CN116165472B - Low-temperature probe test equipment - Google Patents

Abstract

The application relates to the field of temperature testing technology, in particular to low-temperature probe testing equipment, which comprises a vacuum bin, a bearing mechanism, a probe mechanism, an observation mechanism and an adjusting mechanism; the vacuum bin, the probe mechanism and the observation mechanism are all arranged on the upper surface of the bearing mechanism; the vacuum bin is provided with a first through hole; an isolation pipe is arranged on the periphery side of the probe mechanism, the isolation pipe covers the first through hole, a shielding bin is arranged in the vacuum bin, a second through hole is formed in the shielding bin, and then a sample table is arranged in the shielding bin; the refrigerator is installed to the loading mechanism, and refrigerator periphery side partial cladding has the extension pipe, and refrigerator upper surface is connected with the copper platform, sets up first flexible copper bar between copper platform and the sample platform, and vacuum storehouse upper surface is provided with the observation hole, and observation mechanism observes the sample through the observation hole, and adjustment mechanism sets up in one side of loading mechanism, is used for control vacuum state and the control of vacuum storehouse the inside temperature of vacuum storehouse, this application can improve the accurate degree of testing result.

Description

Low-temperature probe test equipment

Technical Field

The application relates to the field of temperature testing technology, in particular to low-temperature probe testing equipment.

Background

At present, with the development of aerospace technology, some high-reliability and high-performance semiconductor devices, especially core aerospace devices, have become an important mark for measuring the technical level of aerospace technology, wherein in order to ensure that device materials can withstand severe environments such as cold, heat and vacuum in space, the devices need to be used normally in severe environments, and the devices need to have low-temperature and high-temperature resistance.

Thus, in order to observe the operation of the device at low temperatures, for example: whether the electronic parameters of the equipment are stable at high temperature or low temperature can be determined by placing the device with the corresponding equipment into a low temperature laboratory, simulating the low temperature state, and reading the electronic parameters of the device.

However, in the low-temperature experiment, heat conduction may occur, so that the temperature cannot obtain an ideal value, and thus deviation of the experimental result occurs, which greatly influences the accuracy of the test result.

Disclosure of Invention

In order to improve the stability of temperature and thus the accuracy of test results, the application provides a low-temperature probe test device.

The application provides a low temperature probe test equipment adopts following technical scheme:

a low-temperature probe testing device comprises a vacuum bin, a bearing mechanism, a probe mechanism, an observation mechanism and an adjusting mechanism; the vacuum bin is arranged on the upper surface of the bearing mechanism; the probe mechanism is arranged on the upper surface of the bearing mechanism; the probe mechanism is arranged outside the vacuum bin; the outer peripheral side of the vacuum bin is provided with a first through hole for the probe mechanism to pass through; an isolation tube is arranged on the outer periphery of the probe mechanism; the isolation tube covers the first through hole; the isolating pipe is communicated with the probe mechanism and the vacuum bin; a shielding bin is arranged in the vacuum bin; the outer peripheral side of the shielding bin is provided with a second through hole for the probe mechanism to pass through; a sample table is arranged in the shielding bin; the probe mechanism is used for detecting a sample placed on the sample stage; the bearing mechanism is provided with a refrigerating device; an extension tube is partially coated on the periphery side of the refrigerating device; one end of the extension pipe is communicated with the vacuum bin, and the other end of the extension pipe is connected with the refrigerating device; the upper surface of the refrigerating device is connected with a copper table; a plurality of first flexible copper strips are arranged between the copper table and the sample table; one end of the first flexible copper bar is connected to the upper surface of the copper table, and the other end of the first flexible copper bar is connected to the lower surface of the sample table; an observation hole is formed in the upper surface of the vacuum bin; the observation hole is covered with an observation mirror; the observation mechanism is arranged on the upper surface of the bearing mechanism; the observation mechanism observes the inside of the vacuum bin through the observation hole; the adjusting mechanism is arranged on one side of the bearing mechanism; the adjusting mechanism is communicated with the extension pipe; the adjusting mechanism is used for controlling the vacuum state of the vacuum bin and controlling the temperature inside the vacuum bin.

By adopting the technical scheme, when a worker uses the low-temperature probe test equipment, a sample is placed on the upper surface of the sample table, then the probe mechanism abuts against the sample, various parameters of the sample can be rapidly detected after the power is on, a vacuum space is formed by the vacuum bin, the shielding bin and the extension pipe, the worker starts the adjusting mechanism to extract air to form the vacuum space, the stability of the temperature inside the vacuum bin can be effectively enhanced by the vacuum environment, and the detection accuracy is improved; and set up first flexible copper bar and connect sample platform and copper platform, can effectively reduce the possibility that the sample platform shakes, improve the stability that the sample was placed in the sample platform to improve the accurate degree that detects, then the staff can use observation mechanism to observe whether the position of placing of sample is accurate through the observation hole, improve the accuracy nature that detects.

Preferably, the refrigerating device comprises a first refrigerating part and a second refrigerating part; the upper surface of the first refrigerating part is connected to the copper table; the second refrigerating part is connected with a second flexible copper bar; one end of the second flexible copper strip is connected to the second refrigerating part, and the other end of the second flexible copper strip is connected to the inner side wall of the shielding bin.

Through adopting above-mentioned technical scheme, first refrigeration portion can keep the stability of copper platform temperature through first flexible copper bar to reduce the sample and lead to the inaccurate possibility of testing result because the temperature difference, then second refrigeration portion keeps the stability of shielding storehouse temperature through the flexible copper bar of second, thereby reduce the possibility that the temperature difference is too big outside in the shielding storehouse influences the accurate degree of detection.

Preferably, the probe mechanism comprises a probe arm, an adjusting member for adjusting the position of the probe mechanism and a probe member for detecting an electrical signal; one end of the probe arm is connected with the probe piece, and the other end of the probe arm is connected with the adjusting piece; the isolation tube is provided with extensibility; one end of the isolation pipe is connected with the adjusting piece, and the other end of the isolation pipe covers the first through hole.

By adopting the technical scheme, when a worker places a sample on the sample table, the worker can adjust the position of the probe arm through the adjusting piece, so that the probe arm drives the probe piece to move, the stability of the probe piece against the sample is improved, and the accuracy of a detection result is improved; and then the isolation tube is provided with extensibility, so that the tightness of the isolation tube is kept when the probe arm moves, and the stability of normal use of the equipment is improved.

Preferably, the probe piece is connected with a third flexible copper bar; the third flexible copper strip passes through the first through hole and the second through hole; and one end of the third flexible copper strip is connected with the probe piece, and the other end of the third flexible copper strip is connected with the inner side wall of the shielding bin.

Through adopting above-mentioned technical scheme, when keeping vacuum state in the vacuum storehouse, the third flexible copper bar can keep shielding storehouse and probe spare temperature's stability to thereby reduce probe spare and sample temperature difference too big and thereby detect the inaccurate possibility of result.

Preferably, the viewing mechanism comprises a viewing member and an adjustment assembly; the adjusting assembly comprises a first fine adjusting piece, a second fine adjusting piece and a base; the base is arranged on the upper surface of the bearing mechanism; the base is rotatably provided with a supporting rod; the first fine tuning piece is sleeved on the supporting rod; an adjusting rod is vertically arranged on one side, away from the supporting rod, of the first fine tuning piece; the second fine tuning piece is sleeved on the adjusting rod; a locking piece is arranged between the second fine tuning piece and the adjusting rod and used for fastening or releasing the second fine tuning piece; the first fine tuning piece is used for controlling the adjusting rod to move along the horizontal direction; one side of the second fine tuning piece, which is far away from the adjusting rod, is connected with the observation piece.

Through adopting above-mentioned technical scheme, when the staff places the sample in the sample platform, the staff passes through rotatory bracing piece, the bracing piece drives first fine setting spare and rotates, first fine setting spare drives the second fine setting spare through adjusting the pole and rotates, the second fine setting spare drives the top that observes the piece and remove to the observation hole, and make the second fine setting spare remove along the horizontal direction through adjusting first fine setting spare, make the axial movement of observing the piece along adjusting the pole through adjusting the second fine setting spare, move along vertical direction promptly, through the mutually supporting of first fine setting spare and second fine setting spare, can effectively adjust the accuracy of observing the piece and observe the sample, thereby improve the accuracy degree of testing result is improved to the accuracy that the sample was placed.

Preferably, a limiting piece is arranged at the top end of the adjusting rod; the limiting piece is positioned above the sleeving part of the second fine tuning piece and the adjusting rod; and a bump is arranged on the outer peripheral side of the second fine tuning piece.

By adopting the technical scheme, the limit part is arranged, so that the possibility that the second fine tuning part is pushed away from the adjusting rod can be effectively reduced, and the stability of normal use of the equipment is improved; the setting lug is convenient for the staff's hand to hold the lug thereby the staff can the quick adjustment second micromatic setting spare, labour saving and time saving improves adjustment efficiency.

Preferably, the bearing mechanism comprises a bearing table; the upper surface of the bearing table is provided with a damping plate; the probe mechanism, the vacuum bin and the observation mechanism are all arranged on the upper surface of the damping plate; an air bag is arranged between the damping plate and the bearing table; the bearing table is provided with a damping part; the damping part is arranged around the extension pipe.

Through adopting above-mentioned technical scheme, set up the gasbag between shock attenuation board and plummer, can effectively strengthen shock resistance of shock attenuation board to reduce the bearing mechanism and conduct the shock to the vacuum storehouse inside to the possibility that the sample platform shakes, improve the stability that the sample was placed, thereby reduce the possibility that the sample takes place to slide and improve the accurate degree of testing result; the setting cushioning member encircles extension pipe, thereby can further reduce the extension pipe vibrations sample platform vibrations's possibility, improve the stability that the sample was placed, thereby reduce the sample and take place the possibility that slides and improve the accurate degree of testing result.

Preferably, a damping bracket is arranged in the bearing table; the upper end of the damping support is connected with the extension pipe; the balancing weight is detachably arranged at the bottom of the cushioning support.

Through adopting above-mentioned technical scheme, set up the bradyseism support and the bradyseism support bottom is installed the balancing weight, can further reduce the extension pipe with vibrations conduction to the possibility of sample platform, thereby improve the stability that the sample was placed, reduce the sample and take place the possibility of sliding and thereby improve the accuracy degree of testing result.

Preferably, an aluminum nitride interlayer is arranged on the upper surface of the sample table; the sample stage is provided with a sample clamp for fixing a sample.

By adopting the technical scheme, the aluminum nitride has good conductivity, so that the probe measurement is helped to be assisted when the electronic signal of the device is measured.

Preferably, the upper surface of the shielding bin is provided with a third through hole; the third through hole and the observation hole are coaxially arranged; the third through hole is covered with a radiation-proof layer; the radiation protection layer is used for blocking sunlight from entering the shielding bin.

Through adopting above-mentioned technical scheme, set up the radiation protection layer, can enough keep the staff to observe the accuracy nature of sample position through the third through hole, also can reduce outside heat conduction to shielding storehouse inside possibility, thereby improve the stability of shielding storehouse inside temperature and improve the accuracy nature of testing result.

In summary, the present application includes at least one of the following beneficial technical effects:

1. when a worker uses the low-temperature probe test equipment, a sample is placed on the upper surface of the sample table, then the probe mechanism abuts against the sample, various parameters of the sample can be rapidly detected after the power is on, a vacuum space is formed by the vacuum bin, the shielding bin and the extension pipe, the worker starts the adjusting mechanism to extract air to form the vacuum space, the stability of the temperature inside the vacuum bin can be effectively enhanced by the vacuum environment, and the detection accuracy is improved; the first flexible copper bar is arranged to connect the sample table and the copper table, so that the possibility of vibration of the sample table can be effectively reduced, the stability of the sample placed on the sample table is improved, the accuracy of detection is improved, and then a worker can observe whether the placement position of the sample is accurate or not through the observation hole by using the observation mechanism, and the accuracy of detection is improved;

2. the first refrigerating part can keep the stability of the temperature of the copper table through the first flexible copper bar, so that the possibility that a detection result is inaccurate due to temperature difference of a sample is reduced, and then the second refrigerating part keeps the stability of the temperature of the shielding bin through the second flexible copper bar, so that the possibility that the temperature difference between the inside and the outside of the shielding bin is overlarge, and the detection accuracy degree is influenced is reduced;

3. when a worker places a sample on the sample table, the worker can adjust the position of the probe arm through the adjusting piece, so that the probe arm drives the probe piece to move, the stability of the probe piece against the sample is improved, and the accuracy of a detection result is improved; and then the isolation tube is provided with extensibility, so that the tightness of the isolation tube is kept when the probe arm moves, and the stability of normal use of the equipment is improved.

Drawings

Fig. 1 is a schematic structural view of an embodiment of the present application.

Fig. 2 is a cross-sectional view of an embodiment of the present application.

Fig. 3 is an enlarged view of a in fig. 2.

Fig. 4 is a schematic structural view of a probe mechanism in an embodiment of the present application.

Fig. 5 is a mounting structure of a mounting table in an embodiment of the present application.

Fig. 6 is a schematic structural view of an adjusting member in the embodiment of the present application.

Fig. 7 is a schematic structural view of a curtain according to an embodiment of the present application.

Fig. 8 is a schematic structural view of the observation mechanism in the embodiment of the present application.

Fig. 9 is a schematic structural view of the observation member in the embodiment of the present application.

Reference numerals illustrate:

1. a vacuum bin; 11. a first through hole; 12. a shielding bin; 121. a second through hole; 122. a sample stage; 1221. an aluminum nitride interlayer; 1222. a sample holder; 123. a third through hole; 1231. a radiation protection layer; 124. a curtain; 1241. a first penetrating unit; 1242. a second penetrating unit; 13. an observation hole; 131. an observation mirror;

2. a carrying mechanism; 21. a refrigerating device; 211. a first refrigerating unit; 212. a second refrigerating unit; 2121. a second flexible copper strip; 22. extending the tube; 23. a copper stand; 231. a first flexible copper strip; 24. a carrying platform; 241. a shock absorbing plate; 242. an air bag; 243. a damping member; 244. a shock absorption bracket; 245. balancing weight; 2451. a first weight member; 2452. a second weight member;

3. a probe mechanism; 31. an isolation tube; 32. a probe arm; 33. an adjusting member; 331. a first adjusting lever; 332. a first mounting member; 333. a first adjustment block; 334. a first linkage member; 34. a probe member; 341. a third flexible copper strip; 35. a mounting table;

4. an observation mechanism; 41. an observation member; 411. observing the main body; 412. a light supplementing member; 42. an adjustment assembly; 421. a first trimming member; 422. a second trimming member; 423. a base; 424. a support rod; 425. an adjusting rod; 426. a locking member; 427. a limiting piece; 428. a bump;

5. an adjusting mechanism; 51. the cabinet is installed in a suction mode; 52. an air extraction motor; 53. an air extracting pump; 54. an exhaust pipe; 55. a weighting assembly; 551. a first accommodation block; 552. a second accommodation block; 553. a load-bearing rod; 554. and (5) weighting the block.

Detailed Description

The present application is described in further detail below in conjunction with figures 1-9.

The embodiment of the application discloses low-temperature probe testing equipment.

Referring to fig. 1 and 2, a low temperature probe test apparatus includes a vacuum chamber 1, a carrying mechanism 2, a probe mechanism 3, an observation mechanism 4, and an adjustment mechanism 5; in this application embodiment, vacuum chamber 1, probe mechanism 3, observation mechanism 4 all install with bear 2 upper surfaces of mechanism, and probe mechanism 3 sets up in vacuum chamber 1 outside, and vacuum chamber 1 inside is provided with shielding storehouse 12 to vacuum chamber 1 periphery side is provided with first through-hole 11, shielding storehouse 12 periphery side be provided with first through-hole 11 matched second through-hole 121, thereby probe mechanism 3 can get into shielding storehouse 12 inside through first through-hole 11 and second through-hole 121.

Referring to fig. 1, in the embodiment of the present application, the vacuum chamber 1 adopts a cylindrical shape, and the first through holes 11 and the second through holes 121 are all provided with 4, so that the probe mechanisms 3 can also be provided with 4 groups, and of course, the probe mechanisms 3 can also be provided with 6 groups, and the 6 groups of probe mechanisms 3 are uniformly distributed along the circumferential direction of the center of the vacuum chamber 1.

Referring to fig. 2 and 3, the shielding bin 12 is internally provided with a sample stage 122, an aluminum nitride interlayer 1221 is disposed on the upper surface of the sample stage 122, and the sample stage 122 is provided with a sample clamp 1222, when a sample is placed on the aluminum nitride interlayer 1221, the sample clamp 1222 can firmly clamp the sample, and the possibility of sample slipping can be effectively reduced by the mutual cooperation of the sample clamp 1222 and the aluminum nitride interlayer 1221, in the embodiment of the application, the sample clamps 1222 are arranged in three groups, the three groups of sample clamps 1222 are circumferentially distributed along the center of the sample stage 122, and an included angle of 120 ° is formed between two adjacent groups of sample clamps 1222, so that the sample can be stably placed on the aluminum nitride interlayer 1221.

Referring to fig. 4, the outer circumference side of the probe mechanism 3 is provided with an isolation tube 31, the isolation tube 31 covers the first through hole 11 and is far away from the one side opening of the shielding bin 12, and the isolation tube 31 has certain extensibility, the user is convenient for adjust the position of the probe mechanism 3, thereby the probe mechanism 3 can stably detect the condition of a sample, the accuracy degree of detection is improved, then the isolation tube 31 is communicated with the probe mechanism 3 and the vacuum bin 1, the bearing mechanism 2 is provided with a refrigerating device 21, the outer circumference side of the refrigerating device 21 is partially coated with an extension tube 22, one end of the extension tube 22 is communicated with the vacuum bin 1, and the other end is connected with the refrigerating device 21, so that the probe mechanism 3, the vacuum bin 1, the shielding bin 12 and the extension tube 22 form a vacuum space, the stability of the internal temperature is improved, and the accuracy degree of a detection test result is further improved.

Referring to fig. 2, the refrigerating device 21 includes a first refrigerating portion 211 and a second refrigerating portion 212, the upper end of the first refrigerating portion 211 is connected with a copper table 23, a plurality of first flexible copper bars 231 are arranged between the copper table 23 and the sample table 122, one end of each first flexible copper bar 231 is connected to the upper surface of the copper table 23, the other end of each first flexible copper bar 231 is connected to the lower surface of the sample table 122, and the first flexible copper bars 231 are arranged, so that on one hand, the shock resistance of the sample table 122 can be enhanced, the possibility that a sample is offset on the sample table 122 is reduced, on the other hand, copper has better temperature conduction performance, the temperature of the sample table 122 can be kept consistent with the temperature in the vacuum bin 1, the possibility that the temperature deviation is caused to be inaccurate in test results is reduced, and the accuracy degree of the detection result is improved; the second cooling part 212 is connected with the flexible copper bar 2121 of second, and flexible copper bar 2121 one end is connected in second cooling part 212, and the other end is connected in shielding storehouse 12 inside wall, can strengthen the stability of vacuum storehouse 1 inside temperature, reduces the possibility that inside and outside difference in temperature reduces the accurate degree of testing result, improves the accuracy nature of low temperature probe test equipment testing result.

Referring to fig. 2 and 3, the upper surface of the vacuum chamber 1 is in an inverted cone shape, and the upper surface of the vacuum chamber 1 is provided with an observation hole 13, the observation hole 13 is covered with an observation mirror 131, the upper surface of the shielding chamber 12 is provided with a third through hole 123, the third through hole 123 is coaxially arranged with the observation hole 13, then the diameter of the third through hole 123 is larger than that of the observation hole 13, the third through hole 123 is covered with a radiation protection layer 1231, the radiation protection layer 1231 is used for blocking sunlight from entering the inside of the shielding chamber 12, the observation mechanism 4 is installed on the upper surface of the bearing mechanism 2, and a user can observe the state of a sample through the observation hole 13 by using the observation mechanism 4.

Referring to fig. 1, an adjusting mechanism 5 is disposed at one side of the carrying mechanism 2, and the adjusting mechanism 5 is communicated with the extension pipe 22; the adjusting mechanism 5 is used for controlling the vacuum state of the vacuum chamber 1 and controlling the temperature inside the vacuum chamber 1.

Referring to fig. 3 and 5, the probe mechanism 3 includes a probe arm 32, an adjusting member 33 for adjusting the position of the probe mechanism 3, and a probe member 34 for detecting an electrical signal, one end of the probe arm 32 is connected to the probe member 34, and the other end is connected to the adjusting member 33, and when a user uses the low temperature probe test apparatus, the adjusting member 33 can adjust the position of the probe member 34 through the probe arm 32, so that the probe member 34 can accurately test data of a sample, improving the accuracy of a detection result; then the isolation tube 31 cladding probe arm 32 and partial probe 34, isolation tube 31 one end intercommunication regulating part 33, the other end cover first through-hole 11 opening can effectively strengthen the airtight degree in vacuum space, improves the stability of temperature, and then the accuracy nature of reinforcing detection.

Referring to fig. 2 and 5, the probe member 34 is connected with a third flexible copper bar 341, the third flexible copper bar 341 passes through the first through hole 11 and the second through hole 121, one end of the third flexible copper bar 341 is connected to the probe member 34, and the other end is connected to the inner side wall of the shielding bin 12, so that the temperature of the probe member 34 can be kept stable, and the accuracy of detection is improved.

Referring to fig. 5 and 6, the adjusting member 33 is internally provided with a mounting table 35, and the probe arm 32 is fixedly provided at one end of the mounting table 35, so that the adjusting member 33 can adjust the position of the probe arm 32, and the insulating tube 31 can be a bellows, thereby fixing one end of the insulating tube 31 and the other end thereof can move and maintain sealing; the adjusting pieces 33 are provided with three groups, the three groups of adjusting pieces 33 are respectively provided with a first adjusting piece, a second adjusting piece and a third adjusting piece, wherein the first adjusting piece is vertically arranged, the second adjusting piece is horizontally and transversely arranged, and the third adjusting piece is horizontally and longitudinally arranged; the third adjusting piece is arranged on the bearing mechanism 2, the second adjusting piece is arranged above the third adjusting piece, the first adjusting piece is arranged on one side of the second adjusting piece, which faces the probe arm 32, and the first adjusting piece is connected with the probe arm 32; the first adjusting piece includes first adjusting lever 331, first installation piece 332, first regulating block 333 and first linkage piece 334, specifically, first adjusting lever 331 wears to locate first installation piece 332, first adjusting lever 331 is worn to locate by first regulating block 333, first adjusting lever 331 and first regulating block 333 threaded connection, first regulating block 333 passes through bolt fixed connection with first linkage piece 334 to the realization is through the position of rotating first adjusting lever 331 control first regulating block 333 on first adjusting lever 331, and then the position of control first linkage piece 334 and probe arm 32, threaded connection can improve the precision of adjusting.

Referring to fig. 2 and 7, the second through hole 121 is covered with a shielding curtain 124, the probe arm 32 directs the probe 34 to the sample through the shielding curtain 124, the shielding curtain 124 is provided with a first penetrating unit 1241 and a second penetrating unit 1242, the first penetrating unit 1241 is horizontally placed for maintaining the heat insulation effect and reducing the loss of materials, the first penetrating unit 1241 is provided with a plurality of groups, the second penetrating unit 1242 is vertically placed, the second penetrating unit 1242 is provided with a plurality of groups, and the first penetrating unit 1241 is communicated with the second penetrating unit 1242. The probe arm 32 can adjust the position of the probe 34 according to the first penetrating unit 1241 and the second penetrating unit 1242 at different positions to adapt the position of the sample.

Referring to fig. 1 and 8, in this embodiment, in order to observe the condition of a sample, the device further includes an observation mechanism 4, wherein the observation mechanism 4 includes an observation member 41 and an adjustment assembly 42, the adjustment assembly 42 includes a first trimming member 421, a second trimming member 422 and a base 423, the base 423 is mounted on the upper surface of the carrying mechanism 2, the base 423 is rotatably mounted with a supporting rod 424, the first trimming member 421 is sleeved on the supporting rod 424, then one side of the first trimming member 421 away from the supporting rod 424 is vertically mounted with an adjusting rod 425, the second trimming member 422 is sleeved on the adjusting rod 425, a locking member 426 is disposed between the second trimming member 422 and the adjusting rod 425, in this embodiment, the locking member 426 is a bolt, so as to facilitate rapid locking or releasing of the second trimming member 422, the first trimming member 421 is used for controlling the adjusting rod 425 to move along the horizontal direction, and one side of the second trimming member 422 away from the adjusting rod 425 is connected with the observation member 41.

Referring to fig. 9, the observation member 41 includes an observation main body 411 having a focusing function and a light supplementing member 412, wherein one end of the light supplementing member 412 is fixedly provided on a side housing of the observation main body 411, so that illumination brightness can be provided during an observation process, thereby facilitating the observation of the observation main body 411 through the observation hole 13.

Referring to fig. 9, a limiting member 427 is disposed at the top end of the adjusting rod 425, the limiting member 427 is disposed above the sleeving part of the second fine tuning member 422 and the adjusting rod 425, a protrusion 428 is disposed at the outer periphery of the second fine tuning member 422, the protrusion 428 is convenient for a user to quickly adjust the second fine tuning member 422 to move along the axial direction of the adjusting rod 425, and the limiting member 427 can reduce the possibility that the second fine tuning member 422 is separated from the adjusting rod 425, so that the stability of the low temperature probe testing device in normal use is improved.

Referring to fig. 2, the carrying mechanism 2 includes a carrying platform 24, and a shock absorbing plate 241 is disposed on an upper surface of the carrying platform 24; the probe mechanism 3, the vacuum bin 1 and the observation mechanism 4 are all arranged on the upper surface of the shock absorbing plate 241, an air bag 242 is arranged between the shock absorbing plate 241 and the bearing table 24, the bearing table 24 is provided with a shock absorbing member 243, the shock absorbing member 243 is arranged around the extension pipe 22, then universal wheels and supporting feet are arranged below the bearing table 24, the universal wheels can improve the convenience degree of equipment transportation of workers, the supporting feet can improve the stability of equipment placement so as to improve the accuracy degree of detection results, and the bearing table 24 is provided with the shock absorbing member 243, the shock absorbing member 243 is arranged around the extension pipe 22, so that the possibility of shock transmission to the sample table 122 can be further reduced, and the accuracy degree of detection is improved; the plummer 24 is inside still to be provided with the bradyseism support 244, and bradyseism support 244 upper end is connected in extension pipe 22, and the bradyseism support 244 has further reduced the possibility that vibrations are conducted to sample platform 122, improves the accuracy degree that detects.

Referring to fig. 2, the shock absorbing bracket 244 further includes a balancing weight 245 having a large weight, wherein the balancing weight 245 is disposed at the bottom of the shock absorbing bracket 244, thereby increasing the weight of the shock absorbing bracket 244 and increasing the consumption of vibration energy. Specifically, the balancing weight 245 includes a first weight 2451 and a second weight 2452, the second weight 2452 is provided with two groups, the weight of the first weight 2451 is greater than that of the second weight 2452, the first weight 2451 is disposed below the damping support 244, the two groups of second weights 2452 are symmetrically disposed along a center line of the first weight 2451, one sides of the two groups of second weights 2452 are fixedly connected to the first weight 2451 through bolts, and the other sides of the two groups of second weights 2452 are fixedly connected to the damping support 244 through bolts. The arrangement is that the weight of the whole mechanism is kept the same while the weight of the whole mechanism is increased, and the situation that the sample in the vacuum chamber 1 is inclined due to different weights of the two sides is reduced.

Referring to fig. 1, the adjusting mechanism 5 includes an air-extracting installation cabinet 51, an air-extracting motor 52, an air-extracting pump 53, an air-extracting tube 54 and a weighting component 55, wherein, in order to reduce the vibration brought by the air-extracting motor 52 to the vacuum chamber 1, in this embodiment, the air-extracting installation cabinet 51 is disposed on the ground far away from the bearing mechanism 2, the air-extracting motor 52 is fixedly connected to the air-extracting installation cabinet 51 through a bolt, the output end of the air-extracting motor 52 is connected to one end of the air-extracting pump 53, the other end of the air-extracting pump 53 is connected to one end of the air-extracting tube 54, and the other end of the air-extracting tube 54 is connected to the extension tube 22, so that the air in the vacuum chamber 1 can be extracted.

Referring to fig. 1, the weight assembly 55 is connected to the exhaust pipe 54, specifically, in this embodiment, the weight assembly 55 includes a first accommodating block 551, a second accommodating block 552, a load-bearing rod 553, and a weight block 554, specifically, the first accommodating block 551 and the second accommodating block 552 are respectively disposed on the upper and lower sides of the exhaust pipe 54, and the first accommodating block 551 and the second accommodating block 552 are connected through screws, so that when the distance between the first accommodating block 551 and the second accommodating block 552 is changed, the exhaust pipe 54 with different sizes can be adjusted. One end of the bearing rod 553 is fixedly arranged on the bottom wall of the second accommodating block 552, and the other end of the bearing rod 553 is fixedly arranged on the weighting block 554. In this embodiment, the weighting block 554 may be an iron block with a larger mass, and one end of the weighting block 554 is fixed on the ground.

The implementation principle of the embodiment is as follows: when testing the low temperature resistance or the electronic signal under the vacuum condition of some devices, the devices are placed in the vacuum bin 1 under the vacuum state, the positions of the devices are fixed through the sample clamp 1222, then the vacuum bin 1 is refrigerated through the adjusting mechanism 5, so that the vacuum bin 1 is in the low temperature state, whether the positions of the devices are accurately installed or not is confirmed through the observation holes 13 through the observation main body 411, and then the electronic parameters of the devices are detected through the probe parts 34. In the whole process, the shielding bin 12 needs to be subjected to vacuum treatment, so that devices are required to be placed on the sample table 122 in the shielding bin 12, and then the vacuum treatment is performed, in the vacuum treatment process, the temperature stability is kept through the first flexible copper bar 231 and the second flexible copper bar 2121, and in the vacuum state, external heat can only transfer heat to the shielding bin 12 in a heat radiation mode, so that a temperature stable state can be maintained in the shielding bin 12, and the accuracy of detecting electronic signals of the devices at a certain temperature is improved.

The foregoing are all preferred embodiments of the present application, and are not intended to limit the scope of the present application in any way, therefore: all equivalent changes in structure, shape and principle of this application should be covered in the protection scope of this application.

Claims (7)

1. A low temperature probe test apparatus, characterized in that: comprises a vacuum bin (1), a bearing mechanism (2), a probe mechanism (3), an observation mechanism (4) and an adjusting mechanism (5); the vacuum bin (1) is arranged on the upper surface of the bearing mechanism (2); the probe mechanism (3) is arranged on the upper surface of the bearing mechanism (2); the probe mechanism (3) is arranged outside the vacuum bin (1); a first through hole (11) for the probe mechanism (3) to pass through is formed in the outer peripheral side of the vacuum bin (1); an isolation tube (31) is arranged on the outer peripheral side of the probe mechanism (3); the insulating tube (31) covers the first through hole (11); the isolation pipe (31) is communicated with the probe mechanism (3) and the vacuum bin (1); a shielding bin (12) is arranged in the vacuum bin (1); a second through hole (121) for the probe mechanism (3) to pass through is formed in the outer peripheral side of the shielding bin (12); a sample stage (122) is arranged in the shielding bin (12); the probe mechanism (3) is used for detecting a sample placed on the sample stage (122); the bearing mechanism (2) is provided with a refrigerating device (21); an extension tube (22) is partially coated on the outer periphery of the refrigeration device (21); one end of the extension pipe (22) is communicated with the vacuum bin (1), and the other end of the extension pipe is connected with the refrigerating device (21); the upper surface of the refrigerating device (21) is connected with a copper table (23); a plurality of first flexible copper strips (231) are arranged between the copper table (23) and the sample table (122); one end of the first flexible copper bar (231) is connected to the upper surface of the copper table (23), and the other end of the first flexible copper bar is connected to the lower surface of the sample table (122); an observation hole (13) is formed in the upper surface of the vacuum bin (1); the observation hole (13) is covered with an observation mirror (131); the observation mechanism (4) is arranged on the upper surface of the bearing mechanism (2); the observation mechanism (4) observes the inside of the vacuum bin (1) through the observation hole (13); the adjusting mechanism (5) is arranged on one side of the bearing mechanism (2); the adjusting mechanism (5) is communicated with the extension pipe (22); the adjusting mechanism (5) is used for controlling the vacuum state of the vacuum bin (1) and controlling the temperature inside the vacuum bin (1); the refrigerating device (21) comprises a first refrigerating part (211) and a second refrigerating part (212); the upper surface of the first refrigerating part (211) is connected to the copper table (23); the second refrigeration part (212) is connected with a second flexible copper bar (2121); one end of the second flexible copper bar (2121) is connected to the second refrigerating part (212), and the other end of the second flexible copper bar is connected to the inner side wall of the shielding bin (12); the probe mechanism (3) comprises a probe arm (32), an adjusting piece (33) for adjusting the position of the probe mechanism (3) and a probe piece (34) for detecting an electric signal; one end of the probe arm (32) is connected to the probe member (34), and the other end is connected to the adjusting member (33); the isolation tube (31) is provided with extensibility; one end of the isolation pipe (31) is connected with the adjusting piece (33), and the other end of the isolation pipe covers the first through hole (11); the probe piece (34) is connected with a third flexible copper bar (341); the third flexible copper strip (341) passes through the first through hole (11) and the second through hole (121); one end of the third flexible copper strip (341) is connected to the probe piece (34), and the other end of the third flexible copper strip is connected to the inner side wall of the shielding bin (12).

2. A cryoprobe test apparatus as claimed in claim 1, wherein: the observation mechanism (4) comprises an observation piece (41) and an adjusting assembly (42); the adjusting assembly (42) comprises a first fine tuning piece (421), a second fine tuning piece (422) and a base (423); the base (423) is arranged on the upper surface of the bearing mechanism (2); the base (423) is rotatably provided with a supporting rod (424); the first fine tuning piece (421) is sleeved on the supporting rod (424); an adjusting rod (425) is vertically arranged on one side of the first fine tuning piece (421) away from the supporting rod (424); the second fine tuning piece (422) is sleeved on the adjusting rod (425); a locking piece (426) is arranged between the second fine tuning piece (422) and the adjusting rod (425) and is used for fastening or releasing the second fine tuning piece (422); the first fine tuning piece (421) is used for controlling the adjusting rod (425) to move along the horizontal direction; one side of the second fine tuning piece (422) far away from the adjusting rod (425) is connected with the observation piece (41).

3. A cryoprobe test apparatus as claimed in claim 2, wherein: a limiting piece (427) is arranged at the top end of the adjusting rod (425); the limiting piece (427) is positioned above the sleeving part of the second fine adjusting piece (422) and the adjusting rod (425); a bump (428) is provided on the outer peripheral side of the second trimming member (422).

4. A cryoprobe test apparatus as claimed in claim 1, wherein: the bearing mechanism (2) comprises a bearing table (24); the upper surface of the bearing table (24) is provided with a damping plate (241); the probe mechanism (3), the vacuum bin (1) and the observation mechanism (4) are all arranged on the upper surface of the shock absorption plate (241); an air bag (242) is arranged between the shock absorption plate (241) and the bearing table (24); the bearing table (24) is provided with a damping member (243); the damping member (243) is disposed around the extension pipe (22).

5. The cryoprobe test apparatus of claim 4, wherein: a damping bracket (244) is arranged inside the bearing table (24); the upper end of the damping support (244) is connected to the extension pipe (22); the balancing weight (245) is detachably arranged at the bottom of the cushioning bracket (244).

6. A cryoprobe test apparatus as claimed in claim 1, wherein: an aluminum nitride interlayer (1221) is arranged on the upper surface of the sample table (122); the sample stage (122) is equipped with a sample holder (1222) for holding a sample.

7. A cryoprobe test apparatus as claimed in claim 1, wherein: the upper surface of the shielding bin (12) is provided with a third through hole (123); the third through hole (123) is coaxially arranged with the observation hole (13); the third through hole (123) is covered with a radiation protection layer (1231); the radiation protection layer (1231) is used for blocking sunlight from entering the shielding bin (12).

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