CN116292685B - Plane motion braking device and bonding equipment - Google Patents
Plane motion braking device and bonding equipment Download PDFInfo
- Publication number
- CN116292685B CN116292685B CN202310554898.6A CN202310554898A CN116292685B CN 116292685 B CN116292685 B CN 116292685B CN 202310554898 A CN202310554898 A CN 202310554898A CN 116292685 B CN116292685 B CN 116292685B
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- outer edge
- power device
- edge part
- pressing plate
- pressing block
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- 238000003825 pressing Methods 0.000 claims abstract description 53
- 235000014676 Phragmites communis Nutrition 0.000 claims abstract description 19
- 230000006835 compression Effects 0.000 claims abstract description 4
- 238000007906 compression Methods 0.000 claims abstract description 4
- 238000004806 packaging method and process Methods 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000003466 welding Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
- F16D65/00—Parts or details
- F16D65/02—Braking members; Mounting thereof
- F16D65/04—Bands, shoes or pads; Pivots or supporting members therefor
- F16D65/092—Bands, shoes or pads; Pivots or supporting members therefor for axially-engaging brakes, e.g. disc brakes
- F16D65/095—Pivots or supporting members therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
- F16D65/00—Parts or details
- F16D65/02—Braking members; Mounting thereof
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
- F16D65/00—Parts or details
- F16D65/14—Actuating mechanisms for brakes; Means for initiating operation at a predetermined position
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
- F16D2121/00—Type of actuator operation force
- F16D2121/02—Fluid pressure
- F16D2121/04—Fluid pressure acting on a piston-type actuator, e.g. for liquid pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
- F16D2121/00—Type of actuator operation force
- F16D2121/18—Electric or magnetic
- F16D2121/28—Electric or magnetic using electrostrictive or magnetostrictive elements, e.g. piezoelectric elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/788—Means for moving parts
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Braking Arrangements (AREA)
Abstract
The invention relates to a braking system suitable for semiconductor packaging equipment, in particular to a plane movement braking device and bonding equipment. The plane motion braking device is arranged on the XY slipway and comprises a power device with a Z-direction motion end, a power device support, a locking pressing block, a friction plate, a friction base and a reed. The power device support and the friction base are arranged at the fixed end of the XY sliding table, the friction plate is arranged at the moving end of the XY sliding table, and the reed comprises a middle part, an outer edge part positioned on the outer ring of the middle part and a connecting structure for connecting the outer edge part and the middle part; the locking pressing block penetrates through the connecting hole in the middle part; the outer edge part is fixedly connected with the power device support, and the connecting structure enables the middle part to have a Z-direction movable gap relative to the outer edge part; the Z-direction moving end of the power device moves along the Z direction to push and press the locking pressing block, so that the locking pressing block pushes and presses the friction plate along the Z direction to form compression fit with the friction base. The invention can brake without clearance, and avoid the influence of brake shaking on precision.
Description
Technical Field
The invention belongs to the technical field of machinery, relates to a braking system suitable for semiconductor packaging equipment, and particularly relates to a plane motion braking device suitable for manual and semi-automatic pressure welding bonding equipment and manual and semi-automatic die bonding or die bonding equipment.
Background
The bonding machine is a process of connecting a circuit terminal or electrode on a semiconductor chip with a metal lead frame or case terminal electrode of the assembled chip with a wire. It achieves a reliable connection between the wire and the contact point by means of ultrasound, pressure and heat. In the wire bonding process, the porcelain nozzle or the chopper guides metal wires (gold wires, copper wires or aluminum wires and the like) to do complex movement in a three-dimensional space, so as to form various wire arcs meeting the requirements of different packaging forms. On a manual wire bonding machine, these spatial movements are accomplished by an operator manually moving an XYZ motion stage with a bonding head. When an operator sees that the cutter point reaches the bonding position through a high-power microscope, the XY movement of the bonding head is required to be completely locked through a braking system, and the braking action is started by separating the contacts in the Z direction. Then the automatic pressurizing system and the ultrasonic wave act simultaneously to form a required welding spot at the point of contact of the cutting tip and the contact point.
With the high-speed development of the semiconductor packaging industry and packaging technology, chips are smaller and smaller, welding precision is higher and requirements on bonding quality are higher and higher. Fig. 1 is a schematic cross-sectional view of a conventional XY plane braking system used in a manual bonding machine, which mainly includes a solenoid having a solenoid stator 2a and a solenoid mover 2b, a frame 14, a locking press 4, a press block seat 15, and a friction plate 5. Wherein the frame 14 and the friction plate 5 are mounted on fixed and relatively moving parts, respectively, the frame 14 comprises a solenoid support for supporting a solenoid and a friction base 6 for contacting the friction plate 5. When the solenoid is energized, the solenoid mover 2b connected thereto applies a force to the locking presser 4, the locking presser 4 presses the friction plate 5, and the friction plate 5 presses the friction base 6 again, stopping the relative movement. This construction provides clearance for the compacts as they need to move within the compact holder 15. The locking press block 4 may be jammed if the gap is too small; the gap is too large, and the moving part can relatively shake after braking, so that the bonding precision and quality are affected.
Disclosure of Invention
The technical problem to be solved by the invention is to overcome the problems and provide a plane movement braking device capable of braking without gaps.
The technical scheme of the invention is as follows:
the plane movement braking device is arranged on the XY sliding table and comprises a power device with a Z-direction movement end, a power device support, a locking pressing block, a friction plate and a friction base, wherein the power device support and the friction base are arranged at the fixed end of the XY sliding table, the friction plate is arranged at the movement end of the XY sliding table, the plane movement braking device also comprises a reed, and the reed comprises a middle part, an outer edge part positioned on the outer ring of the middle part and a connecting structure for connecting the outer edge part and the middle part; the middle part is provided with a connecting hole, and the locking pressing block is fixedly penetrated in the connecting hole; the outer edge part is fixedly connected with the power device support, and the connecting structure can enable the middle part to have a Z-direction movable gap relative to the outer edge part; the Z-direction movement end of the power device moves along the Z direction to push and press the locking pressing block, so that the locking pressing block pushes and presses the friction plate along the Z direction to form compression fit with the friction base.
Through the structure, the middle part of the reed and the locking pressing block are fixed together, the outer edge part of the reed is fixed with the power device support, and due to the design of the connecting structure between the middle part of the reed and the outer edge part of the reed, the locking pressing block can perform Z-direction movement within a certain range under Z-direction pushing of the power device to realize braking, but plane movement is limited, and shaking is not generated when friction force locks a movement device, so that the effect of gapless braking is achieved.
Further, in the planar motion brake apparatus according to the present invention, the connection structure includes at least three support arms connected between the intermediate portion and the outer edge portion.
Further, in the planar motion brake device according to the present invention, the support arm extends radially outward from the intermediate portion and is curved in an arc shape.
Further, in the planar motion brake device according to the present invention, the outer edge portion has an arcuate inner edge that coincides with the arcuate outer edge portion of the support arm with an arcuate gap formed therebetween.
Further, in the planar motion brake device of the present invention, the support arms are uniformly spaced around the connection hole.
Further, in the planar motion brake device according to the present invention, the intermediate portion, the outer edge portion, and the connection structure are integrally formed.
Further, in the plane movement braking device, the locking pressing block is sleeved with the lower inner pressing plate, the middle part and the upper inner pressing plate from bottom to top in sequence and locked and fixed through nuts.
In the planar motion brake device, the planar motion brake device further comprises an upper outer pressing plate and a lower outer pressing plate, wherein the outer edge part is clamped between the upper outer pressing plate and the lower outer pressing plate and connects the power device support, the upper outer pressing plate, the outer edge part and the lower outer pressing plate into a whole through bolts.
Further, in the planar motion brake device according to the present invention, the power means is solenoid-driven or cylinder-driven.
The invention also provides bonding equipment which comprises an XY slipway, a bonding head arranged at the moving end of the XY slipway and a plane movement braking device.
The beneficial effects of the invention are as follows:
the invention adopts a unique reed structure, utilizes the middle part of the reed to be fixed with the locking pressing block, the outer edge part of the reed to be fixed with the power device support, and utilizes the connection structure of a plurality of support arms of the reed to ensure that the locking pressing block can move in a small range Z direction and limit the plane movement of the locking pressing block, thereby realizing gapless braking, avoiding shaking phenomenon during braking and obviously improving the bonding precision and quality.
The invention has ingenious design, smaller volume, simple and compact structure and low cost without installing parts such as a pressing block seat and the like.
Drawings
Fig. 1 is a schematic cross-sectional view of a conventional XY plane braking system for use in a manual bonding machine.
Fig. 2 is a schematic perspective view of a bonding apparatus having a planar motion brake device according to the present invention.
Fig. 3 is a schematic cross-sectional view of the planar motion brake apparatus of fig. 1.
Fig. 4 is a schematic view of a partial structure of the power plant of fig. 1 with the power plant mount removed.
Fig. 5 is a schematic view of a partial explosion of the planar motion brake apparatus of the present invention.
Figure 6 is a schematic view of the structure of the reed of the present invention.
Detailed Description
The invention will now be further described with reference to the accompanying drawings:
example 1
Referring to fig. 2 and 3, the planar motion brake device according to the present embodiment is disposed on an XY sliding table 1, and includes a power device 2 having a Z-direction motion end, a power device support 3, a locking pressing block 4, a friction plate 5, and a friction base 6, where the power device support 3 and the friction base 6 are mounted on a fixed end of the XY sliding table 1, and the friction plate 5 is mounted on a motion end of the XY sliding table 1. Wherein, power device 2 adopts solenoid drive, includes solenoid stator 2a and solenoid active cell 2b, and the solenoid active cell 2b can follow Z and follow the direction motion after the solenoid is circular telegram.
The plane motion braking device further comprises a reed 7, referring to fig. 3-6, the reed 7 comprises a middle part 7a, an outer edge part 7b positioned on the outer ring of the middle part 7a, and a connecting structure for connecting the outer edge part 7b and the middle part 7a, the outer edge part 7b and the connecting structure are integrally formed. The middle part 7a is provided with a connecting hole 7d, and the locking pressing block 4 is fixedly penetrated in the connecting hole 7 d; the outer edge part 7b is fixedly connected with the power device support 3, and the connecting structure can enable the middle part 7a to have a Z-direction movable gap relative to the outer edge part 7 b; the Z-direction moving end of the power device 2, namely the solenoid rotor 2b, moves along the Z direction to push the locking pressing block 4, so that the locking pressing block 4 pushes the friction plate 5 along the Z direction to form a compression fit with the friction base 6.
The connecting structure of the present embodiment includes at least three support arms 7c connected between the middle portion 7a and the outer edge portion 7b, and the support arms 7c are uniformly distributed around the connecting hole 7d at intervals. The support arm 7c may be three-piece, five-piece or the like multi-piece structure according to rigidity requirements. The supporting arm 7c extends radially from the middle part 7a and is curved in an arc shape, and the outer edge part 7b is provided with an arc inner edge which is matched with the arc outer edge part of the supporting arm 7c, and an arc gap 7e is formed between the arc inner edge and the arc inner edge.
The connection structure of the locking pressing block 4 and the middle part 7a is specifically as follows: the locking press block 4 is sequentially sleeved with the lower inner pressing plate 8, the middle part 7a and the upper inner pressing plate 9 from bottom to top and is locked and fixed through a nut 10, wherein a flange is arranged at the lower end of the locking press block 4, and the lower inner pressing plate 8, the middle part 7a and the upper inner pressing plate 9 are abutted against the flange through the nut 10 in a screwing mode to realize fixed connection.
The connection structure between the outer edge portion 7b and the power unit support 3 is specifically: the plane motion braking device further comprises an upper outer pressing plate 11 and a lower outer pressing plate 12, wherein the outer edge part 7b is clamped between the upper outer pressing plate 11 and the lower outer pressing plate 12 and connects the power device support 3, the upper outer pressing plate 11, the outer edge part 7b and the lower outer pressing plate 12 into a whole through bolts.
In the above structure, since the reed 7 has flexibility in the Z direction, the lock pressing block 4 can move in the Z direction within a certain range, but cannot move in a plane. Because of the short distance movement, the resistance is small, the locking pressing block 4 presses the friction plate 5, and the friction plate 5 transmits force to the friction base 6, so that the relative movement is stopped. Because the reed 7 limits plane movement, when friction force locks the movement device, the movement device does not shake, and the effect of gapless braking is achieved.
Example 2
This embodiment differs from embodiment 1 in that: the power device is driven by an air cylinder.
Example 3
Referring to fig. 2, a bonding apparatus includes an XY table 1 and a bonding head 13 mounted at a moving end of the XY table 1, and further includes the above-described planar motion brake device. The bonding head 13 and the friction plate 5 are arranged together, the XY plane movement can be realized through the X, Y sliding rail of the XY sliding table 1, when the plane movement braking device starts to work, the locking pressing block 4 presses the friction plate 5 to stop the relative movement between the friction plate 5 and the friction base 6, and the XY plane movement of the bonding head 13 is also locked.
The specific embodiments described herein are merely illustrative of the principles and functions of the present invention, and are not meant to limit the invention. Modifications and variations may be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the invention. It is therefore intended that all equivalent modifications and changes made by those skilled in the art without departing from the spirit and technical spirit of the present invention shall be covered by the appended claims.
Claims (7)
1. The utility model provides a plane motion arresting gear, locates on the XY slip table, including power device, power device support, locking briquetting, friction disc, the friction base that has Z to the motion end, power device support, friction base install at the stiff end of XY slip table, and the motion end at XY slip table is installed to the friction disc, its characterized in that:
the plane movement braking device also comprises a reed, wherein the reed comprises a middle part, an outer edge part positioned on the outer ring of the middle part and a connecting structure for connecting the outer edge part and the middle part; the middle part is provided with a connecting hole, and the locking pressing block is fixedly penetrated in the connecting hole; the outer edge part is fixedly connected with the power device support, and the connecting structure can enable the middle part to have a Z-direction movable gap relative to the outer edge part; the Z-direction moving end of the power device moves along the Z direction to push and press the locking pressing block, so that the locking pressing block pushes and presses the friction plate along the Z direction to form compression fit with the friction base;
the connecting structure comprises at least three supporting arms connected between the middle part and the outer edge part, the supporting arms radially extend outwards from the middle part and are bent to form an arc shape, and the outer edge part is provided with an arc inner edge which is matched with the arc outer edge part of the supporting arms, and an arc gap is formed between the arc inner edge and the arc inner edge.
2. The planar motion brake apparatus as recited in claim 1 wherein: the supporting arms are uniformly distributed around the connecting holes at intervals.
3. The planar motion brake apparatus as recited in claim 1 wherein: the middle part, the outer edge part and the connecting structure are integrally formed.
4. The planar motion brake apparatus as recited in claim 1 wherein: the locking pressing block is sequentially sleeved with the lower inner pressing plate, the middle part and the upper inner pressing plate from bottom to top and is locked and fixed through nuts.
5. The planar motion brake apparatus as recited in claim 1 wherein: the plane motion braking device further comprises an upper outer pressing plate and a lower outer pressing plate, wherein the outer edge part is clamped between the upper outer pressing plate and the lower outer pressing plate and connects the power device support, the upper outer pressing plate, the outer edge part and the lower outer pressing plate into a whole through bolts.
6. The planar motion brake apparatus as recited in claim 1 wherein: the power device is driven by a solenoid or a cylinder.
7. The utility model provides a bonding equipment, includes XY slip table and installs the bonding head at XY slip table motion end, its characterized in that: further comprising a planar motion brake apparatus as claimed in any one of claims 1 to 6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310554898.6A CN116292685B (en) | 2023-05-17 | 2023-05-17 | Plane motion braking device and bonding equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310554898.6A CN116292685B (en) | 2023-05-17 | 2023-05-17 | Plane motion braking device and bonding equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116292685A CN116292685A (en) | 2023-06-23 |
| CN116292685B true CN116292685B (en) | 2023-08-29 |
Family
ID=86781858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310554898.6A Active CN116292685B (en) | 2023-05-17 | 2023-05-17 | Plane motion braking device and bonding equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116292685B (en) |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5690132A (en) * | 1979-12-19 | 1981-07-22 | Miki Shinpura Kk | Automatic gap regulator for solenoid brake or the like |
| JPS56169339A (en) * | 1980-05-30 | 1981-12-26 | Hitachi Ltd | Table structure for ultrasonic wire bonding device |
| JPS6263228A (en) * | 1985-09-11 | 1987-03-19 | Nippon Kogaku Kk <Nikon> | Stage driving device |
| DE19958370A1 (en) * | 1998-12-03 | 2000-06-21 | Voith Turbo Kg | Compact spring assembly returns a hydraulic piston, a clutch or a brake assembly from the operational position to the stand-by position |
| JP3076035U (en) * | 2000-08-31 | 2001-03-16 | 森 榮 陳 | Brake structure in drive unit |
| CN201859856U (en) * | 2010-11-10 | 2011-06-08 | 南通富士通微电子股份有限公司 | Bonding press block device |
| CN205806252U (en) * | 2016-01-20 | 2016-12-14 | 四川瑞迪佳源机械有限公司 | A kind of torque force limiting device |
| CN211398368U (en) * | 2019-10-25 | 2020-09-01 | 浙江亚特电器有限公司 | Brake braking device of garden tool and garden tool |
| CN215680617U (en) * | 2021-04-20 | 2022-01-28 | 安徽汉先智能科技有限公司 | Motion control mechanism for wire feeding sliding table of bonding machine |
| CN115533294A (en) * | 2022-12-05 | 2022-12-30 | 宁波尚进自动化科技有限公司 | BTO automatic adjusting system and method of lead bonding machine |
| CN115863244A (en) * | 2022-11-01 | 2023-03-28 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Inter-chip lead bonding process equipment for deep cavity device |
-
2023
- 2023-05-17 CN CN202310554898.6A patent/CN116292685B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5690132A (en) * | 1979-12-19 | 1981-07-22 | Miki Shinpura Kk | Automatic gap regulator for solenoid brake or the like |
| JPS56169339A (en) * | 1980-05-30 | 1981-12-26 | Hitachi Ltd | Table structure for ultrasonic wire bonding device |
| JPS6263228A (en) * | 1985-09-11 | 1987-03-19 | Nippon Kogaku Kk <Nikon> | Stage driving device |
| DE19958370A1 (en) * | 1998-12-03 | 2000-06-21 | Voith Turbo Kg | Compact spring assembly returns a hydraulic piston, a clutch or a brake assembly from the operational position to the stand-by position |
| JP3076035U (en) * | 2000-08-31 | 2001-03-16 | 森 榮 陳 | Brake structure in drive unit |
| CN201859856U (en) * | 2010-11-10 | 2011-06-08 | 南通富士通微电子股份有限公司 | Bonding press block device |
| CN205806252U (en) * | 2016-01-20 | 2016-12-14 | 四川瑞迪佳源机械有限公司 | A kind of torque force limiting device |
| CN211398368U (en) * | 2019-10-25 | 2020-09-01 | 浙江亚特电器有限公司 | Brake braking device of garden tool and garden tool |
| CN215680617U (en) * | 2021-04-20 | 2022-01-28 | 安徽汉先智能科技有限公司 | Motion control mechanism for wire feeding sliding table of bonding machine |
| CN115863244A (en) * | 2022-11-01 | 2023-03-28 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Inter-chip lead bonding process equipment for deep cavity device |
| CN115533294A (en) * | 2022-12-05 | 2022-12-30 | 宁波尚进自动化科技有限公司 | BTO automatic adjusting system and method of lead bonding machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN116292685A (en) | 2023-06-23 |
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