (10) to be detected, the computer unit (9) controls the reflection modulation curvature loaded by the wave-front shaping unit (5)Continuously changing, when the camera acquisition unit (8) acquires image information and displays the image information in the pupils of the first mask (6) and the second mask (7)When the two well words of (a) are completely coincident, the computer unit (9) records the reflection modulation curvature +.>
When the sample (10) to be measured is placed in the light path, the computer unit (9) controls the reflection modulation curvature loaded by the wave-front shaping unit (5)Continuously changing, when the camera acquisition unit (8) acquires image information and displays that two well words in the pupils of the first mask (6) and the second mask (7) are completely overlapped, the computer unit (9) records the reflection modulation curvature loaded by the wave-front shaping unit (5) at the moment>
The computer unit (9) calculates the refractive index of the sample (10) to be measured according to the following formula:
wherein:for the refractive index of the sample (10) to be tested,/->The thickness of the sample (10) to be tested, < >>Modulating the curvature of the spatial light modulator without the sample (10) to be measured,/->Modulating the curvature of the spatial light modulator for the addition of the sample (10) to be tested,/->Is the half divergence angle of the laser beam.
By adopting the technical scheme, the application has the following beneficial effects:
the application provides a refractive index detection device and a detection method, comprising the following steps: the device comprises a He-Ne laser (1), a lens (2), a clamping table (3), a beam splitting cube (4), a wavefront shaping unit (5), a first mask (6), a second mask (7), a camera acquisition unit (8) and a computer unit (9), wherein the clamping table (3) is arranged between the lens (2) and the beam splitting cube (4), a sample (10) to be measured is fixed on the clamping table (3), the sample (10) to be measured can be selectively arranged in a light path, and the detection device and the detection method provided by the application can be used for obtaining the refractive index of the sample (10) to be measured according to the reflection modulation curvature by selectively arranging the sample (10) to be measured in the light path.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following description will briefly explain the embodiments of the present application or the drawings used in the description of the prior art, and it is obvious that the drawings described below are only some embodiments of the present application, and other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a refractive index detection device according to embodiment 1 of the present application.
Fig. 2 is a schematic structural diagram of the first mask according to embodiment 1 of the present application.
Detailed Description
Embodiments of the present application are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present application and should not be construed as limiting the application.
In the description of the present application, it should be understood that the directions or positional relationships indicated by the terms "upper", "lower", "horizontal", "inner", "outer", etc., are based on the directions or positional relationships shown in the drawings, are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present application.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present application, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
The present application will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present application more apparent.
Example 1
Referring to fig. 1, a schematic structure diagram of a refractive index detection apparatus provided in this embodiment 1 includes: he-Ne laser instrument (1), lens (2), clamping platform (3), beam splitting cube (4), wavefront plastic unit (5), first mask (6), second mask (7), camera collection unit (8) and computer unit (9), clamping platform (3) set up in between lens (2) and beam splitting cube (4), computer unit (9) electric connection He-Ne laser instrument (1) wavefront plastic unit (5) with camera collection unit (8), clamping platform (3) are fixed with sample (10) to be measured, sample (10) to be measured can be arranged in the light path selectively. Specific implementations of the various components are described in detail below.
The refractive index detection device provided in the above embodiment 1 of the present application works as follows:
the He-The collimated laser emitted by the Ne laser (1) is incident on the lens (2), the lens (2) converts the incident laser into a divergent cone beam, the divergent cone beam is incident on the beam splitting cube (4), a part of light is reflected by the beam splitting cube (4) and then is incident on the wave front shaping unit (5), the light beam reflected by the wave front shaping unit (5) is transmitted by the beam splitting cube (4), and then sequentially passes through the first mask (6) and the second mask (7) and then is incident on the camera acquisition unit (8), the camera acquisition unit (8) transmits acquired image information to the computer unit (9), and the half divergence angle of the divergent cone beam is that
When the optical path is not arranged in the sample (10) to be detected, the computer unit (9) controls the reflection modulation curvature loaded by the wave-front shaping unit (5)Continuously changing, when the camera acquisition unit (8) acquires image information and displays that two well words in the pupils of the first mask (6) and the second mask (7) are completely overlapped, the computer unit (9) records the reflection modulation curvature loaded by the wave-front shaping unit (5) at the moment>
When the sample (10) to be measured is placed in the light path, the computer unit (9) controls the reflection modulation curvature loaded by the wave-front shaping unit (5)Continuously changing, when the camera acquisition unit (8) acquires image information and displays that two well words in the pupils of the first mask (6) and the second mask (7) are completely overlapped, the computer unit (9) records the reflection modulation curvature loaded by the wave-front shaping unit (5) at the moment>
The computer unit (9) may calculate the refractive index of the sample (10) to be measured according to the following formula:
wherein:for the refractive index of the sample (10) to be tested,/->The thickness of the sample (10) to be tested, < >>Modulating the curvature of the spatial light modulator without the sample (10) to be measured,/->Modulating the curvature of the spatial light modulator for the addition of the sample (10) to be tested,/->Is the half divergence angle of the laser beam.
It can be understood that if the sample to be measured is changed to have a refractive index ofThickness of->Rectangular standard measurement sample of known refractive index of (2), the refractive index of the standard measurement sample is measured to be +.>
The test result after calibration is
In this embodiment, the central axis of the he—ne laser 1 emits laser light, and the optical axis of the lens 1 2 and the beam splitting cube 4 are coaxially placed in sequence; the beam splitting cube 4, the wavefront shaping unit 5, the first mask 6, the second mask and the camera acquisition unit 8 are coaxially arranged in sequence.
In this embodiment, the he—ne laser (1) can generate collimated laser light having a wavelength of 632.8 nm, and the diameter of the collimated laser light is equal to or less than 1 mm.
In this embodiment, the lens (2) may convert the collimated laser beam emitted from the he—ne laser (1) into a divergent cone beam having a divergence angle of 30 ° or less.
In the embodiment, the contact surface of the clamping table (3) and the sample (10) to be detected is a fine grinding smooth surface, and the fine grinding smooth surface is perpendicular to the axis direction of the laser emitted by the He-Ne laser (1).
Further, the clamping table (3) is used for fixing the sample (10) to be tested in the following manner: pressing the clamping spring of the clamping table (3), placing the sample to be tested 10 in the clamping table (3), enabling one surface of the sample to be tested (10) to be tightly attached to the accurate grinding smooth surface of the clamping table (3), and slowly loosening the clamping spring to enable the clamping end surface of the clamping spring to be attached to the same side surface of the sample to be tested (10).
In this embodiment, the sample (10) to be measured is rectangular, and the thickness is less than or equal to 50 and less than mm.
In this embodiment, the beam splitting cube 4 is used to split the incident beam into two beams orthogonal to each other, i.e. a transmitted beam and a reflected beam. Alternatively, a 50:50 beam splitting cube is used in the examples of the present application.
In this embodiment, the wavefront shaping system 5 is used to change the optical wavefront of the light beam incident on the wavefront shaping system 5, so as to change the wavefront curvature of the outgoing light wave.
Further, the divergent cone beam is perpendicularly incident on the beam splitting cube 4 in such a manner that the central axis is perpendicular to the side of the beam splitting cube 4, and a part of the light is reflected by the beam splitting cube 4 to be perpendicularly incident on the wavefront shaping means 5.
In this embodiment, the first mask 6 serves to block part of the light beam, and the intermediate diaphragm is provided with a cross filament, as shown in fig. 2.
Further, the second mask 7 is identical to the first mask 6 and is placed coaxially.
It can be understood that the first mask 6 and the second mask 7 use the projection coincidence condition of the two cross filaments for collecting images in the camera collecting unit 8 to determine whether the light beam emitted after being reflected by the wave front shaping unit 5 is parallel light.
The refractive index detection device according to embodiment 1 of the present application includes: the device comprises a He-Ne laser 1, a lens 2, a clamping table 3, a beam splitting cube 4, a wavefront shaping unit 5, a first mask 6, a second mask 7, a camera acquisition unit 8 and a computer unit 9, wherein the clamping table 3 is arranged between the lens 2 and the beam splitting cube 4, a sample 10 to be measured is fixed on the clamping table 3, the sample 10 to be measured can be selectively arranged in a light path, and the detection device provided by the application can be used for acquiring the corresponding reflection modulation curvature by selectively arranging the sample 10 to be measured in the light path, so that the refractive index of the sample 10 to be measured can be acquired according to the reflection modulation curvature.
Example 2
The embodiment 2 of the application also provides a detection method of the refractive index detection device, which comprises the following steps:
when the optical path is not arranged in the sample (10) to be detected, the computer unit (9) controls the reflection modulation curvature loaded by the wave-front shaping unit (5)Continuously changing, when the camera acquisition unit (8) acquires image information and displays that two well words in the pupils of the first mask (6) and the second mask (7) are completely overlapped, the computer unit (9) records the reflection modulation curvature loaded by the wave-front shaping unit (5) at the moment>
When the sample (10) to be measured is placed in the light path, the computer unit (9) controls the reflection modulation curvature loaded by the wave-front shaping unit (5)Continuously changing, when the camera acquisition unit (8) acquires image information and displays that two well words in the pupils of the first mask (6) and the second mask (7) are completely overlapped, the computer unit (9) records the reflection modulation curvature loaded by the wave-front shaping unit (5) at the moment>
Calculating the refractive index of the sample (10) to be measured according to the formula:
wherein:for the refractive index of the sample (10) to be tested,/->The thickness of the sample (10) to be tested, < >>Modulating the curvature of the spatial light modulator without the sample (10) to be measured,/->Modulating the curvature of the spatial light modulator for the addition of the sample (10) to be tested,/->Is the half divergence angle of the laser beam.
The detailed implementation manner is already described in embodiment 1, and will not be described here again.
It can be understood that if the sample to be measured is changed to have a refractive index ofThickness of->Rectangular standard measurement sample of known refractive index of (2), the refractive index of the standard measurement sample is measured to be +.>
The test result after calibration is
The detection device provided by the application can obtain the corresponding reflection modulation curvature by selectively placing the sample 10 to be detected in the light path, and can obtain the refractive index of the sample 10 to be detected according to the reflection modulation curvature, and has the advantages of simple structure, low cost, convenience in operation, high measurement efficiency, stable and reliable measurement result and self calibration.
It will be understood that the technical features of the above-described embodiments may be combined in any manner, and that all possible combinations of the technical features in the above-described embodiments are not described for brevity, however, they should be considered as being within the scope of the description provided in the present specification, as long as there is no contradiction between the combinations of the technical features.
The foregoing description of the preferred embodiments of the present application has been provided for the purpose of illustrating the general principles of the present application and is not to be construed as limiting the scope of the application in any way. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application, and other embodiments of the present application as will occur to those skilled in the art without the exercise of inventive faculty, are intended to be included within the scope of the present application.

Claims (9)

1. A refractive index detection device, comprising: he-Ne laser instrument (1), lens (2), clamping platform (3), beam splitting cube (4), wavefront plastic unit (5), first mask (6), second mask (7), camera collection unit (8) and computer unit (9), clamping platform (3) set up in lens (2) with between beam splitting cube (4), computer unit (9) electric connection He-Ne laser instrument (1) wavefront plastic unit (5) with camera collection unit (8), clamping platform (3) are fixed with sample (10) to be measured, sample (10) to be measured can be selectively placed in the light path, wherein:
the collimating laser emitted by the He-Ne laser (1) is incident to the lens (2), the lens (2) converts the incident laser into a divergent cone beam, the divergent cone beam is incident to the beam splitting cube (4), a part of light is reflected by the beam splitting cube (4) and then is incident to the wave-front shaping unit (5), the beam reflected by the wave-front shaping unit (5) is transmitted by the beam splitting cube (4), and then sequentially passes through the first mask (6) and the second mask (7) and then is incident to the camera acquisition unit (8), the camera acquisition unit (8) transmits acquired image information to the computer unit (9), and the half divergence angle of the divergent cone beam is that
When the optical path is not arranged in the sample (10) to be detected, the computer unit (9) controls the reflection modulation curvature loaded by the wave-front shaping unit (5)Continuously changing, when the camera acquisition unit (8) acquires image information and displays that two well words in the pupils of the first mask (6) and the second mask (7) are completely overlapped, the computer unit (9) records the reflection modulation curvature loaded by the wave-front shaping unit (5) at the moment>
When the sample (10) to be measured is placed in the light path, the computer unit (9) controls the reflection modulation curvature loaded by the wave-front shaping unit (5)Continuously changing, when the camera acquisition unit (8) acquires image information and displays that two well words in the pupils of the first mask (6) and the second mask (7) are completely overlapped, the computer unit (9) records the reflection modulation curvature loaded by the wave-front shaping unit (5) at the moment>
The computer unit (9) calculates the refractive index of the sample (10) to be measured according to the following formula:
wherein:for the refractive index of the sample (10) to be tested,/->The thickness of the sample (10) to be tested, < >>Modulating the curvature of the spatial light modulator without the sample (10) to be measured,/->Modulating the curvature of the spatial light modulator for the addition of the sample (10) to be tested,/->Is the half divergence angle of the laser beam;
the first mask (6) and the second mask (7) are identical in structure, and a cross filament is arranged in the middle diaphragm of the first mask (6).
2. The refractive index detection apparatus according to claim 1, wherein the He-Ne laser (1) can generate collimated laser light having a wavelength of 632.8 nm, and the diameter of the collimated laser light is equal to or less than 1 mm.
3. The refractive index detection apparatus according to claim 1, wherein the lens (2) is operable to convert a collimated laser beam emitted from the He-Ne laser (1) into a divergent cone beam having a divergence angle of 30 ° or less.
4. The refractive index detection device according to claim 1, wherein the contact surface of the clamping table (3) and the sample (10) to be measured is a fine grinding smooth surface, and the fine grinding smooth surface is perpendicular to the axis direction of the laser light emitted by the He-Ne laser (1).
5. The refractive index detection device according to claim 4, wherein the clamping stage (3) fixes the sample (10) to be measured in such a manner that: pressing the clamping spring of the clamping table (3), placing the sample (10) to be tested in the clamping table (3), enabling one surface of the sample (10) to be tested to be tightly attached to the accurate grinding smooth surface of the clamping table (3), and slowly loosening the clamping spring, so that the clamping end face of the clamping spring is attached to the same side surface of the sample (10) to be tested.
6. The refractive index detection apparatus according to claim 1, 4 or 5, wherein the sample (10) to be measured is rectangular and has a thickness of 50 a or less mm a.
7. Refractive index detection device according to claim 1, characterized in that the diverging conical light beam is perpendicularly incident on the beam splitting cube (4) with its central axis perpendicular to the sides of the beam splitting cube (4), and a part of the light is reflected by the beam splitting cube (4) and perpendicularly incident on the wave front shaping unit (5) with its central axis.
8. The refractive index detection device according to claim 1, wherein a central axis of collimated laser light emitted from the He-Ne laser (1), an optical axis of the lens (2) and the beam splitting cube (4) are coaxially placed in sequence; the beam splitting cube (4), the wave front shaping unit (5), the first mask (6), the second mask (7) and the camera acquisition unit (8) are coaxially arranged in sequence.
9. A method of detecting a refractive index detecting device according to claim 1, comprising the steps of:
when the optical path is not arranged in the sample (10) to be detected, the computer unit (9) controls the reflection modulation curvature loaded by the wave-front shaping unit (5)Continuously changing, when the camera acquisition unit (8) acquires image information and displays two crisscross-shaped pupils in the pupils of the first mask (6) and the second mask (7)When fully coincident, said computer unit (9) records the reflection modulation curvature loaded by said wave front shaping unit (5) at this time>
When the sample (10) to be measured is placed in the light path, the computer unit (9) controls the reflection modulation curvature loaded by the wave-front shaping unit (5)Continuously changing, when the camera acquisition unit (8) acquires image information and displays that two well words in the pupils of the first mask (6) and the second mask (7) are completely overlapped, the computer unit (9) records the reflection modulation curvature loaded by the wave-front shaping unit (5) at the moment>
The computer unit (9) calculates the refractive index of the sample (10) to be measured according to the following formula:
wherein:for the refractive index of the sample (10) to be tested,/->The thickness of the sample (10) to be tested, < >>Modulating the curvature of the spatial light modulator without the sample (10) to be measured,/->To add the sample to be measured10 Spatial light modulator modulation curvature, +.>Is the half divergence angle of the laser beam.
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