CN116333804A - 一种单晶硅棒金刚线切割液 - Google Patents

一种单晶硅棒金刚线切割液 Download PDF

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CN116333804A
CN116333804A CN202111582882.3A CN202111582882A CN116333804A CN 116333804 A CN116333804 A CN 116333804A CN 202111582882 A CN202111582882 A CN 202111582882A CN 116333804 A CN116333804 A CN 116333804A
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Abstract

本发明属于晶硅太阳能硅棒切割技术领域,具体涉及一种单晶硅棒金刚线切割液。该发明的单晶硅棒金刚线切割液由丙二醇聚氧乙烯聚氧丙烯醚、羧甲基纤维素钠、纳米固体自润滑材料或固体自润滑材料乳液、炔二醇双子表面活性剂、有机溶剂、有机硅消泡剂和去离子水组成。含有的长链高分子组分和自润滑材料能显著保护切割过程中的金刚线,降低金刚线由于磨损导致的断线,从而达到降低断线率、提升良率的效果。

Description

一种单晶硅棒金刚线切割液
技术领域
本发明属于晶硅太阳能硅棒切割技术领域,具体涉及一种单晶硅棒金刚线切割液。
背景技术
做为清洁能源核心之一的晶硅太阳能技术正在进行着迅猛的发展。由于单晶组件的光转化效率显著高于多晶组件,目前已成为技术研究和市场需求的主流。
为降低太阳能发电成本,单晶硅片的金刚线切割技术朝着“大尺寸”、“细线化”、“薄片化”的方向发展。现有的切割液不能满足切割行程变长、线径变细、切割速度加快的工艺要求,使用现有的切割液导致切割过程中断线率上升,造成生产效率下降、良率降低的问题。
发明内容
本发明所要解决的是基于切割行程变长、线径变细、切割速度加快的工艺条件下的使用现有切割液导致单晶硅棒切割断线率上升,造成生产效率下降、良率降低的技术问题。
为实现以上目标,本发明的技术方案提供一种单晶硅棒金刚线切割液,该单晶硅棒金刚线切割液的原料组成按重量以份数计算包括:丙二醇聚氧乙烯聚氧丙烯醚20-70份、羧甲基纤维素钠0.05-5份,纳米固体自润滑材料或固体自润滑材料乳液0.05-10份、炔二醇双子表面活性剂3-40份、有机溶剂0-30份、有机硅消泡剂0-5份、去离子水5-60份。
所述的丙二醇聚氧乙烯聚氧丙烯醚中聚氧乙烯含量为10%-40%,优选为40%;所述的丙二醇聚氧乙烯聚氧丙烯醚分子量1500-4500,优选为2300-2700。
所述的羧甲基纤维素钠分子量90000-700000,优选为200000-250000。
所述的纳米固体自润滑材料为纳米级的摩擦系数较低的工程塑料,如纳米级的如下材料:聚四氟乙烯、聚缩醛、、聚苯硫醚、聚甲醛、聚酰胺、聚碳酸酯、聚砜、聚酰亚胺等。所述的固体自润滑材料乳液如二硫化钼乳液。
所述的炔二醇双子表面活性剂为炔二醇分子中加成的环氧乙烷的摩尔数为0-30,优选0-3。
所述的有机溶剂为醇醚类溶剂,如乙二醇丁醚、二乙二醇丁醚、三乙二醇丁醚、丙二醇甲醚、二丙二醇甲醚等中的一种或几种。
所述的有机硅消泡剂可以为本领域技术人员公知的各种能够消除气泡或减少气泡产生的有机硅类物质,例如,可以选自AFE-3183、AFE-0800、和TEGO Airex901W、TEGOAirex902W中一种或几种。
本发明的单晶硅棒金刚线切割液的制备方法可以将所述的丙二醇聚氧乙烯聚氧丙烯醚、羧甲基纤维素钠、纳米固体自润滑材料或固体自润滑材料乳液、炔二醇双子表面活性剂、增溶剂、有机硅消泡剂和去离子水一次性进行混合也可以分步进行混合。
相对于已公开的发明CN113549488A和CN111303981A,本发明的优异之处在于不仅具备现有切割液的良好的硅粉分散、动态润湿的性能外,含有的大分子量的羧甲基纤维素钠提供长链高分子保护膜、纳米固体自润滑材料或固体自润滑材料乳液提供纳米级别及以上的切割界面自润滑性能。长链高分子保护膜和自润滑材料能显著保护切割过程的金刚线,降低金刚线由于磨损导致的断线。
具体实施方式
以下举例具体实施例对本发明进行说明。需要指出的是,以下实施例只用于对本发明作进一步说明,不代表本发明的保护范围,其他人根据本发明的提示进行的非本质的修改和调整,仍属于本发明的保护范围。
实施例1
单晶硅棒金刚线切割液组成按重量以份数计算包括:丙二醇聚氧乙烯聚氧丙烯醚30份、羧甲基纤维素钠0.1份、纳米聚四氟乙烯0.1份、炔二醇双子表面活性剂25份、二乙二醇丁醚10份、有机硅消泡剂1份、去离子水33.8份,依次加入高剪切乳化机中,剪切乳化30分钟。
实施例2
单晶硅棒金刚线切割液组成按重量以份数计算包括:丙二醇聚氧乙烯聚氧丙烯醚35份、羧甲基纤维素钠0.2份、纳米聚碳酸酯0.2份、炔二醇双子表面活性剂28份、二丙二醇甲醚5份、有机硅消泡剂0.5份、去离子水31.1份,依次加入高剪切乳化机中,剪切乳化30分钟。
实施例3
单晶硅棒金刚线切割液组成按重量以份数计算包括:丙二醇聚氧乙烯聚氧丙烯醚40份、羧甲基纤维素钠0.5份、纳米聚四氟乙烯0.4份、炔二醇双子表面活性剂30份、有机硅消泡剂2份、去离子水27.1份,依次加入高剪切乳化机中,剪切乳化30分钟。
实施例4
单晶硅棒金刚线切割液组成按重量以份数计算包括:丙二醇聚氧乙烯聚氧丙烯醚45份、羧甲基纤维素钠0.4份、二硫化钼乳液3份、炔二醇双子表面活性剂32份、三乙二醇单丁醚5份、去离子水14.6份,依次加入高剪切乳化机中,剪切乳化30分钟。
对比实施例1
金刚线切割液按照质量份数的组成为乙醇胺硼酸酯7份、异辛醇聚氧乙烯醚磷酸酯7.5份、烷基酚聚氧乙烯醚7.5份、GPE型聚氧乙烯聚氧丙烯甘油醚2份、六聚蓖麻油酸酯25份、二乙二醇单丁醚3份、去离子水100份。
对比实施例2
一种大尺寸硅片金刚线切割液,按照总质量份数100份计,其组成为:丙二醇12份,表面活性剂六碳至八碳脂肪醇聚氧乙烯聚氧丙烯醚30份,消泡剂炔二醇聚醚13份,消泡剂GPE型聚氧乙烯聚氧丙烯甘油醚1.5份,渗透剂异构十三醇聚氧乙烯醚14份,乳化剂单甘油脂肪酸甘油酯1份,乳化剂失水山梨醇单油酸酯5份,分散剂膦酰基羧酸共聚物0.5份,防锈剂甲基苯并三氮唑0.5份,杀菌剂十二烷基三甲基氯化铵1份,依次加入搅拌釜中,搅拌25分钟,再加入余量的去离子水,混合搅拌60分钟,得到大尺寸硅片金刚线切割液。
性能测试
将实施例1-4和对比实施例1-2制备得到的切割液在青岛高测股份公司生产的的金刚线晶硅切片机GC700X、青岛高测股份公司生产的40微米金刚线和相同的切割工艺条件下进行182mm╳182mm、830mm长度的硅棒进行切割测试,关键指标测试结果参见表1所示。
Figure DEST_PATH_IMAGE002

Claims (9)

1.一种单晶硅棒金刚线切割液,其特征在于所述的单晶硅棒金刚线切割液的原料组成按重量以份数计算包括:丙二醇聚氧乙烯聚氧丙烯醚20-70份、羧甲基纤维素钠0.05-5份,纳米固体自润滑材料或固体自润滑材料乳液0.05-10份、炔二醇双子表面活性剂3-40份、有机溶剂0-30份、有机硅消泡剂0-5份、去离子水5-60份。
2.如权利要求1所述的单晶硅棒金刚线切割液,其特征在于所述的丙二醇聚氧乙烯聚氧丙烯醚中聚氧乙烯含量为10%-40%,优选为40%;所述的丙二醇聚氧乙烯聚氧丙烯醚分子量为1500-4500,优选为2300-2700。
3.如权利要求1所述的单晶硅棒金刚线切割液,其特征在于所述的羧甲基纤维素钠分子量为90000-700000,优选为200000-250000。
4.如权利要求1所述的单晶硅棒金刚线切割液,其特征在于所述的纳米固体自润滑材料为纳米级的摩擦系数较低的工程塑料,如纳米级的如下材料:聚四氟乙烯、聚缩醛、聚苯硫醚、聚甲醛、聚酰胺、聚碳酸酯、聚砜、聚酰亚胺等。
5.所述的固体自润滑材料乳液如二硫化钼乳液。
6.如权利要求1所述的单晶硅棒金刚线切割液,其特征在于所述的炔二醇双子表面活性剂为炔二醇分子中加成的环氧乙烷的摩尔数为0-30,优选0-3。
7.如权利要求1所述的单晶硅棒金刚线切割液,其特征在于所述的有机溶剂为醇醚类溶剂,如乙二醇丁醚、二乙二醇丁醚、三乙二醇丁醚、丙二醇甲醚、二丙二醇甲醚等中的一种或几种。
8. 如权利要求1所述的单晶硅棒金刚线切割液,其特征在于所述的有机硅消泡剂可以为本领域技术人员公知的各种能够消除气泡或减少气泡产生的有机硅类物质,例如,可以选自AFE-3183、AFE-0800、和TEGO Airex901W、TEGO Airex902W中一种或几种。
9.如权利要求1所述的单晶硅棒金刚线切割液,其特征在于所述的制备方法可以将所述的丙二醇聚氧乙烯聚氧丙烯醚、羧甲基纤维素钠、纳米固体自润滑材料或固体自润滑材料乳液、炔二醇双子表面活性剂、有机溶剂、有机硅消泡剂和去离子水一次性进行混合也可以分步进行混合。
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL84097A0 (en) * 1986-10-08 1988-03-31 Lubrizol Corp Sulfurized compositions and lubricants containing them
CN104342273A (zh) * 2014-09-18 2015-02-11 江西赛维Ldk太阳能高科技有限公司 一种金刚线切割多晶硅片用的冷却液
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CN113549488A (zh) * 2021-08-03 2021-10-26 江苏捷捷半导体新材料有限公司 一种大尺寸硅片金刚线切割液

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL84097A0 (en) * 1986-10-08 1988-03-31 Lubrizol Corp Sulfurized compositions and lubricants containing them
CN104342273A (zh) * 2014-09-18 2015-02-11 江西赛维Ldk太阳能高科技有限公司 一种金刚线切割多晶硅片用的冷却液
CN113430041A (zh) * 2021-06-28 2021-09-24 广州亦盛环保科技有限公司 一种水性半导体晶圆切割液及其制备方法
CN113549488A (zh) * 2021-08-03 2021-10-26 江苏捷捷半导体新材料有限公司 一种大尺寸硅片金刚线切割液

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