CN115541947A

CN115541947A - High and low temperature probe station testing device

Info

Publication number: CN115541947A
Application number: CN202211197026.0A
Authority: CN
Inventors: 李�杰; 殷军伟
Original assignee: Timu Semiconductor Technology Shanghai Co ltd
Current assignee: Timu Semiconductor Technology Shanghai Co ltd
Priority date: 2022-09-29
Filing date: 2022-09-29
Publication date: 2022-12-30

Abstract

The invention discloses a high and low temperature probe station testing device, which comprises a probe station main body, wherein the front end of the probe station main body is provided with an acquisition board, the acquisition board is internally provided with a sliding groove, the sliding groove is internally provided with a sliding block, the top of the sliding block is provided with a return spring, the inner side of the return spring is provided with a locking screw, the top of the return spring is provided with a locking board, the right side of the sliding block is provided with a fine adjustment screw, the tail end of the fine adjustment screw is connected with a manual adjustment handle, and a CNN camera is arranged below the sliding block; an image acquisition module installed at an output end of the CNN camera. This high low temperature probe station testing arrangement can pass through the vacuum suction head suction with the air of bottom such as wafer on the bearing dish through the vacuum pump that sets up, can just make things convenient for the microscope to focus fast through the height that the dish was born in the suction size adjustment of adjustment vacuum pump to utilize vacuum suction head to carry out the vacuum adsorption location to the wafer.

Description

High and low temperature probe station testing device

Technical Field

The invention relates to the technical field of high and low temperature probe stations, in particular to a high and low temperature probe station testing device.

Background

The high and low temperature probe station testing device is used for testing the electrical characteristic representation of microstructure semiconductor devices, microelectronic devices and materials under different environments and different temperature conditions.

Through the retrieval, granted patent CN106569116B discloses a probe platform and cryogenic test system, cryogenic test system includes the cryogenic test platform and for the cryogenic refrigerating plant of cryogenic test platform, the cryogenic test platform includes testboard cavity and the probe platform that can put into the testboard cavity, the testboard cavity is including establishing the test platform of testboard cavity lower part and covering the cavity upper cover of establishing on test platform, the probe platform includes the sample platform, be equipped with the probe that is used for being connected with the sample on the sample platform, probe rear end and the interior electrode detachable connections of testboard cavity still are equipped with the sample anchor clamps that are used for fixed sample on the sample platform, the sample platform has the sample from sample platform upper surface undercut and places the recess. By adopting the probe station and the low-temperature test system, the probe station is independently arranged, so that the probe and the sample electrode are conveniently aligned, the accuracy and the safety of alignment are ensured, and the connection efficiency is high. The problem of the traditional sample measurement that the connection is difficult and the electrode is damaged during connection can be solved.

Granted patent CN212932475U, disclosed a high and low temperature probe platform testing arrangement, high and low temperature probe platform testing arrangement includes: the probe assembly comprises a base, a cold and hot platform assembly and a plurality of probe assemblies. The base defines a containing cavity; the base is provided with a circulating refrigerant interface, the cold and hot table assembly is arranged on the base and used for heating and cooling the element to be measured, and the cold and hot table is positioned in the containing cavity; a plurality of probe components are arranged in the containing cavity. From this, through the base, cold and hot platform subassembly and the cooperation of a plurality of probe subassemblies, cold and hot platform subassembly can heat up and cool down to being surveyed the component, can provide the thermal field of a change for being surveyed the component, and, a plurality of probe subassemblies can be simultaneously to a plurality of electrics of being surveyed the component, parameter such as electrochemistry detects, can promote high and low temperature probe platform testing arrangement's detection efficiency, and simultaneously, high and low temperature probe platform testing arrangement can be used with multiple test instrument, satisfy the different test condition of material test, have energy-conservation, it is multi-functional, it is miniaturized, advantages such as fast rising and falling temperature.

Above technical scheme all provides a high and low temperature probe station testing arrangement, and when high and low temperature probe station testing arrangement actually used, thereby can the manual adjustment bear the position of dish and make microscope's field of vision frame the same with the test position, and manual adjustment mode can waste more time for novice, for this reason, we provide a high and low temperature probe station testing arrangement.

Disclosure of Invention

The invention aims to provide a high and low temperature probe station testing device to solve the problem that the lifting range of a forging head is inconvenient to adjust when forging is carried out by forging equipment in the background technology.

In order to achieve the purpose, the invention provides the following technical scheme: a high and low temperature probe station testing device comprises:

the probe table comprises a probe table main body, wherein an acquisition plate is installed at the front end of the probe table main body, a sliding groove is formed in the acquisition plate, a sliding block is arranged in the sliding groove, a return spring is arranged at the top of the sliding block, a locking screw is arranged on the inner side of the return spring, a locking plate is installed at the top of the return spring, a fine adjustment screw rod is installed on the right side of the sliding block, the tail end of the fine adjustment screw rod is connected with a manual adjustment handle, and a CNN camera is installed below the sliding block;

the image acquisition module is arranged at the output end of the CNN camera, the output end of the image acquisition module is connected with the image processing module, the output end of the image processing module is connected with the convolutional neural network, the output end of the convolutional neural network is connected with the data transmission module, and the output end of the data transmission module is connected with the control module;

the door plate is arranged at the rear end of the CNN camera, and a connecting rotating shaft penetrates through the door plate;

the drawing disk, it is installed the inside of probe station main part, the slide rail is all installed to the left and right sides of drawing disk, the internally mounted of drawing disk bears the dish, and bears the miniature hole that a plurality of equidistance evenly distributed were seted up on the surface of dish, bear the below of dish and install the regulating plate, and be connected with adjust cylinder around the regulating plate, bear and install the lift spring between dish and the regulating plate, the below of regulating plate is provided with solid fixed ring, and solid fixed ring's inside is fixed with the suction head support, vacuum suction head is installed at the top of suction head support, connecting pipe is installed to vacuum suction head's input, and connects tracheal end-to-end connection and has the vacuum pump.

Preferably, the probe station main body is further provided with:

the observation groove is installed in the middle of the top of the probe station main body, probe bases are arranged around the observation groove, and probe heads are installed at the output ends of the probe bases.

Preferably, the observation tank is further provided with:

the microscope, it is installed the top of observation groove, the elevating platform is installed at microscope's top, the rear end of elevating platform is connected with the lift stand, and the below of lift stand is fixed with movable base, transmission lead screw is worn to be equipped with in movable base's inside, and the lead screw motor is installed to the input of transmission lead screw.

Preferably, the movable base moves left and right on the transmission screw rod, and the transmission screw rod is in key connection with the screw rod motor.

Preferably, the sliding block realizes sliding movement in the sliding groove through the fine adjustment screw rod, and a bearing is installed between the sliding block and the fine adjustment screw rod, and the fine adjustment screw rod is in threaded connection with the acquisition board.

Preferably, the locking screw penetrates through the locking plate and the sliding block in sequence, the locking plate is elastically connected with the sliding block through a return spring, and the locking plate and the sliding block form a semi-surrounding structure.

Preferably, the door plate rotates in the probe station main body by connecting the rotating shaft, and the pull disc slides in the probe station main body through the sliding rail.

Preferably, the vacuum suction heads are communicated with the vacuum pump through a connecting air pipe and penetrate through the inner part of the pull disc, and the vacuum suction heads are uniformly distributed along the surface of the suction head support at equal intervals, and meanwhile, the suction head support is parallel to the bearing disc.

Preferably, bear the dish through lifting spring and regulating plate elastic connection, and the regulating plate constitutes extending structure through adjusting cylinder and drawing tray to drawing tray constitutes half surrounding structure with bearing the dish.

Preferably, the CNN camera is electrically connected to the image acquisition module, the image processing module, the convolutional neural network, the data transmission module, and the control module sequentially pass through the API port to achieve data transmission, and the control module is electrically connected to the adjustment cylinder.

Compared with the prior art, the invention provides a high and low temperature probe station testing device, which has the following beneficial effects:

1. according to the invention, the position of the wafer and the like placed on the bearing disc can be determined through the arranged CNN camera, the shot and obtained picture can be transmitted to the image acquisition module, the image acquisition module transmits image data to the image processing module and then carries out convolution processing through the convolution neural network, the position of the electrode end of the piece to be detected is rapidly acquired, the acquired electrode end position is transmitted to the control module through the data transmission module, and at the moment, the control module can control the work of the adjusting cylinder, so that the bearing disc can move in the X-axis and Y-axis directions, the position of the electrode end is adjusted to the position below a microscope, and the piece to be detected can be conveniently observed by the microscope;

2. according to the invention, air at the bottoms of wafers and the like on the bearing plate can be sucked out through the vacuum suction head through the arranged vacuum pump, so that the height of the bearing plate can be adjusted by adjusting the suction force of the vacuum pump, a microscope can conveniently and quickly focus, and the vacuum suction head is utilized to carry out vacuum adsorption positioning on the wafers;

3. according to the invention, the adjusting plate can automatically drive the bearing disc to perform position adjustment under the action of the adjusting cylinder, and the lifting spring at the top of the adjusting plate can elastically support the bearing disc, so that the height of the bearing disc is adjusted by matching with a vacuum pump;

4. according to the invention, the clamping degree of the locking plate and the sliding block can be adjusted under the action of the locking screw through the arranged locking plate, when the position of the CNN camera needs to be adjusted, the locking screw can be directly unscrewed, the locking plate moves upwards under the action of the return spring, the locking plate is far away from the acquisition plate, and the sliding block can smoothly slide under the action of the fine adjustment screw rod to adjust the position of the CNN camera.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic view of the internal structure of the collecting plate according to the present invention;

FIG. 3 is an enlarged schematic view of the structure at A in FIG. 2 according to the present invention;

FIG. 4 is a schematic view of the internal structure of the probe station body according to the present invention;

FIG. 5 is an enlarged view of the structure at B in FIG. 4 according to the present invention;

FIG. 6 is a schematic diagram of the working process of the present invention.

In the figure: 1. a probe station main body; 2. a microscope; 3. a lifting platform; 4. a screw motor; 5. lifting the upright post; 6. a movable base; 7. a transmission screw rod; 8. a manual adjustment handle; 9. fine adjustment of the screw rod; 10. a door panel; 11. collecting a plate; 12. a sliding groove; 13. a locking plate; 14. an observation tank; 15. a probe head; 16. a probe base; 17. a slider; 18. locking the screw; 19. a return spring; 20. a slide rail; 21. a vacuum suction head; 22. a carrier tray; 23. pulling the disc; 24. connecting the rotating shaft; 25. an image acquisition module; 26. a vacuum pump; 27. connecting an air pipe; 28. a suction head bracket; 29. a lift spring; 30. a fixing ring; 31. an adjusting cylinder; 32. an image processing module; 33. a convolutional neural network; 34. a data transmission module; 35. a control module; 36. a CNN camera; 37. an adjusting plate.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

As shown in fig. 1 to 3, a high and low temperature probe station testing apparatus includes: the probe station comprises a probe station body 1, wherein a collection plate 11 is installed at the front end of the probe station body 1, a sliding groove 12 is formed in the collection plate 11, a sliding block 17 is arranged in the sliding groove 12, a return spring 19 is arranged at the top of the sliding block 17, a locking screw 18 is arranged on the inner side of the return spring 19, a locking plate 13 is installed at the top of the return spring 19, the locking screw 18 sequentially penetrates through the locking plate 13 and the sliding block 17, the locking plate 13 is elastically connected with the sliding block 17 through the return spring 19, the locking plate 13 and the sliding block 17 form a semi-enclosed structure, a fine adjustment screw 9 is installed on the right side of the sliding block 17, the tail end of the fine adjustment screw 9 is connected with a manual adjustment handle 8, a CNN camera 36 is installed below the sliding block 17, the sliding block 17 slides in the sliding groove 12 through the fine adjustment screw 9, a bearing is installed between the sliding block 17 and the fine adjustment screw 9, and the fine adjustment screw 9 is in threaded connection with the collection plate 11; the tight degree of clenching of locking plate 13 and sliding block 17 can be adjusted under the effect of locking screw 18 through the locking plate 13 that sets up, when needing to adjust the position of CNN camera 36, locking screw 18 can be directly unscrewed, locking plate 13 moves up under the effect of reset spring 19, acquisition board 11 is kept away from to locking plate 13, sliding block 17 can slide smoothly under the effect of fine setting screw 9, adjust the position of CNN camera 36, observation groove 14, it is installed in the middle of the top of probe platform main part 1, be provided with probe base 16 around observation groove 14, and probe head 15 is installed to the output of probe base 16, microscope 2, it installs the top at observation groove 14, elevating platform 3 is installed at the top of microscope 2, the rear end of elevating platform 3 is connected with lift stand 5, and the below of lift stand 5 is fixed with movable base 6, the inside of movable base 6 is worn to be equipped with transmission lead screw 7, and the input of transmission lead screw 7 is installed motor 4, movable base 6 realizes moving about on transmission lead screw 7, and transmission lead screw 7 and lead screw 4 are connected with the lead screw motor.

As shown in fig. 4 and 5, a high and low temperature probe station testing apparatus includes: the door plate 10 is installed at the rear end of the CNN camera 36, the connecting rotating shaft 24 penetrates through the door plate 10, the door plate 10 rotates in the probe station main body 1 through the connecting rotating shaft 24, and the pull disc 23 slides in the probe station main body 1 through the sliding rail 20; a pull disc 23 installed inside the probe station body 1, slide rails 20 installed on both left and right sides of the pull disc 23, a bearing disc 22 installed inside the pull disc 23, and the surface of the bearing plate 22 is provided with a plurality of micro holes which are evenly distributed at equal intervals, an adjusting plate 37 is arranged below the bearing plate 22, and the adjusting cylinder 31 is connected around the adjusting plate 37, the lifting spring 29 is installed between the bearing disc 22 and the adjusting plate 37, the bearing disc 22 is elastically connected with the adjusting plate 37 through the lifting spring 29, the adjusting plate 37 forms a telescopic structure with the pull disc 23 through the adjusting cylinder 31, and the pulling disk 23 and the bearing disk 22 form a semi-enclosed structure, and under the action of the adjusting cylinder 31 through the arranged adjusting plate 37, can automatically drive the bearing tray 22 to adjust the position, and the lifting spring 29 on the top of the adjusting plate 37 can elastically support the bearing tray 22, so as to adjust the height of the carrier tray 22 in cooperation with the vacuum pump 26, a fixing ring 30 is provided below the adjusting plate 37, a suction head bracket 28 is fixed in the fixing ring 30, a vacuum suction head 21 is arranged at the top of the suction head bracket 28, a connecting air pipe 27 is arranged at the input end of the vacuum suction head 21, the tail end of the connecting air pipe 27 is connected with a vacuum pump 26, the vacuum suction head 21 is communicated with the vacuum pump 26 through the connecting air pipe 27, the vacuum suction head 21 penetrates through the interior of the pull disc 23, and the vacuum nozzles 21 are equally spaced along the surface of the nozzle holder 28, while the nozzle holder 28 and the carrier plate 22 are parallel to each other, the vacuum pump 26 can suck the air at the bottom of the wafer on the susceptor 22 through the vacuum suction head 21, the height of the carrier tray 22 can be adjusted by adjusting the suction force of the vacuum pump 26, so that the microscope 2 can conveniently focus quickly, and the vacuum suction head 21 is used for carrying out vacuum adsorption positioning on the wafer.

As shown in fig. 6, a high and low temperature probe station testing apparatus includes: the image acquisition module 25 is installed at the output end of the CNN camera 36, the output end of the image acquisition module 25 is connected with the image processing module 32, the output end of the image processing module 32 is connected with the convolutional neural network 33, the output end of the convolutional neural network 33 is connected with the data transmission module 34, the output end of the data transmission module 34 is connected with the control module 35, the CNN camera 36 is electrically connected with the image acquisition module 25, the image processing module 32, the convolutional neural network 33, the data transmission module 34 and the control module 35 realize data transmission through API ports in sequence, and the control module 35 is electrically connected with the adjusting cylinder 31; can carry out position determination to placing the wafer etc. on bearing the dish 22 through the CNN camera 36 that sets up, and can transmit the picture of shooing acquireing to image acquisition module 25, image acquisition module 25 transmits image data to image processing module 32 after, carry out convolution through convolution neural network 33, acquire the electrode tip position of awaiting measuring fast, the electrode tip position that will acquire passes through data transmission module 34 and transmits to control module 35, the steerable regulation cylinder 31 of control module 35 works this moment, thereby make and bear dish 22 and remove in X axle and Y axle direction, adjust the electrode tip position to microscope 2's below, make things convenient for microscope 2 to observe the awaiting measuring piece.

The working principle is as follows: when the high and low temperature probe station testing device is used, firstly, before and after the high and low temperature probe station testing device is used, the control module 35 controls the adjusting cylinder 31 to work, the adjusting plate 37 is pushed by the adjusting cylinder 31 to reset, the bearing disc 22 is positioned at the central position, after the door plate 10 is opened, the pull disc 23 is pulled to slide, the bearing disc 22 is positioned below the collecting plate 11, after the wafer is placed at the top of the bearing disc 22, the CNN camera 36 is started, and the CNN camera 36 shoots the wafer; secondly, the shot and obtained picture is transmitted to an image obtaining module 25, the image obtaining module 25 transmits image data to an image processing module 32, the image data is subjected to convolution processing through a convolution neural network 33, the bearing disc 22 is divided into a plurality of frames when the convolution neural network 33 performs convolution processing on the image, each group of frames are marked in sequence, the number of the frame with the electrode is extracted, a control module 35 automatically controls the adjusting cylinder 31 to work through the number data, so that the bearing disc 22 moves in the X-axis direction and the Y-axis direction, the position of the electrode end is adjusted to the position below the microscope 2, the microscope 2 can conveniently observe a to-be-detected piece, after each observation is completed, the adjusting cylinder 31 is reset, the position of the next group of electrodes is selected and adjusted, and therefore the problem that the equipment cannot be accurately positioned due to different initial positions is avoided; then, after the pull disc 23 enters the probe station main body 1, the vacuum pump 26 is started at the same time, air at the bottom of the wafer and the like on the bearing disc 22 is sucked out through the vacuum suction head 21, at the moment, the lifting spring 29 is compressed inwards, the bearing disc 22 is continuously supported by the reverse elastic acting force of the lifting spring 29, the height of the bearing disc 22 is adjusted by adjusting the suction force of the vacuum pump 26, and a user can conveniently focus and observe the electrode position through the microscope 2; finally, when manual connection is needed, the locking screw 18 can be unscrewed, the locking plate 13 moves upwards under the action of the return spring 19, the locking plate 13 is far away from the acquisition plate 11, the sliding block 17 can smoothly slide under the action of the fine adjustment screw 9, after the position of the CNN camera 36 is adjusted, the position of the bearing disc 22 is directly adjusted by manually starting the adjusting cylinder 31, the lead screw motor 4 is started to drive the microscope 2 to move on the transmission lead screw 7, and the existing high-temperature and low-temperature equipment is installed inside the probe station main body 1 in a matching mode, so that the environment adjustment of the to-be-measured piece is met.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A high and low temperature probe station testing device is characterized by comprising:

the probe table comprises a probe table main body (1), wherein a collection plate (11) is installed at the front end of the probe table main body (1), a sliding groove (12) is formed in the collection plate (11), a sliding block (17) is arranged in the sliding groove (12), a return spring (19) is arranged at the top of the sliding block (17), a locking screw (18) is arranged on the inner side of the return spring (19), a locking plate (13) is installed at the top of the return spring (19), a fine adjustment screw (9) is installed on the right side of the sliding block (17), a manual adjusting handle (8) is connected to the tail end of the fine adjustment screw (9), and a CNN camera (36) is installed below the sliding block (17);

the image acquisition module (25) is installed at the output end of the CNN camera (36), the output end of the image acquisition module (25) is connected with the image processing module (32), the output end of the image processing module (32) is connected with the convolutional neural network (33), the output end of the convolutional neural network (33) is connected with the data transmission module (34), and the output end of the data transmission module (34) is connected with the control module (35);

the door plate (10) is installed at the rear end of the CNN camera (36), and a joint rotating shaft (24) penetrates through the interior of the door plate (10);

draw set (23), it is installed the inside of probe station main part (1), slide rail (20) are all installed to the left and right sides of drawing set (23), the internally mounted of drawing set (23) bears set (22), and bears the surface of set (22) and set up a plurality of equidistance evenly distributed's micropore, bear the below of set (22) and install regulating plate (37), and be connected with all around regulating cylinder (31) regulating plate (37), bear and install lifting spring (29) between set (22) and regulating plate (37), the below of regulating plate (37) is provided with solid fixed ring (30), and the inside of solid fixed ring (30) is fixed with suction head support (28), vacuum suction head (21) is installed at the top of suction head support (28), connection trachea (27) are installed to the input of vacuum suction head (21), and the end-to-end connection of connecting trachea (27) has vacuum pump (26).

2. The high and low temperature probe station testing device according to claim 1, wherein the probe station main body (1) is further provided with:

an observation groove (14) is arranged in the middle of the top of the probe station main body (1), a probe base (16) is arranged around the observation groove (14), and a probe head (15) is arranged at the output end of the probe base (16).

3. The high and low temperature probe station testing device according to claim 2, wherein the observation tank (14) is further provided with:

microscope (2), it is installed the top of observation groove (14), elevating platform (3) are installed at the top of microscope (2), the rear end of elevating platform (3) is connected with lift stand (5), and the below of lift stand (5) is fixed with movable base (6), transmission lead screw (7) are worn to be equipped with in the inside of movable base (6), and lead screw motor (4) are installed to the input of transmission lead screw (7).

4. The high and low temperature probe station testing device according to claim 3, wherein the movable base (6) moves left and right on the transmission screw rod (7), and the transmission screw rod (7) is connected with the screw rod motor (4) in a key mode.

5. The high and low temperature probe station testing device according to claim 1, wherein the sliding block (17) is slidably moved in the sliding groove (12) through a fine adjustment screw (9), a bearing is installed between the sliding block (17) and the fine adjustment screw (9), and the fine adjustment screw (9) is in threaded connection with the collecting plate (11).

6. The high and low temperature probe station testing device according to claim 1, wherein the locking screw (18) penetrates through the locking plate (13) and the sliding block (17) in sequence, the locking plate (13) is elastically connected with the sliding block (17) through a return spring (19), and the locking plate (13) and the sliding block (17) form a semi-enclosed structure.

7. The high and low temperature probe station testing device according to claim 1, wherein the door plate (10) rotates in the probe station main body (1) through a connecting rotating shaft (24), and the pull disc (23) slides in the probe station main body (1) through a sliding rail (20).

8. A high and low temperature probe station testing device according to claim 1, characterized in that the vacuum suction heads (21) are communicated with the vacuum pump (26) through a connecting air pipe (27), the vacuum suction heads (21) penetrate through the interior of the pull plate (23), and the vacuum suction heads (21) are uniformly distributed along the surface of the suction head bracket (28) at equal intervals, and the suction head bracket (28) and the bearing plate (22) are parallel to each other.

9. The high and low temperature probe station testing device according to claim 1, wherein the bearing plate (22) is elastically connected with the adjusting plate (37) through a lifting spring (29), the adjusting plate (37) forms a telescopic structure with the pulling plate (23) through an adjusting cylinder (31), and the pulling plate (23) forms a semi-enclosed structure with the bearing plate (22).

10. The high and low temperature probe station testing device according to claim 1, wherein the CNN camera (36) is electrically connected with the image acquisition module (25), and the image acquisition module (25), the image processing module (32), the convolutional neural network (33), the data transmission module (34) and the control module (35) sequentially realize data transmission through API ports, and the data transmission is realized through API ports

The control module (35) is electrically connected with the adjusting cylinder (31).