CN116107175A - Compact multi-axis precision motion platform - Google Patents

Abstract

The invention discloses a compact multi-axis precision motion platform; the device comprises a first-stage motion platform, a second-stage motion platform and a third-stage motion platform from bottom to top. The primary motion stage is an x-axis linear motion stage, the secondary motion stage is an Rx rotary motion stage, and the tertiary motion stage is a Y, Z linear motion stage and an Rz rotary motion stage. The motion platform has the characteristics of compact structure, large motion stroke, small volume occupation and strong installation adaptability, and suitable actuators are arranged as driving, so that the motion platform has high motion precision and high robustness on each motion axis, and simultaneously has low power consumption, no magnetism, low heat and high reliability.

Description

Compact multi-axis precision motion platform

Technical Field

The invention relates to the technical field of precision motion tables, in particular to a compact multi-axis precision motion table.

Background

With the improvement of the integration level and the continuous miniaturization of the size of the optical detection equipment, higher requirements are put on the detection technology and the detection precision. Focused ion beam detection (FIB)/electron beam detection (EBI) is regarded as a new generation of optical detection devices because of its advantages of high detection speed and high detection sensitivity. In the high-precision positioning system of the optical detection equipment, the stroke of the motion platform is usually in the order of tens of millimeters, the precision reaches the nanometer and sub-nanometer level, and meanwhile, the motion platform is limited by factors such as a working vacuum space, working power consumption, working stability, light structure and the like, so that new requirements are put on the structural arrangement and the actuating mode of the multi-axis motion platform.

The optical inspection apparatus typically includes a multi-axis motion stage therein to enable dynamic compensation of adjustment inspection stage accuracy and leveling focus exposure. The working space is utilized to the maximum extent to realize large-stroke movement, the working condition of the movement platform and the control precision of the movement platform are considered, and the compact multi-axis precision movement platform with high space utilization rate is designed to have important significance.

Disclosure of Invention

In order to solve the design requirement of limited space and large movement stroke of the multi-axis precise movement table, the invention aims to provide a compact multi-axis precise movement table applied to double-beam detection equipment, which can realize X-axis, Y-axis, Z-axis linear movement and R-axis linear movement _X Shaft, R _Z The shaft rotates. The motion platform has the characteristics of compact structure, large motion stroke, small volume occupation and strong installation adaptability, and adopts the piezoelectric actuator as a driving module, so that the motion platform has high motion precision and high robustness on each motion axis, and simultaneously has low power consumption, no magnetism, low heat and high reliability.

The technical scheme of the invention is specifically introduced as follows.

A compact multi-axis precision motion platform comprises a primary motion platform, a secondary motion platform and a tertiary motion platform, and simultaneously comprises a bottom frame, a middle frame, a rotating frame and a top frame;

the first-stage motion platform comprises two X-direction linear guide rails, an X-direction linear driving module and an X-direction ceramic block; the X-direction linear guide rails are crossed roller guide rails, two guide rails in each set of crossed roller guide rails are respectively and fixedly connected with the middle frame and the bottom frame, the two guide rails are connected through crossed rollers so as to realize sliding connection between the middle frame and the bottom frame, the X-direction ceramic blocks are fixedly arranged at the bottom of the middle frame, the X-direction linear driving module is fixedly arranged on the bottom frame, and the movement of the middle frame relative to the bottom frame in the X direction is realized through contact friction between the X-direction linear driving module and the X-direction ceramic blocks;

the secondary motion platform comprises a rotary support, two rotary supports, an Rx directional rotary driving module, two inner arc guide rails, two outer arc guide rails and a rotary ceramic block; the rotary support is fixedly connected with the middle frame, two inner arc guide rails are fixedly installed on the rotary support, the rotary ceramic block is fixedly connected with the rotary frame, two outer arc guide rails are installed on the rotary ceramic block, and the two inner arc guide rails and the two outer arc guide rails are installed through crossed rollers to form two sets of crossed roller guide rails, so that sliding connection is formed between the inner arc guide rails and the outer arc guide rails; the rotary support is arranged on two sides of the middle frame, the Rx-direction rotary driving modules are respectively arranged on the rotary support, and the Rx-direction rotary driving modules are respectively in contact friction with the rotary ceramic blocks to realize arc-shaped rotation of the rotary frame relative to the middle frame in the Rx direction;

the three-stage motion platform comprises a first Y-direction linear inner guide rail, a second Y-direction linear inner guide rail, a Y-direction linear driving module, a Y-direction ceramic block, a Z-direction linear guide rail, a Z-direction motion slide block, a Z-direction linear driving module, a Z-direction ceramic block, a spring traction mechanism and an Rz-direction rotary driving module;

the Y-direction linear inner guide rail and the Y-direction ceramic block are arranged on the rotating frame, and the Y-direction linear inner guide rail and the Y-direction linear driving module are arranged on the top frame; the Y-direction linear inner guide rail is connected with the Y-direction linear inner guide rail through crossed rollers to form two sets of crossed roller guide rails, so that sliding connection is formed between the rotating frame and the top frame, and the movement of the top frame relative to the rotating frame in the Y direction is realized through contact friction between the Y-direction linear driving module and the Y-direction ceramic block;

the Z-direction linear guide rail and the Z-direction linear driving module are arranged on the top frame; the Z-direction linear guide rail is provided with a Z-direction moving slide block, the Z-direction moving slide block is provided with a Z-direction ceramic block and an Rz-direction rotary driving module, the Z-direction moving slide block moves in the Z direction relative to the top frame through contact friction between the Z-direction linear driving module and the Z-direction ceramic block, the spring traction mechanism is connected with the Z-direction moving slide block, the force output direction of the spring traction mechanism is parallel to the moving direction of the Z-direction moving slide block, the Z-direction moving slide block is prevented from deflecting or clamping, and the Rz-direction rotary driving module is an Rz-direction rotary motor.

In the invention, the inner arc guide rail consists of two sections of small arc guide rails.

In the invention, the spring traction mechanism comprises a clockwork spring, a clockwork spring bracket and a spring clamping block, one end of the clockwork spring is fixed on the clockwork spring bracket, the other end of the clockwork spring is fixed on the spring clamping block at the bottom of the top frame, and the spring clamping block is connected with the Z-direction movement sliding block.

In the invention, a Z-direction limiting block is also arranged on the top frame.

In the invention, the X-direction linear driving module, the Rz-direction rotary driving module, the Y-direction linear driving module, the Z-direction linear driving module and the Rz-direction rotary driving module adopt piezoelectric actuators.

The invention also provides a grating ruler for detecting the linear displacement or the angular displacement generated in the linear motion and the rotary motion of the primary motion platform, the secondary motion platform and the tertiary motion platform.

Compared with the prior art, the invention has the beneficial effects that:

in the multi-axis motion platform structure, the working space is fully utilized under the requirement of realizing large-stroke motion, and meanwhile, the light design requirement and the working power consumption requirement are considered, so that the multi-axis motion platform structure is compact in structural design and has high motion precision and stability; has good economic and social benefits.

Drawings

FIG. 1 is a schematic diagram of a compact multi-axis precision motion stage according to the present invention.

Fig. 2 is a schematic diagram of a first stage motion stage of a compact multi-axis precision motion stage according to the present invention.

Fig. 3 is a Z-view of a stage structure of a compact multi-axis precision motion stage of the present invention.

Fig. 4 is a schematic diagram of a compact multi-axis precision motion stage secondary motion stage structure according to the present invention.

Fig. 5 is a schematic diagram of a three-stage motion stage of a compact multi-axis precision motion stage according to the present invention.

Fig. 6 is a schematic diagram of a combination structure of a compact multi-axis precision motion stage two-stage motion stage and three-stage motion stage according to the present invention.

Reference numerals in the drawings: 1-primary motion stage, 2-secondary motion stage, 3-tertiary motion stage, 4-rotary support, 11-bottom frame, 13-middle frame, 15-inner arc guide rail, 16-X direction linear driving module, 22-rotary frame, 24-outer arc guide rail, 31-Y direction linear driving module, 32-Z direction linear driving module, 33-Rz direction rotary driving module, 34-top frame, 35-Z direction linear guide rail, 36-Z direction motion slide block, 37-spring traction mechanism, 111-X direction guide rail jackscrew, 112-X direction grating ruler, 121, 122-X direction linear guide rail, 131-rotary support positioning hole, 141, 142-rotary support, 1411-rotary grating positioning hole, 151, 152-small arc guide rail, 211, 212-Rz direction rotary driving module, 221-rotary frame positioning hole, 222-Y direction ceramic block, 223-Y direction grating ruler steel belt, 231, 232-rotary ceramic block, 2311-rotary ceramic block jackscrew, 2312-outer arc guide positioning hole, 251, 252-first Y direction linear inner guide rail, 341-Z direction grating ruler fixing block, 342-Z direction linear guide rail fixing block, 343-Z direction linear driving module fixing block, 344-Y direction linear driving module fixing block, 345-Z direction limiting block, 361-Rz direction rotary driving module fixing block, 362-spring clamping block, 363-Z direction grating ruler, 371-spring, 372-spring bracket, 381-Y direction grating ruler, 382-Y direction grating ruler fixing block, 391, 392-a second Y-directed linear inner rail.

Detailed Description

It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be combined with each other. In order to meet the design requirement of the working environment of the ultra-precise vacuum motion platform, the piezoelectric actuator is taken as a driving module for example, and the technical scheme of the invention is described in detail below with reference to the accompanying drawings and with reference to the embodiment.

The invention provides a compact multi-shaft precision motion platform, which comprises a primary motion platform 1, a secondary motion platform 2 and a tertiary motion platform 3, and also comprises a bottom frame 11, a middle frame 13, a rotating frame 22 and a top frame 34. The first stage motion stage 1 is an X-axis linear motion stage, the second stage motion stage 2 is an Rx rotary motion stage rotating around the X-axis, and the third stage motion stage 3 is a Y, Z linear motion stage and an Rz rotary motion stage rotating around the Z-axis.

The first-stage motion stage 1 comprises two X-direction linear guide rails 121 and 122, an X-direction linear driving module 16, an X-direction ceramic block 17 and an X-direction grating ruler 112; the X-direction linear guide rails 121 and 122 are crossed roller guide rails, two guide rails in each set of crossed roller guide rails are respectively fixed with the middle frame 13 and the bottom frame 11 through screws, the two guide rails are connected through crossed rollers so as to realize sliding connection between the middle frame 13 and the bottom frame 11, the X-direction ceramic block 17 is fixedly arranged at the bottom of the middle frame 13, the X-direction linear driving module 16 is fixedly arranged on the bottom frame 11, the X-direction linear driving module 16 is contacted with the X-direction ceramic block 17, the movement of the middle frame 13 in the X direction is realized through contact friction, X-direction displacement is generated, the bottom frame 11 is further provided with X-direction guide rail jackscrews 111, inward pretightening force can be provided through the contact of the X-direction guide rail jackscrews 111 with the X-direction linear guide rails 122, the X-direction grating ruler 112 is fixed on the bottom frame 11, and the X-direction grating ruler steel belt arranged at the bottom of the middle frame 13 is matched with the X-direction linear driving module 16 so as to measure the X-direction linear displacement generated when the X-direction linear driving module 16 drives the middle frame 13 to move relative to the bottom frame 11.

The secondary motion platform 2 comprises rotary brackets 141 and 142, two rotary supports 4 and Rx-direction rotary driving modules 211 and 212, two inner arc guide rails 15, two outer arc guide rails 24 and rotary ceramic blocks 231 and 232; the rotary brackets 141, 142 are fixedly connected with the middle frame 13 by screws, and the rotary ceramic blocks 231, 232 are connected with the rotary frame 22 by rotary frame positioning holes 221; two inner arc guide rails 15 are fixedly installed on the rotary supports 141 and 142, two outer arc guide rails 24 are installed on the rotary ceramic blocks 231 and 232 through outer arc guide rail positioning holes 2312 by screws, two sets of crossed roller guide rails are formed by installing the two inner arc guide rails 15 and the two outer arc guide rails 24 through crossed rollers, and sliding connection is formed between the inner arc guide rails 15 and the outer arc guide rails 24 for Rx rotary guiding; in order to meet the movement stroke, the inner arc guide rail 15 can be formed by connecting two sections of small arc guide rails 151 and 152; the rotary ceramic block 231 is also provided with a rotary ceramic block jackscrew 2311, and the rotary ceramic block jackscrew 2311 provides pretightening force for the outer arc guide rail 24 and the inner arc guide rail 15; the rotary bracket 141 is provided with an Rx direction grating ruler through a rotary grating positioning hole 1411; the rotary support 4 is mounted on both sides of the middle frame 13 through the rotary support positioning holes 131, the Rx-direction rotary driving modules 211 and 212 are respectively mounted on the rotary support 4, the Rx-direction rotary driving modules 211 and 212 are respectively contacted with the rotary ceramic blocks 231 and 232, and the Rx-direction rotary driving modules 211 and 212 are contacted and rubbed with the rotary ceramic blocks 231 and 232 so that the rotary frame 22 rotates in an arc shape relative to the middle frame 13 in the Rx direction to generate angular displacement; the measurement of the angular displacement in the Rx direction is realized by mutually matching an Rx direction grating ruler arranged on the rotary bracket 141 and an Rx direction grating ruler steel belt arranged on the rotary ceramic block.

The three-stage moving table 3 comprises two first Y-direction linear inner guide rails 251, 252, two second Y-direction linear inner guide rails 391, 392, a Y-direction linear driving module 31, a Y-direction ceramic block 222, a Y-direction grating rule 381, a Y-direction grating rule steel belt 223, a Z-direction linear guide rail 35, a Z-direction moving slide block 36, a Z-direction linear driving module 32, a Z-direction ceramic block, a spring traction mechanism 37, a Z-direction grating rule 363 and an Rz-direction rotary driving module 33.

Two Y-direction linear inner guide rails 251, 252, a Y-direction ceramic block 222 and a Y-direction grating ruler steel belt 223 are arranged on the rotary frame 22, two Y-direction linear inner guide rails 391, 392, a Y-direction linear driving module 31 and a Y-direction grating ruler 381 are arranged on the top frame 34; the two Y-direction linear inner guide rails 251, 252 and the two Y-direction linear inner guide rails 391, 392 are connected through crossed rollers to form two sets of crossed roller guide rails so as to realize sliding connection between the rotating frame 22 and the top frame 34, the Y-direction linear driving module 31 is fixed on the top frame 34 through the Y-direction linear driving module fixing block 344, and the Y-direction linear driving module 31 is contacted and rubbed with the Y-direction ceramic block 222 so that the top frame 34 moves in the Y direction relative to the rotating frame 22 to generate Y-direction displacement; the magnitude of the linear displacement in the Y direction can be achieved by measuring the Y-direction grating rule 381 fixed on one side of the top frame 34 by the Y-direction grating rule fixing block 382 in cooperation with the Y-direction grating rule steel belt 223 on the rotating frame 22.

The Z-direction linear guide rail 35, the Z-direction linear driving module 32 and the Z-direction grating ruler 363 are respectively arranged on the top frame 34 through a Z-direction linear guide rail fixed block 342, a Z-direction linear driving module fixed block 343 and a Z-direction grating ruler fixed block 341; the Z-direction linear guide rail 35 is provided with a Z-direction moving slide block 36, a Z-direction ceramic block is arranged on the Z-direction moving slide block 36, and the Z-direction moving slide block 36 is displaced in the Z direction relative to the top frame 34 due to contact friction between the Z-direction linear driving module 32 and the Z-direction ceramic block; the spring traction mechanism 37 comprises a clockwork spring 371, a clockwork spring bracket 372 and a spring clamping block 362, one end of the clockwork spring 371 is fixed on the clockwork spring bracket 372 arranged on the top frame 34, the other end of the clockwork spring 371 is fixed on the spring clamping block 362 at the bottom of the top frame 34, the spring clamping block 362 is connected with the Z-direction moving sliding block 36, and the output direction of the spring traction mechanism 37 is parallel to the moving direction of the Z-direction moving sliding block 36, so that the Z-direction moving sliding block 36 is prevented from deflecting or being blocked; a Z-direction limiting block 345 is further arranged above the top frame 34 to limit the movement limit position of the Z-direction movement sliding block 36 in the Z direction; the linear displacement of the Z-direction moving slide 36 relative to the Z-direction of the top frame 34 is realized by the cooperation measurement of a Z-direction grating scale 363 mounted on the top frame and a Z-direction grating scale steel belt mounted on the Z-direction moving slide 36.

The Rz-direction rotation driving module 33 is mounted on the Z-direction movement slider 36 through the Rz-direction rotation driving module fixing block 361, and the Rz-direction rotation driving module 33 is an independent rotation module that generates an angular displacement by its own Rz-direction rotation movement, which is measured by an Rz-direction grating scale provided inside the Rz-direction rotation driving module.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments in accordance with the present application. The relative arrangement of the components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present application unless it is specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective parts shown in the drawings are not drawn in actual scale for convenience of description. Techniques, methods, and apparatus known to one of ordinary skill in the relevant art may not be discussed in detail, but should be considered part of the specification where appropriate. In all examples shown and discussed herein, any specific values should be construed as merely illustrative, and not a limitation.

Spatially relative terms, such as "above … …," "above … …," "upper surface at … …," "above," X-direction, Y-direction, rx, and the like, may be used herein for ease of description to describe one device or feature's spatial location relative to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the figures.

In addition, the terms "first", "second", etc. are used to define the components, and are merely for convenience of distinguishing the corresponding components, and unless otherwise stated, the terms have no special meaning, and thus should not be construed as limiting the scope of the present application.

The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (6)

1. The compact multi-axis precision motion platform is characterized by comprising a primary motion platform (1), a secondary motion platform (2) and a tertiary motion platform (3), and simultaneously comprising a bottom frame (11), a middle frame (13), a rotating frame (22) and a top frame (34);

the first-stage motion platform (1) comprises two X-direction linear guide rails (121) and (122), an X-direction linear driving module (16) and an X-direction ceramic block (17); the X-direction linear guide rails (121) and (122) are crossed roller guide rails, two guide rails in each set of crossed roller guide rails are respectively and fixedly connected with the middle frame (13) and the bottom frame (11), the two guide rails are connected through crossed rollers so as to realize sliding connection between the middle frame (13) and the bottom frame (11), the X-direction ceramic block (17) is fixedly arranged at the bottom of the middle frame (13), the X-direction linear driving module (16) is fixedly arranged on the bottom frame (11), and the movement of the middle frame (13) relative to the bottom frame (11) in the X direction is realized through contact friction between the X-direction linear driving module (16) and the X-direction ceramic block (17);

the secondary motion platform (2) comprises rotary supports (141) and (142), two rotary supports (4), rx-direction rotary driving blocks (211) and (212), two inner arc guide rails (15), two outer arc guide rails (24) and rotary ceramic blocks (231) and (232); the rotary supports (141, 142) are fixedly connected with the middle frame (13), two inner arc-shaped guide rails (15) are fixedly installed on the rotary supports (141, 142), the rotary ceramic blocks (231, 232) are fixedly connected with the rotary frame (22), two outer arc-shaped guide rails (24) are installed on the rotary ceramic blocks (231, 232), the two inner arc-shaped guide rails (15) and the two outer arc-shaped guide rails (24) are installed through crossed rollers, and two sets of crossed roller guide rails are formed, so that sliding connection is formed between the inner arc-shaped guide rails (15) and the outer arc-shaped guide rails (24); the rotary support (4) is arranged on two sides of the middle frame (13), the Rx direction rotary driving modules (211) and (212) are respectively arranged on the rotary support (4), and the contact friction between the Rx direction rotary driving modules (211) and (212) and the rotary ceramic blocks (231) and (232) respectively realizes the arc-shaped rotation of the rotary frame (22) relative to the middle frame (13) in the Rx direction;

the three-stage motion table (3) comprises first Y-direction linear inner guide rails (251) and (252), second Y-direction linear inner guide rails (391) and (392), a Y-direction linear driving module (31), a Y-direction ceramic block (222), a Z-direction linear guide rail (35), a Z-direction motion sliding block (36), a Z-direction linear driving module (32), a Z-direction ceramic block, a spring traction mechanism (37) and an Rz-direction rotary driving module (33);

the Y-direction linear inner guide rails (251), (252) and the Y-direction ceramic blocks (222) are arranged on the rotary frame (22), and the Y-direction linear inner guide rails (391), (392) and the Y-direction linear driving module (31) are arranged on the top frame (34); the Y-direction linear inner guide rails (251, 252) and the Y-direction linear inner guide rails (391, 392) are connected through crossed rollers to form two sets of crossed roller guide rails, so that sliding connection is formed between the rotating frame (22) and the top frame (34), and the movement of the top frame (34) relative to the rotating frame (22) in the Y direction is realized through contact friction between the Y-direction linear driving module (31) and the Y-direction ceramic block (222);

the Z-direction linear guide rail (35) and the Z-direction linear driving module (32) are arranged on the top frame (34); the Z-direction linear guide rail (35) is provided with a Z-direction moving slide block (36), the Z-direction moving slide block (36) is provided with a Z-direction ceramic block and an Rz-direction rotary driving module (33), the Z-direction moving slide block (36) moves relative to the top frame (34) in the Z direction through contact friction between the Z-direction linear driving module (32) and the Z-direction ceramic block, a spring traction mechanism (37) is connected with the Z-direction moving slide block (36), the output direction of the spring traction mechanism (37) is parallel to the moving direction of the Z-direction moving slide block (36), the Z-direction moving slide block (36) is prevented from deflecting or being blocked, and the Rz-direction rotary driving module (33) is an Rz-direction rotary motor.

2. Compact multi-axis precision motion stage according to claim 1, characterized in that the inner arc guide rail (15) consists of two small arc guide rails (151) (152).

3. The compact multi-axis precision motion stage according to claim 1, wherein the spring traction mechanism (37) comprises a clockwork spring (371), a clockwork spring bracket (372) and a spring clamp block (362), one end of the clockwork spring (371) is fixed on the clockwork spring bracket (372), the other end is fixed on the spring clamp block (362) at the bottom of the top frame 34, and the spring clamp block (362) is connected with the Z-direction motion slide block (36).

4. The compact multi-axis precision motion stage according to claim 1, characterized in that a Z-direction stopper (345) is also arranged on the top frame (34).

5. The compact multi-axis precision motion stage according to claim 1, wherein the X-direction linear drive module (16), the Rz-direction rotary drive module (211) (212), the Y-direction linear drive module (31), the Z-direction linear drive module (32) and the Rz-direction rotary drive module (33) employ piezoelectric actuators.

6. The compact multi-axis precision motion stage according to claim 1, further comprising a grating scale for detecting linear displacement or angular displacement generated in the linear motion and the rotational motion of the primary motion stage (1), the secondary motion stage (2), and the tertiary motion stage (3), respectively.

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