CN116174416A - 一种半导体工厂通风管道清理装置 - Google Patents
一种半导体工厂通风管道清理装置 Download PDFInfo
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- CN116174416A CN116174416A CN202310050296.7A CN202310050296A CN116174416A CN 116174416 A CN116174416 A CN 116174416A CN 202310050296 A CN202310050296 A CN 202310050296A CN 116174416 A CN116174416 A CN 116174416A
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- 238000004140 cleaning Methods 0.000 title claims abstract description 90
- 238000009423 ventilation Methods 0.000 title claims abstract description 32
- 239000004065 semiconductor Substances 0.000 title claims abstract description 18
- 239000000428 dust Substances 0.000 claims abstract description 42
- 239000012535 impurity Substances 0.000 claims abstract description 40
- 230000007246 mechanism Effects 0.000 claims abstract description 21
- 238000007790 scraping Methods 0.000 claims description 53
- 230000000149 penetrating effect Effects 0.000 claims description 11
- 238000000034 method Methods 0.000 description 17
- 230000008569 process Effects 0.000 description 14
- 230000000694 effects Effects 0.000 description 6
- 230000009286 beneficial effect Effects 0.000 description 5
- 230000010405 clearance mechanism Effects 0.000 description 5
- 230000009471 action Effects 0.000 description 3
- 238000004378 air conditioning Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910000746 Structural steel Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/04—Cleaning the internal surfaces; Removal of blockages using cleaning devices introduced into and moved along the pipes
- B08B9/043—Cleaning the internal surfaces; Removal of blockages using cleaning devices introduced into and moved along the pipes moved by externally powered mechanical linkage, e.g. pushed or drawn through the pipes
- B08B9/045—Cleaning the internal surfaces; Removal of blockages using cleaning devices introduced into and moved along the pipes moved by externally powered mechanical linkage, e.g. pushed or drawn through the pipes the cleaning devices being rotated while moved, e.g. flexible rotating shaft or "snake"
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/04—Cleaning the internal surfaces; Removal of blockages using cleaning devices introduced into and moved along the pipes
- B08B9/043—Cleaning the internal surfaces; Removal of blockages using cleaning devices introduced into and moved along the pipes moved by externally powered mechanical linkage, e.g. pushed or drawn through the pipes
- B08B9/0436—Cleaning the internal surfaces; Removal of blockages using cleaning devices introduced into and moved along the pipes moved by externally powered mechanical linkage, e.g. pushed or drawn through the pipes provided with mechanical cleaning tools, e.g. scrapers, with or without additional fluid jets
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
- Y02A50/2351—Atmospheric particulate matter [PM], e.g. carbon smoke microparticles, smog, aerosol particles, dust
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Cleaning In General (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202310050296.7A CN116174416B (zh) | 2023-02-01 | 2023-02-01 | 一种半导体工厂通风管道清理装置 |
Applications Claiming Priority (1)
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CN202310050296.7A CN116174416B (zh) | 2023-02-01 | 2023-02-01 | 一种半导体工厂通风管道清理装置 |
Publications (2)
Publication Number | Publication Date |
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CN116174416A true CN116174416A (zh) | 2023-05-30 |
CN116174416B CN116174416B (zh) | 2024-05-03 |
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CN202310050296.7A Active CN116174416B (zh) | 2023-02-01 | 2023-02-01 | 一种半导体工厂通风管道清理装置 |
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CN (1) | CN116174416B (zh) |
Citations (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3473944A1 (en) * | 2017-10-20 | 2019-04-24 | Linyi Jigang Agricultural Technology Co., Ltd. | Air purification apparatus for indoor window vent |
CN210832458U (zh) * | 2019-11-05 | 2020-06-23 | 陕西百世恒智能科技发展有限公司 | 一种新型净化设备中的高效过滤风口 |
CN212091398U (zh) * | 2020-04-29 | 2020-12-08 | 吴江得胜鑫净化设备有限公司 | 一种新型无尘室风机模块 |
CN212720125U (zh) * | 2020-08-17 | 2021-03-16 | 宁康炎 | 一种用于生产车间的智能通风装置 |
CN212960425U (zh) * | 2020-07-20 | 2021-04-13 | 青岛碧蓝环保科技工程有限公司 | 一种废气处理用螺旋风管 |
CN213942418U (zh) * | 2020-11-30 | 2021-08-13 | 许昌学院 | 一种绿色建筑通风口过滤装置 |
CN214665000U (zh) * | 2020-12-30 | 2021-11-09 | 苏州市苏沁净化科技有限公司 | 一种无尘车间快速除尘通风装置 |
CN215336807U (zh) * | 2021-06-25 | 2021-12-28 | 江苏嘉合建设有限公司 | 一种洁净室用新风换气系统 |
CN215672902U (zh) * | 2021-05-18 | 2022-01-28 | 黄石精展机电设备有限公司 | 一种燃气炉引风机空气滤清器装置 |
CN216481435U (zh) * | 2021-12-07 | 2022-05-10 | 华能南京燃机发电有限公司 | 一种用于燃机发电厂的安全通风装置 |
CN216620126U (zh) * | 2021-12-14 | 2022-05-27 | 山东三庆环境科技有限公司 | 一种具有过滤功能的通风管道 |
CN216844985U (zh) * | 2021-11-15 | 2022-06-28 | 广东豪龙建设有限公司 | 一种用于房建工程建筑的通风装置 |
CN114669139A (zh) * | 2022-05-25 | 2022-06-28 | 宝嘉智能科技(南通)有限公司 | 一种自清洁空气换气装置 |
CN217001935U (zh) * | 2022-03-22 | 2022-07-19 | 李学科 | 一种轨道交通地铁建设用通风装置 |
CN217154510U (zh) * | 2021-10-21 | 2022-08-09 | 广东行峰冷热设备有限公司 | 一种机房专用精密空调回风通道 |
CN217274660U (zh) * | 2021-12-24 | 2022-08-23 | 广州市羿资互联网科技有限公司 | 一种数据中心用具有净化功能的通风装置 |
CN115445334A (zh) * | 2022-07-28 | 2022-12-09 | 中润环保科技(南通)有限公司 | 一种具有自清洁功能的除尘器 |
CN218033527U (zh) * | 2022-08-21 | 2022-12-13 | 珠海市创健空调工程有限公司 | 一种空调通风系统中的自动清洁过滤装置 |
-
2023
- 2023-02-01 CN CN202310050296.7A patent/CN116174416B/zh active Active
Patent Citations (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3473944A1 (en) * | 2017-10-20 | 2019-04-24 | Linyi Jigang Agricultural Technology Co., Ltd. | Air purification apparatus for indoor window vent |
CN210832458U (zh) * | 2019-11-05 | 2020-06-23 | 陕西百世恒智能科技发展有限公司 | 一种新型净化设备中的高效过滤风口 |
CN212091398U (zh) * | 2020-04-29 | 2020-12-08 | 吴江得胜鑫净化设备有限公司 | 一种新型无尘室风机模块 |
CN212960425U (zh) * | 2020-07-20 | 2021-04-13 | 青岛碧蓝环保科技工程有限公司 | 一种废气处理用螺旋风管 |
CN212720125U (zh) * | 2020-08-17 | 2021-03-16 | 宁康炎 | 一种用于生产车间的智能通风装置 |
CN213942418U (zh) * | 2020-11-30 | 2021-08-13 | 许昌学院 | 一种绿色建筑通风口过滤装置 |
CN214665000U (zh) * | 2020-12-30 | 2021-11-09 | 苏州市苏沁净化科技有限公司 | 一种无尘车间快速除尘通风装置 |
CN215672902U (zh) * | 2021-05-18 | 2022-01-28 | 黄石精展机电设备有限公司 | 一种燃气炉引风机空气滤清器装置 |
CN215336807U (zh) * | 2021-06-25 | 2021-12-28 | 江苏嘉合建设有限公司 | 一种洁净室用新风换气系统 |
CN217154510U (zh) * | 2021-10-21 | 2022-08-09 | 广东行峰冷热设备有限公司 | 一种机房专用精密空调回风通道 |
CN216844985U (zh) * | 2021-11-15 | 2022-06-28 | 广东豪龙建设有限公司 | 一种用于房建工程建筑的通风装置 |
CN216481435U (zh) * | 2021-12-07 | 2022-05-10 | 华能南京燃机发电有限公司 | 一种用于燃机发电厂的安全通风装置 |
CN216620126U (zh) * | 2021-12-14 | 2022-05-27 | 山东三庆环境科技有限公司 | 一种具有过滤功能的通风管道 |
CN217274660U (zh) * | 2021-12-24 | 2022-08-23 | 广州市羿资互联网科技有限公司 | 一种数据中心用具有净化功能的通风装置 |
CN217001935U (zh) * | 2022-03-22 | 2022-07-19 | 李学科 | 一种轨道交通地铁建设用通风装置 |
CN114669139A (zh) * | 2022-05-25 | 2022-06-28 | 宝嘉智能科技(南通)有限公司 | 一种自清洁空气换气装置 |
CN115445334A (zh) * | 2022-07-28 | 2022-12-09 | 中润环保科技(南通)有限公司 | 一种具有自清洁功能的除尘器 |
CN218033527U (zh) * | 2022-08-21 | 2022-12-13 | 珠海市创健空调工程有限公司 | 一种空调通风系统中的自动清洁过滤装置 |
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CN116174416B (zh) | 2024-05-03 |
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TA01 | Transfer of patent application right |
Effective date of registration: 20240328 Address after: No. 55, Tiyu Road, East the Taihu Lake Lake Ecological Tourism Resort (the Taihu Lake New Town), Wujiang District, Suzhou City, Jiangsu Province, 215200 Applicant after: Suzhou Zhanchu Precision Technology Co.,Ltd. Country or region after: China Address before: 226000 south of Qiantangjiang road and east of Nanhai Road, tongzhouwan demonstration zone, Nantong City, Jiangsu Province Applicant before: Jiangsu Chenda Semiconductor Technology Co.,Ltd. Country or region before: China |
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Effective date of registration: 20240509 Address after: No. 99, Group 1, Liuji Village, Baidian Town, Hai'an City, Nantong City, Jiangsu Province, 226000 Patentee after: Nantong Haozhan Environmental Protection Technology Co.,Ltd. Country or region after: China Address before: No. 55, Tiyu Road, East the Taihu Lake Lake Ecological Tourism Resort (the Taihu Lake New Town), Wujiang District, Suzhou City, Jiangsu Province, 215200 Patentee before: Suzhou Zhanchu Precision Technology Co.,Ltd. Country or region before: China |
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