CN116235637A - 在目标材料供应系统中的减压装置和方法 - Google Patents

在目标材料供应系统中的减压装置和方法 Download PDF

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Publication number
CN116235637A
CN116235637A CN202180065017.3A CN202180065017A CN116235637A CN 116235637 A CN116235637 A CN 116235637A CN 202180065017 A CN202180065017 A CN 202180065017A CN 116235637 A CN116235637 A CN 116235637A
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CN
China
Prior art keywords
target material
cavity
pressure relief
supply system
relief device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180065017.3A
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English (en)
Chinese (zh)
Inventor
R·S·卡帕迪亚
C·拉加古鲁
M·H·A·里恩德斯
S·W·科瓦尔克
G·O·瓦斯琴科
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML Holding NV
Original Assignee
ASML Holding NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML Holding NV filed Critical ASML Holding NV
Publication of CN116235637A publication Critical patent/CN116235637A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/008—X-ray radiation generated from plasma involving a beam of energy, e.g. laser or electron beam in the process of exciting the plasma

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Preparation And Processing Of Foods (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
CN202180065017.3A 2020-09-23 2021-08-24 在目标材料供应系统中的减压装置和方法 Pending CN116235637A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063082234P 2020-09-23 2020-09-23
US63/082,234 2020-09-23
PCT/EP2021/073421 WO2022063509A2 (fr) 2020-09-23 2021-08-24 Appareil et procédé de décompression dans un système d'alimentation en matériau cible

Publications (1)

Publication Number Publication Date
CN116235637A true CN116235637A (zh) 2023-06-06

Family

ID=77739053

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180065017.3A Pending CN116235637A (zh) 2020-09-23 2021-08-24 在目标材料供应系统中的减压装置和方法

Country Status (4)

Country Link
KR (1) KR20230071137A (fr)
CN (1) CN116235637A (fr)
TW (1) TW202231126A (fr)
WO (1) WO2022063509A2 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009020776B4 (de) * 2009-05-08 2011-07-28 XTREME technologies GmbH, 37077 Anordnung zur kontinuierlichen Erzeugung von flüssigem Zinn als Emittermaterial in EUV-Strahlungsquellen
FR2949840B1 (fr) * 2009-09-10 2012-03-30 Mahytec Reservoir, notamment pour gaz sous pression, et procede de fabrication
CN102791383B (zh) * 2010-01-06 2017-11-14 恩特格里斯公司 具有除气和感测能力的液体分配系统

Also Published As

Publication number Publication date
KR20230071137A (ko) 2023-05-23
WO2022063509A2 (fr) 2022-03-31
WO2022063509A3 (fr) 2022-05-05
TW202231126A (zh) 2022-08-01

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