CN116840584A - Precision test platform - Google Patents
Precision test platform Download PDFInfo
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- CN116840584A CN116840584A CN202211688164.9A CN202211688164A CN116840584A CN 116840584 A CN116840584 A CN 116840584A CN 202211688164 A CN202211688164 A CN 202211688164A CN 116840584 A CN116840584 A CN 116840584A
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- 238000012360 testing method Methods 0.000 title claims abstract description 92
- 238000013016 damping Methods 0.000 claims abstract description 20
- 238000001514 detection method Methods 0.000 claims abstract description 9
- 230000000694 effects Effects 0.000 claims abstract description 7
- 239000000523 sample Substances 0.000 claims description 63
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 36
- 230000035939 shock Effects 0.000 claims description 30
- 238000001816 cooling Methods 0.000 claims description 24
- 239000007788 liquid Substances 0.000 claims description 18
- 229910052757 nitrogen Inorganic materials 0.000 claims description 18
- 239000000919 ceramic Substances 0.000 claims description 14
- 238000010438 heat treatment Methods 0.000 claims description 11
- 229910001220 stainless steel Inorganic materials 0.000 claims description 9
- 239000010935 stainless steel Substances 0.000 claims description 9
- 244000035744 Hura crepitans Species 0.000 claims description 8
- 238000005485 electric heating Methods 0.000 claims description 7
- 230000005611 electricity Effects 0.000 claims description 7
- 238000004891 communication Methods 0.000 claims description 6
- 238000012423 maintenance Methods 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 17
- 238000005259 measurement Methods 0.000 description 16
- 238000010521 absorption reaction Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000005057 refrigeration Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013068 control sample Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/003—Environmental or reliability tests
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
The application discloses a precision test platform, which relates to the field of high-resistance sample detection equipment and comprises a damping platform and a test cabinet, wherein the test cabinet is detachably connected to the damping platform, a vacuum cavity is arranged on the damping platform, a sample table is arranged in the vacuum cavity, an observation window is arranged on the vacuum cavity, a common ground cable is connected to the vacuum cavity, a vacuum maintaining piece for maintaining the vacuum degree of the vacuum cavity is arranged on the damping platform, a temperature control component for controlling the temperature of the vacuum cavity is also arranged on the damping platform, and an electrical test component for testing the high-resistance sample in the vacuum cavity is also arranged on the test cabinet. The application has the effect of facilitating the test of the high-resistance sample.
Description
Technical Field
The application relates to the field of high-resistance sample detection equipment, in particular to a precision test platform.
Background
The precise measurement of the high-resistance sample under the high-low temperature continuous variable temperature condition has extremely strict requirements on a test environment and a test system, and the temperature, humidity, electromagnetic environment and micro-vibration of an electrical measurement loop of the test sample have extremely great influence on the precise measurement.
In practical use, a single test system is usually only used for measuring single data, such as a test system for measuring charges, and only the humidity, electromagnetic environment and loop vibration affecting the test system are controlled, and then the charges are measured. And the test system for measuring the resistance only controls the temperature and loop vibration affecting the test system, and then measures the resistance. The processing mode enables the high-resistance sample to be tested by continuously replacing the test system so as to obtain all data of the sample, and corresponding environmental factors are controlled when the test system is replaced each time so as to reduce the influence of the environmental factors on the test data, so that the high-resistance sample is more complicated in actual use.
Disclosure of Invention
In order to facilitate testing of high-resistance samples, the application provides a precision test platform.
The application provides a precision test platform which adopts the following technical scheme:
the utility model provides a precision test platform, includes shock attenuation platform and test cabinet, the test cabinet can dismantle the connection is in on the shock attenuation platform, install the vacuum cavity on the shock attenuation platform, install the sample platform in the vacuum cavity, install the observation window on the vacuum cavity, be connected with common ground cable on the vacuum cavity, be provided with on the shock attenuation platform and be used for maintaining the vacuum maintenance piece of vacuum cavity vacuum degree, still be provided with on the shock attenuation platform and be used for control the control by temperature change subassembly of vacuum cavity temperature, still be provided with on the test cabinet and be used for right the electricity test subassembly that high resistance sample in the vacuum cavity tested.
Through adopting above-mentioned technical scheme, the observation window passes through the ring flange to be installed on the vacuum cavity, during the use, demolish the ring flange, put into the sample bench with high resistance sample, afterwards install the ring flange on the vacuum cavity, start vacuum maintenance spare, keep the inside vacuum degree of system through vacuum maintenance spare, reduce the influence of environment humidity to the test, the electric measurement instrument is connected to the common ground port of cable, with the accuracy of guaranteeing electric measurement, the temperature control subassembly is adjusted vacuum cavity temperature, with the accuracy of guaranteeing the temperature, the shock attenuation platform carries out the shock attenuation to the vacuum cavity, the influence of external vibration to the high resistance sample has been reduced, when carrying out the test, accessible electricity test module carries out corresponding measurement, this test system can control the temperature that the test sample was located simultaneously, humidity, electromagnetic environment and external vibration, make the test sample have a good environment and test, test the high resistance sample through electricity test module, and need not take out the test sample and place in next test equipment after carrying out a test, can accomplish the measurement of multiple data in succession through single test system, the high resistance sample of being convenient for carries out the test.
Preferably, the temperature control assembly comprises a low-temperature cavity fixedly connected to the vacuum cavity, and an electric heating wire fixedly connected to the lower portion of the sample table, a liquid nitrogen inlet is arranged on the low-temperature cavity, the low-temperature cavity is communicated with the vacuum cavity, and a temperature controller for controlling the heating state of the electric heating wire is arranged on the test cabinet.
Through adopting above-mentioned technical scheme, in with liquid nitrogen input low temperature cavity through the liquid nitrogen import, utilize liquid nitrogen evaporation refrigeration to reduce the temperature, reduce sample platform temperature through heat conduction, then set up target temperature at the temperature control appearance, the heating of temperature control appearance control heating wire makes sample platform temperature rise through the mode of heat conduction, until sample platform rises to target temperature, through control sample platform surface temperature, indirectly change the temperature of sample, satisfy the temperature requirement.
Preferably, the vacuum maintaining piece is a vacuum pump fixedly installed on the damping platform, a ceramic corrugated pipe is fixedly connected to the vacuum pump, the vacuum pump is communicated with the low-temperature cavity through the ceramic corrugated pipe, and a gate valve for controlling the communication state of the vacuum pump and the vacuum cavity is arranged on the damping platform.
Through adopting above-mentioned technical scheme, all keep the high vacuum state with low temperature cavity, the vacuum cavity that the intercommunication set up through the vacuum pump, can effectively get rid of the influence of ambient humidity to the electricity measurement, the setting of ceramic bellows realizes with the electric isolation of vacuum pump package under the prerequisite of guaranteeing vacuum pipeline performance, can also absorb the micro-vibration of pump package along the vacuum pipeline, reduce the conduction of vibration to the cavity, through the setting of push-pull valve, the staff accessible push-pull valve control vacuum pump and the communication state of vacuum cavity.
Preferably, the shock attenuation platform is kept away from the one end fixedly connected with rubber silence load wheel and the shock attenuation supporting legs of vacuum cavity, the vacuum pump is kept away from the one end fixedly connected with air spring of vacuum cavity, fixedly connected with shock attenuation sandbox on the ceramic bellows.
Through adopting above-mentioned technical scheme, through the setting of rubber silence load wheel and shock attenuation supporting legs, on the one hand with shock attenuation platform support subaerial, on the other hand absorb terrace vibration, reduce the vibration of vacuum cavity and sample platform, air spring's setting has absorbed the perpendicular and horizontal vibration of pump package during operation, and the setting of shock attenuation sandbox absorbs the micro-vibration of pump package along vacuum pipeline conduction through resonance effect, reduces the conduction of vibration to the vacuum cavity.
Preferably, the electrical testing assembly comprises an electrometer Gao Zubiao arranged on the testing cabinet and a capacitance meter arranged on the testing cabinet, a plurality of electrical interfaces are arranged on the vacuum cavity, and a detection probe is arranged on one side, facing the vacuum cavity, of each electrical interface.
Through adopting above-mentioned technical scheme, electrometer Gao Zubiao, capacitance meter pass through different electrical interface connection on the vacuum cavity, during the use, detect the high-resistance sample through detecting probe.
Preferably, the vacuum cavity and the low-temperature cavity are both made of stainless steel, and the low-temperature cavity is connected with the vacuum cavity through a stainless steel corrugated pipe, and the electromagnetic shielding effect of the vacuum cavity and the low-temperature cavity is not more than 4fA (RMS).
Through adopting above-mentioned technical scheme, through holistic stainless steel, can effectively shield environment electromagnetic noise, stainless steel bellows can also further reduce micro-vibration when guaranteeing the vacuum simultaneously, reduces micro-vibration to electric measurement's influence.
Preferably, a water cooling cavity is arranged outside the vacuum cavity, a water cooling quick connector is arranged on the water cooling cavity, streamline connecting pipes are arranged on the electrical interfaces, the connecting pipes are positioned in the water cooling cavity, and the electrical interfaces are connected with the vacuum cavity through the connecting pipes.
Through adopting above-mentioned technical scheme, the water-cooling cavity passes through water-cooling quick connector and external water route pipe connection, lets in silence cooling circulating water to the water-cooling cavity in, and streamlined connecting pipe has reduced the vibration that the turbulence led to the influence of electricity interface simultaneously, guarantees to produce under the very low vibration influence's the prerequisite to the cavity, reduces the temperature of detecting the probe on the electricity interface, reduces the influence of temperature gradient in the detecting the probe to electric measurement.
Preferably, a vacuum gauge convenient for observing the vacuum degree is arranged on the low-temperature cavity, and a display panel convenient for observing the working state of the vacuum pump is arranged on the damping platform.
Through adopting above-mentioned technical scheme, staff accessible observation vacuum gauge direct judgment cavity internal vacuum state, the staff can also observe the operating condition of vacuum pump through observing display panel.
In summary, the present application includes at least one of the following beneficial technical effects:
1. the temperature, humidity, electromagnetic environment and vibration of the high-resistance sample placed on the sample table can be controlled by utilizing the arrangement of the vacuum cavity, the vacuum pump, the temperature control assembly, the electrical test assembly, the damping platform and the common ground cable, so that the influence of the external environment on the data of the test system is effectively reduced, various factors are controlled in the same system, and the high-resistance sample can be placed in the system to complete the test of various data, thereby facilitating the test of the high-resistance sample;
2. by means of the arrangement of the rubber mute load wheel, the damping supporting feet, the air springs and the damping sandboxes, floor vibration and vibration generated during the operation of the vacuum pump are respectively absorbed, and micro vibration generated during the transmission of the pump group along the vacuum pipeline can be absorbed, so that the transmission of vibration to the vacuum cavity is effectively reduced, and the vibration of the sample table is reduced;
3. through the setting of water-cooling cavity, reduce the temperature with the detection probe on the electrical interface, reduce the influence of temperature gradient in the detection probe to the electric measurement.
Drawings
FIG. 1 is a schematic axial view of a main embodiment of the present application;
FIG. 2 is a schematic diagram of a vacuum pump structure according to an embodiment of the present application;
FIG. 3 is a schematic diagram of a sample stage according to an embodiment of the present application;
fig. 4 is a schematic diagram of a heating wire structure according to an embodiment of the present application;
FIG. 5 is a schematic diagram of a test cabinet structure according to an embodiment of the present application;
reference numerals: 1. a damping platform; 2. a test cabinet; 3. a vacuum chamber; 4. a sample stage; 5. an observation window; 6. a common ground cable; 7. a temperature control assembly; 71. a low temperature cavity; 72. heating wires; 8. an electrical test assembly; 81. an electrometer Gao Zubiao; 82. a capacitance meter; 9. a liquid nitrogen inlet; 10. a temperature controller; 20. a vacuum pump; 30. a ceramic bellows; 40. a gate valve; 50. rubber mute load wheel; 60. damping supporting legs; 70. an air spring; 80. damping sandboxes; 90. an electrical interface; 100. detecting a probe; 200. stainless steel bellows; 300. a water cooling cavity; 400. water-cooling quick connector; 500. a connecting pipe; 600. a vacuum gauge; 700. a display panel; 800. a liquid nitrogen storage cavity; 900. and (5) connecting a plate.
Detailed Description
The application is described in further detail below with reference to fig. 1-5.
The embodiment of the application discloses a precision test platform.
As shown in fig. 1, a precision test platform includes a shock absorption platform 1 and a test cabinet 2, where the shock absorption platform 1 and the test cabinet 2 are both placed on the ground, and the test cabinet 2 is connected to the side wall of the shock absorption platform 1 through a bolt thread, so that when the shock absorption platform 1 and the test cabinet 2 are required to be moved, the test cabinet 2 and the shock absorption platform 1 can be connected to move together.
As shown in fig. 1, fig. 2 and fig. 3, the shock absorbing platform 1 is provided with the vacuum cavity 3 through bolts, the vacuum cavity 3 is internally provided with the sample table 4 through bolts, the sample table 4 is positioned at the inner center of the vacuum cavity 3, the upper part of the vacuum cavity 3 is provided with the observation window 5 through flange connection, the observation window 5 is positioned at the central position of the flange plate, the lower end of the sample table 4 is provided with four electric connectors, one of the electric connectors is connected with the common ground cable 6, the common ground cable 6 can be connected to the common ground terminal when in use, the accuracy of electric measurement is ensured, and the electric connectors are sleeved with the insulating protection cover, so that the safety is improved.
As shown in fig. 1, 3 and 4, a temperature control assembly 7 for controlling the temperature of a vacuum cavity 3 is arranged on a damping platform 1, the temperature control assembly 7 comprises a low-temperature cavity 71 and an electric heating wire 72, the vacuum cavity 3 is connected with the low-temperature cavity 71 through a stainless steel corrugated pipe 200, the vacuum cavity 3 is communicated with the low-temperature cavity 71, a liquid nitrogen inlet 9 is arranged on the low-temperature cavity 71, a liquid nitrogen storage cavity 800 is formed in the low-temperature cavity 71, a connecting plate 900 is arranged on the liquid nitrogen storage cavity 800, one end of the connecting plate 900, far away from the liquid nitrogen storage cavity 800, is fixedly connected onto a sample table 4 through a bolt, the electric heating wire 72 is fixedly connected under the sample table 4, and a temperature controller 10 for controlling the heating state of the electric heating wire 72 is further arranged on a test cabinet 2. When the temperature control device is used, liquid nitrogen is released into the liquid nitrogen storage cavity 800 through the liquid nitrogen inlet 9, the temperature is reduced through liquid nitrogen evaporation refrigeration, the temperature is conducted onto the sample table 4 through the connecting plate 900, the sample table 4 is rapidly cooled to minus 178 ℃, then the target temperature is set on the temperature control device 10, the temperature control device 10 controls the heating wire 72 to heat, the temperature control device 10 controls the electric current of the heating wire 72, the generated joule heat heats the sample table 4 through heat conduction, the highest temperature control precision is +/-100 mk, the temperature control device 10 can conveniently and rapidly continuously adjust the surface temperature of the sample table 4 through PID closed-loop control, and the continuous temperature change experiment requirement is met.
As shown in fig. 3 and 4, the vacuum chamber 3 and the low-temperature chamber 71 are both made of stainless steel, and the electromagnetic shielding effect is not greater than 4fA (RMS), so that electromagnetic noise can be effectively shielded.
As shown in fig. 1, 2, 3 and 4, the shock absorbing platform 1 is further provided with a vacuum maintaining member, the vacuum maintaining member is a vacuum pump 20 fixedly installed on the shock absorbing platform 1, the vacuum pump 20 is electrically connected with an external power supply, a ceramic bellows 30 is installed above the vacuum pump 20, one end of the ceramic bellows 30, which is far away from the vacuum pump 20, is connected below the low-temperature cavity 71, the shock absorbing platform 1 is further provided with a gate valve 40 for controlling the communication state of the vacuum pump 20 and the vacuum cavity 3, and the gate valve 40 controls the communication of the vacuum pump 20 and the vacuum cavity 3 by controlling the communication of the ceramic bellows 30 and the low-temperature cavity 71. The display panel 700 for observing the working state of the vacuum pump 20 is arranged on the damping platform 1, the vacuum gauge 600 which is convenient for observing the vacuum degree is arranged on the low-temperature cavity 71, the whole vacuum degree in the system is convenient to observe, the whole vacuum degree requires the low-temperature maintenance vacuum degree to be less than or equal to 2E-5Pa, the high-temperature maintenance vacuum degree is less than or equal to 2E-3Pa, a high-vacuum environment is formed, and the influence of the environment humidity on the electric measurement can be effectively eliminated.
As shown in fig. 1 and 2, the shock-absorbing sandbox 80 is mounted outside the ceramic corrugated pipe 30, the shock-absorbing sandbox 80 wraps the ceramic corrugated pipe 30, sand in the sandbox resonates, micro-vibration of a pipeline transmitted along the ceramic corrugated pipe 30 can be effectively absorbed, the rubber mute load wheel 50 and the shock-absorbing supporting feet 60 are mounted below the shock-absorbing platform 1 through bolts, the rubber mute load wheel 50 and the shock-absorbing supporting feet 60 are mounted below the test cabinet 2 through bolts, the shock-absorbing platform 1 and the test cabinet 2 are convenient to move, the shock-absorbing platform 1 is simultaneously subjected to shock absorption, floor vibration can be effectively absorbed, the air spring 70 is mounted below the vacuum pump 20, the abutting plates of the air spring 70 and the shock-absorbing supporting feet 60 are on the same horizontal plane, and when the shock-absorbing platform 1 is placed on the ground, the abutting plates of the air spring 70 and the shock-absorbing supporting feet 60 are simultaneously abutted on the ground, and the shock-absorbing platform 1 can be effectively absorbed, and vertical and horizontal vibration during operation of the vacuum pump 20 can be effectively absorbed. The vibration precision of the sample table 4 can be ensured to be less than or equal to 700nm (RMS) through multistage vibration reduction, and the vibration of the sample table 4 is effectively reduced
As shown in fig. 3 and 4, the outside of the vacuum cavity 3 is provided with the water cooling cavity 300, the outside of the vacuum cavity 3 is also provided with a plurality of electrical interfaces 90, a part of the electrical interfaces 90 located in the water cooling cavity 300 is sleeved with a streamline connecting pipe 500, the streamline connecting pipe 500 can effectively reduce the impact on the connecting pipe 500 when water flow is disturbed, thereby achieving the damping effect, one end of the connecting pipe 500 is connected to the inner wall of the water cooling cavity 300, the other end is connected to the outer wall of the vacuum cavity 3, the electrical interfaces 90 are completely covered, one end of the electrical interfaces 90 is fixedly connected to the side wall of the vacuum cavity 3, the other end is fixedly connected to the side wall of the water cooling cavity 300, one end of the electrical interfaces 90 located on the side wall of the vacuum cavity 3 is provided with a detection probe 100, and the detection probe 100 stretches into the inside of the vacuum cavity 3.
As shown in fig. 3 and 4, the side wall of the water cooling cavity 300 is provided with a water cooling quick connector 400, the external waterway pipeline can be led into mute cooling circulating water through the water cooling quick connector 400, the temperature of the cavity and the electrical interface 90 is reduced on the premise of ensuring that extremely low vibration is generated to the cavity, the temperature of the outer wall of the water cooling cavity 300 is always less than 60 ℃, the damage to workers caused by high temperature is prevented, meanwhile, the temperature of the electrical interface 90 and the detection probe 100 can be reduced, and the influence of temperature gradient on electrical measurement is reduced.
As shown in fig. 3 and 5, an electrical testing component 8 for testing the high-resistance sample in the vacuum cavity 3 is disposed on the testing cabinet 2, the electrical testing component 8 includes an electrometer Gao Zubiao disposed on the testing cabinet 2, a capacitance meter 82 disposed on the testing cabinet 2, and other testing devices can be disposed on the testing cabinet 2 to test other parameters, in this embodiment, the electrometer Gao Zubiao is preferably 6517B electrometer/high resistance meter, the capacitance meter 82 is preferably a semiconductor defect capacitance meter 82, and is used for analyzing transient processes, and the electrometer Gao Zubiao and the capacitance meter 82 are both connected to the electrical interface 90 to test the high-resistance sample.
The implementation principle of the precision test platform provided by the embodiment of the application is as follows: when the high-resistance sample is put into practical use, the high-resistance sample is placed on the sample table 4, the vacuum cavity 3 is isolated from the outside through the flange plate, the vacuum pump 20 is started, the air in the system is pumped out, meanwhile, mute circulating cooling water is introduced, a worker observes the internal vacuum degree through the vacuum gauge 600, when the proper vacuum degree is achieved, liquid nitrogen is introduced, the liquid nitrogen evaporates and is rapidly cooled, the liquid nitrogen is conducted to the sample table 4 in a heat conduction mode, the temperature controller 10 controls the heating wire 72 to start, joule heat emitted by the heating wire 72 is conducted to the sample table 4 in a heat conduction mode, the adjustment of the internal state is completed, the measuring equipment is connected to the electrical interface 90, the high-resistance sample is measured, and the common cable 6 is connected to the common ground terminal when the electrical measurement is carried out, so that the accuracy of the electrical measurement is ensured.
The above embodiments are not intended to limit the scope of the present application, so: all equivalent changes in structure, shape and principle of the application should be covered in the scope of protection of the application.
Claims (8)
1. The utility model provides a precision test platform which characterized in that: including shock attenuation platform (1) and test rack (2), connect can be dismantled to test rack (2) shock attenuation platform (1) is last to install vacuum cavity (3), install sample platform (4) in vacuum cavity (3), install observation window (5) on vacuum cavity (3), be connected with common ground cable (6) on vacuum cavity (3), be provided with on shock attenuation platform (1) and be used for maintaining vacuum maintenance spare of vacuum cavity (3) vacuum degree, still be provided with on shock attenuation platform (1) and be used for control temperature control subassembly (7) of vacuum cavity (3) temperature, still be provided with on test rack (2) and be used for right high resistance sample in vacuum cavity (3) tests electricity test subassembly (8).
2. The precision test platform of claim 1, wherein: the temperature control assembly (7) comprises a low-temperature cavity (71) fixedly connected to the vacuum cavity (3), and an electric heating wire (72) fixedly connected to the lower portion of the sample table (4), a liquid nitrogen inlet (9) is arranged on the low-temperature cavity (71), the low-temperature cavity (71) is communicated with the vacuum cavity (3), and a temperature controller (10) for controlling the heating state of the electric heating wire (72) is arranged on the test cabinet (2).
3. The precision test platform of claim 2, wherein: the vacuum maintaining piece is a vacuum pump (20) fixedly installed on the damping platform (1), a ceramic corrugated pipe (30) is fixedly connected to the vacuum pump (20), the vacuum pump (20) is communicated with the low-temperature cavity (71) through the ceramic corrugated pipe (30), and a gate valve (40) for controlling the communication state of the vacuum pump (20) and the vacuum cavity (3) is arranged on the damping platform (1).
4. A precision test platform according to claim 3, wherein: the shock attenuation platform (1) is kept away from the one end fixedly connected with rubber silence load wheel (50) and shock attenuation supporting legs (60) of vacuum cavity (3), vacuum pump (20) are kept away from one end fixedly connected with air spring (70) of vacuum cavity (3), fixedly connected with shock attenuation sandbox (80) on ceramic bellows (30).
5. The precision test platform of claim 1, wherein: the electrical test assembly (8) comprises an electrometer Gao Zubiao (81) arranged on the test cabinet (2) and a capacitance meter (82) arranged on the test cabinet (2), a plurality of electrical interfaces (90) are arranged on the vacuum cavity (3), and a detection probe (100) is arranged on one side, facing the vacuum cavity (3), of the electrical interfaces (90).
6. The precision test platform of claim 2, wherein: the vacuum cavity (3) and the low-temperature cavity (71) are all made of stainless steel, the low-temperature cavity (71) is connected with the vacuum cavity (3) through a stainless steel corrugated pipe (200), and the electromagnetic shielding effect of the vacuum cavity (3) and the low-temperature cavity (71) is not more than 4fA (RMS).
7. The precision test platform of claim 5, wherein: the vacuum cavity (3) outside is installed water-cooling cavity (300), install water-cooling quick connector (400) on water-cooling cavity (300), all install streamlined connecting pipe (500) on electrical connector (90), connecting pipe (500) are located in water-cooling cavity (300), electrical connector (90) pass through connecting pipe (500) with vacuum cavity (3) are connected.
8. A precision test platform according to claim 3, wherein: the low-temperature cavity (71) is provided with a vacuum gauge (600) which is convenient for observing the vacuum degree, and the damping platform (1) is provided with a display panel (700) which is convenient for observing the working state of the vacuum pump (20).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211688164.9A CN116840584A (en) | 2022-12-28 | 2022-12-28 | Precision test platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211688164.9A CN116840584A (en) | 2022-12-28 | 2022-12-28 | Precision test platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116840584A true CN116840584A (en) | 2023-10-03 |
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ID=88164094
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211688164.9A Pending CN116840584A (en) | 2022-12-28 | 2022-12-28 | Precision test platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116840584A (en) |
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2022
- 2022-12-28 CN CN202211688164.9A patent/CN116840584A/en active Pending
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